JP4771562B1 - Ag−Au−Pd三元合金系ボンディングワイヤ - Google Patents
Ag−Au−Pd三元合金系ボンディングワイヤ Download PDFInfo
- Publication number
- JP4771562B1 JP4771562B1 JP2011027860A JP2011027860A JP4771562B1 JP 4771562 B1 JP4771562 B1 JP 4771562B1 JP 2011027860 A JP2011027860 A JP 2011027860A JP 2011027860 A JP2011027860 A JP 2011027860A JP 4771562 B1 JP4771562 B1 JP 4771562B1
- Authority
- JP
- Japan
- Prior art keywords
- mass
- bonding wire
- wire
- ternary alloy
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910002710 Au-Pd Inorganic materials 0.000 title claims abstract description 37
- 229910002058 ternary alloy Inorganic materials 0.000 title claims abstract description 33
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 38
- 239000010931 gold Substances 0.000 claims abstract description 31
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 229910000510 noble metal Inorganic materials 0.000 claims abstract description 18
- 229910052737 gold Inorganic materials 0.000 claims abstract description 17
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 17
- 229910052709 silver Inorganic materials 0.000 claims abstract description 17
- 239000004332 silver Substances 0.000 claims abstract description 16
- 239000012299 nitrogen atmosphere Substances 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 15
- 230000001590 oxidative effect Effects 0.000 claims description 13
- 238000000137 annealing Methods 0.000 claims description 12
- 239000000654 additive Substances 0.000 claims description 8
- 230000000996 additive effect Effects 0.000 claims description 8
- 239000011575 calcium Substances 0.000 claims description 8
- 229910052791 calcium Inorganic materials 0.000 claims description 5
- 229910052746 lanthanum Inorganic materials 0.000 claims description 5
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical group [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical group [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 2
- 238000005496 tempering Methods 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 abstract description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 16
- 229910045601 alloy Inorganic materials 0.000 abstract description 14
- 239000000956 alloy Substances 0.000 abstract description 14
- 229910000765 intermetallic Inorganic materials 0.000 abstract description 10
- 230000007797 corrosion Effects 0.000 abstract description 4
- 238000005260 corrosion Methods 0.000 abstract description 4
- 238000011156 evaluation Methods 0.000 description 10
- 238000010265 fast atom bombardment Methods 0.000 description 8
- 238000005491 wire drawing Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 229910000838 Al alloy Inorganic materials 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 5
