WO2019065204A1 - Transport system - Google Patents
Transport system Download PDFInfo
- Publication number
- WO2019065204A1 WO2019065204A1 PCT/JP2018/033542 JP2018033542W WO2019065204A1 WO 2019065204 A1 WO2019065204 A1 WO 2019065204A1 JP 2018033542 W JP2018033542 W JP 2018033542W WO 2019065204 A1 WO2019065204 A1 WO 2019065204A1
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- WO
- WIPO (PCT)
- Prior art keywords
- panel
- robot
- liquid crystal
- display panel
- stage
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
Definitions
- the present invention relates to a transport system for transporting a display panel such as a liquid crystal panel.
- an inspection apparatus for inspecting the lighting of a liquid crystal panel is known (see, for example, Patent Document 1).
- the inspection apparatus described in Patent Document 1 is incorporated in the middle of a liquid crystal display manufacturing system.
- This inspection apparatus includes a prober for inspecting the lighting of the liquid crystal panel, a carry-in side conveyor for carrying the liquid crystal panel before the test toward the prober, and a carry-in mechanism for carrying the liquid crystal panel carried by the carry-in conveyor into the prober. It has an unloading mechanism for unloading the liquid crystal panel after inspection from the prober, and an unloading conveyor for transporting the liquid crystal panel unloaded by the unloading mechanism.
- the loading and unloading time of the liquid crystal panel with respect to the inspection device be short in order to shorten the tact time of the manufacturing system.
- an object of the present invention is to transport the display panel between the processing device that processes the display panel and the first panel placement unit in which the display panel before being processed by the processing device is disposed, and
- the transfer system for transferring the display panel between the second panel arranging unit in which the display panel after being processed by the processing apparatus is disposed the loading and unloading time of the display panel with respect to the processing apparatus can be shortened. It is in providing a conveyance system.
- the transport system of the present invention is characterized by the display panel between the processing device for processing the display panel and the first panel placement unit in which the display panel before being processed by the processing device is disposed.
- first temporary placement stage on which the display panel is placed, and the second robot is processed by the processing device from the first panel placement unit to the first temporary placement stage And transport the display panel after being processed by the processing apparatus from the second temporary placement stage to the second panel placement unit, the first robot processing the processing apparatus from the first temporary placement stage to the processing apparatus And conveying the display panel after being processed by the processing apparatus from the processing apparatus to the second temporary placement stage.
- the transfer system of the present invention includes a first robot and a second robot, and a first temporary placement stage and a second temporary placement stage disposed between the first robot and the second robot.
- the second robot transports the display panel from the first panel placement section to the first temporary placement stage, and transports the display panel from the second temporary placement stage to the second panel placement section, and
- the robot transports the display panel from the first temporary placement stage to the processing device, and transports the display panel from the processing device to the second temporary placement stage. Therefore, in the present invention, the display is compared with the case where the transfer of the display panel from the first panel arrangement unit to the processing apparatus and the transfer of the display panel from the processing apparatus to the second panel arrangement unit are performed by one robot. It becomes possible to shorten the operation time of each of the first robot and the second robot when transporting the panel.
- the second robot transports the display panel from the first panel placement section to the first temporary placement stage, and transports the display panel from the second temporary placement stage to the second panel placement section, and While the robot transports the display panel from the first temporary placement stage to the processing apparatus, and transports the display panel from the processing apparatus to the second temporary placement stage, the second robot is operating even if two robots are installed. It becomes difficult for 1 robot and the 2nd robot in operation to interfere. Therefore, in the present invention, it is possible to extend the time for simultaneously operating the first robot and the second robot.
- the present invention as compared with the case where the transportation of the display panel from the first panel arrangement unit to the processing apparatus and the conveyance of the display panel from the processing apparatus to the second panel arrangement unit are performed by one robot While it becomes possible to shorten each operation time of the 1st robot and the 2nd robot at the time of conveying a display panel, it becomes possible to lengthen the time which makes the 1st robot and the 2nd robot operate simultaneously. . Therefore, in the present invention, it is possible to shorten the loading and unloading time of the display panel with respect to the processing apparatus.
