WO2008133074A1 - 質量分析計の制御方法及び質量分析計 - Google Patents

質量分析計の制御方法及び質量分析計 Download PDF

Info

Publication number
WO2008133074A1
WO2008133074A1 PCT/JP2008/057248 JP2008057248W WO2008133074A1 WO 2008133074 A1 WO2008133074 A1 WO 2008133074A1 JP 2008057248 W JP2008057248 W JP 2008057248W WO 2008133074 A1 WO2008133074 A1 WO 2008133074A1
Authority
WO
WIPO (PCT)
Prior art keywords
current
cathode electrode
cathode
gas
spectrometer
Prior art date
Application number
PCT/JP2008/057248
Other languages
English (en)
French (fr)
Inventor
Toyoaki Nakajima
Yujirou Kurokawa
Tsutomu Yuri
Ryota Tanaka
Jiro Endo
Hitomi Obise
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to DE112008001001T priority Critical patent/DE112008001001B4/de
Priority to KR1020097022738A priority patent/KR101122305B1/ko
Priority to JP2009511789A priority patent/JP5080567B2/ja
Priority to US12/595,100 priority patent/US8115166B2/en
Priority to CN2008800120148A priority patent/CN101657718B/zh
Publication of WO2008133074A1 publication Critical patent/WO2008133074A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622—Ion mobility spectrometry
    • G01N27/623—Ion mobility spectrometry combined with mass spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

　この質量分析計の制御方法は、カソード電極及びアノード電極を有するイオン源の前記カソード電極に電流を供給して被測定ガスの分子をイオン化する工程と；前記イオン源で生成されたイオンを質量電荷比ごとに選別する工程と；選別した前記イオンのイオン電流値を検出する工程と；を備えた質量分析計の制御方法であって、前記イオン電流値の検出結果に基づいて前記被測定ガスの分圧測定を行う場合には、前記カソード電極と前記アノード電極との間を流れるエミッション電流が一定となるように前記カソード電極にカソード電流を供給し；前記被測定ガスの分圧測定を行わない場合には、前記カソード電流よりも電流値の小さい定電流を前記カソード電極に供給する。
PCT/JP2008/057248 2007-04-16 2008-04-14 質量分析計の制御方法及び質量分析計 WO2008133074A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE112008001001T DE112008001001B4 (de) 2007-04-16 2008-04-14 Verfahren zur Steuerung von Massenspektrometern und Massenspektrometer
KR1020097022738A KR101122305B1 (ko) 2007-04-16 2008-04-14 질량 분석계의 제어 방법 및 질량 분석계
JP2009511789A JP5080567B2 (ja) 2007-04-16 2008-04-14 質量分析計の制御方法及び質量分析計
US12/595,100 US8115166B2 (en) 2007-04-16 2008-04-14 Method of controlling mass spectrometer and mass spectrometer
CN2008800120148A CN101657718B (zh) 2007-04-16 2008-04-14 质谱仪的控制方法和质谱仪

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-106878 2007-04-16
JP2007106878 2007-04-16

Publications (1)

Publication Number Publication Date
WO2008133074A1 true WO2008133074A1 (ja) 2008-11-06

Family

ID=39925532

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057248 WO2008133074A1 (ja) 2007-04-16 2008-04-14 質量分析計の制御方法及び質量分析計

Country Status (7)

Country Link
US (1) US8115166B2 (ja)
JP (1) JP5080567B2 (ja)
KR (1) KR101122305B1 (ja)
CN (1) CN101657718B (ja)
DE (1) DE112008001001B4 (ja)
TW (1) TWI404111B (ja)
WO (1) WO2008133074A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010106792A1 (ja) * 2009-03-18 2010-09-23 株式会社アルバック 酸素の検出方法，空気リークの判別方法，ガス成分検出装置，及び真空処理装置
CN103702498A (zh) * 2013-12-12 2014-04-02 兰州空间技术物理研究所 一种用于磁偏转质谱计的在线可调灯丝电压源电路
WO2022158430A1 (ja) 2021-01-22 2022-07-28 株式会社日立ハイテク 質量分析装置とその制御方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5080567B2 (ja) 2007-04-16 2012-11-21 株式会社アルバック 質量分析計の制御方法及び質量分析計
CN101680856A (zh) * 2007-05-15 2010-03-24 株式会社爱发科 质谱分析单元
CN103337434B (zh) * 2012-04-23 2016-04-13 江苏天瑞仪器股份有限公司 电子发生器、其制作方法和其测试装置
CN102983056B (zh) * 2012-11-29 2015-11-25 聚光科技(杭州)股份有限公司 质谱离子调谐方法
US9927317B2 (en) * 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
JP6335376B1 (ja) * 2017-08-07 2018-05-30 株式会社アルバック 四重極型質量分析計及びその感度低下の判定方法
JP2024510834A (ja) * 2021-03-24 2024-03-11 インフィコン インコーポレイティド 質量分析計用の広範囲の電子衝撃イオン源

