KR20080098346A - 반도체 장치의 제조 방법 - Google Patents
반도체 장치의 제조 방법 Download PDFInfo
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- KR20080098346A KR20080098346A KR1020080102328A KR20080102328A KR20080098346A KR 20080098346 A KR20080098346 A KR 20080098346A KR 1020080102328 A KR1020080102328 A KR 1020080102328A KR 20080102328 A KR20080102328 A KR 20080102328A KR 20080098346 A KR20080098346 A KR 20080098346A
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Abstract
Description
액체의 종류 | 관찰한 기판수 | 관찰한 집적회로의 총수 | 파괴된 집적회로의 총수 | 파괴된 집적회로의 비율 |
순수 | 3 | 144 | 0 | 0.0% |
CO2수 | 3 | 144 | 0 | 0.0% |
HCl수 | 1 | 48 | 0 | 0.0% |
없음 | 4 | 192 | 59 | 30.7% |
액체의 종류 | 관찰한 기판수 | 관찰한 소자 형성층의 총수 | 깨어짐 등이 관찰된 소자 형성층의 총수 | 깨어짐 등이 발생한 소자 형성층의 비율 |
CO2수 | 2 | 96 | 4 | 4.2% |
없음 | 2 | 96 | 53 | 55.2% |
Claims (8)
- 디스플레이 모듈 제조 방법에 있어서:기판 위에 박리층을 형성하는 단계;상기 박리층 위에 화소부를 포함하는 소자 형성층을 형성하는 단계;상기 소자 형성층과 상기 박리층 사이에서 상기 기판 및 상기 박리층으로부터 상기 소자 형성층을 분리하거나 상기 박리층과 상기 기판 사이에서 상기 기판으로부터 상기 박리층 및 상기 소자 형성층을 분리하는 단계;상기 분리 단계에 의해 나타나는 표면을 액체로 적시는 단계;상기 분리 단계 후, 상기 소자 형성층에 제 1 가요성 기판(flexible substrate)을 고정하는 단계; 및상기 소자 형성층을 사이에 두고 시일재(sealant)로 상기 제 1 가요성 기판에 제 2 가요성 기판을 고정하는 단계를 포함하는, 디스플레이 모듈 제조 방법.
- 디스플레이 모듈 제조 방법에 있어서:기판 위에 박리층을 형성하는 단계;상기 박리층 위에 화소부를 포함하는 소자 형성층을 형성하는 단계;상기 박리층 내부의 상기 기판으로부터 상기 소자 형성층을 분리하는 단계;상기 분리 단계에 의해 나타나는 표면을 액체로 적시는 단계;상기 분리 단계 후, 상기 소자 형성층에 제 1 가요성 기판을 고정하는 단계; 및상기 소자 형성층을 사이에 두고 시일재로 상기 제 1 가요성 기판에 제 2 가요성 기판을 고정하는 단계를 포함하는, 디스플레이 모듈 제조 방법.
- 디스플레이 모듈 제조 방법에 있어서:기판 위에 박리층을 형성하는 단계;상기 박리층 위에 화소부를 포함하는 소자 형성층을 형성하는 단계;상기 박리에 의해 나타나는 표면이 액체로 적셔지는 동안, 상기 박리층과 상기 소자 형성층 사이에서 상기 기판 및 상기 박리층으로부터 상기 소자 형성층을 분리하거나 상기 박리층과 상기 기판 사이에서 상기 기판으로부터 상기 박리층 및 상기 소자 형성층을 분리하는 단계;상기 분리 단계 후, 상기 소자 형성층에 제 1 가요성 기판을 고정하는 단계; 및상기 소자 형성층을 사이에 두고 시일재로 상기 제 1 가요성 기판에 제 2 가요성 기판을 고정시키는 단계를 포함하는, 디스플레이 모듈 제조 방법.
- 디스플레이 모듈 제조 방법에 있어서:기판 위에 박리층을 형성하는 단계;상기 박리층 위에 화소부를 포함하는 소자 형성층을 형성하는 단계;상기 박리에 의해 나타나는 표면이 액체로 적셔지는 동안, 상기 박리층 내부 의 상기 기판으로부터 상기 소자 형성층을 분리하는 단계;상기 분리 단계 후, 상기 소자 형성층에 제 1 가요성 기판을 고정시키는 단계; 및상기 소자 형성층을 사이에 두고 시일재로 상기 제 1 가요성 기판에 제 2 가요성 기판을 고정하는 단계를 포함하는, 디스플레이 모듈 제조 방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,상기 액체는 순수인, 디스플레이 모듈 제조 방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,상기 제 1 가요성 기판은 열가소성 수지를 이용함으로써 상기 소자 형성층에 고정되는, 디스플레이 모듈 제조 방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,상기 디스플레이 모듈은 액정 모듈인, 디스플레이 모듈 제조 방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,상기 디스플레이 모듈은 EL 모듈인, 디스플레이 모듈 제조 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2006266543 | 2006-09-29 | ||
JPJP-P-2006-266543 | 2006-09-29 |
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