WO2002042715A1 - Procede et dispositif d'analyse de la surface d'un substrat - Google Patents
Procede et dispositif d'analyse de la surface d'un substrat Download PDFInfo
- Publication number
- WO2002042715A1 WO2002042715A1 PCT/FR2001/003658 FR0103658W WO0242715A1 WO 2002042715 A1 WO2002042715 A1 WO 2002042715A1 FR 0103658 W FR0103658 W FR 0103658W WO 0242715 A1 WO0242715 A1 WO 0242715A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- analyzing
- glazing
- variations
- substrate according
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Definitions
- the invention relates to a method and a device for analyzing a surface of a shaped substrate, said analysis allowing in particular the detection of local defects and the three-dimensional measurement of the shape of a substrate having a specular surface.
- the techniques usually used consist in observing the laminated glazing in transmission or in reflection according to standardized techniques, such as by visual observation outside the production line and after assembly of the laminated glazing. As previously explained, such control is late and affects production costs in particular.
- the control technique is mechanical; probes take punctual measurements to compare them with those of a template conforming to manufacturing expectations.
- this technique represents a labor cost, in particular for the positioning of the probes with respect to each new glazing geometry to be checked, as well as a cost of the supply of measurements, in particular the need for a separate template for each glazing geometry, costs which are more and more desirable to see decrease.
- the inventors have thus given themselves the task of designing a technique for analyzing a surface, in particular a specular surface, which does not have the drawbacks of the techniques mentioned above and in particular which allows the analysis of a specular surface d '' a substrate shaped precisely and repeatedly, and which in particular makes it possible to reduce the costs of checking the conformity of glazing on a production line.
- This object was achieved according to the invention by a method of analyzing a surface of a substrate consisting in taking at least one image in reflection of at least one test pattern on said surface, to be extracted by digital processing of the local phases in two directions, characterized in that one calculates by digital processing from the local phases, variations of local slopes to deduce variations in curvature or variations in altitude of said surface.
- a first type of analysis of the surface leads from phase extraction to deduce variations in local slopes which, by means of a derivation calculation, make it possible to define variations in local curvatures.
- Such an analysis makes it possible to determine the presence of faults on the substrate surface.
- a second type of surface analysis leads from phase extraction to deduce local slope variations which, by means of an integration calculation, make it possible to define altitude differences in order to establish the variation in overall three-dimensional shape of the substrate.
- the image is taken in reflection on a specular surface. It is important that the test pattern (s), a plurality of which can be used in the case of a complex surface, are reflected over the entire surface of the substrate. Preferably, the image in reflection is taken instantaneously.
- the analysis technique according to the invention provides for the intervention of a test pattern whose pattern can be deformed, which makes it possible to obtain an image of said test pattern which is substantially less disturbed than that of a conventional test pattern due to the curvature of a substrate when a curved substrate is analyzed.
- the invention thus advantageously applies to the analysis of curved substrates, such as curved glazing.
- the method according to the invention provides for the use of a test pattern whose size is imposed by that of the glazing taking into account that the image captured is that of the target on a convex surface.
- a real test pattern or physical test pattern whose dimension is, as said above, imposed by the dimension of the substrate and more particularly by its shape.
- Such a test pattern is more particularly suitable for taking images on specular surfaces.
- a virtual test pattern is used; it is then for example a projected pattern whose image is preferably taken in reflection on the substrate.
- a preferred embodiment of the invention consists in using a planar test pattern whose pattern is deformed.
- Another embodiment provides for a curved sight; in the latter case, the pattern which would be undeformed if the target was flat is deformed as provided for by the invention.
- the target is designed so as to rigorously compensate for the curvature of the analyzed substrate.
- Such an embodiment is conceivable industrially in the case of an analysis of identical substrates. But in the case in particular of curved glazing intended to equip motor vehicles, the production series relate to limited numbers of glazing while the number of different glazing and therefore having different curvatures is very large.
- a deformation of the pattern of the pattern compatible with the analysis of several models of substrates having different curvatures.
- the tests have shown that the choice of a deformation of the pattern which does not make it possible to strictly compensate the curve of the substrate makes it possible to obtain precise and reliable analysis results; in fact the deformation of the pattern of the test pattern according to the invention makes it possible to at least partially compensate for the deformation of the image taken on the shaped substrate and thus allows a satisfactory analysis in the areas of curvature and a better analysis of the peripheral areas of the substrate.
- An advantageous implementation of the invention provides for the analysis of the substrate in dynamics, that is to say in movement or during deformation.
- the analysis is carried out on a substrate traveling on a conveyor.
- the invention has the advantage of being able to be implemented for the analysis of moving substrates. It therefore also confers an advantage with regard to productivity and production costs due to the speed of its execution.
