WO2011058929A1 - 固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法、そのリサイクル方法及び切断によって得られるウェハー - Google Patents
固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法、そのリサイクル方法及び切断によって得られるウェハー Download PDFInfo
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- WO2011058929A1 WO2011058929A1 PCT/JP2010/069716 JP2010069716W WO2011058929A1 WO 2011058929 A1 WO2011058929 A1 WO 2011058929A1 JP 2010069716 W JP2010069716 W JP 2010069716W WO 2011058929 A1 WO2011058929 A1 WO 2011058929A1
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- Prior art keywords
- cutting
- water
- abrasive wire
- wire saw
- solution
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
- C10M175/0058—Working-up used lubricants to recover useful products ; Cleaning by filtration and centrifugation processes; apparatus therefor
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
- C10M169/06—Mixtures of thickeners and additives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M1/00—Liquid compositions essentially based on mineral lubricating oils or fatty oils; Their use as lubricants
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M101/00—Lubricating compositions characterised by the base-material being a mineral or fatty oil
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M103/00—Lubricating compositions characterised by the base-material being an inorganic material
- C10M103/04—Metals; Alloys
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M103/00—Lubricating compositions characterised by the base-material being an inorganic material
- C10M103/06—Metal compounds
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/02—Well-defined hydrocarbons
- C10M105/04—Well-defined hydrocarbons aliphatic
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/10—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/10—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M105/14—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms polyhydroxy
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/18—Ethers, e.g. epoxides
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
- C10M2207/046—Hydroxy ethers
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/109—Polyethers, i.e. containing di- or higher polyoxyalkylene groups esterified
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
- C10N2020/01—Physico-chemical properties
- C10N2020/04—Molecular weight; Molecular weight distribution
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/02—Pour-point; Viscosity index
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/18—Anti-foaming property
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/20—Metal working
- C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
Definitions
- the present invention relates to a water-soluble cutting solution for a fixed abrasive wire saw used for cutting a silicon ingot using a fixed abrasive wire saw, a method for cutting an ingot using the same, a recycling method thereof, and a wafer obtained by cutting. .
- the present invention provides a water-soluble cutting solution for a fixed abrasive wire saw that has high cutting performance and can suppress generation of hydrogen gas due to reaction between silicon and water, a method for cutting an ingot using the same, and a method for recycling the same And a wafer obtained by cutting.
- the present invention includes (a) a polyether represented by the formula (1), (b) at least one kind of glycol and a low molecular weight glycol ether having a molecular weight of 100 to 300, and (c) water, A water-soluble cutting solution for a fixed abrasive wire saw, wherein the ratio of a) to (b) is from 1:99 to 50:50, and the content of (c) is from 5 to 50% by weight.
- the present invention provides an ingot cutting method characterized in that a silicon ingot is cut with a fixed abrasive wire saw using the water-soluble cutting liquid for the fixed abrasive wire saw, and the ingot is cut by the ingot cutting method.
- the water-soluble cutting liquid for fixed abrasive wire saws is separated from the silicon using a centrifuge, and the water-soluble cutting liquid for fixed abrasive wire saws is cut by the above ingot cutting method. Wafer.
- the cutting performance is high, and the water-soluble cutting solution for a fixed abrasive wire saw capable of suppressing the generation of hydrogen gas due to the reaction between silicon and water, and the method for cutting an ingot using the same
- the wafer obtained by the recycling method and cutting can be provided.
- R 1 is a hydrogen atom or an alkyl or alkenyl group having 1 to 8 carbon atoms
- EO is An oxyethylene group and AO are oxyalkylene groups having 3 or 4 carbon atoms
- m and n each represent an added mole number of 1 to 20.
- the polyether represented by the formula (1) may be polymerized by random polymerization or polymerized by block polymerization.
- the weight average molecular weight of the polyether represented by the formula (1) is preferably 200 to 2,000.
- polyether is limited to the polyalkylene glycol butyl ether represented by the formula (1) is that an ether such as methyl or ethyl cannot obtain sufficient cutting performance in a fixed abrasive wire saw.
- An example of such a polyalkylene glycol butyl ether is Yucanol 50MB-5 (manufactured by NOF Corporation).
- the glycol (b) preferably has two OH groups and has a molecular weight or weight average molecular weight of 60 to 3,500.
