KR100334041B1 - 반도체기판상에형성되는인덕턴스소자 - Google Patents

반도체기판상에형성되는인덕턴스소자 Download PDF

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Publication number
KR100334041B1
KR100334041B1 KR1019980044696A KR19980044696A KR100334041B1 KR 100334041 B1 KR100334041 B1 KR 100334041B1 KR 1019980044696 A KR1019980044696 A KR 1019980044696A KR 19980044696 A KR19980044696 A KR 19980044696A KR 100334041 B1 KR100334041 B1 KR 100334041B1
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South Korea
Prior art keywords
substrate
inductance element
conductive film
shaped conductive
semiconductor substrate
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Expired - Fee Related
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KR1019980044696A
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English (en)
Korean (ko)
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KR19990076525A (ko
Inventor
오사무 고바야시
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후지쯔 가부시끼가이샤
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Application filed by 후지쯔 가부시끼가이샤 filed Critical 후지쯔 가부시끼가이샤
Publication of KR19990076525A publication Critical patent/KR19990076525A/ko
Application granted granted Critical
Publication of KR100334041B1 publication Critical patent/KR100334041B1/ko
Anticipated expiration legal-status Critical
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/20—Inductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1019980044696A 1998-03-11 1998-10-24 반도체기판상에형성되는인덕턴스소자 Expired - Fee Related KR100334041B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59620 1998-03-11
JP05962098A JP3942264B2 (ja) 1998-03-11 1998-03-11 半導体基板上に形成されるインダクタンス素子

Publications (2)

Publication Number Publication Date
KR19990076525A KR19990076525A (ko) 1999-10-15
KR100334041B1 true KR100334041B1 (ko) 2002-09-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980044696A Expired - Fee Related KR100334041B1 (ko) 1998-03-11 1998-10-24 반도체기판상에형성되는인덕턴스소자

Country Status (5)

Country Link
US (3) US6225677B1 (enExample)
JP (1) JP3942264B2 (enExample)
KR (1) KR100334041B1 (enExample)
FR (1) FR2776128B1 (enExample)
TW (1) TW401639B (enExample)

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KR20220102772A (ko) 2021-01-14 2022-07-21 주식회사 삼주유니콘 환봉의 길이 조절장치

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US6455915B1 (en) * 2000-05-30 2002-09-24 Programmable Silicon Solutions Integrated inductive circuits
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FR2846792A1 (fr) * 2002-10-30 2004-05-07 Commissariat Energie Atomique Composant microelectrique radiofrequence et procede de realisation
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DE102004014752B4 (de) * 2004-03-25 2008-11-20 Infineon Technologies Ag Halbleiterbauelement mit kernlosem Wandler und Halbbrücke
US7511588B2 (en) * 2005-07-19 2009-03-31 Lctank Llc Flux linked LC tank circuits forming distributed clock networks
US7508280B2 (en) * 2005-07-19 2009-03-24 Lc Tank Llc Frequency adjustment techniques in coupled LC tank circuits
US7786836B2 (en) * 2005-07-19 2010-08-31 Lctank Llc Fabrication of inductors in transformer based tank circuitry
US7250826B2 (en) * 2005-07-19 2007-07-31 Lctank Llc Mutual inductance in transformer based tank circuitry
US7279426B2 (en) * 2005-09-22 2007-10-09 International Business Machines Corporation Like integrated circuit devices with different depth
JP4647484B2 (ja) * 2005-12-27 2011-03-09 ルネサスエレクトロニクス株式会社 半導体装置
US7402890B2 (en) * 2006-06-02 2008-07-22 International Business Machines Corporation Method for symmetric capacitor formation
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US7948055B2 (en) * 2006-08-31 2011-05-24 United Microelectronics Corp. Inductor formed on semiconductor substrate
KR100883036B1 (ko) * 2007-07-25 2009-02-09 주식회사 동부하이텍 반도체 소자용 인덕터 및 그 제조 방법
US20100193904A1 (en) * 2009-01-30 2010-08-05 Watt Jeffrey T Integrated circuit inductor with doped substrate
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KR101121645B1 (ko) * 2010-03-22 2012-02-28 삼성전기주식회사 평면형 트랜스포머
TWI498928B (zh) * 2010-08-04 2015-09-01 立積電子股份有限公司 螺旋電感元件
CN102376700A (zh) * 2010-08-04 2012-03-14 立积电子股份有限公司 电子组件及其制法、螺旋电感组件及其制法
US8686539B1 (en) * 2010-10-15 2014-04-01 Xilinx, Inc. Inductor having a deep-well noise isolation shield
US9225392B2 (en) * 2011-03-09 2015-12-29 Qualcomm Incorporated Flat power coil for wireless charging applications
CN102522385A (zh) * 2011-12-30 2012-06-27 上海集成电路研发中心有限公司 片上集成铜电感
US8878334B1 (en) * 2012-03-23 2014-11-04 Altera Corporation Integrated circuit resistors with reduced parasitic capacitance
JP6057534B2 (ja) * 2012-04-18 2017-01-11 住重試験検査株式会社 半導体装置の製造方法
CN103474414B (zh) * 2012-06-06 2016-03-16 中芯国际集成电路制造(上海)有限公司 电感及其形成方法
JP5719000B2 (ja) * 2013-09-17 2015-05-13 学校法人慶應義塾 集積回路装置
JP6375872B2 (ja) * 2014-10-29 2018-08-22 住友電気工業株式会社 超電導マグネットおよび超電導機器
TWI587329B (zh) * 2014-10-31 2017-06-11 台灣東電化股份有限公司 無線充電印刷電路板線圈結構
JP7056016B2 (ja) * 2017-06-13 2022-04-19 Tdk株式会社 コイル部品
JP7169871B2 (ja) * 2018-12-26 2022-11-11 住重アテックス株式会社 半導体装置の製造方法
JP7430376B2 (ja) * 2019-12-19 2024-02-13 三安ジャパンテクノロジー株式会社 スパイラルインダクタ及びパッシブ集積回路
CN113745404A (zh) * 2021-08-25 2021-12-03 中国科学院微电子研究所 螺旋电感的制备方法、螺旋电感及无源器件模块

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KR970053797A (ko) * 1995-12-21 1997-07-31 양승택 공핍층을 이용한 인덕터
KR19980014335A (ko) * 1996-08-09 1998-05-25 윤덕용 산화막 다공성 실리콘 기판을 이용한 초고주파 소자

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KR100243658B1 (ko) * 1996-12-06 2000-02-01 정선종 기판 변환기술을 이용한 인덕터 소자 및 그 제조 방법
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KR19980014335A (ko) * 1996-08-09 1998-05-25 윤덕용 산화막 다공성 실리콘 기판을 이용한 초고주파 소자

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220102772A (ko) 2021-01-14 2022-07-21 주식회사 삼주유니콘 환봉의 길이 조절장치

Also Published As

Publication number Publication date
FR2776128B1 (fr) 2005-04-15
FR2776128A1 (fr) 1999-09-17
US6879022B2 (en) 2005-04-12
US20020149088A1 (en) 2002-10-17
US20010040270A1 (en) 2001-11-15
JP3942264B2 (ja) 2007-07-11
JPH11261008A (ja) 1999-09-24
KR19990076525A (ko) 1999-10-15
US6225677B1 (en) 2001-05-01
TW401639B (en) 2000-08-11

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