TW461847B - Mechanical gripper for wafer handling robots - Google Patents

Mechanical gripper for wafer handling robots Download PDF

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Publication number
TW461847B
TW461847B TW089105023A TW89105023A TW461847B TW 461847 B TW461847 B TW 461847B TW 089105023 A TW089105023 A TW 089105023A TW 89105023 A TW89105023 A TW 89105023A TW 461847 B TW461847 B TW 461847B
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TW
Taiwan
Prior art keywords
clamp
workpiece
finger
robot
wafer
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TW089105023A
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English (en)
Inventor
Satish Sundar
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Applied Materials Inc
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Publication of TW461847B publication Critical patent/TW461847B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B25J15/0206—Gripping heads and other end effectors servo-actuated comprising articulated grippers

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Description

461847
8 8 8 8 A B CD 六 經濟部智慧財產局員工消費合作社印製 申請專利範圍 - (請先閲讀背面之注意事項再填寫本頁) 5 .如申請專利範圍第4項所述之夾具腕，其中更包含： 兩夾具手指，彼此間以相互隔開之關係支撐著，並 連接至該彈簧。 6. 如申請專利範圍第1項所述之夾具腕，其中更包含： 一彎曲組件，以可移動的方式連接至該至少一夹具 孓 4匕 · 丁孑曰， 該接觸墊，耦合至該彎曲組件，該接觸墊的位置用 以在該機械臂伸出至一定程度時接附至該至少一夹具 手指，並用以將該至少一夾具手指移離該工部。 7. 如申請專利範圍第6項所述之夾具腕，其中更包含： 兩夾具手指，彼此以間隔關係支撐著，且其中該弯 曲組件被接附至該夾具手指，並經過調整使該夾具手 指在該轉移甩組件與該接觸墊接附時移離該工部。 8 .如申請專利範圍第7項所述之夾具腕，其中更包含： 一槓桿，以樞軸方式支撐至該腕殼，該槓桿的位置 能在由轉移用組件而與該槓桿接附時與該彎曲組件之 接觸墊相接附。 9.如申請專利範圍第1項所述之夾具腕，其中該至少一 夾具手指包含一第一夾具手指及一第二夹具手指，其 39 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 461847
甲孩夾具手指大約 !〇·—種夾具機械裝置，用以將一工部固 〜芝一 丁 組件，該工部處理組件耦合至一機械管、 巧 < 尽端 少包含一晶圓處理承載盤，該晶圓處理 部處理 ’並至 承載盤具有一 工部接收區，並在該末端處有一固定組 '' * 該 械装置至少包含： 至少一失具手指，與該工部之邊緣相接觸； —抵住組件，耦合至該至少一夾且$ , ~ 丁指，能 部位於該工部接收區之上時迫使該至，!、 Γ 、' 王〆一夾具 任該工部，以將該工部夾在該至少一 ^ 灰具手指 疋組件之間；及 夹具機 —槓桿設置，該槓桿設置耦合至該至 指，並在該工部處理組件及該機械臂 移離該工部。 伸出時將 在該 手指 及該 夹具 該手 (請先閱讀背面之注意事項再填寫本頁) -*νά 經濟部智慧財產局員工消費合作社印製 1K如申請專利範圍第1〇項所述之夾具機械裝置，其中 該積桿設置被調整成能因該機械臂及該工部處理組件 之相對角旋轉而呈接附狀態。 1 2 .如申請專利範圍第1 1項所述之夾具機械裝置，其中 孩至少一夾具手指以樞軸方式支撐至該工部處理組 件；並更包含一轉移用組件，該轉移用組件接附至該 機械臂，該機械臂的位置則能使當該機械臂伸出至一 本紙張尺度適用中國國家標準(CNS)A4規格(210x297公釐) ___〆 综· 461847 A8 B8 C8 ._D8 六、申請專利範圍 .定程度時接附至該至少一夾具手指，並將該至少一炎 具手指移離該工部。 1 3 .如中請專利範圍第1 2項所述之夾具機械裝置，其中 該槓桿設置更包含： 一弩曲組件，以可移動方式連接至該至少一夾具手 指；及 一接觸墊，耦合至該彎曲組件，以選擇性與該轉移 用組件相接附，該接觸墊的位置並能在該機械臂伸出 至一定程度時與該至少一夾具手指相接附，並將該至 少一夾具手指移離該工部。 1 4 .如申請專利範圍第1 3項所述之夾具機械裝置，其中 該槓桿設置更包含： 一槓桿，以樞軸方式支撐至該工部處理組件； 該槓桿，具有一端部份； 一接觸墊，耦合至該槓桿之大約端部份，以選擇性 ;« .........-r-L裝——-——：訂---------综 (請先閲讀背面之注意事項再填寫本頁) ， 置 件 位組 的用 墊移 觸轉 接該 之由 件得 組使 曲， f配 該匹 ;地 配性 匹擇 相選 件桿 組槓 用該 移與 轉其 該使 與可 經濟部智慧財產局員工消費合作社印製 附 接 之 至 開 開 臂 械 桿機。 槓該部 該在工 與以該 成，離 形附移 第 圍 範 利 專 土 GC 二r 中 如 少 至 該 成 形 時 度 程 定 接指 之 手 指具 手夾 具該 夾將 中 其 置 裝 械 機 具 夾 之 述 所 項 41 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 461847
