TW202028483A - 半導體裝置用接合導線 - Google Patents

半導體裝置用接合導線 Download PDF

Info

Publication number
TW202028483A
TW202028483A TW108137048A TW108137048A TW202028483A TW 202028483 A TW202028483 A TW 202028483A TW 108137048 A TW108137048 A TW 108137048A TW 108137048 A TW108137048 A TW 108137048A TW 202028483 A TW202028483 A TW 202028483A
Authority
TW
Taiwan
Prior art keywords
wire
bonding
core material
bonding wire
endurance
Prior art date
Application number
TW108137048A
Other languages
English (en)
Chinese (zh)
Inventor
山田隆
小田大造
榛原照男
大石良
齋藤和之
宇野智裕
Original Assignee
日商日鐵新材料股份有限公司
日商日鐵化學材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日鐵新材料股份有限公司, 日商日鐵化學材料股份有限公司 filed Critical 日商日鐵新材料股份有限公司
Publication of TW202028483A publication Critical patent/TW202028483A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0227—Rods, wires
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/3013—Au as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302—Cu as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • B32B15/018—Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of a noble metal or a noble metal alloy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/04—Alloys based on a platinum group metal
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C22C9/04—Alloys based on copper with zinc as the next major constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C22C9/06—Alloys based on copper with nickel or cobalt as the next major constituent
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • H10W72/0115—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/432—Mechanical processes
    • H01L2224/4321—Pulling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/438—Post-treatment of the connector
    • H01L2224/43848—Thermal treatments, e.g. annealing, controlled cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45147—Copper (Cu) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/4557—Plural coating layers
    • H01L2224/45572—Two-layer stack coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45644—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45663—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
    • H01L2224/45664—Palladium (Pd) as principal constituent
    • H10W72/015—
    • H10W72/01515—
    • H10W72/01551—
    • H10W72/01565—
    • H10W72/0711—
    • H10W72/07141—
    • H10W72/075—
    • H10W72/07532—
    • H10W72/07541—
    • H10W72/50—
    • H10W72/521—
    • H10W72/522—
    • H10W72/523—
    • H10W72/536—
    • H10W72/552—
    • H10W72/5522—
    • H10W72/5525—
    • H10W72/555—
    • H10W72/59—
    • H10W72/952—
    • H10W74/40—
    • H10W90/754—
    • H10W90/756—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12868—Group IB metal-base component alternative to platinum group metal-base component [e.g., precious metal, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12875—Platinum group metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12882—Cu-base component alternative to Ag-, Au-, or Ni-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12889—Au-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12896—Ag-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12903—Cu-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12903—Cu-base component
    • Y10T428/1291—Next to Co-, Cu-, or Ni-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Wire Bonding (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
TW108137048A 2015-06-15 2015-07-24 半導體裝置用接合導線 TW202028483A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015120509 2015-06-15
JP2015-120509 2015-06-15

Publications (1)

Publication Number Publication Date
TW202028483A true TW202028483A (zh) 2020-08-01

Family

ID=56883467

Family Applications (10)

Application Number Title Priority Date Filing Date
TW107131333A TW201923099A (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線
TW108137048A TW202028483A (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線
TW105140437A TWI638366B (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線
TW104124133A TW201643890A (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線
TW105133324A TW201709217A (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線
TW107104291A TWI715824B (zh) 2015-06-15 2016-05-26 半導體裝置用接合線
TW105116514A TWI567211B (zh) 2015-06-15 2016-05-26 Connection lines for semiconductor devices
TW105137924A TWI618802B (zh) 2015-06-15 2016-05-26 半導體裝置用接合線
TW105118619A TWI631227B (zh) 2015-06-15 2016-06-14 半導體裝置用接合線
TW107122893A TWI763878B (zh) 2015-06-15 2016-06-14 半導體裝置用接合線

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW107131333A TW201923099A (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線

Family Applications After (8)

