JP4474495B2 - 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 - Google Patents
水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 Download PDFInfo
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- JP4474495B2 JP4474495B2 JP2009549312A JP2009549312A JP4474495B2 JP 4474495 B2 JP4474495 B2 JP 4474495B2 JP 2009549312 A JP2009549312 A JP 2009549312A JP 2009549312 A JP2009549312 A JP 2009549312A JP 4474495 B2 JP4474495 B2 JP 4474495B2
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- water
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- C10M105/14—Lubricating compositions characterised by the base-material being a non-macromolecular organic compound containing oxygen having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms polyhydroxy
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- C10M107/32—Condensation polymers of aldehydes or ketones; Polyesters; Polyethers
- C10M107/34—Polyoxyalkylenes
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- C10M169/04—Mixtures of base-materials and additives
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- C10M173/00—Lubricating compositions containing more than 10% water
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- C10M2201/083—Inorganic acids or salts thereof containing nitrogen nitrites
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/14—Group 7
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/16—Groups 8, 9, or 10
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/02—Pour-point; Viscosity index
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/20—Metal working
- C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Lubricants (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
表1乃至表4の配合量に従って、これらを常法により混合することにより、実施例1乃至10に係る水溶性切断液組成物、及び比較例1乃至7に係る切断液組成物を得た。
実施例1乃至10に係る水溶性切断液組成物と、砥粒(緑色炭化ケイ素#1000)とを重量比で1:1の割合で混合して、実施例11乃至20に係る水性切断液を得た。実施例1乃至10に係る水溶性切断液組成物の代わりに比較例1乃至7に係る切断液組成物を用いた以外は実施例11乃至20と同様にして比較例8乃至14に係る切断液を得た。
実施例11乃至15に係る水溶性切断液、並びに比較例8に係る切断液を単結晶シリコンウェハーに塗布した後、流水にて洗浄し、洗浄後の単結晶シリコンウェハーの状態を目視で観察した。評価は、当社評価員によって行われ、水溶性切断液等の汚れを完全に除去できた(○)、除去が不完全であった(△)、除去できない(×)の3段階で評価した。結果を表5に示す。
ワイヤーソーにより単結晶シリコンのインゴットを切断した時に混入してくる活性なSi切屑を想定して、実施例11乃至20に係る水溶性切断液、及び比較例2乃至7に係る切断液にSi粉(粒径約5μm)を10wt%添加し、遊星ボールミルにて粗粉砕し、BL型回転粘度計にて25℃における粘度を測定した(粘度1)。その後、密閉できるポリエチレン袋に入れ、脱気し、60℃にて24時間保管した後のSi反応ガス量を測定した。Si反応ガス量測定後、1200rpmで10分間撹拌した後の25℃における粘度を測定した(粘度2)。結果を表6に示す。
Claims (6)
- グリコール、グリコールエーテル、ポリアルキレングリコール及びポリアルキレングリコールエーテルの少なくとも一つのグリコール類と、水と、亜硝酸系気化性防錆剤、並びにアミン類及び亜硝酸塩の混合物の少なくとも一つと、が含まれたことを特徴とするシリコン切削用水溶性切断液組成物。
- 前記グリコール類と前記水との重量比が5:95〜95:5であることを特徴とする請求項1記載のシリコン切削用水溶性切断液組成物。
- 前記亜硝酸系気化性防錆剤が0.01〜5重量%含まれることを特徴とする請求項1又は2記載のシリコン切削用水溶性切断液組成物。
- 前記アミン類が0.01〜5重量%及び前記亜硝酸塩が0.01〜5重量%含まれることを特徴とする請求項1又は2記載のシリコン切削用水溶性切断液組成物。
- 請求項1乃至4いずれか記載のシリコン切削用水溶性切断液組成物及び砥粒が含まれることを特徴とするシリコン切削用水溶性切断液。
- 請求項5記載のシリコン切削用水溶性切断液を用いて切断することを特徴とする切断方法。
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KR101506027B1 (ko) | 2011-10-24 | 2015-03-25 | 팰리스 카가쿠 가부시기가이샤 | 고정 지립 와이어 톱용 수용성 절단액, 그것을 이용한 절단 방법 및 그 리사이클 방법 |
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CN102686713B (zh) * | 2009-11-12 | 2014-07-02 | 帕莱斯化学株式会社 | 固定研磨粒线锯用水溶性切割液、使用其的铸锭切割方法、其回收方法及切割所得的晶圆 |
KR101680383B1 (ko) * | 2010-08-16 | 2016-11-28 | 동우 화인켐 주식회사 | 와이어 쏘우용 수성 절삭액 조성물 |
JP6084534B2 (ja) * | 2012-08-08 | 2017-02-22 | コスモ石油ルブリカンツ株式会社 | 含水系作動液 |
TWI632041B (zh) * | 2017-09-11 | 2018-08-11 | 環球晶圓股份有限公司 | 晶棒切割方法及切削磨料套組 |
CN108559602B (zh) * | 2018-04-18 | 2020-12-11 | 三峡大学 | 一种水性金刚线硅片切割液 |
CN112980558A (zh) * | 2021-03-01 | 2021-06-18 | 南宁珀源能源材料有限公司 | 一种蓝宝石切割液及其制备方法 |
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