- the moving substrate on a conveyor is advantageously placed by mechanical positioning means in a position adapted to facilitate digital processing, in particular to best perform a comparison of the image in reflection of the target with a reference target. Also, before carrying out the analysis, the moving substrates are positioned identically in both directions of the plane formed by the conveyor.
- the image processing according to the invention comprises several steps, in particular a step of superimposing the image in reflection of the target on a reference test pattern so as to obtain a moiré, a step of extracting local phases in two directions from the moiré obtained, the phase extracting step being carried out for example according to a “phase stepping” technique.
- This technique is described in the article "Design of algorithms for Phase measurements by the use of Phase stepping” signed Yves Surrel and published in Applied Optics Vol.35, No.1 dated 1 January 1996.
- Such image processing according to the invention makes it possible in particular with respect to other processing, of the Fourier transformed type, to obtain precise and repetitive analysis results for the entire surface of the substrate. Indeed, the other image processing techniques, in particular by Fourier transform, lead to unsatisfactory results for the peripheral areas of the substrate.
- the stage which follows the extraction of local phases consists in comparing these phases with reference phases, in deducing from them variations in phases, and in correcting these phase variations by a sensitivity factor s which strongly depends on the conditions of observation and measurement tools used to calculate variations in local slopes.
- the analysis thus obtained according to the invention makes it possible in particular to obtain a control of the surface condition of a substrate and in addition a global analysis which makes it possible to measure the curve of the substrate, that is to say the variation of three-dimensional shape of the substrate.
- the method thus described according to the invention makes it possible to further improve the productivity and the manufacturing costs of glazing, in particular curved; in fact, the current bending requirements in the automotive industry are very high and require rigorous control.
- the techniques currently used most often require offline control equipment.
- the devices allow either a control of the periphery, or increasingly a control of the whole surface, required to meet the aesthetic requirements.
- the necessary equipment is then either mechanical probes which have a significant cost, or a three-dimensional control machine, in the most demanding cases, which involves a marble.
- the apparatus is dedicated to a single type of glazing and leads to a very high cost; furthermore, the measurement times are very long. It appears that the method according to the invention leads to satisfactory results for reduced costs and allows much faster control.
- the analysis method according to the invention allowing a curve control still has the advantage compared to the usual techniques of carrying out an analysis without contact, and without any preparation or pretreatment of the surface to be analyzed.
- This provides a definite advantage in the production of thin glass sheets, that is to say having a thickness of less than 2.5 mm. Indeed, such sheets of glass are very sensitive to contact during the entire production phase and may see their curve deteriorated during the inspection if they are subjected to contact.
- This process can just as easily be applied to the curve control for toughened monolithic glasses, such as for side automobile windows or of the rear window type.
- the invention also has an advantage in the case of the control of thin glass sheets; these thin glass sheets may for example be intended to equip motor vehicles to form the side glazing.
- the thin glass sheets are assembled two by two via a plastic film, such as polyvinybutyral (PVB), to form a laminated glazing.
- PVB polyvinybutyral
- the analysis method according to the invention which consists in obtaining an image of a glass sheet will make it possible, by mathematical modeling and in particular by numerical calculation, to predict the quality of the laminated glazing; in fact, knowing according to the method of the image of two sheets of glass intended to be assembled together to form a laminated glazing, will lead to information as to the optical quality of the laminated glazing.
- the method according to the invention thus makes it possible to detect unacceptable laminated glazing concerning their optical quality before their assembly.
- the invention thus prevents all recycling problems due to the presence of two materials and, of course, it further improves the productivity of the process for manufacturing such glazing. laminated.
- the analysis method according to the invention is carried out on a substrate during deformation. According to such an application of the method according to the invention, it is possible to control the curve of the substrate during its deformation.
- the invention advantageously provides for carrying out this control with reference to the concave face of the substrate, in particular when said substrate is supported by mechanical tools during its deformation, for example frames or rollers in the case of glazing.
- the analysis according to the invention will be carried out on the convex face of the substrate.
- the invention also provides a device for implementing the method according to the invention.
- the device according to the invention comprises at least one camera, impulse lighting of the flash type, digital image processing means and at least one test pattern whose projection covers the entire surface of the substrate, the pattern of the test pattern being able to be deformed in at least one direction.
- the camera is advantageously a digital camera; such a camera allows scanning at the CCD sensor. This has the advantage that no analog signal is transported by cables in which it can be damaged and furthermore the deterioration of the signal due to analog / digital conversion is also avoided.
- the pulse type lighting is provided and adapted to obtain a clear image of the substrate in movement or during deformation; laser or laser diode type lighting is advantageously used.
- the lighting power is also chosen to illuminate the entire surface of the target evenly.
- the digital processing means are capable of generating a moiré and include algorithms for calculating phase extraction, calculating conversion and calculating derivation or integration.
- the device according to the invention when it relates to the analysis of a moving substrate is advantageously implemented above a conveyor.
