KR20040025744A - 실험 관리 시스템, 방법 및 매체 - Google Patents

실험 관리 시스템, 방법 및 매체 Download PDF

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Publication number
KR20040025744A
KR20040025744A KR10-2004-7001992A KR20047001992A KR20040025744A KR 20040025744 A KR20040025744 A KR 20040025744A KR 20047001992 A KR20047001992 A KR 20047001992A KR 20040025744 A KR20040025744 A KR 20040025744A
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South Korea
Prior art keywords
experiment
experimental
basic process
command
producing
Prior art date
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Abandoned
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KR10-2004-7001992A
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English (en)
Korean (ko)
Inventor
배드리 엔. 크리슈나머티
패리스 씨. 엠. 호킨스
Original Assignee
어플라이드 머티어리얼즈 인코포레이티드
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Publication of KR20040025744A publication Critical patent/KR20040025744A/ko
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B15/00—Systems controlled by a computer
    • G05B15/02—Systems controlled by a computer electric
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Business, Economics & Management (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Strategic Management (AREA)
  • Human Resources & Organizations (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Economics (AREA)
  • Theoretical Computer Science (AREA)
  • Marketing (AREA)
  • Tourism & Hospitality (AREA)
  • Entrepreneurship & Innovation (AREA)
  • General Business, Economics & Management (AREA)
  • Game Theory and Decision Science (AREA)
  • Operations Research (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Educational Administration (AREA)
  • Development Economics (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • General Factory Administration (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR10-2004-7001992A 2001-08-14 2002-08-06 실험 관리 시스템, 방법 및 매체 Abandoned KR20040025744A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/928,474 2001-08-14
US09/928,474 US6984198B2 (en) 2001-08-14 2001-08-14 Experiment management system, method and medium
PCT/US2002/024859 WO2003017013A2 (en) 2001-08-14 2002-08-06 Experiment management system, method and medium

Publications (1)

Publication Number Publication Date
KR20040025744A true KR20040025744A (ko) 2004-03-25

Family

ID=25456281

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7001992A Abandoned KR20040025744A (ko) 2001-08-14 2002-08-06 실험 관리 시스템, 방법 및 매체

Country Status (8)

Country Link
US (1) US6984198B2 (enExample)
EP (1) EP1417549A2 (enExample)
JP (1) JP2005520225A (enExample)
KR (1) KR20040025744A (enExample)
CN (1) CN100511054C (enExample)
AU (1) AU2002356021A1 (enExample)
TW (1) TW578081B (enExample)
WO (1) WO2003017013A2 (enExample)

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