KR101754380B1 - Method for manufacturing semiconductor device - Google Patents

Abstract

It is an object to provide a semiconductor device using an oxide semiconductor with stable electrical characteristics and high reliability. The first insulating film is formed and oxygen is doped into the first insulating film to supply oxygen atoms to the first insulating film and the source electrode and the drain electrode and the source electrode and the drain electrode are electrically connected The oxide semiconductor film is formed and heat treatment is performed on the oxide semiconductor film to remove hydrogen atoms in the oxide semiconductor film to form a second insulating film on the oxide semiconductor film from which the hydrogen atoms have been removed and a region overlapping the oxide semiconductor film on the second insulating film Forming a gate electrode on the semiconductor substrate.

Description

[0001] METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [0002]

A semiconductor device, and a method of manufacturing a semiconductor device.

In the present specification, a semiconductor device refers to an overall device that can function by utilizing semiconductor characteristics, and the electro-optical device, the semiconductor circuit, and the electronic device are all semiconductor devices.

A technique of forming a transistor using a semiconductor thin film formed on a substrate having an insulating surface has been attracting attention. The transistor has been widely applied to electronic devices such as an integrated circuit (IC) and an image display device (display device). Silicon-based semiconductor materials are widely known as semiconductor thin films applicable to transistors, but oxide semiconductors have attracted attention as other materials.

For example, a transistor using an amorphous oxide containing indium (In), gallium (Ga), and zinc (Zn) having an electron carrier concentration of less than 10 ¹⁸ / cm ³ is disclosed as an active layer of a transistor (see Patent Document 1) .

Japanese Patent Application Laid-Open No. 2006-165528

However, when oxide semiconductors are mixed with hydrogen or water to form an electron donor in the device fabrication process, the electric conductivity of the oxide semiconductor may change. This phenomenon is a factor of variation of electrical characteristics in a transistor using an oxide semiconductor.

In view of the above-described problems, one object of the present invention is to provide a semiconductor device using an oxide semiconductor with stable electrical characteristics and high reliability. At least, an oxygen doping process is performed in a process of manufacturing a transistor having an oxide semiconductor film.

In the manufacturing process of a transistor having an oxide semiconductor film, dehydration or dehydrogenation treatment by heat treatment and oxygen doping treatment are performed.

According to one aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: forming a first insulating film on a substrate; performing oxygen doping treatment on the first insulating film to supply oxygen atoms to the first insulating film; And an oxide semiconductor film which is electrically connected to the source electrode and the drain electrode is formed on the oxide semiconductor film, heat treatment is performed on the oxide semiconductor film to remove hydrogen atoms in the oxide semiconductor film, a second insulating film is formed on the oxide semiconductor film from which hydrogen atoms have been removed, And a gate electrode is formed in a region overlapping the oxide semiconductor film on the second insulating film.

According to an aspect of the disclosed invention, there is provided a method of manufacturing a semiconductor device, comprising: forming a first insulating film containing oxygen atoms as a component on a substrate; performing oxygen doping treatment on the first insulating film to supply oxygen atoms to the first insulating film; An oxide semiconductor film which is electrically connected to the source electrode and the drain electrode and to the source electrode and the drain electrode is formed and heat treatment is performed on the oxide semiconductor film to remove hydrogen atoms in the oxide semiconductor film, Oxygen atoms are supplied to the oxide semiconductor film to form a second insulating film containing oxygen atoms as a component on the oxide semiconductor film to which the oxygen atoms have been supplied and the second insulating film is formed on the oxide semiconductor film on the second insulating film Thereby forming a gate electrode in the region.

According to an aspect of the disclosed invention, there is provided a method of manufacturing a semiconductor device, comprising: forming a first insulating film containing oxygen atoms as a component on a substrate; performing oxygen doping treatment on the first insulating film to supply oxygen atoms to the first insulating film; An oxide semiconductor film which is electrically connected to the source electrode and the drain electrode and to the source electrode and the drain electrode is formed and heat treatment is performed on the oxide semiconductor film to remove hydrogen atoms in the oxide semiconductor film, A second insulating film containing oxygen atoms as a component is formed and oxygen doping treatment is performed on the second insulating film to supply oxygen atoms to the second insulating film and a gate electrode is formed in a region overlapping the oxide semiconductor film on the second insulating film And a method for manufacturing the semiconductor device.

In this case, the oxide semiconductor film may be subjected to oxygen doping treatment so that the oxygen atoms are contained in a ratio of up to twice as high as the stoichiometric ratio.

In the above, an insulating film containing a component element of an oxide semiconductor film may be formed as the first insulating film or the second insulating film. Further, as the first insulating film or the second insulating film, a film including an insulating film containing an elemental element of the oxide semiconductor film and an element different from an elemental element of the insulating film may be formed. Further, an insulating film containing gallium oxide may be formed as the first insulating film or the second insulating film. Further, as the first insulating film or the second insulating film, a film containing an insulating film containing gallium oxide and a material different from gallium oxide may be formed. In the present specification, the term " gallium oxide " means oxygen and gallium as constituent elements, and is not limited to the gallium oxide. For example, in the case of " an insulating film containing gallium oxide ", it can be read in the same way as " an insulating film containing oxygen and gallium ".

Further, in the above, an insulating film containing nitrogen may be formed so as to cover the gate electrode. In the case of forming an insulating film containing no hydrogen or an extremely small amount of silicon nitride above the oxide semiconductor film as described above, oxygen added to at least one of the first insulating film, the second insulating film, and the oxide semiconductor film is exposed to the outside And it is also possible to prevent the mixture of water and water from the outside. In this respect, it can be said that the importance of the insulating film containing nitrogen is high.

The above-mentioned " oxygen doping " means adding oxygen (including at least one of oxygen radical, oxygen atom and oxygen ion) to the bulk. Also, the term " bulk " is used to clarify the addition of oxygen to the inside of the thin film as well as to the surface of the thin film. In addition, " oxygen doping " includes " oxygen plasma doping " in which plasma oxygen is added to the bulk.

Oxygen in an amount exceeding at least the stoichiometric ratio exists in the oxide semiconductor film (in the bulk), the insulating film (in the bulk), and the interface between the oxide semiconductor film and the insulating film by the above-described oxygen doping treatment. The amount of oxygen is preferably up to four times (less than four times), more preferably up to two times (less than two times) beyond one time the stoichiometric ratio. Here, an oxygen-excess oxide having a stoichiometric ratio or more is, for example, an oxide of In _a Ga _b Zn _c Si _d Al _e Mg _f O _g (a, b, c, d, e, When expressed, 2g > 3a + 3b + 2c + 4d + 3e + 2f. In addition, the oxygen added by the oxygen doping treatment may exist between the lattices of the oxide semiconductor.

Further, the amount of oxygen to be added is greater than the amount of hydrogen in the oxide semiconductor film after at least dehydration and dehydrogenation. At least when the amount of added oxygen is more than hydrogen, it diffuses and reacts with hydrogen which causes instability, so that hydrogen can be immobilized (non-active ionization). That is, the reduction in reliability can be suppressed. In addition, by making the oxygen excess, it is possible to reduce the deviation of the threshold voltage Vth due to the oxygen deficiency, and at the same time, the shift amount DELTA Vth of the threshold voltage can be reduced.

It is more preferable that the above-described amount of oxygen exists in at least two of the oxide semiconductor film (in the bulk), the insulating film (in the bulk), and the interface between the oxide semiconductor film and the insulating film.

In the case of oxide semiconductors free from defects (oxygen defects), it is sufficient that oxygen in an amount matching the stoichiometric ratio is contained. However, in order to secure reliability such as suppressing fluctuations in the threshold voltage of the transistors, Of oxygen is contained. In the case of an oxide semiconductor having no defect (oxygen deficiency) similarly, it is not necessary to use the base film as an excess oxygen film. However, in order to secure reliability such as suppressing fluctuation of the threshold voltage of the transistor, It is preferable to use the base film as an oxygen-excess insulating film.

Here, oxygen is added in the bulk by the above-described "oxygen plasma doping" treatment. When oxygen doping treatment is performed on an oxide semiconductor film containing oxygen as one component, it is generally difficult to confirm the increase or decrease in the oxygen concentration. Therefore, here, the effect of the oxygen doping treatment was confirmed using a silicon wafer.

The oxygen doping process was performed using an inductively coupled plasma (ICP) method. The conditions are ICP power 800 W, RF bias power 300 W or 0 W, pressure 1.5 Pa, oxygen gas flow rate 75 sccm, substrate temperature 70 캜. Fig. 15 shows the oxygen concentration profile in the depth direction of the silicon wafer by SIMS (Secondary Ion Mass Spectrometry) analysis. 15, the vertical axis indicates the oxygen concentration, and the horizontal axis indicates the depth from the silicon wafer surface.

From Fig. 15, it can be confirmed that oxygen is added even in the case where the RF bias power is 0 W or 300 W. Further, in the case of the RF bias of 300 W, it can be confirmed that oxygen is added deeper than in the case of the RF bias of 0 W.

Next, the cross section of the silicon wafer before and after the oxygen doping treatment was observed by STEM (Scanning Transmission Electron Microscopy) is shown in Fig. FIG. 16A is an STEM image before the oxygen doping process, and FIG. 16B is an STEM image after the oxygen doping process is performed under the condition of the RF bias power of 300 W described above. As shown in FIG. 16 (B), by performing oxygen doping, it can be confirmed that an oxygen highly doped region is formed in the silicon wafer.

As described above, when oxygen doping is performed on the silicon wafer, oxygen is added to the silicon wafer. It can be understood from this result that oxygen can be added to the oxide semiconductor film naturally even by performing oxygen doping in the oxide semiconductor film.

The effect of the above-described configuration, which is one aspect of the disclosed invention, can be easily understood by considering the following. It should be noted, however, that the following description is merely a consideration.

When a positive voltage is applied to the gate electrode, an electric field is generated from the gate electrode side to the back channel side (opposite to the gate insulating film) of the oxide semiconductor film. Therefore, hydrogen ions having a positive charge existing in the oxide semiconductor film And accumulates in the vicinity of the interface with the insulating film. A positive charge moves from the accumulated hydrogen ions to the charge trapping centers (hydrogen atoms, water, or contaminants, etc.) in the insulating film, so that negative charges are accumulated on the back channel side of the oxide semiconductor film. That is, a parasitic channel is generated on the back channel side of the transistor, the threshold voltage shifts to the minus side, and the transistor shows a tendency of normally on.

As described above, the charge trapping centers of hydrogen or water in the insulating film capture the positive charge, and the positive electric charge moves into the insulating film, so that the electrical characteristics of the transistor fluctuate. Therefore, fluctuation of the electrical characteristics of the transistor is suppressed It is important that such charge trapping centers do not exist in the insulating film, or that the content of hydrogen or water or the like is small. Therefore, it is preferable to use a sputtering method with a small hydrogen content at the time of film formation for forming the insulating film. The insulating film formed by the sputtering method is less liable to move the positive charge than in the case where the film is formed by the CVD method or the like because the insulating film center does not have a charge trapping center in the film. Therefore, the shift of the threshold voltage of the transistor can be suppressed, and the transistor can be turned off normally (normally off).

In the top gate type transistor, the oxide semiconductor film is formed on the underlying insulating film and then subjected to a heat treatment to remove water or hydrogen contained in the oxide semiconductor film, and water or hydrogen Can also be removed. Therefore, in the insulating film, the charge capturing centers for trapping the positive charges which have moved in the oxide semiconductor film are small. As described above, the heat treatment for dehydration or dehydrogenation into the oxide semiconductor film is also performed on the insulating film existing in the lower layer of the oxide semiconductor film in addition to the oxide semiconductor film. Therefore, in the top gate type transistor, May be formed by a CVD method such as a plasma CVD method.

When a negative voltage is applied to the gate electrode, an electric field is generated from the back channel side to the gate electrode side. Therefore, hydrogen ions existing in the oxide semiconductor film migrate toward the gate insulating film side and accumulate in the vicinity of the interface with the gate insulating film. Further, the threshold voltage of the transistor thereby shifts to the minus side.

Also, when the voltage is left at 0, the positive charge is released from the charge trapping center, and the threshold voltage of the transistor shifts to the positive side and returns to the initial state or, in some cases, shifts to the positive side more than the initial state. This phenomenon suggests that ions easily migrate in the oxide semiconductor film, and it can be considered that hydrogen as the smallest atom is the most easily transportable ion.

Further, the oxide semiconductor film absorbs light, so that the bond (also referred to as M-H bond) between the metal element M and the hydrogen atom H in the oxide semiconductor film is broken by the light energy. And the light energy of the wavelength around 400 nm and the binding energy of the metal element and the hydrogen atom substantially coincide with each other. When a negative gate bias is applied to a transistor in which a bond between a metal element and a hydrogen atom in the oxide semiconductor film is broken, hydrogen ions separated from the metal element are pulled toward the gate electrode side, so that the distribution of charge changes, Shifts to the minus side and shows the tendency of the normal lean.

Further, the hydrogen ions migrating to the interface of the gate insulating film due to the light irradiation to the transistor and the application of the negative gate bias return to the original state when the application of the voltage is stopped. This can be understood as a representative example of ion migration in the oxide semiconductor film.

Such countermeasures against the fluctuation of the electrical characteristics (BT deterioration) by the voltage application or the fluctuation of the electrical characteristics (light deterioration) by the irradiation of light are to thoroughly remove impurities including hydrogen atoms or hydrogen atoms from the oxide semiconductor film Thus, it is most important that the oxide semiconductor film is highly purified. When the charge density is 1 x 10 ¹⁵ cm ^-3 , that is, when the charge per unit area is 1 x 10 ¹⁰ cm ^-2 , the charges do not affect the transistor characteristics or are very small even if they affect the transistor characteristics. Therefore, the charge density is preferably 1 x 10 ¹⁵ cm ^-3 or less. If 10% of the hydrogen in the oxide semiconductor film moves in the oxide semiconductor film, the concentration of hydrogen is preferably 1 x 10 ¹⁶ cm ^-3 or less. Furthermore, in order to prevent hydrogen from intruding from the outside after the completion of the device, it is preferable to cover the transistor by using a silicon nitride film formed by a sputtering method as a passivation film.

In addition, by making hydrogen (the number of hydrogen atoms) (oxygen radicals) or (oxygen ions) containing excess oxygen to hydrogen contained in the oxide semiconductor film, hydrogen or water is excluded from the oxide semiconductor film There is a number. Specifically, oxygen is plasma-enhanced by using high-frequency (RF), the substrate bias is increased, and oxygen radicals and oxygen ions are doped or added to the oxide semiconductor film on the substrate. In the oxide semiconductor film, Do a lot. Since the electronegativity of oxygen is larger than that of the metal (Zn, Ga, In) in the oxide semiconductor film having an electronegativity of about 2.0 and an electronegativity of about 2.0, oxygen is excessively contained in hydrogen, do. This OH group can also combine with M to form an M-O-H group.

Further, it is more preferable to dope oxygen so that the content of oxygen in the oxide semiconductor film is larger than the stoichiometric ratio. For example, when an In-Ga-Zn-O-based oxide semiconductor film is used as the oxide semiconductor film, it is preferable to make the ratio of oxygen to 1: 2 or more (less than 2 times) desirable. For example, assuming that the stoichiometric ratio of a single crystal of an In-Ga-Zn-O based oxide semiconductor is In: Ga: Zn: O = 1: 1: 1: 4, in an oxide semiconductor thin film represented by InGaZnO _x , , And X is preferably more than 4 and less than 8. Therefore, the content of oxygen in the oxide semiconductor film is larger than the content of hydrogen.

Hydrogen is released from the M-H group by light energy or BT stress to cause deterioration. When oxygen is injected by the above-described doping, the injected oxygen combines with hydrogen ions to become an OH group. OH groups do not release hydrogen ions even when light irradiation or BT stress is applied to the transistors because they have a large binding energy, and they are more difficult to move in the oxide semiconductor film because they are larger in mass than hydrogen ions. Therefore, the OH group formed due to the doping of oxygen does not cause deterioration of the transistor or can reduce the cause of deterioration.

Further, it has been confirmed that as the film thickness of the oxide semiconductor film is increased, the threshold voltage of the transistor becomes irregular. This is presumably because the oxygen deficiency in the oxide semiconductor film is a factor of fluctuation of the threshold voltage, and as the film thickness increases, the oxygen deficiency increases. In the transistor relating to one aspect of the disclosed invention, the step of doping oxygen into the insulating film or the oxide semiconductor film is effective not only for elimination of hydrogen or water from the oxide semiconductor film, but also for replenishing oxygen deficiency in the film. Therefore, the transistor related to one aspect of the disclosed invention can also suppress variations in the threshold voltage.

Further, the structure in which the oxide semiconductor film is sandwiched between the oxide semiconductor film and the metal oxide film composed of the same kind of component as the oxide semiconductor film is also effective in preventing fluctuation of electrical characteristics. It is preferable to use a film containing an oxide of one or more metal elements selected from the constituent elements of the oxide semiconductor film as the metal oxide film composed of the same kind of components as the oxide semiconductor film. Such a material is good in phase with the oxide semiconductor film, and the interface state with the oxide semiconductor film can be well maintained by providing the oxide film with the oxide semiconductor film therebetween. That is, by providing the metal oxide film using the above-described material as an insulating film in contact with the oxide semiconductor film, accumulation of hydrogen ions at the interface between the metal oxide film and the oxide semiconductor film and in the vicinity thereof can be suppressed or prevented. Therefore, as compared with the case where an insulating film made of a different component from an oxide semiconductor film such as a silicon oxide film is provided with the oxide semiconductor film sandwiched therebetween, the hydrogen concentration at the interface of the oxide semiconductor film, which affects the threshold voltage of the transistor Can be sufficiently reduced.

As the metal oxide film, it is preferable to use a gallium oxide film. Since the gallium oxide has a large band gap Eg, an energy barrier is formed at the interface between the oxide semiconductor film and the metal oxide film by sandwiching the oxide semiconductor film therebetween by the gallium oxide film, Movement can be interrupted. Therefore, the carrier moves in the oxide semiconductor film without moving from the oxide semiconductor film to the metal oxide film. On the other hand, the hydrogen ions pass through the interface between the oxide semiconductor film and the metal oxide film, and accumulate near the interface between the metal oxide film and the insulating film. Even if hydrogen ions are accumulated in the vicinity of the interface with the insulating film, no parasitic channel is formed in the gallium oxide film as a metal oxide film, so that the carrier does not affect the threshold voltage of the transistor, Influence is extremely small. When the gallium oxide and the In-Ga-Zn-O-based material are brought into contact with each other, the energy barrier becomes about 0.8 eV on the conduction band side and about 0.9 eV on the valence band side.

