KR102691591B1 - 기울기 조정 장치 및 그 것을 구비하는 로봇 - Google Patents

기울기 조정 장치 및 그 것을 구비하는 로봇 Download PDF

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Publication number
KR102691591B1
KR102691591B1 KR1020227011813A KR20227011813A KR102691591B1 KR 102691591 B1 KR102691591 B1 KR 102691591B1 KR 1020227011813 A KR1020227011813 A KR 1020227011813A KR 20227011813 A KR20227011813 A KR 20227011813A KR 102691591 B1 KR102691591 B1 KR 102691591B1
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KR
South Korea
Prior art keywords
inner ring
outer ring
spherical sliding
adjustment device
tilt adjustment
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KR1020227011813A
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English (en)
Korean (ko)
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KR20220061194A (ko
Inventor
이페이 시미즈
요시키 마에다
Original Assignee
카와사키 주코교 카부시키 카이샤
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Publication of KR20220061194A publication Critical patent/KR20220061194A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/108—Bearings specially adapted therefor
    • H01L21/67742—
    • H01L21/68707—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Support Of The Bearing (AREA)
  • Pivots And Pivotal Connections (AREA)
KR1020227011813A 2019-09-19 2020-09-14 기울기 조정 장치 및 그 것을 구비하는 로봇 Active KR102691591B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2019-170365 2019-09-19
JP2019170365A JP7299808B2 (ja) 2019-09-19 2019-09-19 傾き調整装置、及びそれを備えるロボット
PCT/JP2020/034732 WO2021054288A1 (ja) 2019-09-19 2020-09-14 傾き調整装置、及びそれを備えるロボット

Publications (2)

Publication Number Publication Date
KR20220061194A KR20220061194A (ko) 2022-05-12
KR102691591B1 true KR102691591B1 (ko) 2024-08-05

Family

ID=74878726

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227011813A Active KR102691591B1 (ko) 2019-09-19 2020-09-14 기울기 조정 장치 및 그 것을 구비하는 로봇

Country Status (6)

Country Link
US (1) US12377555B2 (https=)
JP (2) JP7299808B2 (https=)
KR (1) KR102691591B1 (https=)
CN (1) CN114423575A (https=)
TW (1) TWI764276B (https=)
WO (1) WO2021054288A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019244657A1 (ja) * 2018-06-19 2019-12-26 川崎重工業株式会社 水平多関節ロボット
JP7385389B2 (ja) * 2019-07-24 2023-11-22 川崎重工業株式会社 ロボットハンド、及びロボット
JP7792205B2 (ja) * 2021-06-14 2025-12-25 川崎重工業株式会社 高さ調整装置および製造装置
DE102021115853B3 (de) * 2021-06-18 2022-06-23 Uwe Beier Roboter zur Handhabung flacher Substrate sowie Ausrichtungseinrichtung
JP2025034251A (ja) * 2023-08-30 2025-03-13 川崎重工業株式会社 基板搬送ロボット、および、基板搬送ロボットの制御方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1064786A (ja) * 1996-08-21 1998-03-06 Dainippon Screen Mfg Co Ltd 移動ステージ
JP2006120861A (ja) * 2004-10-21 2006-05-11 Rorze Corp 傾き補正装置及びそれを備えた搬送ロボット
JP2008141158A (ja) 2006-11-29 2008-06-19 Samsung Electronics Co Ltd ウエハ移送装置、ウエハ移送方法及びコンピュータ可読記録媒体

