US7430049B2 - Method and device for analyzing the surface of a substrate - Google Patents

Method and device for analyzing the surface of a substrate Download PDF

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Publication number
US7430049B2
US7430049B2 US10/432,269 US43226904A US7430049B2 US 7430049 B2 US7430049 B2 US 7430049B2 US 43226904 A US43226904 A US 43226904A US 7430049 B2 US7430049 B2 US 7430049B2
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United States
Prior art keywords
substrate
test pattern
scanning
variations
image
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US10/432,269
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English (en)
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US20060050284A1 (en
Inventor
Thomas Bertin-Mourot
Jean-Pierre Douche
Daniel Germond
Paul-Henri Guering
Yves Surrel
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Saint Gobain Glass France SAS
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Saint Gobain Glass France SAS
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Publication of US20060050284A1 publication Critical patent/US20060050284A1/en
Assigned to SAINT-GOBAIN GLASS FRANCE reassignment SAINT-GOBAIN GLASS FRANCE ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GUERING, PAUL-HENRI, BERTIN-MOUROT, THOMAS, DOUCHE, JEAN-PIERRE, GERMOND, DANIEL
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Engineering & Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
US10/432,269 2000-11-22 2001-11-21 Method and device for analyzing the surface of a substrate Expired - Fee Related US7430049B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0015050A FR2817042B1 (fr) 2000-11-22 2000-11-22 Procede et dispositif d'analyse de la surface d'un substrat
FR00/15050 2000-11-22
PCT/FR2001/003658 WO2002042715A1 (fr) 2000-11-22 2001-11-21 Procede et dispositif d'analyse de la surface d'un substrat

Publications (2)

Publication Number Publication Date
US20060050284A1 US20060050284A1 (en) 2006-03-09
US7430049B2 true US7430049B2 (en) 2008-09-30

Family

ID=8856740

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/432,269 Expired - Fee Related US7430049B2 (en) 2000-11-22 2001-11-21 Method and device for analyzing the surface of a substrate

Country Status (9)

Country Link
US (1) US7430049B2 (fr)
EP (1) EP1336076A1 (fr)
JP (1) JP2004514882A (fr)
KR (1) KR20030045196A (fr)
CN (1) CN100371677C (fr)
AU (1) AU2002218393A1 (fr)
BR (1) BR0115538A (fr)
FR (1) FR2817042B1 (fr)
WO (1) WO2002042715A1 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
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US20080316501A1 (en) * 2005-07-15 2008-12-25 Asahi Glass Company Limited Shape inspection method and apparatus
US20120207380A1 (en) * 2009-10-21 2012-08-16 Saint-Gobain Glass France Method for analyzing the quality of a glazing unit
US20120293808A1 (en) * 2011-01-18 2012-11-22 Arizona Board Of Regents On Behalf Of The University Of Arizona System and method for non-contact metrology of surfaces
US8415648B2 (en) 2008-02-15 2013-04-09 Pilkington Group Limited Method of determination of glass surface shapes and optical distortion by reflected optical imaging
US9470641B1 (en) 2015-06-26 2016-10-18 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured glass sheets
US9841276B2 (en) 2015-06-26 2017-12-12 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured glass sheet
US9851200B2 (en) 2015-06-26 2017-12-26 Glasstech, Inc. Non-contact gaging system and method for contoured panels having specular surfaces
US9933251B2 (en) 2015-06-26 2018-04-03 Glasstech, Inc. Non-contact gaging system and method for contoured glass sheets
US9952039B2 (en) 2015-06-26 2018-04-24 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured panels having specular surfaces
US9952037B2 (en) 2015-06-26 2018-04-24 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured sheet