- At least one of the first robot and the second robot can rotate the panel holding mechanism for holding the display panel and the panel holding mechanism for setting the horizontal direction as the axial direction of rotation. It is preferable to provide the joint part holding the panel holding mechanism.
- the display panel conveyed from the first panel placement unit to the first temporary placement stage is turned upside down during conveyance, or the display panel conveyed from the second temporary placement stage to the second panel placement unit Flip up and down during transport, upside down during transport of the display panel transported from the first temporary placement stage to the processing device, up and down during transport of the display panel transported from the processing device to the second temporary placement stage It becomes possible to invert.
- the processing device is, for example, a lighting inspection device which performs lighting inspection of the display panel.
- the transport system includes a storage tray in which the display panel determined to be abnormal in the lighting inspection by the lighting inspection apparatus is accommodated, and a tray stage on which the storage tray is placed, and the first robot is illuminated
- the display panel determined to be normal in the lighting inspection by the inspection device is transported from the lighting inspection device to the second temporary placement stage, and the display panel determined to be abnormal in the lighting inspection in the lighting inspection device is accommodated from the lighting inspection device It is preferable to transport to the tray. With this configuration, it is possible to transport only the display panel determined to be normal in the lighting inspection by the lighting inspection device to the second panel arrangement unit.
- the transfer system includes, for example, a panel mounting stage on which a dummy panel formed in the same shape as the display panel is mounted, and the panel mounting stage is between the processing apparatus and the panel mounting stage.
- a plurality of display panels housed in the cassette are arranged in the first panel arrangement portion, and the lighting inspection device has two display panels each in the first panel arrangement portion. Lights are inspected.
- the display panel is subjected to lighting inspection by the lighting inspection device two by two
- the initial number of the display panels accommodated in the cassette disposed in the first panel arrangement portion is an odd number
- the last one accommodated in the cassette After the display panels of one sheet are transported to the lighting inspection apparatus via the first temporary placement stage, the exchange of cassettes is finished, and the first display panel accommodated in the cassette passes the first temporary placement stage
- the transport system has a panel placement stage on which the dummy panel is placed, it will be accommodated in the cassette
- the dummy panel is transported from the panel mounting stage to the lighting inspection device, so that the lighting inspection device is lit as it is It is possible to perform ⁇ .
- the display panel is transported between the processing device that processes the display panel and the first panel placement unit in which the display panel before being processed by the processing device is disposed, and the processing is performed
- a transfer system for transferring a display panel between a device and a second panel arrangement unit in which the display panel after being processed by the processing device is disposed it is possible to shorten the loading and unloading time of the display panel to and from the processing device become.
- FIG. 1 is a side view of a transfer system 1 according to an embodiment of the present invention.
- FIG. 2 is a plan view for explaining the configuration of the transfer system 1 shown in FIG.
- the transport system 1 of the present embodiment is used by being incorporated into a manufacturing line of a relatively small liquid crystal display used in a portable device or the like.
- the transport system 1 transports a liquid crystal panel 2 which is a display panel.
- the transport system 1 includes the liquid crystal panel between the processing device 3 that processes the liquid crystal panel 2 and the first panel placement unit 4 in which the liquid crystal panel 2 before being processed by the processing device 3 is disposed. 2 is conveyed, and the liquid crystal panel 2 is conveyed between the processing device 3 and the second panel arranging portion 5 in which the liquid crystal panel 2 after being processed by the processing device 3 is disposed.
- the liquid crystal panel 2 is formed in a rectangular flat plate shape.
- the X1 direction side of FIG. 2 etc. which is one side in the left-right direction orthogonal to the vertical direction (vertical direction), is the “right” side, and the X2 direction side of FIG.
- the Y1 direction side of FIG. 2 etc. which is one side in the front-rear direction perpendicular to the vertical direction and the left and right direction, is the “front” side, and the Y2 direction side of FIG. To the side.
- the processing device 3 of the present embodiment is a lighting inspection device that performs lighting inspection of the liquid crystal panel 2. Therefore, hereinafter, the processing device 3 is referred to as the “inspection device 3”.
- the second panel placement portion 5 of the present embodiment is a panel receiving portion that constitutes a part of the polarizing plate sticking device 7 that sticks the polarizing plate to the liquid crystal panel 2.
