FR2817042B1 - Procede et dispositif d'analyse de la surface d'un substrat - Google Patents

Procede et dispositif d'analyse de la surface d'un substrat

Info

Publication number
FR2817042B1
FR2817042B1 FR0015050A FR0015050A FR2817042B1 FR 2817042 B1 FR2817042 B1 FR 2817042B1 FR 0015050 A FR0015050 A FR 0015050A FR 0015050 A FR0015050 A FR 0015050A FR 2817042 B1 FR2817042 B1 FR 2817042B1
Authority
FR
France
Prior art keywords
analyzing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0015050A
Other languages
English (en)
Other versions
FR2817042A1 (fr
Inventor
Mourot Thomas Bertin
Jean Pierre Douche
Daniel Germond
Paul Henri Guering
Yves Surrel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0015050A priority Critical patent/FR2817042B1/fr
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Priority to BR0115538-5A priority patent/BR0115538A/pt
Priority to AU2002218393A priority patent/AU2002218393A1/en
Priority to KR10-2003-7006762A priority patent/KR20030045196A/ko
Priority to EP01997186A priority patent/EP1336076A1/fr
Priority to JP2002544607A priority patent/JP2004514882A/ja
Priority to CNB018193005A priority patent/CN100371677C/zh
Priority to US10/432,269 priority patent/US7430049B2/en
Priority to PCT/FR2001/003658 priority patent/WO2002042715A1/fr
Publication of FR2817042A1 publication Critical patent/FR2817042A1/fr
Application granted granted Critical
Publication of FR2817042B1 publication Critical patent/FR2817042B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
FR0015050A 2000-11-22 2000-11-22 Procede et dispositif d'analyse de la surface d'un substrat Expired - Fee Related FR2817042B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0015050A FR2817042B1 (fr) 2000-11-22 2000-11-22 Procede et dispositif d'analyse de la surface d'un substrat
AU2002218393A AU2002218393A1 (en) 2000-11-22 2001-11-21 Method and device for analysing the surface of a substrate
KR10-2003-7006762A KR20030045196A (ko) 2000-11-22 2001-11-21 기판 표면의 분석 방법 및 장치
EP01997186A EP1336076A1 (fr) 2000-11-22 2001-11-21 Procede et dispositif d'analyse de la surface d'un substrat
BR0115538-5A BR0115538A (pt) 2000-11-22 2001-11-21 Processo de análise de uma superfìcie de um substrato, dispositivo para a execução do processo e utilização do dispositivo
JP2002544607A JP2004514882A (ja) 2000-11-22 2001-11-21 基板表面の走査方法および装置
CNB018193005A CN100371677C (zh) 2000-11-22 2001-11-21 衬底表面检测方法与设备
US10/432,269 US7430049B2 (en) 2000-11-22 2001-11-21 Method and device for analyzing the surface of a substrate
PCT/FR2001/003658 WO2002042715A1 (fr) 2000-11-22 2001-11-21 Procede et dispositif d'analyse de la surface d'un substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0015050A FR2817042B1 (fr) 2000-11-22 2000-11-22 Procede et dispositif d'analyse de la surface d'un substrat

Publications (2)

Publication Number Publication Date
FR2817042A1 FR2817042A1 (fr) 2002-05-24
FR2817042B1 true FR2817042B1 (fr) 2003-06-20

Family

ID=8856740

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0015050A Expired - Fee Related FR2817042B1 (fr) 2000-11-22 2000-11-22 Procede et dispositif d'analyse de la surface d'un substrat

Country Status (9)