As described above, in the transistor relating to one aspect of the disclosed invention, the oxygen doping treatment is performed to increase the oxygen content in at least one of the insulating film in contact with the oxide semiconductor film, the oxide semiconductor film, It is a technical idea to do.

In the case where an oxide semiconductor material containing In is used as the oxide semiconductor film, the bonding force between In and oxygen is comparatively weak. Therefore, when the insulating film in contact with the oxide semiconductor film contains a material having stronger bonding force with oxygen than silicon, Oxygen is removed from the oxide semiconductor film, and there is a fear that oxygen deficiency is formed in the vicinity of the interface of the oxide semiconductor film. However, in the transistor relating to one aspect of the disclosed invention, excessive oxygen is supplied to the insulating film in contact with the oxide semiconductor film, so that the formation of oxygen deficiency due to the escape of oxygen from the oxide semiconductor film can be suppressed.

Here, after the oxygen doping process is performed in the manufacturing process of the transistor, the amount of oxygen contained in the insulating film in contact with the oxide semiconductor film or the oxide semiconductor film is different from that of the respective layers in terms of the stoichiometric ratio. It is considered that the chemical potential of oxygen in each layer is different and the difference in chemical potential is close to or equilibrium in an equilibrium state due to heat treatment in the manufacturing process of the transistor. Therefore, it is more preferable to perform the heat treatment after the oxygen doping treatment to the insulating film. It is possible to diffuse oxygen excessively supplied to the insulating film by the heat treatment after the oxygen doping treatment to supply a sufficient amount of oxygen to the oxide semiconductor film. Hereinafter, the distribution of oxygen in an equilibrium state will be studied.

The equilibrium state at a certain temperature T and the pressure P means a state in which the free energy G of the electric field gemini is minimized and is represented by the following equation (1).

In equation (1), G ⁽¹⁾ , G ⁽²⁾ , and G ⁽³⁾ represent the free energy of the gibbs of each layer. In addition, N _a , N _b , and N _c represent the number of particles, and a, b, and c represent the types of particles. When the particle a moves from the i-th layer to the j-th layer by delta Na (j), the change of the free energy of the gibbles is expressed by the following formula (2).

Here, when? G is 0, that is, when the following formula (3) is established, the system becomes in an equilibrium state.

Since the particle number differential of free energy of Gibbs corresponds to the chemical potential, the chemical potential of the particles becomes equal in all layers in an equilibrium state.

Specifically, when oxygen is excessively contained in the insulating film in contact with the oxide semiconductor film as compared with the oxide semiconductor film, the chemical potential of oxygen is relatively small in the oxide semiconductor film, and the chemical potential in the insulating film is relatively large State.

When the entire system (here, the oxide semiconductor film and the insulating film in contact therewith) becomes sufficiently high in temperature by the heat treatment in the manufacturing process of the transistor, if the diffusion of atoms and interlayer between the atoms occurs, the chemical potentials become equal Oxygen transfer occurs as much as possible. That is, as the oxygen of the insulating film moves to the oxide semiconductor film, the chemical potential of the insulating film becomes smaller, and the chemical potential of the oxide semiconductor film becomes larger.

Therefore, the oxygen excessively supplied to the oxide semiconductor film by the oxygen doping process is diffused by supplying heat to the insulating film (including the interface) by making the chemical potential in the system equilibrium by the subsequent heat treatment. Therefore, when oxygen is sufficiently present in the oxide semiconductor film, the insulating film (including the interface) in contact with the oxide semiconductor film can also be excessively oxygenated.

Therefore, it is said that it is of great significance to supply enough oxygen in the oxide semiconductor film in an amount sufficient to compensate for the oxygen deficiency defect at the interface with the insulating film or the insulating film (an excessive amount of margin, which is sufficient to compensate for the oxygen deficiency defect) .

A transistor having an oxide semiconductor film containing excess oxygen by a dehydration or dehydrogenation treatment by heat treatment and an oxygen doping treatment for an insulating film has a problem that the amount of change in the threshold voltage of the transistor before and after the bias- A transistor having a stable electrical characteristic and a high reliability can be realized.

In addition, according to one aspect of the disclosed invention, various semiconductor devices having a transistor with high electrical characteristics and high reliability can be manufactured.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view for explaining one embodiment of a semiconductor device;
BACKGROUND OF THE INVENTION 1. Field of the Invention [0001]
3 is a view for explaining one embodiment of a semiconductor device;
4 is a view for explaining an embodiment of a manufacturing method of a semiconductor device.
5 is a view for explaining an embodiment of a method of manufacturing a semiconductor device.
6 is a view for explaining an embodiment of a manufacturing method of a semiconductor device;
7 is a cross-sectional view, a surface view, and a circuit diagram of the semiconductor device
8 is a view for explaining an embodiment of a semiconductor device.
9 is a view for explaining an embodiment of a semiconductor device.
10 is a view for explaining an embodiment of a semiconductor device;
11 is a view for explaining an embodiment of a semiconductor device.
12 is a view for explaining an aspect of a semiconductor device;
13 is a view showing an electronic apparatus;
14 is a view showing an electronic device.
Fig. 15 is a view showing a SIMS measurement result of an oxygen-doped silicon wafer; Fig.
16 is a view for explaining a sectional STEM image;
17 is a top view and a cross-sectional view of the plasma apparatus.

Hereinafter, embodiments of the invention disclosed in the present specification will be described in detail with reference to the drawings. It is to be understood by those skilled in the art, that the invention disclosed herein is not limited to the following description, and that various changes in form and detail may be made therein. The invention disclosed in this specification is not limited to the content of the embodiments described below.

It should be noted that ordinal numbers such as "first", "second", "third", etc. in the present specification are added to avoid confusion of components, and are not limited to numerals.

(Embodiment 1)

In this embodiment, a method of manufacturing a semiconductor device and a semiconductor device will be described with reference to Figs. 1 to 3. Fig.

<Configuration Example of Semiconductor Device>

Fig. 1 shows a configuration example of the transistor 120. Fig. 1 (A) is a plan view, and Figs. 1 (B) and 1 (C) are cross-sectional views related to A-B and C-D cross sections in Fig. 1 (A), respectively. 1 (A), a part of the constituent elements of the transistor 120 (for example, the gate insulating film 110 and the like) are omitted in order to avoid troublesomeness.

The transistor 120 shown in Fig. 1 includes an insulating film 102, a source electrode 104a, a drain electrode 104b, an oxide semiconductor film 108, a gate insulating film 110, a gate electrode 112, .

In the transistor 120 shown in Fig. 1, the insulating film 102 is an insulating film subjected to oxygen doping treatment. By performing the oxygen doping process on the insulating film 102, the transistor 120 having improved reliability is realized.

<Example of Fabrication Process of Semiconductor Device>

Hereinafter, an example of a manufacturing process of the semiconductor device shown in Fig. 1 will be described with reference to Fig.

First, an insulating film 102 is formed on a substrate 100 (see Fig. 2 (A)).

There is no particular limitation on the material of the substrate 100, but it is necessary to have at least heat resistance enough to withstand the subsequent heat treatment. For example, a glass substrate, a ceramic substrate, a quartz substrate, a sapphire substrate, or the like can be used as the substrate 100. It is also possible to use a single crystal semiconductor substrate such as silicon or silicon carbide, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, an SOI substrate, or the like. It's okay to do that.

Further, a flexible substrate may be used as the substrate 100. When a transistor is provided on a flexible substrate, a transistor may be directly formed on the flexible substrate. After forming a transistor on another substrate, the transistor may be peeled off and transferred to the flexible substrate. Further, in order to peel off the transistor and transfer it to the flexible substrate, a peeling layer may be formed between the other substrate and the transistor.

The insulating film 102 is an insulating film functioning as a base. Specifically, for the insulating film 102, silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, gallium oxide, a mixed material thereof, or the like may be used. The insulating film 102 may have a single-layer structure or a stacked-layer structure of an insulating film containing the above-described material.

The method for manufacturing the insulating film 102 is not particularly limited. For example, the insulating film 102 can be formed using a film forming method such as a plasma CVD method or a sputtering method. In addition, the sputtering method is very suitable in view of difficulty in mixing hydrogen and water.

It is particularly preferable to use an insulating material composed of the same kind of material as the oxide semiconductor film to be formed later in the insulating film 102. [ This is because such a material is good with the oxide semiconductor film and can be maintained in good interface with the oxide semiconductor film by using it for the insulating film 102. [ Here, the &quot; component of the same kind as the oxide semiconductor film &quot; means one or more elements selected from constituent elements of the oxide semiconductor film. For example, when the oxide semiconductor film is made of an In-Ga-Zn-O-based oxide semiconductor material, gallium oxide or the like is used as an insulating material made of the same kind of component.

When the insulating film 102 has a laminated structure, a film (hereinafter referred to as film a) composed of an insulating material composed of the same kind of components as the oxide semiconductor film and a film containing a material different from the constituent material of the film a , And the film b). Since the films a and b are stacked in this order from the side of the oxide semiconductor film, the charge is preferentially trapped at the interface between the films a and b (comparison with the interface between the oxide semiconductor film and the film a) The charge trapping of the semiconductor device can be sufficiently suppressed, thereby improving the reliability of the semiconductor device.

As the laminated structure, a laminated structure of a gallium oxide film and a silicon oxide film, a laminated structure of a gallium oxide film and a silicon nitride film, and the like can be applied.

Next, a treatment with oxygen 180 (also referred to as an oxygen doping treatment or an oxygen plasma doping treatment) is performed on the insulating film 102 (see FIG. 2 (B)). The oxygen (180) contains at least one of an oxygen radical, an oxygen atom and an oxygen ion. The insulating film 102 is subjected to oxygen doping treatment so that oxygen can be contained in the insulating film 102 and the oxide semiconductor film 108 is formed in the vicinity of the interface of the oxide semiconductor film 108 or in the oxide semiconductor film 108, And oxygen can be contained in the vicinity of the interface. In this case, the content of oxygen in the insulating film 102 is preferably in the range of more than the stoichiometric ratio of the insulating film 102, preferably more than 1 time of the stoichiometric ratio, up to 4 times (more than 1 time and less than 4 times) (More than 1 times and less than 2 times). Alternatively, the content of oxygen may be set to a value exceeding Y, preferably exceeding Y to 4Y, by setting the amount of oxygen in the case of single crystal to Y. Alternatively, the content of oxygen may be set to a value exceeding Z, preferably, exceeding Z to 4Z based on the amount Z of oxygen in the insulating film in the case where the oxygen doping process is not performed.

For example, in the case of using gallium oxide whose composition is represented by GaO _x (x> 0), since gallium oxide of single crystal is Ga ₂ O ₃ , x is more than 1.5 to 6 (that is, ) Is allowed. For example, in the case of using silicon oxide whose composition is represented by SiO _x (x> 0), when SiO ₂ (that is, O is twice Si), x is more than 2 and up to 8 To 8 times) is allowed. The oxygen excess region may be present in a part of the insulating film.

Further, in the oxide semiconductor film, oxygen is one of the main component materials. For this reason, it is difficult to accurately guess the oxygen concentration in the oxide semiconductor film by a method such as SIMS (Secondary Ion Mass Spectroscopy). That is, it can be said that it is difficult to determine whether or not oxygen is intentionally added to the oxide semiconductor film.

By the way, it is known that isotopes such as ¹⁷ O and ¹⁸ O exist in oxygen, and the existence ratio in the natural world is about 0.038% and 0.2% of the total oxygen atoms, respectively. That is, since the concentration of these isotopes in the oxide semiconductor film can be estimated by a method such as SIMS, it is possible to estimate the oxygen concentration in the oxide semiconductor film more precisely by measuring the concentration thereof . Therefore, by measuring the concentrations thereof, it may be determined whether or not oxygen is intentionally added to the oxide semiconductor film.

For example, if the concentration of ¹⁸ O is used as a reference, the concentration D1 ( ¹⁸ O) of oxygen isotope in the region where oxygen is added and the concentration D1 ( ¹⁸ O) It can be said that D1 ( ¹⁸ O)> D2 ( ¹⁸ O) holds between the concentration D2 ( ¹⁸ O) of the isotope of oxygen.

It is also preferable that at least a part of the oxygen 180 added to the insulating film has an unbonded hand in the oxide semiconductor after being supplied to the oxide semiconductor. The presence of unbound hands allows hydrogen to be immobilized (non-covalent ionization) by bonding with hydrogen that may remain in the film.

The oxygen 180 described above can be generated by a plasma generating apparatus or an ozone generating apparatus. More specifically, oxygen 180 is generated using, for example, an apparatus capable of performing an etching process on a semiconductor device or an apparatus capable of performing ashing with respect to a resist mask to form an insulating film 102, Can be processed.

Further, in order to more suitably add oxygen, it is preferable to apply an electrical bias to the substrate.

Next, a conductive film for forming a source electrode and a drain electrode (including wiring formed in the same layer) is formed on the insulating film 102, and the conductive film is processed to form the source electrode 104a and the drain Thereby forming the electrode 104b (see Fig. 2 (C)). The channel length L of the transistor is determined by the distance between the end of the source electrode 104a and the end of the drain electrode 104b formed here.

As the conductive film used for the source electrode 104a and the drain electrode 104b, for example, a metal film containing an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W, Metal nitride films (titanium nitride film, molybdenum nitride film, tungsten nitride film), and the like. Further, a refractory metal film of Ti, Mo, W or the like, or a metal nitride film (a titanium nitride film, a molybdenum nitride film, or a tungsten nitride film) is deposited on one or both sides of a lower side or an upper side of a metal film of Al, May be used.

The conductive film used for the source electrode 104a and the drain electrode 104b may be formed of a conductive metal oxide. As the conductive metal oxide, it is possible to use those containing silicon oxide in indium oxide, tin oxide, zinc oxide, indium oxide tin oxide mixed oxide (abbreviated as ITO), indium oxide oxide mixed oxide or metal oxide material thereof.

The conductive film can be processed by etching using a resist mask. Ultraviolet light, KrF laser light, ArF laser light, or the like may be used for exposure in forming a resist mask used for the etching.

In the case of performing exposure with a channel length L of less than 25 nm, exposure using a resist mask, for example, using ultraviolet light having a very short wavelength of several nm to several tens nm, . Exposure by ultraviolet rays has a high resolution and a large depth of focus. Therefore, the channel length L of the transistor to be formed later can be made finer, and the operation speed of the circuit can be increased.

It is also possible to perform an etching process using a resist mask formed by a so-called multi-gradation mask. The resist mask formed by using the multi-gradation mask has a shape with a plurality of film thicknesses and can be further deformed by ashing, so that the resist mask can be used for a plurality of etching processes for processing into different patterns. Therefore, a resist mask corresponding to at least two different patterns can be formed by a single multi-gradation mask. That is, the process can be simplified.

Next, an oxide semiconductor film which is in contact with the source electrode 104a and the drain electrode 104b is formed on the insulating film 102 and the oxide semiconductor film is processed to form an island-shaped oxide semiconductor film 106 (D)).

It is preferable that the oxide semiconductor film is manufactured by a method in which hydrogen, water, or the like is less likely to be mixed. For example, it can be produced by sputtering or the like. The thickness of the oxide semiconductor film is preferably 3 nm or more and 30 nm or less. This is because when the oxide semiconductor film is made too thick (for example, the film thickness is 50 nm or more), the transistor may become normal-lean.

As a material used for the oxide semiconductor film, for example, there are an oxide semiconductor material containing indium, an oxide semiconductor material containing indium and gallium, and the like.

As the material used for the oxide semiconductor film, a material of In-Sn-Ga-Zn-O which is a quaternary metal oxide, a material of In-Ga-Zn-O which is a ternary metal oxide, a material of InSn-Zn-O Al-Zn-O based materials, Sn-Al-Zn-O based materials, and Sn-Al-Zn-O based materials, Zn-O based materials, Sn-Mg-O based materials, In-Zn-O based materials, In-Zn-O based materials, Al-Zn-O based materials, Zn- -Mg-O-based materials, In-Ga-O-based materials, In-O-based materials which are one-element metal oxides, Sn-O-based materials, and Zn-O-based materials. It is also possible to include silicon oxide in the above-mentioned material. Here, for example, the In-Ga-Zn-O-based material means an oxide film containing indium (In), gallium (Ga), and zinc (Zn), and its composition ratio is not particularly limited. In addition, it may contain elements other than In, Ga and Zn.

Further, the oxide semiconductor film can be a thin film made of a material represented by the formula InMO ₃ (ZnO) _m (m> 0). Here, M represents one or a plurality of metal elements selected from Ga, Al, Mn and Co. For example, Ga, Ga and Al, Ga and Mn, or Ga and Co can be used as M.

In this embodiment mode, an oxide semiconductor film is formed by a sputtering method using an In-Ga-Zn-O-based oxide target.

An oxide target of In ₂ O ₃ : Ga ₂ O ₃ : ZnO = 1: 1: 1 [mole ratio] can be used as an In-Ga-Zn-O oxide target, for example. The material and composition of the target need not be limited to those described above. For example, an oxide target having a composition ratio of In ₂ O ₃ : Ga ₂ O ₃ : ZnO = 1: 1: 2 [molar ratio] may be used.

When an In-Zn-O-based material is used as the oxide semiconductor, the composition ratio of the target to be used is In: Zn = 50: 1 to 1: 2 (In ₂ O ₃ : ZnO = (In ₂ O ₃ : ZnO = 10: 1 to 2: 1 in terms of mole ratio), more preferably In: Zn = 20: 1 to 1: Zn = 1.5: 1 to 15: 1 (In ₂ O ₃ : ZnO = 3: 4 to 15: 2 in terms of molar ratio). For example, the target used for forming the In-Zn-O-based oxide semiconductor is set to be Z> 1.5X + Y when the atomic ratio is In: Zn: O = X: Y:

The filling rate of the oxide target is 90% or more and 100% or less, preferably 95% or more and 99.9% or less. This is because, by using the metal oxide target having a high filling rate, the deposited oxide semiconductor film can be formed into a dense film.

The atmosphere of the film formation may be an atmosphere of rare gas (typically argon) under an oxygen atmosphere or a mixed atmosphere of rare gas and oxygen. Further, in order to prevent the incorporation of hydrogen, water, a compound having a hydroxyl group, a hydride or the like into the oxide semiconductor film, a high purity gas in which impurities including hydrogen atoms such as hydrogen, water, a compound having a hydroxyl group, It is preferable to use an atmosphere which is used.

More specifically, for example, the oxide semiconductor film can be formed as follows.

First, the substrate 100 is held in a film forming chamber maintained in a reduced pressure state, and the substrate temperature is set to be not less than 100 ° C and not more than 600 ° C, preferably not less than 200 ° C and not more than 400 ° C. This is because impurity concentration contained in the oxide semiconductor film can be reduced by performing deposition in a state where the substrate 100 is heated. This is because damage caused by sputtering can be reduced.

