KR960015613A - 전사도체의 제조방법 및 적층용 그린시트의 제조방법 - Google Patents
전사도체의 제조방법 및 적층용 그린시트의 제조방법 Download PDFInfo
- Publication number
- KR960015613A KR960015613A KR1019950033634A KR19950033634A KR960015613A KR 960015613 A KR960015613 A KR 960015613A KR 1019950033634 A KR1019950033634 A KR 1019950033634A KR 19950033634 A KR19950033634 A KR 19950033634A KR 960015613 A KR960015613 A KR 960015613A
- Authority
- KR
- South Korea
- Prior art keywords
- transfer
- conductor
- forming
- resist film
- manufacturing
- Prior art date
Links
- 239000004020 conductor Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract 9
- 238000003475 lamination Methods 0.000 title 1
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000005323 electroforming Methods 0.000 claims abstract 6
- 239000010953 base metal Substances 0.000 claims 5
- 239000002253 acid Substances 0.000 claims 4
- 239000003513 alkali Substances 0.000 claims 4
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000919 ceramic Substances 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
- H01F17/06—Fixed inductances of the signal type with magnetic core with core substantially closed in itself, e.g. toroid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/042—Printed circuit coils by thin film techniques
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
- H05K3/205—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0117—Pattern shaped electrode used for patterning, e.g. plating or etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0726—Electroforming, i.e. electroplating on a metallic carrier thereby forming a self-supporting structure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
본 발명은, 적층칩인덕터등의 칩형전자부품을 형성하기 위한 전사도체의 제조방법 및 적층용그린시트의 제조방법에 관한 것으로서, 각종 적층형세라믹전자부품형성용의 그린시트위에, 전주법에 의해 형성한 미세패턴 이나 고밀도배선회로를 간단히 전사하는 것을 목적으로 한 것이며, 그 구성에 있어서, 베이스스테인레스판(1) 위에 형성되는 소망의 전사용도체(4)의 역패턴의 내약품성에 뛰어난 레지스트막(3)이 형성된 전주도체전사용형을 사용해서 전사용도체(4)를 전주법에 의해 형성하고, 또한 상기 레지스트막(3)을 박리하는 일없이 전사용도체(4)를 피진사체에 전사하고, 이 레지스트막(3)을 반복하여 재이용하여, 전사용도체(4)전주, 전사하는 것을 특징으로 한 것이다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1의 실시예에 있어서의 전사용도체의 형성방법을 표시한 설명용 단면도,
제2도는 동 실시예에 있어서의 적층형 세라믹칩인덕터의 구조를 표시한 분해사시도,
제3도는 동 실시예에 있어서의 적층형 세라믹칩인덕터의 사시도.
Claims (6)
- 베이스금속판에, 소망의 도체패턴의 역패턴을 가지는 동시에 적어도 내산성 또는 내알칼리성을 가진 레지스트막을 형성하므로써 전주(電鑄)도체전사용형을 형성하는 제1공정과, 이 전주도체전사용형의 상기 레지스트를 형성하고 있지 않는 부분에, 전사용도체를 전주법(電鑄法)에 의해 형성하는 제2공정과, 상기 레지스트막을 박리하는 일없이 상기 전사용도체를 피전사체에 전사하는 제3의 공정을 가진 것을 특징으로 하는 전사도체의 제조방법.
- 제1항에 있어서, 베이스금속판위의 레지스트막을 형성하고 있지 않는 부분에, 도전성이형층을 형성하는 것을 특징으로 하는 전사도체의 제조방법.
- 제1항에 있어서, 레지스트막은 이형성을 가진 것 또는 이형성을 부여한 것의 어느 하나인 것을 특징으로 하는 전사도체의 제조방법.
- 베이스금속판에, 소망의 도체패턴의 역패턴을 가지는 동시에 적어도 내산성 또는 내알칼리성을 가진 레지스트막을 형성하므로써 전주(電鑄)도체전사용형을 형성하는 제1공정과, 이 전주도체전사용형의 상기 레지스트를 형성하고 있지 않는 부분에, 전사용도체를 전주법(電鑄法)에 의해 형성하는 제2의 공정과, 상기 레지스트막을 박리하는 일없이 상기 전사용도체를 열이형성 접착시트에 전사하는 제3공정과, 상기 열이형성접착시트에 전사한 전사용도체를 절연체 또는 유전체 또는 자성체그린시트에 전사하는 제4의 공정을 가진 것을 특징으로 하는 적층용그린시트의 제조방법.
- 베이스금속판에, 소망의 도체패턴의 역패턴을 가지는 동시에 적어도 내산성 또는 내알칼리성을 가진 레지스트막을 형성하므로써 전주(電鑄)도체전사용형을 형성하는 제1공정과, 이 전주도체전사용형의 상기 레지스트를 형성하고 있지 않는 부분에, 전사용도체를 전주법(電鑄法)에 의해 형성하는 제2의 공정과, 상기 레지스트 및 전사용도체위에 절연체 또는 유전체 또는 자성체페이스트를 인쇄 및 건조한 후, 상기 전사용도체와, 전주도체전사용형사이를 박리하는 제3의 공정을 가진 것을 특징으로 하는 적층용그린시트의 제조방법.