Country Link
US (1) US7430049B2 (fr)
EP (1) EP1336076A1 (fr)
JP (1) JP2004514882A (fr)
KR (1) KR20030045196A (fr)
CN (1) CN100371677C (fr)
AU (1) AU2002218393A1 (fr)
BR (1) BR0115538A (fr)
FR (1) FR2817042B1 (fr)
WO (1) WO2002042715A1 (fr)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2830079B1 (fr) * 2001-09-26 2004-04-30 Holo 3 Procede et dispositif de mesure d'au moins une grandeur geometrique d'une surface optiquement reflechissante
JP4645068B2 (ja) * 2004-06-04 2011-03-09 旭硝子株式会社 表面形状の検査方法および検査装置
JP4806767B2 (ja) * 2004-06-10 2011-11-02 株式会社ホンダロック 歪み測定方法及び装置
US7589844B2 (en) * 2005-07-15 2009-09-15 Asahi Glass Company, Limited Shape inspection method and apparatus
CN1308655C (zh) * 2005-10-13 2007-04-04 华中科技大学 一种二维外形轮廓自扫描投影测量装置
US20070146685A1 (en) * 2005-11-30 2007-06-28 Yoo Woo S Dynamic wafer stress management system
DE102006006876A1 (de) 2006-02-15 2007-08-16 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren und Vorrichtung zum Erfassen einer Kontur einer reflektierenden Oberfläche
US8850980B2 (en) * 2006-04-03 2014-10-07 Canon Nanotechnologies, Inc. Tessellated patterns in imprint lithography
DE102006015792A1 (de) * 2006-04-05 2007-10-18 Isra Surface Vision Gmbh Verfahren und System zur Formmessung einer reflektierenden Oberfläche
US7711182B2 (en) * 2006-08-01 2010-05-04 Mitsubishi Electric Research Laboratories, Inc. Method and system for sensing 3D shapes of objects with specular and hybrid specular-diffuse surfaces
FR2914422B1 (fr) * 2007-03-28 2009-07-03 Soitec Silicon On Insulator Procede de detection de defauts de surface d'un substrat et dispositif mettant en oeuvre ledit procede.
EP1980843A1 (fr) 2007-04-13 2008-10-15 Essilor International (Compagnie Generale D'optique) Procédé et appareil de détection de défauts dans des composants optiques
FR2923006B1 (fr) 2007-10-29 2010-05-14 Signoptic Technologies Dispositif optique pour l'observation de details structurels millimetriques ou submillimetriques d'un objet a comportement speculaire
US9846689B2 (en) 2008-01-29 2017-12-19 Adobe Systems Incorporated Method and system to provide portable database functionality in an electronic form
WO2009102490A1 (fr) * 2008-02-15 2009-08-20 Pilkington Group Limited Procédé de détermination de forme de surface de verre et distorsion optique par imagerie optique réfléchie
FR2930030B1 (fr) * 2008-04-11 2012-12-28 Visuol Technologies Dispositif de controle de la qualite d'une surface
JP5633719B2 (ja) * 2009-09-18 2014-12-03 学校法人福岡工業大学 三次元情報計測装置および三次元情報計測方法
FR2951544A1 (fr) 2009-10-21 2011-04-22 Saint Gobain Procede d'analyse de la qualite d'un vitrage
JP2011127936A (ja) * 2009-12-15 2011-06-30 Asahi Glass Co Ltd 物体の三次元の表面形状の評価方法及び評価装置並びに車両用窓ガラスの製造方法
KR20130113321A (ko) * 2010-06-07 2013-10-15 아사히 가라스 가부시키가이샤 형상 측정 장치, 형상 측정 방법 및 유리판의 제조 방법
KR101311215B1 (ko) * 2010-11-19 2013-09-25 경북대학교 산학협력단 기판 검사방법
US9068904B2 (en) * 2011-01-18 2015-06-30 Arizona Board Of Regents On Behalf Of The University Of Arizona System and method for non-contact metrology of surfaces
FR2974414B1 (fr) * 2011-04-22 2013-04-12 Saint Gobain Procede d'analyse de la qualite d'un vitrage
CN103797329A (zh) * 2011-09-16 2014-05-14 Asml荷兰有限公司 用于监测光刻图案形成装置的设备
DE102011085322A1 (de) * 2011-10-27 2013-05-02 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Inspektion einer spiegelnden Beschichtung
CN103185662B (zh) * 2011-12-30 2015-09-09 信义汽车玻璃(深圳)有限公司 汽车钢化玻璃水波纹检测支架和系统、以及检测方法
JP6104662B2 (ja) * 2013-03-25 2017-03-29 株式会社東芝 計測装置、方法及びプログラム
FR3015033B1 (fr) 2013-12-13 2015-12-04 Saint Gobain Procede et dispositif d'analyse de la surface d'un substrat
CN104101611A (zh) * 2014-06-06 2014-10-15 华南理工大学 一种类镜面物体表面光学成像装置及其成像方法
TWI593955B (zh) * 2014-08-18 2017-08-01 政美應用股份有限公司 光偏折檢測模組及使用其檢測及誤差校正之方法
US9851200B2 (en) 2015-06-26 2017-12-26 Glasstech, Inc. Non-contact gaging system and method for contoured panels having specular surfaces
US9470641B1 (en) 2015-06-26 2016-10-18 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured glass sheets
US9933251B2 (en) * 2015-06-26 2018-04-03 Glasstech, Inc. Non-contact gaging system and method for contoured glass sheets
US9841276B2 (en) 2015-06-26 2017-12-12 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured glass sheet
US9952039B2 (en) 2015-06-26 2018-04-24 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured panels having specular surfaces
US9952037B2 (en) * 2015-06-26 2018-04-24 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured sheet
WO2019039329A1 (fr) * 2017-08-22 2019-02-28 株式会社イシダ Appareil d'inspection optique et procédé de détection d'anomalie
CN107707793A (zh) * 2017-09-26 2018-02-16 浙江工业大学 一种用于表面特征检测的表面图像获取方法
CN109916279B (zh) * 2019-03-04 2020-09-22 Oppo广东移动通信有限公司 终端盖板的平整度检测方法、装置、测试机台及存储介质