Next, a high-purity gas, from which impurities including hydrogen atoms such as hydrogen and water are sufficiently removed, is introduced while removing residual moisture in the deposition chamber, and an oxide semiconductor film is formed on the substrate 100 using the target. In order to remove residual moisture in the film deposition chamber, it is preferable to use an adsorption type vacuum pump such as a cryo pump, an ion pump, or a titanium sublimation pump as an evacuation means. The exhaust means may be a turbo molecular pump to which a cold trap is added. Since the film forming chamber exhausted using the cryopump is, for example, a hydrogen molecule or a compound containing a hydrogen atom such as water (H ₂ O) (more preferably a compound containing a carbon atom) , The concentration of the impurity contained in the oxide semiconductor film formed in the deposition chamber can be reduced.

As an example of the film forming conditions, the atmosphere between the substrate and the target is 100 mm, the pressure is 0.6 Pa, the direct current (DC) power is 0.5 kW, and the film forming atmosphere is oxygen (oxygen flow rate ratio: 100%) atmosphere. In addition, the use of a pulsed direct current power source is preferable because the generation of powdery materials (also referred to as particles and dust) at the time of film formation can be reduced and the film thickness distribution becomes uniform.

The oxide semiconductor film can be formed by forming a mask having a desired shape on the oxide semiconductor film, and then etching the oxide semiconductor film. The above-described mask can be formed by a method such as photolithography. Alternatively, a mask may be formed by a method such as an inkjet method.

The etching of the oxide semiconductor film may be either dry etching or wet etching. Of course, these may be used in combination.

Thereafter, the oxide semiconductor film 106 is subjected to heat treatment to form a highly-purified oxide semiconductor film 108 (see FIG. 2 (E)). By this heat treatment, hydrogen (including water and hydroxyl) in the oxide semiconductor film 106 is removed, and the structure of the oxide semiconductor film is adjusted, whereby the defect level in the energy gap can be reduced. The temperature of the heat treatment is set to 250 deg. C or more and 650 deg. C or less, preferably 450 deg. C or more and 600 deg. C or less, or less than the distortion point of the substrate.

The heat treatment can be carried out under a nitrogen atmosphere at 450 占 폚 for 1 hour by introducing the article to an electric furnace using, for example, a resistance heating element or the like. During this time, the oxide semiconductor film 106 is not in contact with the atmosphere, and water or hydrogen is not mixed.

The heat treatment apparatus is not limited to the electric furnace but may be an apparatus for heating the object to be treated by thermal conduction from a medium such as heated gas or by thermal radiation. For example, an RTA (Rapid Thermal Anneal) device such as a LRTA (Lamp Rapid Thermal Anneal) device or a GRTA (Gas Rapid Thermal Anneal) device can be used. The LRTA apparatus is a device for heating an object to be processed by radiating light (electromagnetic waves) emitted from a lamp such as a halogen lamp, a metal halide lamp, a xenon arc lamp, a carbon arc lamp, a high pressure sodium lamp, or a high pressure mercury lamp. The GRTA apparatus is a device for performing heat treatment using a high-temperature gas.

For example, the object to be treated may be charged into an inert gas atmosphere heated by the above heat treatment, heated for several minutes, and then subjected to a GRTA treatment for taking out the object to be treated from the inert gas atmosphere. By using the GRTA process, high-temperature heat treatment can be performed in a short time. Further, even a temperature condition exceeding the heat-resistant temperature of the object to be processed can be applied. During the treatment, the inert gas may be converted into a gas containing oxygen. This is because heat treatment in an atmosphere containing oxygen can reduce the defect level in the energy gap due to oxygen deficiency.

The inert gas atmosphere is preferably an atmosphere containing nitrogen or a rare gas (helium, neon, argon, etc.) as a main component and an atmosphere containing no water, hydrogen or the like. For example, the purity of a rare gas such as nitrogen, helium, neon or argon introduced into a heat treatment apparatus is preferably 6 N (99.9999%) or more, preferably 7 N (99.99999% Or less, preferably 0.1 ppm or less).

In any case, impurities are reduced by the heat treatment to form an oxide semiconductor film extremely close to the i-type (intrinsic semiconductor) or the i-type, and a transistor having extremely excellent characteristics can be realized.

However, since the heat treatment described above has the effect of removing hydrogen or water, the heat treatment may be referred to as dehydration treatment, dehydrogenation treatment, or the like. The dehydration treatment and dehydrogenation treatment may be performed at, for example, the timing before the oxide semiconductor film is processed into an island shape. Further, the dehydration treatment and the dehydrogenation treatment may be performed not only once but also several times.

Next, a gate insulating film 110 which is in contact with the oxide semiconductor film 108 and covers the source electrode 104a and the drain electrode 104b is formed (see FIG. 2 (F)).

The gate insulating film 110 can be formed in the same manner as the insulating film 102. That is, the gate insulating film 110 may be formed using silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, gallium oxide, a mixed material thereof, or the like. However, considering that hafnium oxide, tantalum oxide, yttrium oxide, hafnium silicate (HfSi _x O _y (x> 0, y> 0)) and nitrogen added hafnium silicate (HfSi _x O _{y (x> 0, y>} 0)), may be a nitrogen employ a hafnium aluminate _{(HfAl x O y (x>} 0, y> 0)), a high dielectric constant, such material is added.

Further, a lamination structure may be adopted similarly to the insulating film 102. [ In this case, when a film (hereinafter referred to as film a) composed of an insulating material made of a component similar to that of the oxide semiconductor film and a film containing a material different from the component material of the film a (hereinafter referred to as film b) good. Since the films a and b are stacked in this order from the side of the oxide semiconductor film, the charge is preferentially trapped at the interface between the films a and b (comparison with the interface between the oxide semiconductor film and the film a) The charge trapping of the semiconductor device can be sufficiently suppressed, thereby improving the reliability of the semiconductor device.

As the laminated structure, a laminated structure of a gallium oxide film and a silicon oxide film, a laminated structure of a gallium oxide film and a silicon nitride film, and the like can be applied.

After the above-described formation of the gate insulating film 110, it is preferable to perform heat treatment. The temperature of the heat treatment is set to 250 deg. C or more and 700 deg. C or less, preferably 450 deg. C or more and 600 deg. C or less, or less than the distortion point of the substrate.

The heat treatment is carried out at a moisture content of 20 ppm (in terms of dew point) of not more than 1 ppm (in terms of dew point) when measured using nitrogen, oxygen, super dry air (a CRDS (Cavity Ring Down Laser Spectroscopy) (Such as argon, helium, or the like), but the atmosphere such as nitrogen, oxygen, super-dry air, or rare gas may not contain water, hydrogen, or the like . The purity of nitrogen, oxygen, or rare gas to be introduced into the heat treatment apparatus is preferably 6 N (99.9999%) or more (that is, the impurity concentration is 1 ppm or less) and more preferably 7 N (99.99999% Is not more than 0.1 ppm).

In the above-described heat treatment according to the present embodiment, the oxide semiconductor film 108 and the gate insulating film 110 are heated in contact with each other. Therefore, it is also possible to supply the oxide semiconductor film 108 with oxygen which may be reduced by the above dehydration (or dehydrogenation) treatment. In this sense, the heat treatment may be referred to as addition (additive extinguishing).

The timing of the heat treatment for the purpose of addition is not particularly limited as long as the oxide semiconductor film 108 is formed. For example, after the formation of the gate electrode, a heat treatment for the purpose of addition may be performed. Alternatively, a heat treatment for the purpose of addition may be performed subsequent to the heat treatment for dehydration or the like, a heat treatment for the purpose of adding heat to the heat treatment for dehydration or the like may be used as well, A heat treatment for the purpose of dehydration or the like may be combined with the intended heat treatment.

As described above, by applying heat treatment for dehydration or the like and heat treatment for oxygen doping treatment or addition treatment, the oxide semiconductor film 108 can be highly purified so as not to contain impurities as much as possible. In the high-purity oxide semiconductor film 108, the carrier derived from the donor is extremely small (close to zero).

Thereafter, a gate electrode 112 is formed (see FIG. 2 (G)). The gate electrode 112 can be formed using a metal material such as molybdenum, titanium, tantalum, tungsten, aluminum, copper, neodymium, or scandium or an alloy material containing these as main components. The gate electrode 112 may have a single-layer structure or a stacked-layer structure.

After forming the gate electrode 112, an insulating film may be formed. The insulating film can be formed using, for example, silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, gallium oxide, a mixed material thereof, or the like. Particularly, when a silicon nitride film is used as the insulating film, it is possible to prevent the added oxygen from being released to the outside, and to effectively suppress the incorporation of hydrogen or the like from the outside into the oxide semiconductor film 108, Do. Wiring connected to the source electrode 104a, the drain electrode 104b, the gate electrode 112, or the like may be formed.

The transistor 120 is formed by the above process.

In addition, the above description is directed to an example in which the entire surface of the insulating film 102 is subjected to the oxygen doping treatment, but an embodiment of the disclosed invention is not limited thereto. For example, after the source electrode 104a and the drain electrode 104b are formed, an oxygen doping process may be performed. In this case, a region having a high oxygen concentration and a region having a low oxygen concentration are formed in the insulating film 102.

<Modification of Semiconductor Device>

3 (A) to 3 (D) show cross-sectional views of a transistor 130, a transistor 140, a transistor 150, and a transistor 160 as a modification of the transistor 120 shown in Fig.

The transistor 130 shown in Fig. 3A includes an insulating film 102, a source electrode 104a, a drain electrode 104b, an oxide semiconductor film 108, a gate insulating film 110, and a gate electrode 112 The transistor 120 is commonly used. The difference between the transistor 130 and the transistor 120 is the presence or absence of the insulating film 114 covering the above-described components. That is, the transistor 130 has the insulating film 114. The other components are the same as those of the transistor 120 shown in Fig. 1, so that the description related to Fig. 1 can be referred to for details.

The insulating film 114 can be formed using silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, gallium oxide, a mixed material thereof, or the like as described with reference to FIG. 2 (G). Particularly, when a silicon nitride film is used as the insulating film, it is possible to prevent the added oxygen from being released to the outside, and to effectively suppress the incorporation of hydrogen or the like from the outside into the oxide semiconductor film 108, Do.

The transistor 140 shown in FIG. 3 (B) is common to the transistor 120 shown in FIG. 1 in that it includes the above-described respective components. The difference between the transistor 140 and the transistor 120 is a stacking order of the source electrode 104a and the drain electrode 104b and the oxide semiconductor film 108. [ That is, in the transistor 120, the source electrode 104a and the drain electrode 104b are formed first, whereas in the transistor 140, the oxide semiconductor film 108 is formed first. Other components are as shown in Fig. Further, the transistor 130 may have an insulating film 114 as well.

The transistor 150 shown in FIG. 3 (C) is common to the transistor 120 shown in FIG. 1 in that it includes the above-described respective components. The difference between the transistor 150 and the transistor 120 lies in the insulating film on the substrate 100 side. That is, the transistor 150 has a laminated structure of the insulating film 102a and the insulating film 102b. Other components are the same as in Fig. 3 (B).

As described above, since the insulating film 102a and the insulating film 102b have a laminated structure, the charge is preferentially trapped at the interface between the insulating film 102a and the insulating film 102b. Therefore, the charge trapping at the interface of the oxide semiconductor film 108 The reliability of the semiconductor device can be improved.

It is preferable that the insulating film 102b is a film made of an insulating material composed of the same kind of components as the oxide semiconductor film 108 and the insulating film 102a is a film containing a material different from the component material of the insulating film 102b Do. For example, when the oxide semiconductor film 108 is made of an In-Ga-Zn-O-based oxide semiconductor material, gallium oxide or the like is used as an insulating material made of the same kind of component. In this case, a lamination structure of a gallium oxide film and a silicon oxide film, a lamination structure of a gallium oxide film and a silicon nitride film, and the like can be applied.

The transistor 160 shown in FIG. 3 (D) is common to the transistor 120 shown in FIG. 1 in that it includes the above-described respective components. The difference between the transistor 160 and the transistor 120 is in the insulating film on the substrate 100 side and the gate insulating film. That is, the transistor 160 has a laminated structure of an insulating film 102a and an insulating film 102b, and further includes a gate insulating film 110a and a gate insulating film 110b. Other components are as shown in Fig.

As described above, the laminated structure of the insulating film 102a and the insulating film 102b and the laminated structure of the gate insulating film 110a and the gate insulating film 110b makes it possible to transfer the insulating film 102a and the insulating film 102b, The charge trapping at the interface of the oxide semiconductor film 108 can be sufficiently suppressed and the reliability of the semiconductor device can be improved because it is preferentially trapped at the interface between the gate insulating film 110a and the gate insulating film 110b.

The insulating film 102b and the gate insulating film 110a (that is, the insulating film in contact with the oxide semiconductor film 108) are films made of an insulating material made of the same kind of components as those of the oxide semiconductor film 108, Or the gate insulating film 110b is preferably a film containing a material different from the material of the insulating film 102b or the gate insulating film 110a. For example, when the oxide semiconductor film 108 is made of an In-Ga-Zn-O-based oxide semiconductor material, gallium oxide or the like is used as an insulating material made of the same kind of component. In this case, a lamination structure of a gallium oxide film and a silicon oxide film, a lamination structure of a gallium oxide film and a silicon nitride film, and the like can be applied.

The transistor according to the present embodiment is a semiconductor device in which impurities including hydrogen atoms such as hydrogen, water, a hydroxyl group, or a hydride (also referred to as a hydrogen compound) are excluded from the oxide semiconductor by heat treatment, An oxide semiconductor film having high purity and I-type (intrinsic) conductivity is used. Such a transistor including an oxide semiconductor film of high purity is electrically stable because variations in electric characteristics such as a threshold voltage are suppressed.

When an oxide semiconductor material containing In is used as the oxide semiconductor film, the bonding force between In and oxygen is relatively weak. Therefore, when a material having stronger bonding force with oxygen than silicon is contained in the insulating film in contact with the oxide semiconductor film , Oxygen in the oxide semiconductor film is removed by the heat treatment, and oxygen deficiency may be formed in the vicinity of the interface of the oxide semiconductor film. However, in the transistor relating to one aspect of the disclosed invention, excessive oxygen is supplied to the insulating film in contact with the oxide semiconductor film, so that the formation of oxygen deficiency due to the escape of oxygen from the oxide semiconductor film can be suppressed.

Particularly, by increasing the content of oxygen in the oxide semiconductor film by the oxygen doping treatment, deterioration due to electrical bias stress and thermal stress can be suppressed, and deterioration due to light can be reduced.

As described above, according to one aspect of the disclosed invention, it is possible to provide a transistor with excellent reliability.

The configurations, methods, and the like described in this embodiment can be appropriately combined with the configurations, methods, and the like described in the other embodiments.

(Embodiment 2)

In this embodiment, another example of a method of manufacturing a semiconductor device will be described with reference to Figs. 4 and 5. Fig.

<Configuration Example of Semiconductor Device>

The structure of the semiconductor device manufactured by the manufacturing method of this embodiment is the same as that of the transistor 120 of the previous embodiment. That is, the insulating film 102, the source electrode 104a, the drain electrode 104b, the oxide semiconductor film 108, the gate insulating film 110, and the gate electrode 112 on the substrate 100 (see FIG. 1) .

As described in the foregoing embodiment, in the transistor 120, the insulating film 102 is an insulating film subjected to oxygen doping treatment. In addition, in the present embodiment, the oxide semiconductor film 108 and the gate insulating film 110 are also subjected to oxygen doping treatment. By this oxygen doping process, the transistor 120 having higher reliability is realized. In addition, a transistor whose configuration has been changed can be fabricated similarly to the previous embodiment (see Figs. 3 (A) to 3 (D)).

<Example of Fabrication Process of Semiconductor Device>

An example of a manufacturing process of the above-described semiconductor device will be described with reference to FIGS. 4 and 5. FIG.

First, an insulating film 102 is formed on a substrate 100 (see Fig. 4 (A)).

There is no particular limitation on the material of the substrate 100, but it is necessary to have at least heat resistance enough to withstand the subsequent heat treatment. For example, a glass substrate, a ceramic substrate, a quartz substrate, a sapphire substrate, or the like can be used as the substrate 100. It is also possible to use a single crystal semiconductor substrate such as silicon or silicon carbide, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, an SOI substrate, or the like. It's okay to do that.

Further, a flexible substrate may be used as the substrate 100. When a transistor is provided on a flexible substrate, a transistor may be directly formed on the flexible substrate, a transistor may be formed on another substrate, and then the substrate may be peeled off and replaced with a flexible substrate. Further, in order to peel off the transistor and transfer it to the flexible substrate, a peeling layer may be formed between the other substrate and the transistor.

The insulating film 102 is an insulating film functioning as a base. Specifically, for the insulating film 102, silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, gallium oxide, a mixed material thereof, or the like may be used. The insulating film 102 may have a single-layer structure or a stacked-layer structure of an insulating film containing the above-described material.

The method for manufacturing the insulating film 102 is not particularly limited. For example, the insulating film 102 can be formed using a film forming method such as a plasma CVD method or a sputtering method. In addition, the sputtering method is very suitable in view of difficulty in mixing hydrogen and water.

It is particularly preferable to use an insulating material composed of the same kind of material as the oxide semiconductor film to be formed later in the insulating film 102. [ This is because such a material is good with the oxide semiconductor film and can be maintained in good interface with the oxide semiconductor film by using it for the insulating film 102. [ Here, the &quot; component of the same kind as the oxide semiconductor film &quot; means one or more elements selected from constituent elements of the oxide semiconductor film. For example, when the oxide semiconductor film is made of an In-Ga-Zn-O-based oxide semiconductor material, gallium oxide or the like is used as an insulating material made of the same kind of component.

When the insulating film 102 has a laminated structure, a film (hereinafter referred to as film a) composed of an insulating material composed of the same kind of components as the oxide semiconductor film and a film containing a material different from the constituent material of the film a , And the film b). Since the films a and b are stacked in this order from the side of the oxide semiconductor film, the charge is preferentially trapped at the interface between the films a and b (comparison with the interface between the oxide semiconductor film and the film a) The charge trapping of the semiconductor device can be sufficiently suppressed, thereby improving the reliability of the semiconductor device.

As the laminated structure, a laminated structure of a gallium oxide film and a silicon oxide film, a laminated structure of a gallium oxide film and a silicon nitride film, and the like can be applied.

