JP6674909B2 - インライン型のウェハエッジ検査、ウェハプレアラインメント、及びウェハ洗浄 - Google Patents
インライン型のウェハエッジ検査、ウェハプレアラインメント、及びウェハ洗浄 Download PDFInfo
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- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- H—ELECTRICITY
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Description
Claims (21)
- 半導体ウェハの検査及び加工システムにおいて、
リソグラフィシステム中でリソグラフィ工程がそこに施行される予定の各ウェハを、そのウェハに対してフォトリソグラフィ工程が実行される前に受けるエッジ検出システムであって、
1つ又は複数の照明ビームをウェハの、少なくとも1つの側面並びにウェハの境界領域内にある上部及び底部を含むエッジ部分へと誘導するための少なくとも1つの照明経路と、
1つ又は複数の照明ビームに応答して、ウェハのエッジ部分から散乱又は反射された出力放射を集光し、検出するための少なくとも1つの集光モジュールと、
エッジ部分の中の欠陥を位置特定し、そのようなウェハの検出された出力放射に基づいて、各ウェハが仕様範囲内であるか否かを判断するためのアナライザモジュールであり、前記欠陥は、粒子、クラック、又はスクラッチを含む、アナライザモジュールと、
を含むエッジ検出システムと、
前記エッジ検出システムから、仕様範囲内であることが判明した各ウェハを受け取るフォトリソグラフィシステムと、
を含み、
前記エッジ検出システムは、前記フォトリソグラフィシステムとインライン方式で連結され、
前記エッジ検出システムの前記アナライザモジュールはさらに、前記少なくとも1つの集光モジュールにより集光され、検出された前記出力放射に基づき各ウェハのアラインメント位置を決定するように構成され、かつ前記アラインメント位置を前記フォトリソグラフィシステムに提供するように構成され、
前記リソグラフィシステムは、前記エッジ検出システムからの前記アラインメント位置を受け取り、受け取った前記アラインメント位置を、各ウェハをレチクルパターンに関して整列させるために使用する
ことを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記エッジ検出システムの前記アナライザモジュールはさらに、フォトリソグラフィ工程の間の各ウェハのアラインメントのために、各ウェハが前記エッジ検出システムから前記フォトリソグラフィシステムに移動するときに各ウェハのアラインメント位置を追跡するように構成される
ことを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記エッジ検出システムは、各ウェハを、そのウェハが前記フォトリソグラフィシステムにより加工される直前に受けるように配置されることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記少なくとも1つの照明経路は、エッジ部分に同時に誘導される複数の照明ビームを生成するための回折光学要素を含むことを特徴とするシステム。 - 請求項4に記載のシステムにおいて、
前記エッジ検出システムは、照明経路の下で各ウェハを回転させて、複数の照明ビームでそのようなウェハのエッジ部分の全周がスキャンされるようにし、また前記エッジ検出システムをエッジ部分の上部、底部、及び少なくとも1つの側面の周囲で回転させるための少なくとも1つの位置決め機構をさらに含むことを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記少なくとも1つの集光モジュールは、各ウェハから散乱された出力放射を受け取るための暗視野経路と、各ウェハから反射された出力放射を受けるための明視野経路と、を含むことを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記少なくとも1つの照明経路は、少なくとも1つの照明ビームで各ウェハのエッジ部分をスキャンするための偏向機構を含むことを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記少なくとも1つの照明経路と前記少なくとも1つの集光モジュールは、各ウェハのエッジ部分の少なくとも1つの側面を検査するためのエッジ検査器と、少なくとも1つの側面の検査中に各ウェハのエッジ部分のそれぞれ上部及び底部を同時に検査するための上側カメラと下側カメラの形態であることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記少なくとも1つの照明経路と前記少なくとも1つの集光モジュールは、各ウェハのエッジ部分の少なくとも1つの側面、上部、及び底部を同時に検査するように構成された複数のカメラの形態であることを特徴とするシステム。 - 請求項9に記載のシステムにおいて、
前記カメラは、各ウェハのエッジ部分の少なくとも1つの側面、上部、及び底部に沿って相互にずらして配置されていることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記エッジ検出システムの前記少なくとも1つの照明経路と前記少なくとも1つの集光モジュールは、
各ウェハのエッジ部分に向かって位置決めするための内面と、内面の反対の外面を有する曲面ディフューザと、
前記曲面ディフューザの外面上の複数の位置に隣接する複数の照明ビームを生成して、前記曲面ディフューザによって各サンプルのエッジ部分において複数の入射角度で均一な光が出力されるようにする複数の光源と、
