KR960015613A - 전사도체의 제조방법 및 적층용 그린시트의 제조방법 - Google Patents

전사도체의 제조방법 및 적층용 그린시트의 제조방법 Download PDF

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Publication number
KR960015613A
KR960015613A KR1019950033634A KR19950033634A KR960015613A KR 960015613 A KR960015613 A KR 960015613A KR 1019950033634 A KR1019950033634 A KR 1019950033634A KR 19950033634 A KR19950033634 A KR 19950033634A KR 960015613 A KR960015613 A KR 960015613A
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South Korea
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transfer
conductor
forming
resist film
manufacturing
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KR1019950033634A
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KR100276052B1 (ko
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에이이치 우리우
오사무 마키노
히로노부 치바
치사 요코타
Original Assignee
모리시타 요이찌
마쯔시다덴기산교 가부시기가이샤
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Publication of KR960015613A publication Critical patent/KR960015613A/ko
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/04Fixed inductances of the signal type  with magnetic core
    • H01F17/06Fixed inductances of the signal type  with magnetic core with core substantially closed in itself, e.g. toroid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041Printed circuit coils
    • H01F41/042Printed circuit coils by thin film techniques
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/205Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0104Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/0117Pattern shaped electrode used for patterning, e.g. plating or etching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0726Electroforming, i.e. electroplating on a metallic carrier thereby forming a self-supporting structure
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4629Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

본 발명은, 적층칩인덕터등의 칩형전자부품을 형성하기 위한 전사도체의 제조방법 및 적층용그린시트의 제조방법에 관한 것으로서, 각종 적층형세라믹전자부품형성용의 그린시트위에, 전주법에 의해 형성한 미세패턴 이나 고밀도배선회로를 간단히 전사하는 것을 목적으로 한 것이며, 그 구성에 있어서, 베이스스테인레스판(1) 위에 형성되는 소망의 전사용도체(4)의 역패턴의 내약품성에 뛰어난 레지스트막(3)이 형성된 전주도체전사용형을 사용해서 전사용도체(4)를 전주법에 의해 형성하고, 또한 상기 레지스트막(3)을 박리하는 일없이 전사용도체(4)를 피진사체에 전사하고, 이 레지스트막(3)을 반복하여 재이용하여, 전사용도체(4)전주, 전사하는 것을 특징으로 한 것이다.

Description

전사도체의 제조방법 및 적층용 그린시트의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1의 실시예에 있어서의 전사용도체의 형성방법을 표시한 설명용 단면도,
제2도는 동 실시예에 있어서의 적층형 세라믹칩인덕터의 구조를 표시한 분해사시도,
제3도는 동 실시예에 있어서의 적층형 세라믹칩인덕터의 사시도.

Claims (6)

  1. 베이스금속판에, 소망의 도체패턴의 역패턴을 가지는 동시에 적어도 내산성 또는 내알칼리성을 가진 레지스트막을 형성하므로써 전주(電鑄)도체전사용형을 형성하는 제1공정과, 이 전주도체전사용형의 상기 레지스트를 형성하고 있지 않는 부분에, 전사용도체를 전주법(電鑄法)에 의해 형성하는 제2공정과, 상기 레지스트막을 박리하는 일없이 상기 전사용도체를 피전사체에 전사하는 제3의 공정을 가진 것을 특징으로 하는 전사도체의 제조방법.
  2. 제1항에 있어서, 베이스금속판위의 레지스트막을 형성하고 있지 않는 부분에, 도전성이형층을 형성하는 것을 특징으로 하는 전사도체의 제조방법.
  3. 제1항에 있어서, 레지스트막은 이형성을 가진 것 또는 이형성을 부여한 것의 어느 하나인 것을 특징으로 하는 전사도체의 제조방법.
  4. 베이스금속판에, 소망의 도체패턴의 역패턴을 가지는 동시에 적어도 내산성 또는 내알칼리성을 가진 레지스트막을 형성하므로써 전주(電鑄)도체전사용형을 형성하는 제1공정과, 이 전주도체전사용형의 상기 레지스트를 형성하고 있지 않는 부분에, 전사용도체를 전주법(電鑄法)에 의해 형성하는 제2의 공정과, 상기 레지스트막을 박리하는 일없이 상기 전사용도체를 열이형성 접착시트에 전사하는 제3공정과, 상기 열이형성접착시트에 전사한 전사용도체를 절연체 또는 유전체 또는 자성체그린시트에 전사하는 제4의 공정을 가진 것을 특징으로 하는 적층용그린시트의 제조방법.
  5. 베이스금속판에, 소망의 도체패턴의 역패턴을 가지는 동시에 적어도 내산성 또는 내알칼리성을 가진 레지스트막을 형성하므로써 전주(電鑄)도체전사용형을 형성하는 제1공정과, 이 전주도체전사용형의 상기 레지스트를 형성하고 있지 않는 부분에, 전사용도체를 전주법(電鑄法)에 의해 형성하는 제2의 공정과, 상기 레지스트 및 전사용도체위에 절연체 또는 유전체 또는 자성체페이스트를 인쇄 및 건조한 후, 상기 전사용도체와, 전주도체전사용형사이를 박리하는 제3의 공정을 가진 것을 특징으로 하는 적층용그린시트의 제조방법.
  6. 베이스금속판에, 적어도 내산성 또는 내알칼리성을 가진 레지스트막을 형성하고, 이 레지스트막에 엑사이머레이저를 조사하므로써, 소망의 도체패턴의 역패턴을 가진 전주도체전사형을 형성하는 제l의 공정과, 이 전주도체전사형의 상기 레지스트를 형성하고 있지 않는 부분에, 전사용도체를 전주법에 의해 형성하는 제2의 공정을 가진 것을 특징으로 하는 전사도체의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950033634A 1994-10-04 1995-10-02 전사도체의 제조방법 및 적층용 그린시트의 제조방법 KR100276052B1 (ko)

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JP24008394 1994-10-04
JP94-240083 1994-10-04

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KR100276052B1 KR100276052B1 (ko) 2000-12-15

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US (1) US5647966A (ko)
EP (2) EP1180919A3 (ko)
KR (1) KR100276052B1 (ko)
CN (1) CN1134798C (ko)
DE (1) DE69527334T2 (ko)

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EP0706310B1 (en) 2002-07-10
CN1130291A (zh) 1996-09-04
EP0706310A1 (en) 1996-04-10
US5647966A (en) 1997-07-15
EP1180919A2 (en) 2002-02-20
DE69527334T2 (de) 2002-11-14
EP1180919A3 (en) 2007-03-14
DE69527334D1 (de) 2002-08-14
CN1134798C (zh) 2004-01-14
KR100276052B1 (ko) 2000-12-15

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