JP6507329B1 - パラジウム被覆銅ボンディングワイヤ、ワイヤ接合構造、半導体装置及び半導体装置の製造方法 - Google Patents
パラジウム被覆銅ボンディングワイヤ、ワイヤ接合構造、半導体装置及び半導体装置の製造方法 Download PDFInfo
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Abstract
【解決手段】ボンディングワイヤは、銅芯材と、Pd層とを有し、硫黄族元素を含有するPd被覆銅ボンディングワイヤであって、銅とPdと硫黄族元素の合計に対して、Pdの濃度が1.0質量%〜4.0質量%、硫黄族元素濃度が合計で50質量ppm以下、S濃度が5質量ppm〜2質量ppmであるか、Se濃度が5質量ppm〜20質量ppm又はTe濃度が15質量ppm〜50質量ppm以下であり、半導体チップのAlを含む電極とボール接合部との接合面近傍に、Pd濃度が、Alと銅とPdの合計に対して2.0質量%以上となるPd濃化接合領域を有するワイヤ接合構造。
【選択図】図1
Description
また、本発明は、高温、高湿の環境においても接合信頼性を安定的に維持することのできる半導体装置、特には、QFP(Quad Flat Packaging)、BGA(Ball Grid Array)、QFN(Quad For Non-Lead Packaging)のパッケージに好適で、車載用途に使用できる半導体装置及びその製造方法を提供することを目的とする。
また、本発明の半導体装置及びその製造方法によれば、高温、高湿の環境においても長期間優れた接合信頼性を安定的に維持することができる。
図1は、本実施形態のワイヤ接合構造10の一例を示す断面模式図である。図1に示すワイヤ接合構造10は、パラジウム被覆銅ボンディングワイヤをシリコン(Si)基板51上のアルミニウムを含む電極52表面にボール接合して形成される。図1はこのワイヤ接合構造10を、パラジウム被覆銅ボンディングワイヤのワイヤ長手方向の中心線Lを通り中心線Lに平行な面で切断した断面を表している。ワイヤ接合構造10は、ボール接合部20と、接合面21と、上記パラジウム被覆銅ボンディングワイヤからなるワイヤ部22とを有している。ワイヤ部22の線径φはパラジウム被覆銅ボンディングワイヤの線径と等しい。
本実施形態のパラジウム被覆銅ボンディングワイヤにおける芯材は、銅を主成分として構成される銅又は銅合金である。ここでの主成分は、量又は特性において中心的であることを意味し、含有量であれば少なくとも50.0質量%である。主成分としての特性は、その構成に求められる特性であり、例えば、銅の芯材ではワイヤの破断力や伸び率等の機械的性質である。主成分は、例えば、このような特性に中心的に影響を与える成分ということができる。
本実施形態のパラジウム被覆銅ボンディングワイヤは、芯材となる銅を主成分とする銅線材表面にパラジウムが被覆され、伸線加工及び、必要に応じて熱処理されることで得られる。パラジウム被覆後に金が被覆されてもよく、また、パラジウム又は金が被覆された後に、段階的に伸線や、熱処理が施されてもよい。
次に、上記実施形態のパラジウム被覆銅ボンディングワイヤを用いた半導体装置について説明する。図7に示すように、本実施形態の半導体装置1は、半導体チップ2と、半導体チップ2上に設けられた、アルミニウムを含有するアルミニウム電極3と、半導体チップ2の外部に設けられた、金被覆を有する外部電極4と、アルミニウム電極3と外部電極4表面を接続するボンディングワイヤ5を有する。なお、図7では外部電極上に金被覆を有する場合を例に説明するが、金被覆に代えて、又は金被覆とともに銀被覆を有していても同様である。
芯材は純度99.99質量%以上の銅(Cu)を用い、これを連続鋳造し、前熱処理をしながら圧延し、その後一次伸線して銅線材(直径0.5mm)を得た。
パラジウムめっき後の銅線材について稔回試験を行い、稔回試験後の線材表面の外観を光学実体顕微鏡(オリンパス社製、製品名:SZX16)で観察し、パラジウムの亀裂が芯材の銅まで達しているかどうかで評価した。亀裂が銅まで達していないものをワイヤ表面割れ無し(○)、亀裂が銅まで達しているものをワイヤ表面割れ有(×)と評価した。稔回試験は、前川試験機製作所製の装置(装置名:TO−202)を用いて、約20cmサンプリングしたワイヤの両端を固定して、時計回りに180度、反時計回りに180度回転させ、それを7セット行ったあと、外観を観察した。結果を表1、2に示す。なお、亀裂が銅まで達していたワイヤについては、これ以降の引け巣やHAST評価等を実施しなかったので表中には未実施(−)と示した。
