AU2002218393A1 - Method and device for analysing the surface of a substrate - Google Patents

Method and device for analysing the surface of a substrate

Info

Publication number
AU2002218393A1
AU2002218393A1 AU2002218393A AU1839302A AU2002218393A1 AU 2002218393 A1 AU2002218393 A1 AU 2002218393A1 AU 2002218393 A AU2002218393 A AU 2002218393A AU 1839302 A AU1839302 A AU 1839302A AU 2002218393 A1 AU2002218393 A1 AU 2002218393A1
Authority
AU
Australia
Prior art keywords
analysing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002218393A
Inventor
Thomas Bertin-Mourot
Jean-Pierre Douche
Daniel Germond
Paul-Henri Guering
Yves Surrel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Publication of AU2002218393A1 publication Critical patent/AU2002218393A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Engineering & Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
AU2002218393A 2000-11-22 2001-11-21 Method and device for analysing the surface of a substrate Abandoned AU2002218393A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0015050 2000-11-22
FR0015050A FR2817042B1 (en) 2000-11-22 2000-11-22 METHOD AND DEVICE FOR ANALYZING THE SURFACE OF A SUBSTRATE
PCT/FR2001/003658 WO2002042715A1 (en) 2000-11-22 2001-11-21 Method and device for analysing the surface of a substrate

Publications (1)

Publication Number Publication Date
AU2002218393A1 true AU2002218393A1 (en) 2002-06-03

Family

ID=8856740

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002218393A Abandoned AU2002218393A1 (en) 2000-11-22 2001-11-21 Method and device for analysing the surface of a substrate

Country Status (9)

Country Link
US (1) US7430049B2 (en)
EP (1) EP1336076A1 (en)
JP (1) JP2004514882A (en)
KR (1) KR20030045196A (en)
CN (1) CN100371677C (en)
AU (1) AU2002218393A1 (en)
BR (1) BR0115538A (en)
FR (1) FR2817042B1 (en)
WO (1) WO2002042715A1 (en)

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FR2830079B1 (en) * 2001-09-26 2004-04-30 Holo 3 METHOD AND DEVICE FOR MEASURING AT LEAST ONE GEOMETRIC SIZE OF AN OPTICALLY REFLECTIVE SURFACE
JP4645068B2 (en) 2004-06-04 2011-03-09 旭硝子株式会社 Surface shape inspection method and inspection apparatus
JP4806767B2 (en) * 2004-06-10 2011-11-02 株式会社ホンダロック Strain measuring method and apparatus
US7589844B2 (en) * 2005-07-15 2009-09-15 Asahi Glass Company, Limited Shape inspection method and apparatus
CN1308655C (en) * 2005-10-13 2007-04-04 华中科技大学 Self-scanning projection measuring device for two-dimensional configuration outline
US20070146685A1 (en) * 2005-11-30 2007-06-28 Yoo Woo S Dynamic wafer stress management system
DE102006006876A1 (en) 2006-02-15 2007-08-16 Deutsches Zentrum für Luft- und Raumfahrt e.V. Method of detecting the contour of a reflective surface using a virtual image of the reflective points
US8850980B2 (en) * 2006-04-03 2014-10-07 Canon Nanotechnologies, Inc. Tessellated patterns in imprint lithography
DE102006015792A1 (en) * 2006-04-05 2007-10-18 Isra Surface Vision Gmbh Method and system for measuring the shape of a reflective surface
US7711182B2 (en) * 2006-08-01 2010-05-04 Mitsubishi Electric Research Laboratories, Inc. Method and system for sensing 3D shapes of objects with specular and hybrid specular-diffuse surfaces
FR2914422B1 (en) 2007-03-28 2009-07-03 Soitec Silicon On Insulator METHOD FOR DETECTING SURFACE DEFECTS OF A SUBSTRATE AND DEVICE USING THE SAME
EP1980843A1 (en) * 2007-04-13 2008-10-15 Essilor International (Compagnie Generale D'optique) Method and apparatus for detecting defects in optical components.
FR2923006B1 (en) * 2007-10-29 2010-05-14 Signoptic Technologies OPTICAL DEVICE FOR OBSERVING MILLIMETRIC OR SUBMILLIMETRIC STRUCTURAL DETAILS OF A SPECULAR BEHAVIOR OBJECT
US9846689B2 (en) 2008-01-29 2017-12-19 Adobe Systems Incorporated Method and system to provide portable database functionality in an electronic form
US8415648B2 (en) 2008-02-15 2013-04-09 Pilkington Group Limited Method of determination of glass surface shapes and optical distortion by reflected optical imaging
FR2930030B1 (en) * 2008-04-11 2012-12-28 Visuol Technologies DEVICE FOR CONTROLLING THE QUALITY OF A SURFACE
JP5633719B2 (en) * 2009-09-18 2014-12-03 学校法人福岡工業大学 3D information measuring apparatus and 3D information measuring method
FR2951544A1 (en) * 2009-10-21 2011-04-22 Saint Gobain METHOD FOR ANALYZING THE QUALITY OF A GLAZING
JP2011127936A (en) * 2009-12-15 2011-06-30 Asahi Glass Co Ltd Method and device for evaluating three-dimensional surface shape of object, and method of manufacturing window glass for vehicle
JP5817721B2 (en) * 2010-06-07 2015-11-18 旭硝子株式会社 Shape measuring device, shape measuring method, and glass plate manufacturing method
KR101311215B1 (en) * 2010-11-19 2013-09-25 경북대학교 산학협력단 Method for inspecting substrate
US9068904B2 (en) * 2011-01-18 2015-06-30 Arizona Board Of Regents On Behalf Of The University Of Arizona System and method for non-contact metrology of surfaces
FR2974414B1 (en) * 2011-04-22 2013-04-12 Saint Gobain METHOD FOR ANALYZING THE QUALITY OF A GLAZING
US20140340663A1 (en) * 2011-09-16 2014-11-20 Asml Netherlands B.V. Apparatus for Monitoring a Lithographic Patterning Device
DE102011085322A1 (en) * 2011-10-27 2013-05-02 Siemens Aktiengesellschaft Apparatus and method for inspecting a specular coating
CN103185662B (en) * 2011-12-30 2015-09-09 信义汽车玻璃(深圳)有限公司 Tempered glass of automobile water ripples Bracket for Inspection and system and detection method
JP6104662B2 (en) * 2013-03-25 2017-03-29 株式会社東芝 Measuring device, method and program
FR3015033B1 (en) 2013-12-13 2015-12-04 Saint Gobain METHOD AND DEVICE FOR ANALYZING THE SURFACE OF A SUBSTRATE
CN104101611A (en) * 2014-06-06 2014-10-15 华南理工大学 Mirror-like object surface optical imaging device and imaging method thereof
TWI593955B (en) * 2014-08-18 2017-08-01 政美應用股份有限公司 Light deflection detection module and measurement and calibration method using the same
US9841276B2 (en) 2015-06-26 2017-12-12 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured glass sheet
US9952037B2 (en) 2015-06-26 2018-04-24 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured sheet
US9933251B2 (en) 2015-06-26 2018-04-03 Glasstech, Inc. Non-contact gaging system and method for contoured glass sheets
US9952039B2 (en) 2015-06-26 2018-04-24 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured panels having specular surfaces
US9470641B1 (en) 2015-06-26 2016-10-18 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured glass sheets
US9851200B2 (en) 2015-06-26 2017-12-26 Glasstech, Inc. Non-contact gaging system and method for contoured panels having specular surfaces
WO2019039329A1 (en) * 2017-08-22 2019-02-28 株式会社イシダ Optical inspection apparatus and abnormality detection method
CN107707793A (en) * 2017-09-26 2018-02-16 浙江工业大学 A kind of surface image acquisition methods for surface characteristics detection
CN109916279B (en) * 2019-03-04 2020-09-22 Oppo广东移动通信有限公司 Flatness detection method and device for terminal cover plate, test machine table and storage medium