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3619023A (en) * 1969-03-04 1971-11-09 Trw Inc Optical element for generating contour stripes
JPS5181646A (en) * 1975-01-15 1976-07-17 Fuji Photo Optical Co Ltd Tokosenkirokuhohooyobisochi
US4202630A (en) * 1975-01-15 1980-05-13 Fuji Photo Optical Co., Ltd. Method of and apparatus for recording surface irregularity of object
US4653104A (en) * 1984-09-24 1987-03-24 Westinghouse Electric Corp. Optical three-dimensional digital data acquisition system
US4794550A (en) * 1986-10-15 1988-12-27 Eastman Kodak Company Extended-range moire contouring
DE3907430C1 (fr) * 1988-12-23 1991-03-21 Klaus 8206 Bruckmuehl De Pfister
DE4136428A1 (de) * 1991-11-05 1993-05-06 Henning Dr. 7440 Nuertingen De Wolf Moire-verfahren mit elektronischem analysegitter
NL9200071A (nl) * 1992-01-15 1993-08-02 Stichting Science Park Maastri Inrichting voor het bepalen van de topografie van een gekromd oppervlak.
US5307152A (en) * 1992-09-29 1994-04-26 Industrial Technology Institute Moire inspection system
US5608529A (en) * 1994-01-31 1997-03-04 Nikon Corporation Optical three-dimensional shape measuring apparatus
DE19519520A1 (de) * 1995-06-02 1996-12-05 Thomas Wolf Verfahren und Vorrichtung zur Echtzeitbestimmung der Verformung, Dehnung und Kontur eines dreidimensionalen Objektes
US5835223A (en) * 1996-01-05 1998-11-10 Electronic Packaging Services, Ltd. System for measuring surface flatness using shadow moire technology
WO1997026529A1 (fr) * 1996-01-19 1997-07-24 Phase Metrics Procede et appareil de controle de surface
US5714832A (en) * 1996-03-15 1998-02-03 Hughes Electronics Miniature grating device
AU7720798A (en) * 1997-06-05 1998-12-21 Electronic Packaging Services Ltd. Co. Measuring surface flatness using shadow moire technology and phase-stepping image processing
DE19757106A1 (de) * 1997-12-20 1999-06-24 Juergen Prof Dr Massig Topometer für spiegelnde Flächen
US5995224A (en) * 1998-01-28 1999-11-30 Zygo Corporation Full-field geometrically-desensitized interferometer employing diffractive and conventional optics
US6072581A (en) * 1998-10-30 2000-06-06 Zygo Corporation Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability
US6208412B1 (en) 1999-06-14 2001-03-27 Visteon Global Technologies, Inc. Method and apparatus for determining optical quality
CA2277855A1 (fr) * 1999-07-14 2001-01-14 Solvision Methode et systeme de mesure de la hauteur des billes de soudure d'un circuit imprime

