FR2835337B1 - Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation - Google Patents

Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation

Info

Publication number
FR2835337B1
FR2835337B1 FR0201032A FR0201032A FR2835337B1 FR 2835337 B1 FR2835337 B1 FR 2835337B1 FR 0201032 A FR0201032 A FR 0201032A FR 0201032 A FR0201032 A FR 0201032A FR 2835337 B1 FR2835337 B1 FR 2835337B1
Authority
FR
France
Prior art keywords
semiconductor plate
guidance mark
identifying characters
characters registered
registered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0201032A
Other languages
English (en)
Other versions
FR2835337A1 (fr
Inventor
Alain Gaudon
Pierre Astegno
Jarjini Mohamed El
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Recif SA
Original Assignee
Recif SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0201032A priority Critical patent/FR2835337B1/fr
Application filed by Recif SA filed Critical Recif SA
Priority to PCT/FR2003/000255 priority patent/WO2003065287A1/fr
Priority to US10/353,845 priority patent/US6961639B2/en
Priority to EP20030715054 priority patent/EP1470523A1/fr
Priority to CA002474543A priority patent/CA2474543A1/fr
Priority to CNB038028131A priority patent/CN100347716C/zh
Priority to JP2003564804A priority patent/JP2005516311A/ja
Priority to KR10-2004-7011607A priority patent/KR20040086304A/ko
Publication of FR2835337A1 publication Critical patent/FR2835337A1/fr
Application granted granted Critical
Publication of FR2835337B1 publication Critical patent/FR2835337B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10821—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum further details of bar or optical code scanning devices
    • G06K7/10861—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum further details of bar or optical code scanning devices sensing of data fields affixed to objects or articles, e.g. coded labels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Character Input (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR0201032A 2002-01-29 2002-01-29 Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation Expired - Fee Related FR2835337B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0201032A FR2835337B1 (fr) 2002-01-29 2002-01-29 Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation
US10/353,845 US6961639B2 (en) 2002-01-29 2003-01-28 Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark
EP20030715054 EP1470523A1 (fr) 2002-01-29 2003-01-28 Procede et dispositif d'identification de caracteres inscrites sur une plaque de semi-conducteur comportantau moins une marque d'orientation
CA002474543A CA2474543A1 (fr) 2002-01-29 2003-01-28 Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportantau moins une marque d'orientation
PCT/FR2003/000255 WO2003065287A1 (fr) 2002-01-29 2003-01-28 Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportantau moins une marque d'orientation
CNB038028131A CN100347716C (zh) 2002-01-29 2003-01-28 记录在含有至少一个定向标记的半导体基片上的字符的识别方法及装置
JP2003564804A JP2005516311A (ja) 2002-01-29 2003-01-28 少なくとも１つのオリエンテーション・マーカーを含む半導体プレートに書き込まれた文字を認識するための方法および装置
KR10-2004-7011607A KR20040086304A (ko) 2002-01-29 2003-01-28 적어도 하나의 정렬 마커를 포함하는 반도체 판 위에새겨진 특징 식별 방법 및 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0201032A FR2835337B1 (fr) 2002-01-29 2002-01-29 Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation

Publications (2)

Publication Number Publication Date
FR2835337A1 FR2835337A1 (fr) 2003-08-01
FR2835337B1 true FR2835337B1 (fr) 2004-08-20

Family

ID=27619715

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0201032A Expired - Fee Related FR2835337B1 (fr) 2002-01-29 2002-01-29 Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation

Country Status (8)

Country Link
US (1) US6961639B2 (fr)
EP (1) EP1470523A1 (fr)
JP (1) JP2005516311A (fr)
KR (1) KR20040086304A (fr)
CN (1) CN100347716C (fr)
CA (1) CA2474543A1 (fr)
FR (1) FR2835337B1 (fr)
WO (1) WO2003065287A1 (fr)

Families Citing this family (10)

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US20070297885A1 (en) * 2006-06-27 2007-12-27 Jean Michel Processe Product designed to be used with handling system
KR101489963B1 (ko) 2007-12-13 2015-02-04 한국에이에스엠지니텍 주식회사 박막 증착 장치 및 이를 이용한 증착 방법
US8273178B2 (en) 2008-02-28 2012-09-25 Asm Genitech Korea Ltd. Thin film deposition apparatus and method of maintaining the same
US8315485B2 (en) * 2008-07-24 2012-11-20 Camtek Ltd. System and method for obtaining text
JP6118102B2 (ja) * 2012-12-21 2017-04-19 東京エレクトロン株式会社 基板位置検出装置及びこれを用いた基板処理装置、成膜装置
EP4275094A1 (fr) * 2021-01-11 2023-11-15 ASML Netherlands B.V. Dispositif de préhension et appareil lithographique comprenant le dispositif de préhension
JP1722253S (ja) * 2022-02-03 2022-08-12 半導体ウエハ収納カセット用把持機

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Also Published As

Publication number Publication date
CN1623161A (zh) 2005-06-01
US6961639B2 (en) 2005-11-01
KR20040086304A (ko) 2004-10-08
WO2003065287A1 (fr) 2003-08-07
CN100347716C (zh) 2007-11-07
EP1470523A1 (fr) 2004-10-27
JP2005516311A (ja) 2005-06-02
FR2835337A1 (fr) 2003-08-01
US20030219914A1 (en) 2003-11-27
CA2474543A1 (fr) 2003-08-07

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