- 베이스금속판에, 적어도 내산성 또는 내알칼리성을 가진 레지스트막을 형성하고, 이 레지스트막에 엑사이머레이저를 조사하므로써, 소망의 도체패턴의 역패턴을 가진 전주도체전사형을 형성하는 제l의 공정과, 이 전주도체전사형의 상기 레지스트를 형성하고 있지 않는 부분에, 전사용도체를 전주법에 의해 형성하는 제2의 공정을 가진 것을 특징으로 하는 전사도체의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24008394 | 1994-10-04 | ||
JP94-240083 | 1994-10-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960015613A true KR960015613A (ko) | 1996-05-22 |
KR100276052B1 KR100276052B1 (ko) | 2000-12-15 |
Family
ID=17054236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950033634A KR100276052B1 (ko) | 1994-10-04 | 1995-10-02 | 전사도체의 제조방법 및 적층용 그린시트의 제조방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5647966A (ko) |
EP (2) | EP1180919A3 (ko) |
KR (1) | KR100276052B1 (ko) |
CN (1) | CN1134798C (ko) |
DE (1) | DE69527334T2 (ko) |
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JPS61295617A (ja) * | 1985-06-25 | 1986-12-26 | Yokogawa Electric Corp | インダクトシンパタ−ン形成法 |
JPS62276894A (ja) * | 1986-02-21 | 1987-12-01 | 株式会社メイコー | スル−ホ−ル付導体回路板の製造方法 |
US4753694A (en) * | 1986-05-02 | 1988-06-28 | International Business Machines Corporation | Process for forming multilayered ceramic substrate having solid metal conductors |
JPS63284886A (ja) * | 1987-05-15 | 1988-11-22 | Toobi:Kk | 金属パタ−ン形成方法 |
JPS642394A (en) * | 1987-06-25 | 1989-01-06 | Matsushita Electric Works Ltd | Jig for forming transferring wiring |
US5063658A (en) * | 1987-07-08 | 1991-11-12 | Leonard Kurz Gmbh & Co. | Embossing foil and a method of making |
JPH0754780B2 (ja) * | 1987-08-10 | 1995-06-07 | 株式会社村田製作所 | 積層セラミックコンデンサの製造方法 |
US4959631A (en) * | 1987-09-29 | 1990-09-25 | Kabushiki Kaisha Toshiba | Planar inductor |
JPH02228093A (ja) * | 1989-03-01 | 1990-09-11 | Mitsubishi Electric Corp | めつき導体を有するプリント配線板の製造方法 |
JPH0377360A (ja) * | 1989-08-18 | 1991-04-02 | Mitsubishi Electric Corp | 半導体装置 |
JPH03219605A (ja) * | 1990-01-24 | 1991-09-27 | Murata Mfg Co Ltd | 積層型インダクタンス素子 |
JP3297429B2 (ja) * | 1990-08-09 | 2002-07-02 | ティーディーケイ株式会社 | 積層チップビーズ |
US5233157A (en) * | 1990-09-11 | 1993-08-03 | Hughes Aircraft Company | Laser pattern ablation of fine line circuitry masters |
US5217550A (en) * | 1990-09-28 | 1993-06-08 | Dai Nippon Printing Co., Ltd | Alignment transfer method |
JP2990621B2 (ja) * | 1990-11-05 | 1999-12-13 | 株式会社村田製作所 | 積層セラミック電子部品の製造方法 |
JPH07105420B2 (ja) * | 1991-08-26 | 1995-11-13 | ヒューズ・エアクラフト・カンパニー | 成形された接点をもった電気接続 |
US5374469A (en) * | 1991-09-19 | 1994-12-20 | Nitto Denko Corporation | Flexible printed substrate |
US5470412A (en) * | 1992-07-30 | 1995-11-28 | Sumitomo Metal Ceramics Inc. | Process for producing a circuit substrate |
JPH0689811A (ja) * | 1992-09-07 | 1994-03-29 | Nippon Steel Corp | 薄型インダクタ/トランスおよびその製造方法 |
US5358604A (en) * | 1992-09-29 | 1994-10-25 | Microelectronics And Computer Technology Corp. | Method for producing conductive patterns |
JPH0757961A (ja) * | 1993-08-20 | 1995-03-03 | Murata Mfg Co Ltd | 積層セラミック電子部品の製造方法 |
JPH0775909A (ja) * | 1993-09-08 | 1995-03-20 | Seiko Seiki Co Ltd | 加工装置 |
US5480503A (en) * | 1993-12-30 | 1996-01-02 | International Business Machines Corporation | Process for producing circuitized layers and multilayer ceramic sub-laminates and composites thereof |
-
1995
- 1995-10-02 KR KR1019950033634A patent/KR100276052B1/ko not_active IP Right Cessation
- 1995-10-02 US US08/537,512 patent/US5647966A/en not_active Expired - Fee Related
- 1995-10-04 CN CNB951095536A patent/CN1134798C/zh not_active Expired - Fee Related
- 1995-10-04 DE DE69527334T patent/DE69527334T2/de not_active Expired - Fee Related
- 1995-10-04 EP EP01119752A patent/EP1180919A3/en not_active Withdrawn
- 1995-10-04 EP EP95115632A patent/EP0706310B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0706310B1 (en) | 2002-07-10 |
CN1130291A (zh) | 1996-09-04 |
EP0706310A1 (en) | 1996-04-10 |
US5647966A (en) | 1997-07-15 |
EP1180919A2 (en) | 2002-02-20 |
DE69527334T2 (de) | 2002-11-14 |
EP1180919A3 (en) | 2007-03-14 |
DE69527334D1 (de) | 2002-08-14 |
CN1134798C (zh) | 2004-01-14 |
KR100276052B1 (ko) | 2000-12-15 |
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