WO2017221434A1 - 半導体装置用ボンディングワイヤ - Google Patents

半導体装置用ボンディングワイヤ Download PDF

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Publication number
WO2017221434A1
WO2017221434A1 PCT/JP2016/078485 JP2016078485W WO2017221434A1 WO 2017221434 A1 WO2017221434 A1 WO 2017221434A1 JP 2016078485 W JP2016078485 W JP 2016078485W WO 2017221434 A1 WO2017221434 A1 WO 2017221434A1
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WO
WIPO (PCT)
Prior art keywords
wire
bonding
mass
bonding wire
alloy
Prior art date
Application number
PCT/JP2016/078485
Other languages
English (en)
French (fr)
Inventor
大造 小田
山田　隆
基稀 江藤
榛原　照男
宇野　智裕
Original Assignee
日鉄住金マイクロメタル株式会社
新日鉄住金マテリアルズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日鉄住金マイクロメタル株式会社, 新日鉄住金マテリアルズ株式会社 filed Critical 日鉄住金マイクロメタル株式会社
Priority to CN201780037612.XA priority Critical patent/CN109496347B/zh
Priority to SG11201811344PA priority patent/SG11201811344PA/en
Priority to KR1020197032506A priority patent/KR102155463B1/ko
Priority to SG10202002650XA priority patent/SG10202002650XA/en
Priority to PCT/JP2017/021825 priority patent/WO2017221770A1/ja
Priority to DE112017008353.2T priority patent/DE112017008353B3/de
Priority to CN202110066731.6A priority patent/CN112820708A/zh
Priority to US16/311,125 priority patent/US20200312808A1/en
Priority to DE112017003058.7T priority patent/DE112017003058B4/de
Priority to JP2018523933A priority patent/JP6450918B2/ja
Priority to KR1020187036864A priority patent/KR102042953B1/ko
Priority to CN202110066725.0A priority patent/CN112820707A/zh
Priority to TW106120320A priority patent/TWI714779B/zh
Priority to TW110128915A priority patent/TW202143348A/zh
Priority to TW109142768A priority patent/TWI739686B/zh
Publication of WO2017221434A1 publication Critical patent/WO2017221434A1/ja
Priority to JP2018208645A priority patent/JP6510723B2/ja
Priority to PH12018502683A priority patent/PH12018502683B1/en
Priority to JP2019071623A priority patent/JP7082083B2/ja
Priority to PH12020500518A priority patent/PH12020500518A1/en
Priority to JP2021124400A priority patent/JP7174816B2/ja
Priority to US17/942,838 priority patent/US20230018430A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/49—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions wire-like arrangements or pins or rods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
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    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0227—Rods, wires
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302—Cu as the principal constituent
    • C—CHEMISTRY; METALLURGY
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    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
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    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
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    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
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    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
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    • C22F1/02—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working in inert or controlled atmosphere or vacuum
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
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    • C22F1/08—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
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Definitions

  • the present invention relates to a bonding wire for a semiconductor device used for connecting an electrode on a semiconductor element and a wiring of a circuit wiring board such as an external lead.
  • bonding wires fine wires having a wire diameter of about 15 to 50 ⁇ m are mainly used as bonding wires for semiconductor devices (hereinafter referred to as “bonding wires”) for bonding between electrodes on semiconductor elements and external leads.
  • bonding wires As a method for bonding a bonding wire to an electrode of a semiconductor device, a thermocompression bonding method using ultrasonic waves is generally used, and a general-purpose bonding device, a capillary jig used for connection through the bonding wire, or the like is used.
  • the bonding process of the bonding wire involves heating and melting the wire tip with arc heat input, forming a ball (FAB: Free Air Ball) by surface tension, and then heating it on the electrode of the semiconductor element heated within the range of 150 to 300 ° C.
  • FAB Free Air Ball
  • This ball part is bonded by pressure bonding (hereinafter referred to as “ball bonding”), then a loop is formed, and then the wire part is bonded by pressure bonding (hereinafter referred to as “wedge bonding”) to the electrode on the external lead side.
  • the electrode on the semiconductor element that is the bonding partner of the bonding wire has an electrode structure in which an alloy mainly composed of Al is formed on a Si substrate, and the electrode on the external lead side has an electrode structure in which Ag plating or Pd plating is applied. Used.
  • a copper bonding wire that uses high-purity Cu (purity: 99.99 mass% or more) has been proposed (for example, Patent Document 1). Even when a copper bonding wire is used, it is required that bonding reliability and loop stability be high in high-density mounting.
  • the joint reliability evaluation is performed for the purpose of evaluating the joint life in the actual use environment of the semiconductor device. In general, a high temperature standing test and a high temperature and high humidity test are used for evaluating the bonding reliability. In the high-temperature and high-humidity test, a test called PCT (Pressure Cooker Test) that is performed under conditions of a temperature of 121 ° C. and a relative humidity of 100% is generally used.
  • PCT Pressure Cooker Test
  • Patent Document 2 describes a copper alloy bonding wire for a semiconductor made of a copper alloy containing Pd in a concentration range of 0.13 to 1.15% by mass. By adding Pd in the concentration range, high humidity heating reliability by the PCT test can be improved.
  • In-vehicle devices are required to have higher bonding reliability in harsh high-temperature and high-humidity environments than general electronic equipment.
  • the bonding life of the ball bonding portion in which the ball portion of the wire is bonded to the electrode becomes the biggest problem.
  • Several methods have been proposed for evaluating the bonding reliability in a high-temperature and high-humidity environment. Recently, as a representative evaluation method, HAST (Highly Accelerated Temperature and Humidity Stress Test) (exposure to high-temperature and high-humidity environment) Test) is used.
  • HAST Highly Accelerated Temperature and Humidity Stress Test
  • HAST Exposure to high-temperature and high-humidity environment
  • the evaluation ball joint When evaluating the bonding reliability of a ball joint by HAST, the evaluation ball joint is exposed to a high-temperature and high-humidity environment at a temperature of 130 ° C. and a relative humidity of 85%, and the change in resistance value of the joint is measured over time. Or by measuring the change in shear strength of the ball joint with time, the joint life of the ball joint is evaluated. Further, by applying a bias voltage, stricter evaluation than PCT can be performed. Recently, in HAST under such conditions, a bonding life of 100 hours or more has been required.
  • An object of the present invention is to provide a bonding wire for a semiconductor device suitable for a vehicle-mounted device by improving the bonding reliability of a ball bonding portion in a high-temperature and high-humidity environment.
  • the present invention has found an optimum additive element and an optimum addition concentration thereof for a copper alloy bonding wire having sufficient joining reliability even in HAST to which a bias voltage is applied, which is a stricter evaluation method. Is.
  • the gist of the present invention is as follows. (1) It is characterized by containing at least one of Ni, Zn, Ga, Ge, Rh, In, Ir, and Pt in a total amount of 0.03% by mass or more and 3% by mass or less, with the balance being Cu and inevitable impurities. Bonding wires for semiconductor devices. (2) When the average crystal grain size ( ⁇ m) in the cross section of the core material perpendicular to the wire axis of the bonding wire is R ( ⁇ m), 0.02 ⁇ R + 0.4 or more (1a) 0.1 ⁇ R + 0.5 or less (1b) (1) The bonding wire for a semiconductor device according to (1).
  • the bonding wire further contains 0.0001 to 0.050 mass% of at least one element selected from Ti, B, P, Mg, Ca, La, As, Te, and Se, respectively.
  • the present invention includes a total of at least one of Ni, Zn, Ga, Ge, Rh, In, Ir, and Pt in a copper alloy bonding wire for a semiconductor device in a range of 0.03% by mass to 3% by mass.
  • the bonding wire for semiconductor device of the present invention (hereinafter also simply referred to as “bonding wire”) is at least one of Ni, Zn, Ga, Ge, Rh, In, Ir, and Pt (hereinafter also referred to as “first alloy group”). In a total of 0.03% by mass or more and 3% by mass or less, and the balance is made of Cu and inevitable impurities. Since it is an alloy mainly composed of copper, it is also referred to as “copper alloy bonding wire”.
  • the bonding wire of the present invention can improve the bonding reliability of the ball bonding portion in a high-temperature and high-humidity environment required for a vehicle-mounted device.
  • Mold resin which is a package of a semiconductor device contains chlorine (Cl) in a molecular skeleton.
  • Cl chlorine
  • the HAST evaluation conditions are 130 ° C. and the relative humidity is 85%
  • Cl in the molecular skeleton is hydrolyzed and eluted as chloride ions (Cl ⁇ ).
  • Cu 9 Al 4 is easily corroded by halogens such as Cl, and corrosion progresses due to Cl eluted from the mold resin, leading to a decrease in bonding reliability. For this reason, the conventional copper alloy bonding wire does not have a sufficient ball joint life in HAST evaluation.
  • the copper alloy bonding wire contains 0.03% by mass or more in total of elements of the first alloy group (at least one of Ni, Zn, Ga, Ge, Rh, In, Ir, and Pt).
  • elements of the first alloy group at least one of Ni, Zn, Ga, Ge, Rh, In, Ir, and Pt.
  • the first alloy group element present at the Cu-Al interface in the ball joint enhances the interdiffusion suppression effect between Cu and Al, and as a result, suppresses the formation of Cu 9 Al 4 that is easily corroded in a high-temperature, high-humidity environment. It seems to be. Moreover, there is a possibility that the first alloy group element contained in the wire has an effect of directly inhibiting the formation of Cu 9 Al 4 .
