TW379380B - A carrier head with a flexible membrane for a chemical mechanical polishing system - Google Patents

A carrier head with a flexible membrane for a chemical mechanical polishing system Download PDF

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Publication number
TW379380B
TW379380B TW087107768A TW87107768A TW379380B TW 379380 B TW379380 B TW 379380B TW 087107768 A TW087107768 A TW 087107768A TW 87107768 A TW87107768 A TW 87107768A TW 379380 B TW379380 B TW 379380B
Authority
TW
Taiwan
Prior art keywords
drive shaft
carrying head
scope
patent application
ring
Prior art date
Application number
TW087107768A
Other languages
English (en)
Chinese (zh)
Inventor
Ilya Perlov
Eugene Gantvarg
Sen-Hou Ko
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of TW379380B publication Critical patent/TW379380B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
TW087107768A 1997-07-11 1998-05-19 A carrier head with a flexible membrane for a chemical mechanical polishing system TW379380B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/891,548 US5964653A (en) 1997-07-11 1997-07-11 Carrier head with a flexible membrane for a chemical mechanical polishing system

Publications (1)

Publication Number Publication Date
TW379380B true TW379380B (en) 2000-01-11

Family

ID=25398390

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087107768A TW379380B (en) 1997-07-11 1998-05-19 A carrier head with a flexible membrane for a chemical mechanical polishing system

Country Status (5)

Country Link
US (7) US5964653A (enExample)
JP (2) JP4413421B2 (enExample)
KR (1) KR100513573B1 (enExample)
TW (1) TW379380B (enExample)
WO (1) WO1999002304A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI393209B (zh) * 2003-02-10 2013-04-11 Ebara Corp 研磨基板之方法
TWI727056B (zh) * 2016-07-22 2021-05-11 日商迪思科股份有限公司 研磨裝置

Families Citing this family (164)

* Cited by examiner, † Cited by third party
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US20010041526A1 (en) 2001-11-15
US20030022609A1 (en) 2003-01-30
US20050142995A1 (en) 2005-06-30
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US6648740B2 (en) 2003-11-18
US6277010B1 (en) 2001-08-21
US6896584B2 (en) 2005-05-24
US5964653A (en) 1999-10-12
US6106378A (en) 2000-08-22
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JP2009255289A (ja) 2009-11-05
JP5073714B2 (ja) 2012-11-14

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