- 229910052790 beryllium Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 229910001020 Au alloy Inorganic materials 0.000 description 3
- 229910001252 Pd alloy Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003353 gold alloy Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910002696 Ag-Au Inorganic materials 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000088 plastic resin Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/06—Alloys based on silver
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/43—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/43—Manufacturing methods
- H01L2224/431—Pre-treatment of the preform connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/43—Manufacturing methods
- H01L2224/438—Post-treatment of the connector
- H01L2224/43848—Thermal treatments, e.g. annealing, controlled cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45139—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/45164—Palladium (Pd) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48507—Material at the bonding interface comprising an intermetallic compound
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48617—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950 °C
- H01L2224/48624—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48799—Principal constituent of the connecting portion of the wire connector being Copper (Cu)
- H01L2224/488—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48817—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950 °C
- H01L2224/48824—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85053—Bonding environment
- H01L2224/85054—Composition of the atmosphere
- H01L2224/85075—Composition of the atmosphere being inert
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0102—Calcium [Ca]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01049—Indium [In]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01058—Cerium [Ce]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01063—Europium [Eu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01327—Intermediate phases, i.e. intermetallics compounds
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
Abstract
【解決手段】純度99.999質量%以上の金:4〜10質量%、純度99.99質量%以上のパラジウム:2〜5質量%、残部が純度99.999質量%以上の銀からなる三元合金系ボンディングワイヤであって、酸化性非貴金属j元素が15〜70質量ppm含有し、連続ダイス伸線前に焼きなまし熱処理がされ、連続ダイス伸線後に調質熱処理がされ、窒素雰囲気中でボールボンディングされる半導体用ボンディングワイヤ。Ag-Au-Pd三元合金ワイヤとアルミニウムパッドの接合界面でAg2Al金属間化合物層とワイヤとの間の腐食がAu2AlとPd濃化層によって抑制される。
【選択図】 図1
Description
また、特開2000‐150562号公報には「Ag:1〜50wt.%、Pd:0.8〜5wt.%、Ti:0.1〜2wt.ppmを含有し、さらに、Ca、Be、Laの内の一種または二種以上:1〜50wt.ppmを含有し、残りがAuおよび不可避不純物からなる組成を有する金合金からなる半導体装置のボンディング用金合金細線」が開示されている。これらのボンディングワイヤは、金線の代替ワイヤとして開発されたもので、高価な金(Au)の使用量を減らしながら大気中で溶融ボールの形成を意図したものである。
