JP7299808B2 - 傾き調整装置、及びそれを備えるロボット - Google Patents

傾き調整装置、及びそれを備えるロボット Download PDF

Info

Publication number
JP7299808B2
JP7299808B2 JP2019170365A JP2019170365A JP7299808B2 JP 7299808 B2 JP7299808 B2 JP 7299808B2 JP 2019170365 A JP2019170365 A JP 2019170365A JP 2019170365 A JP2019170365 A JP 2019170365A JP 7299808 B2 JP7299808 B2 JP 7299808B2
Authority
JP
Japan
Prior art keywords
inner ring
spherical plain
outer ring
attached
tilt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019170365A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021048289A5 (https=
JP2021048289A (ja
Inventor
一平 清水
佳樹 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Motors Ltd
Original Assignee
Kawasaki Jukogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2019170365A priority Critical patent/JP7299808B2/ja
Application filed by Kawasaki Jukogyo KK filed Critical Kawasaki Jukogyo KK
Priority to KR1020227011813A priority patent/KR102691591B1/ko
Priority to CN202080065203.2A priority patent/CN114423575A/zh
Priority to US17/761,206 priority patent/US12377555B2/en
Priority to PCT/JP2020/034732 priority patent/WO2021054288A1/ja
Priority to TW109131861A priority patent/TWI764276B/zh
Publication of JP2021048289A publication Critical patent/JP2021048289A/ja
Priority to JP2021083412A priority patent/JP7458345B2/ja
Publication of JP2021048289A5 publication Critical patent/JP2021048289A5/ja
Application granted granted Critical
Publication of JP7299808B2 publication Critical patent/JP7299808B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Program-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/108—Bearings specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Support Of The Bearing (AREA)
  • Pivots And Pivotal Connections (AREA)
JP2019170365A 2019-09-19 2019-09-19 傾き調整装置、及びそれを備えるロボット Active JP7299808B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2019170365A JP7299808B2 (ja) 2019-09-19 2019-09-19 傾き調整装置、及びそれを備えるロボット
CN202080065203.2A CN114423575A (zh) 2019-09-19 2020-09-14 倾斜调整装置以及具备该倾斜调整装置的机器人
US17/761,206 US12377555B2 (en) 2019-09-19 2020-09-14 Inclination adjusting device and robot provided with the same
PCT/JP2020/034732 WO2021054288A1 (ja) 2019-09-19 2020-09-14 傾き調整装置、及びそれを備えるロボット
KR1020227011813A KR102691591B1 (ko) 2019-09-19 2020-09-14 기울기 조정 장치 및 그 것을 구비하는 로봇
TW109131861A TWI764276B (zh) 2019-09-19 2020-09-16 傾斜調整裝置及具備其之機器人
JP2021083412A JP7458345B2 (ja) 2019-09-19 2021-05-17 傾き調整装置、及びそれを備えるロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019170365A JP7299808B2 (ja) 2019-09-19 2019-09-19 傾き調整装置、及びそれを備えるロボット

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021083412A Division JP7458345B2 (ja) 2019-09-19 2021-05-17 傾き調整装置、及びそれを備えるロボット

Publications (3)

Publication Number Publication Date
JP2021048289A JP2021048289A (ja) 2021-03-25
JP2021048289A5 JP2021048289A5 (https=) 2021-07-26
JP7299808B2 true JP7299808B2 (ja) 2023-06-28

Family

ID=74878726

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2019170365A Active JP7299808B2 (ja) 2019-09-19 2019-09-19 傾き調整装置、及びそれを備えるロボット
JP2021083412A Active JP7458345B2 (ja) 2019-09-19 2021-05-17 傾き調整装置、及びそれを備えるロボット

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021083412A Active JP7458345B2 (ja) 2019-09-19 2021-05-17 傾き調整装置、及びそれを備えるロボット

Country Status (6)

Country Link
US (1) US12377555B2 (https=)
JP (2) JP7299808B2 (https=)
KR (1) KR102691591B1 (https=)
CN (1) CN114423575A (https=)
TW (1) TWI764276B (https=)
WO (1) WO2021054288A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019244657A1 (ja) * 2018-06-19 2019-12-26 川崎重工業株式会社 水平多関節ロボット
JP7385389B2 (ja) * 2019-07-24 2023-11-22 川崎重工業株式会社 ロボットハンド、及びロボット
JP7792205B2 (ja) * 2021-06-14 2025-12-25 川崎重工業株式会社 高さ調整装置および製造装置
DE102021115853B3 (de) * 2021-06-18 2022-06-23 Uwe Beier Roboter zur Handhabung flacher Substrate sowie Ausrichtungseinrichtung
JP2025034251A (ja) * 2023-08-30 2025-03-13 川崎重工業株式会社 基板搬送ロボット、および、基板搬送ロボットの制御方法

