JPH0546973B2 - - Google Patents

Info

Publication number
JPH0546973B2
JPH0546973B2 JP62116727A JP11672787A JPH0546973B2 JP H0546973 B2 JPH0546973 B2 JP H0546973B2 JP 62116727 A JP62116727 A JP 62116727A JP 11672787 A JP11672787 A JP 11672787A JP H0546973 B2 JPH0546973 B2 JP H0546973B2
Authority
JP
Japan
Prior art keywords
region
insulating layer
bonding
electrode pattern
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62116727A
Other languages
English (en)
Other versions
JPS63283040A (ja
Inventor
Hiroshi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP62116727A priority Critical patent/JPS63283040A/ja
Priority to US07/192,665 priority patent/US4984061A/en
Priority to EP88107501A priority patent/EP0291014B1/en
Priority to DE8888107501T priority patent/DE3880003T2/de
Publication of JPS63283040A publication Critical patent/JPS63283040A/ja
Publication of JPH0546973B2 publication Critical patent/JPH0546973B2/ja
Granted legal-status Critical Current

Links

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5226—Via connections in a multilevel interconnection structure
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    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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    • H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
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Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
  • Bipolar Transistors (AREA)
  • Local Oxidation Of Silicon (AREA)

Description

【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野） 本発明は、多層配線構造の半導体装置に関する
もので、特にボンデイング領域直下に介在する層
間絶縁層のクラツク防止に使用されるものであ
る。
（従来の技術） 従来出力容量特性の低減、高出力化等の要求に
より電極を多層化し、能動領域の有効活用を図る
と共に、横方向の電極抵抗を減少し、動作効率の
向上を計つた多層配線構造の半導体装置が開発さ
れている。電極材料としてはアルミニウム又はア
ルミニウム合金等から成る比較的低融点材料のも
のが使用されている。
第３図はこのような半導体装置の一例である。
この半導体装置をバイポーラトランジスタとする
と、符号１はＮ型半導体基板で、コレクタ領域で
ある。基板１の所定領域にはＰ型のベース領域２
が形成されている。ベース領域２内にはＮ型のエ
ミツタ領域３が形成されている。基板１の主面に
は、厚さ0.5〜1.0μmの第１絶縁層４が形成され、
第１絶縁層４の所定領域にはベース領域２及びエ
ミツタ領域３のそれぞれに通じる第１コンタクト
ホール５が開口される。第１絶縁層４上には厚さ
0.5〜1.5μmのベース第１電極パターン６ａ及びエ
ミツタ第１電極パターン６ｂが積層され、その一
部分は第１コンタクトホール５を充填してベース
領域２及びエミツタ領域３にそれぞれオーム接触
