KR101081263B1 - 접착 시트, 이를 이용한 회로 부재의 접속 구조 및 반도체 장치 - Google Patents

접착 시트, 이를 이용한 회로 부재의 접속 구조 및 반도체 장치 Download PDF

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KR101081263B1
KR101081263B1 KR1020087029928A KR20087029928A KR101081263B1 KR 101081263 B1 KR101081263 B1 KR 101081263B1 KR 1020087029928 A KR1020087029928 A KR 1020087029928A KR 20087029928 A KR20087029928 A KR 20087029928A KR 101081263 B1 KR101081263 B1 KR 101081263B1
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adhesive
film
circuit
adhesive sheet
adhesive layer
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KR1020087029928A
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Korean (ko)
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KR20090010105A (ko
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가즈야 사또
마사끼 후지이
데쯔유끼 시라까와
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히다치 가세고교 가부시끼가이샤
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Publication of KR20090010105A publication Critical patent/KR20090010105A/ko
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    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/1026Compound semiconductors
    • H01L2924/1032III-V
    • H01L2924/10329Gallium arsenide [GaAs]
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    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/1026Compound semiconductors
    • H01L2924/1032III-V
    • H01L2924/10336Aluminium gallium arsenide [AlGaAs]
    • HELECTRICITY
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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    • H01L2924/1032III-V
    • H01L2924/10349Aluminium gallium indium phosphide [AlGaInP]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15788Glasses, e.g. amorphous oxides, nitrides or fluorides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0147Carriers and holders
    • H05K2203/0156Temporary polymeric carrier or foil, e.g. for processing or transferring
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Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101075192B1 (ko) 2009-03-03 2011-10-21 도레이첨단소재 주식회사 전자부품 제조용 점착테이프
JP2011140617A (ja) * 2009-12-07 2011-07-21 Hitachi Chem Co Ltd アンダーフィル形成用接着剤組成物、アンダーフィル形成用接着剤シート及び半導体装置の製造方法
WO2011161902A1 (ja) * 2010-06-22 2011-12-29 住友ベークライト株式会社 金属ベース基板を構成する樹脂層の形成に用いる樹脂組成物、金属ベース基板、及び金属ベース基板の製造方法
JP5703621B2 (ja) * 2010-08-09 2015-04-22 日立化成株式会社 回路部材接続用接着剤、回路部材接続用接着剤シート、半導体装置及び半導体装置の製造方法
JP6196893B2 (ja) * 2012-12-18 2017-09-13 新光電気工業株式会社 半導体装置の製造方法
JP6398570B2 (ja) * 2013-10-09 2018-10-03 日立化成株式会社 回路接続材料、回路部材の接続構造体、及び回路部材の接続構造体の製造方法
CN112863732B (zh) * 2014-10-29 2023-01-17 迪睿合株式会社 连接结构体的制造方法、连接结构体以及导电材料
KR101990227B1 (ko) * 2014-12-05 2019-06-17 히타치가세이가부시끼가이샤 반도체용 접착제, 및, 반도체 장치 및 그 제조 방법
JP6536281B2 (ja) * 2015-08-18 2019-07-03 日立化成株式会社 半導体用接着剤、並びに、半導体装置及びその製造方法
KR102608218B1 (ko) * 2015-11-04 2023-11-30 가부시끼가이샤 레조낙 접착제 조성물 및 구조체
KR101715818B1 (ko) * 2016-05-27 2017-03-13 (주)티엠에스 점착시트의 제조 방법