8 8 8 8 A B CD 六、申請專利範圍 更包含： (請先閱讀背面之注意事項再填寫本頁) 兩夹具手指，彼此以間隔關係支撐著；且其中該彎 曲組件接附至該夾具手指，並能在該轉移用組件與該 接觸墊相接附時使該夾具手指移開。 1 6 .如申請專利範圍第1 3項所述之夾具機械裝置，其中 更包含一阻擋組件，接附至該工部處理組件，該阻擋 組件的位置能限制該至少一夹具手指移離該工部。 1 7. —種機械臂組件，其至少包含： 一對蛙腿型機械臂，其中該機械臂的每一者都具有 一末端，該末端則接附有一夾具腕，該夾具腕至少包 含： 一腕機殼，以樞軸方式耦合至該機械臂； 至少一夾具手指，位於該腕機殼之内；及 一抵住組件，耦合至該至少一夾具手指，以迫 使該至少一夾具手指靠住一工部； 經濟部智慧財產局員工消費合作社印製 一轉移用組件，接附至該機械臂之末端；及 一槓桿設置，連接至該至少一夹具手指，該槓桿設 置的位置能與該轉移用組件相接附，以使該至少一夾 具手指在該機械臂於伸出一定程度時移離該工部。 1 8 .如申請專利範圍第1 7項所述之機械臂組件，其中更 包含： 42 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐)
8 8 8 8 A B c D 461847 六、申請專利範圍 _ 一阻擋組件，接附至該腕機殼，該阻擋組件的位置 能限制該至少一夾具手指移離該工部。 (請先閲讀背面之注意事項再填寫本頁) 19. 一種機械人，其至少包含： 一對第一輪轂組件，可繞一第一軸旋轉； 一對磁性驅動裝置，用以驅動該輪轂組件之每一 者； 一對機械臂，該機械臂之每一者都至少包含一第一 支架及一第二支架，其中該第一支架支撐至一輪轂組 件； 一轉移用組件，位於該第二支架之每一者之内； 一工部處理組件，以樞軸方式接附至該對機械臂， 該工部處理組件至少包含： 至少一夾具手指； 一抵住組件，耦合至該至少一夾具手指，該夾具手 指則能迫使該至少一夾具手指靠住一工部； 一槓桿設置，該槓桿設置的位置能在該機械臂組件 伸出至一定程度時，使該槓桿設置為轉移用組件所接 經濟部智慧財產局員工消費合作社印製 至 出 及伸 • ’ 件 。 指組部 手臂工 具械該 夬機離 一 該拉 少在指1.置 + 該 i 具 設 、 至桿夾 W槓一 接該少 時至 附 該 將 時 度 •程 定 如 ο 2 人 械 機 之 述 所 項 9 ο 11 簧 第彈 圍 一 範為 利可 專少 請至 中 件 43 住 抵 該 中 其 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 461847 A8 B8 C8 _D8 六、申請專利範圍 21. 如申請專利範圍第 20項所述之機械人，其中更包含 一槓桿，該槓桿以樞軸方式支撐至該腕機殼。 22. 如_請專利範圍第 21項所述之機械人，其中更包 含： 一阻擋組件，接附該腕機殼，該阻擋組件的位置能 限制該至少一夹具手指移離該工部。 2 3 .如申請專利範圍第2 2項所述之機械人，其中該第一 機械臂及該第二機械臂以一相同方向旋轉時會造成兩 種獨立移動的其中一者，而該第一機械臂及該第二機 械臂以相反方向旋轉時會造成兩種獨立移動中的另一 者0 ---J---------ί、，」裝 I I (請先閲讀背面之注意事項再填寫本頁) 综 經濟部智慧財產局員工消費合作社印製 44 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐)
TW089105023A 1999-03-18 2000-03-23 Mechanical gripper for wafer handling robots TW461847B (en)

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US09/272,658 US6322312B1 (en) 1999-03-18 1999-03-18 Mechanical gripper for wafer handling robots

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US (4) US6322312B1 (zh)
EP (1) EP1037264B1 (zh)
JP (1) JP4808299B2 (zh)
KR (1) KR100696027B1 (zh)
DE (1) DE60041217D1 (zh)
TW (1) TW461847B (zh)

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TWI610397B (zh) * 2016-06-20 2018-01-01 上海新昇半導體科技有限公司 機械手臂及基板的抓取方法
CN108604563A (zh) * 2015-12-14 2018-09-28 川崎重工业株式会社 衬底搬送机器人及其运转方法
CN109585349A (zh) * 2018-11-23 2019-04-05 中国电子科技集团公司第五十五研究所 一种晶圆传输平台、高压剥离机及其工作方法
CN111941396A (zh) * 2020-08-17 2020-11-17 广东万合新材料科技有限公司 一种旋转式的机械手
CN114433444A (zh) * 2022-04-11 2022-05-06 四川上特科技有限公司 用于晶圆涂覆玻璃粉的盛料转移装置

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