をするベース第１コンタクト領域５ａ及びエミツ
タ第１コンタクト領域５ｂを形成する。ベース及
びエミツタの第１電極パターン６ａ，６ｂ及び第
１絶縁層４上には、SiO2膜又はSi3N4膜から成る
厚さ１〜4μmの第２絶縁層７が例えば減圧CVD
（Chemical Vapour Deposition）法にて積層さ
れている。第２絶縁層７には第１電極パターン６
ａ及び６ｂにそれぞれ通ずる第２コンタクトホー
ル８が開口されている。第２絶縁層７上には厚さ
２〜5μmのベース第２電極パターン９ａ及びエミ
ツタ第２電極パターン９ｂが積層され、その一部
分は第２コンタクトホール８を充填して第１電極
パターン６ａ，６ｂに接続するベース第２コンタ
クト領域８ａ及びエミツタ第２コンタクト領域８
ｂを形成する。又第２電極パターンの他の一部分
はそれぞれ外部接続線（ボンデイグワイヤ）１０
ａ及び１０ｂを固着するベースボンデイング領域
１１ａ及びエミツタボンデイング領域１１ｂを形
成する。第２絶縁層７と、ボンデイング領域部分
を除く第２電極パターン９ａ，９ｂとを覆うよう
にパツシべーシヨン膜１２が形成されている。第
４図は、第３図の破線で示すＡ部の拡大断面図で
ある。
このように構成された半導体装置では、例えば
ベースボンデイング領域１１ａ上に外部接続線１
０ａを熱圧着法により接続する際に圧力によつて
第２絶縁層７の段差部１３に大きなストレスが加
わり、段差部１３にクラツクが発生し易く、著し
い場合は絶縁層７の破壊を招く。このようなクラ
ツクは電気的な初期検査にて発見することが難し
く、半導体装置の信頼性を著しく低下する問題点
となつている。
（発明が解決しようとする問題点） 前述のように従来の多層配線構造の半導体装置
では、多層配線構造の上層のボンデイング領域面
直下に介在する絶縁層の段差部近傍がボンデイン
グ時の圧力によりクラツク等が発生し易く、多層
配線構造の層間絶縁性低下の原因となつている。
本発明の目的は、多層配線構造における層間絶
縁不良を防止し、信頼性の向上を計つた半導体装
置を提供するものである。
［発明の構成］ （問題点を解決するための手段と作用） 本発明は、半導体基板の所定領域に設けられた
能動領域と、該能動領域を含む半導体基板の主面
を覆うように形成された多層配線構造と、該多層
配線構造上層の電極パターンに含まれるボンデイ
ング領域と、該ボンデイング領域の下面から基板
主面にほぼ垂直に前記絶縁層を貫通して能動領域
に達する導電性コンタクト領域とを具備すること
を特徴とする半導体装置である。基板主面に接す
る側から第１絶縁層、第１電極パターン、第２絶
縁層及びボンデイング領域を含む第２電極パター
ンの順に積層された２層配線構造のバイポーラト
ランジスタを一例とし、第１図及び第２図を用い
以下説明する。Ｎ型半導体基板３１の能動領域３
２，３３を含む基板主面を覆うように、第１絶縁
層３４、第１電極パターン３６ａ，３６ｂ、第２
絶縁層３７及び第２電極パターン３９ａ，３９ｂ
から成る多層配線構造が形成されている。ベース
第２電極パターン３９ａ（又はエミツタ第２電極
パターン３９ｂ）のボンデイング領４１ａ又は４
１ｂの下面から基板主面にほぼ垂直に第２絶縁層
３７及び第１絶縁層３４を貫通して能動領域３２
又は３３に達する導電性（例えばAl）コンタク
ト領域３８ａ，３５ａ又は３８ｂ，３５ｂが形成
される。なお（ ）内はエミツタ側に適用した場
合で、ベース側と同じ説明となるので以下ベース
側についてのべる。本発明においては、ベースボ
ンデイング領域４１ａ直下に配設するベースコン
タクト領域３８ａ及び３５ａの少なくとも一部分
が互いに衝合し一体化されたコンタクト領域とな
り、この領域の一端は基板のベース領域とオーム
接触し、他端はベースボンデイング領域裏面に合
体され、ボンデイング領域を保持する金属柱を形
成する。
このような半導体装置ではワイヤボンデイング
時、ボンデイング領域直下の層間絶縁層のクラツ
ク等の破損が防止されることが試行結果より確認
された。これよりボンデイング圧力は主として金
属柱を形成するコンタクト領域に荷重され、層間
絶縁層に加えらえる圧力は小さくその段差部分の
ボンデイングストレスは大幅に緩和され、そのた
めクラツクの発生が防止されるものと推論され
る。したがつて金属柱を形成するコンタクト領域
（第２図の斜線部分）はベースボンデイング領域
４１ａ直下にあるベースコンタクト領域３５ａの
全域にわたつて形成されることが望ましい。
（実施例） 以下図面を参照して本発明の２層配線構造
NPNトランジスタの一実施例について説明する。
第１図はこのトランジスタの模式的Ｘ−Ｘ線断面
図である。第２図は、その平面図であるが繁雑化
を避けるため絶縁層等を省略し、符号で表わす各
領域の輪郭のみを示す簡略化したものである。符
号３１はＮ型半導体基板でコレクタとする。