- the panel receiving unit is the liquid crystal panel 2 after the lighting inspection by the inspection device 3 is received, and the liquid crystal panel 2 before the polarizing plate is attached is received.
- the second panel arrangement unit 5 will be referred to as "panel receiving unit 5".
- the plurality of liquid crystal panels 2 accommodated in the cassette 6 are arranged in the first panel arrangement portion 4.
- the liquid crystal panel 2 is disposed so that the thickness direction of the liquid crystal panel 2 and the vertical direction substantially coincide with each other.
- the plurality of liquid crystal panels 2 are arrayed in the state of leaving a predetermined interval in the left and right direction, and the plurality of liquid crystal panels 2 aligned in the left and right direction is the predetermined interval in the vertical direction It is arranged to overlap in the up and down direction with open.
- the transport system 1 includes a robot 11 for transporting the liquid crystal panel 2 to the inspection device 3, unloading of the liquid crystal panel 2 from the first panel placement unit 4 (that is, unloading of the liquid crystal panel 2 from the cassette 6) and a panel receiving unit
- the robot 11 of this embodiment is a first robot
- the robot 12 is a second robot
- the temporary placement stage 13 is a first temporary placement stage
- the temporary placement stage 14 is a second temporary placement stage.
- the transport system 1 includes a storage tray 15 in which the liquid crystal panel 2 determined to be abnormal (defective) in the lighting inspection in the inspection device 3 is stored, and a tray stage 16 in which the storage tray 15 is mounted. There is. Furthermore, the transport system 1 includes a panel mounting stage 17 on which the dummy panel 52 having the same shape as the liquid crystal panel 2 is mounted.
- the robot 11 and the robot 12 are disposed in the state of being spaced apart in the left-right direction.
- the robot 11 is disposed on the right side, and the robot 12 is disposed on the left side.
- the robot 11 and the robot 12 are disposed at the same position in the front-rear direction.
- the temporary placement stage 13 and the temporary placement stage 14 are disposed adjacent to each other in the front-rear direction.
- the temporary placement stage 13 is disposed on the front side
- the temporary placement stage 14 is disposed on the rear side.
- the temporary placement stages 13 and 14 are disposed between the robot 11 and the robot 12 in the left-right direction. In the front-rear direction, the front end portion of the temporary placement stage 14 is disposed at substantially the same position as the centers of the robots 11 and 12.
- the storage tray 15 and the tray stage 16 are disposed on the right front side of the robot 11.
- the panel mounting stage 17 is disposed on the right side of the temporary placement stage 14.
- the panel mounting stage 17 is adjacent to the temporary placement stage 14. Further, the panel mounting stage 17 is disposed on the left side of the robot 11.
- the inspection device 3 is disposed behind the robot 11.
- the first panel placement unit 4 and the cassette 6 are disposed on the front side of the robot 12 and are disposed on the left side of the inspection device 3.
- the panel receiving unit 5 is disposed on the left rear side of the robot 12 and on the left side of the inspection device 3. That is, the first panel placement unit 4 and the panel reception unit 5 are disposed on the left side of the inspection device 3.
- the cassette 6 is disposed on the front side of the temporary placement stage 13, and the inspection device 3 and the panel receiving unit 5 are disposed on the rear side of the temporary placement stage 14.
- the liquid crystal panel 2 is inspected for lighting two by two.
- the inspection apparatus 3 has, for example, a panel holding unit having a panel mounting unit 20 at two positions on which two liquid crystal panels 2 are mounted, a rotation mechanism for rotating the panel holding unit with the vertical direction as an axial direction of rotation. And a case whose inside is a dark room at the time of the lighting inspection of the liquid crystal panel 2.
- a backlight and a camera for inspecting the lighting of the liquid crystal panel 2 are installed inside the housing.
- the rotation mechanism has a position where one of the two panel mounting portions 20 is disposed outside the housing and the other panel mounting portion 20 is disposed inside the housing.
- the panel holding unit is rotated between the position where one panel placement unit 20 is disposed inside the casing and the other panel placement unit 20 is disposed outside the casing.
- the panel receiving unit 5 includes, for example, a panel placement unit 21 on which one liquid crystal panel 2 is placed.
- the first panel placement unit 4 includes a cassette holding unit that holds the cassette 6.