入射光に応答して各ウェハのエッジ部分から散乱される出力放射を受け取り、検出された信号を生成するためのセンサと、
を含み、
前記光源、前記曲面ディフューザ、及び前記センサは、集積されることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
照明経路は、明視野照明及び暗視野照明を提供するように構成されることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記少なくとも1つの集光モジュールは、エッジ部分の少なくとも1つの側面、上部、及び底部からの出力放射を受け取るように配置された複数の第一の端と、受け取った出力放射をラインスキャンカメラ又はTDI(time delay integration)カメラへと出力する複数の第二の反対の端を有するファイバ束の形態であることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記少なくとも1つの集光モジュールは、エッジ部分の少なくとも1つの側面、上部、及び底部から出力放射を同時に受け取って、ラインスキャンカメラ又はTDI(time delay integration)カメラへと誘導するように位置付けられた複数の光学要素の形態であることを特徴とするシステム。 - 請求項1に記載のシステムにおいて、
前記エッジ検出システムの前記少なくとも1つの照明経路と前記少なくとも1つの集光モジュールは、各ウェハのエッジ部分に配置された複数のブルーレイ装置を含むことを特徴とするシステム。 - フォトリソグラフィシステムの中のフォトリソグラフィ工程が施行される予定のウェハのエッジ部分を検査する方法において、
フォトリソグラフィシステムの中でフォトリソグラフィ工程が施行される各ウェハについて、そのウェハにフォトリソグラフィ工程が実行される前にそのウェハをエッジ検出システムの中に受けるステップと、
前記エッジ検出システムによって、各ウェハの、少なくとも1つの側面並びにウェハの境界領域内にある上部及び底部を含むエッジ部分の欠陥を検査して、ウェハが仕様範囲内にあるか否かを判断するステップであり、前記欠陥は、粒子、クラック、又はスクラッチを含む、ステップと、
前記エッジ検出システムによって、前記エッジ検出システムの集光モジュールにより集光され、検出された出力放射に基づき各ウェハのアラインメント位置を決定し、前記アラインメント位置を前記フォトリソグラフィシステムに提供するステップと、
前記エッジ検出システムが仕様範囲内にあると判断した各ウェハについて、前記エッジ検出システムから前記フォトリソグラフィシステムへと排出するステップと、
前記フォトリソグラフィシステムによって、前記エッジ検出システムから前記アラインメント位置を受け取り、受け取った前記アラインメント位置を、各ウェハをレチクルパターンに関して整列させるために使用するステップと、
を含み、
前記エッジ検出システムは、前記フォトリソグラフィシステムとインラインの関係であることを特徴とする方法。 - 請求項16に記載の方法において、
仕様範囲内であることが判明した特定のウェハの欠陥を、そのような特定のウェハに前記フォトリソグラフィ工程が実行されている間又はその後に追跡するステップを含むことを特徴とする方法。 - 請求項16に記載の方法において、
前記エッジ検出システムは、前記リソグラフィシステムの処理速度と等しいか、それより速い速度でウェハを検査することを特徴とする方法。 - 請求項16に記載の方法において、
各ウェハのエッジ部分は、ウェハの円周の周囲で回転され、ウェハのエッジ部分の上部及び下部並びに少なくとも1つの側面の全体にわたってステップ式に移動される複数の同時スキャンスポットで検査されることを特徴とする方法。 - 請求項16に記載の方法において、
エッジ検出システムによって、フォトリソグラフィ工程の間の各ウェハのアラインメントのために、各ウェハが前記エッジ検出システムから前記フォトリソグラフィシステムに移動するときに各ウェハのアラインメント位置を追跡するステップと、
をさらに含むことを特徴とする方法。 - 請求項20に記載の方法において、
仕様範囲外であると判断され、前記フォトリソグラフィシステムにウェハを送る前に洗浄可能である各ウェハを洗浄するステップをさらに含み、
洗浄するステップは、前記エッジ検出システム及び前記フォトリソグラフィシステムとインラインの関係にある内部洗浄システムにおいて実行されることを特徴とする方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462014986P | 2014-06-20 | 2014-06-20 | |
US62/014,986 | 2014-06-20 | ||
US14/741,866 | 2015-06-17 | ||
US14/741,866 US9645097B2 (en) | 2014-06-20 | 2015-06-17 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning |
PCT/US2015/036820 WO2015196163A1 (en) | 2014-06-20 | 2015-06-19 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning |
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US20150370175A1 (en) | 2015-12-24 |
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