  • the role of the elements of the first alloy group in the vicinity of the bonding interface may be a barrier function that inhibits halogen migration that induces corrosion, a function that controls interdiffusion of Cu and Al, growth of intermetallic compounds, and the like.
  • a ball part was formed using a copper alloy bonding wire containing a predetermined amount of the elements of the first alloy group, and the FAB was observed with a scanning electron microscope (SEM). Many precipitates of about 10 nm ⁇ were observed.
  • EDS Energy Dispersive X-ray Spectroscopy
  • the first alloy group element was concentrated.
  • this precipitate observed in the FAB is present at the bonding interface between the ball part and the electrode, so that the temperature is 130 ° C. and the relative humidity is 85%. It seems that the joint reliability of the ball joint in a wet environment has been greatly improved.
  • the bonding wire of the present invention has obtained a good result in the HAST evaluation which is a stricter condition than the PCT evaluation, a good result can be obtained in the PCT evaluation.
  • the concentration of the first alloy group element in the wire is a total from the viewpoint of improving the joint life of the ball joint in a high temperature and high humidity environment with a temperature of 130 ° C. and a relative humidity of 85% and improving the joint reliability.
  • 0.03% by mass or more preferably 0.050% by mass or more, more preferably 0.070% by mass or more, further preferably 0.090% by mass or more, 0.100% by mass or more, 0.150% by mass. Or more, or 0.200 mass% or more.
  • concentration of the first alloy group element in the wire is 0.100% by mass or more in total, it is possible to meet demands for stricter joint reliability.
  • the total concentration of the first alloy group elements in the wire is 3% by mass or less, preferably It is 2.5 mass% or less, More preferably, it is 2.0 mass% or less, More preferably, it is 1.9 mass% or less, or 1.5 mass% or less.
  • the initial bonding strength with the Al electrode in the low temperature bonding is good, the long-term reliability in the HAST test, and the BGA (Ball Good results can also be obtained from the viewpoint of obtaining bonding wires excellent in mass production margin for bonding to substrates such as Grid Array (CSP) and CSP (Chip Size Package) and tape, and reducing chip damage.
  • CSP Grid Array
  • CSP Chip Size Package
  • the reliability in the HAST test is further improved by setting the total concentration of the first alloy group elements within the above-mentioned preferable range. For example, it is possible to realize a bonding wire that has a lifetime of more than 250 hours until failure of the HAST test. This may correspond to a life extension of 1.5 times or more that of a conventional Cu bonding wire, and can be used in harsh environments.
  • ⁇ Average particle diameter of bonding wire The effect of the crystal grain size in the bonding wire on the wire quality was evaluated. As a result, there is a preferred range for the average crystal grain size in the cross section of the core material perpendicular to the wire axis of the bonding wire, and when the average crystal grain size ( ⁇ m) is the wire diameter R ( ⁇ m), 0.02 ⁇ R + 0.4 or more (1a) 0.1 ⁇ R + 0.5 or less (1b) , It has been found that the collapsed shape of the ball joint and the wedge bondability are particularly good.
  • the particle size measurement can be obtained by using the analysis software provided in the apparatus for the measurement result by the EBSD method.
  • the crystal grain size defined in the present invention is an arithmetic average of the equivalent diameters of the crystal grains included in the measurement region (the diameter of a circle corresponding to the area of the crystal grains).
  • the average copper oxide film thickness on the wire surface is preferably in the range of 0.0005 to 0.02 ⁇ m.
  • the average film thickness of copper oxide on the wire surface is in the range of 0.0005 to 0.02 ⁇ m.
  • the HAST reliability improvement effect of the ball bonding portion of the bonding wire made of the copper alloy containing the first alloy group element varies, and the HAST heating is performed.
  • the effect of delaying the surface oxidation can be obtained, so it is easy to control the average film thickness of the copper oxide to 0.0005 to 0.02 ⁇ m which is a thin range. is there.
  • the copper oxide film on the wire surface in a low temperature range of about 20 to 40 ° C. compared to high-purity copper It was also confirmed to have the effect of delaying the growth of
  • the improvement effect of the HAST evaluation is likely to vary. For example, when the number of junctions to be evaluated is increased, the improvement effect varies. Since the possibility of becoming unstable increases, the upper limit of the average film thickness of the copper oxide on the wire surface is preferably 0.02 ⁇ m.
  • the average film thickness of copper oxide on the wire surface is preferably 0.02 ⁇ m or less, more preferably 0.015 ⁇ m or less, and still more preferably 0.013 ⁇ m or less from the viewpoint that variation in the improvement effect can be reduced.
  • special surface treatment and product management are necessary to stably keep the average film thickness of copper oxide on the wire surface below 0.0005 ⁇ m.
  • the lower limit of the average film thickness of the copper oxide on the wire surface is preferably 0.0005 ⁇ m.
  • the coating film of the rust preventive agent on the wire surface is thickened, there is a problem that the bonding strength is lowered and the continuous bonding property is lowered.
  • the guaranteed life of wire products stored in the atmosphere is extremely shortened for the purpose of keeping the average film thickness of copper oxide below 0.0005 ⁇ m, operations in the mass production process of wire bonding will become difficult and scrap problems will occur. In some cases, it may not be industrially acceptable.
  • the average film thickness of the copper oxide on the wire surface is preferably 0.0005 ⁇ m or less, more preferably 0.0008 ⁇ m or more, and even more preferably 0.001 ⁇ m or more from the viewpoint that an industrially suitable bonding wire can be provided. .
  • Auger spectroscopic analysis suitable for surface analysis is effective, and it is possible to measure at least 3 random locations on the wire surface, and more preferably 5 or more locations. It is desirable to use the average value of the copper oxide film thickness.
  • As the oxygen concentration a ratio of the O concentration to the total concentration of Cu, O, and metal elements is used. In order to exclude organic substances that are typical contamination of the wire surface, the amount of C is not included in the above concentration calculation. Since it is difficult to obtain the absolute value of the copper oxide film thickness with high accuracy, it is desirable to calculate the copper oxide film thickness using a SiO 2 equivalent value generally used in Auger spectroscopy.
  • the oxygen concentration is 30% by mass as the boundary between copper oxide and metallic copper.
  • Cu 2 O and CuO are known as main copper oxides, but Cu 2 O is preferentially formed on the surface of a copper alloy containing elements of the first alloy group at a low temperature (25 to 500 ° C.). Since there are many cases, the oxygen concentration is 30% by mass.
  • the bonding wire of the present invention further contains at least one element selected from Ti, B, P, Mg, Ca, La, As, Te, and Se (hereinafter also referred to as “second alloy group”) of 0.0001. It is preferable to contain ⁇ 0.050% by mass. As a result, the collapsed shape of the ball joint required for high-density mounting can be improved, that is, the roundness of the ball joint can be improved. Thereby, a better ball shape can be realized.
  • the content of the second alloy group is preferably 0.0001% by mass or more in total, more preferably 0.0002% by mass or more, from the viewpoint that the effect of rounding the crimped shape of the ball joint can be improved.
  • the content of the second alloy group is preferably 0.050% by mass or less, more preferably 0.045% by mass or less. 040 mass% or less is more preferable. Further, it is more preferable that each element of the second alloy group is contained in an amount of 0.0005% by mass or more because a high effect of reducing the occurrence of defects in the wedge joint can be obtained.
  • the elements of the first alloy group are dissolved in Cu, and the elements of the second alloy group are precipitated and segregated due to their low solid solubility in Cu. Acts complementarily, and it is considered that a further excellent effect can be exhibited in the wire deformation of the wedge joint.
  • the bonding wire of the present invention preferably further contains at least one element selected from Ag and Au (hereinafter referred to as “third alloy group”) in a total amount of 0.0005 to 0.07 mass%.
  • third alloy group at least one element selected from Ag and Au (hereinafter referred to as “third alloy group”) in a total amount of 0.0005 to 0.07 mass%.
  • the deformed shape of the ball joint is important, and it is required to make a round shape by suppressing irregular shapes such as petals and eccentricity.
  • the element of the third alloy group in combination with the element of the first alloy group, the ball deformation can be easily made isotropic, and the effect of rounding the crimped shape can be enhanced. As a result, it was confirmed that it can be sufficiently adapted to a narrow pitch connection of 50 ⁇ m or less.
  • the content of the third alloy group is preferably 0.0005% by mass or more in total, more preferably 0.0007% by mass or more, from the viewpoint that the effect of rounding the crimped shape of the ball joint can be improved. More preferred is 0.001% by mass or more.
  • the content of the third alloy group is preferably 0.07% by mass or less, more preferably 0.065% by mass or less, and further preferably 0.050% by mass or less. .
  • the shear strength of the ball joint may be lowered.
  • the bonding wire of the present invention may contain a third alloy group together with the second alloy group, or may contain a third alloy group instead of the second alloy group.
  • the bonding wire of the present invention preferably further contains Pd in a range of 1.15% by mass or less.
  • Pd diffuses or concentrates up to the bonding interface and affects the mutual diffusion between Cu and Al, thereby growing Cu- This is thought to delay the corrosion reaction of Al-based intermetallic compounds.
  • the content of Pd is preferably 1.15% by mass or less, more preferably 1.0% by mass or less, and 0.9% by mass or less from the viewpoint that HAST reliability can be significantly improved. Is more preferable.