- This conveyor is preferably designed to provide a dark surface and thus improve the contrast of the image captured by the camera; it is for example a belt conveyor, of the carpet type, the color of which is advantageously dark and preferably black.
- the conveyor has a flatness of great precision to define a precise support plane of the substrate to be measured.
- the camera is placed above the target.
- the optical axis of the camera lens is normal to the surface of the substrate in the center of the field of observation when a single target is used; in other words, the direction of observation of the camera is normal to the surface of the substrate at the center of the field of observation.
- the optical axis of the projector is parallel and close to the optical axis of the camera.
- mechanical positioning means are advantageously provided on the conveyor which make it possible to position the substrate in the two directions formed by the plane of the conveyor in a position suitable for facilitating digital processing. These means are all means known to those skilled in the art, for example stop systems and / or guide rails.
- the device according to the invention when it relates to the analysis of a substrate during deformation is advantageously placed in a hot enclosure, for example in the case of the bending of a glazing produced in such a hot enclosure. According to other glass bending methods, the device is implemented at room temperature.
- the device thus described according to the invention can therefore be used for the analysis of a surface, in particular a specular surface, of a substrate, in particular in shape and preferably transparent.
- the invention firstly makes it possible to control the state of such a surface and thus to analyze the defects. Such a control can thus make it possible, for example in the case of glazing, to understand the origin of the defects and to remedy them by an appropriate action on the device or on the manufacturing or forming process.
- the analysis of the surface of each of the monolithic glazing will make it possible to predict the optical quality of the laminated glazing. The operation then corresponds to a digital calculation on the basis of the two images obtained and to suitable statistical processing.
- the invention can also make it possible to measure the variation in overall three-dimensional shape of a shaped substrate.
- the analysis which can be made in dynamics makes it possible either to control the shape of the substrate obtained or to control the evolution of the shape when the analysis is made during deformation.
- the invention can also make it possible to measure the flatness of a substrate.
- the knowledge of the analysis according to the invention made of the surface of the substrate, which makes it possible to detect defects and to obtain its three-dimensional configuration allows for applications of planar substrates the control of the flatness of said substrate.
- Such flatness control is for example useful for glazing applications, for example in the building sector.
- This control of flatness becomes very important for other glazing applications, in particular in the field of display screens.
- the flatness must be very rigorous in particular to satisfy the manipulations that the glazing undergoes during all the treatments carried out with a view to producing a screen; so as not to be damaged during handling to carry out the glazing from one treatment to another, said glazing is transported by suction devices which limit contact and attack by tools on the glass.
- Manipulations of this type by aspiration require perfect flatness of the glazing to prevent all risks falling glass transported.
- the aforementioned display screens are all types of screens which must undergo treatments such as layer deposition, etchings, etc. and are for example plasma screens, field emission screens (FED), screens with microdots.
- a control of the flatness of a glazing can also be sought for the production of vacuum glazing or flat lamps, for which a limited and regular space is sought between two sheets of glass.
- a final advantage of the analysis technique according to the invention for controlling the flatness of a substrate is that, as in the previous cases, it can be carried out quickly and moreover on moving substrates, for example on a conveyor and therefore without risk of reducing production rates.
- FIGS. 1 and 2 which represent,
- FIG. 1 represents a device illustrating the measurement principle according to the invention leading to taking an instantaneous image of a test pattern 1 in reflection on a substrate 2.
- the image of the test pattern is as said previously advantageously obtained using a CCD 3 camera to avoid all risks signal alteration.
- the test pattern 1 used is advantageously a planar physical test pattern whose pattern can for example be deformed by including shaped lines.
- the instantaneous image is advantageously obtained by a lighting system 4 of the flash type; it is for example a laser diode.
- the test pattern 1 exhibits, in particular in the case of the analysis of a curved substrate 2, a deformed pattern such that the image of the test pattern captured in reflection on said substrate shows almost parallel lines, these ci being strictly parallel as soon as the deformation of the pattern of the pattern compensates for the curve of the substrate.
- a deformation of the test pattern which leads to satisfactory results in terms of analyzes for a range of substrates having different curvatures.
- the measurement is preferably carried out on the convex face of the substrate, in particular to obtain better contrast, and consequently requires a relatively large test pattern so that its image in reflection covers the entire surface of the substrate to allow an analysis. of the entire surface.
- the image captured by the camera 3 is transmitted to a computer 5 to be processed in several stages by digital processing means.
- the image of the test pattern taken by the camera is digitized, it is superimposed on a reference pattern to form a moiré
- the reference pattern can for example be constituted by the pixels of the camera.
- Each pixel of the digitized image is associated with an elementary area of the surface of the substrate.
- a map of the local phases relating to the elementary areas of the surface of the substrate is extracted.
- the local phases are compared with memorized reference phases and resulting from a measurement of a reference sample or a calculation established by CAD (Computer Aided Design), to deliver phase variations.
