KR100747134B1 - 적외선 가열에 의한 솔더 범프 및 와이어 본딩 - Google Patents
적외선 가열에 의한 솔더 범프 및 와이어 본딩 Download PDFInfo
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- KR100747134B1 KR100747134B1 KR1020077003602A KR20077003602A KR100747134B1 KR 100747134 B1 KR100747134 B1 KR 100747134B1 KR 1020077003602 A KR1020077003602 A KR 1020077003602A KR 20077003602 A KR20077003602 A KR 20077003602A KR 100747134 B1 KR100747134 B1 KR 100747134B1
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- wire bonding
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- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/1579—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/592,275 US6384366B1 (en) | 2000-06-12 | 2000-06-12 | Top infrared heating for bonding operations |
| US09/592,275 | 2000-06-12 | ||
| PCT/US2000/032700 WO2001097278A1 (en) | 2000-06-12 | 2000-12-01 | Solder bump and wire bonding by infrared heating |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020027016900A Division KR100747131B1 (ko) | 2000-06-12 | 2000-12-01 | 적외선 가열에 의한 솔더 범프 및 와이어 본딩 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20070034630A KR20070034630A (ko) | 2007-03-28 |
| KR100747134B1 true KR100747134B1 (ko) | 2007-08-09 |
Family
ID=24370021
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020077003602A Expired - Fee Related KR100747134B1 (ko) | 2000-06-12 | 2000-12-01 | 적외선 가열에 의한 솔더 범프 및 와이어 본딩 |
| KR1020027016900A Expired - Fee Related KR100747131B1 (ko) | 2000-06-12 | 2000-12-01 | 적외선 가열에 의한 솔더 범프 및 와이어 본딩 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020027016900A Expired - Fee Related KR100747131B1 (ko) | 2000-06-12 | 2000-12-01 | 적외선 가열에 의한 솔더 범프 및 와이어 본딩 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6384366B1 (enExample) |
| EP (1) | EP1290725A1 (enExample) |
| JP (1) | JP2004503939A (enExample) |
| KR (2) | KR100747134B1 (enExample) |
| CN (1) | CN1229857C (enExample) |
| TW (1) | TW529111B (enExample) |
| WO (1) | WO2001097278A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10147789B4 (de) * | 2001-09-27 | 2004-04-15 | Infineon Technologies Ag | Vorrichtung zum Verlöten von Kontakten auf Halbleiterchips |
| US7288472B2 (en) * | 2004-12-21 | 2007-10-30 | Intel Corporation | Method and system for performing die attach using a flame |
| JP2006261519A (ja) * | 2005-03-18 | 2006-09-28 | Sharp Corp | 半導体装置及びその製造方法 |
| US7677432B2 (en) * | 2005-05-03 | 2010-03-16 | Texas Instruments Incorporated | Spot heat wirebonding |
| US20080152829A1 (en) * | 2006-12-20 | 2008-06-26 | Dean Roy E | Coating compositions, coatings formed therefrom and methods of making the same |
| SG155779A1 (en) * | 2008-03-10 | 2009-10-29 | Micron Technology Inc | Apparatus and methods of forming wire bonds |
| CN102054658B (zh) * | 2009-10-30 | 2013-03-27 | 日月光封装测试(上海)有限公司 | 封装打线工艺的加热治具及其方法 |
| US7871860B1 (en) * | 2009-11-17 | 2011-01-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of semiconductor packaging |
| KR101739752B1 (ko) * | 2010-11-05 | 2017-05-26 | 삼성전자 주식회사 | 와이어 본딩 장치 및 이를 이용한 와이어 본딩 방법 |
| US8533936B1 (en) | 2011-01-26 | 2013-09-17 | Western Digital (Fremont), Llc | Systems and methods for pre-heating adjacent bond pads for soldering |
| US8440503B1 (en) * | 2011-11-16 | 2013-05-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods for performing reflow in bonding processes |
| CN102915933A (zh) * | 2012-09-11 | 2013-02-06 | 厦门锐迅达电子有限公司 | 一种祼晶的表面贴装焊接工艺 |
| TWI804584B (zh) * | 2018-02-28 | 2023-06-11 | 美商瑞西恩公司 | 用於重工倒裝晶片組件的裝置及方法 |
| CN109003969A (zh) * | 2018-08-21 | 2018-12-14 | 佛山市国星光电股份有限公司 | 一种基于高密度显示的cob封装方法、系统及cob器件 |
| US11410961B2 (en) * | 2020-03-17 | 2022-08-09 | Micron Technology, Inc. | Methods and apparatus for temperature modification in bonding stacked microelectronic components and related substrates and assemblies |
| US11804467B2 (en) * | 2020-06-25 | 2023-10-31 | Micron Technology, Inc. | Radiative heat collective bonder and gangbonder |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05335377A (ja) * | 1992-05-29 | 1993-12-17 | Shibuya Kogyo Co Ltd | 半導体チップボンダにおけるチップ加熱機構 |
