200825433 九、發明說明： 【發明所屬之技術領域】 相關申請 本申請要求2005年12月17日申請的序列號爲 5 60/749,052的美國臨時專利的優先權。 發明領域 本發明涉及檢查電路的系統和方法領域。 I：先前技術3 發明背景 10 如印刷電路板和晶片的電路是通過非常複雜的製造過 程製造的。在這些製造過程期間會出現不同類型的缺陷， 典型地要檢查該電路，甚至要經歷檢驗過程，以便保證它 們的質量。 該檢查過程通常包括將電路載入檢查系統，檢查該電 15路，然後從該檢查系統卸載該電路。 在許多檢查系統中，需要操作者手動地裝載和卸栽電 路，因而顯著地減慢了該檢查過程。另一方面，完全自動 的檢查系統很複雜，並且非常昂貴。 存在用於縮紐上述操作所需的時間的增長的需要。 2〇 【屬^明内容】 發明概要 種系統’包括：第-表面，第二表面，第三表面， 以及多目標傳达器；其中該多目標傳送器適於抓住放置在 該第-表面上的預檢查電路，適於抓住放置在第二表面上 5 200825433 I铋查的電路，並且適於同時將該預檢查電路傳送到 口亥第一表面以及將該在前檢查的電路傳送到該第三表面； 其中该系統適於檢查放置在該第二表面上的電路。 一種用於檢查電路的方法，該方法包括〔在第一表面 5接收預檢查電路；通過多目標傳送器抓住該預檢查電路以 及放置在第二表面上的在前檢查的電路；同時將該預檢查 電路傳送到該第二表面和將該在前檢查的電路傳送到第三 表面，以及檢查該預檢查電路。 種系統，包括：第一檢驗站，第二檢驗站，在該第 苐一彳欢驗站之間定位的第二表面，以及多目標傳送 σσ 一中该多目標傳送器適於抓住放置在該第二表面上的 、仏一龟路，同日寸保持在該預檢查電路之前就檢查的在前 “查的電路；其中該多目標傳送器適於在第—方向上移 動以便將戎預檢查電路提供到該第一檢驗站，並且適於 在亥第一方向相反的第二方向上移動，以便將該在前檢 查的電路提供到該第二檢驗站。 圖式簡單說明 在此參照附圖，僅通過舉例的方式描述本發明。現在 在、、、田節上具體餐照附圖，需要強調的是：通過舉例的方式 表丁4細節，僅疋爲了本發明優選實施方式的說明性論 述並且表示其疋爲了提供相信是對本發明的原理和概念 方面最有用且容易理解的描述。在這點上，除了對本發明 ~本里解所必^的’未嘗試更詳細地表示本發明的結構細 即。亥結合附圖的描述使得如何在實踐中具體化本發明幾 6 200825433 種不同的形式對本領域的技術人員來說是顯而易見的。 在該附圖中： > 統；以及 附第1圖-第8圖表示根據本發明不同實施方式的系 電 附第9圖·第_是根據本發日林同實施方式的檢杳 路的流程圖。 【實施方式】 較佳實施例之詳細說明 10 15 20 根據本發明的不同實施方式，提供一種系統。 =括-組設備’其適於載人如電路的目標，並且適ρ載 :=:Γ設備包括掃描系統的檢查心 一糸統方便地包括在該系統中。 下面的描述涉及多目標僂误 -軸執行後性、軍叙 傳W ’該多目標傳送器沿第 釉執仃線性運動。可以注意 多目標傳_以沿多:^ 二動傳送器例如可以沿假想的X心 面的種魏W提供不必要的第—和/或第三表 理和2附圖和伴隨的描述可以更好地理解該組設備的原 附第1圖表示根據本發 檢杳/ U貫h方式的錢8。系統8包括 查= 同的元件(也稱作設備），其將電路裁入檢 、:2,並·®•從檢查系統12卸載電路。 系統1〇包括：（i)第—表面，如第-台10的上表面10,(或 7 200825433 搁板），（ii)第二表面，如掃描台12a的上表面12,；（出）第三 表面，第二台11的上表面丨丨，(或搁板）；以及(iv)多目標傳送 器，如雙夾具14。 方便地，第二表面12a屬於光學檢查系統12，其適於檢 5查放置在第二表面12&上的電路，以便定位可能的缺陷，並 且確定它們的位置。光學檢查系統12通常包括放置在第二 表面12a之下的照明模組，以及放置在第二表面12&之上的 檢測模組。XI種構造適合如印刷電路板、掩模等的透明電 路的檢查。可以注意到，該檢查系統還可以在反射和/或散 10射光的基礎上執行檢查。這種檢查適合於如晶片的不透明 的電路。 方便地，該多目標傳送器適於抓住放置在第一表面1〇, 上的預檢查電路(如電路16c)，抓住放置在第二表面12a上的 在前檢查的電路(如電路16d)，並且同時將該預檢查電路傳 15送到第二表面12a，以及將該在前檢查的電路傳送到第三表 面1Γ。 多目標傳送器14通常抓住該電路，將該抓住的電路提 升到該第-至第三表面1G’、_σ11，之上，執行基本上水 平的運動，以將該預檢查電路&置在第二表面12a之上，並 2〇且將該在前檢查的電路放置在第三表面u，之上。然後，多 目祕傳送器14放下抓住的電路，以將它們分別放置在第二 和第三表面上12a和1Γ上。 注意到，多目標傳送器14可以執行線性水平運動，但 這不是必須的。 8 200825433 進一步注意到，多目標傳送器可以保持一個或多個電 路，直到按指示釋放該一個或多個電路。因此，可以將預 檢查電路提供到第二表面12a，而該在前被檢查的電路仍然 被多目標傳送器14抓住，反之亦然。因此，多目標傳送器 5 14可以充當緩衝器。方便地，多目標傳送器14可以保持一 個或多個電路，同時釋放一個或多個電路。 進一步注意到，雖然附第1圖-第7圖表示的是適於抓住 兩個電路的多目標傳送器14，但是本領域的技術人員可以 理解，該系統8包括可以抓住兩個以上電路的多目標傳送 10 器，並且由該多目標傳送器抓住的電路的數量不同於系統8 的不同於第二表面12a的表面（如第一和第三表面10’和1Γ) 的數量。 可以將第一表面10’從第一位置13a’（由支承電路16c表 示）移動至第二位置13a(由虛線和電路16b表示）。當將第一 15 表面10’定位在第一位置13a’時，其與第二表面12a對準。當 將第一表面10’定位在第二表面13a’時，其未與第二表面12a 對準。在第四位置處，第三表面1Γ向著系統8的操作者延伸。 第三表面11’在第三位置13b和第四位置13b’之間可移 動。當將第三表面11’定位在第三位置13b時，其與第二表面 20 12b對準。當將第三表面11’定位在第四位置13b’時，其未與 第二表面1Γ對準。在第四位置處，第三表面1Γ向著系統8 的操作者延伸。 根據本發明的實施方式，第一表面1〇’在該第一和第二 位置13a和13a’之間的運動由系統8的操作者觸發。 9 200825433 根據本發明的另一個實施方式，第一表面10，在該第一 和第二位置13a和13a’之間的運動與放置在該第二表面上的 電路的檢查進程同步。例如，當完成在前的檢查順序時（或 梢微之前）第一表面1〇’可以移動到第一位置13a，而一旦多 5目標傳送器14將在前檢查的電路放置在第三表面11，上，第 二表面11’就可以從第三位置13b移動到第四位置13b，。第一 表面10’可以移動，在多目標傳送器14將特定的由第一表面 1〇支撐的電路抓到第二位置13a’，以便允許操作者在第一 表面10上放置新的電路之後，同時檢查系統檢查該特定的 10電路。操作者也可以從第三表面11，卸載在前檢查的電路， 同時檢查系統12檢查該特定的電路。 系統8操作的流水線方式能夠執行電路檢查，同時將其 他電路裝載和/或卸載。 、、 以將第 15 怍弟二表面10>11’看作擱板，可以將其從 它們相應的台拉出。 操作者站在（或坐在)檢查系統12之前，並且將電路（或 多個彼此連接的電路)從台車15a載入第一表面1〇，，該二車 運載多個16a表示的電路。這些電路也可以稱作—批。 操作者可以將電路(或多個彼此連接的電路)彳“第二*表 面Π’卸制台車15b，該台車讀錢餘麵^電^ 主思到’可以將台車15a#Ql5b#換成其他運輪元件。 附第2圖表示根據本發明另一個實施方式的系* , 附第2圖的系統8’不同於附第}圖的系統8， 運輪機17、19、18和2。，並且不包括可移動的表=: 20 200825433 到’系統8’還可以包括兩個運輸機17和19，以及兩個固定表 面（代替該第三和第四運輸機18和2〇)。 因此’弟一和第三表面1〇’和11’可以由運輸機的上表面 形成。根據本發明的另一個實施方式，該第一和第三表面 5 10’和丨1’適於從運輸機接收電路（在第〆表面1〇’的情況 下）’或將電路提供到該運輸機(在第三表面1Γ的情況下）。 根據本發明不同的實施方式，操作者玎以將電路放置 在第一運輸機17上，從第二運輸機19移去電路，甚至促使 將運輸的電路放置在第一表面1〇，上，和/或促使將電路從第 10三表面11’移到第二運輸機19。 该第一和第二運輸機可以符合SMEMA，但這不是必須 的。 方便地，由第三運輸機18的上表面形成第一表面10,， 而由第四運輸機20的上表面形成第三表面11，，但這不是必 15 須的。 方便地’當檢查系統12檢查放置在第二表面12a上的特 疋電路時’將預掃描的電路(在共同表示爲16a的多個電路 之外）從第一運輸機17(也稱作供應運輸機）載入第三運輸機 18(也稱作第一台的運輸機），並且在表面1〇，上對準。在由 2〇檢查系統！2檢查電路(例如，通過掃描電路)之後，多目標傳 送器Η在一個動作中立即（〇將在前檢查的電路從第二表面 a輸送到第二表φ11，(由第四運輸機2⑽上表面形成），以 及⑼將預掃描的電路從第三運輸機18輸送到第二表面 Μ便檢查。第—運輸機2G卸载在前檢查的電路16f以 11 200825433 接收運輸機19。繼績該順序處理，只要從供應運輸機I?提 供目標。 附第3圖表示根據本發明的又一個實施方式的系統計。 系統8”的特徵在於具有比附第丨圖的系統8更高的集成 5度(在檢查系統12、多目標傳送器14，以及第一和第三表面 1〇’和11’之間）。 在系統8…中，將檢查系統12、多目標傳送器14，以及 第一和第三表面10,和11，裝配成單一機組。 將第一台10和第二台11裝配成在結構上包括空間21， 1〇其中可以放置掃描台（未示出）。將掃描台放置在第一和第三 台10和11之間。 系統8”包括可移動的第一和第三表面1〇，和u，，該第一 和弟二表面可以在多個位置之間移動。 附第4圖表不根據本發明進一步實施方式的系統8，，，。 15 系統8’’’的特徵在於具有比附第2圖的系統8”更高的集 成度(在檢查系統12、彡目標傳送器14，第一和第二運輸機 17和19之間）。 在系統18…中’將檢查系統12，多目標傳送器Η，第 一和第二運輸機17和19裝配成單一機組。 ί〇 ;主意到’可以將系統8_8，"中的每一個放置在一個或多 個檢驗站附近。檢驗站通常從該檢查系統接收可能的缺陷 位置。可以將該資訊與電路識別字關聯，該識別字使該檢 驗站當檢驗該電路的缺陷時使用適當的位置資訊。