Next, the insulating film 102 is subjected to a treatment with oxygen 180a (also referred to as an oxygen doping treatment or an oxygen plasma doping treatment) (see FIG. 4 (B)). The oxygen 180a contains at least one of an oxygen radical, an oxygen atom and an oxygen ion. The insulating film 102 is subjected to oxygen doping treatment so that oxygen can be contained in the insulating film 102 and the oxide semiconductor film 108 is formed in the vicinity of the interface of the oxide semiconductor film 108 or in the oxide semiconductor film 108, And oxygen can be contained in the vicinity of the interface. In this case, the content of oxygen in the insulating film 102 is preferably in the range of more than the stoichiometric ratio of the insulating film 102, preferably more than 1 time of the stoichiometric ratio, up to 4 times (more than 1 time and less than 4 times) (More than 1 times and less than 2 times). Alternatively, the content of oxygen may be set to a value exceeding Y, preferably exceeding Y to 4Y, by setting the amount of oxygen in the case of single crystal to Y. Alternatively, the content of oxygen may be set to a value exceeding Z, preferably, exceeding Z to 4Z based on the amount Z of oxygen in the insulating film in the case where the oxygen doping process is not performed.

For example, in the case of using gallium oxide whose composition is represented by GaO _x (x> 0), since gallium oxide of single crystal is Ga ₂ O ₃ , x is more than 1.5 to 6 (that is, ) Is allowed. The oxygen excess region may be present in a part of the insulating film. Also, for example, in the case of using silicon oxide which is the composition represented by SiOx (x> 0), SiO 2 (namely O is twice that of Si), x is beyond the 2 to 8 (i.e. twice the Si Up to 8 times) are allowed. The oxygen excess region may be present in a part of the insulating film (including the interface).

It is also preferable that at least a part of the oxygen 180a added to the insulating film has an unbonded hand in the oxide semiconductor after being supplied to the oxide semiconductor. The presence of unbound hands allows hydrogen to be immobilized (non-covalent ionization) by bonding with hydrogen that may remain in the film.

The oxygen 180a described above can be generated by a plasma generating apparatus or an ozone generating apparatus. More specifically, for example, oxygen 180a is generated by using an apparatus capable of performing an etching process on a semiconductor device or an apparatus capable of performing ashing with respect to a resist mask, Can be processed.

Further, in order to more suitably add oxygen, it is preferable to apply an electrical bias to the substrate.

Next, a conductive film for forming a source electrode and a drain electrode (including wiring formed in the same layer) is formed on the insulating film 102, and the conductive film is processed to form the source electrode 104a and the drain Thereby forming the electrode 104b (see Fig. 4 (C)). The channel length L of the transistor is determined by the distance between the end of the source electrode 104a and the end of the drain electrode 104b formed here.

As the conductive film used for the source electrode 104a and the drain electrode 104b, for example, a metal film containing an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W, Metal nitride films (titanium nitride film, molybdenum nitride film, tungsten nitride film), and the like. Further, a refractory metal film of Ti, Mo, W or the like, or a metal nitride film (a titanium nitride film, a molybdenum nitride film, or a tungsten nitride film) is deposited on one or both sides of a lower side or an upper side of a metal film of Al, May be used.

The conductive film used for the source electrode 104a and the drain electrode 104b may be formed of a conductive metal oxide. As the conductive metal oxide, it is possible to use those containing silicon oxide in indium oxide, tin oxide, zinc oxide, indium oxide tin oxide mixed oxide (abbreviated as ITO), indium oxide oxide mixed oxide or metal oxide material thereof.

The conductive film can be processed by etching using a resist mask. Ultraviolet light, KrF laser light, ArF laser light, or the like may be used for exposure in forming a resist mask used for the etching.

In the case of performing exposure with a channel length L of less than 25 nm, exposure using a resist mask, for example, using ultraviolet light having a very short wavelength of several nm to several tens nm, . Exposure by ultraviolet rays has a high resolution and a large depth of focus. Therefore, the channel length L of the transistor to be formed later can be made finer, and the operation speed of the circuit can be increased.

It is also possible to perform an etching process using a resist mask formed by a so-called multi-gradation mask. The resist mask formed by using the multi-gradation mask has a shape with a plurality of film thicknesses and can be further deformed by ashing, so that the resist mask can be used for a plurality of etching processes for processing into different patterns. Therefore, a resist mask corresponding to at least two different patterns can be formed by a single multi-gradation mask. That is, the process can be simplified.

Next, an oxide semiconductor film which is in contact with the source electrode 104a and the drain electrode 104b is formed on the insulating film 102 and the oxide semiconductor film is processed to form an island-shaped oxide semiconductor film 106 (D)).

It is preferable that the oxide semiconductor film is manufactured by a method in which hydrogen, water, or the like is less likely to be mixed. For example, it can be produced by sputtering or the like. The thickness of the oxide semiconductor film is preferably 3 nm or more and 30 nm or less. This is because when the oxide semiconductor film is made too thick (for example, the film thickness is 50 nm or more), the transistor may become normal-lean.

Examples of the material used for the oxide semiconductor film include In-Sn-Zn-O-based materials which are quaternary metal oxides, In-Ga-Zn-O-based materials which are ternary metal oxides, Al-Zn-O based materials, Sn-Al-Zn-O based materials, and Sn-Al-Zn-O based materials, Zn-O based materials, Sn-Mg-O based materials, In-Zn-O based materials, In-Zn-O based materials, Al-Zn-O based materials, Zn- -Mg-O-based materials, In-Ga-O-based materials, In-O-based materials that are single-unit metal oxides, Sn-O-based materials, and Zn-O-based materials. It is also possible to include silicon oxide in the above-mentioned material. Here, for example, the In-Ga-Zn-O-based material means an oxide film containing indium (In), gallium (Ga), and zinc (Zn), and its composition ratio is not particularly limited. In addition, it may contain elements other than In, Ga and Zn.

Further, the oxide semiconductor film can be a thin film made of a material represented by the formula InMO ₃ (ZnO) _m (m> 0, not a natural number). Here, M represents one or a plurality of metal elements selected from Ga, Al, Mn and Co. For example, Ga, Ga and Al, Ga and Mn, or Ga and Co can be used as M.

In this embodiment mode, an oxide semiconductor film is formed by a sputtering method using an In-Ga-Zn-O-based oxide target.

An oxide target of In ₂ O ₃ : Ga ₂ O ₃ : ZnO = 1: 1: 1 [mole ratio] can be used as an In-Ga-Zn-O oxide target, for example. The material and composition of the target need not be limited to those described above. For example, an oxide target having a composition ratio of In ₂ O ₃ : Ga ₂ O ₃ : ZnO = 1: 1: 2 [molar ratio] may be used.

The filling rate of the oxide target is 90% or more and 100% or less, preferably 95% or more and 99.9% or less. This is because, by using the metal oxide target having a high filling rate, the deposited oxide semiconductor film can be formed into a dense film.

The atmosphere of the film formation may be an atmosphere of rare gas (typically argon) under an oxygen atmosphere or a mixed atmosphere of rare gas and oxygen. Further, in order to prevent the incorporation of hydrogen, water, a compound having a hydroxyl group, a hydride or the like into the oxide semiconductor film, a high purity gas in which impurities including hydrogen atoms such as hydrogen, water, a compound having a hydroxyl group, It is preferable to use an atmosphere which is used.

Further, at the time of forming the oxide semiconductor film, oxygen in the insulating film 102 may be supplied to the oxide semiconductor film. Thus, by adding oxygen to the insulating film 102, it is possible to produce an oxide semiconductor film to which oxygen is sufficiently added.

More specifically, for example, the oxide semiconductor film can be formed as follows.

First, the substrate 100 is held in a film forming chamber maintained in a reduced pressure state, and the substrate temperature is set to be not less than 100 ° C and not more than 600 ° C, preferably not less than 200 ° C and not more than 400 ° C. This is because impurity concentration contained in the oxide semiconductor film can be reduced by performing deposition in a state where the substrate 100 is heated. This is because damage caused by sputtering can be reduced.

Next, a high-purity gas, from which impurities including hydrogen atoms such as hydrogen and water are sufficiently removed, is introduced while removing residual moisture in the deposition chamber, and an oxide semiconductor film is formed on the substrate 100 using the target. In order to remove residual moisture in the film deposition chamber, it is preferable to use an adsorption type vacuum pump such as a cryo pump, an ion pump, or a titanium sublimation pump as an evacuation means. The exhaust means may be a turbo molecular pump to which a cold trap is added. Since the film forming chamber exhausted using the cryopump is, for example, a hydrogen molecule or a compound containing a hydrogen atom such as water (H ₂ O) (more preferably a compound containing a carbon atom) , The concentration of the impurity contained in the oxide semiconductor film formed in the deposition chamber can be reduced.

As an example of the film forming conditions, the atmosphere between the substrate and the target is 100 mm, the pressure is 0.6 Pa, the direct current (DC) power is 0.5 kW, and the film forming atmosphere is oxygen (oxygen flow rate ratio: 100%) atmosphere. In addition, the use of a pulsed direct current power source is preferable because the generation of powdery materials (also referred to as particles and dust) at the time of film formation can be reduced and the film thickness distribution becomes uniform.

The oxide semiconductor film can be formed by forming a mask having a desired shape on the oxide semiconductor film, and then etching the oxide semiconductor film. The above-described mask can be formed by a method such as photolithography. Alternatively, a mask may be formed by a method such as an inkjet method.

The etching of the oxide semiconductor film may be either dry etching or wet etching. Of course, these may be used in combination.

Thereafter, the oxide semiconductor film 106 is subjected to heat treatment to form a highly purified oxide semiconductor film 108 (see FIG. 4 (E)). By this heat treatment, hydrogen (including water and hydroxyl) in the oxide semiconductor film 106 is removed, and the structure of the oxide semiconductor film is adjusted, whereby the defect level in the energy gap can be reduced. In addition, oxygen in the insulating film 102 may be supplied to the oxide semiconductor film by this heat treatment. The temperature of the heat treatment is set to 250 deg. C or more and 650 deg. C or less, preferably 450 deg. C or more and 600 deg. C or less, or less than the distortion point of the substrate.

The heat treatment can be carried out under a nitrogen atmosphere at 450 占 폚 for 1 hour by introducing the article to an electric furnace using, for example, a resistance heating element or the like. During this time, the oxide semiconductor film 106 is not in contact with the atmosphere, and water or hydrogen is not mixed.

The heat treatment apparatus is not limited to the electric furnace but may be an apparatus for heating the object to be treated by thermal conduction from a medium such as heated gas or by thermal radiation. For example, an RTA (Rapid Thermal Anneal) device such as a GRTA (Gas Rapid Thermal Anneal) device or an LRTA (Lamp Rapid Thermal Anneal) device can be used. The LRTA apparatus is a device for heating an object to be processed by radiating light (electromagnetic waves) emitted from a lamp such as a halogen lamp, a metal halide lamp, a xenon arc lamp, a carbon arc lamp, a high pressure sodium lamp, or a high pressure mercury lamp. The GRTA apparatus is a device for performing heat treatment using a high-temperature gas.

For example, the object to be treated may be charged into an inert gas atmosphere heated by the above heat treatment, heated for several minutes, and then subjected to a GRTA treatment for taking out the object to be treated from the inert gas atmosphere. By using the GRTA process, high-temperature heat treatment can be performed in a short time. Further, even a temperature condition exceeding the heat-resistant temperature of the object to be processed can be applied. During the treatment, the inert gas may be converted into a gas containing oxygen. This is because heat treatment in an atmosphere containing oxygen can reduce the defect level in the energy gap due to oxygen deficiency.

The inert gas atmosphere is preferably an atmosphere containing nitrogen or a rare gas (helium, neon, argon, etc.) as a main component and an atmosphere containing no water, hydrogen or the like. For example, the purity of a rare gas such as nitrogen, helium, neon or argon introduced into a heat treatment apparatus is preferably 6 N (99.9999%) or more, preferably 7 N (99.99999% Or less, preferably 0.1 ppm or less).

In any case, impurities are reduced by the heat treatment to form an oxide semiconductor film extremely close to the i-type (intrinsic semiconductor) or the i-type, and a transistor having extremely excellent characteristics can be realized.

However, since the heat treatment described above has the effect of removing hydrogen or water, the heat treatment may be referred to as dehydration treatment, dehydrogenation treatment, or the like. The dehydration treatment and dehydrogenation treatment may be performed at, for example, the timing before the oxide semiconductor film is processed into an island shape. Further, the dehydration treatment and the dehydrogenation treatment may be performed not only once but also several times.

Next, the oxide semiconductor film 108 is treated with oxygen 180b (see Fig. 4 (F)). The oxygen 180b contains at least one of an oxygen radical, an oxygen atom, and an oxygen ion. Oxygen can be contained in the oxide semiconductor film 108 near the interface of the oxide semiconductor film 108 or in the vicinity of the interface between the oxide semiconductor film 108 and the oxide semiconductor film 108 by performing the oxygen doping treatment to the oxide semiconductor film 108 . In this case, the content of oxygen is set to be more than the stoichiometric ratio of the oxide semiconductor film 108, preferably more than 1 time, and up to 2 times (more than 1 time and less than 2 times) the stoichiometric ratio. Alternatively, the content of oxygen may be set to Y to exceed 2 Y, preferably to exceed Y, with the amount of oxygen in the case of single crystal being Y. Alternatively, the content of oxygen may be set to a value exceeding Z, preferably exceeding Z and up to 2Z, based on the amount Z of oxygen in the oxide semiconductor film when the oxygen doping process is not performed. The reason why the upper limit exists in the above-mentioned preferable range is that if the content of oxygen is too large, the oxide semiconductor film 108 may take in hydrogen rather like the hydrogen storage alloy (hydrogen storage alloy).

In the case of a material in which the crystal structure is represented by InGaO ₃ (ZnO) _m (m> 0), for example, when the crystal structure of M = 1 (InGaZnO ₄ ) is taken as a reference, _x in InGaZnO x is more than 4 And the crystal structure of m = 2 (InGaZn ₂ O ₅ ) is taken as a reference, _x in InGaZn ₂ O _x is allowed to exceed 5 and up to 10. The oxygen excess region may be present in a part of the oxide semiconductor.

It is also preferable that at least a part of the oxygen 180b added to the oxide semiconductor film has an unbonded hand in the oxide semiconductor. The presence of unbound hands allows hydrogen to be immobilized (non-covalent ionization) by bonding with hydrogen that may remain in the film.

The oxygen 180b described above can be generated by a plasma generating apparatus or an ozone generating apparatus. More specifically, for example, oxygen 180b is generated by using an apparatus capable of performing an etching process on a semiconductor device or an apparatus capable of performing ashing with respect to a resist mask to form an oxide semiconductor film 108 can be processed.

Further, in order to more suitably add oxygen, it is preferable to apply an electrical bias to the substrate.

The oxide semiconductor film 108 subjected to the oxygen doping treatment may be subjected to heat treatment (temperature: 150 ° C to 470 ° C). The heat treatment can remove water, hydroxyl groups (OH), and the like generated by the reaction of hydrogen and an oxide semiconductor material from the oxide semiconductor film. The heat treatment may be carried out in the presence of nitrogen, oxygen, super dry air (water having a water content of 20 ppm or less, preferably 1 ppm or less, preferably 10 ppb or less), rare gas (argon, helium etc.) Lt; / RTI &gt; atmosphere. The oxygen doping treatment and the heat treatment may be repeatedly performed. By repeating this process, the reliability of the transistor can be further increased. The number of repetitions can be set appropriately.

Next, a gate insulating film 110 which is in contact with a part of the oxide semiconductor film 108 and covers the source electrode 104a and the drain electrode 104b is formed (see Fig. 5 (A)).

The gate insulating film 110 can be formed in the same manner as the insulating film 102. That is, the gate insulating film 110 may be formed using silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, gallium oxide, a mixed material thereof, or the like. However, considering that hafnium oxide, tantalum oxide, yttrium oxide, hafnium silicate (HfSi _x O _y (x> 0, y> 0)) and nitrogen added hafnium silicate (HfSi _x O _{y (x> 0, y>} 0)), may be a nitrogen employ a hafnium aluminate _{(HfAl x O y (x>} 0, y> 0)), a high dielectric constant, such material is added.

Further, a lamination structure may be adopted similarly to the insulating film 102. [ In this case, when a film (hereinafter referred to as film a) composed of an insulating material made of a component similar to that of the oxide semiconductor film and a film containing a material different from the component material of the film a (hereinafter referred to as film b) good. Since the films a and b are stacked in this order from the side of the oxide semiconductor film, the charge is preferentially trapped at the interface between the films a and b (comparison with the interface between the oxide semiconductor film and the film a) The charge trapping of the semiconductor device can be sufficiently suppressed, thereby improving the reliability of the semiconductor device.

As the laminated structure, a laminated structure of a gallium oxide film and a silicon oxide film, a laminated structure of a gallium oxide film and a silicon nitride film, and the like can be applied.

After the above-described formation of the gate insulating film 110, it is preferable to perform heat treatment. The temperature of the heat treatment is set to 250 deg. C or more and 700 deg. C or less, preferably 450 deg. C or more and 600 deg. C or less, or less than the distortion point of the substrate.

The heat treatment may be performed in an atmosphere of nitrogen, oxygen, super dry air (air having a water content of 20 ppm or less, preferably 1 ppm or less, preferably 10 ppb or less), or rare gas (argon, helium, etc.) , It is preferable that the atmosphere such as nitrogen, oxygen, super-dry air, or rare gas does not contain water, hydrogen, or the like. The purity of nitrogen, oxygen, or rare gas to be introduced into the heat treatment apparatus is preferably 6 N (99.9999%) or more (that is, the impurity concentration is 1 ppm or less) and more preferably 7 N (99.99999% Is not more than 0.1 ppm).

In the heat treatment according to the present embodiment, the oxide semiconductor film 108 is heated in contact with the insulating film 102 and the gate insulating film 110. Therefore, it is also possible to supply oxygen, which may be reduced by the above-described dehydration (or dehydrogenation) treatment, from the insulating film 102 or the like to the oxide semiconductor film 108. In this sense, the heat treatment may be referred to as addition (additive extinguishing).

The timing of the heat treatment for the purpose of addition is not particularly limited as long as the oxide semiconductor film 108 is formed. For example, after the formation of the gate electrode, a heat treatment for the purpose of addition may be performed. Alternatively, a heat treatment for the purpose of addition may be performed subsequent to the heat treatment for dehydration or the like, a heat treatment for the purpose of adding heat to the heat treatment for dehydration or the like may be used as well, A heat treatment for the purpose of dehydration or the like may be combined with the intended heat treatment.

As described above, by applying heat treatment for dehydration or the like and heat treatment for oxygen doping treatment or addition treatment, the oxide semiconductor film 108 can be highly purified so as not to contain impurities as much as possible. In the high-purity oxide semiconductor film 108, the carrier derived from the donor is extremely small (close to zero).