- CAD Computer Aided Design
- the slope variations are calculated by means of a sensitivity factor s which strongly depends on the observation conditions and the measurement tools used.
- the variations of local slopes are then used in a derivation calculation algorithm or in an integration calculation algorithm for respectively, highlighting the presence of surface defects 6, 7, the knowledge of these being obtained precisely according to two directions, or measure the variation in three-dimensional shape of the substrate.
- FIG. 2 represents a diagram of an installation which allows an analysis according to the invention of the surface of a glazing 8 moving on a conveyor 9.
- the glazing 8 which arrives on the conveyor is first of all reoriented in a direction perpendicular to its direction of advance on the conveyor 9 with the aid of two guides 10, 11. These guides 10, 11 will make it possible to orient the glazing 8 in the desired direction while the latter already has a near imposed orientation when it is placed on the conveyor.
- the trajectory of the glazing 8 is then interrupted by two stops 12 supported by an arm 13 whose position can be changed in a vertical direction.
- the glazing 8 comes into contact with a first stop 12, it is blocked at this point and the conveyor causes said glazing to pivot until it comes into contact with the second stop 12; the glazing is then reoriented, according to its direction of advance, in a predefined position adapted to best perform the comparison of the image of the test pattern in reflection with the reference pattern.
- the arm lifting device 13 is then actuated so that the stops 12 no longer obstruct the passage of the glazing 8 which thus continues its movement on the conveyor 9.
- the arm lifting device 13 is advantageously actuated automatically as soon as the glazing 8 is in contact with the two stops 12.
- the mounting of the stops 12 is provided very quickly so that it does not risk damaging the glazing 8 which has its convex surface on the top and is therefore higher in its center only on the edge which has had contact with the stops 12.
- the glazing 8 suitably positioned then passes under a detector 14, for example an optical detector, which will determine the instant of triggering of the flash associated with the capture of 'an image of the glazing 8.
- This triggering of the flash occurs as soon as the glazing 8 is under the test pattern 15 so that the image captured by the camera 16 of the test pattern 15 in reflection on the glazing covers the entire convex surface of said glazing 8.
- the input signal is then transmitted to a computer in which it is processed according to the algorithms for calculating "phase-stepping", conversion and derivation or integration.
- the analysis technique of the invention very advantageously makes it possible to analyze large areas of the order of m 2 , such as glazing, in dynamics, and with a very good resolution of the order of 10 ⁇ m.
- results obtained lead to possible detection of faults or knowledge of the curve of the glazing. This information can then be used to intervene in stages of the glazing manufacturing process and to correct faults. In other cases and in particular for the production of laminated glazing, the results make it possible to anticipate the quality of the glazing and possibly not to produce it if the optical properties are not satisfactory. • In the case of a method of bending a glazing, the results obtained according to the invention during the production of a curved glazing will make it possible to better control the process and to optimize its production yield.
- results obtained according to the invention will also make it possible, in the case of the control of the flatness of a glazing, intended for the production of a display screen, to improve the production rates of said screens by eliminating the glazing whose flatness is not satisfactory before these glazings are on the production lines of these screens.