Application Number Title Priority Date Filing Date
TW105140437A TWI638366B (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線
TW104124133A TW201643890A (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線
TW105133324A TW201709217A (zh) 2015-06-15 2015-07-24 半導體裝置用接合導線
TW107104291A TWI715824B (zh) 2015-06-15 2016-05-26 半導體裝置用接合線
TW105116514A TWI567211B (zh) 2015-06-15 2016-05-26 Connection lines for semiconductor devices
TW105137924A TWI618802B (zh) 2015-06-15 2016-05-26 半導體裝置用接合線
TW105118619A TWI631227B (zh) 2015-06-15 2016-06-14 半導體裝置用接合線
TW107122893A TWI763878B (zh) 2015-06-15 2016-06-14 半導體裝置用接合線

Country Status (11)

Country Link
US (4) US10137534B2 (enExample)
EP (3) EP3131113B1 (enExample)
JP (5) JP2017005240A (enExample)
KR (6) KR20180008245A (enExample)
CN (4) CN106489199B (enExample)
DE (4) DE112015004422B4 (enExample)
MY (1) MY162048A (enExample)
PH (1) PH12016501076B1 (enExample)
SG (1) SG11201604432SA (enExample)
TW (10) TW201923099A (enExample)
WO (2) WO2016203659A1 (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016203659A1 (ja) 2015-06-15 2016-12-22 日鉄住金マイクロメタル株式会社 半導体装置用ボンディングワイヤ
WO2017013796A1 (ja) 2015-07-23 2017-01-26 日鉄住金マイクロメタル株式会社 半導体装置用ボンディングワイヤ
WO2017221434A1 (ja) * 2016-06-20 2017-12-28 日鉄住金マイクロメタル株式会社 半導体装置用ボンディングワイヤ
CN109564881A (zh) * 2017-02-22 2019-04-02 日铁化学材料株式会社 半导体装置用接合线
JP6371932B1 (ja) * 2017-02-22 2018-08-08 新日鉄住金マテリアルズ株式会社 半導体装置用ボンディングワイヤ
EP3667710B1 (en) * 2017-08-09 2022-01-05 NIPPON STEEL Chemical & Material Co., Ltd. Cu ALLOY BONDING WIRE FOR SEMICONDUCTOR DEVICE
KR102187539B1 (ko) * 2017-12-28 2020-12-07 닛데쓰마이크로메탈가부시키가이샤 반도체 장치용 본딩 와이어
TWI749372B (zh) * 2018-09-21 2021-12-11 日商日鐵化學材料股份有限公司 半導體裝置用Cu合金接合導線
WO2020059856A1 (ja) * 2018-09-21 2020-03-26 日鉄ケミカル＆マテリアル株式会社 半導体装置用Ｃｕ合金ボンディングワイヤ
CN109402445B (zh) * 2018-11-09 2021-01-15 上海理工大学 一种抗氧化铜基合金键合引线及其制备方法
JP6487108B1 (ja) 2018-11-26 2019-03-20 田中電子工業株式会社 パラジウム被覆銅ボンディングワイヤ及びその製造方法
JP6507329B1 (ja) 2019-02-08 2019-04-24 田中電子工業株式会社 パラジウム被覆銅ボンディングワイヤ、ワイヤ接合構造、半導体装置及び半導体装置の製造方法