  • the bonding wire of the present invention may contain Pd together with the second alloy group and / or the third alloy group, or may contain Pd instead of one or both of the second alloy group and the third alloy group. May be.
  • a copper alloy containing the necessary concentration of the additive element is prepared by melting.
  • an arc heating furnace, a high-frequency heating furnace, a resistance heating furnace, or the like can be used.
  • a vacuum atmosphere or an inert atmosphere such as Ar or N 2 .
  • ICP Inductively Coupled Plasma
  • this alloying there are a method of directly adding a high-purity component and a method of using a mother alloy containing an additive element at a high concentration of about 1%.
  • the technique using the mother alloy is effective for making the element distribution uniform by containing it in a low concentration.
  • high-purity direct addition can be used.
  • the first alloy group and the second alloy group In order to stably contain these elements at a low concentration, a technique of adding a master alloy is advantageous.
  • the alloy elements are deposited on the surface of the bonding wire in addition to the method of incorporating these elements when dissolved. Even if the method of inclusion is employed, the effects of the present invention can be exhibited.
  • the deposition method can be selected from (1) application of aqueous solution ⁇ drying ⁇ heat treatment, (2) plating method (wet method), and (3) vapor deposition method (dry method).
  • the produced copper alloy ingot is first processed into a large diameter by rolling and then thinned to the final wire diameter by wire drawing.
  • a grooved roll or swaging is used in the rolling process.
  • a continuous wire drawing apparatus that can set a plurality of diamond-coated dies is used. If necessary, heat treatment is performed at an intermediate stage of processing or at the final wire diameter.
  • the material strength (hardness) of the wire is increased. For this reason, when the bonding wire is drawn, the area reduction during drawing is set to a low area reduction of 5 to 8%.
  • heat treatment after wire drawing is also high in hardness, heat treatment was performed at a temperature of 700 ° C. or higher in order to soften the wire to a level that can be used as a bonding wire. Due to the high heat treatment temperature, the average crystal grain size ( ⁇ m) in the cross section of the core material exceeds (0.05 ⁇ R + 0.5) (R is the wire diameter ( ⁇ m)), and the wedge bondability is slightly reduced. It was. On the other hand, when the heat treatment temperature was lowered, the average crystal grain size ( ⁇ m) in the cross section of the core material was less than (0.02 ⁇ R + 0.4), and the collapsed shape of the ball joint portion was slightly lowered.
  • the area reduction rate is 10% or more in a die that is half or more of the total number of dies, and the heat treatment temperature in heat treatment after wire drawing is 600 ° C. or less.
  • a low temperature is preferred.
  • the average crystal grain size ( ⁇ m) in the cross section of the core material perpendicular to the wire axis of the bonding wire can be in a suitable range (0.02 ⁇ R + 0.4 or more, 0.05 ⁇ R + 0.5 or less). (R is the wire diameter ( ⁇ m)).
  • the lubricant is designed to have a higher concentration of nonionic surfactant in the lubricant than before, and the die approach angle is more than the conventional one Due to synergistic effects such as gradual design and lower die cooling water temperature than conventional, the copper alloy bonding wire contains a total of more than 0.03% by mass of the first alloy group components and is hard In spite of the trend, wire drawing with an area reduction of 10% or more is possible.
  • the manufacturing conditions for managing the average film thickness of copper oxide on the wire surface in the range of 0.0005 to 0.02 ⁇ m at the mass production level, it is preferable to suppress oxidation in the wire manufacturing process.
  • the temperature 200 to 850 ° C
  • the management of the oxygen concentration in the furnace are effective. It is. It is effective to measure the oxygen concentration in the center of the furnace and adjust the concentration range to be 0.1 to 6% by volume.
  • the wire drawing process As a method for controlling the oxygen concentration within the above range, it is possible to manage the prevention of air entrainment from the outside to the heat treatment furnace by optimizing the gas flow rate and changing the shape of the entrance and exit of the furnace. Furthermore, at the mass production level, it is also desirable to manage the wire drawing process. For example, the wire is dried by blowing (40-60 ° C. warm air) before winding the wire after one pass of the wire drawing process in water. It is also effective to positively remove surface moisture and to control the humidity of storage during the manufacturing process (relative humidity of 60% or less for storage for 2 days or more).
  • Example 1 First, a method for manufacturing a sample is described.
  • Cu used as the raw material of the core material was one having a purity of 99.99% by mass or more and the remainder composed of inevitable impurities.
  • As the first alloy group to the third alloy group and Pd those having a purity of 99% by mass or more and the balance composed of inevitable impurities were used.
  • a first alloy group, a second alloy group, a third alloy group, and an alloy element of Pd, which are additive elements to the core material, are prepared so that the composition of the wire or the core material becomes the target.
  • the addition of each alloy element it is possible to prepare a single element. However, when the element has a high melting point and the addition amount is extremely small, a Cu master alloy containing the additive element is prepared in advance. You may mix
  • the copper alloy was manufactured to have a wire diameter of several mm by continuous casting.
  • the resulting alloy of several mm was drawn to produce a wire having a diameter of 0.3 to 1.4 mm.
  • a commercially available lubricant was used for wire drawing, and the wire drawing speed was 20 to 150 m / min.
  • a die having a surface reduction rate of 10 to 21% in more than half of the total number of dies was drawn using a wire, and further, one to three heat treatments were carried out at 200 to 600 ° C. in the middle to obtain a diameter of 20 ⁇ m.
  • heat treatment was finally performed so that the elongation at break was about 5 to 15%.
  • the heat treatment was performed while continuously sweeping the wire and flowing N 2 or Ar gas.
  • the wire feed rate was 10 to 90 m / min
  • the heat treatment temperature was 350 to 600 ° C.
  • the heat treatment time was 1 to 10 seconds.
  • Example No. No. 6 has a die area reduction of less than 10%.
  • No. 12 has a heat treatment temperature as high as 700 ° C. or higher.
  • No. 22 has a heat treatment temperature as high as 720 ° C. or higher.
  • the crystal grain size was evaluated by the EBSD method. Dedicated software (OIM analysis, etc. manufactured by TSL Solutions) was used for analysis of EBSD measurement data.
  • the crystal grain size is an arithmetic average of the equivalent diameters of the crystal grains included in the measurement region (the diameter of the circle corresponding to the area of the crystal grains).
  • SAM-670 manufactured by PHI, FE type
  • the acceleration voltage of the electron beam is 5 kV
  • the measurement region is 10 nA
  • the acceleration voltage of Ar ion sputtering is 3 kV
  • the sputtering rate is 11 nm / min. did.
  • the measurement result of the average thickness of copper oxide is shown in the column of “average thickness of copper oxide” in Table 2.
  • the bonding reliability of the ball bonding portion in a high temperature and high humidity environment or a high temperature environment was determined by preparing a sample for bonding reliability evaluation, performing HAST evaluation, and determining the bonding life of the ball bonding portion.
  • a sample for evaluating the bonding reliability is an electrode formed by forming an Al-1.0% Si-0.5% Cu alloy having a thickness of 0.8 ⁇ m on a Si substrate on a general metal frame.
  • Ball bonding was performed using a commercially available wire bonder, and sealing was performed using a commercially available epoxy resin. The balls were formed while N 2 + 5% H 2 gas was flowed at a flow rate of 0.4 to 0.6 L / min, and the size was in the range of ⁇ 33 to 34 ⁇ m.
  • the produced sample for evaluation of bonding reliability was exposed to a high-temperature and high-humidity environment with a temperature of 130 ° C. and a relative humidity of 85% using an unsaturated pressure cooker tester, and a bias of 7 V was applied. .
  • the joint life of the ball joint was subjected to a shear test of the ball joint every 48 hours, and the shear strength value was set to be half the shear strength obtained at the initial stage.
  • the shear test after the high-temperature and high-humidity test was conducted after removing the resin by acid treatment and exposing the ball joint.
  • the test machine made by DAGE was used as the share test machine for HAST evaluation.
  • As the value of the shear strength an average value of 10 measured values of randomly selected ball joints was used. In the above evaluation, if the bonding life is less than 96 hours, it is determined that there is a problem in practical use.
  • ⁇ it is practical if it is 96 hours or more and less than 144 hours, but it is slightly problematic, ⁇ mark, 144 hours or more 192 If it is less than time, it is judged that there is no problem in practical use, ⁇ mark, if it is 192 hours or more and less than 288 hours, it is judged that it is excellent, ⁇ mark, if it is 288 hours or more, it is judged that it is particularly excellent and ⁇ , This is shown in the column of “HAST reliability” in Table 2. Only x is unacceptable, otherwise it is acceptable.
  • Evaluation of the ball formability (FAB shape) in the ball portion was made by collecting and observing the balls before bonding, and determining the presence or absence of bubbles on the ball surface and the presence or absence of deformation of the ball that was originally a true sphere. If any of the above occurred, it was judged as defective. Ball formation was performed while blowing N 2 gas at a flow rate of 0.5 L / min in order to suppress oxidation in the melting step. The ball diameter was 1.7 times the wire diameter. 50 balls were observed for one condition. SEM was used for observation. In the evaluation of the ball formability, it is judged that there is a problem when 5 or more defects occur, and it is possible to use it if there are 3 or 4 defects.