- the device described above has been taken by way of example, but the tools used may be more numerous, such as several cameras and targets, in particular if it is a question of analyzing complex shapes having for example various curvatures. These will be studied using several reflection images of a plurality of test patterns recorded by several cameras, the entire surface of the substrate having to be covered by the reflection patterns.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Analysis (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BR0115538-5A BR0115538A (pt) | 2000-11-22 | 2001-11-21 | Processo de análise de uma superfìcie de um substrato, dispositivo para a execução do processo e utilização do dispositivo |
US10/432,269 US7430049B2 (en) | 2000-11-22 | 2001-11-21 | Method and device for analyzing the surface of a substrate |
KR10-2003-7006762A KR20030045196A (ko) | 2000-11-22 | 2001-11-21 | 기판 표면의 분석 방법 및 장치 |
JP2002544607A JP2004514882A (ja) | 2000-11-22 | 2001-11-21 | 基板表面の走査方法および装置 |
AU2002218393A AU2002218393A1 (en) | 2000-11-22 | 2001-11-21 | Method and device for analysing the surface of a substrate |
EP01997186A EP1336076A1 (fr) | 2000-11-22 | 2001-11-21 | Procede et dispositif d'analyse de la surface d'un substrat |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0015050A FR2817042B1 (fr) | 2000-11-22 | 2000-11-22 | Procede et dispositif d'analyse de la surface d'un substrat |
FR00/15050 | 2000-11-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002042715A1 true WO2002042715A1 (fr) | 2002-05-30 |
Family
ID=8856740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2001/003658 WO2002042715A1 (fr) | 2000-11-22 | 2001-11-21 | Procede et dispositif d'analyse de la surface d'un substrat |
Country Status (9)
Country | Link |
---|---|
US (1) | US7430049B2 (fr) |
EP (1) | EP1336076A1 (fr) |
JP (1) | JP2004514882A (fr) |
KR (1) | KR20030045196A (fr) |
CN (1) | CN100371677C (fr) |
AU (1) | AU2002218393A1 (fr) |
BR (1) | BR0115538A (fr) |
FR (1) | FR2817042B1 (fr) |
WO (1) | WO2002042715A1 (fr) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005351760A (ja) * | 2004-06-10 | 2005-12-22 | Honda Lock Mfg Co Ltd | 歪み測定方法及び装置 |
EP1821064A1 (fr) | 2006-02-15 | 2007-08-22 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Procédé et dispositif destinés à la détection d'un contour d'une surface réfléchissante |
WO2007115621A3 (fr) * | 2006-04-05 | 2007-12-06 | Isra Surface Vision Gmbh | Procédé et système de mesure de la forme d'une surface réfléchissante |
EP1980843A1 (fr) * | 2007-04-13 | 2008-10-15 | Essilor International (Compagnie Generale D'optique) | Procédé et appareil de détection de défauts dans des composants optiques |
WO2011048306A1 (fr) | 2009-10-21 | 2011-04-28 | Saint-Gobain Glass France | Procede d'analyse de la qualite d'un vitrage |
FR2974414A1 (fr) * | 2011-04-22 | 2012-10-26 | Saint Gobain | Procede d'analyse de la qualite d'un vitrage |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2830079B1 (fr) * | 2001-09-26 | 2004-04-30 | Holo 3 | Procede et dispositif de mesure d'au moins une grandeur geometrique d'une surface optiquement reflechissante |
JP4645068B2 (ja) | 2004-06-04 | 2011-03-09 | 旭硝子株式会社 | 表面形状の検査方法および検査装置 |
US7589844B2 (en) * | 2005-07-15 | 2009-09-15 | Asahi Glass Company, Limited | Shape inspection method and apparatus |
CN1308655C (zh) * | 2005-10-13 | 2007-04-04 | 华中科技大学 | 一种二维外形轮廓自扫描投影测量装置 |
US20070146685A1 (en) * | 2005-11-30 | 2007-06-28 | Yoo Woo S | Dynamic wafer stress management system |
US8850980B2 (en) * | 2006-04-03 | 2014-10-07 | Canon Nanotechnologies, Inc. | Tessellated patterns in imprint lithography |
US7711182B2 (en) * | 2006-08-01 | 2010-05-04 | Mitsubishi Electric Research Laboratories, Inc. | Method and system for sensing 3D shapes of objects with specular and hybrid specular-diffuse surfaces |
FR2914422B1 (fr) | 2007-03-28 | 2009-07-03 | Soitec Silicon On Insulator | Procede de detection de defauts de surface d'un substrat et dispositif mettant en oeuvre ledit procede. |
FR2923006B1 (fr) * | 2007-10-29 | 2010-05-14 | Signoptic Technologies | Dispositif optique pour l'observation de details structurels millimetriques ou submillimetriques d'un objet a comportement speculaire |
US9846689B2 (en) | 2008-01-29 | 2017-12-19 | Adobe Systems Incorporated | Method and system to provide portable database functionality in an electronic form |
JP2011512533A (ja) * | 2008-02-15 | 2011-04-21 | ピルキングトン・グループ・リミテッド | 反射光学画像法によるガラス表面形状及び光学歪の測定方法 |
FR2930030B1 (fr) * | 2008-04-11 | 2012-12-28 | Visuol Technologies | Dispositif de controle de la qualite d'une surface |
JP5633719B2 (ja) * | 2009-09-18 | 2014-12-03 | 学校法人福岡工業大学 | 三次元情報計測装置および三次元情報計測方法 |
