JP5669335B1 - 銀金合金ボンディングワイヤ - Google Patents
銀金合金ボンディングワイヤ Download PDFInfo
- Publication number
- JP5669335B1 JP5669335B1 JP2014196419A JP2014196419A JP5669335B1 JP 5669335 B1 JP5669335 B1 JP 5669335B1 JP 2014196419 A JP2014196419 A JP 2014196419A JP 2014196419 A JP2014196419 A JP 2014196419A JP 5669335 B1 JP5669335 B1 JP 5669335B1
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- Prior art keywords
- silver
- bonding wire
- gold
- gold alloy
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910001020 Au alloy Inorganic materials 0.000 title claims abstract description 93
- 239000003353 gold alloy Substances 0.000 title claims abstract description 93
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 title claims abstract description 77
- 239000011575 calcium Substances 0.000 claims abstract description 72
- 239000010931 gold Substances 0.000 claims abstract description 71
- 239000010410 layer Substances 0.000 claims abstract description 44
- 229910052737 gold Inorganic materials 0.000 claims abstract description 39
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 36
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims abstract description 35
- 229910052709 silver Inorganic materials 0.000 claims abstract description 33
- 239000004332 silver Substances 0.000 claims abstract description 32
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 31
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 21
- 239000001301 oxygen Substances 0.000 claims abstract description 21
- 239000002344 surface layer Substances 0.000 claims abstract description 20
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 10
- 239000000956 alloy Substances 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 239000000203 mixture Substances 0.000 abstract description 9
- 239000002184 metal Substances 0.000 abstract description 8
- 230000035939 shock Effects 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 description 13
- 229910001316 Ag alloy Inorganic materials 0.000 description 9
- 239000012298 atmosphere Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 239000011159 matrix material Substances 0.000 description 8
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229910052717 sulfur Inorganic materials 0.000 description 6
- 239000011593 sulfur Substances 0.000 description 6
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 5
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 5
- 239000000292 calcium oxide Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005266 casting Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000005496 tempering Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005486 sulfidation Methods 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000009749 continuous casting Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- QUCZBHXJAUTYHE-UHFFFAOYSA-N gold Chemical compound [Au].[Au] QUCZBHXJAUTYHE-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
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Abstract
Description
銀金合金ボンディングワイヤの原材料として、純度が99.999質量%以上という高純度の銀(Ag)および金(Au)を用意した。表1左欄に示すように、予め組成を調整してから不活性雰囲気中で溶解し、その溶湯をそのまま連続鋳造し、直径10mmの銀金合金粗線を得た。