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000190273A (ja) 1998-12-25 2000-07-11 Fanuc Ltd エンドエフェクタのティルト機構
JP2004128021A (ja) 2002-09-30 2004-04-22 Mitsubishi Electric Corp ウェハ搬送装置
WO2005004230A1 (ja) 2003-07-04 2005-01-13 Rorze Corporation 薄板状基板の搬送装置、及びその搬送制御方法
JP2005286211A (ja) 2004-03-30 2005-10-13 Tokyo Electron Ltd 真空処理装置及び真空処理方法
JP2006120861A (ja) 2004-10-21 2006-05-11 Rorze Corp 傾き補正装置及びそれを備えた搬送ロボット
JP2006129693A (ja) 2004-09-30 2006-05-18 Nsk Ltd ウォームギアモータ装置
JP2007061920A (ja) 2005-08-29 2007-03-15 Toshiba Mach Co Ltd 産業用ロボット
JP2008138692A (ja) 2006-11-30 2008-06-19 Hiihaisuto Seiko Kk 多自由度球面軸受
JP2010234498A (ja) 2009-03-31 2010-10-21 Thk Co Ltd チルトステージ
JP2013246040A (ja) 2012-05-25 2013-12-09 Nifco Inc 支持装置
JP2016160969A (ja) 2015-02-27 2016-09-05 日本ギア工業株式会社 電動バルブアクチュエータ
JP2016178216A (ja) 2015-03-20 2016-10-06 東京エレクトロン株式会社 保護カバー及びこれを用いた基板処理装置
WO2018021178A1 (ja) 2016-07-28 2018-02-01 日本電産サンキョー株式会社 産業用ロボット

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4060314A (en) * 1976-06-28 1977-11-29 Rockwell International Corporation Two axes remote mirror mount
JPH045038Y2 (https=) * 1986-03-07 1992-02-13
US5000416A (en) * 1990-01-26 1991-03-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Alignment positioning mechanism
JPH0724535U (ja) * 1993-09-30 1995-05-09 株式会社東京精密 レベリング装置
JP3450129B2 (ja) * 1996-08-21 2003-09-22 大日本スクリーン製造株式会社 移動ステージ
JP2001127136A (ja) * 1999-10-29 2001-05-11 Applied Materials Inc 基板搬送ロボットの検査装置
JP4589558B2 (ja) * 2001-04-05 2010-12-01 不二精機株式会社 ワーク姿勢調整装置
JP2003275980A (ja) * 2002-03-20 2003-09-30 Daihen Corp トランスファロボット
US7173710B2 (en) * 2002-06-07 2007-02-06 Fujinon Corporation Inclination adjusting apparatus, ferrule clamping apparatus, and interferometer apparatus equipped with them
TW570188U (en) * 2003-03-11 2004-01-01 Quarton Inc Improved multi-directional laser marking instrument
TW200502070A (en) * 2003-07-04 2005-01-16 Rorze Corp Carrying apparatus and carrying control method for sheet-like objects
JP2007035669A (ja) * 2005-07-22 2007-02-08 Nikon Corp ウェハ搬送装置、ウェハ積層体搬送装置及び積層型半導体装置製造方法
JP2007333884A (ja) 2006-06-13 2007-12-27 Fuji Xerox Co Ltd 画像形成装置
KR101312621B1 (ko) 2006-11-29 2013-10-07 삼성전자주식회사 웨이퍼이송장치
JP2008174314A (ja) 2007-01-16 2008-07-31 Tokyo Electron Ltd 昇降装置
JP2014029178A (ja) 2012-07-31 2014-02-13 Ntn Corp 球面滑り軸受およびその製造方法
JP5861677B2 (ja) * 2013-07-08 2016-02-16 株式会社安川電機 吸着構造、ロボットハンドおよびロボット
JP6412758B2 (ja) 2014-09-30 2018-10-24 株式会社ジーグ 演出用ユニット及びこれを備えた遊技機
JP5865989B1 (ja) 2014-12-24 2016-02-17 日本車輌製造株式会社 連結具
DE202015106385U1 (de) * 2015-11-24 2015-11-30 China Aerospace Science And Technology Corporation Changzheng Machinery Factory Feineinstellungsplattform mit zwei Freiheitsgraden
JP2018032797A (ja) * 2016-08-25 2018-03-01 ローツェ株式会社 搬送装置
US9919430B1 (en) * 2016-12-06 2018-03-20 Jabil Inc. Apparatus, system and method for providing an end effector
JP6574813B2 (ja) 2017-05-26 2019-09-11 日本車輌製造株式会社 床下機器着脱装置
JP2019150912A (ja) 2018-03-02 2019-09-12 セイコーエプソン株式会社 駆動装置、駆動装置の駆動方法、ハンド、ロボットおよび搬送装置
CN118123797A (zh) * 2019-03-11 2024-06-04 柿子技术公司 不对称双末端执行器机械臂

