JPWO2011058929A1 - 固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法、そのリサイクル方法及び切断によって得られるウェハー - Google Patents
固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法、そのリサイクル方法及び切断によって得られるウェハー Download PDFInfo
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- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
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- C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
- C10M175/0058—Working-up used lubricants to recover useful products ; Cleaning by filtration and centrifugation processes; apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
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- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M103/00—Lubricating compositions characterised by the base-material being an inorganic material
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- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/02—Well-defined hydrocarbons
- C10M105/04—Well-defined hydrocarbons aliphatic
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- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
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- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/10—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M105/14—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms polyhydroxy
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- C10M105/00—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound
- C10M105/08—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen
- C10M105/18—Ethers, e.g. epoxides
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- C10M173/00—Lubricating compositions containing more than 10% water
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- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
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- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
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- C10M2207/046—Hydroxy ethers
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- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
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- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/109—Polyethers, i.e. containing di- or higher polyoxyalkylene groups esterified
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- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
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Abstract
Description
次に、実施例1乃至実施例12に係る固定砥粒ワイヤーソー用水溶性切断液、及び比較例1乃至比較例10に係る固定砥粒ワイヤーソー用水溶性切断液を使用し、切断試験を行い、切断距離を測定した。切断試験は、ワイヤーソー試験機:3032−4(WELL製)、ワイヤー:芯線0.12mm ダイヤ径12−25μm(旭ダイヤ社製)、ワイヤー速度:200m/min、加工荷重:30g、加工時間:30分、加工ワーク:20mm×30mm×30mm、試験温度:25℃の条件で行った。結果を表5及び表6に示す。表5及び表6から、本実施例に係る固定砥粒ワイヤーソー用水溶性切断液は、切断性能が良好であることが分かる。
次に、固定砥粒ワイヤーより単結晶シリコンのインゴットを切断したときに混入してくる活性なシリコン屑を想定して、実施例1乃至実施例12に係る固定砥粒ワイヤーソー用水溶性切断液、並びに比較例1乃至比較例3及び比較例5乃至比較例9に係る固定砥粒ワイヤーソー用水溶性切断液にシリコン粉(粒径約5μm)を20重量%添加し、遊星ボールミルにて粗粉砕し、BL型回転粘度計(ローターNo.1 60rpm)にて25℃における粘度を測定した(粘度1)。その後、密閉できるポリエチレン袋(厚さ0.04mm)に入れ、脱気し、50℃にて24時間保管した後のシリコン反応ガス量を確認するとともに、25℃における粘度を測定した(粘度2)。粗粉砕は、カップ:500mlジルコニアポット、メディア:φ2mmジルコニアビーズ、試料量:200ml、メディア量:200ml、回転数:250rpm、時間:30分の条件で行った。反応ガス量確認は、ポリエチレン袋:パコールチャック袋(日本ハイテック(株)製)、厚み:0.04mm、確認方法:目視(ポリエチレン袋の膨らみ具合)の条件で行った。結果を表7及び表8に示す。表7及び表8から、本発明に係る固定砥粒ワイヤーソー用水溶性切断液は、シリコンと水との反応ガス量が限りなく少なく、粘度変化も小さいことが分かる。