また、銀(Ag)の含有量が60%を超えると、ボンディングワイヤ自体の剛性が増して硬くなるため、ボンディングワイヤを成形後に最終焼鈍熱処理をするのが一般的であった。たとえば、特開平3‐74851号公報(後述する「特許文献1」)で「再結晶温度よりも高温で熱処理したAg‐Pd合金、Au‐Ag‐Pd合金等の線」が開示され、特開2010‐171378号公報には、伸線加工により、線径0.050 mm〜0.010 mmとされた、8.00〜30.00重量%の金と、66.00〜90.00重量%の銀と、0.01〜6.00重量%のパラジウムと、を含む金銀パラジウム合金線の表面が洗浄され、乾燥およびアニール処理が行われる合金線の製造方法が開示されている。
また、樹脂封止された半導体装置が高温の過酷な使用環境で高度の信頼性が要求される車載用ICや、動作温度が高くなる高周波用ICや高輝度LEDなどで使用されるようになると、最終焼鈍熱処理をしたAg-Au-Pd三元合金系ボンディングワイヤでは高温特性がはなはだ不十分であった。このようなことから、Ag-Au-Pd三元合金系ボンディングワイヤは実用化されていないのが実情であった。
また、本発明者らは、高純度のAg-Au-Pd三元合金に微量の酸化性非貴金属元素を添加し、Ag-Au-Pd三元合金中に微細に分散させることにより、伸線中の焼鈍熱処理によってもAg-Au-Pd三元合金の結晶粒が粗大化することなく加工ひずみが除かれるだけで、連続ダイス伸線後のボンディングワイヤ内に伸線組織が残るようにしたものである。
本発明のAg-Au-Pd三元合金は、金(Au)が4〜10質量%、パラジウム(Pd)が2〜5質量%および残部が銀(Ag)からなる完全に均一固溶した合金である。
本発明において、銀(Ag)を84質量%以上の残部としたのは、純アルミニウム(Al)パッドやアルミニウム合金パッドと接続する際に、大気中で形成されていた銀(Ag)とアルミニウム(Al)の金属間化合物が窒素雰囲気中ではほとんど形成されないことが判明したからである。
従来のAgワイヤの場合、これらの接合界面に金属間化合物Ag2Alが生成する。
このAg2Alとボールの界面は水分を含む環境下では腐食し、AgとAl2O3が生成する。本願発明のAg-Au-Pd+微量添加元素αの場合、Ag2Alとボールの間にAg2AlとPd濃化層が生成し、Ag2Alの腐食を抑制する働きをする。
図1の模式図に示すように、Agワイヤの場合接合されたボールとアルミニウムパッドの界面でAg2Al金属間化合物が形成され、水分を含む環境下で腐食が進行する同図(B)。
これに対して、本発明のAg-Au-Pd三元合金ワイヤの場合、同図(A)に示すように、同じくボール接合界面ではAg2Al金属間化合物が形成されるが、AuとPdとは相溶性がよく、ボール側にAu2AlとPd濃化層が形成されてAlの腐食を抑制され、シェア強度及びHST信頼性を著しく向上する。
パラジウム(Pd)を2〜5質量%としたのは、5質量%を超えると窒素雰囲気中で形成した溶融ボールが硬くなりすぎるためであり、2質量%未満では銀(Ag)とアルミニウム(Al)の金属間化合物の劣化を抑制する効果が確保できなくなるからである。パラジウム(Pd)は3〜5質量%の範囲が好ましい。
本発明において、酸化性非貴金属添加元素は15〜70質量ppmである。本発明では銀(Ag)の純度は99.99質量%以上であるが、実質的な不可避不純物は20ppm程度である。その不可避不純物も酸化性非貴金属添加元素とともにAg-Au-Pd三元合金中に微細に分散し、ピン止め作用によりAg-Au-Pd三元合金の結晶粒の粗大化を防止してその効果を発揮する。酸化性非貴金属添加元素の主な効果は、ワイヤの機械的特性を向上したり、第一ボンドの圧着ボールの真円性を向上したりすることである。酸化性非貴金属添加元素が最大70質量ppm以下であれば、Ag-Au-Pd三元合金を大気中で焼鈍熱処理しても合金表面に厚い酸化膜を作って合金表面が変色することは無い。酸化性非貴金属元素は20〜60質量ppmが好ましく、より好ましくは20〜50質量ppmである。
酸化性非貴金属添加元素としては、カルシウム(Ca),希土類元素(Y、La、Ce、Eu、Gd、NdおよびSm)、ベリリウム(Be)、マグネシウム(Mg)、スズ(Sn)、インジウム(In)、ビスマス(Bi)がある。好ましくは、カルシウム(Ca)および希土類元素、特にランタン(La)、ベリリウム(Be)がよい。
本発明における焼鈍熱処理は、Ag-Au-Pd三元合金の伸線加工による加工ひずみを除去して加工割れを防ぐためである。酸化性非貴金属元素はAg-Au-Pd三元合金内に微細に分散させておく必要があるため、熱処理においてAg-Au-Pd三元合金の融点(約1000℃)近くまで温度を高くすることはできない。通常は、500℃で2時間、600℃で30分、700℃で10分程度である。焼鈍熱処理後に伸線加工を施すことによってボンディングワイヤに伸線組織が形成される。このため、最終の連続伸線前に焼鈍熱処理をしておくことが好ましい。また、焼鈍熱処理を繰り返すと、ボンディングワイヤの伸線組織が緻密になると考えられるので、2回以上繰り返すのが好ましいが、生産性が悪くなるので、2〜3回が好ましい。
本発明における調質熱処理は、金線の場合と同様に、管状炉において、温度およびスピードを調整の上、引張り破断試験機で伸びが4%となるように調整するための熱処理である。通常は、500℃で2秒程度である。
各々の合金組成に対し、ワイヤボンダーでFABを100個作製し、FABのX(ワイヤと直角方向)とY(ワイヤ方向)の長さを測定し、その差により評価した。それらの評価結果を表1右側欄に示す。
各々の合金組成に対し、評価用のICチップに100本ボンディングしたときの圧着ボールのX方向(超音波印加と直角方向)とY方向(超音波印加と方向)の長さを測定し、その比のばらつきを評価した。それらの評価結果を表1右側欄に示す。