Next, the gate insulating film 110 is treated with oxygen 180c (see FIG. 5 (B)). The oxygen 180c includes at least one of an oxygen radical, an oxygen atom and an oxygen ion. The gate insulating film 110 is subjected to oxygen doping treatment so that the oxide semiconductor film 108 in the vicinity of the interface of the oxide semiconductor film 108 or the oxide semiconductor film 108 and the vicinity thereof Oxygen can be contained. In this case, the content of oxygen in the gate insulating film 110 is preferably set to a value exceeding the stoichiometric ratio of the gate insulating film 110, preferably up to 4 times (greater than 1 time and less than 4 times) More preferably, it is more than 1 time and up to 2 times (greater than 1 time and less than 2 times). Alternatively, the content of oxygen may be set to a value exceeding Y, preferably exceeding Y to 4Y, by setting the amount of oxygen in the case of single crystal to Y. Alternatively, the content of oxygen may be set to a value exceeding Z, preferably, exceeding Z and up to 4Z based on the amount Z of oxygen in the gate insulating film 110 when the oxygen doping process is not performed.

For example, in the case of using gallium oxide whose composition is represented by GaO _x (x> 0), since gallium oxide of single crystal is Ga ₂ O ₃ , x is more than 1.5 to 6 (that is, ) Is allowed. For example, in the case of using silicon oxide whose composition is represented by SiO _x (x> 0), when SiO ₂ (that is, O is twice Si), x is more than 2 and up to 8 To 8 times) is allowed. The oxygen excess region may be present in a part of the insulating film (including the interface).

It is also preferable that at least a part of the oxygen 180c added to the insulating film has an unbonded hand in the oxide semiconductor after being supplied to the oxide semiconductor. The presence of unbound hands allows hydrogen to be immobilized (non-covalent ionization) by bonding with hydrogen that may remain in the film.

The oxygen 180c described above can be generated by a plasma generating apparatus or an ozone generating apparatus. More specifically, oxygen 180c is generated using, for example, an apparatus capable of performing an etching process on a semiconductor device or an apparatus capable of performing ashing with respect to a resist mask to form a gate insulating film 110 ) Can be processed.

Further, in order to more suitably add oxygen, it is preferable to apply an electrical bias to the substrate.

After the above-described oxygen doping treatment, heat treatment may be performed. By this heat treatment, it is possible to supply a sufficient amount of oxygen to the oxide semiconductor film. The timing of the heat treatment for obtaining the effect may be any time after the oxygen doping process described above. The oxygen doping treatment and the heat treatment may be repeatedly performed. By repeating this process, the reliability of the transistor can be further increased. The number of repetitions can be set appropriately.

Thereafter, a gate electrode 112 is formed (see Fig. 5 (C)). The gate electrode 112 can be formed using a metal material such as molybdenum, titanium, tantalum, tungsten, aluminum, copper, neodymium, or scandium or an alloy material containing these as main components. The gate electrode 112 may have a single-layer structure or a stacked-layer structure.

After forming the gate electrode 112, an insulating film may be formed. The insulating film can be formed using, for example, silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, gallium oxide, a mixed material thereof, or the like. Particularly, when a silicon nitride film is used as the insulating film, it is possible to prevent the added oxygen from being released to the outside, and to effectively suppress the incorporation of hydrogen or the like from the outside into the oxide semiconductor film 108, Do. Wiring connected to the source electrode 104a, the drain electrode 104b, the gate electrode 112, or the like may be formed.

The transistor 120 is formed by the above process.

Although the above description is directed to an example in which the oxygen doping process is applied to both the insulating film 102, the oxide semiconductor film 108, and the gate insulating film 110, an embodiment of the disclosed invention is not limited thereto . For example, an oxygen doping process may be applied to the insulating film 102 and the oxide semiconductor film 108, or an oxygen doping process may be applied to the insulating film 102 and the gate insulating film 110.

The transistor according to the present embodiment is a semiconductor device in which impurities including hydrogen atoms such as hydrogen, water, a hydroxyl group, or a hydride (also referred to as a hydrogen compound) are excluded from the oxide semiconductor by heat treatment, An oxide semiconductor film which achieves high purity and i-type (intrinsic) characteristics is used. Such a transistor including an oxide semiconductor film of high purity is electrically stable because variations in electric characteristics such as a threshold voltage are suppressed.

When an oxide semiconductor material containing In is used as the oxide semiconductor film, the bonding force between In and oxygen is relatively weak. Therefore, when a material having stronger bonding force with oxygen than silicon is contained in the insulating film in contact with the oxide semiconductor film , Oxygen in the oxide semiconductor film is removed by the heat treatment, and oxygen deficiency may be formed in the vicinity of the interface of the oxide semiconductor film. However, in the transistor relating to one aspect of the disclosed invention, excessive oxygen is supplied to the insulating film in contact with the oxide semiconductor film, so that the formation of oxygen deficiency due to the escape of oxygen from the oxide semiconductor film can be suppressed.

Particularly, by increasing the content of oxygen in the oxide semiconductor film by the oxygen doping treatment, deterioration due to electrical bias stress and thermal stress can be suppressed, and deterioration due to light can be reduced.

As described above, according to one aspect of the disclosed invention, it is possible to provide a transistor with excellent reliability.

The configurations, methods, and the like described in this embodiment can be appropriately combined with the configurations, methods, and the like described in the other embodiments.

(Embodiment 3)

In this embodiment, another example of the manufacturing method of the semiconductor device will be described with reference to Fig.

<Configuration Example of Semiconductor Device>

The structure of the semiconductor device manufactured by the manufacturing method of this embodiment is the same as that of the transistor 120 of the previous embodiment. That is, the insulating film 102, the source electrode 104a, the drain electrode 104b, the oxide semiconductor film 108, the gate insulating film 110, and the gate electrode 112 on the substrate 100 (see FIG. 1) .

As described in the foregoing embodiment, in the transistor 120, the insulating film 102 is an insulating film subjected to oxygen doping treatment. In the present embodiment, the oxide semiconductor film 108 and the gate insulating film 110 are also subjected to oxygen doping treatment. By this oxygen doping process, the transistor 120 having higher reliability is realized. The oxygen doping process for the insulating film 102 in the present embodiment also serves as a step of removing the mask 103a and the mask 103b used for forming the source electrode 104a and the drain electrode 104b. By adopting such a process, it is possible to reduce the manufacturing cost by simplifying the process. In addition, a transistor whose configuration has been changed can be fabricated similarly to the previous embodiment (see Figs. 3 (A) to 3 (D)).

<Example of Fabrication Process of Semiconductor Device>

Hereinafter, with reference to FIG. 6, an example of a manufacturing process of the above-described semiconductor device will be described. In addition, since the basic contents of the manufacturing process are the same as in the previous embodiment, the following description explains the difference.

First, an insulating film 102 is formed on a substrate 100 (see Fig. 6 (A)). For details, reference should be made to the description relating to Fig. 4 (A).

Next, a conductive film for forming a source electrode and a drain electrode (including wiring formed in the same layer) is formed on the insulating film 102, and the conductive film is formed on the mask 103a and the mask 103b, To form a source electrode 104a and a drain electrode 104b. Then, the insulating film 102 is subjected to treatment with oxygen 180a (also referred to as oxygen doping treatment or oxygen plasma doping treatment) (see FIG. 6 (B)). The details of the process for forming the source electrode 104a and the drain electrode 104b may be referred to the description related to Fig. 4 (C). Here, the oxygen doping process described above also serves as a process of removing the mask 103a and the mask 103b.

The oxygen 180a contains at least one of an oxygen radical, an oxygen atom and an oxygen ion. The insulating film 102 is subjected to oxygen doping treatment so that oxygen can be contained in the insulating film 102 and the oxide semiconductor film 108 is formed in the vicinity of the interface of the oxide semiconductor film 108 or in the oxide semiconductor film 108, And oxygen can be contained in the vicinity of the interface. In this case, the content of oxygen in the insulating film 102 is preferably in the range of more than the stoichiometric ratio of the insulating film 102, preferably more than 1 time of the stoichiometric ratio, up to 4 times (more than 1 time and less than 4 times) (More than 1 times and less than 2 times). Alternatively, the content of oxygen may be set to a value exceeding Y, preferably exceeding Y to 4Y, by setting the amount of oxygen in the case of single crystal to Y. Alternatively, the content of oxygen may be set to a value exceeding Z, preferably, exceeding Z to 4Z based on the amount Z of oxygen in the insulating film in the case where the oxygen doping process is not performed.

For example, in the case of using gallium oxide whose composition is represented by GaO _x (x> 0), since gallium oxide of single crystal is Ga ₂ O ₃ , x is more than 1.5 to 6 (that is, ) Is allowed. For example, in the case of using silicon oxide whose composition is represented by SiO _x (x> 0), when SiO ₂ (that is, O is twice Si), x is more than 2 and up to 8 To 8 times) is allowed. The oxygen excess region may be present in a part of the insulating film (including the interface).

It is also preferable that at least a part of the oxygen 180a added to the insulating film has an unbonded hand in the oxide semiconductor after being supplied to the oxide semiconductor. The presence of unbound hands allows hydrogen to be immobilized (non-covalent ionization) by bonding with hydrogen that may remain in the film.

The oxygen 180a described above can be generated by a plasma generating apparatus or an ozone generating apparatus. More specifically, for example, the insulating film 102 can be processed by generating oxygen 180a by using an apparatus capable of ashing the resist mask or the like.

The mask 103a and the mask 103b are removed by the oxygen doping process. However, unlike the normal mask removing step, since the process is for the purpose of adding oxygen, it is preferable to apply a strong bias to the substrate.

Also, in the insulating film 102, a region in which oxygen exists at a high concentration and a region where oxygen exists in a low concentration are formed by the oxygen doping process. Specifically, a region of the insulating film 102 not covered with the source electrode 104a and the drain electrode 104b is a region in which oxygen is present at a high concentration, and the source electrode 104a and the drain electrode 104b The covered region becomes a region in which oxygen exists at a low concentration.

Next, an oxide semiconductor film in contact with the source electrode 104a and the drain electrode 104b is formed on the insulating film 102, and the oxide semiconductor film is processed to form an island-shaped oxide semiconductor film. Thereafter, the island-shaped oxide semiconductor film is subjected to a heat treatment to form a highly-purified oxide semiconductor film 108 (see Fig. 6 (C)). For details of the process, reference should be made to the description relating to Fig. 4 (D) and Fig. 4 (E).

Next, the oxide semiconductor film 108 is treated with oxygen 180b (see Fig. 6 (D)). For details, the description related to Fig. 4 (F) can be referred to.

Next, a gate insulating film 110 which is in contact with a part of the oxide semiconductor film 108 and covers the source electrode 104a and the drain electrode 104b is formed. Thereafter, the gate insulating film 110 is treated with oxygen 180c (see FIG. 6 (E)). For details, refer to the description related to Fig. 5 (A) and Fig. 5 (B).

Thereafter, a gate electrode 112 is formed (see FIG. 6 (F)). For details, reference should be made to the description related to Fig. 5 (C).

After forming the gate electrode 112, an insulating film may be formed. The insulating film can be formed using, for example, silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, gallium oxide, a mixed material thereof, or the like. Particularly, when silicon nitride is used as the insulating film, it is possible to prevent the added oxygen from being released to the outside, and it is possible to effectively suppress incorporation of hydrogen or the like from the outside into the oxide semiconductor film 108, Do. Wiring connected to the source electrode 104a, the drain electrode 104b, the gate electrode 112, or the like may be formed.

The transistor 120 is formed by the above process.

Although the above description is directed to an example in which the oxygen doping process is applied to both the insulating film 102, the oxide semiconductor film 108, and the gate insulating film 110, an embodiment of the disclosed invention is not limited thereto . For example, an oxygen doping process may be applied to the insulating film 102 and the oxide semiconductor film 108.

The transistor according to the present embodiment is a semiconductor device in which impurities including hydrogen atoms such as hydrogen, water, a hydroxyl group, or a hydride (also referred to as a hydrogen compound) are excluded from the oxide semiconductor by heat treatment, An oxide semiconductor film which achieves high purity and i-type (intrinsic) characteristics is used. Such a transistor including an oxide semiconductor film of high purity is electrically stable because variations in electric characteristics such as a threshold voltage are suppressed.

When an oxide semiconductor material containing In is used as the oxide semiconductor film, the bonding force between In and oxygen is relatively weak. Therefore, when a material having stronger bonding force with oxygen than silicon is contained in the insulating film in contact with the oxide semiconductor film , Oxygen in the oxide semiconductor film is removed by the heat treatment, and oxygen deficiency may be formed in the vicinity of the interface of the oxide semiconductor film. However, in the transistor relating to one aspect of the disclosed invention, excessive oxygen is supplied to the insulating film in contact with the oxide semiconductor film, so that the formation of oxygen deficiency due to the escape of oxygen from the oxide semiconductor film can be suppressed.

Particularly, by increasing the content of oxygen in the oxide semiconductor film by the oxygen doping treatment, deterioration due to electrical bias stress and thermal stress can be suppressed, and deterioration due to light can be reduced.

Furthermore, in the manufacturing method according to the present embodiment, since the process is simplified, the manufacturing-related costs can be suppressed.

As described above, according to one aspect of the disclosed invention, it is possible to provide a transistor with excellent reliability while suppressing the manufacturing cost to a low level.

The configurations, methods, and the like described in this embodiment can be appropriately combined with the configurations, methods, and the like described in the other embodiments.

(Fourth Embodiment)

In this embodiment, an example of a plasma apparatus (also referred to as an ashing apparatus) that can be used for oxygen doping processing will be described. Further, this device is industrially more suitable than an ion implanter, for example, since it can cope with a large-sized glass substrate after the fifth generation.

17 (A) shows an example of a surface view of a single wafer multi-chamber facility. 17 (B) shows an example of a cross-sectional view of a plasma apparatus (also referred to as an ashing apparatus) for performing oxygen plasma doping.

The single wafer multi-chamber facility shown in Fig. 17A has three plasma apparatuses 10 shown in Fig. 17 (B), and includes a substrate supply chamber 11 having three cassette ports 14 for accommodating substrates to be processed A load lock chamber 12, a transport chamber 13, and the like. The substrate supplied to the substrate supply chamber is transferred to the vacuum chamber 15 in the plasma apparatus 10 through the load lock chamber 12 and the transfer chamber 13 to perform oxygen plasma doping. The substrate having undergone the oxygen plasma doping is transported from the plasma apparatus 10 to the substrate supply chamber 11 through the load lock chamber 12 and the transport chamber 13. In the substrate supply chamber 11 and the transport chamber 13, transporting robots for transporting the substrates to be processed are respectively disposed.

Referring to Fig. 17 (B), the plasma apparatus 10 includes a vacuum chamber 15. In the upper portion of the vacuum chamber 15, a plurality of gas blowing openings and ICP coils 16 (inductively coupled plasma coils) for generating plasma are arranged.

Twelve gas blowing outlets are arranged at the central portion as viewed from the surface of the plasma apparatus 10. [ Each of the gas blowing outlets is connected to a gas supply source for supplying oxygen gas through a gas flow path 17. The gas supply source is provided with a mass flow controller or the like so that gas flows at a desired flow rate (more than 0 and not more than 1000 sccm) The oxygen gas can be supplied to the flow path 17. The oxygen gas supplied from the gas supply source is supplied from the gas flow path 17 into the vacuum chamber 15 through twelve gas outlets.

The ICP coil 16 is formed by arranging a plurality of band-shaped conductors in a spiral shape. One end of each conductor is electrically connected to the first high frequency power supply 18 (13.56 MHz) through a matching circuit for impedance adjustment, and the other end is grounded.

In the lower portion of the vacuum chamber, a substrate stage 19 serving as a lower electrode is disposed. The substrate 20 is detachably held on the substrate stage by an electrostatic chuck or the like provided on the substrate stage 19. [ The substrate stage 19 is provided with a heater as a heating mechanism and a He gas flow path as a cooling mechanism. The substrate stage is connected to a second high frequency power supply 21 (3.2 MHz) for applying a substrate bias voltage.

The vacuum chamber 15 is provided with an exhaust port and is provided with an automatic pressure control valve 22 (also referred to as an APC). The APC is connected to the turbo molecular pump 23 and further connected to the dry pump 24 through the turbo molecular pump 23. The APC performs pressure control in the vacuum chamber, and the turbo molecular pump 23 and the dry pump 24 depressurize the inside of the vacuum chamber 15.

Next, an example is shown in which plasma is generated in the vacuum chamber 15 shown in Fig. 17 (B) and oxygen plasma doping is performed on the oxide semiconductor film, the base insulating film, or the gate insulating film provided on the substrate 20 .

The turbo molecular pump 23 and the dry pump 24 are operated to maintain the inside of the vacuum chamber 15 at a desired pressure and then the substrate 20 to be processed is placed on the substrate stage in the vacuum chamber 15 do. The substrate 20 to be held on the substrate stage is provided with at least an oxide semiconductor film or a basic insulating film. In this embodiment, the pressure in the vacuum chamber 15 is maintained at 1.33 Pa. And the flow rate of supplying oxygen gas from the gas blowing port into the vacuum chamber 15 is set to 250 sccm.

Next, high-frequency power is applied to the ICP coil 16 from the first high-frequency power supply 18 to generate plasma. Then, the state in which the plasma is generated is maintained for a predetermined time (30 seconds or more and 600 seconds or less). The high frequency power applied to the ICP coil 16 is 1 kW or more and 10 kW or less. In this embodiment, 6000 W is used. At this time, the substrate bias voltage may be applied from the second RF power supply 21 to the substrate stage. In the present embodiment, the power used for applying the substrate bias voltage is 1000 W.

In this embodiment, after the plasma generation state is maintained for 60 seconds, the substrate 20 to be processed is taken out of the vacuum chamber 15. In this way, oxygen plasma doping can be performed on the oxide semiconductor film, the base insulating film, or the gate insulating film provided on the substrate 20 to be processed.

The configurations, methods, and the like described in this embodiment can be appropriately combined with the configurations, methods, and the like described in the other embodiments.

(Embodiment 5)

In the present embodiment, a storage medium (memory element) is shown as an example of a semiconductor device. In this embodiment mode, a transistor using an oxide semiconductor and a transistor using a material other than an oxide semiconductor, which are shown in Embodiments 1 to 3, etc., are formed on the same substrate.

