KR100520714B1 - 수성조성물, 이것을 사용한 수성절삭액, 이들 제조방법 및 이 수성절삭액을 사용한 절삭방법 - Google Patents
수성조성물, 이것을 사용한 수성절삭액, 이들 제조방법 및 이 수성절삭액을 사용한 절삭방법 Download PDFInfo
- Publication number
- KR100520714B1 KR100520714B1 KR10-1999-7009826A KR19997009826A KR100520714B1 KR 100520714 B1 KR100520714 B1 KR 100520714B1 KR 19997009826 A KR19997009826 A KR 19997009826A KR 100520714 B1 KR100520714 B1 KR 100520714B1
- Authority
- KR
- South Korea
- Prior art keywords
- cutting
- aqueous
- liquid
- polyhydric alcohol
- particles
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M125/00—Lubricating compositions characterised by the additive being an inorganic material
- C10M125/26—Compounds containing silicon or boron, e.g. silica, sand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/007—Use, recovery or regeneration of abrasive mediums
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/20—Metal working
- C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2050/00—Form in which the lubricant is applied to the material being lubricated
- C10N2050/01—Emulsions, colloids, or micelles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Lubricants (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
실시예4 | 실시예5 | 비교예1 | 비교예2 | |
휘어짐 (μm) | 15 | 20 | 25 | 30 |
두께의 격차(μm) | ±15 | ±10 | ±25 | ±20 |
테이퍼 (μm) | 20 | 15 | 30 | 25 |
Claims (10)
- 친수성다가알콜계화합물과, 친유성다가알콜계화합물과, 물을 포함하는 분산매중에 규산콜로이드입자가 분산되어 이루어지는 것을 특징으로 하는 수성조성물.
- 제 1 항에 있어서, 상기 친수성다가알콜계화합물이 에틸렌글리콜인 것을 특징으로 하는 수성조성물.
- 제 1 항에 있어서, 상기 친유성다가알콜계화합물이 프로필렌글리콜인 것을 특징으로 하는 수성조성물.
- 제 1 항에 있어서, 상기 분산매 중에 있어서 물의 함유량이 5중량% 이상, 50중량% 미만인 것을 특징으로 하는 수성조성물.
- 제 1 항에 있어서, 상기 분산매 중에 카르본산 또는 그 유도체의 적어도 한쪽이 포함되는 것을 특징으로 하는 수성조성물.
- 친수성다가알콜계화합물과, 친유성다가알콜계화합물과, 물을 포함하는 분산매 중에서, 연마용 입자가 규산콜로이드입자와 함께 분산되어 이루어지는 것을 특징으로 하는 수성절삭액.
- 물과, 친수성다가알콜계화합물과, 규산염을 혼합하고, 규산을 생성시킨 제1액을 조제하는 공정과, 상기 제1액을, 친유성다가알콜계화합물을 주체로 하는 제2액을 혼합하고, 상기 규산콜로이드입자로서 안정화시키는 공정을 갖는 것을 특징으로 하는 수성조성물의 제조방법.
- 물과, 친수성다가알콜계화합물과 규산염을 혼합하고, 규산을 생성시킨 제1액을 조제하는 공정과, 상기 제1액을, 친유성다가알콜계화합물을 주체로 하는 제2액을 혼합하여 상기 규산콜로이드입자로서 안정화시킨 수성조성물을 얻는 공정과, 상기 수성조성물에 연마용 입자를 혼합분산시키는 공정을 갖는 것을 특징으로 하는 수성절삭액의 제조방법.
- 피가공체와 절삭수단을 수성절삭액의 존재 하에 동적으로 접촉시킴으로써 해당 피가공체를 절삭하는 절삭방법으로서, 상기 수성절삭액으로서 친수성다가알콜계화합물과, 친유성다가알콜계화합물과, 물을 포함하는 분산매 중에, 연마용 입자를 규산콜로이드입자와 함께 분산시킨 것을 사용하는 것을 특징으로 하는 절삭방법.