JP2011127936A (ja) * | 2009-12-15 | 2011-06-30 | Asahi Glass Co Ltd | 物体の三次元の表面形状の評価方法及び評価装置並びに車両用窓ガラスの製造方法 |
WO2011155447A1 (fr) * | 2010-06-07 | 2011-12-15 | 旭硝子株式会社 | Dispositif et procédé de mesure de forme, et procédé de fabrication de plaque de verre |
KR101311215B1 (ko) * | 2010-11-19 | 2013-09-25 | 경북대학교 산학협력단 | 기판 검사방법 |
US9068904B2 (en) * | 2011-01-18 | 2015-06-30 | Arizona Board Of Regents On Behalf Of The University Of Arizona | System and method for non-contact metrology of surfaces |
CN103797329A (zh) * | 2011-09-16 | 2014-05-14 | Asml荷兰有限公司 | 用于监测光刻图案形成装置的设备 |
DE102011085322A1 (de) * | 2011-10-27 | 2013-05-02 | Siemens Aktiengesellschaft | Vorrichtung und Verfahren zur Inspektion einer spiegelnden Beschichtung |
CN103185662B (zh) * | 2011-12-30 | 2015-09-09 | 信义汽车玻璃(深圳)有限公司 | 汽车钢化玻璃水波纹检测支架和系统、以及检测方法 |
JP6104662B2 (ja) * | 2013-03-25 | 2017-03-29 | 株式会社東芝 | 計測装置、方法及びプログラム |
FR3015033B1 (fr) | 2013-12-13 | 2015-12-04 | Saint Gobain | Procede et dispositif d'analyse de la surface d'un substrat |
CN104101611A (zh) * | 2014-06-06 | 2014-10-15 | 华南理工大学 | 一种类镜面物体表面光学成像装置及其成像方法 |
TWI593955B (zh) * | 2014-08-18 | 2017-08-01 | 政美應用股份有限公司 | 光偏折檢測模組及使用其檢測及誤差校正之方法 |
US9952039B2 (en) | 2015-06-26 | 2018-04-24 | Glasstech, Inc. | System and method for measuring reflected optical distortion in contoured panels having specular surfaces |
US9851200B2 (en) | 2015-06-26 | 2017-12-26 | Glasstech, Inc. | Non-contact gaging system and method for contoured panels having specular surfaces |
US9841276B2 (en) | 2015-06-26 | 2017-12-12 | Glasstech, Inc. | System and method for developing three-dimensional surface information corresponding to a contoured glass sheet |
US9470641B1 (en) | 2015-06-26 | 2016-10-18 | Glasstech, Inc. | System and method for measuring reflected optical distortion in contoured glass sheets |
US9933251B2 (en) * | 2015-06-26 | 2018-04-03 | Glasstech, Inc. | Non-contact gaging system and method for contoured glass sheets |
US9952037B2 (en) * | 2015-06-26 | 2018-04-24 | Glasstech, Inc. | System and method for developing three-dimensional surface information corresponding to a contoured sheet |
WO2019039329A1 (fr) * | 2017-08-22 | 2019-02-28 | 株式会社イシダ | Appareil d'inspection optique et procédé de détection d'anomalie |
CN107707793A (zh) * | 2017-09-26 | 2018-02-16 | 浙江工业大学 | 一种用于表面特征检测的表面图像获取方法 |
CN109916279B (zh) * | 2019-03-04 | 2020-09-22 | Oppo广东移动通信有限公司 | 终端盖板的平整度检测方法、装置、测试机台及存储介质 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5202749A (en) * | 1988-12-23 | 1993-04-13 | Klaus Pfister | Process and device for observing moire patterns of surfaces to be tested by application of the moire method using phase shifting |
DE4136428A1 (de) * | 1991-11-05 | 1993-05-06 | Henning Dr. 7440 Nuertingen De Wolf | Moire-verfahren mit elektronischem analysegitter |
US5307152A (en) * | 1992-09-29 | 1994-04-26 | Industrial Technology Institute | Moire inspection system |
DE19519520A1 (de) * | 1995-06-02 | 1996-12-05 | Thomas Wolf | Verfahren und Vorrichtung zur Echtzeitbestimmung der Verformung, Dehnung und Kontur eines dreidimensionalen Objektes |
US5714832A (en) * | 1996-03-15 | 1998-02-03 | Hughes Electronics | Miniature grating device |
WO1998055826A2 (fr) * | 1997-06-05 | 1998-12-10 | Electronic Packaging Services, Ltd. Co. | Mesure de la planeite d'une surface a l'aide d'une technique des franges moirees et d'un traitement d'image a echelonnement de phase |
EP0924494A2 (fr) * | 1997-12-20 | 1999-06-23 | Jürgen Prof. Dr. Massig | Topomètre pour surfaces réfléchissantes |
EP1065498A2 (fr) * | 1999-06-14 | 2001-01-03 | Ford Motor Company | Procédé et appareil pour la détermination de la qualité |
WO2001006210A1 (fr) * | 1999-07-14 | 2001-01-25 | Solvision Inc. | Procede et systeme de mesure du relief d'un objet |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3619023A (en) * | 1969-03-04 | 1971-11-09 | Trw Inc | Optical element for generating contour stripes |
US4202630A (en) * | 1975-01-15 | 1980-05-13 | Fuji Photo Optical Co., Ltd. | Method of and apparatus for recording surface irregularity of object |
JPS5181646A (en) * | 1975-01-15 | 1976-07-17 | Fuji Photo Optical Co Ltd | Tokosenkirokuhohooyobisochi |
US4653104A (en) * | 1984-09-24 | 1987-03-24 | Westinghouse Electric Corp. | Optical three-dimensional digital data acquisition system |