各々の合金組成に対し、専用のICチップにワイヤボンダーでボンディングを行い、100点について、Dage社製の製品名「万能ボンドテスター(BT)(型式4000)」を用い、1st圧着ボールのshear強度評価を行った。それらの評価結果を表1右側欄に示す。
各々の合金組成に対し、専用のICチップ(200pin)にワイヤボンダーでボンディングを行い、専用のプラスチック樹脂で封止し、電気抵抗測定用サンプルを作製した。そのサンプルを高度加速寿命試験(HAST)装置内に温度130℃、湿度85%、圧力2.2気圧の条件で192時間放置後、電気抵抗を測定した。電気抵抗は、KEITHLEY社製の製品名「ソースメーター(型式2004)」を用い、専用のICソケットおよび専用に構築した自動測定システムで行った。測定方法は、いわゆる直流四端子法で測定している。測定用プローブから隣接する外部リード間(ICチップ上のパッドが短絡した対を選択)に一定電流を流し、プローブ間の電圧が測定される。
電気抵抗は外部リード100対(200ピン)について、HAST装置放置前と放置後に電気抵抗測定を行い電気抵抗の上昇率を評価した。それらの評価結果を表1右側欄に示す。
表1右側欄中、真円性のばらつきは標準偏差の値を示し、◎は0.8未満、○は0.8以上1.0未満、△は1.0以上1.5未満、×は1.5以上を、それぞれ示す。
表1右側欄中、1stボールシェアは、シェア荷重値を示し、◎は15gf以上、○は12gf以上、△は10gf以上、10gf未満もしくはボール剥がれ発生の場合は×を、それぞれ示す。
表1右側欄中、HAST信頼性は、HAST装置放置前の電気抵抗値に対する放置後の電気抵抗の上昇率を示し、◎は20%以下、○は50%以下、×は50%超を、それぞれ示す。
IC)、あるいは、車載用や高輝度LED用の半導体の用途がある。
Claims (7)
- 純度99.99質量%以上の銀(Ag)と純度99.999質量%以上の金(Au)と純度99.99質量%以上のパラジウム(Pd)とからなる三元合金系ボンディングワイヤであって、金(Au)が4〜10質量%、パラジウム(Pd)が2〜5質量%、酸化性非貴金属添加元素が15〜70質量ppmおよび残部が銀(Ag)からなり、当該ボンディングワイヤは連続ダイス伸線前に焼きなまし熱処理がされ、連続ダイス伸線後に調質熱処理がされ、窒素雰囲気中でボールボンディングされることを特徴とする半導体素子用Ag-Au-Pd三元合金系ボンディングワイヤ。
- 上記金(Au)が6〜9質量%およびパラジウム(Pd)が3〜5質量%であることを特徴とする請求項1に記載の半導体素子用Ag-Au-Pd三元合金系ボンディングワイヤ。
- 上記酸化性非貴金属添加元素がカルシウム(Ca)であることを特徴とする請求項1に記載の半導体素子用Ag-Au-Pd三元合金系ボンディングワイヤ。
- 上記酸化性非貴金属添加元素が希土類元素であることを特徴とする請求項1に記載の半導体素子用Ag-Au-Pd三元合金系ボンディングワイヤ。
- 上記酸化性非貴金属添加元素がランタン(La)であることを特徴とする請求項1に記載の半導体素子用Ag-Au-Pd三元合金系ボンディングワイヤ。
- 上記焼きなまし熱処理が2回以上繰り返されることを特徴とする請求項1に記載の半導体素子用Ag-Au-Pd三元合金系ボンディングワイヤ。
- 上記焼きなまし熱処理の温度が上記調質熱処理の温度よりも高いことを特徴とする請求項1に記載の半導体素子用Ag-Au-Pd三元合金系ボンディングワイヤ。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011027860A JP4771562B1 (ja) | 2011-02-10 | 2011-02-10 | Ag−Au−Pd三元合金系ボンディングワイヤ |
TW100129493A TWI428455B (zh) | 2011-02-10 | 2011-08-18 | 銀金鈀三元合金系接合線 |
PCT/JP2011/075160 WO2012108082A1 (ja) | 2011-02-10 | 2011-11-01 | Ag-Au-Pd三元合金系ボンディングワイヤ |
SG2012027959A SG185347A1 (en) | 2011-02-10 | 2011-11-01 | Ag-au-pd ternary alloy bonding wire |
CN201180049000.5A CN103155130B (zh) | 2011-02-10 | 2011-11-01 | Ag-Au-Pd三元合金接合线 |
KR1020127008168A KR101583865B1 (ko) | 2011-02-10 | 2011-11-01 | Ag-Au-Pd를 기본으로 하는 합금계 본딩 와이어 |
MYPI2012004371 MY152025A (en) | 2011-02-10 | 2011-11-01 | Ag-au-pd ternary alloy bonding wire |
US13/496,327 US9103001B2 (en) | 2011-02-10 | 2011-11-01 | Ag—Au—Pd ternary alloy bonding wire |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011027860A JP4771562B1 (ja) | 2011-02-10 | 2011-02-10 | Ag−Au−Pd三元合金系ボンディングワイヤ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4771562B1 true JP4771562B1 (ja) | 2011-09-14 |
JP2012169374A JP2012169374A (ja) | 2012-09-06 |
Family
ID=44693633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011027860A Active JP4771562B1 (ja) | 2011-02-10 | 2011-02-10 | Ag−Au−Pd三元合金系ボンディングワイヤ |
Country Status (8)