- the cassette holding portion is rotatable with the left and right direction as an axial direction of rotation and the lower end of the cassette holding portion as a rotation center.
- the operator manually sets the cassette 6 in the cassette holding unit.
- the thickness of the liquid crystal panel 2 accommodated in the cassette 6 after the cassette 6 is set from the diagonally front upper side in the cassette holding portion in a state of being inclined forward toward the upper side. After rotating the cassette holding portion to a position where the direction and the vertical direction substantially coincide with each other, the cassette holding portion is fixed.
- the robot 11 is a six-axis vertical articulated robot.
- the robot 11 includes a support member 23 constituting a lower end portion of the robot 11, a joint unit 24 rotatably connected to the support member 23, and a joint unit 25 rotatably connected to the joint unit 24.
- a straight arm 26 whose base end is fixed to the joint 25, a joint 27 fixed to the tip of the arm 26, a joint 28 relatively rotatably connected to the joint 27, and a joint 28, a straight arm 29 whose proximal end is relatively rotatably coupled, a joint 30 to which the tip of the arm 29 is fixed, a joint 31 relatively movably connected to the joint 30, and a joint
- a panel holding mechanism 32 rotatably connected to the portion 31 and holding the liquid crystal panel 2 is provided.
- the joint portion 24 is connected to the support member 23 so as to be able to rotate with the vertical direction as an axial direction of rotation.
- the joint portion 25 is connected to the joint portion 24 so as to be able to rotate with the horizontal direction as the axial direction of rotation.
- the joint portion 28 is connected to the joint portion 27 so as to be able to rotate with the horizontal direction as the axial direction of rotation.
- the joint portion 31 is connected to the joint portion 30 so as to be able to rotate with the horizontal direction as the axial direction of rotation.
- the axial direction of rotation of the joint 25 relative to the joint 24 and the axial direction of rotation of the joint 28 relative to the joint 27 are orthogonal to the longitudinal direction of the arm 26.
- the axial direction of rotation of the joint 28 with respect to the joint 27 and the axial direction of rotation of the joint 31 with respect to the joint 30 are orthogonal to the longitudinal direction of the arm 29. Further, the axial direction of rotation of the joint 28 with respect to the joint 27 and the axial direction of rotation of the arm 29 with respect to the joint 28 are orthogonal to each other. The axial direction of rotation of the joint 31 with respect to the joint 30 and the axial direction of rotation of the panel holding mechanism 32 with respect to the joint 31 are orthogonal to each other.
- the joint portion 31 is connected to the joint portion 30 so as to be able to rotate with the horizontal direction as the axial direction of rotation. That is, the joint unit 30 holds the panel holding mechanism 32 via the joint unit 31 so that the panel holding mechanism 32 can be pivoted so that the horizontal direction is the axial direction of pivoting.
- the joints 24, 25, 27, 28, 30, 31 each include a motor and a reduction gear that transmits the power of the motor at a reduced speed.
- the joint unit 24 is rotated relative to the support member 23 by the power of the motor of the joint unit 24.
- the joint 25 is rotated relative to the joint 24 by the power of the motor of the joint 25.
- the joint unit 28 is rotated relative to the joint unit 27 by the power of the motor of the joint unit 27.
- the arm 29 rotates with respect to the joint 28 by the power of the motor of the joint 28.
- the joint 31 rotates with respect to the joint 30 by the power of the motor of the joint 30.
- the panel holding mechanism 32 is rotated relative to the joint 31 by the power of the motor of the joint 31.
- the panel holding mechanism 32 includes a panel holding portion 32 a that sucks and holds the liquid crystal panel 2.
- the panel holding portion 32 a is formed in a square flat plate shape, and holds one liquid crystal panel 2.
- a plurality of suction holes are formed in the panel holding portion 32a.
- An air suction mechanism such as a vacuum pump is connected to the plurality of suction holes via a predetermined pipe.
- the robot 12 is a six-axis vertical articulated robot configured similarly to the robot 11, and includes joints 24, 25, 27, 28, 30 and 31, arms 26 and 29, and a panel holding mechanism 32. Is equipped. However, the panel holding portion 32 a of the panel holding mechanism 32 of the robot 12 is formed in a long and thin rectangular plate shape.
