TW571416B - Semiconductor device and method of fabricating the same - Google Patents

Semiconductor device and method of fabricating the same Download PDF

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Publication number
TW571416B
TW571416B TW91137702A TW91137702A TW571416B TW 571416 B TW571416 B TW 571416B TW 91137702 A TW91137702 A TW 91137702A TW 91137702 A TW91137702 A TW 91137702A TW 571416 B TW571416 B TW 571416B
Authority
TW
Taiwan
Prior art keywords
semiconductor device
semiconductor
metal wiring
electrode
connection terminal
Prior art date
Application number
TW91137702A
Other languages
English (en)
Chinese (zh)
Other versions
TW200305264A (en
Inventor
Yoshihiko Nemoto
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of TW200305264A publication Critical patent/TW200305264A/zh
Application granted granted Critical
Publication of TW571416B publication Critical patent/TW571416B/zh

Links

Classifications

    • H10W74/019
    • H10W72/20
    • H10W74/111
    • H10W90/00
    • H10W99/00
    • H10W70/05
    • H10W70/60
    • H10W70/65
    • H10W72/01225
    • H10W72/01551
    • H10W72/07141
    • H10W72/075
    • H10W72/07504
    • H10W72/07507
    • H10W72/07521
    • H10W72/07533
    • H10W72/07553
    • H10W72/241
    • H10W72/242
    • H10W72/251
    • H10W72/536
    • H10W72/5363
    • H10W72/5445
    • H10W72/552
    • H10W72/5524
    • H10W72/583
    • H10W72/59
    • H10W72/801
    • H10W72/932
    • H10W72/9413
    • H10W72/944
    • H10W74/00
    • H10W74/10
    • H10W74/142
    • H10W90/288
    • H10W90/722
    • H10W90/756

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Wire Bonding (AREA)
TW91137702A 2001-09-28 2002-12-27 Semiconductor device and method of fabricating the same TW571416B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001299756 2001-09-28
JP2002103684A JP4014912B2 (ja) 2001-09-28 2002-04-05 半導体装置

Publications (2)

Publication Number Publication Date
TW200305264A TW200305264A (en) 2003-10-16
TW571416B true TW571416B (en) 2004-01-11

Family

ID=26623238

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91137702A TW571416B (en) 2001-09-28 2002-12-27 Semiconductor device and method of fabricating the same

Country Status (3)