Also Published As

Publication number Publication date
EP1336076A1 (fr) 2003-08-20
CN1568419A (zh) 2005-01-19
WO2002042715A1 (fr) 2002-05-30
US20060050284A1 (en) 2006-03-09
BR0115538A (pt) 2003-09-02
KR20030045196A (ko) 2003-06-09
CN100371677C (zh) 2008-02-27
US7430049B2 (en) 2008-09-30
JP2004514882A (ja) 2004-05-20
AU2002218393A1 (en) 2002-06-03
FR2817042A1 (fr) 2002-05-24

Similar Documents

Publication Publication Date Title
FR2817042B1 (fr) Procede et dispositif d'analyse de la surface d'un substrat
FR2812764B1 (fr) Procede de fabrication d'un substrat de type substrat-sur- isolant ou substrat-sur-vide et dispositif obtenu
FR2784712B1 (fr) Procede et dispositif d'actionnement electromagnetique de soupape
FR2780200B1 (fr) Dispositif et procede de formation d'un dispositif presentant une cavite a atmosphere controlee
FR2656422B1 (fr) Procede et dispositif pour detecter la presence d'humidite sur un substrat.
FR2787061B1 (fr) Procede et installation de marquage superficiel d'un substrat
FR2767603B1 (fr) Procede de fabrication d'un dispositif a semiconducteur sur un substrat semiconducteur
FR2846415B1 (fr) Procede et dispositif de mesure de la force de contact d'un pantographe
FR2768836B1 (fr) Dispositif d'identification et procede de fabrication du dispositif associe
FR2826202B1 (fr) Procede et dispositif d'equilibrage de supercapacite
FR2818370B1 (fr) Procede et dispositif de mesure de la planeite d'une surface
FR2807705B1 (fr) Ensemble et procede d'impression sur un substrat plat
FR2825464B1 (fr) Procede et dispositif de jaugeage d'un liquide
FR2831697B1 (fr) Dispositif et procede d'etiquetage en trois dimensions.
FR2772982B1 (fr) Substrat d'anode pour un dispositif d'affichage et son procede de fabrication
FR2830328B1 (fr) Dispositif et procede d'analyse de la structure d'un materiau
FR2738670B1 (fr) Procede et appareil de formation d'un motif sur un substrat de circuit integre
FR2831259B1 (fr) Dispositif et procede de deplacement d'une piece
FR2782839B1 (fr) Procede de fabrication d'un dispositif a semiconducteur
FR2832276B1 (fr) Dispositif et procede d'analyse reseau a prediction autonome
FR2803659B1 (fr) Procede et dispositif pour la detection d'un biofilm
FR2841653B1 (fr) Procede et dispositif d'analyse d'un echantillon de sang
FR2817969B1 (fr) Dispositif et procede d'analyse immunologique
FR2817963B1 (fr) Dispositif d'imagerie par plasmon d'une surface metallique et procede d'utilisation du dispositif
FR2843979B1 (fr) Procede et dispositif de renforcement d'un ouvrage

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 16

ST Notification of lapse

Effective date: 20170731