  • the evaluation of the wedge bondability at the wire bonding portion was performed by performing 1000 bonding on the lead portion of the lead frame and determining the frequency of occurrence of peeling of the bonding portion.
  • As the lead frame an Fe-42 atomic% Ni alloy lead frame plated with 1 to 3 ⁇ m of Ag was used.
  • the stage temperature was set to 150 ° C., which is lower than the general set temperature range, assuming severer bonding conditions than usual. In the above evaluation, when 11 or more defects are generated, it is determined that there is a problem. ⁇ mark, 6 to 10 defects are practical.
  • the evaluation of the collapsed shape of the ball joint was made by observing the bonded ball joint from directly above and determining its roundness.
  • an electrode in which an alloy of Al-0.5% Cu having a thickness of 1.0 ⁇ m was formed on a Si substrate was used. Observation was performed using an optical microscope at 200 locations for one condition. It was judged that the collapsed shape of the ball joint portion was poor for an oval shape having a large deviation from a perfect circle and an anisotropy in deformation.
  • X mark if there are 4-5 defects, it can be used practically. In the case, it was judged that there was no problem, and the mark “ ⁇ ” was obtained.
  • Example No. 1 in which the concentration of the elements of the first alloy group was 0.03 to 2.0 mass% in total.
  • the ball joint reliability can be obtained by the HAST test in a high temperature and high humidity environment where the temperature is 130 ° C. and the relative humidity is 85%.
  • Example No. in which the average film thickness of copper oxide on the wire surface is in the range of 0.0005 to 0.02 ⁇ m. All of the bonding wires according to 1 to 39 had particularly good HAST evaluation results.
  • the area reduction rate at the time of wire drawing is 10% or more in dies that are more than half of the total number of dies, and the heat treatment temperature in heat treatment after wire drawing is as low as 600 ° C. or less.
  • the average crystal grain size ( ⁇ m) in the core material cross section perpendicular to the wire axis of the bonding wire is 0.02 It is within the range of ⁇ R + 0.4 or more and 0.1 ⁇ R + 0.5 or less (R is the wire diameter ( ⁇ m)), and good results are obtained for both wedge bondability and collapsed shape of the ball joint. It was.
  • Example No. No. 12 has a heat treatment temperature as high as 700 ° C. or higher, so the average crystal grain size exceeds the upper limit of the preferred range.
  • No. 22 has a heat treatment temperature as high as 720 ° C. or higher, so the average crystal grain size exceeds the upper limit of the preferred range. 12 and 22 both had a collapsed shape of “ ⁇ ”, resulting in a slight decrease.
  • Example No. 1 further containing 0.0001 to 0.050 mass% of the second alloy group.
  • the collapsed shape of the ball joint portion was good.
  • the examples further contain at least one element selected from Ag and Au in a total amount of 0.0005 to 0.07% by mass.
  • the collapsed shape of the ball joint was good.
  • Example No. 1 further containing 1.15% by mass or less of Pd. In the bonding wires according to Nos.
  • the ball joint reliability was further improved by the HAST test in a high temperature and high humidity environment where the temperature was 130 ° C. and the relative humidity was 85%.
  • the second alloy group in addition to the first alloy group, the second alloy group further includes 0.0001 to 0.050 mass%, and at least one element selected from Ag and Au.
  • the second alloy group in addition to the first alloy group, the second alloy group further contains 0.0001 to 0.050% by mass, and Pd contains 1.15% by mass or less. No. With the bonding wires according to Nos. 38 to 39, the HAST evaluation result was further improved, and favorable results were obtained that the FAB shape, wedge bondability, and the collapsed shape of the ball bonded portion were good.

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Abstract