可以由 操作者輸入該電路識別字，但這不是必須的。根據本發明 12 200825433 的實施方式，通過跟蹤電路的位置（該檢查和檢驗輕式的進 耘）’该檢驗站可以檢索適當的檢查資訊，而不用接收操作 者的任何輪入。因此，如果將特定的電路從檢查系統送到 檢驗系統’則該檢驗系統可以從該檢查系統檢索該檢查資 5 (否則從該檢查系統接收），並且處理，而不需要來自操作 者的附件識別資訊。然而對另一個例子來說，可以將該檢 查資讯與時間戳關聯，這可以簡化相關檢查資訊的恢復。 附第5圖表示根據本發明實施方式的系統9。 系統9包括：⑴包括第一表面1〇，的第一台1〇，（ii)包括 1〇第二表面12&的第二台12,（iii)多目標傳送器14,（iv)檢驗運 輸機22，（v)第一檢驗站3〇以及(vi)第二檢驗站32。 操作者可以將預檢查電路放置在第一表面10,上，同時 檢查另一個電路。同時，在前檢查的電路通過檢驗站3〇和/ 或32經歷檢驗過程。 15 在檢查完成（通過包括第二表面12a的檢查系統12)之 後’多目標運輸機14可以同時⑴將該在前檢查的電路從第 一表面12a傳送到檢驗運輸機22,以及(ii)將預檢查電路從第 一表面10’傳送到第二表面12&。 該檢驗運輸機22將在前檢查的電路運輸到最接近該第 20 一和第二檢驗站的位置。該檢驗站30和32的操作者可以取 出在前檢查的電路，並且初始化檢驗過程。 檢查系統12也可以將與涉嫌缺陷位置有關的資訊發送 到檢驗站30和32。因此，可以至少與該檢查過裎部分並行 地實施該檢驗過程。 13 200825433 附第6圖表示根據本發明另-個實施方式的系統9|。 附第6圖的系統9,不同於附第5圖的系統9，其具有代替 檢驗運輸機22的纟絲肋。將該缝23的上表面表^ 23’ ’並且相當於在前附圖的第三表面u，。 查毛路抓住放置在第二表面12a上的在前檢查的電路，並 且同時將該預檢查電路傳送到第二表面12a，以及將該在前 檢查的電路傳送到第三表面23,。 多目標傳送器Η適於抓住放置在第一表面1〇，上的預檢 檢驗站30和32的操作者可以取出被檢查目標，並且初 10 始化檢驗過程。 附第7圖表示根據本發明實施方式的系統7，。 系統7’與在前系統的區別在於其檢查系統和其檢驗站 的相對位置（將檢查站12放置在兩個檢驗站3〇和32之間），以 及將預檢查電路載入檢查系統丨2的方式。 雖然在前表示的系統在載入過程期間使用多目標傳送 器14,但是在系統7,中，操作者載入該預檢查電路。使用多 目標傳送器14將在前檢查的電路從檢查系統12傳送到檢驗 站30和32 。 多目標傳送器14適於抓住放置在第二表面12a上的預 20檢查電路，同時保持在前檢查的電路。多目標傳送器14適 於在第一方向上移動，以便將該預檢查電路提供到第一檢 驗站30，並且適於在與該第一方向相反的第二方向上移 動，以便將該在前檢查的電路提供到第二檢驗站32。 方便地，多目標傳送器14可以沿第二表面12a、第一檢 14 200825433 驗站30和第二檢驗站32後部之上的路徑移動。因此，可以 在將其定位在第二表面12a的前部（12a，)時檢查電路，並且 -旦將其定位在後部12”，就可以通過多目標傳送器14將其 抓住。 5 在附第7圖中，檢查系統12的操作者以及該第一和第二 檢驗站30和32的操作者彼此靠近地就坐，位於多目標傳送 器14的同側。 根據本發明的實施方式，可以定位該檢查系統的操作 者，使其面對該檢驗站的操作者。該多目標傳送器可以在 10 檢查系統32和檢驗站之間傳送目標。 附第8圖表示系統7”，其與附第7圖的系統7，的區別在於 檢查系統12的操作者面對檢驗站3〇和32的操作者，以及該 多目標傳送器由單個目標傳送器14,替換。 附第9圖是根據本發明實施方式的檢查電路的方法1〇〇 15 的流程圖。 重復違方法100的不同階段，以提供流水線檢查和傳送 過权。因此，當檢查特定電路時，將預檢查電路放置在第 一表面上，將該在前檢查的電路從第三表面卸載。 方法1 00以在第一表面接收預檢查的電路的階段1 1 〇開 20始。參照在前面附圖中所述的例子，可以通過運輸機或通 過操作者提供接收的電路。該第一表面可以是固定的，或 者了以在夕個位置之間移動。該第一表面還可以是運輸機 的上表面’或者是台的滑動表面。 方便地，階段110包括：當將該第一表面定位在第二位 15 200825433 置時通過該第一表面接收該預檢查電路；將該第一表面移 動到第一位置，以便與該第二表面對準。方便地，當將該 第一表面定位在該第一位置時，其與該第二表面對準；以 及當將該第一表面定位在該第二位置時，其未與該第二表 5 面對準。 階段110後面的是通過多目標傳送器抓住該預檢查電 路和放置在第二表面上的在前檢查的電路的階段120。該在 前檢查的電路是通過檢查系統在前檢查的，當將其定位在 該第二表面上時。方便地，該多目標傳送器是雙夾具。 10 階段後面的疋同時將該預檢查的電路傳送到該第 二表面，以及將該在前檢查的電路傳送到第三表面的階段 130。方便地，將該第二電表面從該檢查系統移去（卸載卜 並且任選地送去檢驗。 方便地，階段130包括將該預檢查電路傳送到該第二表 15面的前部，階段140之前將該預檢查電路從該前部移動到該 第二表面的後部。 階段130後面的是階段11〇、14〇,以及任選的階段16〇、 170和180 。 階段140包括檢查該預檢查電路。 20 階段I60包括檢驗該在前檢查的電路的缺陷。階段wo 包括通過輸送（或其他方法）將該在前檢查的電路從該第三 表面提供到檢驗站。該提供包括使用運輸機，通過操作者 取出該在前檢查的電路等等。可以將該第三表面接近該檢 驗站定位。進一步注意，可以將階段17〇看作是階段16〇的 16 200825433 -部分，特別是將卸載的在前檢查的電路提供到檢驗站。 W又170包括卸載該在前檢查的電路。該卸載後面的是 階段16〇(爲瞭解釋簡單，未在附第9圖中說明該連接），或者 可以實際上結束該電路的測試。 5义方便地，階段170包括：在從該多目標傳送器接收該在 珂檢查的電路之後將該第三表面從第三位置移動到第四位 置。方便地，當將該第三表面定位在該第三位置時，其與 »亥第-表面對準，當將該第三表面定位在該第四位置時， 其未與該第二表面對準。 10 方便地’該第一和第三表面的移動(在階段110和170期 間）回應於來自操作者的觸發器。根據本發明的另一個實施 方式，該第-和第三表面的移動與放置在該第二表面上的 電路的檢查同步。 P皆段18G包括將輸送到檢驗站的該電路巾可能缺陷的 15位置發送給該檢驗站。方便地在該檢驗階段出現之前執行 階段180。 方便地，可以通過附第，第4圖中所示的任一系統執 行階段Η0-Μ0和Π0。注意到，可以通過這些系統的組合 以及一個或多個檢驗站執行該階段16〇。方便地，可以通過 20附第5圖和第6圖中所示的任一系統執行方法1〇〇。 附第10圖表示檢查電路的方法2Q0。 重覆方法200的不同階段以提供流水線檢查和傳送過 程。 方法200以通過第二表面接收預檢查電路的階段2丨〇開 17 200825433 始0 階段210後面的是檢查放置在第二表面上的預檢查電 路的階段220。可以將該第二表面定位在第一和第二檢驗站 之間。注意到，可以以不同的方式定位該第二表面以及 5第—和第二檢驗站，只要該多目標傳送器可以將目標從該 檢查系統傳送到檢驗站。 階段220後面的是通過多目標傳送器抓住該預檢查電 路，同時保持在該預檢查的電路之前就檢查的在前檢查的 電路的階段230。 1〇 階段230後面的是階段210、240和250。 階段240包括在第一方向移動該多目標傳送器，以便將 該預檢查的電路提供到該第一檢驗站。 階段250包括在與該第一方向相反的第二方向上移動 该多目標傳送器，以便將該在前檢查的電路提供到該第二 15檢驗站。 方便地，階段220包括檢查該預檢查電路，同時將其放 置在該第二表面的前部上，以及將該預檢查電路從該前部 移動到該第二表面的後部。 注意到，上述每個方法都包括監視檢查和檢驗過程的 20 進程，並且回應於所述監視，通過檢驗站利用檢查系統産 生的檢查資訊，而不需要該檢驗站操作者的附加輸入。 雖然連同其特定的實施方式描述了本發明，但是顯 然，許多替換、修改和變形對本領域的技術人員來說都是 顯而易見的，因此，打算包含所有這種落入附加的如申& 200825433 專利範圍的精神和廣闊範圍内的替換、修改和變形。 【圖式簡單說明3 附第1圖-第8圖表示根據本發明不同實施方式的系 統；以及 5 附第9圖-第10圖是根據本發明不同實施方式的檢查電 路的流程圖。 【主要元件符號說明】 7’…系統 13a…第二位置 8,8’，8”…系統 13a’···第一位置 9…系統 13b…第三位置 10…系統 13b’···第四位置 10…第一台 14…雙夾具 10’…第一表面 14…多目標傳送器 ll···第二台 14’…目標傳送器 1Γ…第三表面 15a，15b…台車 12…第二台 16a，16c，16d，6f···支承電路 12…檢查系統 17，18，19，"運輸機 12’…上表面 21…空間 12”…後部 22…檢驗運輸機 12a· ··掃描台 23…託盤 12a…第二表面 23’···上表面 12a…第二表面 30···第一檢驗站 19 200825433 32…第二檢驗站 210、220、230、240、250…階段 100、200···方法 110、120、130、140、160、170、 180···階段 20。