- the temporary placement stages 13 and 14 are formed in a substantially rectangular flat plate shape.
- the upper surfaces of the temporary placement stages 13 and 14 are planes orthogonal to the vertical direction.
- Two liquid crystal panels 2 can be placed on the temporary placement stage 13. Specifically, it is possible to place two liquid crystal panels 2 on the temporary placement stage 13 with a predetermined interval in the front-rear direction. Similarly, it is possible to place two liquid crystal panels 2 on the temporary placement stage 14 with a predetermined interval in the front-rear direction.
- the temporary placement stage 13 is formed with a notch 13a through which the panel holding portion 32a of the robot 12 passes in the vertical direction.
- the notch 13 a is formed from the left end of the temporary placement stage 13 toward the right.
- the notch 13a passes through the temporary placement stage 13 in the vertical direction.
- the notch 13a is formed in two places. Specifically, the notches 13 a are formed at two locations corresponding to the mounting position of the liquid crystal panel 2.
- the temporary placement stage 14 is also formed with a notch 14a through which the panel holding portion 32a of the robot 12 passes in the vertical direction.
- the notch 14a is formed in the same manner as the notch 13a.
- a plurality of liquid crystal panels 2 can be accommodated in the accommodation tray 15.
- the tray stage 16 is formed in a substantially rectangular flat plate shape.
- the upper surface of the tray stage 16 is a plane orthogonal to the vertical direction.
- the panel mounting stage 17 is formed in a substantially rectangular flat plate shape.
- the upper surface of the panel mounting stage 17 is a plane orthogonal to the vertical direction.
- Two dummy panels 52 are mounted on the panel mounting stage 17. Specifically, two dummy panels 52 are mounted on the panel mounting stage 17 with a predetermined interval in the front-rear direction.
- the panel mounting stage 17 conveys the dummy panel 52 by the robot 11 between the inspection device 3 and the panel mounting stage 17 (specifically, between the panel mounting unit 20 and the panel mounting stage 17). It is placed in a possible position.
- the panel mounting stage 17 is formed with a notch 17 a.
- the notch portion 17 a is formed from the right end of the panel mounting stage 17 toward the left side.
- the notch 17a penetrates the panel mounting stage 17 in the vertical direction.
- the notches 17 a are formed at two locations corresponding to the mounting position of the dummy panel 52.
- FIG. 6 is a flowchart for explaining an example of the operation of the robot 11 shown in FIG.
- FIG. 7 is a flowchart for explaining an example of the operation of the robot 12 shown in FIG.
- the robot 11 transports the liquid crystal panel 2 before being processed by the inspection apparatus 3 from the temporary placement stage 13 to the inspection apparatus 3 (that is, the liquid crystal panel 2 before being subjected to the lighting inspection).
- the robot 11 conveys the liquid crystal panel 2 (that is, the liquid crystal panel 2 after being subjected to the lighting inspection) after being processed by the inspection device 3 from the inspection device 3 to the temporary placement stage 14. More specifically, the robot 11 transports the liquid crystal panel 2 determined to be normal in the lighting inspection in the inspection device 3 from the inspection device 3 to the temporary placement stage 14, and causes the lighting inspection in the inspection device 3 to be abnormal.
- the determined liquid crystal panel 2 is transported from the inspection device 3 to the storage tray 15.
- the robot 12 conveys the liquid crystal panel 2 before being subjected to the lighting inspection by the inspection device 3 from the first panel placement unit 4 (that is, from the cassette 6) to the temporary placement stage 13, and receives the panel from the temporary placement stage 14
- the liquid crystal panel 2 after being subjected to the lighting inspection by the inspection device 3 is transported to the unit 5.
- the panel holding portion 32a of the robot 11 that transports the liquid crystal panel 2 between the temporary placement stages 13 and 14 and the inspection device 3 has a standby position P1 immediately before the inspection device 3 and the temporary placement stage. There may be a pause at a standby position P2 immediately to the right of 13, 14. Further, the panel holding portion 32 a of the robot 12 which transports the liquid crystal panel 2 from the cassette 6 to the temporary placement stage 13 and transports the liquid crystal panel 2 from the temporary placement stage 14 to the panel receiving unit 5 is a standby state immediately behind the cassette 6. It may pause at the standby position P4 immediately to the left of the position P3 and the temporary placement stages 13 and 14.