- the low molecular weight glycol ether (b) may have a molecular weight of 100 to 300, and examples thereof include diethylene glycol monomethyl ether, diethylene glycol monobutyl ether and diethylene glycol monohexyl ether.
- This (b) includes (b1) a polyalkylene glycol represented by the formula (2), and (b2) a glycol other than (b1) and at least one kind of a low molecular weight glycol ether having a molecular weight of 100 to 300,
- the content of b1) is preferably 0.01 to 5.0% by weight based on the entire water-soluble cutting solution.
- x, y and z each represent an added mole number of 1 to 20.
- the weight average molecular weight of the polyether represented by the formula (2) is preferably 1,000 to 3,000.
- the reason why (b1) is 0.01 to 5.0% by weight is that if it is less than 0.01% by weight, foaming is not improved and the recyclability is deteriorated. Because it gets worse.
- a more preferable content of (b1) is 0.1 to 2.0% by weight.
- the water-soluble cutting liquid for fixed abrasive wire saws can contain (d) a dispersant as required.
- the dispersant used is a polycarboxylic acid obtained by graft polymerization of a polyoxyalkylene monoalkyl ether to an allyl alcohol / maleic anhydride copolymer or a salt thereof, an allyl alcohol / maleic anhydride / styrene copolymer.
- examples include graft-polymerized polycarboxylic acids of alkylene monoalkyl ethers and salts thereof, naphthalenesulfonic acid condensates and salts thereof, and those generally sold as dispersants can be used.
- the content of the dispersant is preferably 0.1 to 5.0% by weight.
- the content is 0.1 to 5.0% by weight, the dispersibility of the chips at the time of cutting is good, and it is possible to suppress a decrease in cutting performance and recyclability due to foaming.
- a more preferable content of (d) dispersant is 0.1 to 1% by weight.
- the ratio of (a) and (b) is 1:99 to 50:50, the effect of suppressing the generation of hydrogen gas due to the reaction between silicon and water Is high, generation of bubbles due to generation of hydrogen gas and aggregation of silicon are less likely to occur, and viscosity change can be reduced. Moreover, there is little influence on the resin parts used in the machine tool, and the cutting performance can be improved.
- a more preferable ratio of (a) to (b) is 5:95 to 30:70.
- water-soluble cutting liquid for fixed abrasive wire saws when (c) water is 5 to 50% by weight, there is no problem of flammability during cutting, and the ability to cool the heat generated during cutting is high. Since the amount of moisture evaporation due to the is small, the cutting performance is improved. In addition, drying of the wafer surface during cutting can be suppressed, and the load of the subsequent cleaning process can be suppressed.
- a more preferable water content is 5 to 40% by weight.
- the water-soluble cutting solution for fixed abrasive wire saws may contain a rust preventive, preservative, fragrance, dye or the like, if necessary.
- the water-soluble cutting liquid for a fixed abrasive wire saw uses a fixed abrasive wire saw as a cutting tool and a multi-wire saw as a cutting machine in the cutting of a silicon wafer that is a material for semiconductor elements and solar cells. be able to.
- the water-soluble cutting liquid for a fixed abrasive wire saw according to the present invention can be recycled after separating the silicon and the water-soluble cutting liquid using a centrifuge after cutting.
- the wafer cut by the ingot cutting method according to the present invention can obtain a wafer having better surface roughness and undulation than a wafer cut using a conventional water-soluble cutting solution for fixed abrasive wire saws. It can be used as a semiconductor device or solar wafer.