7 is an example of a configuration of a semiconductor device. Fig. 7A shows a cross section of a semiconductor device, and Fig. 7B shows a plane of a semiconductor device. Here, Fig. 7 (A) corresponds to a cross section taken along line C1-C2 and D1-D2 in Fig. 7 (B). 7 (C) shows an example of a circuit diagram when the semiconductor device is used as a memory element. The semiconductor device shown in Figs. 7 (A) and 7 (B) has a transistor 240 using a first semiconductor material in its lower part and a transistor 120 shown in the first embodiment on its upper part. The transistor 120 uses an oxide semiconductor as a second semiconductor material. In the present embodiment, the first semiconductor material is a semiconductor material other than the oxide semiconductor. As the semiconductor material other than the oxide semiconductor, for example, silicon, germanium, silicon germanium, silicon carbide, or gallium arsenide can be used, and a single crystal semiconductor is preferably used. In addition, an organic semiconductor material or the like may be used. A transistor using such a semiconductor material is easy to operate at high speed. On the other hand, a transistor using an oxide semiconductor enables a charge to be maintained for a long time due to its characteristics.

In the present embodiment, an example in which the storage medium is constructed using the transistor 120 is shown. However, instead of the transistor 120, the transistor 130 to the transistor 160 shown in Embodiment Mode 1 or 2 It is needless to say that it is applicable.

7 includes a channel forming region 216 provided in a substrate 200 including a semiconductor material (for example, silicon or the like), and an impurity region 216 provided so as to sandwich the channel forming region 216. The transistor 240 in FIG. A metal compound region 224 in contact with the impurity region 220, a gate insulating film 208 provided on the channel forming region 216 and a gate electrode 210 provided on the gate insulating film 208 .

As the substrate 200 including a semiconductor material, a single crystal semiconductor substrate such as silicon or silicon carbide, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, an SOI substrate, or the like can be used. In general, &quot; SOI substrate &quot; refers to a substrate having a structure in which a silicon semiconductor film is provided on an insulating surface. In the present specification, however, the substrate also includes a substrate in which a semiconductor film made of a material other than silicon is provided on an insulating surface. That is, the semiconductor film of the &quot; SOI substrate &quot; is not limited to the silicon semiconductor film. In addition, the SOI substrate includes a structure in which a semiconductor film is provided on an insulating substrate such as a glass substrate through an insulating film.

An element isolation insulating film 206 is provided on the substrate 200 so as to surround the transistor 240 and an insulating film 228 and an insulating film 230 are provided to cover the transistor 240. Further, in order to realize high integration, it is preferable that the transistor 240 does not have a sidewall insulating film as shown in Fig. 7 (A). On the other hand, when emphasizing the characteristics of the transistor 240, a sidewall insulating film may be provided on the side surface of the gate electrode 210 to provide an impurity region 220 including a region having a different impurity concentration.

The transistor 240 can be fabricated using silicon, germanium, silicon germanium, silicon carbide, or gallium arsenide. This transistor 240 has a feature that high-speed operation is possible. Therefore, by using the transistor as a transistor for reading, information can be read at a high speed.

After the transistor 240 is formed, the insulating film 228 and the insulating film 230 are subjected to a CMP process as a process before forming the transistor 120 and the capacitor device 164 to expose the surface of the gate electrode 210 . The surface of the insulating film 228 and the surface of the insulating film 230 may be etched by using any suitable process such as etching or the like to improve the characteristics of the transistor 120. For example, It is desirable to keep it flat.

Next, a conductive film is formed on the gate electrode 210, the insulating film 228, the insulating film 230, and the like, and the conductive film is selectively etched to form the source electrode 104a and the drain electrode 104b.

The conductive film can be formed by a CVD method such as a PVD method including a sputtering method or a plasma CVD method. As a material of the conductive film, a material selected from the group consisting of Al, Cr, Cu, Ta, Ti, Mo, and W, an alloy containing the above-described elements as a component, and the like can be used. Mn, Mg, Zr, Be, Nd and Sc, or a combination of these materials may be used.

The conductive film may have a single-layer structure or a laminated structure of two or more layers. For example, a single-layer structure of a titanium film or a titanium nitride film, a single-layer structure of an aluminum film containing silicon, a two-layer structure of a titanium film laminated on an aluminum film, a two-layer structure of a titanium film laminated on a titanium nitride film, And a three-layer structure in which a titanium film is laminated. When the conductive film has a single-layer structure of a titanium film or a titanium nitride film, it is advantageous that the source electrode 104a having a tapered shape and the drain electrode 104b can be easily processed.

The channel length L of the upper transistor 120 is determined by the distance between the lower end portions of the source electrode 104a and the drain electrode 104b. When exposure for mask formation used in the case of forming a transistor having a channel length L of less than 25 nm is carried out, it is preferable to use a short ultraviolet ray having a wavelength of several nm to several tens nm and a short wavelength.

Next, an oxide semiconductor film is formed so as to cover the source electrode 104a and the drain electrode 104b, and then the oxide semiconductor film is selectively etched to form the oxide semiconductor film 108. [ The oxide semiconductor film uses the material and the formation process described in Embodiment Mode 1.

Next, a gate insulating film 110 in contact with the oxide semiconductor film 108 is formed. The gate insulating film 110 uses the material and the formation process described in Embodiment Mode 1.

Next, the gate electrode 112a is formed in the region overlapping with the oxide semiconductor film 108 on the gate insulating film 110, and the electrode 112b is formed in the region overlapping with the source electrode 104a.

After formation of the gate insulating film 110, it is preferable to carry out heat treatment (also referred to as addition or the like) in an inert gas atmosphere or an oxygen atmosphere. The temperature of the heat treatment is not less than 200 ° C and not more than 450 ° C, preferably not less than 250 ° C and not more than 350 ° C. For example, the heat treatment may be performed at 250 DEG C for 1 hour in a nitrogen atmosphere. By performing the heat treatment, variations in the electrical characteristics of the transistors can be reduced.

The timing of the heat treatment for the purpose of addition is not limited to this. For example, after the formation of the gate electrode, a heat treatment for the purpose of addition may be performed. The heat treatment for dehydration may be followed by a heat treatment for the purpose of addition, a heat treatment for the purpose of dehydration or the like, a heat treatment for the purpose of addition may be performed, A heat treatment for the purpose of dehydration or the like may be combined with the intended heat treatment.

As described above, by applying heat treatment for dehydration or the like and heat treatment for oxygen doping treatment or addition treatment, the oxide semiconductor film 108 can be highly purified so as not to contain impurities as much as possible.

The gate electrode 112a and the electrode 112b can be formed by forming a conductive film on the gate insulating film 110 and then selectively etching the conductive film.

Next, an insulating film 151 and an insulating film 152 are formed on the gate insulating film 110, the gate electrode 112a, and the electrode 112b. The insulating film 151 and the insulating film 152 can be formed by a sputtering method, a CVD method, or the like. Further, it can be formed using a material containing an inorganic insulating material such as silicon oxide, silicon oxynitride, silicon nitride, hafnium oxide, aluminum oxide, or gallium oxide.

Next, an opening reaching the drain electrode 104b is formed in the gate insulating film 110, the insulating film 151, and the insulating film 152. Then, The opening is formed by selective etching using a mask or the like.

Thereafter, an electrode 154 is formed in the opening, and a wiring 156 contacting the electrode 154 is formed on the insulating film 152.

The electrode 154 can be formed, for example, by forming a conductive film on the region including the opening by using the PVD method or the CVD method, and then removing the conductive film by a method such as etching or CMP I can do it.

The wiring 156 is formed by forming a conductive film using a CVD method such as a PVD method or a plasma CVD method including a sputtering method, and then patterning the conductive film. As the material of the conductive film, a material selected from Al, Cr, Cu, Ta, Ti, Mo, and W, or an alloy containing the above-described elements as a component can be used. Mn, Mg, Zr, Be, Nd and Sc, or a combination of these materials may be used. The details are the same as those of the source electrode 104a or the drain electrode 104b.

Thus, the transistor 120 and the capacitor element 164 using the oxide semiconductor film 108 of high purity are completed. The capacitor element 164 is composed of the source electrode 104a, the oxide semiconductor film 108, the gate insulating film 110, and the electrode 112b.

7, the insulating property between the source electrode 104a and the electrode 112b can be sufficiently secured by stacking the oxide semiconductor film 108 and the gate insulating film 110. In addition, Of course, in order to secure a sufficient capacity, a capacitor element 164 having no oxide semiconductor film 108 may be employed. Furthermore, when the capacitance is unnecessary, the capacitor device 164 may not be provided.

7 (C) shows an example of a circuit diagram when the semiconductor device is used as a memory device. 7C, one of the source electrode and the drain electrode of the transistor 120, one of the electrodes of the capacitor device 164, and the gate electrode of the transistor 240 are electrically connected. The source electrode of the transistor 240 is electrically connected to the first line (also called the 1st line) and the drain electrode of the transistor 240 is electrically connected to the second line Respectively. The other of the third wiring (third line: also referred to as a first signal line) and the source electrode or the drain electrode of the transistor 120 is electrically connected, and a fourth wiring (fourth line: also referred to as a second signal line) And the gate electrode of the gate electrode 120 is electrically connected. The fifth wiring (also called a fifth line: word line) and the other electrode of the capacitor device 164 are electrically connected.

Since the transistor 120 using the oxide semiconductor has a feature that the off current is extremely small, by turning off the transistor 120, one of the source electrode or the drain electrode of the transistor 120 and the one of the capacitor element 164 (Hereinafter referred to as a node FG) to which the gate electrode of the transistor 240 is electrically connected can be maintained for a very long time. The provision of the capacitive element 164 facilitates the maintenance of the charge given to the node FG and facilitates reading of the held information.

In the case of storing (writing) information in the semiconductor device, first, the potential of the fourth wiring is set to the potential at which the transistor 120 is turned on, and the transistor 120 is turned on. Thereby, the potential of the third wiring is supplied to the node FG, and a predetermined amount of charge is accumulated in the node FG. Here, it is assumed that any one of charges giving two different potential levels (hereinafter referred to as a low level charge and a high level transfer) is given. Thereafter, the potential of the fourth wiring is set to the potential at which the transistor 120 is in the OFF state, and the transistor FG is brought into the floating state by turning off the transistor 120, So that a predetermined charge is maintained. As described above, by storing and holding a predetermined amount of charge in the node FG, information can be stored in the memory cell.

Since the off current of the transistor 120 is extremely small, the electric charge supplied to the node FG is maintained for a long time. Therefore, the refresh operation becomes unnecessary, or the frequency of the refresh operation can be made extremely low, and the power consumption can be sufficiently reduced. Further, even when there is no supply of electric power, it is possible to maintain the stored contents over a long period of time.

When the stored information is read (read), when a proper potential (read potential) is applied to the fifth wiring in a state where a predetermined potential (positive potential) is applied to the first wiring, Thus, the transistor 240 takes a different state. Generally, when the transistor 240 is of the n-channel type, the apparent threshold Vth_H of the transistor 240 when the high level charge is held in the node FG is maintained at the low level charge Is lower than the apparent threshold Vth_L of the transistor 240 in the case of being turned on. Here, the apparent threshold refers to the potential of the fifth wiring necessary for turning the transistor 240 to the &quot; ON state &quot;. Therefore, the electric charge held at the node FG can be discriminated by setting the electric potential of the fifth wiring to a potential V _{0 that} is intermediate between Vth_H and Vth_L. For example, when a high-level charge is given in writing, when the potential of the fifth wiring becomes V ₀ (> Vth_H), the transistor 240 is turned "on". When the Low level, the charges have been given, the potential of the fifth wiring even if V ₀ (<Vth_L), transistor 240 is in the state "off state". Therefore, the stored information can be read out by controlling the potential of the fifth wiring and reading the ON or OFF state of the transistor 240 (reading the potential of the second wiring).

When the stored information is rewritten, a new potential is supplied to the node FG that has retained a predetermined amount of charge by the writing, thereby maintaining the charge associated with the new information at the node FG. Specifically, the potential of the fourth wiring is set to the potential at which the transistor 120 is turned on, and the transistor 120 is turned on. As a result, the potential of the third wiring (potential associated with new information) is supplied to the node FG to accumulate a predetermined amount of charge in the node FG. Thereafter, by setting the potential of the fourth wiring to the potential at which the transistor 120 is in the OFF state and turning off the transistor 120, a state in which charges related to new information are maintained is maintained in the node FG do. That is, it is possible to overwrite the stored information by performing the same operation (second write) as that of the first write in a state where a predetermined amount of charge is held by the first write on the node FG.

The transistor 120 shown in this embodiment can sufficiently reduce the off current of the transistor 120 by using the oxide semiconductor film 108 which is made highly purified and grown. In addition, by making the oxide semiconductor film 108 an excess oxygen layer, variations in electrical characteristics of the transistor 120 are suppressed, and an electrically stable transistor can be obtained. By using such a transistor, it is possible to maintain the memory contents over an extremely long period of time, and a highly reliable semiconductor device can be obtained.

In the semiconductor device shown in this embodiment mode, a semiconductor device in which the degree of integration is sufficiently high is realized by overlapping the transistor 240 and the transistor 120.

The configurations, methods, and the like described in this embodiment can be appropriately combined with the configurations, methods, and the like described in the other embodiments.

(Embodiment 6)

A semiconductor device (also referred to as a display device) having a display function can be manufactured using the transistors exemplified in Embodiments 1 to 3. In addition, a part or the whole of the driving circuit including the transistor can be integrally formed on the same substrate as the pixel portion to form a system-on-panel.

8A, the sealing material 4005 is provided so as to surround the pixel portion 4002 provided on the first substrate 4001, and is sealed by the second substrate 4006. [ 8A, a scanning line driving circuit 4004 (see FIG. 8A) formed of a single crystal semiconductor film or polycrystalline semiconductor film on a separately prepared substrate is provided in a region different from the region surrounded by the sealing material 4005 on the first substrate 4001 ), And a signal line driver circuit 4003 are mounted. Various signals and potentials given to the signal line driver circuit 4003 and the scanning line driver circuit 4004 or the pixel portion 4002 formed separately are supplied from FPCs (Flexible Printed Circuits) 4018a and 4018b.

8 (B) and (C), a sealing material 4005 is provided so as to surround the pixel portion 4002 and the scanning line driving circuit 4004 provided on the first substrate 4001. A second substrate 4006 is provided on the pixel portion 4002 and the scanning line driving circuit 4004. Therefore, the pixel portion 4002 and the scanning line driving circuit 4004 are sealed together with the display element by the first substrate 4001, the sealing material 4005, and the second substrate 4006. 8B and 8C show a structure in which signal lines are formed on a substrate prepared separately from a region surrounded by the sealing material 4005 on the first substrate 4001 with a single crystal semiconductor film or a polycrystalline semiconductor film Circuit 4003 is mounted. The signal line driver circuit 4003 and the various signals and potentials given to the scanning line driver circuit 4004 or the pixel portion 4002 are supplied from the FPC 4018 in Fig. 8B and Fig. 8C.

The embodiment is not limited to the configuration shown in Figs. 8 (A) to 8 (C). A part of the signal line driving circuit or a part of the scanning line driving circuit may be separately formed and mounted.

The connection method of the separately formed drive circuit is not particularly limited, and a COG (Chip On Glass) method, a wire bonding method, a TAB (Tape Automated Bonding) method, or the like can be used. 8A is an example in which the signal line driver circuit 4003 and the scanning line driver circuit 4004 are mounted by the COG method and FIG. 8B is an example in which the signal line driver circuit 4003 is mounted by the COG method And Fig. 8C shows an example in which the signal line driver circuit 4003 is mounted by the TAB method.

The display device includes a panel in which the display element is sealed, and a module in which an IC or the like including a controller is mounted on the panel.

The display device in this specification refers to an image display device, a display device, or a light source (including a lighting device). In addition, a module such as a connector, for example, an FPC, a TAB tape, or a module equipped with a TCP, a module in which a printed wiring board is provided at the end of a TAB tape or TCP, or a module in which an IC (integrated circuit) And it is included in the display device.

Further, the pixel portion and the scanning line driving circuit provided on the first substrate have a plurality of transistors, and the transistors exemplified in Embodiments 1 to 3 can be applied.

A liquid crystal element (also referred to as a liquid crystal display element) and a light emitting element (also referred to as a light emitting display element) can be used as the display element provided in the display device. The light-emitting element includes a device whose luminance is controlled by a current or a voltage, and specifically includes an inorganic EL (Electro Luminescence) element, an organic EL element, and the like. Further, a display medium in which the contrast is changed by an electrical action, such as electronic ink, can be applied.

One embodiment of the semiconductor device will be described with reference to Figs. 9 to 11. Fig. Figs. 9 to 11 correspond to cross-sectional views taken along line M-N of Fig. 8 (B).

9 to 11, the semiconductor device has a connection terminal electrode 4015 and a terminal electrode 4016. The connection terminal electrode 4015 and the terminal electrode 4016 are connected to terminals of the FPC 4018 And is electrically connected through an anisotropic conductive film 4019. [

The connection terminal electrode 4015 is formed of the same conductive film as the first electrode layer 4030 and the terminal electrode 4016 is formed of the same conductive film as the source electrode and the drain electrode of the transistors 4010 and 4011. [

The pixel portion 4002 and the scanning line driving circuit 4004 provided on the first substrate 4001 have a plurality of transistors and the transistors 4010 and 4010 included in the pixel portion 4002 in FIGS. The transistor 4011 included in the scanning line driving circuit 4004 is exemplified. In Figs. 10 and 11, an insulating layer 4021 is provided on the transistors 4010 and 4011. Fig.

In the present embodiment, the transistors shown in any of Embodiments 1 to 3 can be applied as the transistor 4010 and the transistor 4011. The transistor 4010 and the transistor 4011 are electrically stable because variations in their electrical characteristics are suppressed. Therefore, a highly reliable semiconductor device of the present embodiment shown in Figs. 9 to 11 can be provided.

A transistor 4010 provided in the pixel portion 4002 is electrically connected to a display element to constitute a display panel. The display element is not particularly limited as long as display can be performed, and various display elements can be used.

Fig. 9 shows an example of a liquid crystal display device using a liquid crystal element as a display element. 9, a liquid crystal element 4013 serving as a display element includes a first electrode layer 4030, a second electrode layer 4031, and a liquid crystal layer 4008. [ An insulating film 4032 and an insulating film 4033 functioning as alignment films are provided so as to sandwich the liquid crystal layer 4008 in the center. The second electrode layer 4031 is provided on the second substrate 4006 side and the first electrode layer 4030 and the second electrode layer 4031 are laminated via the liquid crystal layer 4008. [ In addition, in the display device shown in Fig. 8 (B), the section at M-N when a liquid crystal element is used as the display element corresponds to Fig.

Reference numeral 4035 denotes a columnar spacer that can be obtained by selectively etching an insulating film, and is provided to control the film thickness (cell gap) of the liquid crystal layer 4008. The shape of the spacer is not limited to the columnar shape, and for example, a spherical spacer may be used.

When a liquid crystal element is used as a display element, a thermotropic liquid crystal, a low molecular liquid crystal, a polymer liquid crystal, a polymer dispersed liquid crystal, a ferroelectric liquid crystal, an antiferroelectric liquid crystal, or the like can be used. Such a liquid crystal material exhibits a cholesteric phase, a smectic phase, a cubic phase, a chiral nematic, an isotropic phase and the like depending on conditions.