- liquid crystal panel 2A the two liquid crystal panels 2 after the lighting inspection mounted on the panel mounting portion 20 disposed outside the housing of the inspection device 3
- the liquid crystal panel 2B the liquid crystal panel 2
- the robots 11 and 12 are as follows: It operates to transport the liquid crystal panel 2.
- step S1 the panel holding unit 32a of the robot 11 disposed at the standby position P1 moves to the panel placement unit 20 of the inspection device 3 as indicated by the arrow R1.
- the liquid crystal panel 2A is held (step S1).
- step S1 the panel holding unit 32a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2A.
- step S2 the panel holding unit 32a of the robot 11 returns to the standby position P1 as indicated by the arrow R2 (step S2).
- step S3 the panel holding unit 32a of the robot 11 moves to the standby position P2 as indicated by the arrow R3
- step S4 the panel holding unit 32a of the robot 11 moves to the temporary placement stage 14 as indicated by the arrow R4, and places the held liquid crystal panel 2A on the temporary placement stage 14 (step S4).
- step S4 the panel holding unit 32a of the robot 11 mounts the liquid crystal panel 2A on the front side portion of the temporary placement stage 14, for example.
- step S5 the panel holding unit 32a of the robot 11 returns to the standby position P2 as indicated by the arrow R5 (step S5).
- step S51 the panel holding portion 32a of the robot 12 disposed at the standby position P3 moves to the cassette 6 as indicated by the arrow L1 and holds the liquid crystal panel 2C (step S51). ).
- step S51 the panel holding unit 32a of the robot 12 sucks and holds the lower surface of the liquid crystal panel 2C.
- step S52 the panel holding unit 32a of the robot 12 returns to the standby position P3 as indicated by the arrow L2 (step S52).
- step S53 the panel holding unit 32a of the robot 12 moves to the standby position P4 as indicated by the arrow L3
- step S54 the panel holding unit 32a of the robot 12 places the liquid crystal panel 2C on the front side portion of the temporary placement stage 13, for example. Further, when mounting the liquid crystal panel 2C on the temporary placement stage 13 in step S54, the panel holding portion 32a of the robot 12 passes through the notch 13a. Thereafter, the panel holding unit 32a of the robot 12 moves to the temporary placement stage 14 as indicated by the arrow L5 (step S55). Steps S51 to S55 are performed simultaneously with steps S1 to S5.
- step S5 the panel holding unit 32a of the robot 11 moves to the temporary placement stage 13 as indicated by the arrow R6, and holds the liquid crystal panel 2C (step S6).
- step S6 the panel holding unit 32a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2C.
- step S7 the panel holding unit 32a of the robot 11 moves to the standby position P1 as indicated by the arrow R7 (step S7).
- step S7 the panel holding portion 32a of the robot 11 is moved to the panel mounting portion 20 of the inspection device 3 as indicated by the arrow R11, where the liquid crystal panel 2A is mounted.
- the held liquid crystal panel 2C is placed (step S8).
- step S9 the panel holding unit 32a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2B.
- step S11 the panel holding unit 32a of the robot 11 moves to the standby position P2 as indicated by the arrow R14 (step S11). Thereafter, the panel holding unit 32a of the robot 11 moves to the temporary placement stage 14 as indicated by the arrow R15, and places the held liquid crystal panel 2B on the temporary placement stage 14 (step S12). In step S12, the panel holding unit 32a of the robot 11, for example, places the liquid crystal panel 2C on the rear side portion of the temporary placement stage 14. Thereafter, the panel holding unit 32a of the robot 11 returns to the standby position P2 as indicated by the arrow R16 (step S13).
- step S55 the panel holding unit 32a of the robot 12 holds the liquid crystal panel 2A placed on the temporary placement stage 14 (step S56).
- step S56 the panel holding unit 32a of the robot 12 sucks and holds the lower surface of the liquid crystal panel 2A.
- the panel holding portion 32a of the robot 12 passes the notch 14a. Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P4 as indicated by the arrow L6 (step S57).
