WO2009133612A1 - 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 - Google Patents
水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 Download PDFInfo
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- WO2009133612A1 WO2009133612A1 PCT/JP2008/058283 JP2008058283W WO2009133612A1 WO 2009133612 A1 WO2009133612 A1 WO 2009133612A1 JP 2008058283 W JP2008058283 W JP 2008058283W WO 2009133612 A1 WO2009133612 A1 WO 2009133612A1
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- water
- soluble cutting
- soluble
- cutting liquid
- cutting fluid
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/10—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M105/14—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms polyhydroxy
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/18—Ethers, e.g. epoxides
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
- C10M107/20—Lubricating compositions characterised by the base-material being a macromolecular compound containing oxygen
- C10M107/30—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M107/32—Condensation polymers of aldehydes or ketones; Polyesters; Polyethers
- C10M107/34—Polyoxyalkylenes
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
- C10M169/04—Mixtures of base-materials and additives
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
- C10M2201/08—Inorganic acids or salts thereof
- C10M2201/082—Inorganic acids or salts thereof containing nitrogen
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
- C10M2201/08—Inorganic acids or salts thereof
- C10M2201/082—Inorganic acids or salts thereof containing nitrogen
- C10M2201/083—Inorganic acids or salts thereof containing nitrogen nitrites
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/1033—Polyethers, i.e. containing di- or higher polyoxyalkylene groups used as base material
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
- C10M2209/1085—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified used as base material
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
- C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/02—Groups 1 or 11
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/04—Groups 2 or 12
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/06—Groups 3 or 13
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/08—Groups 4 or 14
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/10—Groups 5 or 15
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/12—Groups 6 or 16
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/14—Group 7
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/16—Groups 8, 9, or 10
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/02—Pour-point; Viscosity index
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/20—Metal working
- C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
Definitions
- the present invention relates to a water-soluble cutting liquid composition used for cutting an ingot or the like using a wire saw or a band saw, a water-soluble cutting liquid containing the composition, and a cutting method using the water-soluble cutting liquid.
- a cutting liquid is used for the purpose of lubrication between the cutting tool and the workpiece, removal of frictional heat, cleaning of cutting waste, etc.
- a water-insoluble cutting liquid mainly composed of mineral oil is used (Patent Document 1).
- Patent Document 1 a water-insoluble cutting liquid mainly composed of mineral oil is used (Patent Document 1).
- Patent Document 1 a water-insoluble cutting liquid mainly composed of mineral oil.
- such a non-water-soluble cutting solution will cause the water-insoluble cutting solution to adhere to the material to be cut after cutting, so the material to be cut must be washed using a special cleaning agent such as an organic solvent. It has a problem of not becoming.
- Patent Documents 2 to 5 a water-soluble cutting solution capable of washing the cutting solution adhering to the object to be cut with water is also used.
- Patent Documents 2 to 5 a water-soluble cutting solution capable of washing the cutting solution adhering to the object to be cut with water.
- Patent Documents 2 to 5 since such a water-soluble cutting solution does not contain water, it has a problem that it is easily ignited.
- a water-soluble cutting solution containing water is also used (Patent Documents 6 to 8).
- a water-soluble cutting liquid water and silicon fine powder generated from the material to be cut (silicon) react during the cutting to generate gas, and the viscosity of the water-soluble cutting liquid changes.
- Patent Document 9 a water-soluble oil modifier for cutting processing containing an oxidizing agent such as hydrogen peroxide
- Patent Document 10 an aqueous abrasive dispersion medium composition containing glycol ethers
- Patent Document 10 JP-A-10-110180 JP-A-10-110180 Japanese Patent Laid-Open No. 11-286693 JP 2002-537440 Gazette JP 2002-80883 A Japanese Patent Laid-Open No. 10-81872 JP-A-10-259396 JP 11-302681 A JP 2006-182901 A JP 2007-31502 A
- the present invention provides a water-soluble cutting solution composition that suppresses ignition and gas generation, has high safety and has little viscosity change, a water-soluble cutting solution, and a cutting method using the water-soluble cutting solution. With the goal.
- the present inventors have conducted extensive research.
- the third component By containing at least one of a nitrite-based vaporizable rust preventive and a mixture of amines and nitrites, it is possible to suppress ignition and gas generation, to have high safety and to reduce viscosity change. I found.
- the present invention relates to at least one of a mixture of at least one glycol of glycol, glycol ether, polyalkylene glycol and polyalkylene glycol ether, water, a nitrite-based vaporizable rust inhibitor, and amines and nitrite.
- a water-soluble cutting liquid composition characterized by comprising
- this invention is a water-soluble cutting liquid characterized by including the said water-soluble cutting liquid composition and an abrasive grain.
- the present invention is a cutting method characterized by cutting using the water-soluble cutting solution.