例1で得られた線径18μmのパラジウム被覆銅ボンディングワイヤをケイ・アンド・エス社製の装置(全自動Cu線ボンダー;IConn ProCu PLUS)型超音波装置にてアーク放電電流値(エレクトロン・フレーム・オフ(EFO)電流値)を65mAにして、放電時間を50〜1000μsの範囲で調節し、ボール径約33μm(ワイヤ線径の約1.8倍)のフリーエアーボールを形成した。フリーエアーボール形成雰囲気は、窒素ガス95.0体積%と水素ガス5.0体積%の混合ガスで、ガス流量5.0L/分でワイヤ先端にガスを吹き付けた。形成したフリーエアーボールの先端側(ワイヤネック部と反対側)の略中心を走査型オージェ電子分光分析装置(日本電子社製のJAMP−9500F(装置名))によって深さ方向分析した。オージェ電子分光分析装置の設定条件は、一次電子線の加速電圧10kV、電流50nA、ビーム径5μm、アルゴンイオンスパッタの加速電圧1kV、スパッタ速度2.5nm/分(SiO2換算)である。フリーエアーボールの先端部表面から深さ方向に5.0〜100.0nmまでに等間隔で9点以上分析したときの銅とパラジウムの合計に対する、パラジウムの平均濃度を求めた。分析箇所は具体的には、表面から略0〜30.0nmまでは、1.0nmごとに31箇所、31.0〜60.0nmまでは6nmごとに5箇所、61.0〜480.0nmまでは12.0nmごとに35箇所である。
また、上記と同じ条件で作成した30個のフリーエアーボールについてボール表面の、大きな引け巣の有無をSEMによって観察した。SEM観察写真において、引け巣の最大長が、12μmを超えるものを問題となる引け巣、12μm以下のものを問題とならない引け巣として評価した。なお、図2に問題とならない小さな引け巣のあるフリーエアーボール、図3に問題となる大きな引け巣のあるフリーエアーボールを表し、引け巣を写真中に破線で囲って示した。問題となる大きな引け巣は、図3に示されるように、フリーエアーボール表面に形成される大きなしわのような溝である。引け巣のないもの及び問題とならない程度の小さな引け巣を生じたものを引け巣無し(○)、問題となる引け巣が1個でもあったものを引け巣有り(×)と評価した。
各例で得られたパラジウム被覆銅ボンディングワイヤについて、上記同様の全自動Cu線ボンダー装置にて、BGA(ball grid array)基板上の厚さ400μmのSiチップ上の厚さ2μmのAl−1.0質量%Si−0.5質量%Cu合金電極上に、それぞれ上記フリーエアーボール、ボール接合及び第二接合と同様の条件でワイヤボンディングを行なった。つまり、フリーエアーボールの形成は、上記同様の全自動Cu線ボンダーを用いて、ボール径が線径の1.5〜2.3倍の範囲の所定の大きさになるように、エレクトロン・フレーム・オフ(EFO)電流を30〜90mAの範囲、放電時間を50〜1000μsの範囲でそれぞれ所定の値に調節し、EFO−Gapが25〜45mil(約635〜1143μm)、テール長さが6〜12mil(約152〜305μm)で行なった。また、ワイヤ先端部に窒素95.0体積%と水素5.0体積%の混合ガスをガス流量が0.3〜0.6L/分で吹き付けた。第一接合の条件は、例えば、ワイヤ線径φが18μmの実施例1については、ボール径が33μmのフリーエアーボールを形成し、第2ボール圧縮部20bの高さYが10μm、第2ボール圧縮部20bの接合面21に平行方向の最大幅X0が40μmとなるように、上記全自動Cu線ボンダー装置にて、ボール圧着力7.5gf、超音波印加出力70mA、ボール圧着時間15ms、圧着温度150℃に調節して、電極にボール接合した。また、第二接合は、スクラブモードにて圧着力70gf、圧着時間20ms、圧着温度150℃、周波数200kHz、振幅3.0μm、サイクル2回の条件にてウェッジボンディングし、ループ長さ2mmで1,000本のワイヤボンディングを行った。この際、チップ上のAl−1.0質量%Si−0.5質量%Cu合金電極は隣り合うボンド部のみが電気的に接続されて、隣り合う2本のワイヤ同士で電気的に1つの回路を形成しており、計500回路が形成される。その後、このBGA基板上のSiチップを市販のトランズファーモールド機(第一精工製株式会社、GPGP−PRO−LAB80)を使って樹脂封止して試験片を得た。なお、封止した樹脂は市販されているハロゲンフリーではない樹脂を使用した。また、実施例1以外の試験片については第2ボール圧縮部20bの高さYが7〜13μm、第2ボール圧縮部20bの接合面21に平行方向の最大幅X0は形成されたフリーエアーボールの1.2倍となるようにボール接合した。
