CN114423575A - 倾斜调整装置以及具备该倾斜调整装置的机器人 - Google Patents

倾斜调整装置以及具备该倾斜调整装置的机器人 Download PDF

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Publication number
CN114423575A
CN114423575A CN202080065203.2A CN202080065203A CN114423575A CN 114423575 A CN114423575 A CN 114423575A CN 202080065203 A CN202080065203 A CN 202080065203A CN 114423575 A CN114423575 A CN 114423575A
Authority
CN
China
Prior art keywords
inner ring
outer ring
robot
tilt
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080065203.2A
Other languages
English (en)
Chinese (zh)
Inventor
清水一平
前田佳树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Motors Ltd
Original Assignee
Kawasaki Jukogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Jukogyo KK filed Critical Kawasaki Jukogyo KK
Publication of CN114423575A publication Critical patent/CN114423575A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/108—Bearings specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Support Of The Bearing (AREA)
  • Pivots And Pivotal Connections (AREA)
CN202080065203.2A 2019-09-19 2020-09-14 倾斜调整装置以及具备该倾斜调整装置的机器人 Pending CN114423575A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-170365 2019-09-19
JP2019170365A JP7299808B2 (ja) 2019-09-19 2019-09-19 傾き調整装置、及びそれを備えるロボット
PCT/JP2020/034732 WO2021054288A1 (ja) 2019-09-19 2020-09-14 傾き調整装置、及びそれを備えるロボット

Publications (1)

Publication Number Publication Date
CN114423575A true CN114423575A (zh) 2022-04-29

Family

ID=74878726

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080065203.2A Pending CN114423575A (zh) 2019-09-19 2020-09-14 倾斜调整装置以及具备该倾斜调整装置的机器人

Country Status (6)

Country Link
US (1) US12377555B2 (https=)
JP (2) JP7299808B2 (https=)
KR (1) KR102691591B1 (https=)
CN (1) CN114423575A (https=)
TW (1) TWI764276B (https=)
WO (1) WO2021054288A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220254675A1 (en) * 2019-07-24 2022-08-11 Kawasaki Jukogyo Kabushiki Kaisha Robot hand, robot and fixing device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019244657A1 (ja) * 2018-06-19 2019-12-26 川崎重工業株式会社 水平多関節ロボット
JP7792205B2 (ja) * 2021-06-14 2025-12-25 川崎重工業株式会社 高さ調整装置および製造装置
DE102021115853B3 (de) * 2021-06-18 2022-06-23 Uwe Beier Roboter zur Handhabung flacher Substrate sowie Ausrichtungseinrichtung
JP2025034251A (ja) * 2023-08-30 2025-03-13 川崎重工業株式会社 基板搬送ロボット、および、基板搬送ロボットの制御方法

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JP2006120861A (ja) * 2004-10-21 2006-05-11 Rorze Corp 傾き補正装置及びそれを備えた搬送ロボット
CN104275701A (zh) * 2013-07-08 2015-01-14 株式会社安川电机 吸附结构、机器人手及机器人
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JPH1064786A (ja) * 1996-08-21 1998-03-06 Dainippon Screen Mfg Co Ltd 移動ステージ
JP2003275980A (ja) * 2002-03-20 2003-09-30 Daihen Corp トランスファロボット
CN1467477A (zh) * 2002-06-07 2004-01-14 富士写真光机株式会社 倾斜调节装置，套圈夹持装置，及装有上述装置的干涉仪装置
JP2006120861A (ja) * 2004-10-21 2006-05-11 Rorze Corp 傾き補正装置及びそれを備えた搬送ロボット
CN104275701A (zh) * 2013-07-08 2015-01-14 株式会社安川电机 吸附结构、机器人手及机器人
DE202015106385U1 (de) * 2015-11-24 2015-11-30 China Aerospace Science And Technology Corporation Changzheng Machinery Factory Feineinstellungsplattform mit zwei Freiheitsgraden

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220254675A1 (en) * 2019-07-24 2022-08-11 Kawasaki Jukogyo Kabushiki Kaisha Robot hand, robot and fixing device
US12463082B2 (en) * 2019-07-24 2025-11-04 Kawasaki Jukogyo Kabushiki Kaisha Robot hand, robot and fixing device

Also Published As

Publication number Publication date
US20220339795A1 (en) 2022-10-27
JP7299808B2 (ja) 2023-06-28
WO2021054288A1 (ja) 2021-03-25
TW202124087A (zh) 2021-07-01
KR20220061194A (ko) 2022-05-12
TWI764276B (zh) 2022-05-11
JP2021145130A (ja) 2021-09-24
KR102691591B1 (ko) 2024-08-05
US12377555B2 (en) 2025-08-05
JP7458345B2 (ja) 2024-03-29
JP2021048289A (ja) 2021-03-25

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