半導体装置用の銅合金ボンディングワイヤにおいて、高温高湿環境下でのボール部接合寿命の向上を実現する。 Ｎｉ，Ｚｎ，Ｇａ，Ｇｅ，Ｒｈ，Ｉｎ，Ｉｒ，Ｐｔの少なくとも１種（第１合金群）を総計で０．０３質量％以上３質量％以下含有し、残部がＣｕと不可避不純物からなることを特徴とする半導体装置用銅合金ボンディングワイヤである。第１合金群を所定量含有することにより、ワイヤ接合界面において高温高湿環境下で腐食しやすい金属間化合物の生成を抑制し、ボール部接合寿命の向上がなされる。

Description

半導体装置用ボンディングワイヤ
　本発明は、半導体素子上の電極と外部リード等の回路配線基板の配線とを接続するために利用される半導体装置用ボンディングワイヤに関する。
　現在、半導体素子上の電極と外部リードとの間を接合する半導体装置用ボンディングワイヤ（以下、「ボンディングワイヤ」という）として、線径１５～５０μｍ程度の細線が主として使用されている。半導体装置の電極へのボンディングワイヤの接合方法は、超音波併用熱圧着方式が一般的であり、汎用ボンディング装置、ボンディングワイヤをその内部に通して接続に用いるキャピラリ冶具等が用いられる。ボンディングワイヤの接合プロセスは、ワイヤ先端をアーク入熱で加熱溶融し、表面張力によりボール（ＦＡＢ：Free　Air　Ball）を形成した後に、１５０～３００℃の範囲内で加熱した半導体素子の電極上にこのボール部を圧着接合（以下、「ボール接合」という）し、次にループを形成した後、外部リード側の電極にワイヤ部を圧着接合（以下、「ウェッジ接合」という）することで完了する。ボンディングワイヤの接合相手である半導体素子上の電極にはＳｉ基板上にＡｌを主体とする合金を成膜した電極構造、外部リード側の電極にはＡｇめっきやＰｄめっきを施した電極構造等が用いられる。
　これまでボンディングワイヤの材料は金（Ａｕ）が主流であったが、ＬＳＩ用途を中心に銅（Ｃｕ）への代替が進んでいる。一方、近年の電気自動車やハイブリッド自動車の普及を背景に、車載用デバイス用途においてもＡｕからＣｕへの代替に対するニーズが高まっている。
　銅ボンディングワイヤについては、高純度Ｃｕ（純度：９９．９９質量％以上）を使用したものが提案されている（例えば、特許文献１）。銅ボンディングワイヤを用いる場合においても、高密度実装において接合信頼性やループの安定性が高いことが要求される。接合信頼性評価は、実際の半導体デバイスの使用環境における接合部寿命を評価する目的で行われる。一般的に接合信頼性評価には高温放置試験、高温高湿試験が用いられる。高温高湿試験は温度が１２１℃、相対湿度が１００％の条件で行うＰＣＴ（Pressure　Cooker　Test）と呼ばれる試験が一般的に用いられていた。
　特許文献２には、Ｐｄを０．１３～１．１５質量％の濃度範囲で含有する銅合金からなる半導体用銅合金ボンディングワイヤが記載されている。前記濃度範囲でＰｄを添加することにより、ＰＣＴ試験による高湿加熱信頼性を向上できる。
特開昭６１－４８５４３号公報 国際公開第２０１０／１５０８１４号
　車載用デバイスは一般的な電子機器に比べて、過酷な高温高湿環境下での接合信頼性が求められる。特に、ワイヤのボール部を電極に接合したボール接合部の接合寿命が最大の問題となる。高温高湿環境下での接合信頼性を評価する方法はいくつかの方法が提案されているが、近年代表的な評価方法として、ＨＡＳＴ（Highly　Accelerated　Temperature　and　Humidity　Stress　Test）（高温高湿環境暴露試験）が用いられるようになっている。ＨＡＳＴは、評価パッケージへの吸湿が均一であり、評価結果の再現性が高いという特徴がある。ＨＡＳＴによってボール接合部の接合信頼性を評価する場合、評価用のボール接合部を温度が１３０℃、相対湿度が８５％の高温高湿環境に暴露し、接合部の抵抗値の経時変化を測定したり、ボール接合部のシェア強度の経時変化を測定したりすることで、ボール接合部の接合寿命を評価する。また、バイアス電圧を印加することにより、ＰＣＴよりも厳しい評価をすることが可能である。最近は、このような条件でのＨＡＳＴにおいて１００時間以上の接合寿命が要求されるようになっている。
　本発明は、ボンディングワイヤにおいて、高温高湿環境でのボール接合部の接合信頼性を改善し、車載用デバイスに好適な半導体装置用ボンディングワイヤを提供することを目的とする。具体的には、本発明は、より厳しい評価方法であるバイアス電圧を印加したＨＡＳＴにおいても、十分な接合信頼性を有する銅合金ボンディングワイヤに最適な添加元素およびそれらの最適な添加濃度を見出したものである。
　即ち、本発明の要旨とするところは以下のとおりである。
（１）Ｎｉ，Ｚｎ，Ｇａ，Ｇｅ，Ｒｈ，Ｉｎ，Ｉｒ，Ｐｔの少なくとも１種を総計で０．０３質量％以上３質量％以下含有し、残部がＣｕと不可避不純物からなることを特徴とする半導体装置用ボンディングワイヤ。
（２）前記ボンディングワイヤのワイヤ軸に垂直方向の芯材断面における平均結晶粒径（μｍ）が、ワイヤの線径をＲ（μｍ）とすると、
　０．０２×Ｒ＋０．４以上　　　（１ａ）
　０．１×Ｒ＋０．５以下　　　（１ｂ）
であることを特徴とする（１）に記載の半導体装置用ボンディングワイヤ。
（３）ワイヤ表面の酸化銅の平均膜厚が０．０００５～０．０２μｍの範囲であることを特徴とする（１）または（２）に記載の半導体装置用ボンディングワイヤ。
（４）前記ボンディングワイヤがさらにＴｉ、Ｂ、Ｐ、Ｍｇ、Ｃａ、Ｌａ、Ａｓ、Ｔｅ、Ｓｅから選ばれる少なくとも１種以上の元素をそれぞれ０．０００１～０．０５０質量％含有することを特徴とする（１）～（３）のいずれか１つに記載の半導体装置用ボンディングワイヤ。
（５）前記ボンディングワイヤがさらにＡｇ、Ａｕから選ばれる少なくとも１種以上の元素を総計で０．０００５～０．０７質量％含有することを特徴とする（１）～（４）のいずれか１つに記載の半導体装置用ボンディングワイヤ。
（６）前記ボンディングワイヤがさらにＰｄを１．１５質量％以下含有することを特徴とする（１）～（５）のいずれか１つに記載の半導体装置用ボンディングワイヤ。
　本発明は、半導体装置用の銅合金ボンディングワイヤ中にＮｉ，Ｚｎ，Ｇａ，Ｇｅ，Ｒｈ，Ｉｎ，Ｉｒ，Ｐｔの少なくとも１種を総計で０．０３質量％以上３質量％以下含有することにより、高温高湿環境下でのボール接合部の接合寿命を向上し、接合信頼性を改善することができる。
　《第１合金群含有とその効果》
　本発明の半導体装置用ボンディングワイヤ（以下、単に「ボンディングワイヤ」ともいう。）は、Ｎｉ，Ｚｎ，Ｇａ，Ｇｅ，Ｒｈ，Ｉｎ，Ｉｒ，Ｐｔの少なくとも１種（以下「第１合金群」ともいう。）を総計で０．０３質量％以上３質量％以下含有し、残部がＣｕと不可避不純物からなることを特徴とする。銅を主体とする合金であることから、「銅合金ボンディングワイヤ」ともいう。本発明のボンディングワイヤは、車載用デバイスで要求される高温高湿環境でのボール接合部の接合信頼性を改善することができる。
　半導体装置のパッケージであるモールド樹脂（エポキシ樹脂）には、分子骨格に塩素（Ｃｌ）が含まれている。ＨＡＳＴ評価条件である１３０℃、相対湿度が８５％の高温高湿環境下では、分子骨格中のＣｌが加水分解して塩化物イオン（Ｃｌ－）として溶出する。銅合金ボンディングワイヤをＡｌ電極に接合した場合、Ｃｕ／Ａｌ接合界面が高温下に置かれると、ＣｕとＡｌが相互拡散し、最終的に金属間化合物であるＣｕ9Ａｌ4が形成される。Ｃｕ9Ａｌ4はＣｌなどのハロゲンによる腐食を受けやすく、モールド樹脂から溶出したＣｌによって腐食が進行し、接合信頼性の低下につながる。そのため、従来の銅合金ボンディングワイヤでは、ＨＡＳＴ評価でのボール接合部寿命が十分ではなかった。
　それに対し、本発明のように銅合金ボンディングワイヤが第１合金群（Ｎｉ，Ｚｎ，Ｇａ，Ｇｅ，Ｒｈ，Ｉｎ，Ｉｒ，Ｐｔの少なくとも１種）の元素を総計で０．０３質量％以上含有することにより、当該銅合金ボンディングワイヤを用いたボール接合部については、ＨＡＳＴ評価でのボール接合部寿命が向上する。第１合金群元素を総計で０．０３質量％以上含有していると、接合部におけるＣｕ9Ａｌ4金属間化合物の生成が抑制される傾向にあると考えられる。ボール接合部におけるＣｕとＡｌ界面に存在する第１合金群元素が、ＣｕとＡｌの相互拡散抑制効果を高め、結果として、高温高湿環境下で腐食し易いＣｕ9Ａｌ4の生成を抑制するものと思われる。また、ワイヤに含まれる第１合金群元素がＣｕ9Ａｌ4の形成を直接阻害する効果がある可能性もある。接合界面近傍の第１合金群の元素の役割は、腐食を誘発するハロゲンの移動を阻害するバリア機能、Ｃｕ、Ａｌの相互拡散及び金属間化合物の成長等を制御する機能等が考えられる。
　さらに、第１合金群の元素を所定量含有した銅合金ボンディングワイヤを用いてボール部を形成し、ＦＡＢを走査型電子顕微鏡（ＳＥＭ：Scanning　Electron　Microscope）で観察したところ、ＦＡＢの表面に直径数十ｎｍφ程度の析出物が多数見られた。エネルギー分散型Ｘ線分析（ＥＤＳ：Energy　Dispersive　X-ray　Spectroscopy）で分析すると第１合金群元素が濃化していることが確認された。以上のような状況から、詳細なメカニズムは不明だが、ＦＡＢに観察されるこの析出物がボール部と電極との接合界面に存在することで、温度が１３０℃、相対湿度が８５％の高温高湿環境でのボール接合部の接合信頼性が格段に向上しているものと思われる。本発明のボンディングワイヤは、ＰＣＴ評価よりも厳しい条件であるＨＡＳＴ評価で良好な結果が得られていることからも明らかなように、ＰＣＴ評価においても良好な結果を得ることができる。