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 FIELD OF THE INVENTION The present invention relates to the field of systems and methods for inspecting circuits. I: Prior Art 3 Background of the Invention 10 Circuitry such as printed circuit boards and wafers are manufactured through a very complicated manufacturing process. Different types of defects occur during these manufacturing processes, and the circuit is typically inspected and even subjected to inspection procedures to assure their quality. The inspection process typically involves loading the circuit into the inspection system, checking the circuit, and then unloading the circuit from the inspection system. In many inspection systems, the operator is required to manually load and unload the circuit, thereby significantly slowing down the inspection process. On the other hand, a fully automated inspection system is complex and very expensive. There is a need for an increase in the time required for the above operations. 2〇[Abstract] The invention system includes: a first surface, a second surface, a third surface, and a multi-target transmitter; wherein the multi-target conveyor is adapted to be grasped on the first surface a pre-check circuit adapted to grasp a circuit placed on the second surface and adapted to simultaneously transmit the pre-check circuit to the first surface of the mouth and to transmit the circuit to the previous inspection The third surface; wherein the system is adapted to inspect an electrical circuit placed on the second surface. A method for inspecting a circuit, the method comprising: [receiving a pre-check circuit on a first surface 5; grasping the pre-check circuit by a multi-target transmitter and a previously inspected circuit placed on a second surface; A pre-check circuit is transferred to the second surface and the previously inspected circuit is transferred to the third surface, and the pre-check circuit is inspected. The system includes: a first inspection station, a second inspection station, a second surface positioned between the first inspection station, and a multi-target transmission σσ1 in which the multi-target conveyor is adapted to be grasped and placed a circuit on the second surface that is inspected before the pre-inspection circuit; wherein the multi-target transmitter is adapted to move in the first direction to pre-check the defect A circuit is provided to the first inspection station and adapted to move in a second direction opposite the first direction of the first direction to provide the previously inspected circuit to the second inspection station. The invention will be described by way of example only. Now, in the detailed description of the drawings, it is emphasized that the details of the details are illustrated by way of example only for the illustrative discussion of the preferred embodiments of the invention. It is also intended to provide a description that is believed to be the most useful and easy to understand of the principles and concepts of the present invention. In this regard, in addition to the present invention, it is not necessary to present the present invention in more detail. The structure of the invention is described in detail with reference to the accompanying drawings, in which it is obvious to those skilled in the art that the present invention can be embodied in practice. In this figure: > 1 to 8 show a flow chart according to a different embodiment of the present invention. FIG. 8 is a flow chart of the inspection path according to the embodiment of the present invention. [Embodiment] Preferred Embodiment DETAILED DESCRIPTION 10 15 20 According to various embodiments of the present invention, a system is provided: a bracket-group device that is adapted to carry a target such as a circuit, and is adapted to: =: The device includes a check of the scanning system. It is conveniently included in the system. The following description relates to multi-target error-axis execution, military sect, and the multi-target transmitter moves linearly along the glaze. It can be noted that multi-target transmission : ^ The two-moving transmitter can provide an unnecessary first and/or third representation and 2 drawings and accompanying descriptions along the imaginary X-face type, for example, to better understand the original attachment of the set of equipment. Figure 1 shows the present according to the present invention杳 / U h h mode of money 8. System 8 includes the same component (also called device), which cuts the circuit into the inspection, : 2, and ® • unloads the circuit from inspection system 12. System 1 includes : (i) a first surface, such as the upper surface 10 of the first stage 10, (or 7 200825433 shelf), (ii) a second surface, such as the upper surface 12 of the scanning table 12a,; The upper surface of the second stage 11 is 丨丨, (or a shelf); and (iv) a multi-target conveyor, such as a double clamp 14. Conveniently, the second surface 12a belongs to the