表1に左欄に示す組成のボンディングワイヤをスプール(直径50mm)に巻き取り、スプールを毎分9回転の回転速度で15分間回転させつつ30cmの高さからボンディングワイヤを垂らしてボンディングワイヤを巻きほどき、ボンディングワイヤが繰り出される位置によってボンディングワイヤの巻ほどき性を評価した。すなわち、スプールからボンディングワイヤ(1)が繰り出される位置(2)が、図2のようにAの領域であれば良好(○)、図3のようにB領域以下D領域までの領域であれば不良(×)と評価した。各評価水準についてはN数5の評価を行った。
20本の足を有する銀(Ag)メッキされたFe−Ni合金製リードフレームに模擬半導体のAlパッドを搭載し、株式会社新川製の汎用ボンディング装置(モデル:UTC−1000型)を用いて表1左欄の合金組成のボンディングワイヤについてFABボンディングを行った。40μmの溶融ボールにより圧着径50μmになるように第一ボールボンディングを行い、所定のループを描いて基板温度150℃、超音波出力0.25W、10ミリ秒で超音波接合の第二接合を行った。次いで、模擬半導体チップとリードフレームを市販されているLED用シリコーン樹脂で充填した。この樹脂モールドした状態で150℃/−55℃の熱サイクル試験を1000サイクル行った後に、モールド樹脂を開封し、第二接合のはがれを観察した。表1右欄で得られたはがれ率は、N数=200個で、◎は0%、○は1%以下、△は1%以上3%未満をそれぞれ示す。
表1左欄に、実施例と金(Au)およびカルシウム(Ca)の成分組成が外れる比較例の各組成を示す。比較例の銀金合金極細線は、実施例と同様にして、線径が15μmのところで最終熱処理をして伸び率を4%に調整し、実施例1と同様にして評価した。その結果を表1右欄に示す。比較例1および比較例2の破断した部分は、ボールネック部およびボールネック部と再結晶していない部分の境界付近で観察されたが、第二接合の接合箇所も破断する可能性が高かった。
2 ワイヤが繰り出される位置
Claims (5)
- 銀金合金からなるボンディングワイヤにおいて、質量百分率で、金(Au)を10%以上30%以下含み、カルシウム(Ca)を30ppm以上90ppm以下含み、残部が、上記元素以外の金属元素の純度が99.99%以上の銀(Ag)からなる合金であって、当該合金の表層に酸素とカルシウム(Ca)の濃化層が形成され、かつ、当該表層直下の層に金濃化層が形成されていることを特徴とする銀金合金ボンディングワイヤ。
- 上記金(Au)の質量百分率が15%以上25%以下であることを特徴とする請求項1に記載の銀金合金ボンディングワイヤ。
- 上記表層直上の層にカーボン層が存在することを特徴とする請求項1に記載の銀金合金ボンディングワイヤ。
- 上記金濃化層の金(Au)含有量が上記表層の金(Au)含有量よりも10%以上多いことを特徴とする請求項1に記載の銀金合金ボンディングワイヤ。
- 上記表層が10nm未満であることを特徴とする請求項1に記載の銀金合金ボンディングワイヤ。
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JP2014196419A JP5669335B1 (ja) | 2014-09-26 | 2014-09-26 | 銀金合金ボンディングワイヤ |
SG10201500653UA SG10201500653UA (en) | 2014-09-26 | 2015-01-27 | Silver-gold alloy bonding wire |
KR1020150014166A KR101912983B1 (ko) | 2014-09-26 | 2015-01-29 | 은금 합금 본딩 와이어 |
TW104103689A TWI527913B (zh) | 2014-09-26 | 2015-02-04 | Silver alloy alloy bonding line |
US14/619,736 US9362249B2 (en) | 2014-09-26 | 2015-02-11 | Silver—gold alloy bonding wire |
CN201510193619.3A CN106158675B (zh) | 2014-09-26 | 2015-04-22 | 银金合金接合线 |
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JP2006032934A (ja) * | 2004-06-16 | 2006-02-02 | Nippon Steel Corp | 金属材料及びその製造方法 |
JP2009033127A (ja) * | 2007-06-28 | 2009-02-12 | Nippon Steel Materials Co Ltd | 半導体実装用ボンディングワイヤ |
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JPH11288962A (ja) | 1998-04-01 | 1999-10-19 | Sumitomo Metal Mining Co Ltd | ボンディングワイヤ |
KR101019811B1 (ko) * | 2005-01-05 | 2011-03-04 | 신닛테츠 마테리알즈 가부시키가이샤 | 반도체 장치용 본딩 와이어 |
JP4771562B1 (ja) * | 2011-02-10 | 2011-09-14 | 田中電子工業株式会社 | Ag−Au−Pd三元合金系ボンディングワイヤ |
DE102012200273A1 (de) * | 2012-01-11 | 2013-07-11 | Robert Bosch Gmbh | Elektronisches Bauteil mit korrosionsgeschützter Bondverbindung und Verfahren zur Herstellung des Bauteils |
CN102912176B (zh) | 2012-09-21 | 2014-12-17 | 宁波康强电子股份有限公司 | 高端封装银合金键合丝及其制备方法 |
JP5507730B1 (ja) * | 2013-04-02 | 2014-05-28 | 田中電子工業株式会社 | ボールボンディング用貴金属希薄銀合金ワイヤ |
CN103194637B (zh) * | 2013-04-27 | 2015-05-13 | 烟台招金励福贵金属股份有限公司 | 一种键合合金银丝及制备方法 |
JP5399581B1 (ja) * | 2013-05-14 | 2014-01-29 | 田中電子工業株式会社 | 高速信号用ボンディングワイヤ |
CN103789568B (zh) * | 2014-02-18 | 2018-02-23 | 浙江佳博科技股份有限公司 | 一种合金键合丝及其制备方法及应用 |
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TWI527913B (zh) | 2016-04-01 |
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