JPS63283040A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS63283040A
JPS63283040A JP62116727A JP11672787A JPS63283040A JP S63283040 A JPS63283040 A JP S63283040A JP 62116727 A JP62116727 A JP 62116727A JP 11672787 A JP11672787 A JP 11672787A JP S63283040 A JPS63283040 A JP S63283040A
Authority
JP
Japan
Prior art keywords
region
insulating layer
bonding
substrate
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62116727A
Other languages
English (en)
Other versions
JPH0546973B2 (ja
Inventor
Hiroshi Matsumoto
博 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62116727A priority Critical patent/JPS63283040A/ja
Priority to DE8888107501T priority patent/DE3880003T2/de
Priority to US07/192,665 priority patent/US4984061A/en
Priority to EP88107501A priority patent/EP0291014B1/en
Publication of JPS63283040A publication Critical patent/JPS63283040A/ja
Publication of JPH0546973B2 publication Critical patent/JPH0546973B2/ja
Granted legal-status Critical Current

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    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
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  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
  • Bipolar Transistors (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野） 本発明は、多層配線′ＷＪ造の半導体装置に関するもの
で、特にホンディング領域直下に介在する層間絶縁層の
クラック防止に使用されるものである。
（従来の技術） 従来出力容量特性の低減、高出力化等の要求により電極
を多層化し、能動領域の有効活用を図ると共に、横方向
の電極抵抗を減少し、動作効率の向上を計った多層配線
構造の半導体装置が開発されている。　電極材料として
はアルミニウム又はアルミニウム合金等から成る比較的
低融点材料のものか使用されている。
第３図はこのような半導体装置の一例である。
この半導体装置をバイポーラトランジスタとすると、符
号１はＮ型半導体基板で、コレクタ領域である。　基板
１の所定領域にはＰ型のベース領域２が形成されている
。　ベース領域２内にはＮ型のエミッタ領域３が形成さ
れている。　基板１の主面には、厚さ０．５〜１．０μ
ｍの第１絶縁層４が形成され、第１絶縁層４の所定領域
にはベース領域２及びエミッタ領域３のそれぞれに通じ
る第１コンタクトホール５か開口される。　第１絶縁層
４上には厚さ０．５〜１．５μｍのベース第１電極パタ
ーン６ａ及びエミッタ第１電極パターン６ｂが積層され
、その一部分は第１コンタクトホール５を充填してベー
ス領域２及びエミッタ領域３にそれぞれオーム接触をす
るベース第１コンタクト領域５ａ及びエミッタ第１コン
タクト領域５ｂを形成する。　ベース及びエミッタの第
１電極パターン６ａ　、６ｂ及び第１絶縁層４上には、
ＳｉＯ２膜又はＳｉ３Ｎ、膜から成る厚さ１〜４μｍの
第２絶縁層７が例えは減圧ＣＶＤ　（Ｃｈｅｌｌｉｃａ
ｌ　Ｖａｐｏｕｒ　Ｄｅｐｏｓｉｔｉｏｎ　）法にて積
層されている。　第２絶縁層７には第１電極パターン６
ａ及び６ｂにそれぞれ通する第２コンタクトホール８が
