SG10201508636RA - Methods of fault detection for multiplexed heater array - Google Patents

Methods of fault detection for multiplexed heater array

Info

Publication number
SG10201508636RA
SG10201508636RA SG10201508636RA SG10201508636RA SG10201508636RA SG 10201508636R A SG10201508636R A SG 10201508636RA SG 10201508636R A SG10201508636R A SG 10201508636RA SG 10201508636R A SG10201508636R A SG 10201508636RA SG 10201508636R A SG10201508636R A SG 10201508636RA
Authority
SG
Singapore
Prior art keywords
methods
fault detection
heater array
multiplexed heater
multiplexed
Prior art date
Application number
SG10201508636RA
Other languages
English (en)
Inventor
Harmeet Singh
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of SG10201508636RA publication Critical patent/SG10201508636RA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications
    • H05B1/0233—Industrial applications for semiconductors manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Control Of Resistance Heating (AREA)
  • Plasma & Fusion (AREA)
  • Surface Heating Bodies (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
SG10201508636RA 2010-10-22 2011-09-28 Methods of fault detection for multiplexed heater array SG10201508636RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/910,347 US8791392B2 (en) 2010-10-22 2010-10-22 Methods of fault detection for multiplexed heater array

Publications (1)

Publication Number Publication Date
SG10201508636RA true SG10201508636RA (en) 2015-11-27

Family

ID=45972080

Family Applications (2)

Application Number Title Priority Date Filing Date
SG2013024385A SG189218A1 (en) 2010-10-22 2011-09-28 Methods of fault detection for multiplexed heater array
SG10201508636RA SG10201508636RA (en) 2010-10-22 2011-09-28 Methods of fault detection for multiplexed heater array

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG2013024385A SG189218A1 (en) 2010-10-22 2011-09-28 Methods of fault detection for multiplexed heater array

Country Status (7)

Country Link
US (2) US8791392B2 (ja)
JP (2) JP5925789B2 (ja)
KR (2) KR101697054B1 (ja)
CN (2) CN103168345B (ja)
SG (2) SG189218A1 (ja)
TW (1) TWI541517B (ja)
WO (1) WO2012054198A2 (ja)

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TW201229528A (en) 2012-07-16
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US8791392B2 (en) 2014-07-29
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US20140263274A1 (en) 2014-09-18
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US10568163B2 (en) 2020-02-18

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