　温度が１３０℃、相対湿度が８５％の高温高湿環境下でのボール接合部の接合寿命を向上させ、接合信頼性を改善する観点から、ワイヤ中の第１合金群元素の濃度は総計で０．０３質量％以上であり、好ましくは０．０５０質量％以上、より好ましくは０．０７０質量％以上、さらに好ましくは０．０９０質量％以上、０．１００質量％以上、０．１５０質量％以上、又は０．２００質量％以上である。ワイヤ中の第１合金群元素の濃度が総計で０．１００質量％以上であると、より厳しい接合信頼性に対する要求に対応することができる。
　一方で、良好なＦＡＢ形状を得る観点、ボンディングワイヤの硬質化を抑制して良好なウェッジ接合性を得る観点から、ワイヤ中の第１合金群元素の濃度は総計で３質量％以下、好ましくは２．５質量％以下であり、より好ましくは２．０質量％以下、さらに好ましくは１．９質量％以下、又は１．５質量％以下である。また、第１合金群元素の含有量の上限をこのように規定することにより、低温接合でのＡｌ電極との初期の接合強度が良好であり、ＨＡＳＴ試験での長期信頼性や、ＢＧＡ（Ball　Grid　Array）、ＣＳＰ（Chip　Size　Package）等の基板、テープ等への接合の量産マージンに優れるボンディングワイヤを得る観点、チップダメージを低減する観点からも、良好な結果を得ることができる。第１合金群元素含有量が好適範囲上限を超えると、チップダメージを発生させないように低荷重でボールボンディングを行う必要があり、電極との初期の接合強度が低下し、結果としてＨＡＳＴ試験信頼性が悪化する場合がある。本発明のボンディングワイヤでは、第１合金群元素の濃度の総計を上記好適な範囲とすることにより、ＨＡＳＴ試験での信頼性がさらに向上する。例えば、ＨＡＳＴ試験の不良発生までの寿命が２５０時間を超えるボンディングワイヤを実現することが可能である。これは、従来のＣｕボンディングワイヤの１．５倍以上の長寿命化に相当する場合もあり、過酷な環境での使用にも対応可能となる。
　《ボンディングワイヤの平均粒径》
　ボンディングワイヤ中の結晶粒径がワイヤ品質に及ぼす影響について評価した。その結果、ボンディングワイヤのワイヤ軸に垂直方向の芯材断面における平均結晶粒径には好適範囲があり、平均結晶粒径（μｍ）が、ワイヤの線径をＲ（μｍ）としたとき、
　０．０２×Ｒ＋０．４以上　　　（１ａ）
　０．１×Ｒ＋０．５以下　　　（１ｂ）
であるときには、ボール接合部のつぶれ形状や、ウェッジ接合性が特に良好になることが判明した。
　結晶粒径を測定するに際しては、後方散乱電子線回折法（ＥＢＳＤ、Electron　Backscattered　Diffraction）を用いると好ましい。粒径測定については、ＥＢＳＤ法による測定結果に対して、装置に装備されている解析ソフトを利用することで求めることができる。本発明で規定する結晶粒径は、測定領域内に含まれる結晶粒の相当直径（結晶粒の面積に相当する円の直径）を算術平均したものである。
　《ワイヤ表面の酸化銅の平均膜厚》
　本発明において好ましくは、ワイヤ表面の酸化銅の平均膜厚を０．０００５～０．０２μｍの範囲とする。第１合金群の元素を総計で０．０３～３質量％の濃度範囲で含有する銅合金ボンディングワイヤにおいて、ワイヤ表面の酸化銅の平均膜厚が０．０００５～０．０２μｍの範囲であれば、ＨＡＳＴ信頼性を量産レベルで安定して向上させる効果をより一層高められる。ワイヤ表面の酸化銅の膜厚が０．０２μｍよりも厚くなると、第１合金群元素を含有する銅合金からなるボンディングワイヤのボール接合部のＨＡＳＴ信頼性の改善効果にばらつきが生じて、ＨＡＳＴ加熱後の接合強度等が不安定となる傾向がある。このＨＡＳＴ信頼性ばらつきは線径が２０μｍ以下のボンディングワイヤでより問題となる可能性がある。第１合金群元素を含有する銅合金の表面の酸化銅がＨＡＳＴ信頼性を不安定化させる要因について、まだ不明な点もあるが、銅合金ボンディングワイヤの長手方向又はワイヤ表面から深さ方向での第１合金群元素濃度分布が不均一となること、あるいは、ボール内部の侵入酸素又は残留酸化物が第１合金群元素のＨＡＳＴ信頼性の向上効果を阻害する可能性があること、等が考えられる。第１合金群元素を含有する銅合金ボンディングワイヤによれば表面酸化を遅らせる効果が得られるため、酸化銅の平均膜厚を薄い範囲である０．０００５～０．０２μｍに制御することが容易である。第１合金群元素を総計で０．０３～３質量％の濃度範囲で含有する銅合金ボンディングワイヤでは、高純度銅に比較して、２０～４０℃程度の低温域におけるワイヤ表面の酸化銅膜の成長を遅らせる作用を有することも確認された。
　ワイヤ表面の酸化銅の平均膜厚が０．０２μｍを超えると、前述したように、ＨＡＳＴ評価の改善効果にばらつきが生じ易くなり、例えば、評価する接合数を増やすと改善効果にばらつきが生じて不安定となる可能性が高まるので、ワイヤ表面の酸化銅の平均膜厚の上限は０．０２μｍとするのが好ましい。ワイヤ表面の酸化銅の平均膜厚は、改善効果におけるばらつきを少なくすることができるという観点から、０．０２μｍ以下が好ましく、０．０１５μｍ以下がより好ましく、０．０１３μｍ以下がさらに好ましい。一方、ワイヤ表面の酸化銅の平均膜厚を０．０００５μｍ未満に安定して抑えるには特殊な表面処理、製品管理等が必要となり、接合性の低下、コスト上昇等を誘発して、工業的に適応することが困難となることがあるので、ワイヤ表面の酸化銅の平均膜厚の下限は０．０００５μｍとするのが好ましい。例えば、酸化銅の平均膜厚を０．０００５μｍ未満に抑える目的で、ワイヤ表面の防錆剤の塗布膜を厚くすると接合強度が低下して連続ボンディング性が低下するという問題がある。また、酸化銅の平均膜厚を０．０００５μｍ未満に抑える目的で、ワイヤ製品の大気保管の保証寿命を極端に短くすれば、ワイヤボンディングの量産工程での操業が困難となり、スクラップ問題が発生したりするため、工業的には容認されない場合もある。ワイヤ表面の酸化銅の平均膜厚は、工業的に適したボンディングワイヤを提供することができるという観点から、０．０００５μｍ以下が好ましく、０．０００８μｍ以上がより好ましく、０．００１μｍ以上がさらに好ましい。
　ワイヤ表面の酸化銅の平均膜厚の測定に関しては、表面分析に適したオージェ分光分析が有効であり、ワイヤ表面のランダムな位置の最低３か所以上、可能であれば５か所以上で測定した酸化銅の膜厚の平均値を用いることが望ましい。酸素濃度とは、Ｃｕ、Ｏ、金属元素を総計した濃度に対するＯ濃度の比率を用いる。ワイヤ表面の代表的な汚染である有機物は除外するため、上記の濃度計算ではＣ量は含まれない。酸化銅の膜厚の絶対値を高精度に求めることが困難であるため、オージェ分光法で一般的に用いられるＳｉＯ2換算値を用いて酸化銅膜厚を算出することが望ましい。本発明では、酸素濃度が３０質量％を酸化銅と金属銅の境界とする。主な酸化銅はＣｕ2Ｏ、ＣｕＯが知られているが、第１合金群の元素を含有する銅合金の表面には低温（２５～５００℃）ではＣｕ2Ｏが優先的に形成される場合が多いため、酸素濃度が３０質量％を境界とする。
　《第２合金群の含有とその効果》
　本発明のボンディングワイヤはさらにＴｉ、Ｂ、Ｐ、Ｍｇ、Ｃａ、Ｌａ、Ａｓ、Ｔｅ、Ｓｅから選ばれる少なくとも１種以上（以下「第２合金群」ともいう。）の元素をそれぞれ０．０００１～０．０５０質量％含有すると好ましい。これにより、高密度実装に要求されるボール接合部のつぶれ形状を改善、すなわちボール接合部形状の真円性を改善することができる。またこれにより、より良好なボール形状を実現することができる。第２合金群の含有量は、ボール接合部の圧着形状を真円化させる効果を向上できるという観点から、総計で０．０００１質量％以上が好ましく、０．０００２質量％以上がより好ましく、０．０００３質量％以上がさらに好ましい。また、ボールの硬質化を抑制してボール接合時のチップダメージを抑制する観点から、第２合金群含有量は０．０５０質量％以下が好ましく、０．０４５質量％以下がより好ましく、０．０４０質量％以下がさらに好ましい。また、当該第２合金群の元素をそれぞれ０．０００５質量％以上含有することにより、ウェッジ接合部の不良発生を低減させる高い効果が得られるので、より好ましい。第２合金群の元素の添加により、ワイヤが大変形するときにワイヤの加工硬化を低減して、ウェッジ接合のワイヤ変形を促進する作用を高められる。詳細な機構は不明であるが、第１合金群の元素はＣｕ中に固溶すること、第２合金群の元素はＣｕ中の固溶度が小さいため析出、偏析することで、これらの元素が補完的に作用し、ウェッジ接合のワイヤ変形に、一段と優れた効果が発揮できていると考えられる。
　《第３合金群の含有とその効果》
　本発明のボンディングワイヤはさらにＡｇ、Ａｕから選ばれる少なくとも１種以上（以下「第３合金群」という。）の元素を総計で０．０００５～０．０７質量％含有すると好ましい。最近の高密度実装で要求される狭ピッチ接続では、ボール接合部の変形形状が重要であり、花弁状、偏芯等の異形を抑えて、真円化させることが求められる。第３合金群の元素を第１合金群の元素と併用して添加することで、ボール変形を容易に等方的にでき、圧着形状を真円化させる効果が高められる。これにより、５０μｍ以下の狭ピッチ接続にも十分適応できることが確認された。この効果は、第３合金群元素含有量が総計で０．０００５質量以上であればより効果的に発揮される。第３合金群の含有量は、ボール接合部の圧着形状を真円化させる効果を向上できるという観点から、総計で０．０００５質量％以上が好ましく、０．０００７質量％以上がより好ましく、０．００１質量％以上がさらに好ましい。また、ボール接合部のシュア強度が保持できるという観点から、第３合金群含有量は０．０７質量％以下が好ましく、０．０６５質量％以下がより好ましく、０．０５０質量％以下がさらに好ましい。一方、第３合金群元素が総計で０．０７質量％を超えると、ボール接合部のシェア強度が低下する場合がある。ボンディングワイヤにＡｕを含有させると、再結晶温度が上がって、伸線加工中の動的再結晶を防ぐため加工組織が均一になり、調質後の結晶粒サイズが比較的均一になる。それによりワイヤの破断伸びが向上し、ボンディングした際に安定的なワイヤループを形成することができる。Ａｕをさらに含有させる場合、ワイヤ中の第１合金群元素の総計が０．１質量％を超えるように含有量を定めることが好適である。本発明のボンディングワイヤは、第２合金群とともに第３合金群を含んでいていてもよいし、第２合金群に代えて、第３合金群を含有していてもよい。