- step S58 the panel holding unit 32a of the robot 12 moves to the panel placement unit 21 of the panel receiving unit 5 as indicated by the arrow L7, and places the held liquid crystal panel 2A on the panel placement unit 21 (Ste S58).
- the panel holding unit 32a of the robot 12 for example, turns the liquid crystal panel 2A upside down while the panel holding unit 32a is moving, and places the liquid crystal panel 2A on the panel placement unit 21.
- the panel holding unit 32a of the robot 12 moves to the standby position P3 as indicated by the arrow L8 (step S59).
- step S60 the panel holding unit 32a of the robot 12 moves to the cassette 6 as indicated by the arrow L11, and holds the liquid crystal panel 2D (step S60).
- step S60 the panel holding unit 32a of the robot 12 sucks and holds the lower surface of the liquid crystal panel 2D.
- step S61 the panel holding unit 32a of the robot 12 returns to the standby position P3 as indicated by the arrow L12 (step S61).
- step S62 the panel holding unit 32a of the robot 12 moves to the standby position P4 as indicated by the arrow L13
- step S63 the panel holding unit 32a of the robot 12 moves to the temporary placement stage 13 as indicated by the arrow L14, and places the held liquid crystal panel 2D on the temporary placement stage 13 (step S63).
- step S63 the panel holding unit 32a of the robot 12 places the liquid crystal panel 2D on the rear side of the temporary placement stage 13, for example. Further, when mounting the liquid crystal panel 2D on the temporary placement stage 13 in step S63, the panel holding portion 32a of the robot 12 passes through the notch 13a. Thereafter, the panel holding unit 32a of the robot 12 moves to the temporary placement stage 14 as indicated by the arrow L15 (step S64). Steps S56 to S64 are performed simultaneously with steps S6 to S13.
- step S14 the panel holding unit 32a of the robot 11 moves to the temporary placement stage 13 as indicated by the arrow R17, and holds the liquid crystal panel 2D (step S14).
- step S14 the panel holding unit 32a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2D.
- step S15 the panel holding unit 32a of the robot 11 moves to the standby position P1 as indicated by the arrow R18 (step S15).
- step S16 the panel holding unit 32a of the robot 11 moves to the panel mounting unit 20 of the inspection device 3 as indicated by the arrow R19, and holds the liquid crystal panel 2D held at the position where the liquid crystal panel 2B was mounted.
- step S16 the panel holding unit 32a of the robot 11 returns to the standby position P1 as indicated by the arrow R20 (step S17).
- step S65 the panel holding unit 32a of the robot 12 holds the liquid crystal panel 2B placed on the temporary placement stage 14 (step S65).
- step S65 the panel holding unit 32a of the robot 12 sucks and holds the lower surface of the liquid crystal panel 2B.
- the panel holding portion 32a of the robot 12 passes through the notch 14a. Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P4 as indicated by the arrow L16 (step S66).
- step S67 for example, while the panel holding unit 32a is moving, the panel holding unit 32a of the robot 12 turns the liquid crystal panel 2B upside down and places the liquid crystal panel 2B on the panel placement unit 21. Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P3 as indicated by the arrow L18 (step S68). Steps S65 to S68 are performed simultaneously with steps S14 to S17.
- the temporary holding stage 14 moves and the liquid crystal panels 2A and 2B are placed on the temporary holding stage 14.
- the panel holding portion 32a of the robot 11 moves to the temporary holding stage 14 and the liquid crystal panels 2A and 2B move.
- the robot 12 may stop for a predetermined time in order to prevent interference with the panel holding unit 32a of the robot 12 holding the key.
- the liquid crystal panel 2 is subjected to the light inspection every two sheets in the inspection device 3.
- the panel placement unit Although the number of the liquid crystal panels 2 placed on the panel 20 is one, if the number of the liquid crystal panels 2 placed on the panel placement unit 20 is one, the liquid crystal panel 2 is selected because of the structure of the inspection device 3.
- the robot 11 conveys the dummy panel 52 placed on the panel placement stage 17 to the panel placement unit 20 and places the dummy panel 52 on the panel placement unit 20. Further, when the dummy panel 52 is placed on the panel placement unit 20, the inspection device 3 performs a lighting examination.
