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USD803283S1 - Wafer handling assembly - Google Patents

Wafer handling assembly Download PDF

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Publication number
USD803283S1
USD803283S1 US29564740 US201629564740F USD803283S US D803283 S1 USD803283 S1 US D803283S1 US 29564740 US29564740 US 29564740 US 201629564740 F US201629564740 F US 201629564740F US D803283 S USD803283 S US D803283S
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US
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Grant
Patent type
Design
Prior art keywords
fig
handling
assembly
wafer
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29564740
Inventor
Yuliy Rashkovsky
Brett Stuart Snowden
Miguel Angel Saldana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco Instruments Inc
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Filing date
Publication date
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Description

FIG. 1 is a top perspective view of a first embodiment of a wafer handling assembly.

FIG. 2 is a top view of the wafer handling assembly of FIG. 1.

FIG. 3 is a side view of the wafer handling assembly of FIG. 1.

FIG. 4 is another side view of the wafer handling assembly of FIG. 1.

FIG. 5 is a bottom perspective view of the wafer handling assembly of FIG. 1.

FIG. 6 is a top perspective view of a second embodiment of a wafer handling assembly.

FIG. 7 is a top view of the wafer handling assembly of FIG. 6.

FIG. 8 is a side view of the wafer handling assembly of FIG. 6.

FIG. 9 is another side view of the wafer handling assembly of FIG. 6.

FIG. 10 is a bottom perspective view of the wafer handling assembly of FIG. 6.

FIG. 11 is a top perspective view of a third embodiment of a wafer handling assembly.

FIG. 12 is a top view of the wafer handling assembly of FIG. 11.

FIG. 13 is a side view of the wafer handling assembly of FIG. 11.

FIG. 14 is another side view of the wafer handling assembly of FIG. 11.

FIG. 15 is a bottom perspective view of the wafer handling assembly of FIG. 11.

FIG. 16 is a top perspective view of a fourth embodiment of a wafer handling assembly.

FIG. 17 is a top view of the wafer handling assembly of FIG. 16.

FIG. 18 is a side view of the wafer handling assembly of FIG. 16.

FIG. 19 is another side view of the wafer handling assembly of FIG. 16.

FIG. 20 is a bottom perspective view of the wafer handling assembly of FIG. 16.

FIG. 21 is a top perspective view of a fifth embodiment of a wafer handling assembly.

FIG. 22 is a top view of the wafer handling assembly of FIG. 21.

FIG. 23 is a side view of the wafer handling assembly of FIG. 21.

FIG. 24 is another side view of the wafer handling assembly of FIG. 21.

FIG. 25 is a bottom perspective view of the wafer handling assembly of FIG. 21.

FIG. 26 is a top perspective view of a sixth embodiment of a wafer handling assembly.

FIG. 27 is a top view of the wafer handling assembly of FIG. 26.

FIG. 28 is a side view of the wafer handling assembly of FIG. 26.

FIG. 29 is another side view of the wafer handling assembly of FIG. 26; and,

FIG. 30 is a bottom perspective view of the wafer handling assembly of FIG. 26.

Claims (1)

    CLAIM
  1. The ornamental design for a wafer handling assembly, as shown and described.
US29564740 2016-05-16 2016-05-16 Wafer handling assembly Active USD803283S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29564740 USD803283S1 (en) 2016-05-16 2016-05-16 Wafer handling assembly

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US29564740 USD803283S1 (en) 2016-05-16 2016-05-16 Wafer handling assembly