optical inspection system 12, which is suitable for inspection Circuitry on the second surface 12& to locate possible defects and determine their position. The optical inspection system 12 typically includes a lighting module placed under the second surface 12a and placed on the second surface 12& The detection module on it. The XI construction is suitable for inspection of transparent circuits such as printed circuit boards, masks, and the like. It may be noted that the inspection system may also perform inspections on the basis of reflections and/or scattered light. This inspection is suitable for opaque circuits such as wafers. Conveniently, the multi-target conveyor is adapted to grasp a pre-check circuit (such as circuit 16c) placed on the first surface 1 ,, grasping a previously inspected circuit (such as circuit 16d) placed on the second surface 12a And simultaneously transmitting the pre-check circuit 15 to the second surface 12a and transferring the previously inspected circuit to the third surface 1Γ. The multi-target transmitter 14 typically grasps the circuit, lifts the seized circuit onto the first to third surfaces 1G', _σ11, and performs substantially horizontal motion to place the pre-check circuit & Above the second surface 12a, and placing the previously inspected circuit on the third surface u, above. Then, the multi-eye conveyor 14 puts down the grasped circuits to place them on the second and third surfaces 12a and 1Γ, respectively. It is noted that the multi-target transmitter 14 can perform linear horizontal motion, but this is not required. 8 200825433 It is further noted that the multi-target transmitter can hold one or more circuits until the one or more circuits are released as indicated. Therefore, the pre-check circuit can be provided to the second surface 12a, and the previously inspected circuit is still grasped by the multi-target conveyor 14, and vice versa. Therefore, the multi-target transmitter 514 can function as a buffer. Conveniently, the multi-target transmitter 14 can hold one or more circuits while releasing one or more circuits. It is further noted that although Figures 1 through 7 show a multi-target transmitter 14 suitable for grasping two circuits, those skilled in the art will appreciate that the system 8 includes two or more circuits that can be grasped. The multi-target transmitter 10, and the number of circuits seized by the multi-target transmitter is different from the number of surfaces of the system 8 that are different from the second surface 12a (such as the first and third surfaces 10' and 1'). The first surface 10' can be moved from the first position 13a' (indicated by the support circuit 16c) to the second position 13a (indicated by the dashed line and the circuit 16b). When the first 15 surface 10' is positioned at the first position 13a', it is aligned with the second surface 12a. When the first surface 10' is positioned at the second surface 13a', it is not aligned with the second surface 12a. At the fourth position, the third surface 1Γ extends toward the operator of the system 8. The third surface 11' is movable between the third position 13b and the fourth position 13b'. When the third surface 11' is positioned at the third position 13b, it is aligned with the second surface 20 12b. When the third surface 11' is positioned at the fourth position 13b', it is not aligned with the second surface 1''. At the fourth position, the third surface 1Γ extends toward the operator of the system 8. According to an embodiment of the invention, the movement of the first surface 1 〇 ' between the first and second positions 13a and 13a' is triggered by the operator of the system 8. 9 200825433 According to another embodiment of the invention, the movement of the first surface 10 between the first and second positions 13a and 13a' is synchronized with the inspection process of the circuitry placed on the second surface. For example, the first surface 1'' may be moved to the first position 13a when the previous inspection sequence is completed (or before the tip), and once the multi-target conveyor 14 places the previously inspected circuit on the third surface 11 The second surface 11' can be moved from the third position 13b to the fourth position 13b. The first surface 10' can be moved to capture a particular circuit supported by the first surface 1A to the second position 13a' at the multi-target conveyor 14 to allow the operator to place a new circuit on the first surface 