Country | Link |
---|---|
US (1) | US9103001B2 (ja) |
JP (1) | JP4771562B1 (ja) |
KR (1) | KR101583865B1 (ja) |
CN (1) | CN103155130B (ja) |
MY (1) | MY152025A (ja) |
SG (1) | SG185347A1 (ja) |
TW (1) | TWI428455B (ja) |
WO (1) | WO2012108082A1 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013021280A (ja) * | 2011-07-11 | 2013-01-31 | Profound Material Technology Co Ltd | 複合銀ワイヤ |
JP2013135042A (ja) * | 2011-12-26 | 2013-07-08 | Tatsuta Electric Wire & Cable Co Ltd | ボールボンディング用ワイヤ |
KR101328863B1 (ko) * | 2012-01-02 | 2013-11-13 | 와이어 테크놀로지 씨오. 엘티디. | 합금 와이어 및 그 제조 방법 |
JP2014053610A (ja) * | 2012-09-04 | 2014-03-20 | Heraeus Materials Technology Gmbh & Co Kg | ボンディング適用のための銀合金ワイヤ |
JP2014116387A (ja) * | 2012-12-07 | 2014-06-26 | Tanaka Electronics Ind Co Ltd | 白色発光ダイオード用ボンディングワイヤ |
KR20150139980A (ko) | 2014-03-31 | 2015-12-14 | 닛데쓰스미킹 마이크로 메탈 가부시키가이샤 | 반도체 장치용 본딩 와이어 및 그 제조 방법 |
KR20150140405A (ko) | 2014-03-31 | 2015-12-15 | 닛데쓰스미킹 마이크로 메탈 가부시키가이샤 | 반도체 장치용 본딩 와이어 및 그 제조 방법 |
KR101588522B1 (ko) | 2013-05-15 | 2016-01-25 | 타나카 덴시 코오교오 카부시키가이샤 | 내식성 알루미늄 합금 본딩 와이어 |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5165810B1 (ja) * | 2012-09-12 | 2013-03-21 | 田中電子工業株式会社 | 銀金パラジウム系合金バンプワイヤ |
CN102912176B (zh) * | 2012-09-21 | 2014-12-17 | 宁波康强电子股份有限公司 | 高端封装银合金键合丝及其制备方法 |
TWI395313B (zh) * | 2012-11-07 | 2013-05-01 | Wire technology co ltd | 銲球凸塊結構及其形成方法 |
JP2014107418A (ja) * | 2012-11-28 | 2014-06-09 | Sanken Electric Co Ltd | 半導体装置及びその製造方法 |
KR101513493B1 (ko) * | 2013-02-19 | 2015-04-20 | 엠케이전자 주식회사 | 은 합금 본딩 와이어 |
TWI536397B (zh) * | 2013-02-21 | 2016-06-01 | Silver alloy soldered wire for semiconductor packages | |
JP5529992B1 (ja) * | 2013-03-14 | 2014-06-25 | タツタ電線株式会社 | ボンディング用ワイヤ |
JP5399581B1 (ja) * | 2013-05-14 | 2014-01-29 | 田中電子工業株式会社 | 高速信号用ボンディングワイヤ |
CN105308731B (zh) * | 2013-06-20 | 2019-04-30 | 住友电木株式会社 | 半导体装置 |
JP6132716B2 (ja) | 2013-09-10 | 2017-05-24 | 株式会社東芝 | 金属粒子ペースト、これを用いた硬化物、および半導体装置 |
KR101582449B1 (ko) | 2013-09-12 | 2016-01-05 | 엠케이전자 주식회사 | 은 합금 본딩 와이어 및 이를 이용한 반도체 장치 |
CN103779309A (zh) * | 2014-01-20 | 2014-05-07 | 江西蓝微电子科技有限公司 | 镀金金银钯合金单晶键合丝及其制造方法 |
CN103996668A (zh) * | 2014-05-30 | 2014-08-20 | 江西蓝微电子科技有限公司 | 银镧钙合金键合丝及其制造方法 |
TWI545207B (zh) * | 2014-07-10 | 2016-08-11 | Nippon Steel & Sumikin Mat Co | A bonding wire for a semiconductor device |
JP6354467B2 (ja) * | 2014-09-01 | 2018-07-11 | 株式会社デンソー | 半導体装置 |
KR20160030777A (ko) * | 2014-09-11 | 2016-03-21 | 엠케이전자 주식회사 | 은 합금 본딩 와이어 및 그의 제조 방법 |
CN104372197A (zh) * | 2014-09-26 | 2015-02-25 | 四川威纳尔特种电子材料有限公司 | 半导体封装用银合金线及其制备方法 |
JP5669335B1 (ja) * | 2014-09-26 | 2015-02-12 | 田中電子工業株式会社 | 銀金合金ボンディングワイヤ |
TWI565841B (zh) * | 2015-09-01 | 2017-01-11 | 光大應用材料科技股份有限公司 | 多鍍層銀線及其製法 |