| US5305944A (en) * | 1992-04-23 | 1994-04-26 | Mitsubishi Denki Kabushiki Kaisha | Bonding method and bonding apparatus |
| US5346857A (en) * | 1992-09-28 | 1994-09-13 | Motorola, Inc. | Method for forming a flip-chip bond from a gold-tin eutectic |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US4170326A (en) * | 1978-01-09 | 1979-10-09 | Gte Automatic Electric Laboratories Incorporated | Method and holding fixture for soldering lead frames to hybrid substrates |
| JPS5565443A (en) * | 1978-11-10 | 1980-05-16 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
| US4915565A (en) * | 1984-03-22 | 1990-04-10 | Sgs-Thomson Microelectronics, Inc. | Manipulation and handling of integrated circuit dice |
| JPS61168233A (ja) | 1985-01-21 | 1986-07-29 | Hitachi Ltd | 半導体装置の修理方法 |
| JPS62188233A (ja) * | 1986-02-13 | 1987-08-17 | Matsushima Kogyo Co Ltd | 半導体ボンデイング装置 |
| JPH0238046B2 (ja) * | 1986-12-27 | 1990-08-28 | Sakamoto Tetsukosho Jugen | Kanjozainosenkosochi |
| JPS63232438A (ja) * | 1987-03-20 | 1988-09-28 | Matsushita Electric Ind Co Ltd | ワイヤボンデイング方法 |
| JPH0296394A (ja) * | 1988-09-30 | 1990-04-09 | Matsushita Electric Ind Co Ltd | はんだ付けリフロー方法 |
| JPH02310939A (ja) | 1989-05-25 | 1990-12-26 | Toshiba Corp | ワイヤーボンディング方法 |
| GB2244374B (en) | 1990-05-22 | 1994-10-05 | Stc Plc | Improvements in hybrid circuits |
| JPH04151844A (ja) | 1990-09-05 | 1992-05-25 | Nec Corp | アウターリードボンディング装置 |
| JPH05109811A (ja) * | 1991-10-15 | 1993-04-30 | Mitsubishi Electric Corp | ワイヤボンデイング装置 |
| JPH05243722A (ja) * | 1992-02-28 | 1993-09-21 | Nec Corp | 半導体装置の実装方法 |
| JP3583462B2 (ja) * | 1993-04-05 | 2004-11-04 | フォード モーター カンパニー | 電子成分のための微小はんだ付け装置および方法 |
| US5783025A (en) * | 1994-06-07 | 1998-07-21 | Texas Instruments Incorporated | Optical diebonding for semiconductor devices |
| US6041994A (en) * | 1994-06-07 | 2000-03-28 | Texas Instruments Incorporated | Rapid and selective heating method in integrated circuit package assembly by means of tungsten halogen light source |
| JPH1050766A (ja) * | 1996-08-02 | 1998-02-20 | Toshiba Corp | フェース・ダウン・ボンディング方法およびその装置 |
| JPH10189643A (ja) * | 1996-12-18 | 1998-07-21 | Texas Instr Inc <Ti> | タングステン・ハロゲン光源を用いる集積回路パッケージ・アッセンブリの高速及び選択的加熱方法 |
| JPH118270A (ja) * | 1997-06-16 | 1999-01-12 | Tokai Rika Co Ltd | 半導体チップの搭載方法、チップオンチップ構造体の製造方法及びチップオンボード構造体の製造方法 |
| JP3344289B2 (ja) * | 1997-07-18 | 2002-11-11 | 松下電器産業株式会社 | バンプ付ワークの実装方法 |
-
2000
- 2000-06-12 US US09/592,275 patent/US6384366B1/en not_active Expired - Lifetime
- 2000-12-01 WO PCT/US2000/032700 patent/WO2001097278A1/en not_active Ceased
- 2000-12-01 CN CNB008196419A patent/CN1229857C/zh not_active Expired - Fee Related
- 2000-12-01 EP EP00988009A patent/EP1290725A1/en active Pending
- 2000-12-01 KR KR1020077003602A patent/KR100747134B1/ko not_active Expired - Fee Related
- 2000-12-01 JP JP2002511381A patent/JP2004503939A/ja active Pending
- 2000-12-01 KR KR1020027016900A patent/KR100747131B1/ko not_active Expired - Fee Related
-
2001
- 2001-06-05 TW TW090113541A patent/TW529111B/zh not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5305944A (en) * | 1992-04-23 | 1994-04-26 | Mitsubishi Denki Kabushiki Kaisha | Bonding method and bonding apparatus |
| JPH05335377A (ja) * | 1992-05-29 | 1993-12-17 | Shibuya Kogyo Co Ltd | 半導体チップボンダにおけるチップ加熱機構 |
| US5346857A (en) * | 1992-09-28 | 1994-09-13 | Motorola, Inc. | Method for forming a flip-chip bond from a gold-tin eutectic |
Also Published As
| Publication number | Publication date |
|---|---|
| TW529111B (en) | 2003-04-21 |
| JP2004503939A (ja) | 2004-02-05 |
| CN1454393A (zh) | 2003-11-05 |
| KR20070034630A (ko) | 2007-03-28 |
| KR20030011887A (ko) | 2003-02-11 |
| EP1290725A1 (en) | 2003-03-12 |
| KR100747131B1 (ko) | 2007-08-09 |
| CN1229857C (zh) | 2005-11-30 |
| US6384366B1 (en) | 2002-05-07 |
| WO2001097278A1 (en) | 2001-12-20 |
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