KR102325406B1 (ko) * 2017-04-05 2021-11-12 주식회사 아모센스 다층 인쇄회로기판용 베이스 기재 및 다층 인쇄회로기판 제조방법
WO2018186654A1 (ko) 2017-04-05 2018-10-11 주식회사 아모센스 인쇄회로기판 및 이의 제조 방법
JP6490850B1 (ja) * 2018-03-02 2019-03-27 株式会社有沢製作所 プリプレグ及びプリプレグ成形品の製造方法
CN113141702A (zh) * 2020-01-17 2021-07-20 广东生益科技股份有限公司 一种绝缘片、包含其的印制电路板、半导体装置和埋入式元器件
CN113136145B (zh) * 2020-01-17 2023-04-07 广东生益科技股份有限公司 一种绝缘树脂片及其使用方法、包含其的印制电路板和应用
CN112071922B (zh) * 2020-09-09 2022-05-10 西安宏星电子浆料科技股份有限公司 一种太阳能正银栅线的网印方法
WO2023276889A1 (ja) * 2021-07-01 2023-01-05 昭和電工マテリアルズ株式会社 回路接続用接着剤フィルム、回路接続構造体及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004186280A (ja) * 2002-11-29 2004-07-02 Sekisui Chem Co Ltd ウエハ貼着用粘着シート及び半導体装置の製造方法
JP2005320455A (ja) * 2004-05-10 2005-11-17 Hitachi Chem Co Ltd 接着剤組成物、回路接続材料、回路部材の接続構造及び半導体装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4000655B2 (ja) * 1998-02-26 2007-10-31 日立化成工業株式会社 回路接続用フィルム状接着剤、回路板及びicカード
JP2002097439A (ja) * 2000-09-21 2002-04-02 Hitachi Chem Co Ltd 接着剤組成物、回路接続材料、回路接続用接着剤組成物、接続体及び半導体装置
JP3668439B2 (ja) * 2001-06-14 2005-07-06 ソニーケミカル株式会社 接着フィルム
JP2003197033A (ja) * 2001-12-27 2003-07-11 Hitachi Chem Co Ltd 異方導電性接着剤及び回路板
JP2004231932A (ja) * 2002-12-02 2004-08-19 Nitto Denko Corp 接着剤組成物、接着フィルムおよびこれを用いた半導体装置
JP2004356369A (ja) * 2003-05-29 2004-12-16 Toray Ind Inc 半導体用接着剤付きテープおよびそれを用いた半導体用接続用基板の製造方法
JP2004356368A (ja) * 2003-05-29 2004-12-16 Toray Ind Inc 半導体用接着剤付きテープおよびそれを用いた銅張り積層板、半導体集積回路接続用基板ならびに半導体装置
JP4272471B2 (ja) * 2003-06-19 2009-06-03 三井化学株式会社 フィルム状接着剤
JP4720073B2 (ja) * 2003-08-07 2011-07-13 日立化成工業株式会社 接着剤組成物、回路接続用接着剤組成物、接続体及び半導体装置
JP4907840B2 (ja) * 2003-11-12 2012-04-04 日立化成工業株式会社 異方導電フィルム及びこれを用いた回路板
JP4945881B2 (ja) * 2004-01-23 2012-06-06 日立化成工業株式会社 回路接続用支持体付接着剤、及びそれを用いた回路接続構造体
JP4566568B2 (ja) * 2004-01-23 2010-10-20 日東電工株式会社 半導体装置の製造方法及びこれに用いる耐熱性粘着テープ
JP3958297B2 (ja) * 2004-03-24 2007-08-15 住友ベークライト株式会社 ダイシングシート機能付き半導体用接着フィルム、それを用いた半導体装置の製造方法及び半導体装置
JP2005277135A (ja) * 2004-03-25 2005-10-06 Toray Ind Inc 半導体用接着剤組成物およびそれを用いた半導体用接着剤シート、半導体集積回路接続用基板、半導体装置
CN100345678C (zh) * 2004-05-14 2007-10-31 日东电工株式会社 剥离衬及使用它的压敏性粘接带或片
JP2005350650A (ja) * 2004-05-14 2005-12-22 Nitto Denko Corp 剥離ライナー及びそれを用いた感圧性接着テープ又はシート
US7578891B2 (en) * 2004-05-18 2009-08-25 Hitachi Chemical Company, Ltd. Adhesive bonding sheet, semiconductor device using the same, and method for manufacturing such semiconductor device
JP4333498B2 (ja) * 2004-06-25 2009-09-16 ソニーケミカル&インフォメーションデバイス株式会社 接続材料
JP4604577B2 (ja) * 2004-07-05 2011-01-05 日立化成工業株式会社 接着剤組成物、それを用いたフィルム状接着剤及び回路接続材料、並びに回路部材の接続構造及びその製造方法
JP5236144B2 (ja) * 2004-08-09 2013-07-17 日立化成株式会社 接着剤組成物、回路接続構造体及び半導体装置
JP2006176712A (ja) * 2004-12-24 2006-07-06 Furukawa Electric Co Ltd:The 粘着テープ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004186280A (ja) * 2002-11-29 2004-07-02 Sekisui Chem Co Ltd ウエハ貼着用粘着シート及び半導体装置の製造方法
JP2005320455A (ja) * 2004-05-10 2005-11-17 Hitachi Chem Co Ltd 接着剤組成物、回路接続材料、回路部材の接続構造及び半導体装置

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