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127687A (ja) * 1973-04-09 1974-12-06
JPH01281651A (ja) * 1988-05-09 1989-11-13 Jeol Ltd 質量分析装置用イオン源
JPH03261061A (ja) * 1990-03-09 1991-11-20 Shimadzu Corp ガスクロマトグラフ質量分析計
JPH03283252A (ja) * 1990-03-29 1991-12-13 Shimadzu Corp ガスクロマトグラフ質量分析計のイオン源
JPH08306333A (ja) * 1995-04-28 1996-11-22 Nissin Electric Co Ltd イオン源制御装置
JP2000223064A (ja) * 1999-02-03 2000-08-11 Ulvac Japan Ltd イオン源及びそのイオン源を用いた質量分析計

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1498845A1 (de) 1962-01-31 1969-05-14 Leybold Heraeus Gmbh & Co Kg Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer
JPH0485565A (ja) 1990-07-30 1992-03-18 Ricoh Co Ltd 画像形成方法
JPH05109860A (ja) 1991-10-21 1993-04-30 Hitachi Ltd 反応ガス種のモニタの可能な半導体製造装置
JP3324135B2 (ja) 1992-03-24 2002-09-17 株式会社日立製作所 モニタリング装置
JPH07151816A (ja) 1993-11-29 1995-06-16 Ulvac Japan Ltd フィラメント劣化状態測定方法及びフィラメント交換時期指示方法
GB9409953D0 (en) * 1994-05-17 1994-07-06 Fisons Plc Mass spectrometer and electron impact ion source therefor
JPH08321277A (ja) 1995-05-25 1996-12-03 Hitachi Ltd 質量分析計のキャリブレーションガス導入装置
JPH0922681A (ja) 1995-07-07 1997-01-21 Yokogawa Analytical Syst Kk 四重極質量分析計
GB9518258D0 (en) 1995-09-07 1995-11-08 Micromass Ltd Charged-Particle detectors and mass spectrometers employing the same
JP3734913B2 (ja) 1997-01-27 2006-01-11 株式会社アルバック 電離真空計制御装置
JP3200385B2 (ja) 1997-02-06 2001-08-20 富士通株式会社 真空処理方法
JPH1154083A (ja) * 1997-07-31 1999-02-26 Shimadzu Corp イオン化装置
JP3607997B2 (ja) * 1998-04-09 2005-01-05 大陽日酸株式会社 ガス中の微量不純物の分析装置
JP4136084B2 (ja) * 1998-06-29 2008-08-20 イビデン株式会社 プリント配線板
US6259210B1 (en) * 1998-07-14 2001-07-10 Applied Materials, Inc. Power control apparatus for an ION source having an indirectly heated cathode
JP2000036283A (ja) 1998-07-17 2000-02-02 Shimadzu Corp 質量分析装置
JP3450722B2 (ja) 1998-10-27 2003-09-29 キヤノン株式会社 電子機器及びその電力消費削減方法、記録装置及びその電力消費削減方法
JP3677410B2 (ja) 1999-04-30 2005-08-03 株式会社日立製作所 液体クロマトグラフ質量分析装置
JP2001015060A (ja) * 1999-06-29 2001-01-19 Japan Atom Energy Res Inst 四極子質量分析計または熱陰極電離真空計の測定子用熱電子放出電流制御回路
US6777686B2 (en) * 2000-05-17 2004-08-17 Varian Semiconductor Equipment Associates, Inc. Control system for indirectly heated cathode ion source
JP2002033075A (ja) 2000-07-18 2002-01-31 Shimadzu Corp 質量分析装置
JP2002042721A (ja) 2000-07-19 2002-02-08 Anelva Corp イオン付着質量分析装置
US7355171B2 (en) * 2002-01-29 2008-04-08 Tokyo Electron Limited Method and apparatus for process monitoring and control
JP2003329647A (ja) 2002-05-13 2003-11-19 Hitachi Ltd 爆発物検知システム
JP2004028675A (ja) 2002-06-24 2004-01-29 Hitachi Ltd 危険物検知システム
JP4057896B2 (ja) 2002-11-26 2008-03-05 株式会社アルバック 異常対応型ヘリウムリークディテクタ
JP4199050B2 (ja) 2003-05-22 2008-12-17 株式会社アルバック 四重極型質量分析計とそれを有する真空装置
JP2006329662A (ja) 2005-05-23 2006-12-07 Ulvac Japan Ltd 質量分析装置およびその使用方法
JP2006352963A (ja) 2005-06-14 2006-12-28 Sharp Corp 電源供給システム、及び該電源供給システムを備えた電気機器
JP5260823B2 (ja) 2005-10-13 2013-08-14 昭和シェル石油株式会社 油圧作動油
JP4303264B2 (ja) 2006-06-26 2009-07-29 株式会社日立製作所 分析装置
US8013290B2 (en) * 2006-07-31 2011-09-06 Bruker Daltonik Gmbh Method and apparatus for avoiding undesirable mass dispersion of ions in flight
JP5080567B2 (ja) 2007-04-16 2012-11-21 株式会社アルバック 質量分析計の制御方法及び質量分析計