CN113748493B (zh) * 2019-03-12 2025-03-21 田中电子工业株式会社 钯覆盖铜接合线、钯覆盖铜接合线的制造方法、及使用了其的引线接合结构、半导体装置以及其制造方法
WO2020184654A1 (ja) * 2019-03-13 2020-09-17 日鉄マイクロメタル株式会社 ボンディングワイヤ
TWI699468B (zh) * 2019-04-03 2020-07-21 精機機械廠股份有限公司 縫紉機之三軌送布裝置
PH12021553019A1 (en) 2019-06-04 2022-11-07 Tanaka Electronics Ind Palladium-coated copper bonding wire, manufacturing method of palladium-coated copper bonding wire, semiconductor device using the same, and manufacturing method thereof
CN110284023B (zh) * 2019-07-22 2021-02-26 安徽广宇电子材料有限公司 一种铜合金键合丝及其制备方法和应用
KR102766811B1 (ko) * 2019-10-01 2025-02-17 타나카 덴시 코오교오 카부시키가이샤 와이어 접합 구조와 그것에 이용되는 본딩 와이어 및 반도체 장치
EP4120328A4 (en) * 2020-03-13 2023-12-20 Nippon Micrometal Corporation ALUMINUM CONNECTING WIRE
KR20220091299A (ko) 2020-12-23 2022-06-30 이하준 부상 방지를 위한 리프팅 벨트
TWI726836B (zh) * 2020-12-31 2021-05-01 大陸商汕頭市駿碼凱撒有限公司 銅微合金導線及其製備方法
TW202235634A (zh) * 2021-02-05 2022-09-16 日商日鐵新材料股份有限公司 半導體裝置用Al接合線
JP7157279B1 (ja) * 2021-06-25 2022-10-19 日鉄マイクロメタル株式会社 半導体装置用ボンディングワイヤ
US11929343B2 (en) 2021-06-25 2024-03-12 Nippon Micrometal Corporation Bonding wire for semiconductor devices
JP7783885B2 (ja) * 2021-06-25 2025-12-10 日鉄マイクロメタル株式会社 半導体装置用ボンディングワイヤ
WO2022270050A1 (ja) * 2021-06-25 2022-12-29 日鉄マイクロメタル株式会社 半導体装置用ボンディングワイヤ
JP7783886B2 (ja) * 2021-06-25 2025-12-10 日鉄マイクロメタル株式会社 半導体装置用ボンディングワイヤ
JP7783888B2 (ja) * 2021-06-25 2025-12-10 日鉄マイクロメタル株式会社 半導体装置用ボンディングワイヤ
JP7072126B1 (ja) 2022-02-10 2022-05-19 田中貴金属工業株式会社 Ａｇ－Ｐｄ－Ｃｕ系合金からなるプローブピン用材料
US12166006B2 (en) * 2022-06-24 2024-12-10 Nippon Steel Chemical & Material Co., Ltd. Bonding wire for semiconductor devices
US12092278B2 (en) 2022-10-07 2024-09-17 Magna Electronics, Llc Generating a spotlight
US12228653B2 (en) 2022-10-07 2025-02-18 Magna Electronics, Llc Integrating a sensing system into headlight optics
EP4495982A4 (en) 2023-05-30 2025-06-18 Nippon Micrometal Corporation BOND WIRE
US12202396B1 (en) 2023-12-19 2025-01-21 Magna Electronics, Llc Line-scan-gated imaging for LiDAR headlight