この基板３１の所定領域には能動領域であるＰ
型ベース領域３２、Ｎ型エミツタ領域３３及び両
領域による接合４３が形成されている。ベース領
域３２及びエミツタ領域３３を含む基板３１の主
面を覆うように厚さ3000Åの第１絶縁層（シリコ
ン基板のときはシリコン酸化膜）３４を形成す
る。第１絶縁層３４にはベース領域３２及びエミ
ツタ領域３３の一部を取り出すため第１コンタク
トホール３５が写真食刻法により開口される。第
１絶縁層３４を含む基板主面に厚さ約1μmのAl
蒸着膜を積層し、写真食刻法によりベース第１電
極パターン３６ａ及びエミツタ第１電極パターン
３６ｂを形成する。第１電極パターンの一部分
は、コンタクトホール３５を充填しＰ型ベース領
域３２及びＮ型エミツタ領域３３とそれぞれオー
ム接触をするベース第１コンタクト領域３５ａ及
びエミツタ第１コンタクト領域３５ｂを形成す
る。次に第１電極パターン３６ａ，３６ｂを含む
基板主面を覆うように厚さ約2μmの第２絶縁層３
７（酸化膜SiO2又は窒化膜Si3N4）をプラズマ
CVD等により積層する。第２絶縁層３７には、
ベースボンデイング領域４１ａ直下にあるコンタ
クト領域３５ａに又エミツタボンデイング領域４
１ｂ直下にあるコンタクト領域３５ｂにそれぞれ
当接するように第２コンタクトホール３８を設け
る。次に第２絶縁層３７及び第２コンタクトホー
ル３８を覆うように厚さ約3μmのAl蒸着膜を積
層し写真食刻法によりベース第２電極パターン３
９ａ及びエミツタ第２電極パターン３９ｂを形成
する。第２電極パターン３９ａ，３９ｂの一部分
はコンタクトホール３８を充填し、それぞれベー
ス第２コンタクト領域３８ａ及びエミツタ第２コ
ンタクト領域３８ｂを形成する。
又第２電極パターン３９ａ，３９ｂの他の一部
分はそれぞれベース及びエミツタのボンデイング
領域４１ａ及び４１ｂとなる。ボンデイング領域
４１ａ及び４１ｂを除く基板主面にはこれを保護
するパツシベーシヨン膜４２が形成される。この
ように形成された半導体装置は、金ワイヤ４０ａ
及び４０ｂ（第２図で図示を省略）をそれぞれボ
ンデイング領域４１ａ及び４１ｂにボールボンデ
イング法（ネールヘツドボンデイング法ともい
う）により熱圧着する。
以上のようにコンタクト領域３５ａと３８ａと
を、又３５ｂと３８ｂとをそれぞれ衝合一体化し
た半導体装置（第１図）と従来の半導体装置（第
３図）とについて、第１電極パターン及び第１、
第２絶縁層を一定にし更にボンデイング条件を一
定にした場合、それぞれのクラツク発生率を調査
した。その結果の一例では、本発明の半導体装置
のクラツク発生率は15％（3/20）、従来の装置は
60％（12/20個）であり、明らかに本発明の装置
の方が従来に比しクラツク発生に対し有利である
ことが確認された。又発生した不良品について顕
微鏡写真等により調べてみると、層間絶縁層のク
ラツクは第１電極パターンのコーナー部分に集中
しておりボンデイング時のストレスによることが
わかる。
以上によりボンデイング領域とその直下の能動
領域との間に衝合一体化されたコンタクト領域を
設けるとボンデイング時の層間絶縁層のクラツク
防止に効果があることがわかる。これはボンデイ
ング時のボンデイング圧力は主として金属柱を形
成するコンタクト領域に負荷されるためと推定さ
れる。
本実施例においては、ボンデイング領域直下の
対応する能動領域の全域にわたつて前記コンタク
ト領域を設け、更にベース第２電極パターン直下
にも設けてあり、これはボンデイング時の層間絶
縁層のクラツク防止及び配線抵抗低減に対し望ま
しいが、ボンデイング領域直下の対応する能動領
域の一部分に前記コンタクト領域を設けても有効
である。
又本発明は、２層以上の多層配線構造の半導体
装置に適用できることは勿論である。
［発明の効果］ 以上説明したように、多層配線構造を有する半
導体装置のボンデイング領域直下に、能動領域に
達する一体化されたコンタクト領域を設けること
で、層間絶縁層に印加されるボンデイング応力を
緩和し、電極パターンの段差部でのクラツク発生
を低減することができる。これにより信頼性の向
上を計つた半導体装置を提供できた。
【図面の簡単な説明】
第１図は本発明の一実施例に係る半導体装置の
模式的断面図、第２図は第１図の半導体装置の簡
略化した平面図、第３図は従来の半導体装置の断
面図、第４図は第３図の半導体装置の一部拡大断
面図である。 １，３１……半導体基板、２，３，３２，３３
……能動領域、４，３４……第１絶縁層、５ａ，
５ｂ，３５ａ，３５ｂ……第１コンタクト領域、
６ａ，６ｂ，３６ａ，３６ｂ……第１電極パター
ン、７，３７……第２絶縁層、８ａ，８ｂ，３８
ａ，３８ｂ……第２コンタクト領域、９ａ，９
ｂ，３９ａ，３９ｂ……第２電極パターン、１１
ａ，１１ｂ，４１ａ，４１ｂ……ボンデイング領
域。