- 제 9 항에 있어서, 상기 피가공체로서 반도체 잉곳을 절삭하는 것을 특징으로 하는 절삭방법.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP128268 | 1998-04-21 | ||
JP12826898A JP3296781B2 (ja) | 1998-04-21 | 1998-04-21 | 水性切削液、その製造方法、ならびにこの水性切削液を用いた切削方法 |
PCT/JP1999/001895 WO1999054427A1 (fr) | 1998-04-21 | 1999-04-09 | Composition aqueuse, fluide de coupe aqueux utilisant cette composition, procede de preparation de ce fluide, et procede de coupe utilisant ce fluide |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010020235A KR20010020235A (ko) | 2001-03-15 |
KR100520714B1 true KR100520714B1 (ko) | 2005-10-11 |
Family
ID=14980643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-1999-7009826A KR100520714B1 (ko) | 1998-04-21 | 1999-04-09 | 수성조성물, 이것을 사용한 수성절삭액, 이들 제조방법 및 이 수성절삭액을 사용한 절삭방법 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6221814B1 (ko) |
EP (1) | EP1001006B1 (ko) |
JP (1) | JP3296781B2 (ko) |
KR (1) | KR100520714B1 (ko) |
CN (2) | CN1113951C (ko) |
DE (1) | DE69911549T2 (ko) |
TW (1) | TWI229128B (ko) |
WO (1) | WO1999054427A1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100975877B1 (ko) | 2008-02-18 | 2010-08-13 | 허인랑 | 실리콘 잉곳 절삭용 절삭유 및 그 제조장치 및 그 방법 |
Families Citing this family (88)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3389141B2 (ja) * | 1999-04-26 | 2003-03-24 | 株式会社スーパーシリコン研究所 | スライシング用スラリーの評価方法及びスラリー |
JP4759790B2 (ja) * | 2000-07-25 | 2011-08-31 | 日立金属株式会社 | 希土類合金の切断方法および希土類合金磁石の製造方法 |
JP2002060777A (ja) * | 2000-08-22 | 2002-02-26 | Ishii Hyoki Corp | ワイヤーソー用水性スラリー |
US6837778B2 (en) | 2000-11-24 | 2005-01-04 | Neomax Co., Ltd | Method for cutting rare earth alloy, method for manufacturing rare earth magnet, and wire-saw machine |
US20030130142A1 (en) * | 2001-08-16 | 2003-07-10 | Nguyen Duong N. | Water-dispersible lubricating blend for metal working processes |
TW575660B (en) * | 2001-09-07 | 2004-02-11 | Dai Ichi Kogyo Seiyaku Co Ltd | Nonflammable water-based cutting fluid composition and nonflammable water-based cutting fluid |
US7658941B2 (en) * | 2002-05-01 | 2010-02-09 | Johnson & Johnson Consumer Companies, Inc. | Warming and nonirritating lubricant compositions and method of comparing irritation |
US7417013B2 (en) * | 2002-05-01 | 2008-08-26 | Mcneil-Ppc, Inc. | Warming and nonirritating lubricant compositions and method of comparing irritation |
US20040167039A1 (en) * | 2002-05-01 | 2004-08-26 | Nawaz Ahmad | Warming and nonirritating lubricant compositions and method of comparing irritation |
ATE396705T1 (de) * | 2002-05-01 | 2008-06-15 | Mcneil Ppc Inc | Erwärmende und nicht irritierende antifungale schmiermittelzubereitung in gelform |
US7695730B2 (en) * | 2002-05-01 | 2010-04-13 | Mcneil-Ppc, Inc. | Warming and nonirritating lubricant compositions and method of comparing irritation |