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000190273A (ja) 1998-12-25 2000-07-11 Fanuc Ltd エンドエフェクタのティルト機構
JP2004128021A (ja) 2002-09-30 2004-04-22 Mitsubishi Electric Corp ウェハ搬送装置
WO2005004230A1 (ja) 2003-07-04 2005-01-13 Rorze Corporation 薄板状基板の搬送装置、及びその搬送制御方法
JP2005286211A (ja) 2004-03-30 2005-10-13 Tokyo Electron Ltd 真空処理装置及び真空処理方法
JP2006129693A (ja) 2004-09-30 2006-05-18 Nsk Ltd ウォームギアモータ装置
JP2006120861A (ja) 2004-10-21 2006-05-11 Rorze Corp 傾き補正装置及びそれを備えた搬送ロボット
JP2007061920A (ja) 2005-08-29 2007-03-15 Toshiba Mach Co Ltd 産業用ロボット
JP2008138692A (ja) 2006-11-30 2008-06-19 Hiihaisuto Seiko Kk 多自由度球面軸受
JP2010234498A (ja) 2009-03-31 2010-10-21 Thk Co Ltd チルトステージ
JP2013246040A (ja) 2012-05-25 2013-12-09 Nifco Inc 支持装置
JP2016160969A (ja) 2015-02-27 2016-09-05 日本ギア工業株式会社 電動バルブアクチュエータ
JP2016178216A (ja) 2015-03-20 2016-10-06 東京エレクトロン株式会社 保護カバー及びこれを用いた基板処理装置
WO2018021178A1 (ja) 2016-07-28 2018-02-01 日本電産サンキョー株式会社 産業用ロボット

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
LiShuting，機械設計工学 授業資料 「第１０回目 その他の歯車装置（はすば歯車、傘歯車とウォームギヤなど）」，「国立国会図書館インターネット資料収集保存事業」、[online]、平成２８年８月１０日［令和４年１２月２０，日本，島根大学 機械工学科，2016年08月10日，1,34-59，https://warp.da.ndl.go.jp/info:ndljp/pid/10181226/www.ecs.shimane-u.ac.jp/~shutingli/

Also Published As

Publication number Publication date
US20220339795A1 (en) 2022-10-27
WO2021054288A1 (ja) 2021-03-25
TW202124087A (zh) 2021-07-01
KR20220061194A (ko) 2022-05-12
TWI764276B (zh) 2022-05-11
CN114423575A (zh) 2022-04-29
JP2021145130A (ja) 2021-09-24
KR102691591B1 (ko) 2024-08-05
US12377555B2 (en) 2025-08-05
JP7458345B2 (ja) 2024-03-29
JP2021048289A (ja) 2021-03-25

Similar Documents

Publication Publication Date Title
JP7299808B2 (ja) 傾き調整装置、及びそれを備えるロボット
US20200016755A1 (en) Transfer robot and robot system
TWI460362B (zh) 於直線運動導螺與螺帽組件中用來自動對準螺帽與螺桿之浮動套環夾持裝置
JP5594404B1 (ja) テーブル装置、搬送装置、半導体製造装置、及びフラットパネルディスプレイ製造装置
JP2021048289A5 (https=)
JP7634047B2 (ja) 固定装置
US9401295B2 (en) Load port apparatus and clamping device to be used for the same
JP6442831B2 (ja) テーブル装置、及び搬送装置
JP4648161B2 (ja) ダブルアーム列式基板搬送用ロボット
JP2014083603A (ja) 回転体の案内・固定構造及びバイス
WO2020116373A1 (ja) アライメント装置、レンズアライメントシステム
JP7792205B2 (ja) 高さ調整装置および製造装置
FR3033932A1 (fr) Systeme de deplacement relatif entre deux plaques et dispositif de positionnement comprenant un tel systeme de deplacement.
JP5751279B2 (ja) テーブル装置、搬送装置、及び半導体製造装置
JP4917050B2 (ja) ステージ装置
KR102903363B1 (ko) 밸런스 스테이지 장치
JP2001270692A (ja) スピンドル駆動装置の半径方向のねじ山付きスピンドルストッパを補償するための装置
JP2003295037A (ja) 精密機器の調整固定機構装置
CN114300405A (zh) 晶片承载盒的定位装置、预装载腔室及半导体工艺设备
JP2023141039A (ja) 伝動装置
KR20250170992A (ko) 밸런스 스테이지 장치
JP2006334711A (ja) 位置決めテーブル装置
JP2007067282A (ja) カセットの位置決めガイド装置
JPH06173915A (ja) 軸支持構造
JP2010021272A (ja) 半導体製造装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210512

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210512

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220712

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220905

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20230104

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230313

C60 Trial request (containing other claim documents, opposition documents)

Free format text: JAPANESE INTERMEDIATE CODE: C60

Effective date: 20230313

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20230322

C21 Notice of transfer of a case for reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C21

Effective date: 20230328

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230523

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230616

R150 Certificate of patent or registration of utility model

Ref document number: 7299808

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150