Claims (1)

  1. 【特許請求の範囲】 １ 半導体基板の所定領域に設けられた能動領域
    と、該能動領域を含む半導体基板の主面を覆うよ
    うに複数層の電極パターンを無機の絶縁層を介在
    させて積み重ねた多層配線構造と、該多層配線構
    造上層の電極パターンに含まれるボンデイング領
    域と、該ボンデイング領域の下面から基板主面に
    ほぼ垂直に前記絶縁層を貫通して能動領域に達す
    る導電性コンタクト領域とを具備することを特徴
    とする半導体装置。 ２ 前記多層配線構造が、前記基板主面に接する
    側から第１絶縁層、第１電極パターン、第２絶縁
    層及びボンデイング領域を含む第２電極パターン
    の順に積層された特許請求の範囲第１項記載の半
    導体装置。 ３ 前記ボンデイング領域の下面から能動領域に
    達する導電性コンタクト領域が当該能動領域に開
    口するコンタクトホールの全域にわたり形成され
    る特許請求の範囲第１項又は第２項記載の半導体
    装置。
JP62116727A 1987-05-15 1987-05-15 半導体装置 Granted JPS63283040A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62116727A JPS63283040A (ja) 1987-05-15 1987-05-15 半導体装置
US07/192,665 US4984061A (en) 1987-05-15 1988-05-10 Semiconductor device in which wiring layer is formed below bonding pad
EP88107501A EP0291014B1 (en) 1987-05-15 1988-05-10 Semiconductor device in which wiring layer is formed below bonding pad
DE8888107501T DE3880003T2 (de) 1987-05-15 1988-05-10 Halbleiteranordnung mit einer leiterschicht unter dem kontaktfleck.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62116727A JPS63283040A (ja) 1987-05-15 1987-05-15 半導体装置

Publications (2)

Publication Number Publication Date
JPS63283040A JPS63283040A (ja) 1988-11-18
JPH0546973B2 true JPH0546973B2 (ja) 1993-07-15

Family

ID=14694302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62116727A Granted JPS63283040A (ja) 1987-05-15 1987-05-15 半導体装置

Country Status (4)

Country Link
US (1) US4984061A (ja)
EP (1) EP0291014B1 (ja)
JP (1) JPS63283040A (ja)
DE (1) DE3880003T2 (ja)

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US4617193A (en) * 1983-06-16 1986-10-14 Digital Equipment Corporation Planar interconnect for integrated circuits
JPS6045048A (ja) * 1983-08-22 1985-03-11 Nec Corp 半導体装置
JPS6079746A (ja) * 1983-10-07 1985-05-07 Hitachi Ltd 半導体装置及びその機能変更方法
JPS60115245A (ja) * 1983-11-28 1985-06-21 Toshiba Corp 半導体装置の製造方法
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JPS61239656A (ja) * 1985-04-16 1986-10-24 Citizen Watch Co Ltd 半導体装置
JPS6290950A (ja) * 1985-10-16 1987-04-25 Mitsubishi Electric Corp 半導体装置
US4795722A (en) * 1987-02-05 1989-01-03 Texas Instruments Incorporated Method for planarization of a semiconductor device prior to metallization
JPS63293930A (ja) * 1987-05-27 1988-11-30 Hitachi Ltd 半導体装置における電極

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JPS5553441A (en) * 1978-10-14 1980-04-18 Sony Corp Semiconductor device

Also Published As

Publication number Publication date
JPS63283040A (ja) 1988-11-18
DE3880003D1 (de) 1993-05-13
EP0291014A2 (en) 1988-11-17
DE3880003T2 (de) 1993-09-16
US4984061A (en) 1991-01-08
EP0291014B1 (en) 1993-04-07
EP0291014A3 (en) 1989-07-12

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