SG10201508104TA (en) * | 2015-09-29 | 2017-04-27 | Heraeus Materials Singapore Pte Ltd | Alloyed silver wire |
JP6207793B1 (ja) | 2016-04-28 | 2017-10-04 | 日鉄住金マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
WO2017187653A1 (ja) | 2016-04-28 | 2017-11-02 | 日鉄住金マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
WO2017221434A1 (ja) * | 2016-06-20 | 2017-12-28 | 日鉄住金マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
US10658326B2 (en) * | 2016-07-20 | 2020-05-19 | Samsung Electronics Co., Ltd. | Bonding wire having a silver alloy core, wire bonding method using the bonding wire, and electrical connection part of semiconductor device using the bonding wire |
JP7269361B2 (ja) * | 2019-10-01 | 2023-05-08 | 田中電子工業株式会社 | ワイヤ接合構造とそれに用いられるボンディングワイヤ及び半導体装置 |
KR102353676B1 (ko) * | 2019-11-22 | 2022-01-19 | 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 | 반도체 장치용 Ag 합금 본딩 와이어 |
WO2021205931A1 (ja) | 2020-04-07 | 2021-10-14 | 日鉄マイクロメタル株式会社 | 半導体装置用Ag合金ボンディングワイヤ及び半導体装置 |
KR20230069202A (ko) | 2020-10-20 | 2023-05-18 | 닛데쓰마이크로메탈가부시키가이샤 | 반도체 장치용 Ag 합금 본딩 와이어 |
CN112342426A (zh) * | 2020-11-10 | 2021-02-09 | 汕头市骏码凯撒有限公司 | 新型银合金键合丝及其制造方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55158642A (en) * | 1979-05-30 | 1980-12-10 | Noge Denki Kogyo:Kk | Bonding alloy wire for assembling semiconductor device |
JPS6427237A (en) * | 1987-04-28 | 1989-01-30 | Kobe Steel Ltd | Complex bonding wire |
JPS6455834A (en) * | 1987-08-26 | 1989-03-02 | Kobe Steel Ltd | Manufacture of composite bonding wire |
JPH01110741A (ja) * | 1987-07-10 | 1989-04-27 | Kobe Steel Ltd | 複合ボンディングワイヤ |
JPH01162343A (ja) * | 1987-12-18 | 1989-06-26 | Kobe Steel Ltd | ボンディングワイヤ |
JPH0279439A (ja) * | 1988-09-14 | 1990-03-20 | Kobe Steel Ltd | ボンディングワイヤのボールボンディング方法 |
JPH11288962A (ja) * | 1998-04-01 | 1999-10-19 | Sumitomo Metal Mining Co Ltd | ボンディングワイヤ |
JP2009033127A (ja) * | 2007-06-28 | 2009-02-12 | Nippon Steel Materials Co Ltd | 半導体実装用ボンディングワイヤ |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60177639A (ja) * | 1984-02-23 | 1985-09-11 | Nec Corp | 半導体装置の製造方法 |
JPH0374851A (ja) | 1989-08-16 | 1991-03-29 | Tanaka Kikinzoku Kogyo Kk | 半導体素子用ボールボンディング線 |
JPH03174851A (ja) | 1989-09-29 | 1991-07-30 | Matsushita Electric Ind Co Ltd | ディジタル被変調信号復号装置 |
JP3527356B2 (ja) | 1996-04-04 | 2004-05-17 | 新日本製鐵株式会社 | 半導体装置 |
JP3650461B2 (ja) | 1996-04-04 | 2005-05-18 | 新日本製鐵株式会社 | 半導体素子用金合金細線 |
JPH10303238A (ja) | 1997-04-25 | 1998-11-13 | Tanaka Denshi Kogyo Kk | 半導体素子ボンディング用金合金線 |
JP3612180B2 (ja) * | 1997-08-20 | 2005-01-19 | 新日本製鐵株式会社 | 半導体素子用金銀合金細線 |
JP3329286B2 (ja) | 1998-11-09 | 2002-09-30 | 三菱マテリアル株式会社 | 半導体装置のボンディング用金合金細線 |
