FR3015033B1 - Procede et dispositif d'analyse de la surface d'un substrat - Google Patents
Procede et dispositif d'analyse de la surface d'un substratInfo
- Publication number
- FR3015033B1 FR3015033B1 FR1362601A FR1362601A FR3015033B1 FR 3015033 B1 FR3015033 B1 FR 3015033B1 FR 1362601 A FR1362601 A FR 1362601A FR 1362601 A FR1362601 A FR 1362601A FR 3015033 B1 FR3015033 B1 FR 3015033B1
- Authority
- FR
- France
- Prior art keywords
- analyzing
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Textile Engineering (AREA)
- Engineering & Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1362601A FR3015033B1 (fr) | 2013-12-13 | 2013-12-13 | Procede et dispositif d'analyse de la surface d'un substrat |
CN201480003036.3A CN105008903A (zh) | 2013-12-13 | 2014-12-10 | 用于分析衬底的表面的方法和设备 |
PCT/FR2014/053262 WO2015086998A1 (fr) | 2013-12-13 | 2014-12-10 | Procede et dispositif d'analyse de la surface d'un substrat |
EP14827494.7A EP3080592A1 (fr) | 2013-12-13 | 2014-12-10 | Procede et dispositif d'analyse de la surface d'un substrat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1362601A FR3015033B1 (fr) | 2013-12-13 | 2013-12-13 | Procede et dispositif d'analyse de la surface d'un substrat |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3015033A1 FR3015033A1 (fr) | 2015-06-19 |
FR3015033B1 true FR3015033B1 (fr) | 2015-12-04 |
Family
ID=50069220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1362601A Expired - Fee Related FR3015033B1 (fr) | 2013-12-13 | 2013-12-13 | Procede et dispositif d'analyse de la surface d'un substrat |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP3080592A1 (fr) |
CN (1) | CN105008903A (fr) |
FR (1) | FR3015033B1 (fr) |
WO (1) | WO2015086998A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6909377B2 (ja) * | 2016-07-11 | 2021-07-28 | 高知県公立大学法人 | 検査システムおよび検査方法 |
CN113379835B (zh) * | 2021-06-29 | 2024-06-04 | 深圳中科飞测科技股份有限公司 | 检测设备的校准方法、装置、设备及可读存储介质 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4285745A (en) * | 1979-08-01 | 1981-08-25 | Ppg Industries, Inc. | Method of determining optical quality of a laminated article |
JPH0615968B2 (ja) * | 1986-08-11 | 1994-03-02 | 伍良 松本 | 立体形状測定装置 |
DE19643018B4 (de) | 1996-10-18 | 2010-06-17 | Isra Surface Vision Gmbh | Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen |
US6100990A (en) * | 1999-06-14 | 2000-08-08 | Ford Motor Company | Method and apparatus for determining reflective optical quality using gray-scale patterns |
WO2002018980A2 (fr) | 2000-09-01 | 2002-03-07 | Applied Process Technologies | Systeme optique permettant de visualiser les distorsions dans des feuilles reflechissantes en mouvement |
FR2817042B1 (fr) | 2000-11-22 | 2003-06-20 | Saint Gobain | Procede et dispositif d'analyse de la surface d'un substrat |
FR2936605B1 (fr) * | 2008-10-01 | 2014-10-31 | Saint Gobain | Dispositif d'analyse de la surface d'un substrat |
WO2010037956A1 (fr) | 2008-10-02 | 2010-04-08 | France Telecom | Procede et systeme de generation d'une interface de controle des expressions faciales d'un avatar |
US8441532B2 (en) * | 2009-02-24 | 2013-05-14 | Corning Incorporated | Shape measurement of specular reflective surface |
-
2013
- 2013-12-13 FR FR1362601A patent/FR3015033B1/fr not_active Expired - Fee Related
-
2014
- 2014-12-10 CN CN201480003036.3A patent/CN105008903A/zh active Pending
- 2014-12-10 WO PCT/FR2014/053262 patent/WO2015086998A1/fr active Application Filing
- 2014-12-10 EP EP14827494.7A patent/EP3080592A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
FR3015033A1 (fr) | 2015-06-19 |
EP3080592A1 (fr) | 2016-10-19 |
WO2015086998A1 (fr) | 2015-06-18 |
CN105008903A (zh) | 2015-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 5 |
|
ST | Notification of lapse |
Effective date: 20190906 |