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FR2830079B1 (fr) * 2001-09-26 2004-04-30 Holo 3 Procede et dispositif de mesure d'au moins une grandeur geometrique d'une surface optiquement reflechissante
JP4645068B2 (ja) 2004-06-04 2011-03-09 旭硝子株式会社 表面形状の検査方法および検査装置
JP4806767B2 (ja) * 2004-06-10 2011-11-02 株式会社ホンダロック 歪み測定方法及び装置
CN1308655C (zh) * 2005-10-13 2007-04-04 华中科技大学 一种二维外形轮廓自扫描投影测量装置
US20070146685A1 (en) * 2005-11-30 2007-06-28 Yoo Woo S Dynamic wafer stress management system
DE102006006876A1 (de) 2006-02-15 2007-08-16 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren und Vorrichtung zum Erfassen einer Kontur einer reflektierenden Oberfläche
US8850980B2 (en) * 2006-04-03 2014-10-07 Canon Nanotechnologies, Inc. Tessellated patterns in imprint lithography
DE102006015792A1 (de) * 2006-04-05 2007-10-18 Isra Surface Vision Gmbh Verfahren und System zur Formmessung einer reflektierenden Oberfläche
US7711182B2 (en) * 2006-08-01 2010-05-04 Mitsubishi Electric Research Laboratories, Inc. Method and system for sensing 3D shapes of objects with specular and hybrid specular-diffuse surfaces
FR2914422B1 (fr) * 2007-03-28 2009-07-03 Soitec Silicon On Insulator Procede de detection de defauts de surface d'un substrat et dispositif mettant en oeuvre ledit procede.
EP1980843A1 (fr) 2007-04-13 2008-10-15 Essilor International (Compagnie Generale D'optique) Procédé et appareil de détection de défauts dans des composants optiques
FR2923006B1 (fr) 2007-10-29 2010-05-14 Signoptic Technologies Dispositif optique pour l'observation de details structurels millimetriques ou submillimetriques d'un objet a comportement speculaire
US9846689B2 (en) 2008-01-29 2017-12-19 Adobe Systems Incorporated Method and system to provide portable database functionality in an electronic form
FR2930030B1 (fr) * 2008-04-11 2012-12-28 Visuol Technologies Dispositif de controle de la qualite d'une surface
JP5633719B2 (ja) * 2009-09-18 2014-12-03 学校法人福岡工業大学 三次元情報計測装置および三次元情報計測方法
JP2011127936A (ja) * 2009-12-15 2011-06-30 Asahi Glass Co Ltd 物体の三次元の表面形状の評価方法及び評価装置並びに車両用窓ガラスの製造方法
EP2578990B1 (fr) * 2010-06-07 2022-07-20 AGC Inc. Dispositif et procédé de mesure de forme, et procédé de fabrication d'une plaque de verre
KR101311215B1 (ko) * 2010-11-19 2013-09-25 경북대학교 산학협력단 기판 검사방법
FR2974414B1 (fr) 2011-04-22 2013-04-12 Saint Gobain Procede d'analyse de la qualite d'un vitrage
US20140340663A1 (en) * 2011-09-16 2014-11-20 Asml Netherlands B.V. Apparatus for Monitoring a Lithographic Patterning Device
DE102011085322A1 (de) * 2011-10-27 2013-05-02 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Inspektion einer spiegelnden Beschichtung
CN103185662B (zh) * 2011-12-30 2015-09-09 信义汽车玻璃(深圳)有限公司 汽车钢化玻璃水波纹检测支架和系统、以及检测方法
JP6104662B2 (ja) * 2013-03-25 2017-03-29 株式会社東芝 計測装置、方法及びプログラム
FR3015033B1 (fr) 2013-12-13 2015-12-04 Saint Gobain Procede et dispositif d'analyse de la surface d'un substrat
CN104101611A (zh) * 2014-06-06 2014-10-15 华南理工大学 一种类镜面物体表面光学成像装置及其成像方法
TWI593955B (zh) * 2014-08-18 2017-08-01 政美應用股份有限公司 光偏折檢測模組及使用其檢測及誤差校正之方法
WO2019039329A1 (fr) * 2017-08-22 2019-02-28 株式会社イシダ Appareil d'inspection optique et procédé de détection d'anomalie
CN107707793A (zh) * 2017-09-26 2018-02-16 浙江工业大学 一种用于表面特征检测的表面图像获取方法
CN109916279B (zh) * 2019-03-04 2020-09-22 Oppo广东移动通信有限公司 终端盖板的平整度检测方法、装置、测试机台及存储介质