10, Also check the system to check the specific 10 circuits. The operator can also unload the previously inspected circuit from the third surface 11, while the inspection system 12 checks the particular circuit. The pipelined mode of operation of system 8 is capable of performing circuit checks while loading and/or unloading other circuits. To treat the 15th 二二二面10>11' as a shelf, they can be pulled out from their respective stations. The operator stands (or sits) in front of the inspection system 12 and loads the circuit (or a plurality of circuits connected to each other) from the trolley 15a into the first surface 1 运载, which carries the plurality of circuits indicated by 16a. These circuits can also be called - batches. The operator can replace the circuit (or a plurality of circuits connected to each other) with the "second * surface Π" unloading the trolley 15b, and the trolley reads the money surface ^ electric ^ thinks that 'can change the trolley 15a#Ql5b# to other Fig. 2 shows a system according to another embodiment of the present invention, and the system 8' attached to Fig. 2 is different from the system 8, the turbines 17, 19, 18 and 2 of the attached drawings. Does not include a movable table =: 20 200825433 to 'System 8' can also include two transporters 17 and 19, as well as two fixed surfaces (instead of the third and fourth transporters 18 and 2). The third surfaces 1' and 11' may be formed by the upper surface of the conveyor. According to another embodiment of the invention, the first and third surfaces 5 10' and 1' are adapted to receive circuitry from the conveyor (at the third In the case of a surface 1', or providing a circuit to the conveyor (in the case of a third surface), according to various embodiments of the invention, the operator places the circuit on the first conveyor 17, from The second transporter 19 removes the circuit and even causes the transported circuit to be placed The first surface 1 〇, upper, and/or causes the circuit to be moved from the 10th third surface 11' to the second conveyor 19. The first and second conveyors may conform to SMEMA, but this is not required. Conveniently, by The upper surface of the third conveyor 18 forms a first surface 10, and the upper surface of the fourth conveyor 20 forms a third surface 11, but this is not required. Conveniently 'When the inspection system 12 is inspected to be placed on the second surface The special circuit on 12a 'loads the pre-scanned circuits (outside a plurality of circuits collectively denoted 16a) from the first transporter 17 (also referred to as the supply transporter) into the third transporter 18 (also referred to as the first The transporter of the station), and on the surface 1 〇, on the alignment. After checking the circuit by 2〇 inspection system! 2 (for example, through the scanning circuit), the multi-target transmitter Η is in an action immediately (〇 will be checked before) The circuit is transported from the second surface a to the second table φ11, (formed by the upper surface of the fourth conveyor 2 (10)), and (9) the pre-scanned circuit is transported from the third conveyor 18 to the second surface for inspection. The first conveyor 2G Unloading the previously checked circuit 16f to 11 200825433 Receiving the transporter 19. The succession of the sequential processing is as long as the target is provided from the supply transporter I. Figure 3 shows a system meter according to still another embodiment of the present invention. The system 8" is characterized by having a map The system 8 has a higher integration of 5 degrees (between the inspection system 12, the multi-target conveyor 14, and the first and third surfaces 1' and 11'). In the system 8..., the system 12, multi-target will be inspected The conveyor 14, and the first and third surfaces 10, and 11, are assembled into a single unit. The first stage 10 and the second stage 11 are assembled to include a space 21 in the structure, wherein a scanning station can be placed (not shown) Out). The scanning table is placed between the first and third stations 10 and 11. System 8" includes movable first and third surfaces 1 〇, and u, the first and second surfaces can be moved between a plurality of positions. Attachment 4 is a system 8 not according to a further embodiment of the present invention The system 8''' is characterized by having a higher degree of integration than the system 8" attached to Fig. 2 (between the inspection system 12, the target conveyor 14, the first and second conveyors 17 and 19) ). In the system 18... the inspection system 12, the multi-target conveyor Η, the first and second conveyors 17 and 19 are assembled into a single unit. 