開口されている。　第２絶縁層７上には厚さ２〜５μｍ
のベース第２電極パターン９ａ及びエミッタ第２電極パ
ターン９ｂが積層され、その一部分は第２コンタクトホ
ール８を充填して第１電極パターン６ａ　、６ｂに接続
するベース第２コンタクト領域８ａ及びエミッタ第２コ
ンタクト領域８ｂを形成する。　又第２電極パターンの
他の一部分はそれぞれ外部接続線（ボンディングワイヤ
）１０ａ及び１０ｂを固着するベースボンディング領域
１１ａ及びエミッタボンディング領域１１ｂを形成する
。　第２絶縁Ｎ７と、ボンディング領域部分を除く第２
電極パターン９ａ　、９ｂとを覆うようにパッシベーシ
ョン膜１２が形成されている。
第４図は、第３図の破線で示すＡ部の拡大断面図である
。
このように構成された半導体装置では、例えはベースボ
ンディング領域１１ａ上に外部接続線１０ａを熱圧着法
により接続する際の圧力によって第２絶縁層７の段差部
１３に大きなストレスか加わり、段差部１３にクラック
が発生し易く、著しい場合は絶縁層７の破壊を招く。　
このようなりラックは電気的な初期検査にて発見するこ
とが器しく、半導体装置の信頼性を著しく低下する問題
点となっている。
（発明か解決しようとする問題点） 前述のように従来の多層配線構造の半導体装置では、多
層配線構造の上層のホンディング領域面直下に介在する
絶縁層の段差部近傍がボンディング時の圧力によりクラ
ック等が発生し易く、多層配線′ＷＪ造の層間絶縁性低
下の原因となっている。
本発明の目的は、多層配線構造における層間絶縁不良を
防止し、信頼性の向上を計った半導体装置を提供するも
のである。
［発明の構成］ （問題点を解決するための手段と作用）本発明は、半導
体基板の所定領域に設けられた能動領域と、該能動領域
を含む半導体基板の主面を覆うように形成された多層配
線構造と、該多層配線構造上層の電極パターンに含まれ
るポンディング領域と、該ボンディング領域の下面から
基板主面にほぼ垂直に絶縁層を貫通して能動領域に達す
る導電性コンタクト領域とを具備することを特徴とする
半導体装置である。　基板主面に接する側から第１絶縁
層、第１電極パターン、第２絶縁層及びホンディング領
域を含む第２電極パターンの順に積層された２層配線構
造のバイポーラトランジスタを一例とし、第１図及び第
２図を用い以下説明する。　Ｎ型半導体基板３１の能動
領域３２．３３を含む基板主面を覆うように、第１絶縁
層３４．第１電極パターン３６ａ　、３６ｂ　、第２絶
縁層３７及び第２電極パターン３９ａ。
３９ｂから成る多層配線ｍ遺か形成されている。
ベース第２電極パターン３９ａ　（又はエミッタ第２電
極パターン３９ｂ）のボンディング領４１ａ（又は４１
ｂ）の下面から基板主面にほぼ垂直に第２絶縁層３７及
び第１絶縁層３４を貫通して能動領域３２（又は３３）
に達する導電性（例えばＡＩ）コンタクト領域３８ａ　
、３５ａ　　（又は３８ｂ　、３５ｂ　）が形成される
。　なお０内はエミッタ側に適用した場合で、ベース側
と同じ説明となるので以下ベース側についてのべる。　
本発明においては、ベースボンデインク領域４１ａ直下
に配設するベースコンタクト領域３８ａ及び３５ａの少
なくとも一部分が互いに衝合し一体化されたコンタクト
領域となり、この領域の一端は基板のベース領域とオー
ム接触し、他端はベースボンディング領域裏面に合体さ
れ、ホンディング領域を保持する金属柱を形成する。
このような半導体装置ではワイヤホンディング時、ホン
ディング領域直下の層間絶縁層のクラック等の破損か防
止されることか試行結果より確認された。　これよりホ
ンディング圧力は主として金属柱を形成するコンタクト
領域に荷重され、層間絶縁層に加えられる圧力は小さく
その段差部分のホンディングストレスは大幅に緩和され
、そのためクラックの発生が防止されるものと推論され
る。　したがって金属柱を形成するコンタクト領域（第
２図の斜線部分）は、ベースホンディング領域４１ａ直
下にあるベースコンタクト領域３５ａの全域にわたって
形成されることが望ましい。
（実施例） 以下図面を参照して本発明の２層配線構造ＮＰＮトラン
ジスタの一実施例について説明する。
第１図はこのトランジスタの模式的Ｘ−Ｘ線断面図であ
る。　第２図は、その平面図であるか繁雑化を避けるた
め絶縁層等を省略し、符号で表わす各領域の輪郭のみを
示す簡略化したものである。
符号３１はＮ型半導体基板でコレクタとする。
この基板３１の所定領域には能動領域であるＰ型ベース
領域３２、Ｎ型エミッタ領域３３及び面領域による接合
４３が形成されている。　ベース領域３２及びエミッタ
領域３３を含む基板３１の主面を覆うように厚さ３００
０人の第１絶縁層（シリコン基板のときはシリコン酸化
膜）３４を形成する。
第１絶縁層３４にはベース領域３２及びエミッタ領域３
３の一部を取り出すため第１コンタクトホール３５か写
真食刻法により開口される。　第１絶縁層３４を含む基
板主面に厚さ約１μｍのＡｌ蒸着膜を積層し、写真食刻
法によりベース第１電極パターン３６ａ及びエミッタ第
１電極パターン３６ｂを形成する。　第１電極パターン
の一部分は、コンタクトホール３５を充填しＰ型ベース
領域３２及びＮ型エミッタ領域３３とそれぞれオーム接
触をするベース第１コンタクト領域３５ａ及びエミッタ
第１コンタクト領域３５ｂを形成する。
次に第１電極パターン３６ａ　、３６ｂを含む基板主面
を覆うように厚さ約２μｍの第２絶縁層３７（酸化膜Ｓ
ｉＯ２又は窒化膜Ｓ　！　３　Ｎａ　）をプラズマＣＶ
Ｄ等により積層する。　第２絶縁層３７には、ベースボ
ンデインク領域４１ａ直下にあるコンタクト領域３５ａ
に又エミッタボンデインク領域４１ｂ直下にあるコンタ
クト領域３５ｂにそれぞれ当接するように第２コンタク
トホール３８を設ける。　次に第２絶縁層３７及び第２
コンタクトホール３８を覆うように厚さ約３μｍのＡｌ
蒸着膜を積層し写真食刻法によりベース第２電極パター
ン３９ａ及びエミッタ第２電極パターン３９ｂを形成す
る。　第２電極パターン３９ａ。
＝　９− ３９ｂの一部分はコンタクトホール３８を充填し、それ
ぞれベース第２コンタクト領域３８ａ及びエミッタ第２
コンタクト領域３８ｂを形成する。
又第２電極パターン３９ａ　、３９ｂの他の一部分はそ
れぞれベース及びエミッタのボンディング領域４１ａ及
び４１ｂとなる。　ボンディング領域４１ａ及び４１ｂ
を除く基板主面にはこれを保護するパッシベーション膜
４２が形成される。　このように形成された半導体装置
は、金ワイヤ４０ａ及び４０ｂ　（第２図では図示を省
略）をそれぞれホンディング領域４１ａ及び４１ｂにポ
ールボンディング法（ネールへラドボンディング法とも
いう）により熱圧着する。
以上のようにコンタクト領域３５ａと３８ａとを、又３
５ｂと３８ｂとをそれぞれ衝合一体化した半導体装置（
第１図）と従来の半導体装置（第３図）とについて、第
１電極パターン及び第１、第２絶縁層を一定にし更にホ
ンディング条件を一定にした場合、それぞれのクラック
発生率を調査した。　その結果の一例では、本発明の半
導体装置のクラック発生率は１５％（３／２０個）、従
来の装置は６０％（１２／２０個）であり、明らかに本
発明の装置の方か従来に比しクラック発生に対し有利で
あることが確認された。　又発生した不良品について顕
微鏡写真等により調べてみると、層間絶縁層のクラック
は第１電極パターンのコーナ一部分に集中しておリボン
ディング時のストレスによることがわかる。
以上によりボンデインク領域とその直下の能動領域との
間に衝合一体化されたコンタクト領域を設けるとボンデ
ィング時の眉間絶縁層のクラック防止に効果があること
がわかる。　これはボンディング時のボンデインク圧力
は主として金属柱を形成するコンタクト領域に負荷され
るためと推定される。
本実施例においては、ボンディング領域直下の対応する
能動領域の全域にわたって前記コンタクト領域を設け、
更にベース第２電極パターン直下にも設けてあり、これ
はホンディング時の層間絶縁層のクラック防止及び配線
抵抗低減に対し望ましいが、ボンティング領域直下の対
応する能動領域の一部分に前記コンタクト領域を設けて
も有効である。
又本発明は２層以上の多層配線構造の半導体装置に適用
できることは勿論である。
［発明の効果］ 以上説明したように、多層配線構造を有する半導体装置
のボンディング領域直下に、能動領域に達する一体化さ
れたコンタクト領域を設けることで、層間絶縁層に印加
されるボンディング応力を緩和し、電極パターンの段差
部でのクラック発生を低減することができる。　これに
より信頼性の向上を計った半導体装置を提供できた。
【図面の簡単な説明】
第１図は本発明の一実施例に係る半導体装置の模式的断
面図、第２図は第１図の半導体装置の簡略化した平面図
、第３図は従来の半導体装置の断面図、第４図は第３図
の半導体装置の一部拡大断面図である。 １．３１・・・半導体基板、　２，３，３２．３３・・
・能動領域、　４．３４・・・第１絶縁層、　５ａ。 ５ｂ　、３５ａ　、３５ｂ−・・第１コンタクト領域、
６ａ　、６ｂ　、３６ａ　、３６ｂ　−・・第１電極パ
ターン、７．３７−・・第２絶縁層、　８ａ　、８ｂ　
、３８ａ　。 ３８ｂ・・・第２コンタクト領域、　９ａ　、　９ｂ　
。 ３９ａ、３９ｂ−第２電極パターン、　１１ａ。 １１ｂ　、４１ａ　、４１ｂ・・・ボンデインク領域。

Claims (1)

  1. 【特許請求の範囲】 １　半導体基板の所定領域に設けられた能動領域と、該
    能動領域を含む半導体基板の主面を覆うように複数層の
    電極パターンを絶縁層を介在させて積み重ねた多層配線
    構造と、該多層配線構造上層の電極パターンに含まれる
    ボンディング領域と、該ボンディング領域の下面から基
    板主面にほぼ垂直に前記絶縁層を貫通して能動領域に達
    する導電性コンタクト領域とを具備することを特徴とす
    る半導体装置。 ２　前記多層配線構造が、前記基板主面に接する側から
    第１絶縁層、第１電極パターン、第２絶縁層及びボンデ
    ィング領域を含む第２電極パターンの順に積層された特
    許請求の範囲第１項記載の半導体装置。 ３　前記ボンディング領域の下面から能動領域に達する
    導電性コンタクト領域が当該能働領域に開口するコンタ
    クトホールの全域にわたり形成される特許請求の範囲第
    １項又は第２項記載の半導体装置。
JP62116727A 1987-05-15 1987-05-15 半導体装置 Granted JPS63283040A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62116727A JPS63283040A (ja) 1987-05-15 1987-05-15 半導体装置
DE8888107501T DE3880003T2 (de) 1987-05-15 1988-05-10 Halbleiteranordnung mit einer leiterschicht unter dem kontaktfleck.
US07/192,665 US4984061A (en) 1987-05-15 1988-05-10 Semiconductor device in which wiring layer is formed below bonding pad
EP88107501A EP0291014B1 (en) 1987-05-15 1988-05-10 Semiconductor device in which wiring layer is formed below bonding pad

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62116727A JPS63283040A (ja) 1987-05-15 1987-05-15 半導体装置

Publications (2)

Publication Number Publication Date
JPS63283040A true JPS63283040A (ja) 1988-11-18
JPH0546973B2 JPH0546973B2 (ja) 1993-07-15

Family

ID=14694302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62116727A Granted JPS63283040A (ja) 1987-05-15 1987-05-15 半導体装置

Country Status (4)

Country Link
US (1) US4984061A (ja)
EP (1) EP0291014B1 (ja)
JP (1) JPS63283040A (ja)
DE (1) DE3880003T2 (ja)

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JP2007300139A (ja) * 2007-08-06 2007-11-15 Matsushita Electric Ind Co Ltd 半導体装置

Also Published As

Publication number Publication date
JPH0546973B2 (ja) 1993-07-15
EP0291014A2 (en) 1988-11-17
US4984061A (en) 1991-01-08
DE3880003T2 (de) 1993-09-16
EP0291014A3 (en) 1989-07-12
DE3880003D1 (de) 1993-05-13
EP0291014B1 (en) 1993-04-07

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