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US3619023A (en) * 1969-03-04 1971-11-09 Trw Inc Optical element for generating contour stripes
US4202630A (en) * 1975-01-15 1980-05-13 Fuji Photo Optical Co., Ltd. Method of and apparatus for recording surface irregularity of object
JPS5181646A (en) * 1975-01-15 1976-07-17 Fuji Photo Optical Co Ltd Tokosenkirokuhohooyobisochi
US4653104A (en) * 1984-09-24 1987-03-24 Westinghouse Electric Corp. Optical three-dimensional digital data acquisition system
US4794550A (en) * 1986-10-15 1988-12-27 Eastman Kodak Company Extended-range moire contouring
DE3907430C1 (en) 1988-12-23 1991-03-21 Klaus 8206 Bruckmuehl De Pfister
DE4136428A1 (en) * 1991-11-05 1993-05-06 Henning Dr. 7440 Nuertingen De Wolf Phase-corrected Moire pattern generation with electronic grating - applying e.g. iterative least-squares fit to achieve phase constancy of fringes in real=time processing
NL9200071A (en) * 1992-01-15 1993-08-02 Stichting Science Park Maastri DEVICE FOR DETERMINING THE TOPOGRAPHY OF A CURVED SURFACE.
US5307152A (en) 1992-09-29 1994-04-26 Industrial Technology Institute Moire inspection system
US5608529A (en) * 1994-01-31 1997-03-04 Nikon Corporation Optical three-dimensional shape measuring apparatus
DE19519520A1 (en) * 1995-06-02 1996-12-05 Thomas Wolf Phase position of all points in strip pattern Determination and reproduction method pin real=time
US5835223A (en) * 1996-01-05 1998-11-10 Electronic Packaging Services, Ltd. System for measuring surface flatness using shadow moire technology
WO1997026529A1 (en) * 1996-01-19 1997-07-24 Phase Metrics Surface inspection apparatus and method
US5714832A (en) * 1996-03-15 1998-02-03 Hughes Electronics Miniature grating device
AU7720798A (en) * 1997-06-05 1998-12-21 Electronic Packaging Services Ltd. Co. Measuring surface flatness using shadow moire technology and phase-stepping image processing
DE19757106A1 (en) * 1997-12-20 1999-06-24 Juergen Prof Dr Massig Topometer for reflecting surfaces
US5995224A (en) * 1998-01-28 1999-11-30 Zygo Corporation Full-field geometrically-desensitized interferometer employing diffractive and conventional optics
US6072581A (en) * 1998-10-30 2000-06-06 Zygo Corporation Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability
US6208412B1 (en) 1999-06-14 2001-03-27 Visteon Global Technologies, Inc. Method and apparatus for determining optical quality
CA2277855A1 (en) * 1999-07-14 2001-01-14 Solvision Method and system of measuring the height of weld beads in a printed circuit

Also Published As

Publication number Publication date
US7430049B2 (en) 2008-09-30
JP2004514882A (en) 2004-05-20
FR2817042A1 (en) 2002-05-24
WO2002042715A1 (en) 2002-05-30
FR2817042B1 (en) 2003-06-20
CN100371677C (en) 2008-02-27
EP1336076A1 (en) 2003-08-20
BR0115538A (en) 2003-09-02
CN1568419A (en) 2005-01-19
US20060050284A1 (en) 2006-03-09
KR20030045196A (en) 2003-06-09

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