この試験片についてHAST装置(株式会社平山製作所、PCR8D)を用いて、130℃×85.0%RH(相対湿度)で400時間及び600時間保持した。各々の時間において保持前後に上記500回路の電気抵抗値を測定し、保持後の電気抵抗値が保持前の電気抵抗値の1.1倍を超えた回路が一つでもあると不良(×)、500回路全てにおいて抵抗値が1.1倍未満であった場合は優良(◎)と評価した。400時間保持後では、すべてのサンプルで電気抵抗は1.1倍未満であった。
また、試験片についてHTS装置(アドバンテック社製、DRS420DA)を用いて、220℃で2000時間保持した。保持前後に上記同様に500回路の電気抵抗値を測定し、保持後の電気抵抗値が保持前の電気抵抗値の1.1倍を超えた回路が一つでもあると不良(×)、500回路全てにおいて抵抗値が1.1倍未満であった場合は優良(◎)と評価した。HAST試験及びHTS試験の評価結果を表1、2に示す。表2中の「不良数」は、保持後の電気抵抗値が保持前の電気抵抗値の1.1倍を超えた回路の数である。
次に、パラジウム層上に金層を有するパラジウム被覆銅ボンディングワイヤの特性を確認した。例1、4、7のパラジウム被覆銅ボンディングワイヤの製造過程で、パラジウムを被覆した後、さらに、市販の金めっき浴を用いて金めっきを施した他は例1、4、7と同様にして金の層を有するパラジウム被覆銅ボンディングワイヤを作製した(例33〜35)。なお、表3の各元素の濃度については、金層の金濃度をワイヤ全体に含めずに算出した。
例1において、上記HAST及びHTS用の試験片作製の条件と同様にフリーエアーボールを形成し、第2ボール圧縮部20bの高さYが10μm、第2ボール圧縮部20bの接合面21に平行方向の最大幅X0が40μmとなるように、ボールボンディングの条件(ボール圧着力7.5gf、超音波印加出力70mA、ボール圧着時間15ms、圧着温度150℃)をボンダー装置にて調節し、チップのアルミニウム電極上にボールボンディングを形成した。得られたボール接合部を、上述の方法でモールドし、ワイヤ長手方向の中心線に平行な面が露出するようにイオンミリング装置(日立ハイテクノロジーズ社製 IM4000)を用いて切断した。切断面を、ワイヤ側の所定箇所から接合面に垂直方向に電解放出形走査型電子顕微鏡/エネルギー分散型X線分光分析(FE−SEM/EDX)によってライン分析した。分析条件は、FE−SEM/EDXの設定として、加速電圧6keV、測定領域φ0.18μm、測定間隔0.02μmである。このライン分析箇所は図1に示すP1、P2と同様である。すなわち、第2ボール圧縮部の、接合面に平行方向の最大幅に対して、両端から8分の1の距離に位置する点を通るようにライン分析を行った。得られたFE−SEM/EDXプロファイルを図5及び図6に示す。図5、6より、アルミニウムが0.5質量%を超え95.0質量%以下の接合面近傍において、アルミニウム、銅及びパラジウムの合計に対して、パラジウムの割合2.0質量%以上のパラジウム濃化接合領域が存在することが分かる。また、パラジウム濃化接合領域の幅(深さ)は2点の平均で約220nmであった。
Claims (13)
- 半導体チップのアルミニウムを含む電極と、ボンディングワイヤと、前記電極及び前記ボンディングワイヤの間のボール接合部とを有するワイヤ接合構造であって、
前記ボンディングワイヤは、銅を主成分とする芯材と、前記芯材上のパラジウム層とを有し、硫黄族元素を含有するパラジウム被覆銅ボンディングワイヤであって、銅とパラジウムと硫黄族元素の合計に対して、パラジウムの濃度が1.0質量%以上4.0質量%以下であり、硫黄族元素濃度が合計で50質量ppm以下であり、硫黄濃度が5質量ppm以上12質量ppm以下であるか、セレン濃度が5質量ppm以上20質量ppm以下であるか又はテルル濃度が15質量ppm以上50質量ppm以下であり、
前記電極と前記ボール接合部との接合面近傍に、パラジウム濃度が、アルミニウムと銅とパラジウムの合計に対して2.0質量%以上となるパラジウム濃化接合領域を有することを特徴とするワイヤ接合構造。 - 前記パラジウム濃化接合領域が、少なくとも、ボール接合のワイヤ長手方向に垂直方向の最大幅の両端から8分の1の距離の位置を通る、ワイヤ長手方向に平行方向のライン上に有する、請求項1に記載のワイヤ接合構造。