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
次に、実施例1乃至実施例12に係る固定砥粒ワイヤーソー用水溶性切断液、及び比較例1乃至比較例10に係る固定砥粒ワイヤーソー用水溶性切断液を使用し、切断試験を行い、切断距離を測定した。切断試験は、ワイヤーソー試験機:3032-4(WELL製)、ワイヤー:芯線0.12mm ダイヤ径12-25μm(旭ダイヤ社製)、ワイヤー速度:200m/min、加工荷重:30g、加工時間:30分、加工ワーク:20mm×30mm×30mm、試験温度:25℃の条件で行った。結果を表5及び表6に示す。表5及び表6から、本実施例に係る固定砥粒ワイヤーソー用水溶性切断液は、切断性能が良好であることが分かる。
次に、固定砥粒ワイヤーより単結晶シリコンのインゴットを切断したときに混入してくる活性なシリコン屑を想定して、実施例1乃至実施例12に係る固定砥粒ワイヤーソー用水溶性切断液、並びに比較例1乃至比較例3及び比較例5乃至比較例9に係る固定砥粒ワイヤーソー用水溶性切断液にシリコン粉(粒径約5μm)を20重量%添加し、遊星ボールミルにて粗粉砕し、BL型回転粘度計(ローターNo.1 60rpm)にて25℃における粘度を測定した(粘度1)。その後、密閉できるポリエチレン袋(厚さ0.04mm)に入れ、脱気し、50℃にて24時間保管した後のシリコン反応ガス量を確認するとともに、25℃における粘度を測定した(粘度2)。粗粉砕は、カップ:500mlジルコニアポット、メディア:φ2mmジルコニアビーズ、試料量:200ml、メディア量:200ml、回転数:250rpm、時間:30分の条件で行った。反応ガス量確認は、ポリエチレン袋:パコールチャック袋(日本ハイテック(株)製)、厚み:0.04mm、確認方法:目視(ポリエチレン袋の膨らみ具合)の条件で行った。結果を表7及び表8に示す。表7及び表8から、本発明に係る固定砥粒ワイヤーソー用水溶性切断液は、シリコンと水との反応ガス量が限りなく少なく、粘度変化も小さいことが分かる。
次に、固定砥粒ワイヤーより単結晶シリコンのインゴットを切断したときに混入してくる活性なシリコン屑を想定して、実施例1乃至実施例12に係る水溶性切断液、並びに比較例3及び比較例6に係る水溶性切断液にシリコン粉(粒径約5μm)を20重量%添加し、遊星ボールミルにて前記(粘度及びガス発生試験)の粗粉砕と同様の条件で粗粉砕した液を、3インチシリコンウェハー全面に付着させ、ウェハーを垂直に維持したまま、室温で24時間静置した。その後、流水にて洗浄し、洗浄性を確認した。結果を表9に示す。表9から、本発明に係る固定砥粒ワイヤーソー用水溶性切断液は、後工程での洗浄が良好な事が分かる。
次に、切断中の泡立ちやリサイクル中の泡立ちを想定して、実施例1乃至12に係る固定砥粒ワイヤーソー用水溶性切断液、並びに比較例1、比較例2、及び比較例6に係る固定砥粒ワイヤーソー用水溶性切断液を有栓式100・メスシリンダーに50・入れ、有栓した後、激しくシェイクした。その後の泡立ち量および液表面が見えるまでの消泡時間を確認した。結果を表10に示す。表10から、本発明に係る水溶性切断液は、泡立ちが少なく良好な事が分かる。
Claims (6)
- (d)分散剤を0.1~5.0重量%さらに含有することを特徴とする請求項1又は2記載の固定砥粒ワイヤーソー用水溶性切断液。
- 請求項1乃至請求項3のいずれか記載の固定砥粒ワイヤーソー用水溶性切断液を用いて、固定砥粒ワイヤーソーによりシリコンのインゴットを切断することを特徴とするインゴットの切断方法。
- 請求項4記載のインゴット切断方法によってインゴットの切断を行った後に、遠心分離機を用いて固定砥粒ワイヤーソー用水溶性切断液をシリコンから分離することを特徴とする固定砥粒ワイヤーソー用水溶性切断液のリサイクル方法。
- 請求項4記載のインゴット切断方法によって切断されたウェハー。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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KR1020127016097A KR20130001210A (ko) | 2009-11-12 | 2010-11-05 | 고정 저립 와이어 톱용 수용성 절단액, 그것을 이용한 잉곳의 절단방법, 그 리사이클 방법 및 절단에 의해서 얻어진 웨이퍼 |
JP2011540486A JP5764067B2 (ja) | 2009-11-12 | 2010-11-05 | 固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法、そのリサイクル方法及び切断によって得られるウェハー |
CN201080051078.6A CN102686713B (zh) | 2009-11-12 | 2010-11-05 | 固定研磨粒线锯用水溶性切割液、使用其的铸锭切割方法、其回收方法及切割所得的晶圆 |
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JP (1) | JP5764067B2 (ja) |
KR (1) | KR20130001210A (ja) |
CN (1) | CN102686713B (ja) |
MY (1) | MY161383A (ja) |
TW (1) | TWI484029B (ja) |
WO (1) | WO2011058929A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102876441A (zh) * | 2012-09-24 | 2013-01-16 | 广西大学 | 环境友好的钛合金微乳化切削液 |
CN102952621A (zh) * | 2011-08-19 | 2013-03-06 | 台湾水再生科技股份有限公司 | 硅晶圆切割研磨废弃物的回收处理方法及其设备 |