US4794550A (en) * | 1986-10-15 | 1988-12-27 | Eastman Kodak Company | Extended-range moire contouring |
NL9200071A (nl) * | 1992-01-15 | 1993-08-02 | Stichting Science Park Maastri | Inrichting voor het bepalen van de topografie van een gekromd oppervlak. |
US5608529A (en) * | 1994-01-31 | 1997-03-04 | Nikon Corporation | Optical three-dimensional shape measuring apparatus |
US5835223A (en) * | 1996-01-05 | 1998-11-10 | Electronic Packaging Services, Ltd. | System for measuring surface flatness using shadow moire technology |
WO1997026529A1 (fr) * | 1996-01-19 | 1997-07-24 | Phase Metrics | Procede et appareil de controle de surface |
US5995224A (en) * | 1998-01-28 | 1999-11-30 | Zygo Corporation | Full-field geometrically-desensitized interferometer employing diffractive and conventional optics |
US6072581A (en) * | 1998-10-30 | 2000-06-06 | Zygo Corporation | Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability |
-
2000
- 2000-11-22 FR FR0015050A patent/FR2817042B1/fr not_active Expired - Fee Related
-
2001
- 2001-11-21 US US10/432,269 patent/US7430049B2/en not_active Expired - Fee Related
- 2001-11-21 CN CNB018193005A patent/CN100371677C/zh not_active Expired - Fee Related
- 2001-11-21 KR KR10-2003-7006762A patent/KR20030045196A/ko not_active IP Right Cessation
- 2001-11-21 AU AU2002218393A patent/AU2002218393A1/en not_active Abandoned
- 2001-11-21 JP JP2002544607A patent/JP2004514882A/ja active Pending
- 2001-11-21 WO PCT/FR2001/003658 patent/WO2002042715A1/fr active Application Filing
- 2001-11-21 EP EP01997186A patent/EP1336076A1/fr not_active Withdrawn
- 2001-11-21 BR BR0115538-5A patent/BR0115538A/pt not_active Application Discontinuation
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5202749A (en) * | 1988-12-23 | 1993-04-13 | Klaus Pfister | Process and device for observing moire patterns of surfaces to be tested by application of the moire method using phase shifting |
DE4136428A1 (de) * | 1991-11-05 | 1993-05-06 | Henning Dr. 7440 Nuertingen De Wolf | Moire-verfahren mit elektronischem analysegitter |
US5307152A (en) * | 1992-09-29 | 1994-04-26 | Industrial Technology Institute | Moire inspection system |
DE19519520A1 (de) * | 1995-06-02 | 1996-12-05 | Thomas Wolf | Verfahren und Vorrichtung zur Echtzeitbestimmung der Verformung, Dehnung und Kontur eines dreidimensionalen Objektes |
US5714832A (en) * | 1996-03-15 | 1998-02-03 | Hughes Electronics | Miniature grating device |
WO1998055826A2 (fr) * | 1997-06-05 | 1998-12-10 | Electronic Packaging Services, Ltd. Co. | Mesure de la planeite d'une surface a l'aide d'une technique des franges moirees et d'un traitement d'image a echelonnement de phase |
EP0924494A2 (fr) * | 1997-12-20 | 1999-06-23 | Jürgen Prof. Dr. Massig | Topomètre pour surfaces réfléchissantes |
EP1065498A2 (fr) * | 1999-06-14 | 2001-01-03 | Ford Motor Company | Procédé et appareil pour la détermination de la qualité |
WO2001006210A1 (fr) * | 1999-07-14 | 2001-01-25 | Solvision Inc. | Procede et systeme de mesure du relief d'un objet |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005351760A (ja) * | 2004-06-10 | 2005-12-22 | Honda Lock Mfg Co Ltd | 歪み測定方法及び装置 |
EP1821064A1 (fr) | 2006-02-15 | 2007-08-22 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Procédé et dispositif destinés à la détection d'un contour d'une surface réfléchissante |
WO2007115621A3 (fr) * | 2006-04-05 | 2007-12-06 | Isra Surface Vision Gmbh | Procédé et système de mesure de la forme d'une surface réfléchissante |
US8064069B2 (en) | 2006-04-05 | 2011-11-22 | Isra Surface Vision Gmbh | Method and system for measuring the shape of a reflective surface |
EP1980843A1 (fr) * | 2007-04-13 | 2008-10-15 | Essilor International (Compagnie Generale D'optique) | Procédé et appareil de détection de défauts dans des composants optiques |
WO2008125660A1 (fr) * | 2007-04-13 | 2008-10-23 | Essilor International (Compagnie Generale D'optique) | Procédé et appareil destinés à la détection de défauts dans des composants optiques |
US8295581B2 (en) | 2007-04-13 | 2012-10-23 | Essilor International (Compagnie Generale D'optique) | Method and apparatus for detecting defects in optical components |
WO2011048306A1 (fr) | 2009-10-21 | 2011-04-28 | Saint-Gobain Glass France | Procede d'analyse de la qualite d'un vitrage |