- 前記接合面近傍の前記パラジウム濃化接合領域の占有率が25%以上であることを特徴とする請求項1又は2に記載のワイヤ接合構造。
- 銅を主成分とする芯材と、
前記芯材上のパラジウム層とを有し、硫黄族元素を含有するパラジウム被覆銅ボンディングワイヤであって、
前記パラジウム被覆銅ボンディングワイヤの銅とパラジウムと硫黄族元素の合計に対してパラジウムの濃度が1.0質量%以上4.0質量%以下であり、硫黄族元素濃度が合計で50質量ppm以下であり、硫黄濃度が5質量ppm以上12質量ppm以下であるか、セレン濃度が5質量ppm以上20質量ppm以下であるか又はテルル濃度が15質量ppm以上50質量ppm以下であって、
前記パラジウム被覆銅ボンディングワイヤをアルミニウム電極上にボール接合してワイヤ接合構造を作製すると、
前記アルミニウム電極上の前記ボール接合の接合面近傍に、パラジウム濃度が、アルミニウムとパラジウムと銅の合計に対して2.0質量%以上となるパラジウム濃化接合領域が形成されることを特徴とするパラジウム被覆銅ボンディングワイヤ。 - 前記接合面近傍の前記パラジウム濃化接合領域の占有率が25%以上であることを特徴とする請求項4に記載のパラジウム被覆銅ボンディングワイヤ。
- 半導体チップと、
半導体チップ上に設けられた、アルミニウムを含有するアルミニウム電極と、
半導体チップの外部に設けられ、金被覆又は銀被覆を有する外部電極と、
前記アルミニウム電極と前記外部電極表面を接続するボンディングワイヤとを有する半導体装置であって、
前記ボンディングワイヤがパラジウム被覆銅線からなり、
前記アルミニウム電極と前記ボンディングワイヤの接合面近傍に、請求項1乃至5のいずれか1項に記載のワイヤ接合構造を有することを特徴とする半導体装置。 - 半導体チップと、
半導体チップ上に設けられた、アルミニウムを含有するアルミニウム電極と、
半導体チップの外部に設けられ、金被覆又は銀被覆を有する外部電極と、
前記アルミニウム電極と前記外部電極表面を接続するボンディングワイヤとを有する半導体装置であって、
前記ボンディングワイヤが、請求項4又は5に記載のパラジウム被覆銅ボンディングワイヤからなることを特徴とする半導体装置。 - QFP(Quad Flat Packaging)である請求項6又は7に記載の半導体装置。
- BGA(Ball Grid Array)である請求項6又は7に記載の半導体装置。
- QFN(Quad For Non-Lead Packaging)である請求項6又は7に記載の半導体装置。
- 車載用途である請求項6乃至10のいずれか1項に記載の半導体装置。
- 半導体チップと、
半導体チップ上に設けられた、アルミニウムを含有するアルミニウム電極と、
半導体チップの外部に設けられ、金被覆又は銀被覆を有する外部電極と、
前記アルミニウム電極と前記外部電極面を接続するボンディングワイヤとを有する半導体装置の製造方法であって、
前記ボンディングワイヤは、銅を主成分とする芯材と、
前記芯材上のパラジウム層とを有し、硫黄族元素を含有するパラジウム被覆銅ボンディングワイヤであって、
前記パラジウム被覆銅ボンディングワイヤの銅とパラジウムと硫黄族元素の合計に対してパラジウムの濃度が1.0質量%以上4.0質量%以下であり、硫黄族元素濃度が合計で5質量%ppm以上50質量ppm以下であるパラジウム被覆銅ボンディングワイヤからなり、
前記パラジウム被覆銅ボンディングワイヤ先端に、フリーエアーボールを形成し、前記フリーエアーボールを介して前記パラジウム被覆銅ボンディングワイヤを前記アルミニウム電極にボール接合することで、
前記電極上の前記ボール接合の接合面近傍に、パラジウム濃度が、アルミニウムと銅とパラジウムの合計に対して2.0質量%以上となるパラジウム濃化接合領域を有するワイヤ接合構造を形成し、その後、
前記パラジウム被覆銅ボンディングワイヤの前記フリーエアーボールから前記ボンディングワイヤの長さ分離間した箇所を前記外部電極表面に第二接合することを特徴とする半導体装置の製造方法。 - 前記接合面近傍の前記パラジウム濃化接合領域が、前記ボール接合部の平行方向の最大幅に対して、占有率が25%以上であることを特徴とする請求項12に記載の半導体装置の製造方法。
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