A liquid crystal showing a blue phase without using an alignment film may also be used. The blue phase is a liquid crystal phase, and when the temperature of the cholesteric liquid crystal is raised, it is an image that is expressed just before the transition from the cholesteric phase to the isotropic phase. Since the blue phase is only expressed in a narrow temperature range, a liquid crystal composition in which 5% by weight or more of chiral agent is mixed is used for the liquid crystal layer in order to improve the temperature range. A liquid crystal composition containing a liquid crystal and a chiral agent exhibiting a blue phase has a short response time of 1 msec or less and is optically isotropic and thus requires no alignment treatment and has a small viewing angle dependency. In addition, since no rubbing treatment is required since there is no necessity of providing an alignment film, it is possible to prevent the electrostatic breakdown caused by the rubbing process, and it is possible to reduce defects and breakage of the liquid crystal display device during the manufacturing process. Therefore, the productivity of the liquid crystal display device can be improved.

The resistivity of the liquid crystal material is 1 x 10 ⁹ ? · Cm or more, preferably 1 x 10 ¹¹ ? · Cm or more, more preferably 1 x 10 ¹² ? · Cm or more. The value of the specific resistivity in this specification is a value measured at 20 占 폚.

The size of the storage capacitor provided in the liquid crystal display device is set so that the charge can be maintained during a predetermined period in consideration of the leakage current of the transistor disposed in the pixel portion. It is sufficient to provide a storage capacitor having a capacitance of 1/3 or less, preferably 1/5 or less of the liquid crystal capacitance of each pixel, by using a transistor having a high-purity oxide semiconductor film.

The transistor using the highly purified oxide semiconductor film used in the present embodiment can lower the current value (off current value) in the OFF state. Therefore, the holding time of an electric signal such as an image signal can be lengthened, and the writing interval can be set longer in the power-on state. Therefore, since the frequency of the refresh operation can be reduced, the power consumption is suppressed.

In addition, the transistor using the oxide semiconductor film of high purity used in the present embodiment can achieve high-speed driving because a relatively high field effect mobility can be obtained. Therefore, by using the transistor in the pixel portion of the liquid crystal display device, a high-quality image can be provided. In addition, since the transistor can be manufactured by separately forming a driver circuit portion or a pixel portion on the same substrate, the number of parts of the liquid crystal display device can be reduced.

The liquid crystal display device is provided with a liquid crystal display (LCD) device, such as a twisted nematic (TN) mode, an in-plane switching (IPS) mode, a fringe field switching (FFS) mode, an axially symmetrically aligned micro- (Ferroelectric Liquid Crystal) mode, and AFLC (Anti-Liquid Crystal Liquid Crystal) mode.

Alternatively, a normally black type liquid crystal display device, for example, a transmissive liquid crystal display device employing a vertically aligned (VA) mode may be used. Here, the vertical alignment mode is a type of a method of controlling the arrangement of liquid crystal molecules in a liquid crystal display panel, in which liquid crystal molecules are oriented in a vertical direction with respect to the panel surface when no voltage is applied. There are several types of vertical alignment modes. For example, the vertical alignment mode may be a Multi-Domain Vertical Alignment (MVA) mode, a PVA (Patterned Vertical Alignment) mode, an ASV mode, or the like. Also, it is possible to use a method of multi-domain or multi-domain design in which pixels (pixels) are divided into several regions (subpixels), and molecules are designed to fall in different directions.

In the display device, an optical member (optical substrate) such as a black matrix (light-shielding layer), a polarizing member, a retardation member, an antireflection member, or the like is suitably provided. For example, circular polarization by a polarization substrate and a phase difference substrate may be used. Further, a backlight, a sidelight, or the like may be used as the light source.

It is also possible to employ a time division display system (field sequential drive system) by using a plurality of light emitting diodes (LEDs) as a backlight. By applying the field sequential drive method, color display can be performed without using a color filter.

As the display method in the pixel portion, a progressive method, an interlace method, or the like can be used. The color elements to be controlled by pixels in color display are not limited to the three colors of RGB (R denotes red, G denotes green, and B denotes blue). For example, RGBW (W represents white) or RGB may be added with one or more colors of yellow, cyan, magenta, and the like. Further, the size of the display area may be different for every dot of the color element. However, the present invention is not limited to the display device of color display, but may be applied to a display device of black and white display.

Further, a light emitting element using electroluminescence can be applied as a display element included in a display device. The light emitting element using electroluminescence is distinguished depending on whether the light emitting material is an organic compound or an inorganic compound. Generally, the former is called an organic EL element, and the latter is called an inorganic EL element.

In the organic EL element, electrons and holes from a pair of electrodes are injected into a layer containing a luminescent organic compound by applying a voltage to the luminescent element, so that a current flows. Then, the carriers (electrons and holes) recombine to emit light when the luminescent organic compound forms an excited state and the excited state returns to the ground state. From such a mechanism, such a light-emitting element is referred to as a current-excited light-emitting element.

The inorganic EL element is classified into a dispersion type inorganic EL element and a thin film inorganic EL element in accordance with its element structure. The dispersion-type inorganic EL device has a light-emitting layer in which particles of a light-emitting material are dispersed in a binder, and the light-emitting mechanism is a donor-acceptor recombination-type light-emission using a donor level and an acceptor level. The thin film inorganic EL device is a structure in which a light emitting layer is sandwiched between dielectric layers and further sandwiched therebetween, and the light emitting mechanism is localized light emission using internal angle electron transition of metal ions. Here, an organic EL element is used as a light emitting element.

In order for the light emitting element to emit light, at least one of the pair of electrodes should be transparent. In addition, it is also possible to form a transistor and a light emitting element on a substrate, to perform surface injection for extracting light emission from the surface opposite to the substrate, bottom emission for extracting light emission from the substrate side, Emitting element having a double-sided emission structure for emitting light from the light-emitting element. Any light-emitting element having any emission structure can be applied.

10 shows an example of a light emitting device using a light emitting element as a display element. The light emitting element 4513 serving as a display element is electrically connected to the transistor 4010 provided in the pixel portion 4002. [ The configuration of the light emitting element 4513 is a laminated structure of the first electrode layer 4030, the electroluminescent layer 4511, and the second electrode layer 4031, but is not limited to the illustrated structure. The configuration of the light emitting element 4513 can be appropriately changed in accordance with the direction of light extracted from the light emitting element 4513 or the like. In addition, in the display device shown in Fig. 8 (B), the cross section in the MN when a light emitting element is employed as a display element corresponds to Fig.

The partition 4510 is formed using an organic insulating material or an inorganic insulating material. It is preferable to form the opening portion on the first electrode layer 4030 using a photosensitive resin material and to form the side wall of the opening portion to be an inclined surface formed with a continuous curvature.

The electroluminescent layer 4511 may be composed of a single layer or a plurality of layers may be laminated.

A protective film may be formed on the second electrode layer 4031 and the barrier ribs 4510 so that oxygen, hydrogen, moisture, carbon dioxide, etc. do not enter the light emitting element 4513. As the protective film, a silicon nitride film, a silicon nitride oxide film, a DLC film, or the like can be formed. A filling material 4514 is provided in the space sealed by the first substrate 4001, the second substrate 4006, and the sealing material 4005, and is sealed. It is preferable that packaging (sealing) is performed with a protective film (an attaching film, an ultraviolet ray hardening resin film, etc.) or a cover material having high airtightness and little degassing so as not to be exposed to the outside air.

As the filler 4514, an ultraviolet ray hardening resin or a thermosetting resin can be used in addition to an inert gas such as nitrogen or argon. The filler 4514 can be formed of a material such as PVC (polyvinyl chloride), acrylic, polyimide, epoxy resin, silicone resin, PVB Or EVA (ethylene vinyl acetate) can be used. For example, nitrogen may be used as a filler.

If necessary, optical films such as a polarizing plate or a circularly polarizing plate (including an elliptically polarizing plate), a retardation plate (? / 4 plate,? / 2 plate) and a color filter may be suitably provided on the emission surface of the light emitting element . An antireflection film may be provided on the polarizing plate or the circularly polarizing plate. For example, anti-glare treatment capable of reducing reflected light by diffusing reflected light by unevenness of the surface can be performed.

It is also possible to provide an electronic paper for driving electronic ink as a display device. The electrophoretic display device (electrophoretic display) is also called an electronic paper, which has an advantage of being easy to read such as paper, low power consumption, and thin and light shape compared to other display devices.

The electrophoretic display device may be in various forms, but microcapsules containing a first particle having a positive charge and a second particle having a negative charge are dispersed in a solvent or a solute, and the microcapsules By applying an electric field, particles in the microcapsules are moved in opposite directions to display only the color of particles collected on one side. Further, the first particle or the second particle includes a dye and does not move in the absence of an electric field. Further, the color of the first particle and the color of the second particle are different (including colorless).

Thus, the electrophoretic display device is a display using a so-called dielectrophoretic effect in which a substance having a high dielectric constant moves to a high electric field region.

The microcapsules dispersed in a solvent are called electronic inks, and the electronic inks can be printed on the surfaces of glass, plastic, cloth, and paper. Color display can also be achieved by using color filters or particles having a dye.

Also, the first particles and the second particles in the microcapsules may be selected from a conductive material, an insulating material, a semiconductor material, a magnetic material, a liquid crystal material, a ferroelectric material, an electroluminescent material, an electrochromic material, One type of material, or a composite material thereof may be used.

As the electronic paper, a display apparatus using a twisted ball display system can also be applied. The twisted ball display method is a method in which spherical particles painted in white and black are arranged between a first electrode layer and a second electrode layer which are electrode layers used for a display element and a spherical particle generating potential difference between the first electrode layer and the second electrode layer And the direction is controlled to perform display.

11 shows an active matrix type electronic paper as one form of a semiconductor device. The electronic paper of Fig. 11 is an example of a display device using a twisted ball display system.

A black region 4615a and a white region 4615b are provided between the first electrode layer 4030 connected to the transistor 4010 and the second electrode layer 4031 provided on the second substrate 4006, Spherical particles 4613 including a filled cavity 4612 are provided and the periphery of the spherical particles 4613 is filled with a filler 4614 such as a resin. And the second electrode layer 4031 corresponds to a common electrode (counter electrode). And the second electrode layer 4031 is electrically connected to the common potential line.

9 to 11, in addition to the glass substrate, a flexible substrate can be used for the first substrate 4001 and the second substrate 4006. For example, a plastic substrate having light transmittance can be used There is a number. As the plastic, an FRP (Fiberglass-Reinforced Plastics) plate, a PVF (polyvinyl fluoride) film, a polyester film, or an acrylic resin film can be used. It is also possible to use a sheet having a structure in which an aluminum foil is sandwiched by a PVF film or a polyester film.

The insulating layer 4021 can be formed using an inorganic insulating material or an organic insulating material. Further, when an organic insulating material having heat resistance such as acrylic resin, polyimide, benzocyclobutene resin, polyamide, or epoxy resin is used, it is very suitable as a planarization insulating film. In addition to the organic insulating material, a low dielectric constant material (low-k material), siloxane-based resin, PSG (phosphorous glass), BPSG (boron glass) and the like can be used. An insulating layer may be formed by laminating a plurality of insulating films formed of such a material.

The method of forming the insulating layer 4021 is not particularly limited and may be appropriately selected depending on the material thereof such as sputtering, spin coating, dipping, spray coating, droplet discharging (inkjet), screen printing, Coating, knife coating, and the like can be used.

A display device transmits light from a light source or a display element to perform display. Therefore, thin films such as a substrate, an insulating film, and a conductive film provided in the pixel portion through which light is transmitted are made transparent to light in the wavelength region of the visible light.

In the first electrode layer and the second electrode layer (also referred to as a pixel electrode layer, a common electrode layer, a counter electrode layer, or the like) for applying a voltage to the display element, a light-transmissive and reflective layer may be formed depending on the direction of light to be taken, Reflectivity may be selected.

The first electrode layer 4030 and the second electrode layer 4031 may be formed of indium oxide including tungsten oxide, indium zinc oxide including tungsten oxide, indium oxide including titanium oxide, indium tin oxide including titanium oxide, , ITO), indium zinc oxide, indium tin oxide added with silicon oxide, or the like can be used.

The first electrode layer 4030 and the second electrode layer 4031 may be formed of tungsten (W), molybdenum (Mo), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta) A metal such as chromium (Cr), cobalt (Co), nickel (Ni), titanium (Ti), platinum (Pt), aluminum (Al), copper (Cu) And can be formed from one or more kinds of nitride.

In addition, since the transistor is easily broken by static electricity or the like, it is preferable to provide a protection circuit for protecting the drive circuit. The protection circuit is preferably constructed using a non-linear element.

As described above, by applying the transistors exemplified in Embodiments 1 to 3, a highly reliable semiconductor device can be provided.

The present embodiment can be implemented in appropriate combination with the configuration described in the other embodiments.

(Seventh Embodiment)

It is possible to manufacture a semiconductor device having an image sensor function of reading information of an object by using transistors exemplified in any of Embodiments 1 to 3 as an example.

Fig. 12 (A) shows an example of a semiconductor device having an image sensor function. 12 (A) is an equivalent circuit of a photosensor, and FIG. 12 (B) is a cross-sectional view showing a part of a photosensor.

In the photodiode 602, one electrode is electrically connected to the photodiode reset signal line 658, and the other electrode is electrically connected to the gate of the transistor 640. One of the source and the drain of the transistor 640 is electrically connected to the photosensor reference signal line 672 and the other of the source and the drain is electrically connected to either the source or the drain of the transistor 656. The gate of the transistor 656 is electrically connected to the gate signal line 659 and the other of the source and the drain is electrically connected to the photosensor output signal line 671.

In the circuit diagram of this specification, "OS" is described as a symbol of a transistor using an oxide semiconductor film so as to be clearly understood as a transistor using an oxide semiconductor film. In Fig. 12A, the transistor 640 and the transistor 656 are transistors using an oxide semiconductor film.

12B is a cross-sectional view of a photodiode 602 and a transistor 640 in a photosensor. On the substrate 601 (TFT substrate) having an insulating surface, a photodiode 602 And a transistor 640 are provided. A substrate 613 is provided on the photodiode 602 and the transistor 640 by using an adhesive layer 608. An insulating film 631, a first interlayer insulating layer 633, and a second interlayer insulating layer 634 are provided on the transistor 640.

An electrode layer 645b is provided in the same layer as the gate electrode 645a so as to be electrically connected to the gate electrode 645a of the transistor 640. [ The electrode layer 645b is electrically connected to the electrode layer 641a through an opening provided in the insulating film 631 and the first interlayer insulating layer 633. [ The electrode layer 641a is electrically connected to the electrode layer 642 formed in the second interlayer insulating layer 634 and the electrode layer 642 is electrically connected to the gate electrode 645a through the electrode layer 641a, The photodiode 602 is electrically connected to the transistor 640.

The photodiode 602 is provided on the first interlayer insulating layer 633 and includes an electrode layer 641b formed on the first interlayer insulating layer 633 and an electrode layer 641b provided on the second interlayer insulating layer 634 The second semiconductor layer 606b and the third semiconductor layer 606c are stacked in this order from the side of the first interlayer insulating layer 633 between the first semiconductor layer 602a and the second semiconductor layer 602b.

In this embodiment mode, the transistors shown in any of Embodiments 1, 2, and 3 can be applied as the transistor 640. [ Since the transistor 640 and the transistor 656 are electrically stable because variations in electrical characteristics are suppressed, a highly reliable semiconductor device of the present embodiment shown in Fig. 12 can be provided.

Here, as the first semiconductor layer 606a, a semiconductor layer having a p-type conductivity, a semiconductor layer (I-type semiconductor layer) having a high resistance as a second semiconductor layer 606b, and a third semiconductor layer 606c there is illustrated a pin-type photodiode for laminating semiconductor layers having n-type conductivity.

The first semiconductor layer 606a is a p-type semiconductor layer and can be formed of an amorphous silicon film including an impurity element imparting p-type conductivity. The first semiconductor layer 606a is formed by a plasma CVD method using a semiconductor material gas containing a Group 13 element (for example, boron (B)). As the semiconductor material gas, silane (SiH ₄ ) may be used. Alternatively, Si ₂ H ₆ , SiH ₂ Cl ₂ , SiHCl ₃ , SiCl ₄ , SiF _4, or the like may be used. It is also possible to introduce an impurity element into the amorphous silicon film by using a diffusion method or an ion implantation method after forming an amorphous silicon film not containing an impurity element. The impurity element may be diffused by heating or the like after the impurity element is introduced by the ion implantation method or the like. In this case, the amorphous silicon film may be formed by an LPCVD method, a vapor phase growth method, a sputtering method, or the like. The film thickness of the first semiconductor layer 606a is preferably 10 nm or more and 50 nm or less.

The second semiconductor layer 606b is an i-type semiconductor layer (intrinsic semiconductor layer), and is formed of an amorphous silicon film. For forming the second semiconductor layer 606b, an amorphous silicon film is formed by a plasma CVD method using a semiconductor material gas. As the semiconductor material gas, silane (SiH ₄ ) may be used. Alternatively, Si ₂ H ₆ , SiH ₂ Cl ₂ , SiHCl ₃ , SiCl ₄ , SiF _4, or the like may be used. The second semiconductor layer 606b may be formed by an LPCVD method, a vapor phase growth method, a sputtering method, or the like. The thickness of the second semiconductor layer 606b is preferably 200 nm or more and 1000 nm or less.

The third semiconductor layer 606c is an n-type semiconductor layer formed of an amorphous silicon film including an impurity element imparting n-type conductivity. The third semiconductor layer 606c is formed by a plasma CVD method using a semiconductor material gas containing a Group 15 element (for example, phosphorus (P)). As the semiconductor material gas, silane (SiH ₄ ) may be used. Alternatively, Si ₂ H ₆ , SiH ₂ Cl ₂ , SiHCl ₃ , SiCl ₄ , SiF _4, or the like may be used. It is also possible to introduce an impurity element into the amorphous silicon film by using a diffusion method or an ion implantation method after forming an amorphous silicon film not containing an impurity element. The impurity element may be diffused by heating or the like after the impurity element is introduced by the ion implantation method or the like. In this case, the amorphous silicon film may be formed by an LPCVD method, a vapor phase growth method, a sputtering method, or the like. It is preferable that the film thickness of the third semiconductor layer 606c is 20 nm or more and 200 nm or less.

The first semiconductor layer 606a, the second semiconductor layer 606b, and the third semiconductor layer 606c may be formed using a polycrystalline semiconductor instead of an amorphous semiconductor, or a microcrystalline semiconductor (a semi- amorphous semiconductor Semi Amorphous Semiconductor (SAS).