〇 〇; idea to 'can place each of the systems 8_8, " near one or more checkpoints. The inspection station typically receives possible defect locations from the inspection system. The information can be associated with a circuit identification word that causes the inspection station to use appropriate location information when verifying defects in the circuit. The circuit identification word can be entered by the operator, but this is not required. According to an embodiment of the invention 12 200825433, by tracking the position of the circuit (the inspection and inspection of the light approach), the inspection station can retrieve the appropriate inspection information without receiving any wheeling of the operator. Thus, if a particular circuit is sent from the inspection system to the inspection system, then the inspection system can retrieve the inspection capital 5 from the inspection system (otherwise received from the inspection system) and process it without the need for accessory identification from the operator. News. However, for another example, the check information can be associated with a timestamp, which simplifies the recovery of related check information. Figure 5 shows a system 9 in accordance with an embodiment of the present invention. The system 9 comprises: (1) a first stage comprising a first surface 1 〇, (ii) a second stage 12 comprising 1 〇 a second surface 12&, (iii) a multi-target conveyor 14, (iv) an inspection conveyor 22, (v) a first inspection station 3〇 and (vi) a second inspection station 32. The operator can place the pre-check circuit on the first surface 10 while inspecting the other circuit. At the same time, the previously inspected circuit undergoes the inspection process through the inspection stations 3〇 and/or 32. 15 After the inspection is completed (by the inspection system 12 including the second surface 12a), the multi-target conveyor 14 can simultaneously (1) transfer the previously inspected circuit from the first surface 12a to the inspection conveyor 22, and (ii) pre-check The circuit is transferred from the first surface 10' to the second surface 12&. The inspection conveyor 22 transports the previously inspected circuit to a position closest to the 20th and second inspection stations. The operators of the inspection stations 30 and 32 can take the circuit of the previous inspection and initialize the inspection process. Inspection system 12 may also send information related to the suspected defect location to inspection stations 30 and 32. Therefore, the inspection process can be carried out at least in parallel with the inspection pass portion. 13 200825433 Figure 6 shows a system 9| according to another embodiment of the present invention. The system 9 attached to Fig. 6 differs from the system 9 of Fig. 5 in that it has a rib rib instead of the inspection conveyor 22. The upper surface of the slit 23 is shown to be 23'' and corresponds to the third surface u of the preceding figure. The chucking path grasps the previously inspected circuit placed on the second surface 12a, and simultaneously transfers the pre-inspection circuit to the second surface 12a, and transmits the previously inspected circuit to the third surface 23. The multi-target conveyor Η is adapted to grasp the operator of the pre-testing inspection stations 30 and 32 placed on the first surface 1 〇, and can take out the object to be inspected and initialize the inspection process. Figure 7 shows a system 7 in accordance with an embodiment of the present invention. The system 7' differs from the prior system in the relative position of its inspection system and its inspection station (places the inspection station 12 between the two inspection stations 3A and 32) and loads the pre-check circuit into the inspection system 丨2 The way. Although the previously indicated system uses the multi-target transmitter 14 during the loading process, in system 7, the operator loads the pre-check circuit. The previously inspected circuit is transmitted from inspection system 12 to inspection stations 30 and 32 using multi-target conveyor 14. The multi-target conveyor 14 is adapted to grasp the pre-check circuit placed on the second surface 12a while maintaining the circuit being inspected before. The multi-target