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US3619023A (en) * 1969-03-04 1971-11-09 Trw Inc Optical element for generating contour stripes
US4102578A (en) * 1975-01-15 1978-07-25 Fuji Photo Optical Co., Ltd. Method of and apparatus for recording surface irregularity of object
US4202630A (en) * 1975-01-15 1980-05-13 Fuji Photo Optical Co., Ltd. Method of and apparatus for recording surface irregularity of object
US4653104A (en) 1984-09-24 1987-03-24 Westinghouse Electric Corp. Optical three-dimensional digital data acquisition system
US4794550A (en) * 1986-10-15 1988-12-27 Eastman Kodak Company Extended-range moire contouring
US5202749A (en) 1988-12-23 1993-04-13 Klaus Pfister Process and device for observing moire patterns of surfaces to be tested by application of the moire method using phase shifting
DE4136428A1 (de) 1991-11-05 1993-05-06 Henning Dr. 7440 Nuertingen De Wolf Moire-verfahren mit elektronischem analysegitter
EP0551955A1 (fr) 1992-01-15 1993-07-21 EUCLID MEDICAL INSTRUMENTS Inc. Système pour déterminer la topographie d'une surface courbée
US5307152A (en) 1992-09-29 1994-04-26 Industrial Technology Institute Moire inspection system
DE19519520A1 (de) 1995-06-02 1996-12-05 Thomas Wolf Verfahren und Vorrichtung zur Echtzeitbestimmung der Verformung, Dehnung und Kontur eines dreidimensionalen Objektes
US5608529A (en) 1994-01-31 1997-03-04 Nikon Corporation Optical three-dimensional shape measuring apparatus
US5714832A (en) 1996-03-15 1998-02-03 Hughes Electronics Miniature grating device
US5835223A (en) * 1996-01-05 1998-11-10 Electronic Packaging Services, Ltd. System for measuring surface flatness using shadow moire technology
WO1998055826A2 (fr) 1997-06-05 1998-12-10 Electronic Packaging Services, Ltd. Co. Mesure de la planeite d'une surface a l'aide d'une technique des franges moirees et d'un traitement d'image a echelonnement de phase
US5875029A (en) 1996-01-19 1999-02-23 Phase Metrics, Inc. Apparatus and method for surface inspection by specular interferometric and diffuse light detection
EP0924494A2 (fr) 1997-12-20 1999-06-23 Jürgen Prof. Dr. Massig Topomètre pour surfaces réfléchissantes
US5995224A (en) * 1998-01-28 1999-11-30 Zygo Corporation Full-field geometrically-desensitized interferometer employing diffractive and conventional optics
US6072581A (en) * 1998-10-30 2000-06-06 Zygo Corporation Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability
EP1065498A2 (fr) 1999-06-14 2001-01-03 Ford Motor Company Procédé et appareil pour la détermination de la qualité
WO2001006210A1 (fr) 1999-07-14 2001-01-25 Solvision Inc. Procede et systeme de mesure du relief d'un objet

Patent Citations (21)