EP1811555A4 (en) * | 2004-09-30 | 2012-06-20 | Tanaka Electronics Ind | AU-ALLOY BOND WIRE |
JP4596467B2 (ja) * | 2005-06-14 | 2010-12-08 | 田中電子工業株式会社 | 高い接合信頼性、圧着ボールの高い真円性、高い直進性および高い耐樹脂流れ性を有するボンディングワイヤ用金合金線 |
JP2008251635A (ja) * | 2007-03-29 | 2008-10-16 | Tanaka Electronics Ind Co Ltd | 高い接合信頼性および圧着ボールの高い真円性を有し、さらにAlパッドとその下部が損傷しにくくかつ一層高い耐樹脂流れ性を有するボンディングワイヤ用金合金線 |
TW201028227A (en) | 2009-01-23 | 2010-08-01 | jun-de Li | Method for manufacturing composite metal wire and product thereof |
US8101123B2 (en) * | 2009-03-23 | 2012-01-24 | Lee Jun-Der | Composite alloy bonding wire and manufacturing method thereof |
-
2011
- 2011-02-10 JP JP2011027860A patent/JP4771562B1/ja active Active
- 2011-08-18 TW TW100129493A patent/TWI428455B/zh active
- 2011-11-01 US US13/496,327 patent/US9103001B2/en not_active Expired - Fee Related
- 2011-11-01 KR KR1020127008168A patent/KR101583865B1/ko active IP Right Grant
- 2011-11-01 CN CN201180049000.5A patent/CN103155130B/zh active Active
- 2011-11-01 SG SG2012027959A patent/SG185347A1/en unknown
- 2011-11-01 WO PCT/JP2011/075160 patent/WO2012108082A1/ja active Application Filing
- 2011-11-01 MY MYPI2012004371 patent/MY152025A/en unknown
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55158642A (en) * | 1979-05-30 | 1980-12-10 | Noge Denki Kogyo:Kk | Bonding alloy wire for assembling semiconductor device |
JPS6427237A (en) * | 1987-04-28 | 1989-01-30 | Kobe Steel Ltd | Complex bonding wire |
JPH01110741A (ja) * | 1987-07-10 | 1989-04-27 | Kobe Steel Ltd | 複合ボンディングワイヤ |
JPS6455834A (en) * | 1987-08-26 | 1989-03-02 | Kobe Steel Ltd | Manufacture of composite bonding wire |
JPH01162343A (ja) * | 1987-12-18 | 1989-06-26 | Kobe Steel Ltd | ボンディングワイヤ |
JPH0279439A (ja) * | 1988-09-14 | 1990-03-20 | Kobe Steel Ltd | ボンディングワイヤのボールボンディング方法 |
JPH11288962A (ja) * | 1998-04-01 | 1999-10-19 | Sumitomo Metal Mining Co Ltd | ボンディングワイヤ |
JP2009033127A (ja) * | 2007-06-28 | 2009-02-12 | Nippon Steel Materials Co Ltd | 半導体実装用ボンディングワイヤ |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013021280A (ja) * | 2011-07-11 | 2013-01-31 | Profound Material Technology Co Ltd | 複合銀ワイヤ |
JP2013135042A (ja) * | 2011-12-26 | 2013-07-08 | Tatsuta Electric Wire & Cable Co Ltd | ボールボンディング用ワイヤ |
KR101328863B1 (ko) * | 2012-01-02 | 2013-11-13 | 와이어 테크놀로지 씨오. 엘티디. | 합금 와이어 및 그 제조 방법 |
JP2014053610A (ja) * | 2012-09-04 | 2014-03-20 | Heraeus Materials Technology Gmbh & Co Kg | ボンディング適用のための銀合金ワイヤ |
KR101873952B1 (ko) * | 2012-09-04 | 2018-07-03 | 헤레우스 도이칠란트 게엠베하 운트 코. 카게 | 본딩 어플리케이션용 은 합금 와이어 |
JP2014116387A (ja) * | 2012-12-07 | 2014-06-26 | Tanaka Electronics Ind Co Ltd | 白色発光ダイオード用ボンディングワイヤ |
KR101588522B1 (ko) | 2013-05-15 | 2016-01-25 | 타나카 덴시 코오교오 카부시키가이샤 | 내식성 알루미늄 합금 본딩 와이어 |