conveyor 14 is adapted to move in a first direction to provide the pre-check circuit to the first inspection station 30 and adapted to move in a second direction opposite the first direction to The circuit of inspection is provided to the second inspection station 32. Conveniently, the multi-target conveyor 14 can be moved along a path above the second surface 12a, the first inspection station 14200825433, and the second inspection station 32. Therefore, the circuit can be inspected while positioning it at the front portion (12a,) of the second surface 12a, and if it is positioned at the rear portion 12", it can be grasped by the multi-target conveyor 14. In Fig. 7, the operator of the inspection system 12 and the operators of the first and second inspection stations 30 and 32 sit close to each other on the same side of the multi-target conveyor 14. According to an embodiment of the present invention, positioning is possible. The operator of the inspection system is facing the operator of the inspection station. The multi-target transmitter can transfer the target between the inspection system 32 and the inspection station. Figure 8 shows the system 7", which is attached The system 7 of Fig. 7 differs in that the operator of the inspection system 12 faces the operator of the inspection stations 3A and 32, and the multi-target conveyor is replaced by a single target conveyor 14. Figure 9 is a flow chart of a method 1 of 15 for inspecting a circuit in accordance with an embodiment of the present invention. Repeat the different stages of method 100 to provide pipeline inspection and delivery rights. Therefore, when a specific circuit is inspected, the pre-check circuit is placed on the first surface, and the previously inspected circuit is unloaded from the third surface. Method 100 begins with phase 1 1 of the first surface receiving the pre-checked circuit. Referring to the examples described in the preceding figures, the received circuitry can be provided by a transporter or by an operator. The first surface may be fixed or moved between positions. The first surface may also be the upper surface of the conveyor or the sliding surface of the table. Conveniently, stage 110 includes receiving the pre-check circuit through the first surface when the first surface is positioned at the second bit 15 200825433; moving the first surface to the first position to interact with the second surface alignment. Conveniently, when the first surface is positioned in the first position, it is aligned with the second surface; and when the first surface is positioned in the second position, it is not aligned with the second surface alignment. Following stage 110 is the phase 120 of grasping the pre-check circuit and the previously inspected circuit placed on the second surface by the multi-target transmitter. The previously inspected circuit is inspected prior to inspection by the system when it is positioned on the second surface. Conveniently, the multi-target conveyor is a double clamp. The 后面 after the 10 stage simultaneously transmits the pre-checked circuit to the second surface and the stage 130 for transferring the previously inspected circuit to the third surface. Conveniently, the second electrical surface is removed from the inspection system (unloading and optionally sent for inspection. Conveniently, stage 130 includes transmitting the pre-inspection circuit to the front of the second table 15, stage The pre-check circuit is moved from the front to the rear of the second surface prior to 140. Stages 130 are followed by stages 11A, 14A, and optional stages 16A, 170, and 180. Stage 140 includes checking the pre-stage Checking the circuit. 20 Stage I60 includes verifying the defect of the previously inspected circuit. Stage 1 includes providing the previously inspected circuit from the third surface to the inspection station by transport (or other method). The providing includes using the transporter, The operator can take out the previously inspected circuit, etc. The third surface can be positioned close to the inspection station. It is further noted that stage 17〇 can be considered as a stage 16〇 16 200825433 - part, in particular unloaded The circuit that was previously inspected is supplied to the inspection station. W 170 includes the circuit for unloading the previous inspection. This unloading is followed by stage 16〇 (for simplicity of explanation, the connection is not illustrated in the attached figure 9). ), or may actually end the test of the circuit. 