次に、固定砥粒ワイヤーより単結晶シリコンのインゴットを切断したときに混入してくる活性なシリコン屑を想定して、実施例1乃至実施例12に係る水溶性切断液、並びに比較例3及び比較例6に係る水溶性切断液にシリコン粉(粒径約5μm)を20重量%添加し、遊星ボールミルにて前記(粘度及びガス発生試験)の粗粉砕と同様の条件で粗粉砕した液を、3インチシリコンウェハー全面に付着させ、ウェハーを垂直に維持したまま、室温で24時間静置した。その後、流水にて洗浄し、洗浄性を確認した。結果を表9に示す。表9から、本発明に係る固定砥粒ワイヤーソー用水溶性切断液は、後工程での洗浄が良好な事が分かる。
次に、切断中の泡立ちやリサイクル中の泡立ちを想定して、実施例1乃至12に係る固定砥粒ワイヤーソー用水溶性切断液、並びに比較例1、比較例2、及び比較例6に係る固定砥粒ワイヤーソー用水溶性切断液を有栓式100・メスシリンダーに50・入れ、有栓した後、激しくシェイクした。その後の泡立ち量および液表面が見えるまでの消泡時間を確認した。結果を表10に示す。表10から、本発明に係る水溶性切断液は、泡立ちが少なく良好な事が分かる。
Claims (6)
- (d)分散剤を0.1〜5.0重量%さらに含有することを特徴とする請求項1又は2記載の固定砥粒ワイヤーソー用水溶性切断液。
- 請求項1乃至請求項3のいずれか記載の固定砥粒ワイヤーソー用水溶性切断液を用いて、固定砥粒ワイヤーソーによりシリコンのインゴットを切断することを特徴とするインゴットの切断方法。
- 請求項4記載のインゴット切断方法によってインゴットの切断を行った後に、遠心分離機を用いて固定砥粒ワイヤーソー用水溶性切断液をシリコンから分離することを特徴とする固定砥粒ワイヤーソー用水溶性切断液のリサイクル方法。
- 請求項4記載のインゴット切断方法によって切断されたウェハー。
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JP2011540486A JP5764067B2 (ja) | 2009-11-12 | 2010-11-05 | 固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法、そのリサイクル方法及び切断によって得られるウェハー |
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JP2011540486A JP5764067B2 (ja) | 2009-11-12 | 2010-11-05 | 固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法、そのリサイクル方法及び切断によって得られるウェハー |
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CN102952621B (zh) * | 2011-08-19 | 2015-01-21 | 台湾水再生科技股份有限公司 | 硅晶圆切割研磨废弃物的回收处理方法及其设备 |
MY156441A (en) * | 2011-10-24 | 2016-02-26 | Palace Chemical Co Ltd | Water-soluble cutting fluid for fixed-abrasive-grain wire saw, cutting method using the same, and recycling method therefor |
CN102876441B (zh) * | 2012-09-24 | 2013-10-30 | 广西大学 | 环境友好的钛合金微乳化切削液 |
CN104955929B (zh) * | 2012-12-06 | 2018-06-05 | 陶氏环球技术有限责任公司 | 水性切削液组合物 |
KR200481449Y1 (ko) | 2014-07-25 | 2016-10-04 | 삼성중공업 주식회사 | 다기능 루버 |
CN105235084B (zh) * | 2015-09-30 | 2017-07-18 | 浙江辉弘光电能源有限公司 | 一种硅片切割机用切削液去水装置 |
CN105273823B (zh) * | 2015-11-27 | 2018-06-08 | 上海应用技术学院 | 一种多线硅片切割水溶性切削液及其制备方法 |
JP6860266B2 (ja) * | 2017-03-17 | 2021-04-14 | 出光興産株式会社 | 脆性材料加工液 |
CN111826225A (zh) * | 2019-04-17 | 2020-10-27 | 陕西省石油化工研究设计院 | 一种钐钴永磁加工专用冷却液及其制备方法 |
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US6383991B1 (en) * | 1998-04-03 | 2002-05-07 | Kao Corporation | Cutting oil composition |
JP2002053788A (ja) * | 2000-08-09 | 2002-02-19 | Mitsubishi Pencil Co Ltd | 水性ボールペン用インキ組成物 |
JP4497767B2 (ja) * | 2001-09-06 | 2010-07-07 | ユシロ化学工業株式会社 | 固定砥粒ワイヤソー用水溶性加工液組成物 |
CN1780901A (zh) * | 2003-10-16 | 2006-05-31 | 三菱电机株式会社 | 硅锭切割用浆液及使用该浆液的硅锭切割方法 |
CN1746281A (zh) * | 2004-09-06 | 2006-03-15 | 大连广汇化学有限公司 | 环保型水基合成切削液 |
JP4481898B2 (ja) * | 2005-07-25 | 2010-06-16 | ユシロ化学工業株式会社 | 水性砥粒分散媒組成物 |
CN101240217A (zh) * | 2008-02-29 | 2008-08-13 | 益田润石(北京)化工有限公司 | 微乳型金属切削液组合物 |
WO2009133612A1 (ja) * | 2008-04-30 | 2009-11-05 | パレス化学株式会社 | 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 |
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- 2010-11-05 CN CN201080051078.6A patent/CN102686713B/zh not_active Expired - Fee Related
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CN102686713A (zh) | 2012-09-19 |
KR20130001210A (ko) | 2013-01-03 |
TW201134936A (en) | 2011-10-16 |
WO2011058929A1 (ja) | 2011-05-19 |
TWI484029B (zh) | 2015-05-11 |
JP5764067B2 (ja) | 2015-08-12 |
MY161383A (en) | 2017-04-14 |
CN102686713B (zh) | 2014-07-02 |
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