CN103597585A (zh) * | 2011-10-24 | 2014-02-19 | 帕莱斯化学株式会社 | 固定研磨粒线锯用水溶性切割液、使用其的切割方法及其回收方法 |
WO2018169008A1 (ja) * | 2017-03-17 | 2018-09-20 | 出光興産株式会社 | 脆性材料加工液 |
CN111826225A (zh) * | 2019-04-17 | 2020-10-27 | 陕西省石油化工研究设计院 | 一种钐钴永磁加工专用冷却液及其制备方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2015536379A (ja) * | 2012-12-06 | 2015-12-21 | ダウ グローバル テクノロジーズ エルエルシー | 水溶性切削流体組成物 |
KR200481449Y1 (ko) | 2014-07-25 | 2016-10-04 | 삼성중공업 주식회사 | 다기능 루버 |
CN105235084B (zh) * | 2015-09-30 | 2017-07-18 | 浙江辉弘光电能源有限公司 | 一种硅片切割机用切削液去水装置 |
CN105273823B (zh) * | 2015-11-27 | 2018-06-08 | 上海应用技术学院 | 一种多线硅片切割水溶性切削液及其制备方法 |
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- 2010-11-05 WO PCT/JP2010/069716 patent/WO2011058929A1/ja active Application Filing
- 2010-11-05 CN CN201080051078.6A patent/CN102686713B/zh not_active Expired - Fee Related
- 2010-11-05 JP JP2011540486A patent/JP5764067B2/ja not_active Expired - Fee Related
- 2010-11-05 KR KR1020127016097A patent/KR20130001210A/ko not_active Application Discontinuation
- 2010-11-05 MY MYPI2012001959A patent/MY161383A/en unknown
- 2010-11-09 TW TW099138425A patent/TWI484029B/zh not_active IP Right Cessation
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WO1999051711A1 (fr) * | 1998-04-03 | 1999-10-14 | Kao Corporation | Composition pour huile de coupe |
JP2002053788A (ja) * | 2000-08-09 | 2002-02-19 | Mitsubishi Pencil Co Ltd | 水性ボールペン用インキ組成物 |
JP2003082334A (ja) * | 2001-09-06 | 2003-03-19 | Yushiro Chem Ind Co Ltd | 固定砥粒ワイヤソー用水溶性加工液組成物 |
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WO2009133612A1 (ja) * | 2008-04-30 | 2009-11-05 | パレス化学株式会社 | 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102952621A (zh) * | 2011-08-19 | 2013-03-06 | 台湾水再生科技股份有限公司 | 硅晶圆切割研磨废弃物的回收处理方法及其设备 |
CN102952621B (zh) * | 2011-08-19 | 2015-01-21 | 台湾水再生科技股份有限公司 | 硅晶圆切割研磨废弃物的回收处理方法及其设备 |
CN103597585A (zh) * | 2011-10-24 | 2014-02-19 | 帕莱斯化学株式会社 | 固定研磨粒线锯用水溶性切割液、使用其的切割方法及其回收方法 |
CN102876441A (zh) * | 2012-09-24 | 2013-01-16 | 广西大学 | 环境友好的钛合金微乳化切削液 |
WO2018169008A1 (ja) * | 2017-03-17 | 2018-09-20 | 出光興産株式会社 | 脆性材料加工液 |
JP2018154762A (ja) * | 2017-03-17 | 2018-10-04 | 出光興産株式会社 | 脆性材料加工液 |
CN111826225A (zh) * | 2019-04-17 | 2020-10-27 | 陕西省石油化工研究设计院 | 一种钐钴永磁加工专用冷却液及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20130001210A (ko) | 2013-01-03 |
TW201134936A (en) | 2011-10-16 |
CN102686713B (zh) | 2014-07-02 |
CN102686713A (zh) | 2012-09-19 |
JP5764067B2 (ja) | 2015-08-12 |
MY161383A (en) | 2017-04-14 |
JPWO2011058929A1 (ja) | 2013-03-28 |
TWI484029B (zh) | 2015-05-11 |
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