　《Ｐｄの含有とその効果》
　本発明のボンディングワイヤはさらにＰｄを１．１５質量％以下の範囲で含有すると好ましい。これにより、ボール接合部の高湿加熱信頼性をさらに向上できる。ボンディングワイヤ中にＰｄを上記濃度範囲で含有させることにより、Ｐｄが接合界面まで拡散又は濃化して、ＣｕとＡｌとの相互拡散に影響を及ぼすことで、ボール接合部接合界面に成長するＣｕ－Ａｌ系の金属間化合物の腐食反応を遅らせると考えられる。Ｐｄの含有量はＨＡＳＴ信頼性を顕著に高められるという観点から、１．１５質量％以下であるのが好ましく、１．０質量％以下であるのがより好ましく、０．９質量％以下であるのがさらに好ましい。一方、Ｐｄ濃度が１．１５質量％を超えると、ワイヤの常温強度・高温強度等が上昇することで、ループ形状のバラツキの発生、ウェッジ接合性の低下等が見られることがあるので、Ｐｄ含有量上限は１．１５質量％とするのが好ましい。本発明のボンディングワイヤは、第２合金群及び／又は第３合金群とともにＰｄを含んでいてもよいし、第２合金群及び第３合金群のいずれか一方または双方に代えてＰｄを含んでいてもよい。
　《ボンディングワイヤの製造方法》
　本発明の半導体装置用ボンディングワイヤの製造方法の概要について説明する。
　銅純度が４Ｎ～６Ｎ（９９．９９～９９．９９９９質量％）である高純度銅を用い、添加元素を必要な濃度含有した銅合金を溶解により作製する。溶解には、アーク加熱炉、高周波加熱炉、抵抗加熱炉等を利用することができる。大気中からのＯ2、Ｈ2等のガスの混入を防ぐために、真空雰囲気あるいはＡｒやＮ2等の不活性雰囲気中で溶解を行うことが好ましい。その後に炉中で徐冷してインゴット（鋳塊）を作製する。インゴット表面の洗浄のため、酸洗浄及び水洗し、乾燥させる。銅中の添加元素の濃度分析には、ＩＣＰ（Inductively　Coupled　Plasma）分析等が有効である。
　この合金化では、高純度の成分を直接添加する方法と、添加元素を１％程度の高濃度含有する母合金を利用する手法がある。母合金を利用する手法は、低濃度に含有して元素分布を均一化させるためには有効である。本発明の添加成分において、第１合金群の元素を０．５質量％以上の比較的高濃度に含有させる場合には、高純度の直接添加が利用でき、第１合金群および第２合金群の元素を低濃度に安定して含有させるには、母合金を添加する手法が有利である。
　ボンディングワイヤ中に第１合金群、第２合金群、その他の合金元素を含有させるに際し、上述のように、これら元素を溶解時に含有させる方法の他、ボンディングワイヤ表面に合金元素を被着させて含有させる方法を採用したとしても、上記本発明の効果を発揮することができる。
　ワイヤ製造工程の途中で、ワイヤ表面に合金成分を被着させることによって含有させることもできる。この場合、ワイヤ製造工程のどこに組み込んでも良いし、複数回繰り返しても良い。複数の工程に組み込んでも良い。被着方法としては、（１）水溶液の塗布⇒乾燥⇒熱処理、（２）めっき法（湿式）、（３）蒸着法（乾式）、から選択することができる。
　製造した銅合金塊はまず圧延により大径に加工し、次いで伸線加工により最終線径まで細くされる。圧延工程では、溝型ロール又はスエージング等を使用する。伸線工程では、ダイヤモンドコーティングされたダイスを複数個セットできる連続伸線装置を用いる。必要に応じて、加工の途中段階又は最終線径で熱処理を施す。
　銅合金ボンディングワイヤに、第１合金群の元素を含有させると、ワイヤの材料強度（硬度）が高くなる。そのため、ボンディングワイヤを伸線加工するに際しては、伸線時の減面率を５～８％と低い減面率としていた。また、伸線後の熱処理において、やはり硬度が高いため、ボンディングワイヤとして使用できるレベルまで軟質化するために７００℃以上の温度で熱処理を行っていた。高い熱処理温度のため、芯材断面における平均結晶粒径（μｍ）が（０．０５×Ｒ＋０．５）超となり（Ｒはワイヤ線径（μｍ））、ウェッジ接合性が若干低下することとなった。一方、熱処理温度を低下すると、芯材断面における平均結晶粒径（μｍ）が（０．０２×Ｒ＋０．４）未満となり、ボール接合部のつぶれ形状が若干低下する結果となっていた。
　そこで、本発明においては、ダイスを用いた伸線時において、全ダイス数のうちの半分以上のダイスにおいて減面率を１０％以上とし、さらに伸線後の熱処理における熱処理温度を６００℃以下と低い温度とするのが好ましい。その結果、ボンディングワイヤのワイヤ軸に垂直方向の芯材断面における平均結晶粒径（μｍ）を好適範囲（０．０２×Ｒ＋０．４以上、０．０５×Ｒ＋０．５以下）とすることができる（Ｒはワイヤ線径（μｍ））。最新の伸線加工技術を適用し、潤滑液として、潤滑液に含まれる非イオン系界面活性剤の濃度を従来よりも高めに設計し、ダイス形状として、ダイスのアプローチ角度を従来のものよりも緩やかに設計し、ダイスの冷却水温度を従来よりも低めに設定することなどの相乗効果により、銅合金ボンディングワイヤ中に第１合金群の成分を総計で０．０３質量％以上含有して硬質化しているにもかかわらず、減面率１０％以上の伸線加工が可能となった。
　ワイヤ表面の酸化銅の平均膜厚が０．０００５～０．０２μｍの範囲に量産レベルで管理するための製造条件としては、ワイヤ製造工程での酸化を抑えることが好ましい。熱処理工程での酸化銅の形成を制御するには、温度（２００～８５０℃）、熱処理工程での不活性ガス流量の調整（１～８Ｌ／分）、炉内の酸素濃度の管理等が有効である。酸素濃度は、炉の中央部で測定して、その濃度範囲が０．１～６体積％であるように調整することが有効である。酸素濃度を上記範囲に制御する手法として、上記ガス流量の適正化、炉の入り口、出口等の形状を変えることで外界から熱処理炉内への大気巻込みの防止等を管理することでできる。さらに量産レベルでは、伸線工程も管理することが望ましく、例えば、水中での伸線工程の１パス後にワイヤを巻き取る前に乾燥（４０～６０℃の温風大気の吹き付け）することによりワイヤ表面の水分を積極的に除去すること、製造工程途中での保管の湿度を管理（２日以上保管では相対湿度６０％以下）すること等も有効である。
　以下では、実施例を示しながら、本発明の実施形態に係るボンディングワイヤについて、具体的に説明する。
　（サンプル）
　まずサンプルの作製方法について説明する。芯材の原材料となるＣｕは純度が９９．９９質量％以上で残部が不可避不純物から構成されるものを用いた。第１合金群～第３合金群及びＰｄは純度が９９質量％以上で残部が不可避不純物から構成されるものを用いた。ワイヤ又は芯材の組成が目的のものとなるように、芯材への添加元素である第１合金群、第２合金群、第３合金群、Ｐｄの合金元素を調合する。各合金元素の添加に関しては、単体での調合も可能であるが、単体で高融点の元素や添加量が極微量である場合には、添加元素を含むＣｕ母合金をあらかじめ作製しておいて目的の添加量となるように調合しても良い。
　銅合金は、連続鋳造により数ｍｍの線径になるように製造した。得られた数ｍｍの合金に対して、引抜加工を行ってφ０．３～１．４ｍｍのワイヤを作製した。伸線には市販の潤滑液を用い、伸線速度は２０～１５０ｍ／分とした。一部の実施例を除き、ワイヤ表面の酸化膜を除去するために、塩酸等による酸洗処理を行った後、全ダイス数のうちの半分以上のダイスにおいて減面率１０～２１％のダイスを使用して伸線加工を行い、更には途中に１乃至３回の熱処理を２００～６００℃で行うことによって直径２０μｍまで加工した。加工後は最終的に破断伸びが約５～１５％になるように熱処理をした。熱処理方法はワイヤを連続的に掃引しながら行い、Ｎ2もしくはＡｒガスを流しながら行った。ワイヤの送り速度は１０～９０ｍ／分、熱処理温度は３５０～６００℃で熱処理時間は１～１０秒とした。下記表１、２の実施例Ｎｏ．６、１２、２２の製造方法については、実施例Ｎｏ．６はダイスの減面率を１０％未満とし、実施例Ｎｏ．１２は熱処理温度を７００℃以上と高い温度とし、実施例Ｎｏ．２２は熱処理温度を７２０℃以上と高い温度とした。
　（評価方法）
　ワイヤ中の各合金元素の含有量については、ＩＣＰ発光分光分析装置を利用して分析した。
　結晶粒径については、ＥＢＳＤ法で評価した。ＥＢＳＤ測定データの解析には専用ソフト（ＴＳＬソリューションズ製　ＯＩＭ　ａｎａｌｉｓｉｓ等）を利用した。結晶粒径は、測定領域内に含まれる結晶粒の相当直径（結晶粒の面積に相当する円の直径）を算術平均したものである。
　ワイヤ表面の酸化銅の平均膜厚の測定には、オージェ分光分析による深さ分析を行い、ワイヤ表面のランダムな位置の最低３か所以上で測定した酸化銅の膜厚の平均値を用いた。Ａｒイオンでスパッタしながら深さ方向に測定して、深さの単位はＳｉＯ2換算で表示した。酸素濃度が３０質量％を酸化銅と金属銅の境界とする。ここでの酸素濃度とは、Ｃｕ、酸素、金属元素を総計した濃度に対する酸素濃度の比率を用いた。測定にはＳＡＭ－６７０（ＰＨＩ社製、ＦＥ型）を用い、電子ビームの加速電圧を５ｋＶ、測定領域は１０ｎＡとし、Ａｒイオンスパッタの加速電圧が３ｋＶ、スパッタ速度は１１ｎｍ／分で測定を実施した。酸化銅の平均膜厚の測定結果を表２の「酸化銅平均膜厚」の欄に記載した。