Country Link
US (2) US20030062631A1 (enExample)
JP (1) JP4014912B2 (enExample)
TW (1) TW571416B (enExample)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100536898B1 (ko) * 2003-09-04 2005-12-16 삼성전자주식회사 반도체 소자의 와이어 본딩 방법
US7425759B1 (en) * 2003-11-20 2008-09-16 Bridge Semiconductor Corporation Semiconductor chip assembly with bumped terminal and filler
JP3864952B2 (ja) * 2003-12-01 2007-01-10 セイコーエプソン株式会社 振動子デバイス及びそれを備えた電子機器並びに振動子デバイスの製造方法
US7205178B2 (en) * 2004-03-24 2007-04-17 Freescale Semiconductor, Inc. Land grid array packaged device and method of forming same
WO2006072093A2 (en) * 2004-12-30 2006-07-06 Dor Biopharma, Inc. Treatment of graft-versus-host disease and leukemia with beclomethasone dipropionate and prednisone
US7371676B2 (en) 2005-04-08 2008-05-13 Micron Technology, Inc. Method for fabricating semiconductor components with through wire interconnects
US7393770B2 (en) * 2005-05-19 2008-07-01 Micron Technology, Inc. Backside method for fabricating semiconductor components with conductive interconnects
US7768113B2 (en) * 2005-05-26 2010-08-03 Volkan Ozguz Stackable tier structure comprising prefabricated high density feedthrough
US7919844B2 (en) * 2005-05-26 2011-04-05 Aprolase Development Co., Llc Tier structure with tier frame having a feedthrough structure
WO2007004986A1 (en) * 2005-07-06 2007-01-11 Infineon Technologies Ag An integrated circuit package and a method for manufacturing an integrated circuit package
SG130061A1 (en) 2005-08-24 2007-03-20 Micron Technology Inc Microelectronic devices and microelectronic support devices, and associated assemblies and methods
US7307348B2 (en) 2005-12-07 2007-12-11 Micron Technology, Inc. Semiconductor components having through wire interconnects (TWI)
US20070216033A1 (en) * 2006-03-20 2007-09-20 Corisis David J Carrierless chip package for integrated circuit devices, and methods of making same
US7659612B2 (en) 2006-04-24 2010-02-09 Micron Technology, Inc. Semiconductor components having encapsulated through wire interconnects (TWI)
TWI314774B (en) * 2006-07-11 2009-09-11 Siliconware Precision Industries Co Ltd Semiconductor package and fabrication method thereof
KR100761468B1 (ko) 2006-07-13 2007-09-27 삼성전자주식회사 반도체 장치 및 그 형성 방법
US7969022B1 (en) * 2007-03-21 2011-06-28 Marvell International Ltd. Die-to-die wire-bonding
JP2008306128A (ja) * 2007-06-11 2008-12-18 Shinko Electric Ind Co Ltd 半導体装置およびその製造方法
JP5273956B2 (ja) * 2007-07-02 2013-08-28 スパンション エルエルシー 半導体装置の製造方法
US20090154111A1 (en) * 2007-12-17 2009-06-18 Lynch Thomas W Reticulated heat dissipation
US20090165996A1 (en) * 2007-12-26 2009-07-02 Lynch Thomas W Reticulated heat dissipation with coolant
JP5343359B2 (ja) * 2008-01-09 2013-11-13 富士通セミコンダクター株式会社 半導体装置の製造方法
US8138024B2 (en) * 2008-02-26 2012-03-20 Stats Chippac Ltd. Package system for shielding semiconductor dies from electromagnetic interference
US8189344B2 (en) 2008-06-09 2012-05-29 Stats Chippac Ltd. Integrated circuit package system for stackable devices
US7851893B2 (en) * 2008-06-10 2010-12-14 Stats Chippac, Ltd. Semiconductor device and method of connecting a shielding layer to ground through conductive vias
US8183677B2 (en) * 2008-11-26 2012-05-22 Infineon Technologies Ag Device including a semiconductor chip
US8168458B2 (en) * 2008-12-08 2012-05-01 Stats Chippac, Ltd. Semiconductor device and method of forming bond wires and stud bumps in recessed region of peripheral area around the device for electrical interconnection to other devices
JP2010141066A (ja) * 2008-12-11 2010-06-24 Rohm Co Ltd 半導体装置
JP5112275B2 (ja) * 2008-12-16 2013-01-09 新光電気工業株式会社 半導体装置及び半導体装置の製造方法
JP5588150B2 (ja) * 2009-02-06 2014-09-10 セイコーインスツル株式会社 樹脂封止型半導体装置
US8357563B2 (en) * 2010-08-10 2013-01-22 Spansion Llc Stitch bump stacking design for overall package size reduction for multiple stack
US8304900B2 (en) 2010-08-11 2012-11-06 Stats Chippac Ltd. Integrated circuit packaging system with stacked lead and method of manufacture thereof
JP6246507B2 (ja) * 2012-11-05 2017-12-13 新光電気工業株式会社 プローブカード及びその製造方法
JP5763696B2 (ja) * 2013-03-04 2015-08-12 スパンション エルエルシー 半導体装置およびその製造方法
JP6208486B2 (ja) 2013-07-19 2017-10-04 新光電気工業株式会社 プローブカード及びその製造方法
JP6092729B2 (ja) 2013-07-19 2017-03-08 新光電気工業株式会社 プローブカード及びその製造方法
JP6219227B2 (ja) * 2014-05-12 2017-10-25 東京エレクトロン株式会社 ヒータ給電機構及びステージの温度制御方法
JP6219229B2 (ja) * 2014-05-19 2017-10-25 東京エレクトロン株式会社 ヒータ給電機構
CN106486443A (zh) * 2015-08-27 2017-03-08 冠研(上海)专利技术有限公司 简易半导体芯片封装结构及其封装方法
CN106486429A (zh) * 2015-08-27 2017-03-08 冠研(上海)专利技术有限公司 半导体芯片封装结构及其封装方法
CN105514074B (zh) * 2015-12-01 2018-07-03 上海伊诺尔信息技术有限公司 智能卡芯片封装结构及其制造方法
IT201700073501A1 (it) * 2017-06-30 2018-12-30 St Microelectronics Srl Prodotto a semiconduttore e corrispondente procedimento
US10453820B2 (en) 2018-02-07 2019-10-22 Micron Technology, Inc. Semiconductor assemblies using edge stacking and methods of manufacturing the same
FR3104317A1 (fr) * 2019-12-04 2021-06-11 Stmicroelectronics (Tours) Sas Procédé de fabrication de puces électroniques
US12046525B2 (en) 2020-11-27 2024-07-23 Yibu Semiconductor Co., Ltd. Semiconductor packaging method, semiconductor assembly and electronic device comprising semiconductor assembly
US12159850B2 (en) 2020-12-25 2024-12-03 Yibu Semiconductor Co., Ltd. Semiconductor packaging method, semiconductor assembly and electronic device comprising semiconductor assembly
US12154884B2 (en) 2021-02-01 2024-11-26 Yibu Semiconductor Co., Ltd. Semiconductor packaging method, semiconductor assembly and electronic device comprising semiconductor assembly
US12500203B2 (en) 2021-02-22 2025-12-16 Yibu Semiconductor Co., Ltd. Semiconductor packaging method, semiconductor assembly and electronic device comprising semiconductor assembly