US7005408B2 (en) | 2002-05-01 | 2006-02-28 | Mcneil-Ppc, Inc. | Warming and nonirritating lubricant compositions and method of comparing irritation |
US20040185065A1 (en) * | 2002-05-01 | 2004-09-23 | Nawaz Ahmad | Warming and nonirritating lubricant compositions and method of comparing irritation |
JP2006514857A (ja) * | 2002-11-04 | 2006-05-18 | アシュランド インク | 高増殖性または感染細胞の増殖防止における、超音波を用いた液体媒体の処理装置および方法 |
JP2004214588A (ja) * | 2002-11-15 | 2004-07-29 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
US7048863B2 (en) * | 2003-07-08 | 2006-05-23 | Ashland Licensing And Intellectual Property Llc | Device and process for treating cutting fluids using ultrasound |
US20090053163A1 (en) * | 2003-10-30 | 2009-02-26 | Nawaz Ahmad | Warming and nonirritating lubricant compositions and method of comparing irritation |
JP2006096951A (ja) * | 2004-09-30 | 2006-04-13 | Kyodo Yushi Co Ltd | 水溶性切断加工用油剤、スラリー、及び切断加工方法 |
JP4481898B2 (ja) * | 2005-07-25 | 2010-06-16 | ユシロ化学工業株式会社 | 水性砥粒分散媒組成物 |
CN1328363C (zh) * | 2005-08-02 | 2007-07-25 | 广州机械科学研究院 | 一种无氯极压微乳切削液及其制备方法与应用 |
US20070059250A1 (en) * | 2005-09-12 | 2007-03-15 | Nawaz Ahmad | Sprayable personal lubricant |
US7851419B2 (en) * | 2005-09-12 | 2010-12-14 | Nawaz Ahmad | Substantially anhydrous sprayable personal lubricant |
JP2007150167A (ja) * | 2005-11-30 | 2007-06-14 | Shin Etsu Handotai Co Ltd | 半導体ウエーハの平面研削方法および製造方法 |
CN101113029B (zh) * | 2006-07-26 | 2010-09-29 | 金柏林 | 单晶硅切割废液的处理回收方法 |
US7820126B2 (en) * | 2006-08-18 | 2010-10-26 | Iosil Energy Corporation | Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon |
KR100845740B1 (ko) * | 2007-02-26 | 2008-07-11 | 강릉대학교산학협력단 | 세라믹 수계 절삭액 조성물 |
US8157876B2 (en) * | 2007-07-31 | 2012-04-17 | Cabot Microelectronics Corporation | Slurry composition containing non-ionic polymer and method for use |
US20090032006A1 (en) * | 2007-07-31 | 2009-02-05 | Chul Woo Nam | Wire saw process |
DE102007050483A1 (de) * | 2007-10-19 | 2009-09-10 | Meyer Burger Ag | Mischung aus einem thixotropen Dispersionsmedium sowie abrasiv wirkenden Körnern als Schleifmittel |
JP2011516290A (ja) * | 2008-04-11 | 2011-05-26 | イオシル エナジー コーポレイション | 使用済みウェーハソーイングスラリーからの珪素及び炭化珪素の回収のための方法及び装置 |
JP5539321B2 (ja) * | 2008-04-24 | 2014-07-02 | ピーピーティー リサーチ,インク. | 安定な水性スラリー懸濁物 |
US7985719B2 (en) * | 2008-04-28 | 2011-07-26 | Ward Irl E | Cutting and lubricating composition for use with a wire cutting apparatus |
WO2009133612A1 (ja) | 2008-04-30 | 2009-11-05 | パレス化学株式会社 | 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 |
JP4947384B2 (ja) * | 2008-08-07 | 2012-06-06 | 大学共同利用機関法人 高エネルギー加速器研究機構 | 超伝導高周波加速空洞の製造方法 |
JP5350839B2 (ja) * | 2009-03-05 | 2013-11-27 | 出光興産株式会社 | 脆性材料用加工油および加工油組成物 |