Family Cites Families (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120693A (ja) 1984-07-06 1986-01-29 Toshiba Corp ボンデイングワイヤ−
JPS6148543A (ja) 1984-08-10 1986-03-10 Sumitomo Electric Ind Ltd 半導体素子結線用銅合金線
JPS61163194A (ja) 1985-01-09 1986-07-23 Toshiba Corp 半導体素子用ボンデイング線
JPS61234063A (ja) 1985-04-10 1986-10-18 Tanaka Denshi Kogyo Kk 半導体素子のボンデイング用銅線
JPS6297360A (ja) 1985-10-24 1987-05-06 Mitsubishi Metal Corp 半導体装置のボンデイングワイヤ用表面被覆高純度銅極細線
JPS62130248A (ja) 1985-11-29 1987-06-12 Furukawa Electric Co Ltd:The ボンデイング用銅細線
JPS62130249A (ja) 1985-11-29 1987-06-12 Furukawa Electric Co Ltd:The ボンデイング用銅細線
JPS63238232A (ja) 1987-03-25 1988-10-04 Furukawa Electric Co Ltd:The 銅細線とその製造法
JPH01290231A (ja) 1988-05-18 1989-11-22 Mitsubishi Metal Corp 半導体装置用銅合金極細線及び半導体装置
JP2714560B2 (ja) * 1988-12-24 1998-02-16 日鉱金属株式会社 ダイレクトボンディング性の良好な銅合金
JP2873770B2 (ja) 1993-03-19 1999-03-24 新日本製鐵株式会社 半導体素子のワイヤボンディング用パラジウム細線
JPH0786325A (ja) 1993-09-14 1995-03-31 Hitachi Cable Ltd 電子機器用銅線
JPH07138678A (ja) 1994-05-09 1995-05-30 Toshiba Corp 半導体装置
JP3279206B2 (ja) 1996-12-16 2002-04-30 住友電気工業株式会社 難燃性樹脂組成物とそれを用いた絶縁電線、シールド電線および被覆チューブ
KR100717667B1 (ko) 2000-09-18 2007-05-11 신닛뽄세이테쯔 카부시키카이샤 반도체용 본딩 와이어 및 그 제조 방법
JP2004064033A (ja) 2001-10-23 2004-02-26 Sumitomo Electric Wintec Inc ボンディングワイヤー
TWI287282B (en) 2002-03-14 2007-09-21 Fairchild Kr Semiconductor Ltd Semiconductor package having oxidation-free copper wire
KR100514312B1 (ko) 2003-02-14 2005-09-13 헤라우스오리엔탈하이텍 주식회사 반도체 소자용 본딩 와이어
JP2005167020A (ja) 2003-12-03 2005-06-23 Sumitomo Electric Ind Ltd ボンディングワイヤーおよびそれを使用した集積回路デバイス
EP1677345A1 (en) 2003-10-20 2006-07-05 Sumitomo Electric Industries, Ltd. Bonding wire and integrated circuit device using the same
JP4158928B2 (ja) * 2004-09-02 2008-10-01 古河電気工業株式会社 ボンディングワイヤー及びその製造方法
JP4672373B2 (ja) 2005-01-05 2011-04-20 新日鉄マテリアルズ株式会社 半導体装置用ボンディングワイヤ
JP2007012776A (ja) 2005-06-29 2007-01-18 Nippon Steel Materials Co Ltd 半導体装置用ボンディングワイヤ
KR20090086448A (ko) * 2005-01-05 2009-08-12 신닛테츠 마테리알즈 가부시키가이샤 반도체 장치용 본딩 와이어
JP2006216929A (ja) * 2005-01-05 2006-08-17 Nippon Steel Corp 半導体装置用ボンディングワイヤ
KR100702662B1 (ko) * 2005-02-18 2007-04-02 엠케이전자 주식회사 반도체 패키징용 구리 본딩 와이어
JP2007019349A (ja) 2005-07-08 2007-01-25 Sumitomo Metal Mining Co Ltd ボンディングワイヤ
US8610291B2 (en) 2006-08-31 2013-12-17 Nippon Steel & Sumikin Materials Co., Ltd. Copper alloy bonding wire for semiconductor device
JP5116101B2 (ja) 2007-06-28 2013-01-09 新日鉄住金マテリアルズ株式会社 半導体実装用ボンディングワイヤ及びその製造方法