　高温高湿環境又は高温環境でのボール接合部の接合信頼性は、接合信頼性評価用のサンプルを作製し、ＨＡＳＴ評価を行い、ボール接合部の接合寿命によって判定した。接合信頼性評価用のサンプルは、一般的な金属フレーム上のＳｉ基板に厚さ０．８μｍのＡｌ－１．０％Ｓｉ－０．５％Ｃｕの合金を成膜して形成した電極に、市販のワイヤーボンダーを用いてボール接合を行い、市販のエポキシ樹脂によって封止して作製した。ボールはＮ2＋５％Ｈ2ガスを流量０．４～０．６Ｌ／ｍｉｎで流しながら形成させ、その大きさはφ３３～３４μｍの範囲とした。
　ＨＡＳＴ評価については、作製した接合信頼性評価用のサンプルを、不飽和型プレッシャークッカー試験機を使用し、温度１３０℃、相対湿度８５％の高温高湿環境に暴露し、７Ｖのバイアスをかけた。ボール接合部の接合寿命は４８時間毎にボール接合部のシェア試験を実施し、シェア強度の値が初期に得られたシェア強度の１／２となる時間とした。高温高湿試験後のシェア試験は、酸処理によって樹脂を除去して、ボール接合部を露出させてから行った。
　ＨＡＳＴ評価のシェア試験機はＤＡＧＥ社製の試験機を用いた。シェア強度の値は無作為に選択したボール接合部の１０か所の測定値の平均値を用いた。上記の評価において、接合寿命が９６時間未満であれば実用上問題があると判断し×印、９６時間以上１４４時間未満であれば実用可能であるがやや問題有りとして△印、１４４時間以上１９２時間未満であれば実用上問題ないと判断し○印、１９２時間以上２８８時間未満であれば優れていると判断し◎印、２８８時間以上であれば特に優れていると判断し◎◎とし、表２の「ＨＡＳＴ信頼性」の欄に表記した。×のみが不合格であり、それ以外は合格である。
　ボール部におけるボール形成性（ＦＡＢ形状）の評価は、接合を行う前のボールを採取して観察し、ボール表面の気泡の有無、本来真球であるボールの変形の有無を判定した。上記のいずれかが発生した場合は不良と判断した。ボールの形成は溶融工程での酸化を抑制するために、Ｎ2ガスを流量０．５Ｌ／ｍｉｎで吹き付けながら行った。ボールの直径は、ワイヤ線径の１．７倍とした。１条件に対して５０個のボールを観察した。観察にはＳＥＭを用いた。ボール形成性の評価において、不良が５個以上発生した場合には問題があると判断し×印、不良が３～４個であれば実用可能であるがやや問題有りとして△印、不良が１～２個の場合は問題ないと判断し○印、不良が発生しなかった場合には優れていると判断し◎印とし、表２の「ＦＡＢ形状」の欄に表記した。×のみが不合格であり、それ以外は合格である。
　ワイヤ接合部におけるウェッジ接合性の評価は、リードフレームのリード部分に１０００本のボンディングを行い、接合部の剥離の発生頻度によって判定した。リードフレームは１～３μｍのＡｇめっきを施したＦｅ－４２原子％Ｎｉ合金リードフレームを用いた。本評価では、通常よりも厳しい接合条件を想定して、ステージ温度を一般的な設定温度域よりも低い１５０℃に設定した。上記の評価において、不良が１１個以上発生した場合には問題があると判断し×印、不良が６～１０個であれば実用可能であるがやや問題有りとして△印、不良が１～５個の場合は問題ないと判断し○印、不良が発生しなかった場合には優れていると判断し◎印とし、表２の「ウェッジ接合性」の欄に表記した。×のみが不合格であり、それ以外は合格である。
　ボール接合部のつぶれ形状の評価は、ボンディングを行ったボール接合部を直上から観察して、その真円性によって判定した。接合相手はＳｉ基板上に厚さ１．０μｍのＡｌ－０．５％Ｃｕの合金を成膜した電極を用いた。観察は光学顕微鏡を用い、１条件に対して２００箇所を観察した。真円からのずれが大きい楕円状であるもの、変形に異方性を有するものはボール接合部のつぶれ形状が不良であると判断した。上記の評価において、不良が６個以上発生した場合には問題があると判断し×印、不良が４～５個であれば実用可能であるがやや問題有りとして△印、１～３個の場合は問題ないと判断し○印、全て良好な真円性が得られた場合は、特に優れていると判断し◎印とし、表２の「つぶれ形状」の欄に表記した。
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
　（評価結果）
　表１、２に示すように、第１合金群の元素の濃度が合計で０．０３～２．０質量％の実施例Ｎｏ．１～３９に係る銅合金ボンディングワイヤでは、温度が１３０℃、相対湿度が８５％の高温高湿環境下でのＨＡＳＴ試験でボール接合部信頼性が得られることを確認した。
　また、ワイヤ表面の酸化銅の平均膜厚が０．０００５～０．０２μｍの範囲である実施例Ｎｏ．１～３９に係るボンディングワイヤはいずれも、ＨＡＳＴ評価結果が特に良好であった。
　また、実施例のボンディングワイヤのうち、全ダイス数のうちの半分以上のダイスにおいて伸線時の減面率を１０％以上とし、伸線後の熱処理における熱処理温度を６００℃以下と低い温度とした実施例Ｎｏ．１～５、７～１１、１３～２１、２３～３４、３５～３９に係るボンディングワイヤでは、ボンディングワイヤのワイヤ軸に垂直方向の芯材断面における平均結晶粒径（μｍ）が、０．０２×Ｒ＋０．４以上、０．１×Ｒ＋０．５以下の範囲内（Ｒはワイヤの線径（μｍ））であり、ウェッジ接合性とボール接合部のつぶれ形状のいずれも良好な結果が得られた。
　実施例Ｎｏ．６はダイスの減面率を１０％未満としたため平均結晶粒径が好適範囲の下限未満であり、ウェッジ接合性が「△」であって若干低下する結果となった。
　実施例Ｎｏ．１２は熱処理温度を７００℃以上と高い温度としたために平均結晶粒径が好適範囲の上限超であり、実施例Ｎｏ．２２は熱処理温度を７２０℃以上と高い温度としたことから、平均結晶粒径が好適範囲の上限超であり、その結果として、実施例Ｎｏ．１２、２２はいずれもつぶれ形状が「△」であって若干低下する結果となった。
　実施例に係るボンディングワイヤのうち、さらに第２合金群をそれぞれ０．０００１～０．０５０質量％含む実施例Ｎｏ．１３～２６に係るボンディングワイヤでは、ボール接合部のつぶれ形状が良好であった。
　実施例に係るボンディングワイヤのうち、さらに、Ａｇ、Ａｕから選ばれる少なくとも１種以上の元素を総計で０．０００５～０．０７質量％含有する実施例Ｎｏ．２７～３０に係るボンディングワイヤでは、ボール接合部のつぶれ形状が良好であった。
　実施例に係るボンディングワイヤのうち、さらにＰｄを１．１５質量％以下含有する実施例Ｎｏ．３１～３４に係るボンディングワイヤでは、温度が１３０℃、相対湿度が８５％の高温高湿環境下でのＨＡＳＴ試験でボール接合部信頼性がさらに良好となることを確認した。
　実施例に係るボンディングワイヤのうち、第１合金群に加えて、さらに、第２合金群をそれぞれ０．０００１～０．０５０質量％、及び、Ａｇ、Ａｕから選ばれる少なくとも１種以上の元素を総計で０．０００５～０．０７質量％を含有する、実施例Ｎｏ．３５～３７に係るボンディングワイヤでは、ＨＡＳＴ評価結果、ウェッジ接合性、及びボール接合部のつぶれ形状がすべて良好であるという好ましい結果が得られた。
　また、実施例に係るボンディングワイヤのうち、第１合金群に加えて、さらに第２合金群をそれぞれ０．０００１～０．０５０質量％、及び、Ｐｄを１．１５質量％以下含有する実施例Ｎｏ．３８～３９に係るボンディングワイヤでは、ＨＡＳＴ評価結果がさらに良好で、ＦＡＢ形状、ウェッジ接合性、及びボール接合部のつぶれ形状が良好であるという好ましい結果が得られた。
　一方、比較例のボンティングワイヤのうち、第１合金群の元素合計濃度が０．０３質量%よりも少ない比較例Ｎｏ．３、４のボンディングワイヤでは、ＨＡＳＴ試験でボール接合部信頼性が得られず、第１合金群の元素合計濃度が３質量％よりも多い比較例Ｎｏ．１、２、５、６のボンディングワイヤでは、ＦＡＢ形状及びウェッジ接合性が不良であった。

Claims (6)

  1. 　Ｎｉ，Ｚｎ，Ｇａ，Ｇｅ，Ｒｈ，Ｉｎ，Ｉｒ，Ｐｔの少なくとも１種を総計で０．０３質量％以上３質量％以下含有し、残部がＣｕと不可避不純物からなることを特徴とする半導体装置用ボンディングワイヤ。
  2. 　前記ボンディングワイヤのワイヤ軸に垂直方向の芯材断面における平均結晶粒径（μｍ）が、ワイヤの線径をＲ（μｍ）とすると、
    　０．０２×Ｒ＋０．４以上　　　（１ａ）
    　０．１×Ｒ＋０．５以下　　　（１ｂ）
    であることを特徴とする請求項１に記載の半導体装置用ボンディングワイヤ。
  3. 　ワイヤ表面の酸化銅の平均膜厚が０．０００５～０．０２μｍの範囲であることを特徴とする請求項１又は２に記載の半導体装置用ボンディングワイヤ。
  4. 　前記ボンディングワイヤがさらにＴｉ、Ｂ、Ｐ、Ｍｇ、Ｃａ、Ｌａ、Ａｓ、Ｔｅ、Ｓｅから選ばれる少なくとも１種以上の元素をそれぞれ０．０００１～０．０５０質量％含有することを特徴とする請求項１～３のいずれか１項に記載の半導体装置用ボンディングワイヤ。
  5. 　前記ボンディングワイヤがさらにＡｇ、Ａｕから選ばれる少なくとも１種以上の元素を総計で０．０００５～０．０７質量％含有することを特徴とする請求項１～４のいずれか１項に記載の半導体装置用ボンディングワイヤ。
  6. 　前記ボンディングワイヤがさらにＰｄを１．１５質量％以下含有することを特徴とする請求項１～５のいずれか１項に記載の半導体装置用ボンディングワイヤ。
     
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