KR20150139980A (ko) | 2014-03-31 | 2015-12-14 | 닛데쓰스미킹 마이크로 메탈 가부시키가이샤 | 반도체 장치용 본딩 와이어 및 그 제조 방법 |
KR20150140405A (ko) | 2014-03-31 | 2015-12-15 | 닛데쓰스미킹 마이크로 메탈 가부시키가이샤 | 반도체 장치용 본딩 와이어 및 그 제조 방법 |
US9536854B2 (en) | 2014-03-31 | 2017-01-03 | Nippon Micrometal Corporation | Bonding wire for semiconductor device use and method of production of same |
US9543266B2 (en) | 2014-03-31 | 2017-01-10 | Nippon Micrometal Corporation | Bonding wire for semiconductor device use and method of production of same |
Also Published As
Publication number | Publication date |
---|---|
TWI428455B (zh) | 2014-03-01 |
KR101583865B1 (ko) | 2016-01-08 |
WO2012108082A1 (ja) | 2012-08-16 |
US9103001B2 (en) | 2015-08-11 |
US20120263624A1 (en) | 2012-10-18 |
CN103155130A (zh) | 2013-06-12 |
TW201233817A (en) | 2012-08-16 |
CN103155130B (zh) | 2016-03-09 |
MY152025A (en) | 2014-08-15 |
SG185347A1 (en) | 2012-12-28 |
KR20130141337A (ko) | 2013-12-26 |
JP2012169374A (ja) | 2012-09-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4771562B1 (ja) | Ag−Au−Pd三元合金系ボンディングワイヤ | |
WO2012169067A1 (ja) | 高強度、高伸び率金合金ボンディングワイヤ | |
JPWO2006035803A1 (ja) | Au合金ボンディング・ワイヤ | |
KR101536554B1 (ko) | 본딩용 와이어 | |
JP4596467B2 (ja) | 高い接合信頼性、圧着ボールの高い真円性、高い直進性および高い耐樹脂流れ性を有するボンディングワイヤ用金合金線 | |
JP4130843B1 (ja) | 高信頼性金合金ボンディングワイヤ及び半導体装置 | |
TWI448568B (zh) | Gold (Au) alloy bonding wire | |
JP4726206B2 (ja) | 高い初期接合性、高い接合信頼性、圧着ボールの高い真円性、高い直進性、高い耐樹脂流れ性および低い比抵抗を有するボンディングワイヤ用金合金線 | |
JP3673368B2 (ja) | 半導体素子用金銀合金細線 | |
TWI407515B (zh) | Wire with gold alloy wire | |
JPH1145899A (ja) | ボンディングワイヤ | |
JP3650461B2 (ja) | 半導体素子用金合金細線 | |
JP3612179B2 (ja) | 半導体素子用金銀合金細線 | |
JP6103806B2 (ja) | ボールボンディング用ワイヤ | |
JP3612180B2 (ja) | 半導体素子用金銀合金細線 | |
TW201936931A (zh) | 接合線 | |
JP5080682B1 (ja) | 金−白金−パラジウム合金ボンディングワイヤ | |
JP2011155129A (ja) | 高温半導体装置用金合金ボンディングワイヤ | |
JP4947670B2 (ja) | 半導体素子用ボンディングワイヤの熱処理方法 | |
JP3426473B2 (ja) | 半導体素子用金合金細線 | |
JP3744131B2 (ja) | ボンディングワイヤ | |
JPH104114A (ja) | ボンディングワイヤ | |
JP5240890B2 (ja) | 高い初期接合性、高い接合信頼性、圧着ボールの高い真円性、高いループ制御性および低い比抵抗を有するボンディングワイヤ用金合金線 | |
JP2006100720A (ja) | Au合金ボンディング・ワイヤ | |
JP2008251634A (ja) | 高い接合信頼性および圧着ボールの高い真円性を有し、さらにAlパッドとその下部が損傷しにくくかつ一層高い耐樹脂流れ性を有するボンディングワイヤ用金合金線 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110620 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110620 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140701 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4771562 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140701 Year of fee payment: 3 |
|
R154 | Certificate of patent or utility model (reissue) |
Free format text: JAPANESE INTERMEDIATE CODE: R154 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |