JP6948466B2 - 焼成治具 - Google Patents
焼成治具 Download PDFInfo
- Publication number
- JP6948466B2 JP6948466B2 JP2020530713A JP2020530713A JP6948466B2 JP 6948466 B2 JP6948466 B2 JP 6948466B2 JP 2020530713 A JP2020530713 A JP 2020530713A JP 2020530713 A JP2020530713 A JP 2020530713A JP 6948466 B2 JP6948466 B2 JP 6948466B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- base material
- firing jig
- sic
- firing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010304 firing Methods 0.000 title claims description 60
- 239000010410 layer Substances 0.000 claims description 181
- 239000000463 material Substances 0.000 claims description 101
- 239000011247 coating layer Substances 0.000 claims description 47
- 239000011149 active material Substances 0.000 claims description 18
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 17
- 239000002994 raw material Substances 0.000 claims description 13
- 229910052744 lithium Inorganic materials 0.000 claims description 11
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- 239000002344 surface layer Substances 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 10
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 9
- 239000003985 ceramic capacitor Substances 0.000 claims description 5
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 3
- 229910002113 barium titanate Inorganic materials 0.000 claims description 3
- 229910000625 lithium cobalt oxide Inorganic materials 0.000 claims description 3
- BFZPBUKRYWOWDV-UHFFFAOYSA-N lithium;oxido(oxo)cobalt Chemical compound [Li+].[O-][Co]=O BFZPBUKRYWOWDV-UHFFFAOYSA-N 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 description 21
- 238000012360 testing method Methods 0.000 description 18
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 17
- 239000000758 substrate Substances 0.000 description 14
- 238000011156 evaluation Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 230000009257 reactivity Effects 0.000 description 8
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 7
- 239000007795 chemical reaction product Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 239000000470 constituent Substances 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 229910052788 barium Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910003465 moissanite Inorganic materials 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910013733 LiCo Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0006—Composite supporting structures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Furnace Charging Or Discharging (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019024685 | 2019-02-14 | ||
JP2019024685 | 2019-02-14 | ||
PCT/JP2020/005150 WO2020166565A1 (ja) | 2019-02-14 | 2020-02-10 | 焼成治具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020166565A1 JPWO2020166565A1 (ja) | 2021-03-11 |
JP6948466B2 true JP6948466B2 (ja) | 2021-10-13 |
Family
ID=72044896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020530713A Active JP6948466B2 (ja) | 2019-02-14 | 2020-02-10 | 焼成治具 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6948466B2 (zh) |
KR (1) | KR102407421B1 (zh) |
CN (1) | CN113383204B (zh) |
TW (1) | TWI816975B (zh) |
WO (1) | WO2020166565A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7422104B2 (ja) * | 2021-03-23 | 2024-01-25 | 東京窯業株式会社 | 積層構造体の製造方法及び積層構造体 |
WO2023188454A1 (ja) * | 2022-03-28 | 2023-10-05 | 日本碍子株式会社 | 焼成用セッター |
JP7203296B1 (ja) * | 2022-03-28 | 2023-01-12 | 日本碍子株式会社 | 焼成用セッター |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08159671A (ja) * | 1994-12-07 | 1996-06-21 | Toshiba Ceramics Co Ltd | 電子部品焼成用治具 |
JPH11314984A (ja) * | 1998-05-06 | 1999-11-16 | Toshiba Ceramics Co Ltd | 焼成用道具材 |
JP4693196B2 (ja) | 1998-12-22 | 2011-06-01 | 菊水化学工業株式会社 | 焼成治具 |
JP3812715B2 (ja) * | 2000-11-01 | 2006-08-23 | 東芝セラミックス株式会社 | 焼成用容器の再生方法 |
JP2002154884A (ja) * | 2000-11-10 | 2002-05-28 | Ngk Insulators Ltd | 電子部品用焼成治具 |
JP2002270476A (ja) * | 2001-03-13 | 2002-09-20 | Murata Mfg Co Ltd | 匣およびその製造方法ならびにセラミック電子部品の製造方法 |
JP2003306392A (ja) * | 2002-04-12 | 2003-10-28 | Toshiba Ceramics Co Ltd | 電子部品用セラミックスの熱処理用治具およびその製造方法 |
JP4276558B2 (ja) | 2003-02-25 | 2009-06-10 | 株式会社アライドマテリアル | 酸化物皮膜層を備えた高融点金属材料とその製造方法とそれを用いた焼結用板 |
JP2006183972A (ja) * | 2004-12-28 | 2006-07-13 | Ngk Insulators Ltd | 電子部品用焼成治具 |
JP2007076935A (ja) * | 2005-09-13 | 2007-03-29 | Toshiba Ceramics Co Ltd | 電子部品焼成用治具およびその製造方法 |
JP5324029B2 (ja) * | 2006-03-20 | 2013-10-23 | 東京エレクトロン株式会社 | 半導体加工装置用セラミック被覆部材 |
MX2008013968A (es) * | 2006-05-30 | 2008-11-12 | Sca Hygiene Prod Ab | Prenda de vestir para su uso con una estructura absorbente y su metodo de fabricacion. |
US20110020655A1 (en) * | 2008-03-21 | 2011-01-27 | Ihi Corporation | Coating structure and surface processing method |
JP5953947B2 (ja) * | 2012-06-04 | 2016-07-20 | 株式会社Ihi | 耐環境被覆されたセラミックス基複合材料部品及びその製造方法 |
JP6088294B2 (ja) * | 2013-03-07 | 2017-03-01 | 東海高熱工業株式会社 | 炭化珪素複合材およびその製造方法 |
JP5995809B2 (ja) * | 2013-09-13 | 2016-09-21 | 三井金属鉱業株式会社 | 焼成治具および焼成治具の製造方法 |
JP3187621U (ja) * | 2013-09-26 | 2013-12-05 | 株式会社丸栄産業合作社 | リチウムイオン電池における正極材用焼成治具 |
CN104451518B (zh) * | 2014-11-20 | 2017-02-01 | 西安交通大学 | 一种低导热抗烧结热障涂层及其制备方法 |
JP6554573B1 (ja) * | 2018-03-19 | 2019-07-31 | 日本碍子株式会社 | 焼成用セッター |
-
2020
- 2020-02-10 KR KR1020207023354A patent/KR102407421B1/ko active IP Right Grant
- 2020-02-10 WO PCT/JP2020/005150 patent/WO2020166565A1/ja active Application Filing
- 2020-02-10 JP JP2020530713A patent/JP6948466B2/ja active Active
- 2020-02-10 CN CN202080001614.5A patent/CN113383204B/zh active Active
- 2020-02-13 TW TW109104493A patent/TWI816975B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20200105930A (ko) | 2020-09-09 |
CN113383204B (zh) | 2023-04-14 |
KR102407421B1 (ko) | 2022-06-10 |
CN113383204A (zh) | 2021-09-10 |
TWI816975B (zh) | 2023-10-01 |
JPWO2020166565A1 (ja) | 2021-03-11 |
TW202043176A (zh) | 2020-12-01 |
WO2020166565A1 (ja) | 2020-08-20 |
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