US20090127317A1 (en) * 2007-11-15 2009-05-21 Infineon Technologies Ag Device and method for producing a bonding connection
JP4617375B2 (ja) * 2007-12-03 2011-01-26 新日鉄マテリアルズ株式会社 半導体装置用ボンディングワイヤ
JP4885117B2 (ja) * 2007-12-03 2012-02-29 新日鉄マテリアルズ株式会社 半導体装置用ボンディングワイヤ
KR101055957B1 (ko) * 2007-12-03 2011-08-09 가부시키가이샤 닛데쓰 마이크로 메탈 반도체 장치용 본딩 와이어
JP4904252B2 (ja) * 2007-12-03 2012-03-28 新日鉄マテリアルズ株式会社 半導体装置用ボンディングワイヤ
EP2239766B1 (en) 2008-01-25 2013-03-20 Nippon Steel & Sumikin Materials Co., Ltd. Bonding wire for semiconductor device
TWI415707B (zh) 2008-09-01 2013-11-21 日月光半導體製造股份有限公司 銅製銲線、銲線接合結構及銲線接合方法
US8815019B2 (en) 2009-03-17 2014-08-26 Nippon Steel & Sumikin Materials., Ltd. Bonding wire for semiconductor
CN102459668A (zh) 2009-06-24 2012-05-16 新日铁高新材料株式会社 半导体用铜合金接合线
JP5497360B2 (ja) 2009-07-30 2014-05-21 新日鉄住金マテリアルズ株式会社 半導体用ボンディングワイヤー
JP4637256B1 (ja) 2009-09-30 2011-02-23 新日鉄マテリアルズ株式会社 半導体用ボンディングワイヤー
SG178063A1 (en) 2009-07-30 2012-03-29 Nippon Steel Materials Co Ltd Bonding wire for semiconductor
WO2011093038A1 (ja) 2010-01-27 2011-08-04 住友ベークライト株式会社 半導体装置
JP5550369B2 (ja) 2010-02-03 2014-07-16 新日鉄住金マテリアルズ株式会社 半導体用銅ボンディングワイヤとその接合構造
CN102884615A (zh) 2010-04-14 2013-01-16 大自达电线株式会社 焊线
TW201205695A (en) 2010-07-16 2012-02-01 Nippon Steel Materials Co Ltd Bonding wire for semiconductor
JP4919364B2 (ja) 2010-08-11 2012-04-18 田中電子工業株式会社 ボールボンディング用金被覆銅ワイヤ
JP5616739B2 (ja) 2010-10-01 2014-10-29 新日鉄住金マテリアルズ株式会社 複層銅ボンディングワイヤの接合構造
JP5556577B2 (ja) 2010-10-20 2014-07-23 日立金属株式会社 銅ボンディングワイヤ
JP2012099577A (ja) 2010-10-29 2012-05-24 Sumitomo Metal Mining Co Ltd ボンディングワイヤ
CN102130067B (zh) 2010-12-31 2012-05-02 四川威纳尔特种电子材料有限公司 一种表面镀钯键合铜丝
JP5760544B2 (ja) 2011-03-17 2015-08-12 日立金属株式会社 軟質希薄銅合金線、軟質希薄銅合金撚線およびこれらを用いた絶縁電線、同軸ケーブルおよび複合ケーブル
JP6019547B2 (ja) 2011-07-21 2016-11-02 日立金属株式会社 銅ボンディングワイヤ
SG190479A1 (en) 2011-12-01 2013-06-28 Heraeus Materials Tech Gmbh Secondary alloyed 1n copper wire for bonding in microelectronics device
SG190480A1 (en) 2011-12-01 2013-06-28 Heraeus Materials Tech Gmbh 3n copper wire with trace additions for bonding in microelectronics device
JP5088981B1 (ja) 2011-12-21 2012-12-05 田中電子工業株式会社 Ｐｄ被覆銅ボールボンディングワイヤ
CN104205314B (zh) 2012-03-22 2017-02-22 住友电木株式会社 半导体装置及其制造方法
KR101366688B1 (ko) 2012-04-30 2014-02-25 엠케이전자 주식회사 구리계 본딩 와이어 및 이를 포함하는 반도체 패키지
JP5159000B1 (ja) 2012-06-13 2013-03-06 田中電子工業株式会社 半導体装置接続用アルミニウム合金細線
TWM442579U (en) 2012-06-22 2012-12-01 Feng Ching Metal Corp Long-term storage bonding wire for semiconductor