FR2974414A1 (fr) * | 2011-04-22 | 2012-10-26 | Saint Gobain | Procede d'analyse de la qualite d'un vitrage |
WO2012143649A1 (fr) | 2011-04-22 | 2012-10-26 | Saint-Gobain Glass France | Procede d'analyse de la qualite d'un vitrage |
US9588059B2 (en) | 2011-04-22 | 2017-03-07 | Saint-Gobain Glass France | Method for analyzing the quality of a glazing |
EA029001B1 (ru) * | 2011-04-22 | 2018-01-31 | Сэн-Гобэн Гласс Франс | Способ анализа качества стеклянной панели |
Also Published As
Publication number | Publication date |
---|---|
EP1336076A1 (fr) | 2003-08-20 |
US7430049B2 (en) | 2008-09-30 |
AU2002218393A1 (en) | 2002-06-03 |
FR2817042B1 (fr) | 2003-06-20 |
BR0115538A (pt) | 2003-09-02 |
FR2817042A1 (fr) | 2002-05-24 |
US20060050284A1 (en) | 2006-03-09 |
CN1568419A (zh) | 2005-01-19 |
KR20030045196A (ko) | 2003-06-09 |
JP2004514882A (ja) | 2004-05-20 |
CN100371677C (zh) | 2008-02-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2002042715A1 (fr) | Procede et dispositif d'analyse de la surface d'un substrat | |
JP6295353B2 (ja) | 物体の欠陥を検出するための方法および装置 | |
US9030554B2 (en) | Device for analysing the surface of a substrate | |
EP2831541B1 (fr) | Procede et installation de mesure de la repartition de verre dans des recipients | |
EP0071542B1 (fr) | Contrôle du profil d'une feuille cintrée, notamment du galbe de vitrages bombés | |
WO2009097494A1 (fr) | Contrôle de bords à haute résolution | |
KR101730668B1 (ko) | 기판들 사이에서 베벨 에칭 재현성을 개선시키기 위한 장치 및 방법 | |
WO2006106271A2 (fr) | Procede et dispositif pour supprimer les reflets parasites lors de l'inspection a chaud d'objets creux translucides ou transparents | |
FR2951543A1 (fr) | Procede d'analyse de la qualite d'un vitrage | |
EP0463940B1 (fr) | Procédé et dispositif de mesure de la qualité optique d'un vitrage | |
WO2020120294A1 (fr) | Procede de mesure des ecarts geometriques entre les surfaces incurvees d'une pluralite de matériaux à évaluer et une surface incurvee d'un materiau de reference | |
EP2807471B1 (fr) | Procede optique d'inspection d'articles transparents ou translucides visant a attribuer un reglage optique de reference au systeme de vision | |
JP2013253906A (ja) | ウェブ搬送物の検査方法及び検査装置 | |
EP1477797B1 (fr) | Procédé et dispositif pour l'inspection à chaud d'objets creux translucides ou transparents | |
EP2673621B1 (fr) | Procede de detection de defaut optique dans un pare-brise | |
FR2965045A1 (fr) | Dispositif de mesure de la forme d'un miroir ou d'une surface speculaire | |
EP1921442A1 (fr) | Procédé et installation de contrôle de la qualité de pieces | |
EP4038373A1 (fr) | Méthode d'évaluation de la qualité optique d'une zone délimitée d'un vitrage | |
FR2846096A1 (fr) | Dispositif pour la detection, l'analyse et la localisation de defauts presents sur une surface transparente et/ou reflechissante | |
FR3037143A1 (fr) | Dispositif a camera unique et procede de mesure pour caracteriser des gouttes de pluie | |
WO2024056955A1 (fr) | Dispositif et procede de controle de planeite d'une tole metallique | |
FR3088723A1 (fr) | Dispositif de detection optique des defauts d’un materiau en feuille, muni d’une chambre d’eclairage | |
FR3088724A1 (fr) | Dispositif de detection optique des defauts d’un materiau en feuille, muni de deux tetes de detection | |
CN112752948A (zh) | 用于确定玻璃板,尤其是挡风玻璃板的曲率的方法 | |
JP2000348391A (ja) | 光ディスク変形検査装置及び光ディスク変形検査システム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
REEP | Request for entry into the european phase |
Ref document number: 2001997186 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2001997186 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020037006762 Country of ref document: KR |
|
WWE | Wipo information: entry into national phase |
Ref document number: 018193005 Country of ref document: CN Ref document number: 2002544607 Country of ref document: JP |
|
WWP | Wipo information: published in national office |
Ref document number: 1020037006762 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 2001997186 Country of ref document: EP |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
ENP | Entry into the national phase |
Ref document number: 2006050284 Country of ref document: US Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 10432269 Country of ref document: US |
|
WWP | Wipo information: published in national office |
Ref document number: 10432269 Country of ref document: US |