CN101649244B (zh) * | 2009-07-13 | 2012-08-22 | 爱普科斯科技(无锡)有限公司 | 晶圆切割液 |
DE102009046265A1 (de) * | 2009-10-30 | 2011-05-19 | Rheinisch-Westfälische Technische Hochschule Aachen | Verfahren zur Aufarbeitung von Sägerückständen aus der Produktion von Silizium-Wafern |
CN102242011B (zh) * | 2010-05-12 | 2013-06-05 | 昆山信宇化学有限公司 | 生物稳定可降解型水性金属切削液及其制备方法 |
CN101886021A (zh) * | 2010-07-07 | 2010-11-17 | 范成立 | 一种镁合金切削液及其制备方法 |
CN102311860B (zh) * | 2011-04-26 | 2013-07-24 | 东莞市安美润滑科技有限公司 | 用于钕铁硼材料切片加工的水基切削液及其使用方法 |
CN102212412B (zh) * | 2011-05-10 | 2013-10-23 | 天津理工大学 | 一种磨料经过表面活性剂处理的水基切削液及其制备方法 |
CN102295975B (zh) * | 2011-07-26 | 2013-08-14 | 天津市东方特种润滑油有限公司 | 一种水溶性切削油及其制备方法 |
CN103013625A (zh) * | 2011-09-28 | 2013-04-03 | 天津博克尼科技发展有限公司 | 一种乳液型防锈切削液 |
CN103013639A (zh) * | 2011-09-28 | 2013-04-03 | 天津博克尼科技发展有限公司 | 一种水基型防锈切削液 |
JP5907997B2 (ja) * | 2012-02-02 | 2016-04-26 | しのはらプレスサービス株式会社 | 超伝導加速空洞の純ニオブ製エンドグループ部品の製造方法 |
CN102776060B (zh) * | 2012-08-16 | 2013-12-11 | 温州宝罗润滑材料有限公司 | 一种聚乙二醇油酸酯全合成切削液及其制备方法 |
CN102839042A (zh) * | 2012-08-27 | 2012-12-26 | 句容市恒祥金属再生利用有限公司 | 高工钢砂轮磨削用切削液 |
CN102787008B (zh) * | 2012-08-29 | 2013-09-25 | 上海宏泽化工有限公司 | 一种用于铝合金锯切的润滑油及其制备方法 |
CN103113970B (zh) * | 2012-12-31 | 2014-03-26 | 上海源育节能环保科技有限公司 | 一种水溶性准干切削液及其制备方法和用途 |
CN103113971B (zh) * | 2013-02-22 | 2014-03-05 | 上海源育节能环保科技有限公司 | 一种不锈钢准干切削加工微乳液及其制备方法 |
CN103305323A (zh) * | 2013-05-20 | 2013-09-18 | 无锡市华明化工有限公司 | 一种有色金属切削油 |
CN103351921B (zh) * | 2013-06-19 | 2016-03-02 | 安徽富华电子集团有限公司 | 一种铜铝拉丝纳米石墨润滑剂及其制备方法 |
CN103351922B (zh) * | 2013-06-19 | 2016-03-02 | 安徽富华电子集团有限公司 | 一种金属拉丝液及其制备方法 |
CN103351928B (zh) * | 2013-06-19 | 2016-02-24 | 安徽富华电子集团有限公司 | 一种不锈钢拉丝液组合物及其制备方法 |
CN103351917A (zh) * | 2013-06-19 | 2013-10-16 | 安徽富华电子集团有限公司 | 一种全合成铝合金拉丝液及其制备方法 |
CN103361154B (zh) * | 2013-06-21 | 2014-11-26 | 马鞍山市恒毅机械制造有限公司 | 一种镁合金切削液及其制备方法 |
CN103361156B (zh) * | 2013-06-21 | 2014-11-26 | 马鞍山市恒毅机械制造有限公司 | 一种防锈抗菌水基切削液及其制备方法 |
CN103361157B (zh) * | 2013-06-21 | 2014-12-03 | 马鞍山市恒毅机械制造有限公司 | 一种微乳化切削液及其制备方法 |
CN103361159B (zh) * | 2013-06-21 | 2014-11-26 | 马鞍山市恒毅机械制造有限公司 | 一种水基金属切削液及其制备方法 |
CN103361163B (zh) * | 2013-07-04 | 2014-11-19 | 潍坊恒源化工厂 | 一种无腐蚀性水性切削液 |
US11026765B2 (en) | 2013-07-10 | 2021-06-08 | H2O Tech, Inc. | Stabilized, water-jet slurry apparatus and method |
CN103333733B (zh) * | 2013-07-11 | 2015-09-02 | 广州洛德化工科贸有限公司 | 一种适用于无氟制冷行业的冲压油及其制备方法 |
CN103343041B (zh) * | 2013-07-11 | 2015-09-02 | 广州洛德化工科贸有限公司 | 一种适用于无氟制冷行业的切削液及其制备方法 |
CN103409203B (zh) * | 2013-07-23 | 2015-01-21 | 吴江市震宇缝制设备有限公司 | 金属润滑油及其制备方法 |
CN103602472A (zh) * | 2013-11-18 | 2014-02-26 | 青岛广联达精密机械有限公司 | 一种环保型极压切削液 |
CN103602477A (zh) * | 2013-11-18 | 2014-02-26 | 青岛广联达精密机械有限公司 | 一种改进的耐用型安全切削液 |
CN103666728B (zh) * | 2013-12-07 | 2016-02-10 | 安徽瑞庆信息科技有限公司 | 一种用于固定磨料线切割的切削液及其制备方法 |