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Publication number Priority date Publication date Assignee Title
US3619023A (en) * 1969-03-04 1971-11-09 Trw Inc Optical element for generating contour stripes
US4102578A (en) * 1975-01-15 1978-07-25 Fuji Photo Optical Co., Ltd. Method of and apparatus for recording surface irregularity of object
US4202630A (en) * 1975-01-15 1980-05-13 Fuji Photo Optical Co., Ltd. Method of and apparatus for recording surface irregularity of object
US4653104A (en) 1984-09-24 1987-03-24 Westinghouse Electric Corp. Optical three-dimensional digital data acquisition system
US4794550A (en) * 1986-10-15 1988-12-27 Eastman Kodak Company Extended-range moire contouring
US5202749A (en) 1988-12-23 1993-04-13 Klaus Pfister Process and device for observing moire patterns of surfaces to be tested by application of the moire method using phase shifting
DE4136428A1 (de) 1991-11-05 1993-05-06 Henning Dr. 7440 Nuertingen De Wolf Moire-verfahren mit elektronischem analysegitter
EP0551955A1 (fr) 1992-01-15 1993-07-21 EUCLID MEDICAL INSTRUMENTS Inc. Système pour déterminer la topographie d'une surface courbée
US5307152A (en) 1992-09-29 1994-04-26 Industrial Technology Institute Moire inspection system
US5608529A (en) 1994-01-31 1997-03-04 Nikon Corporation Optical three-dimensional shape measuring apparatus
DE19519520A1 (de) 1995-06-02 1996-12-05 Thomas Wolf Verfahren und Vorrichtung zur Echtzeitbestimmung der Verformung, Dehnung und Kontur eines dreidimensionalen Objektes
US5835223A (en) * 1996-01-05 1998-11-10 Electronic Packaging Services, Ltd. System for measuring surface flatness using shadow moire technology
US5875029A (en) 1996-01-19 1999-02-23 Phase Metrics, Inc. Apparatus and method for surface inspection by specular interferometric and diffuse light detection
US5714832A (en) 1996-03-15 1998-02-03 Hughes Electronics Miniature grating device
WO1998055826A2 (fr) 1997-06-05 1998-12-10 Electronic Packaging Services, Ltd. Co. Mesure de la planeite d'une surface a l'aide d'une technique des franges moirees et d'un traitement d'image a echelonnement de phase
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EP0924494A2 (fr) 1997-12-20 1999-06-23 Jürgen Prof. Dr. Massig Topomètre pour surfaces réfléchissantes
US5995224A (en) * 1998-01-28 1999-11-30 Zygo Corporation Full-field geometrically-desensitized interferometer employing diffractive and conventional optics
US6072581A (en) * 1998-10-30 2000-06-06 Zygo Corporation Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability
EP1065498A2 (fr) 1999-06-14 2001-01-03 Ford Motor Company Procédé et appareil pour la détermination de la qualité
WO2001006210A1 (fr) 1999-07-14 2001-01-25 Solvision Inc. Procede et systeme de mesure du relief d'un objet

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7589844B2 (en) * 2005-07-15 2009-09-15 Asahi Glass Company, Limited Shape inspection method and apparatus
US20080316501A1 (en) * 2005-07-15 2008-12-25 Asahi Glass Company Limited Shape inspection method and apparatus
US8415648B2 (en) 2008-02-15 2013-04-09 Pilkington Group Limited Method of determination of glass surface shapes and optical distortion by reflected optical imaging
US8861831B2 (en) * 2009-10-21 2014-10-14 Saint-Gobain Glass France Method for analyzing the quality of a glazing unit
US20120207380A1 (en) * 2009-10-21 2012-08-16 Saint-Gobain Glass France Method for analyzing the quality of a glazing unit
US9068904B2 (en) * 2011-01-18 2015-06-30 Arizona Board Of Regents On Behalf Of The University Of Arizona System and method for non-contact metrology of surfaces
US20120293808A1 (en) * 2011-01-18 2012-11-22 Arizona Board Of Regents On Behalf Of The University Of Arizona System and method for non-contact metrology of surfaces
US9470641B1 (en) 2015-06-26 2016-10-18 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured glass sheets
US9841276B2 (en) 2015-06-26 2017-12-12 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured glass sheet
US9846129B2 (en) 2015-06-26 2017-12-19 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured glass sheets
US9851200B2 (en) 2015-06-26 2017-12-26 Glasstech, Inc. Non-contact gaging system and method for contoured panels having specular surfaces
US9933251B2 (en) 2015-06-26 2018-04-03 Glasstech, Inc. Non-contact gaging system and method for contoured glass sheets
US9952039B2 (en) 2015-06-26 2018-04-24 Glasstech, Inc. System and method for measuring reflected optical distortion in contoured panels having specular surfaces
US9952037B2 (en) 2015-06-26 2018-04-24 Glasstech, Inc. System and method for developing three-dimensional surface information corresponding to a contoured sheet

Also Published As

Publication number Publication date
JP2004514882A (ja) 2004-05-20
FR2817042B1 (fr) 2003-06-20
KR20030045196A (ko) 2003-06-09
CN1568419A (zh) 2005-01-19
BR0115538A (pt) 2003-09-02
US20060050284A1 (en) 2006-03-09
FR2817042A1 (fr) 2002-05-24
EP1336076A1 (fr) 2003-08-20
AU2002218393A1 (en) 2002-06-03
CN100371677C (zh) 2008-02-27
WO2002042715A1 (fr) 2002-05-30

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