Microcrystalline semiconductors belong to the intermediate metastable state between amorphous and single crystals, considering the free energy of Gibbs. That is, it is a semiconductor having a thermodynamically stable third state and has a short-range order and has a lattice distortion. Columnar or acicular crystals are grown in the normal direction with respect to the substrate surface. In the microcrystalline silicon, which is a typical example of the microcrystalline semiconductor, the Raman spectrum is shifted to the lower wavenumber side than 520 cm ^-1 which represents single crystal silicon. I.e., 520 cm indicates a single crystal silicon ^- a Raman spectrum of the microcrystalline silicon between the 480 cm ^-1 peak representing the ^first and the amorphous silicon. It also contains at least 1 atomic% or more of hydrogen or halogen to terminate the dangling bonds. In addition, by incorporating rare gas elements such as helium, argon, krypton, neon and the like to further promote lattice distortion, the stability is increased and a good microcrystalline semiconductor film can be obtained.

This microcrystalline semiconductor film can be formed by a high frequency plasma CVD method with a frequency of several tens MHz to several hundreds MHz or a microwave plasma CVD apparatus with a frequency of 1 GHz or more. Typically, SiH ₄ , Si ₂ H ₆ , SiH ₂ Cl ₂ , SiHCl ₃ , SiCl ₄ , SiF ₄ and the like can be formed by diluting with hydrogen. Further, in addition to silicon hydride and hydrogen, a microcrystalline semiconductor film can be formed by diluting with one or more rare gas elements selected from helium, argon, krypton, and neon. The flow rate ratio of hydrogen to silicon hydride is set to 5 times or more and 200 times or less, preferably 50 times or more and 150 times or less, more preferably 100 times. Further, in the gas containing silicon, CH _4, C ₂ H ₆ Se, etc. even when the incorporation of the hydrocarbon gas, GeH _4, GeF _4, such as Germanium Chemistry gas, F ₂ and the like.

Further, since the mobility of holes generated by the photoelectric effect is smaller than the mobility of electrons, the pin-type photodiode exhibits a good property of using the p-type semiconductor layer side as the light-receiving surface. Here, an example is shown in which light 622 received by the photodiode 602 from the surface of the substrate 601 on which the pin type photodiode is formed is converted into an electric signal. Since the light on the side of the semiconductor layer having the conductive type opposite to the side of the semiconductor layer serving as the light receiving surface becomes disturbance light, the electrode layer 642 may be a conductive film having light shielding properties. Further, the n-type semiconductor layer side may be used as the light receiving surface.

As the first interlayer insulating layer 633 and the second interlayer insulating layer 634, an insulating layer functioning as a planarization insulating film for reducing surface irregularities is preferable. As the first interlayer insulating layer 633 and the second interlayer insulating layer 634, for example, organic insulating materials such as polyimide, acrylic resin, benzocyclobutene resin, polyamide, and epoxy resin can be used. In addition to the organic insulating material, a single layer or a laminate of a low dielectric constant material (low-k material), siloxane resin, PSG (phosphorous glass), BPSG (phosphorous glass) or the like can be used.

As the insulating film 631, the first interlayer insulating layer 633 and the second interlayer insulating layer 634, an insulating material is used. Depending on the material thereof, a sputtering method, a spin coating method, a dipping method, (Inkjet method), screen printing, offset printing, roll coating, curtain coating, knife coating or the like.

By detecting the light 622 incident on the photodiode 602, the information of the object to be detected can be read out. Further, a light source such as a backlight can be used to read the information of the object to be detected.

As the transistor 640, a transistor shown as an example in Embodiment Mode 1, 2, or 3 can be used. A transistor including an oxide semiconductor film which is highly purified by purposely eliminating impurities such as hydrogen, moisture, hydroxyl group or hydride (also referred to as a hydrogen compound) and which contains oxygen excessively by oxygen doping treatment, And is electrically stable. Therefore, a highly reliable semiconductor device can be provided.

The configurations, methods, and the like described in this embodiment can be appropriately combined with the configurations, methods, and the like described in the other embodiments.

(Embodiment 8)

The semiconductor device disclosed in this specification can be applied to various electronic apparatuses (including an entertainment apparatus). Examples of the electronic device include a television (such as a television or a television receiver), a monitor such as a computer, a camera such as a digital camera and a digital video camera, a digital photo frame, a mobile phone A portable game machine, a portable information terminal, a sound reproducing device, a pachinko machine, and the like. An example of an electronic apparatus having the liquid crystal display device described in the above embodiment will be described.

13A is an electronic book (also referred to as E-book), and may have a case 9630, a display portion 9631, an operation key 9632, a solar cell 9633, and a charge / discharge control circuit 9634 . The electronic book shown in Fig. 13A includes a function of displaying various information (still image, moving image, text image, etc.), a function of displaying a calendar, a date or a time on the display unit, Editing functions, functions for controlling processing by various software (programs), and the like. 13A shows a configuration including a battery 9635 and a DCDC converter (hereinafter abbreviated as a converter) 9636 as an example of the charging / discharging control circuit 9634. As shown in Fig. By applying the semiconductor device shown in the previous embodiment to the display portion 9631, an electronic book with high reliability can be obtained.

13A, when a semi-transmissive or reflective liquid crystal display device is used as the display portion 9631, it is expected that the liquid crystal display device will be used under a relatively bright situation, so that power generation by the solar cell 9633, It is possible to efficiently perform charging in the step (9635). Further, since the solar cell 9633 can be appropriately provided in the empty space (the front surface or the back surface) of the case 9630, the solar cell 9633 can be configured to efficiently charge the battery 9635, which is very suitable. As the battery 9635, there is an advantage such that miniaturization can be achieved by using a lithium ion battery.

The configuration and operation of charge / discharge control circuit 9634 shown in Fig. 13 (A) will be described with reference to a block diagram in Fig. 13 (B). 13B shows the solar battery 9633, the battery 9635, the converter 9636, the converter 9637, the switches SW1 to SW3, and the display portion 9631 and includes a battery 9635, The converter 9636, the converter 9637, and the switches SW1 to SW3 correspond to the charge / discharge control circuit 9634.

First, an example of an operation when power is generated by the solar cell 9633 by external light will be described. The power generated by the solar cell is stepped up or stepped down by the converter 9636 so as to be the voltage for charging the battery 9635. [ The switch SW1 is turned on to increase or decrease the voltage required for the converter 9637 and the display portion 9631 in order for the power from the solar cell 9633 to be used for the operation of the display portion 9631. [ When the display on the display portion 9631 is not performed, SW1 may be turned off and SW2 may be turned on to charge the battery 9635. [

Next, an example of the operation in the case where power is not generated by the solar cell 9633 due to external light will be described. The power stored in the battery 9635 is stepped up or stepped down by the converter 9637 by turning on the switch SW3. Then, the power from the battery 9635 is used for the operation of the display portion 9631.

Although the solar cell 9633 is shown as an example of the charging means, it is also possible to charge the battery 9635 by other means. Alternatively, other charging means may be combined.

14A is a notebook personal computer and includes a main body 3001, a case 3002, a display portion 3003, a keyboard 3004, and the like. By applying the semiconductor device shown in the foregoing embodiment to the display portion 3003, a highly reliable note-type personal computer can be obtained.

14B is a portable information terminal (PDA). The main body 3021 is provided with a display portion 3023, an external interface 3025, operation buttons 3024, and the like. There is also a stylus 3022 as an accessory for manipulation. By applying the semiconductor device shown in the previous embodiment to the display portion 3023, a portable information terminal (PDA) having higher reliability can be obtained.

14 (C) shows an example of an electronic book. For example, the electronic book 2700 is composed of two cases: a case 2701 and a case 2703. [ The case 2701 and the case 2703 are integrally formed by a shaft portion 2711 and can perform opening and closing operations with the shaft portion 2711 as an axis. With this configuration, it is possible to perform an operation similar to a paper book.

The case 2701 is provided with a display portion 2705 and the case 2703 is provided with a display portion 2707. [ The display section 2705 and the display section 2707 may be configured to display a continuous screen or display another screen. (A display portion 2705 in Fig. 14C) and a left side display portion (a display portion 2707 in Fig. 14C) displays a sentence on the right side display portion Can be displayed. By applying the semiconductor device shown in the previous embodiment to the display portion 2705 and the display portion 2707, the electronic book 2700 having high reliability can be obtained.

Fig. 14C shows an example in which an operation unit or the like is provided in the case 2701. Fig. For example, the case 2701 includes a power switch 2721, an operation key 2723, a speaker 2725, and the like. The page can be turned over by the operation key 2723. [ Further, a keyboard, a pointing device or the like may be provided on the same surface as the display portion of the case. The external connection terminal (earphone terminal, USB terminal, etc.) and recording medium insertion portion may be provided on the back surface or the side surface of the case. Furthermore, the electronic book 2700 may have a function as an electronic dictionary.

The electronic book 2700 may be configured to transmit and receive information wirelessly. It is also possible to purchase desired book data or the like from an electronic book server by wireless and download the book data.

Fig. 14D is a cellular phone, which is composed of two cases: a case 2800 and a case 2801. Fig. The case 2801 is provided with a display panel 2802, a speaker 2803, a microphone 2804, a pointing device 2806, a camera lens 2807, an external connection terminal 2808, and the like. The case 2800 is provided with a solar cell 2810 for charging the cellular phone, an external memory slot 2811, and the like. Further, the antenna is built in the case 2801. By applying the semiconductor device shown in the previous embodiment to the display panel 2802, a highly reliable cellular phone can be provided.

The display panel 2802 includes a touch panel. In Fig. 14D, a plurality of operation keys 2805, which are video-displayed, are indicated by dotted lines. Further, a step-up circuit for stepping up the voltage output from the solar cell 2810 to the voltage required for each circuit is also mounted.

The display panel 2802 appropriately changes the display direction according to the usage pattern. Further, since the camera lens 2807 is provided on the same plane as the display panel 2802, it is possible to perform image telephony. The speaker 2803 and the microphone 2804 are not limited to a voice call, but may be a video phone, a recording, a playback, and the like. In addition, the case 2800 and the case 2801 can be slid so that they can overlap each other from the state as shown in Fig. 14 (D), enabling miniaturization suitable for a cellular phone.

The external connection terminal 2808 can be connected to various cables such as an AC adapter and a USB cable, and is capable of charging and data communication with a personal computer or the like. In addition, by inserting the recording medium into the external memory slot 2811, a larger amount of data can be saved and moved.

In addition to the above functions, it may be equipped with an infrared communication function, a TV receiving function, and the like.

14E is a digital video camera and is constituted by a main body 3051, a display portion A 3057, an eyepiece portion 3053, an operation switch 3054, a display portion B 3055, a battery 3056, . By applying the semiconductor device shown in any of the above embodiments to the display portion (A) 3057 and the display portion (B) 3055, a highly reliable digital video camera can be obtained.

Fig. 14 (F) shows an example of a television apparatus. In the television set 9600, a display portion 9603 is provided in a case 9601. [ An image can be displayed by the display portion 9603. Here, the case 9601 is supported by the stand 9605. By applying the semiconductor device shown in the previous embodiment to the display portion 9603, the highly reliable television device 9600 can be obtained.

The operation of the television set 9600 can be performed by an operation switch provided in the case 9601 or a separate remote controller. Further, the remote controller may be provided with a display unit for displaying information output from the remote controller.

Further, the television set 9600 has a configuration including a receiver, a modem, and the like. (From a sender to a receiver) or bidirectional (between a sender and a receiver or between a receiver and the like) by connecting to a wired or wireless communication network via a modem. It is also possible to perform the information communication of FIG.

The configurations, methods, and the like described in this embodiment can be appropriately combined with the configurations, methods, and the like described in the other embodiments.

This application is based on Japanese patent application serial number 2010-100241, filed on April 23, 2010, which is incorporated herein by reference in its entirety.

10: Plasma device 11: Substrate supply chamber
12: load lock chamber 13:
14: cassette port 15: vacuum chamber
16: ICP coil 17: gas flow path
18: High frequency power source 19: Substrate stage
20: substrate to be processed 21: high frequency power source
22: Automatic pressure control valve 23: Turbo molecular pump
24: dry pump 100: substrate
102: Insulating film 102a: Insulating film
102b: insulating film 103a: mask
103b: mask 104a: source electrode
104b: drain electrode 106: oxide semiconductor film
108: oxide semiconductor film 110: gate insulating film
110a: Gate insulating film 110b: Gate insulating film
112: gate electrode 112a: gate electrode
112b: electrode 114: insulating film
120: transistor 130: transistor
140: transistor 150: transistor
151: insulating film 152:
154: electrode 156: wiring
160: transistor 164: capacitive element
180: oxygen 180a: oxygen
180b: oxygen 180c: oxygen
200: substrate 206: element isolation insulating film
208: gate insulating film 210: gate electrode
216: channel forming region 220: impurity region
224: metal compound region 228: insulating film
230: insulating film 240: transistor
601: Substrate 602: Photodiode
606a: semiconductor layer 606b: semiconductor layer
606c: semiconductor layer 608: adhesive layer
613: substrate 631: insulating film
633: interlayer insulating layer 634: interlayer insulating layer
640: transistor 641: electrode layer
641a: electrode layer 641b: electrode layer
642: electrode layer 645: gate electrode
645a: gate electrode 645b: electrode layer
656: transistor 658: photodiode reset signal line
659: Gate signal line 671: Photo sensor output signal line
672: photo sensor reference signal line 2700: electronic book
2701: Case 2703: Case
2705: Display section 2707:
2711: shaft portion 2721: power switch
2723: Operation key 2725: Speaker
2800: Case 2801: Case
2802: Display panel 2803: Speaker
2804: Microphone 2805: Operation keys
2806: pointing device 2807: lens for camera
2808: External connection terminal 2810: Solar cell
2811: External memory slot 3001:
3002: Case 3003:
3004: keyboard 3021:
3022: Stylus 3023: Display
3024: Operation button 3025: External interface
3051: main body 3053: eyepiece
3054: Operation switch 3055: Display section (B)
3056: battery 3057: display portion (A)
4001: Substrate 4002:
4003: a signal line driving circuit 4004: a scanning line driving circuit
4005: seal material 4006: substrate
4008: liquid crystal layer 4010: transistor
4011: transistor 4013: liquid crystal element
4015: connection terminal electrode 4016: terminal electrode
4018: FPC 4018a: FPC
4018b: FPC 4019: Anisotropic conductive film
4021: Insulating layer 4030: Electrode layer
4031: electrode layer 4032: insulating film
4033: insulating film 4510: barrier rib
4511: electroluminescent layer 4513: light emitting element
4514: Filler 4612: Cavity
4613: spherical particles 4614: filler
4615a: black region 4615b: white region
9600: Television apparatus 9601: Case
9603: Display portion 9605: Stand
9630: Case 9631: Display
9632: Operation key 9633: Solar cell
9634: charge / discharge control circuit 9635: battery
9636: Converter 9637: Converter

Claims (11)

A method of manufacturing a semiconductor device,
Forming a first insulating film on a substrate;
Performing a first oxygen doping process on the first insulating film to supply oxygen atoms to the first insulating film;
Forming an oxide semiconductor film on the first insulating film, the oxide semiconductor film electrically connecting the source electrode and the drain electrode and the source electrode and the drain electrode;
Performing a heat treatment on the oxide semiconductor film in an atmosphere containing no hydrogen and water;
Forming a second insulating film on the oxide semiconductor film; And
And forming a gate electrode in a region overlapping the oxide semiconductor film on the second insulating film.
A method of manufacturing a semiconductor device,
Forming a first insulating film containing oxygen atoms on a substrate;
Performing a first oxygen doping process on the first insulating film to supply oxygen atoms to the first insulating film;
Forming an oxide semiconductor film on the first insulating film, the oxide semiconductor film electrically connecting the source electrode and the drain electrode and the source electrode and the drain electrode;
Performing a heat treatment on the oxide semiconductor film in an atmosphere containing no hydrogen and water;
Subjecting the oxide semiconductor film to a second oxygen doping treatment to supply oxygen atoms into the oxide semiconductor film;
Forming a second insulating film containing oxygen atoms on the oxide semiconductor film;
Forming a gate electrode in a region overlapping the oxide semiconductor film on the second insulating film; And
Performing a heat treatment in an atmosphere containing no hydrogen and water after or after forming the gate electrode after the second oxygen doping process.
A method of manufacturing a semiconductor device,
Forming a first insulating film containing oxygen atoms on a substrate;
Performing a first oxygen doping process on the first insulating film to supply oxygen atoms to the first insulating film;
Forming an oxide semiconductor film on the first insulating film, the oxide semiconductor film electrically connecting the source electrode and the drain electrode and the source electrode and the drain electrode;
Performing a heat treatment on the oxide semiconductor film in an atmosphere containing no hydrogen and water;
Forming a second insulating film containing oxygen atoms on the oxide semiconductor film;
Performing a second oxygen doping process on the second insulating film to supply oxygen atoms to the second insulating film;
Forming a gate electrode in a region overlapping the oxide semiconductor film on the second insulating film; And
Performing a heat treatment in an atmosphere containing no hydrogen and water after or after forming the gate electrode after the second oxygen doping process.
3. The method of claim 2,
Wherein the second oxygen doping process is performed so that the oxide semiconductor film contains oxygen atoms in a ratio of more than 1 time to less than 2 times the stoichiometric ratio of the oxide semiconductor film.
The method of claim 3,
Wherein the second oxygen doping treatment is performed so that the second insulating film contains oxygen atoms in a ratio of more than 1 to less than 2 times the stoichiometric ratio of the second insulating film.
6. The method according to any one of claims 1 to 5,
Wherein the first oxygen doping process is performed so that the first insulating film contains oxygen atoms in a ratio of more than 1 time to less than 2 times the stoichiometric ratio of the first insulating film.
6. The method according to any one of claims 1 to 5,
Wherein at least one of the first insulating film and the second insulating film is formed of an insulating film containing an elemental element of the oxide semiconductor film.
6. The method according to any one of claims 1 to 5,
Wherein at least one of the first insulating film and the second insulating film is formed from an oxide semiconductor film side by an insulating film including an insulating film including an elemental element of the oxide semiconductor film and an element different from an elemental element of the oxide semiconductor film, Lt; / RTI &gt;
6. The method according to any one of claims 1 to 5,
Wherein at least one of the first insulating film and the second insulating film is formed of an insulating film containing gallium oxide.
6. The method according to any one of claims 1 to 5,
Wherein at least one of the first insulating film and the second insulating film is formed of an insulating film containing gallium oxide and a film containing a material different from gallium oxide from the oxide semiconductor film side.
6. The method according to any one of claims 1 to 5,
And forming an insulating film containing nitrogen so as to cover the gate electrode.

Images