CN103666726B (zh) * | 2013-12-07 | 2016-02-10 | 安徽瑞庆信息科技有限公司 | 一种水基防锈切削液及其制备方法 |
CN103666730B (zh) * | 2013-12-07 | 2016-02-10 | 安徽瑞庆信息科技有限公司 | 一种冷却速度快的切削液及其制备方法 |
CN103756768B (zh) * | 2014-01-22 | 2015-07-15 | 北京科技大学 | 一种抗硬水的高性能冷轧乳化液及其制备方法 |
CN103992864B (zh) * | 2014-04-25 | 2016-04-13 | 蚌埠市正园电子科技有限公司 | 一种含气相二氧化硅的拉丝油 |
CN103992855B (zh) * | 2014-04-25 | 2016-02-10 | 蚌埠市时代电子有限公司 | 一种清净减磨高效拉丝油 |
CN103992869B (zh) * | 2014-04-25 | 2016-02-10 | 蚌埠市正园电子科技有限公司 | 一种含脂溶性茶多酚的拉丝油 |
CN104017637B (zh) * | 2014-06-13 | 2015-08-05 | 上海金兆节能科技有限公司 | 一种环保型微乳化微量切削液及其制备方法 |
CN104130841A (zh) * | 2014-07-15 | 2014-11-05 | 安徽铖友汽车零部件制造有限公司 | 一种可以充当防锈液使用的切削液及其使用方法 |
CN104450009A (zh) * | 2014-08-11 | 2015-03-25 | 全椒县新华机械有限责任公司 | 一种切削液 |
CN104212622A (zh) * | 2014-09-02 | 2014-12-17 | 宁波状元郎电子科技有限公司 | 一种具有良好防锈效果的金属线材专用拉丝液及其制备方法 |
CN104312705B (zh) * | 2014-09-30 | 2017-12-26 | 泰州龙谷信息科技有限公司 | 一种环保切削液及其制备方法 |
CN104357181A (zh) * | 2014-09-30 | 2015-02-18 | 宁波保润石化有限公司 | 一种特种磁性切削油及其配制方法 |
CN104450062A (zh) * | 2014-11-14 | 2015-03-25 | 无锡贺邦金属制品有限公司 | 一种铜带轧制油及其制备方法 |
CN104479826B (zh) * | 2014-12-15 | 2017-09-22 | 贵州红林机械有限公司 | 超硬材料加工过程中的切削液 |
CN104479828A (zh) * | 2014-12-25 | 2015-04-01 | 常熟市江南锻造有限公司 | 一种适于高速钢使用的金属加工液 |
CN104479830A (zh) * | 2014-12-25 | 2015-04-01 | 常熟市江南锻造有限公司 | 一种防霉金属加工液 |
CN104450098A (zh) * | 2014-12-25 | 2015-03-25 | 常熟市江南锻造有限公司 | 一种高温条件下使用的金属加工液 |
CN109835867B (zh) * | 2017-11-24 | 2023-07-14 | 中芯国际集成电路制造(上海)有限公司 | 刻蚀溶液和刻蚀方法 |
CN109652193B (zh) * | 2019-01-25 | 2021-10-08 | 广州科卢斯流体科技有限公司 | 一种亚稳定型半导体金刚线切割液 |
JP7231934B2 (ja) * | 2019-08-28 | 2023-03-02 | パレス化学株式会社 | 水溶性切削加工液 |
CN112708495B (zh) * | 2020-12-29 | 2022-09-02 | 江苏奥首材料科技有限公司 | 一种GaAs晶圆切割液 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1229803A (ko) * | 1968-03-07 | 1971-04-28 | ||
US3909424A (en) * | 1974-06-24 | 1975-09-30 | Dow Corning | Lubricant compositions |
JPS61136909A (ja) * | 1984-12-04 | 1986-06-24 | Mitsubishi Chem Ind Ltd | 無水ケイ酸の水分散液組成物 |
JPS61155486A (ja) * | 1984-12-07 | 1986-07-15 | Nippon Light Metal Co Ltd | 蓄冷剤 |
DE3839580C1 (ko) * | 1988-11-24 | 1990-07-05 | Condea Chemie Gmbh, 2212 Brunsbuettel, De | |
WO1991004820A1 (en) * | 1989-10-04 | 1991-04-18 | Johnson Co., Ltd. | Working fluid usable for both of cutting and electric discharge machining |
JP2894566B2 (ja) | 1989-12-08 | 1999-05-24 | ユシロ化学工業株式会社 | 切断加工用油剤 |
JP2926706B2 (ja) * | 1995-08-22 | 1999-07-28 | 信越半導体株式会社 | 切削液及びワークの切断方法 |
JP3869520B2 (ja) * | 1997-03-21 | 2007-01-17 | 株式会社ネオス | ワイヤソー用水溶性切削液 |
-
1998
- 1998-04-21 JP JP12826898A patent/JP3296781B2/ja not_active Expired - Fee Related
-
1999
- 1999-04-09 KR KR10-1999-7009826A patent/KR100520714B1/ko not_active IP Right Cessation
- 1999-04-09 US US09/423,316 patent/US6221814B1/en not_active Expired - Lifetime