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117696A (ja) * 1983-11-30 1985-06-25 沖電気工業株式会社 Epromの実装構造
AU2309388A (en) * 1987-08-26 1989-03-31 Matsushita Electric Industrial Co., Ltd. Integrated circuit device and method of producing the same
US6072239A (en) * 1995-11-08 2000-06-06 Fujitsu Limited Device having resin package with projections
JP3007833B2 (ja) 1995-12-12 2000-02-07 富士通株式会社 半導体装置及びその製造方法及びリードフレーム及びその製造方法
JP3207738B2 (ja) * 1996-01-15 2001-09-10 株式会社東芝 樹脂封止型半導体装置及びその製造方法
JP3500015B2 (ja) 1996-09-25 2004-02-23 三洋電機株式会社 半導体装置及びその製造方法
JPH11312749A (ja) * 1998-02-25 1999-11-09 Fujitsu Ltd 半導体装置及びその製造方法及びリードフレームの製造方法
US6451624B1 (en) * 1998-06-05 2002-09-17 Micron Technology, Inc. Stackable semiconductor package having conductive layer and insulating layers and method of fabrication
JP3397725B2 (ja) * 1999-07-07 2003-04-21 沖電気工業株式会社 半導体装置、その製造方法及び半導体素子実装用テープの製造方法
US6247229B1 (en) * 1999-08-25 2001-06-19 Ankor Technology, Inc. Method of forming an integrated circuit device package using a plastic tape as a base
JP2002158312A (ja) * 2000-11-17 2002-05-31 Oki Electric Ind Co Ltd 3次元実装用半導体パッケージ、その製造方法、および半導体装置
JP3798620B2 (ja) * 2000-12-04 2006-07-19 富士通株式会社 半導体装置の製造方法
US6696320B2 (en) * 2001-09-30 2004-02-24 Intel Corporation Low profile stacked multi-chip package and method of forming same

Also Published As

Publication number Publication date
US20030062631A1 (en) 2003-04-03
TW200305264A (en) 2003-10-16
US7148576B2 (en) 2006-12-12
JP4014912B2 (ja) 2007-11-28
JP2003174120A (ja) 2003-06-20
US20050224949A1 (en) 2005-10-13

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