- the water-soluble cutting liquid composition, the water-soluble cutting liquid, and the water-soluble cutting liquid having high safety and low viscosity change that suppress the generation of ignition and gas are used.
- a cutting method can be provided.
- glycols used in the water-soluble cutting liquid composition according to the present invention include ethylene glycol and propylene glycol as the glycol, and examples of the glycol ether include ethylene glycol monomethyl ether, propylene glycol monomethyl ether, and ethylene glycol. Examples include monobutyl ether and propylene glycol monomethyl ether. Examples of polyalkylene glycol include polyethylene glycol, polypropylene glycol, and polyoxypropylene-polyoxyethylene block polymer.
- polyalkylene glycol ether examples include polyethylene glycol monomethyl ether, Polypropylene glycol monomethyl ether, polyalkylene glycol monomethyl ether , Polyethylene glycol monobutyl ether, polypropylene glycol monobutyl ether, and polyalkylene glycol monobutyl ether.
- Examples of the amines used in the water-soluble cutting liquid composition according to the present invention include methylamine, diethylamine, isopropylamine, butylamine, 2-ethylhexylamine, decylamine, dodecylamine, tridecylamine, tetradecylamine, hexadecyl.
- nitrite used in the water-soluble cutting liquid composition according to the present invention examples include sodium nitrite and potassium nitrite.
- the water-soluble cutting liquid composition according to the present invention may contain an auxiliary additive.
- the additive aid include a wetting agent, a rust preventive agent, a non-ferrous metal anticorrosive agent, a dispersant, an antifoaming agent, and a thickener.
- the weight ratio of glycols to water is preferably 5:95 to 95: 5.
- the amount of glycol is less than the above range, water tends to evaporate during cutting.
- the objects to be cut adhere to each other due to drying, so that cracks occur when they are peeled off, yield decreases, and chips adhere to the objects to be cut, making cleaning difficult.
- the danger of catching fire will become high.
- the nitrite-based vaporizable rust inhibitor is preferably contained in the water-soluble cutting solution composition in an amount of 0.01 to 5% by weight, and more preferably 0.05 to 1% by weight.
- the amount is less than the above range, the effect of suppressing the reaction between the material to be cut (silicon) and water is low, so that gas is easily generated and the viscosity change of the water-soluble cutting liquid is large.
- it is more than the above range, the dispersibility of the abrasive grains in the water-soluble cutting liquid is poor, and the liquid stability is low.
- the amines and nitrites preferably contain 0.01 to 5% by weight of amines and 0.01 to 5% by weight of nitrites in the water-soluble cutting solution composition, and 0.05 to 1 amines. More preferably, the nitrite is contained in an amount of 0.05 to 1% by weight.
- the amount is less than the above range, the effect of suppressing the reaction between the material to be cut (silicon) and water is low, so that gas is easily generated and the viscosity change of the water-soluble cutting liquid is large.
- it is more than the above range the dispersibility of the abrasive grains in the water-soluble cutting liquid is poor, and the liquid stability is low.
- Examples of the abrasive grains contained in the water-soluble cutting liquid according to the present invention include, for example, metal, metal or metalloid carbide, metal or metalloid nitride, metal or metalloid oxide, metal or metalloid boride. And abrasives made of diamond.
- the metal or metalloid is derived from group 3A, 4A, 5A, 3B, 4B, 5B, 6B, 7B or 8B of the periodic table, for example, alumina, silicon carbide, diamond, magnesium oxide, cerium oxide, oxidation Zirconium, colloidal silica, and fumed silica may be mentioned.
- the average particle diameter of the abrasive grains can be 0.01 ⁇ m to 50 ⁇ m.
- the water-soluble cutting liquid according to the present invention preferably contains 30 to 70% by weight of water-soluble cutting liquid and 30 to 70% by weight of abrasive grains. When there are few abrasive grains than the said range, a cutting speed will become slow and practicability is scarce. When the amount is more than the above range, the viscosity of the water-soluble cutting liquid becomes high and the processing performance deteriorates.
- the water-soluble cutting liquid according to the present invention is preferably used for cutting an ingot, particularly a silicon wafer that is a material for a semiconductor element.
- a wire saw processing machine or a band saw processing machine can be used for these cuttings.
- Examples 11 to 20 and Comparative Examples 8 to 14 The aqueous cutting liquid composition according to Examples 11 to 20 was mixed with the water-soluble cutting liquid composition according to Examples 1 to 10 and the abrasive grains (green silicon carbide # 1000) at a weight ratio of 1: 1. Obtained. Cutting solutions according to Comparative Examples 8 to 14 in the same manner as in Examples 11 to 20, except that the cutting solution compositions according to Comparative Examples 1 to 7 were used instead of the water-soluble cutting solution compositions according to Examples 1 to 10. Got.
- the water-soluble cutting liquid according to the present invention is easy to clean because the abrasive grains and water-soluble cutting liquid are completely removed from the object to be cut by washing with water.