CN102776408B (zh) 2012-08-16 2014-01-08 烟台一诺电子材料有限公司 一种银合金丝及其制备方法
EP2703116B1 (en) * 2012-09-04 2017-03-22 Heraeus Deutschland GmbH & Co. KG Method for manufacturing a silver alloy wire for bonding applications
JP5219316B1 (ja) * 2012-09-28 2013-06-26 田中電子工業株式会社 半導体装置接続用銅白金合金細線
JP5213146B1 (ja) * 2012-10-03 2013-06-19 田中電子工業株式会社 半導体装置接続用銅ロジウム合金細線
TW201430977A (zh) 2013-01-23 2014-08-01 賀利氏材料科技公司 用於接合應用的經塗覆線材
TWM454881U (zh) 2013-01-25 2013-06-11 風青實業股份有限公司 半導體用銲線
TWI486970B (zh) 2013-01-29 2015-06-01 莊東漢 銅基合金線材及其製造方法
EP2927956A1 (en) 2013-02-15 2015-10-07 Heraeus Materials Singapore Pte. Ltd. Copper bond wire and method of making the same
KR101513493B1 (ko) * 2013-02-19 2015-04-20 엠케이전자 주식회사 은 합금 본딩 와이어
JP5668087B2 (ja) 2013-02-22 2015-02-12 田中電子工業株式会社 半導体装置接合用銅希薄ニッケル合金ワイヤの構造
US9487850B2 (en) * 2013-03-14 2016-11-08 Materion Corporation Ultra high strength copper-nickel-tin alloys
JP5529992B1 (ja) 2013-03-14 2014-06-25 タツタ電線株式会社 ボンディング用ワイヤ
JP5399581B1 (ja) 2013-05-14 2014-01-29 田中電子工業株式会社 高速信号用ボンディングワイヤ
JP5546670B1 (ja) 2013-06-13 2014-07-09 田中電子工業株式会社 超音波接合用コーティング銅ワイヤの構造
JP6120693B2 (ja) * 2013-06-24 2017-04-26 株式会社三共 遊技機
TWM466108U (zh) 2013-07-26 2013-11-21 風青實業股份有限公司 半導體用銲線
JP5591987B2 (ja) * 2013-08-20 2014-09-17 新日鉄住金マテリアルズ株式会社 半導体装置用ボンディングワイヤ
KR101851473B1 (ko) * 2013-09-06 2018-04-23 후루카와 덴키 고교 가부시키가이샤 구리 합금 선재 및 그 제조방법
KR101582449B1 (ko) 2013-09-12 2016-01-05 엠케이전자 주식회사 은 합금 본딩 와이어 및 이를 이용한 반도체 장치
CN104593635A (zh) * 2013-11-04 2015-05-06 蔡元华 电子封装用铜键合线及其制备方法
TWI525726B (zh) 2013-11-25 2016-03-11 大亞電線電纜股份有限公司 Preparation method of package wire with skin layer and its finished product
WO2015115241A1 (ja) 2014-01-31 2015-08-06 タツタ電線株式会社 ワイヤボンディング及びその製造方法
TWI605559B (zh) 2014-04-21 2017-11-11 新日鐵住金高新材料股份有限公司 Bonding wire for semiconductor device
CN104051080B (zh) 2014-07-03 2016-06-15 深圳市凯中和东新材料有限公司 绝缘性导线的制备方法
US9368470B2 (en) 2014-10-31 2016-06-14 Freescale Semiconductor, Inc. Coated bonding wire and methods for bonding using same
WO2016203659A1 (ja) 2015-06-15 2016-12-22 日鉄住金マイクロメタル株式会社 半導体装置用ボンディングワイヤ
JP5912008B1 (ja) * 2015-06-15 2016-04-27 日鉄住金マイクロメタル株式会社 半導体装置用ボンディングワイヤ
WO2017013796A1 (ja) 2015-07-23 2017-01-26 日鉄住金マイクロメタル株式会社 半導体装置用ボンディングワイヤ
DE112015004682B4 (de) 2015-08-12 2020-07-30 Nippon Micrometal Corporation Bonddraht für Halbleitervorrichtung
JP6002300B1 (ja) 2015-09-02 2016-10-05 田中電子工業株式会社 ボールボンディング用パラジウム（Ｐｄ）被覆銅ワイヤ
JP6047214B1 (ja) 2015-11-02 2016-12-21 田中電子工業株式会社 ボールボンディング用貴金属被覆銅ワイヤ