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Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4029351A (en) 1976-06-02 1977-06-14 International Business Machines Corporation Bernoulli pickup head with self-restoring anti-tilt improvement
US5643366A (en) 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5791895A (en) * 1994-02-17 1998-08-11 Novellus Systems, Inc. Apparatus for thermal treatment of thin film wafer
US6249342B1 (en) * 1999-07-06 2001-06-19 David Cheng Method and apparatus for handling and testing wafers
US6276892B1 (en) * 1998-03-31 2001-08-21 Matsushita Electric Industrial Co., Ltd. Wafer handling apparatus
US6357996B2 (en) 1999-05-14 2002-03-19 Newport Corporation Edge gripping specimen prealigner
US6514033B2 (en) 1999-03-18 2003-02-04 Applied Materials, Inc. Mechanical gripper for wafer handling robots
US6537011B1 (en) * 2000-03-10 2003-03-25 Applied Materials, Inc. Method and apparatus for transferring and supporting a substrate
US6692219B2 (en) 2000-11-29 2004-02-17 Tokyo Electron Limited Reduced edge contact wafer handling system and method of retrofitting and using same
US20050111944A1 (en) * 2003-11-25 2005-05-26 Marc Aho Compact wafer handling system with single axis robotic arm and prealigner-cassette elevator
US6935466B2 (en) * 2001-03-01 2005-08-30 Applied Materials, Inc. Lift pin alignment and operation methods and apparatus
US20080107508A1 (en) * 2006-11-02 2008-05-08 Chartered Semiconductor Manufacturing Ltd. Wafer handling system for a loadlock
US8008884B2 (en) * 2007-07-17 2011-08-30 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls
JP2012099755A (en) 2010-11-05 2012-05-24 Disco Abrasive Syst Ltd Transporting device
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US20150075431A1 (en) 2012-05-18 2015-03-19 Veeco Instruments Inc. Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition
WO2016001863A1 (en) 2014-07-03 2016-01-07 Lpe S.P.A. Tool for manipulating substrates, manipulation method and epitaxial reactor
US20170256434A1 (en) * 2016-03-01 2017-09-07 Veeco Instruments, Inc. Wafer handling assembly
US20170256436A1 (en) * 2016-03-01 2017-09-07 Veeco Instruments, Inc. Wafer handling assembly

Patent Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4029351A (en) 1976-06-02 1977-06-14 International Business Machines Corporation Bernoulli pickup head with self-restoring anti-tilt improvement
US5643366A (en) 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5791895A (en) * 1994-02-17 1998-08-11 Novellus Systems, Inc. Apparatus for thermal treatment of thin film wafer
US6276892B1 (en) * 1998-03-31 2001-08-21 Matsushita Electric Industrial Co., Ltd. Wafer handling apparatus
US6514033B2 (en) 1999-03-18 2003-02-04 Applied Materials, Inc. Mechanical gripper for wafer handling robots
US6357996B2 (en) 1999-05-14 2002-03-19 Newport Corporation Edge gripping specimen prealigner
US6249342B1 (en) * 1999-07-06 2001-06-19 David Cheng Method and apparatus for handling and testing wafers
US6537011B1 (en) * 2000-03-10 2003-03-25 Applied Materials, Inc. Method and apparatus for transferring and supporting a substrate
US6692219B2 (en) 2000-11-29 2004-02-17 Tokyo Electron Limited Reduced edge contact wafer handling system and method of retrofitting and using same
US6935466B2 (en) * 2001-03-01 2005-08-30 Applied Materials, Inc. Lift pin alignment and operation methods and apparatus
US20050111944A1 (en) * 2003-11-25 2005-05-26 Marc Aho Compact wafer handling system with single axis robotic arm and prealigner-cassette elevator
US20080107508A1 (en) * 2006-11-02 2008-05-08 Chartered Semiconductor Manufacturing Ltd. Wafer handling system for a loadlock
US8920097B2 (en) * 2006-11-02 2014-12-30 Globalfoundries Singapore Pte. Ltd. Wafer handling system for a loadlock
US8008884B2 (en) * 2007-07-17 2011-08-30 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls
JP2012099755A (en) 2010-11-05 2012-05-24 Disco Abrasive Syst Ltd Transporting device
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US20150075431A1 (en) 2012-05-18 2015-03-19 Veeco Instruments Inc. Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition
WO2016001863A1 (en) 2014-07-03 2016-01-07 Lpe S.P.A. Tool for manipulating substrates, manipulation method and epitaxial reactor
US20170256434A1 (en) * 2016-03-01 2017-09-07 Veeco Instruments, Inc. Wafer handling assembly
US20170256436A1 (en) * 2016-03-01 2017-09-07 Veeco Instruments, Inc. Wafer handling assembly

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