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4060314A (en) * 1976-06-28 1977-11-29 Rockwell International Corporation Two axes remote mirror mount
JPH045038Y2 (https=) * 1986-03-07 1992-02-13
US5000416A (en) * 1990-01-26 1991-03-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Alignment positioning mechanism
JPH0724535U (ja) * 1993-09-30 1995-05-09 株式会社東京精密 レベリング装置
JP2000190273A (ja) 1998-12-25 2000-07-11 Fanuc Ltd エンドエフェクタのティルト機構
JP2001127136A (ja) * 1999-10-29 2001-05-11 Applied Materials Inc 基板搬送ロボットの検査装置
JP4589558B2 (ja) * 2001-04-05 2010-12-01 不二精機株式会社 ワーク姿勢調整装置
JP2003275980A (ja) * 2002-03-20 2003-09-30 Daihen Corp トランスファロボット
US7173710B2 (en) * 2002-06-07 2007-02-06 Fujinon Corporation Inclination adjusting apparatus, ferrule clamping apparatus, and interferometer apparatus equipped with them
JP2004128021A (ja) 2002-09-30 2004-04-22 Mitsubishi Electric Corp ウェハ搬送装置
TW570188U (en) * 2003-03-11 2004-01-01 Quarton Inc Improved multi-directional laser marking instrument
DE112004001210T5 (de) 2003-07-04 2006-06-08 Rorze Corp. Transportvorrichtung und Transportsteuerverfahren für eine dünne Platte
TW200502070A (en) * 2003-07-04 2005-01-16 Rorze Corp Carrying apparatus and carrying control method for sheet-like objects
JP4524132B2 (ja) 2004-03-30 2010-08-11 東京エレクトロン株式会社 真空処理装置
JP2006129693A (ja) 2004-09-30 2006-05-18 Nsk Ltd ウォームギアモータ装置
JP2007061920A (ja) 2005-08-29 2007-03-15 Toshiba Mach Co Ltd 産業用ロボット
JP2007035669A (ja) * 2005-07-22 2007-02-08 Nikon Corp ウェハ搬送装置、ウェハ積層体搬送装置及び積層型半導体装置製造方法
JP2007333884A (ja) 2006-06-13 2007-12-27 Fuji Xerox Co Ltd 画像形成装置
JP4767824B2 (ja) 2006-11-30 2011-09-07 ヒーハイスト精工株式会社 多自由度球面軸受
JP2008174314A (ja) 2007-01-16 2008-07-31 Tokyo Electron Ltd 昇降装置
JP2010234498A (ja) 2009-03-31 2010-10-21 Thk Co Ltd チルトステージ
JP2013246040A (ja) 2012-05-25 2013-12-09 Nifco Inc 支持装置
JP2014029178A (ja) 2012-07-31 2014-02-13 Ntn Corp 球面滑り軸受およびその製造方法
JP5861677B2 (ja) * 2013-07-08 2016-02-16 株式会社安川電機 吸着構造、ロボットハンドおよびロボット
JP6412758B2 (ja) 2014-09-30 2018-10-24 株式会社ジーグ 演出用ユニット及びこれを備えた遊技機
JP5865989B1 (ja) 2014-12-24 2016-02-17 日本車輌製造株式会社 連結具
JP6520208B2 (ja) 2015-02-27 2019-05-29 日本ギア工業株式会社 電動バルブアクチュエータ
JP6339040B2 (ja) 2015-03-20 2018-06-06 東京エレクトロン株式会社 保護カバー及びこれを用いた基板処理装置
DE202015106385U1 (de) * 2015-11-24 2015-11-30 China Aerospace Science And Technology Corporation Changzheng Machinery Factory Feineinstellungsplattform mit zwei Freiheitsgraden
JP6918698B2 (ja) 2016-07-28 2021-08-11 日本電産サンキョー株式会社 産業用ロボット
JP2018032797A (ja) * 2016-08-25 2018-03-01 ローツェ株式会社 搬送装置
US9919430B1 (en) * 2016-12-06 2018-03-20 Jabil Inc. Apparatus, system and method for providing an end effector
JP6574813B2 (ja) 2017-05-26 2019-09-11 日本車輌製造株式会社 床下機器着脱装置
JP2019150912A (ja) 2018-03-02 2019-09-12 セイコーエプソン株式会社 駆動装置、駆動装置の駆動方法、ハンド、ロボットおよび搬送装置
CN118123797A (zh) * 2019-03-11 2024-06-04 柿子技术公司 不对称双末端执行器机械臂

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1064786A (ja) * 1996-08-21 1998-03-06 Dainippon Screen Mfg Co Ltd 移動ステージ
JP2006120861A (ja) * 2004-10-21 2006-05-11 Rorze Corp 傾き補正装置及びそれを備えた搬送ロボット
JP2008141158A (ja) 2006-11-29 2008-06-19 Samsung Electronics Co Ltd ウエハ移送装置、ウエハ移送方法及びコンピュータ可読記録媒体

Also Published As

Publication number Publication date
US20220339795A1 (en) 2022-10-27
JP7299808B2 (ja) 2023-06-28
WO2021054288A1 (ja) 2021-03-25
TW202124087A (zh) 2021-07-01
KR20220061194A (ko) 2022-05-12
TWI764276B (zh) 2022-05-11
CN114423575A (zh) 2022-04-29
JP2021145130A (ja) 2021-09-24
US12377555B2 (en) 2025-08-05
JP7458345B2 (ja) 2024-03-29
JP2021048289A (ja) 2021-03-25

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