- 1999-04-09 EP EP19990913603 patent/EP1001006B1/en not_active Expired - Lifetime
- 1999-04-09 DE DE69911549T patent/DE69911549T2/de not_active Expired - Lifetime
- 1999-04-09 WO PCT/JP1999/001895 patent/WO1999054427A1/ja active IP Right Grant
- 1999-04-09 CN CN99800279A patent/CN1113951C/zh not_active Expired - Lifetime
- 1999-04-15 TW TW088106041A patent/TWI229128B/zh not_active IP Right Cessation
-
2002
- 2002-12-18 CN CNB021570221A patent/CN1208443C/zh not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100975877B1 (ko) | 2008-02-18 | 2010-08-13 | 허인랑 | 실리콘 잉곳 절삭용 절삭유 및 그 제조장치 및 그 방법 |
Also Published As
Publication number | Publication date |
---|---|
EP1001006A4 (en) | 2000-12-20 |
EP1001006A1 (en) | 2000-05-17 |
CN1208443C (zh) | 2005-06-29 |
JP3296781B2 (ja) | 2002-07-02 |
DE69911549T2 (de) | 2004-04-22 |
EP1001006B1 (en) | 2003-09-24 |
WO1999054427A1 (fr) | 1999-10-28 |
JPH11302681A (ja) | 1999-11-02 |
CN1441040A (zh) | 2003-09-10 |
US6221814B1 (en) | 2001-04-24 |
CN1258311A (zh) | 2000-06-28 |
KR20010020235A (ko) | 2001-03-15 |
DE69911549D1 (de) | 2003-10-30 |
CN1113951C (zh) | 2003-07-09 |
TWI229128B (en) | 2005-03-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100520714B1 (ko) | 수성조성물, 이것을 사용한 수성절삭액, 이들 제조방법 및 이 수성절삭액을 사용한 절삭방법 | |
RU2412974C2 (ru) | Композиции на водной основе для абразивных шламов, способы их получения и применения | |
JP4481898B2 (ja) | 水性砥粒分散媒組成物 | |
KR20140039260A (ko) | 연마용 조성물 | |
JP5698147B2 (ja) | ワイヤーソー切断のための切断用流体組成物 | |
EP0709448A2 (en) | Cutting fluid, method for production thereof, and method for cutting ingots | |
JP5408251B2 (ja) | 水性切削剤 | |
JP4827805B2 (ja) | 硬脆材料用精密研磨組成物 | |
US20030100455A1 (en) | Aqueous grinding fluid for wire-sawing or band-sawing | |
JP3508970B2 (ja) | 砥粒の水性分散媒組成物及びその切削液を用いるインゴットの切断方法 | |
JPH10259395A (ja) | 切断用加工液および切断用組成物、ならびにそれを用いた固体材料の切断方法 | |
CN1100129C (zh) | 一种石材切割用冷却润滑液及制造方法 | |
KR20110039725A (ko) | 와이어 쏘우용 수용성 절삭액 조성물 | |
JP4206162B2 (ja) | 切削油 | |
KR20140110107A (ko) | 웨이퍼 제조를 위한 냉각 및/또는 윤활 유체 | |
KR101699973B1 (ko) | 와이어 쏘우용 수성 절삭액 조성물 | |
KR20110015192A (ko) | 와이어 쏘우용 수용성 절삭액 조성물 | |
JP2000017251A (ja) | 研磨用水性組成物 | |
KR20120035891A (ko) | 웨이퍼 절삭용 환경 친화적 수용성 절삭유 및 이를 포함한 수용성 웨이퍼 절삭액 조성물 | |
JP2003231022A (ja) | 水性ラッピング剤組成物 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20120924 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20130924 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20141001 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20150917 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20160921 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20170920 Year of fee payment: 13 |
|
FPAY | Annual fee payment |
Payment date: 20180920 Year of fee payment: 14 |
|
EXPY | Expiration of term |