- the water-soluble cutting liquid according to the present invention has an extremely small amount of Si reaction gas and a small change in viscosity. In addition, because it contains water, there is little risk of ignition.
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Lubricants (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
表1乃至表4の配合量に従って、これらを常法により混合することにより、実施例1乃至10に係る水溶性切断液組成物、及び比較例1乃至7に係る切断液組成物を得た。
実施例1乃至10に係る水溶性切断液組成物と、砥粒(緑色炭化ケイ素#1000)とを重量比で1:1の割合で混合して、実施例11乃至20に係る水性切断液を得た。実施例1乃至10に係る水溶性切断液組成物の代わりに比較例1乃至7に係る切断液組成物を用いた以外は実施例11乃至20と同様にして比較例8乃至14に係る切断液を得た。
実施例11乃至15に係る水溶性切断液、並びに比較例8に係る切断液を単結晶シリコンウェハーに塗布した後、流水にて洗浄し、洗浄後の単結晶シリコンウェハーの状態を目視で観察した。評価は、当社評価員によって行われ、水溶性切断液等の汚れを完全に除去できた(○)、除去が不完全であった(△)、除去できない(×)の3段階で評価した。結果を表5に示す。
ワイヤーソーにより単結晶シリコンのインゴットを切断した時に混入してくる活性なSi切屑を想定して、実施例11乃至20に係る水溶性切断液、及び比較例2乃至7に係る切断液にSi粉(粒径約5μm)を10wt%添加し、遊星ボールミルにて粗粉砕し、BL型回転粘度計にて25℃における粘度を測定した(粘度1)。その後、密閉できるポリエチレン袋に入れ、脱気し、60℃にて24時間保管した後のSi反応ガス量を測定した。Si反応ガス量測定後、1200rpmで10分間撹拌した後の25℃における粘度を測定した(粘度2)。結果を表6に示す。
Claims (6)
- グリコール、グリコールエーテル、ポリアルキレングリコール及びポリアルキレングリコールエーテルの少なくとも一つのグリコール類と、水と、亜硝酸系気化性防錆剤、並びにアミン類及び亜硝酸塩の混合物の少なくとも一つと、が含まれたことを特徴とする水溶性切断液組成物。
- 前記グリコール類と前記水との重量比が5:95~95:5であることを特徴とする請求項1記載の水溶性切断液組成物。
- 前記亜硝酸系気化性防錆剤が0.01~5重量%含まれることを特徴とする請求項1又は2記載の水溶性切断液組成物。
- 前記アミン類が0.01~5重量%及び前記亜硝酸塩が0.01~5重量%含まれることを特徴とする請求項1又は2記載の水溶性切断液組成物。
- 請求項1乃至4いずれか記載の水溶性切断液組成物及び砥粒が含まれることを特徴とする水溶性切断液。
- 請求項5記載の水溶性切断液を用いて切断することを特徴とする切断方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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KR1020107017780A KR101718988B1 (ko) | 2008-04-30 | 2008-04-30 | 수용성 절단액 조성물, 수용성 절단액 및 그 수용성 절단액을 이용한 절단방법 |
JP2009549312A JP4474495B2 (ja) | 2008-04-30 | 2008-04-30 | 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 |
PCT/JP2008/058283 WO2009133612A1 (ja) | 2008-04-30 | 2008-04-30 | 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 |
TW098114346A TWI439542B (zh) | 2008-04-30 | 2009-04-30 | Water-soluble cutting fluid composition for silicon cutting, water-soluble cutting fluid for silicon cutting, and cutting method using water-soluble cutting fluid for silicon cutting |
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PCT/JP2008/058283 WO2009133612A1 (ja) | 2008-04-30 | 2008-04-30 | 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 |
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JP (1) | JP4474495B2 (ja) |
KR (1) | KR101718988B1 (ja) |
TW (1) | TWI439542B (ja) |
WO (1) | WO2009133612A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2011058929A1 (ja) * | 2009-11-12 | 2011-05-19 | パレス化学株式会社 | 固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法、そのリサイクル方法及び切断によって得られるウェハー |
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KR101680383B1 (ko) * | 2010-08-16 | 2016-11-28 | 동우 화인켐 주식회사 | 와이어 쏘우용 수성 절삭액 조성물 |
CN108559602A (zh) * | 2018-04-18 | 2018-09-21 | 三峡大学 | 一种水性金刚线硅片切割液 |
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CN108559602B (zh) * | 2018-04-18 | 2020-12-11 | 三峡大学 | 一种水性金刚线硅片切割液 |
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KR101718988B1 (ko) | 2017-03-22 |
KR20100135225A (ko) | 2010-12-24 |
JPWO2009133612A1 (ja) | 2011-08-25 |
TW201000625A (en) | 2010-01-01 |
JP4474495B2 (ja) | 2010-06-02 |
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