5 Conveniently, stage 170 includes: moving the third surface from the third position to the fourth position after receiving the circuit under inspection from the multi-target transmitter Conveniently, when the third surface is positioned in the third position, it is aligned with the surface, and when the third surface is positioned in the fourth position, it is not aligned with the second surface The movement of the first and third surfaces (during stages 110 and 170) is responsive to triggers from the operator. According to another embodiment of the invention, the movement of the first and third surfaces Synchronizing with the inspection of the circuitry placed on the second surface. P-segment 18G includes transmitting to the inspection station 15 locations of possible defects in the circuit towel delivered to the inspection station. Conveniently prior to the appearance of the inspection phase, stage 180 is performed. Conveniently, the stages Η0-Μ0 and Π0 can be performed by any of the systems shown in the attached figure, Figure 4. It is noted that this stage can be performed by a combination of these systems and one or more inspection stations. Method 1 can be performed by any of the systems shown in Fig. 5 and Fig. 6. Attachment 10 shows a method 2Q0 of inspecting the circuit. Different stages of the method 200 are repeated to provide a pipeline inspection and transfer process The method 200 takes the phase 2 of the pre-check circuit through the second surface to open 17 200825433. The 0 phase 210 is followed by a stage 220 of checking the pre-check circuit placed on the second surface. The second surface can be positioned at Between the first and second inspection stations. It is noted that the second surface and the 5th and second inspection stations can be positioned in different ways as long as the multi-target transmitter can transmit the target from the inspection system to the inspection station Following phase 220 is the phase 230 of the previously inspected circuit that is seized by the multi-target transmitter while maintaining the pre-checked circuit prior to the pre-checked circuit. 1〇 Stages 230 are followed by stages 210, 240 and 250. Stage 240 includes moving the multi-target transmitter in a first direction to provide the pre-checked circuit to the first inspection station. Stage 250 includes moving the multi-target transmitter in a second direction opposite the first direction to provide the previously inspected circuit to the second 15 inspection station. Conveniently, stage 220 includes inspecting the pre-check circuit while placing it on the front of the second surface and moving the pre-check circuit from the front to the rear of the second surface. It is noted that each of the above methods includes 20 processes for monitoring the inspection and inspection process, and in response to the monitoring, the inspection information generated by the inspection system is utilized by the inspection station without the additional input of the inspection station operator. Although the present invention has been described in connection with the specific embodiments thereof, it is apparent that many alternatives, modifications, and variations will be apparent to those skilled in the art, and therefore, it is intended to include all such additional patents such as Shen & 200825433 The spirit of the scope and the substitutions, modifications, and variations within the broad scope. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing a system according to various embodiments of the present invention; and FIG. 9 is a flowchart showing an inspection circuit according to various embodiments of the present invention. [Description of main component symbols] 7'...system 13a...second position 8,8',8"...system 13a'...first position 9...system 13b...third position 10...system 13b'···fourth Position 10...first stage 14...double clamp 10'...first surface 14...multi-target conveyor ll···second stage 14'...target conveyor 1Γ...third surface 15a,15b...trailer 12...second 16a, 16c, 16d, 6f... support circuit 12... inspection system 17, 18, 19, " transporter 12'... upper surface 21... space 12"... rear 22... inspection conveyor 12a · · scanning station 23... tray 12a...second surface 23'··· upper surface 12a...second surface 30···first inspection station 19 200825433 32...second inspection station 210, 220, 230, 240, 250... stage 100, 200··· Method 110, 120, 130, 140, 160, 170, 180··· Stage 20