Also Published As

Publication number Publication date
EP3349246B1 (en) 2020-07-22
TWI618802B (zh) 2018-03-21
TW201709217A (zh) 2017-03-01
TW201643261A (zh) 2016-12-16
TW201717214A (zh) 2017-05-16
SG11201604432SA (en) 2017-01-27
MY162048A (en) 2017-05-31
EP3282473A1 (en) 2018-02-14
CN107533992B (zh) 2021-03-12
EP3131113B1 (en) 2023-11-29
DE112016000133T5 (de) 2017-08-17
KR20180005652A (ko) 2018-01-16
DE112016002703T5 (de) 2018-03-01
PH12016501076B1 (en) 2018-07-11
WO2016203659A1 (ja) 2016-12-22
US20180133843A1 (en) 2018-05-17
JPWO2016204138A1 (ja) 2017-09-14
JP2017005240A (ja) 2017-01-05
TWI715824B (zh) 2021-01-11
WO2016204138A1 (ja) 2016-12-22
KR101925236B1 (ko) 2018-12-04
US20170216974A1 (en) 2017-08-03
TWI631227B (zh) 2018-08-01
TW201923099A (zh) 2019-06-16
US10610976B2 (en) 2020-04-07
TWI763878B (zh) 2022-05-11
EP3131113A1 (en) 2017-02-15
TWI562167B (enExample) 2016-12-11
US10737356B2 (en) 2020-08-11
JP2018078297A (ja) 2018-05-17
TW201643890A (zh) 2016-12-16
JP2018139293A (ja) 2018-09-06
JP6254649B2 (ja) 2017-12-27
JP6664368B2 (ja) 2020-03-13
US10414002B2 (en) 2019-09-17
TWI638366B (zh) 2018-10-11
JP6321297B2 (ja) 2018-05-09
TW201704488A (zh) 2017-02-01
CN106489199B (zh) 2019-09-03
EP3282473A4 (en) 2018-09-19
EP3131113A4 (en) 2017-03-22
KR20180115363A (ko) 2018-10-22
US10137534B2 (en) 2018-11-27
TWI567211B (zh) 2017-01-21
PH12016501076A1 (en) 2016-07-11
CN106688086A (zh) 2017-05-17
KR20180008245A (ko) 2018-01-24
US20180130763A1 (en) 2018-05-10
JP6706280B2 (ja) 2020-06-03
CN106489199A (zh) 2017-03-08
CN107533992A (zh) 2018-01-02
EP3282473B1 (en) 2020-06-24
DE112016002703B4 (de) 2024-12-05
CN113078134A (zh) 2021-07-06
KR20180129987A (ko) 2018-12-05
TW201821625A (zh) 2018-06-16
DE112015004422B4 (de) 2020-02-13
US20170200689A1 (en) 2017-07-13
DE112015004422T5 (de) 2017-08-10
KR101777995B1 (ko) 2017-09-12
TW201708553A (zh) 2017-03-01
KR20180016358A (ko) 2018-02-14
TW201835343A (zh) 2018-10-01
DE112016002674B3 (de) 2020-06-04
JP2017005256A (ja) 2017-01-05
EP3349246A1 (en) 2018-07-18
KR20170029013A (ko) 2017-03-14
DE112016000133B4 (de) 2020-06-04
KR101910762B1 (ko) 2018-10-22

Similar Documents

Publication Publication Date Title
TW202028483A (zh) 半導體裝置用接合導線
JP6420015B2 (ja) 半導体装置用ボンディングワイヤ
TWI714779B (zh) 半導體裝置用銅合金接合線
JP5912008B1 (ja) 半導体装置用ボンディングワイヤ
JP5985127B1 (ja) 半導体装置用ボンディングワイヤ
TWI764972B (zh) 半導體裝置用接合導線
JP5937770B1 (ja) 半導体装置用ボンディングワイヤ