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127687A (ja) * 1973-04-09 1974-12-06
JPH01281651A (ja) * 1988-05-09 1989-11-13 Jeol Ltd 質量分析装置用イオン源
JPH03261061A (ja) * 1990-03-09 1991-11-20 Shimadzu Corp ガスクロマトグラフ質量分析計
JPH03283252A (ja) * 1990-03-29 1991-12-13 Shimadzu Corp ガスクロマトグラフ質量分析計のイオン源
JPH08306333A (ja) * 1995-04-28 1996-11-22 Nissin Electric Co Ltd イオン源制御装置
JP2000223064A (ja) * 1999-02-03 2000-08-11 Ulvac Japan Ltd イオン源及びそのイオン源を用いた質量分析計

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010106792A1 (ja) * 2009-03-18 2010-09-23 株式会社アルバック 酸素の検出方法，空気リークの判別方法，ガス成分検出装置，及び真空処理装置
CN102138070A (zh) * 2009-03-18 2011-07-27 株式会社爱发科 氧气的检测方法、空气泄漏的判别方法、气体成分检测装置以及真空处理装置
US8288715B2 (en) 2009-03-18 2012-10-16 Ulvac, Inc. Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus
JP5054226B2 (ja) * 2009-03-18 2012-10-24 株式会社アルバック 酸素の検出方法，空気リークの判別方法，ガス成分検出装置，及び真空処理装置
CN102138070B (zh) * 2009-03-18 2014-01-15 株式会社爱发科 氧气的检测方法、空气泄漏的判别方法、气体成分检测装置以及真空处理装置
CN103702498A (zh) * 2013-12-12 2014-04-02 兰州空间技术物理研究所 一种用于磁偏转质谱计的在线可调灯丝电压源电路
CN103702498B (zh) * 2013-12-12 2015-07-15 兰州空间技术物理研究所 一种用于磁偏转质谱计的在线可调灯丝电压源电路
WO2022158430A1 (ja) 2021-01-22 2022-07-28 株式会社日立ハイテク 質量分析装置とその制御方法

Also Published As

Publication number Publication date
TW200905716A (en) 2009-02-01
JPWO2008133074A1 (ja) 2010-07-22
KR20100003292A (ko) 2010-01-07
DE112008001001T5 (de) 2010-03-04
TWI404111B (zh) 2013-08-01
CN101657718B (zh) 2013-01-30
JP5080567B2 (ja) 2012-11-21
DE112008001001B4 (de) 2013-04-11
CN101657718A (zh) 2010-02-24
US20100133429A1 (en) 2010-06-03
US8115166B2 (en) 2012-02-14
KR101122305B1 (ko) 2012-03-21

Similar Documents

Publication Publication Date Title
WO2008133074A1 (ja) 質量分析計の制御方法及び質量分析計
US7375318B2 (en) Mass spectrometer
WO2007097919A3 (en) Mass spectrometer for trace gas leak detection with suppression of undesired ions
US9443709B2 (en) Corona ionization device and method
Walton et al. Electron-beam-generated plasmas for materials processing
TW200723338A (en) Method of operating ion source and ion implanting apparatus
TWI442041B (zh) 氣體分析器、氣體分析器修正方法、及氣體分析器用修正程式之記憶媒體
US20170074828A1 (en) Volatile organic compound sensor
EP1557667A4 (en) GAS ANALYSIS METHOD AND IONIZATION SENSOR PROVIDED FOR THE SAME
CN101789355A (zh) 一种宽动态范围的飞行时间质谱仪器及其实现方法与应用
EP2086000A3 (en) Methods and Apparatus for Reducing Noise in Mass Spectrometry
WO2005091331A3 (en) An ionization gauge
CN105493228A (zh) 分析装置
TW200722214A (en) Addition of D2 TO H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment
WO2013138188A3 (en) Corrected mass analyte values in a mass spectrum
JP2015127684A5 (ja)
US8188444B2 (en) Analytic spectrometers with non-radioactive electron sources
JP2009129868A (ja) 質量分析装置及びその調整方法
WO2005004186A3 (en) Particle detector suitable for detecting lons and electrons
WO2007097920A3 (en) High sensitivity slitless ion source mass spectrometer for trace gas leak detection
Manard et al. Differential mobility spectrometry/mass spectrometry: The design of a new mass spectrometer for real-time chemical analysis in the field
CN114088690B (zh) 一种开放环境下气体杂质的分析检测装置及方法
CN108493091B (zh) 一种高电子利用率低能电离装置、质谱系统及方法
WO2008146333A1 (ja) 質量分析装置
US20170053789A1 (en) Corona ionization apparatus and method

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880012014.8

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08740336

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009511789

Country of ref document: JP

WWE Wipo information: entry into national phase

Ref document number: 12595100

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 1120080010013

Country of ref document: DE

ENP Entry into the national phase

Ref document number: 20097022738

Country of ref document: KR

Kind code of ref document: A

RET De translation (de og part 6b)

Ref document number: 112008001001

Country of ref document: DE

Date of ref document: 20100304

Kind code of ref document: P

122 Ep: pct application non-entry in european phase

Ref document number: 08740336

Country of ref document: EP

Kind code of ref document: A1