- the lighting inspection of the liquid crystal panel 2 can not be performed by the inspection device 3 unless the number of the liquid crystal panels 2 mounted on the panel mounting portion 20 is two.
- the number of the liquid crystal panels 2 mounted on the panel mounting portion 20 is two.
- a situation in which a failure or the like of the camera of the inspection apparatus 3 occurs and only one liquid crystal panel 2 of the two liquid crystal panels 2 placed on the panel placement unit 20 can be properly lit. Can occur.
- only one liquid crystal panel 2 is replaced in a state where each of the two dummy panels 52 is mounted on each of the two panel mounting portions 20, so that one liquid crystal panel 2 can be obtained. It is possible to continue the lighting inspection of the
- the transport system 1 includes the two robots 11 and 12 and the two temporary placement stages 13 and 14 disposed between the robot 11 and the robot 12. .
- the robot 11 transports the liquid crystal panel 2 before the lighting inspection from the temporary placement stage 13 to the inspection device 3 and transports the liquid crystal panel 2 after the lighting inspection from the inspection device 3 to the temporary placement stage 14 ing.
- the robot 12 transports the liquid crystal panel 2 before the lighting inspection from the cassette 6 to the temporary placement stage 13 and transports the liquid crystal panel 2 after the lighting inspection from the temporary placement stage 14 to the panel receiving unit 5.
- the present embodiment compared to the case where the transportation of the liquid crystal panel 2 from the cassette 6 to the inspection device 3 and the transportation of the liquid crystal panel 2 from the inspection device 3 to the panel receiving unit 5 are performed by one robot, It becomes possible to shorten the operation time of each of the robot 11 and the robot 12 when transporting the panel 2. Further, in the present embodiment, even if two robots 11 and 12 are installed, the robot 11 in operation and the robot 12 in operation interfere with each other as described in the example of the transfer operation of the liquid crystal panel 2 described above. Since it becomes difficult to do, it becomes possible to lengthen the time which makes robot 11 and robot 12 operate simultaneously.
- the panel holding mechanism 32 is held by the joint unit 30 via the joint unit 31 so that the panel holding mechanism 32 can be turned in the horizontal direction as the axial direction of the rotation. Therefore, in the present embodiment, as described above, for example, the liquid crystal panel 2 conveyed from the temporary placement stage 14 to the panel placement unit 21 can be turned upside down during conveyance. Therefore, in the present embodiment, it is possible to facilitate the handling of the liquid crystal panel 2 in the polarizing plate sticking device 7.
- the transport system 1 includes the storage tray 15 in which the liquid crystal panel 2 determined to be abnormal in the lighting inspection in the inspection device 3 is accommodated, and the robot 11 is normal in the lighting inspection in the inspection device 3
- the liquid crystal panel 2 determined as being transported from the inspection device 3 to the temporary placement stage 14, and the liquid crystal panel 2 determined as abnormal by the lighting inspection in the inspection device 3 is transported from the inspection device 3 to the storage tray 15. Therefore, in the present embodiment, it is possible to transport only the liquid crystal panel 2 determined to be normal in the lighting inspection in the inspection device 3 to the panel receiving unit 5 of the polarizing plate sticking device 7.
- two dummy panels 52 are mounted on the panel mounting stage 17. Therefore, in the present embodiment, as described above, even if the initial number of liquid crystal panels 2 accommodated in the cassette 6 is an odd number, the last one liquid crystal panel 2 accommodated in the cassette 6 is the cassette 6 Even after the cassette 6 has not been replaced, the dummy panel 52 can be placed on the panel placement unit 20 and the inspection device 3 can perform the lighting inspection of the liquid crystal panel 2.
- the panel holding mechanism 32 may include two panel holding portions 32a. That is, the panel holding mechanism 32 may hold the two liquid crystal panels 2.
- the panel holding mechanism 32 includes a slide mechanism that slides each of the two panel holding portions 32 a individually. Further, in this case, since the two liquid crystal panels 2 can be simultaneously transported by the robots 11 and 12, the loading and unloading time of the liquid crystal panel 2 with respect to the inspection apparatus 3 can be further shortened.
- the processing device 3 is a lighting inspection device for inspecting the lighting of the liquid crystal panel 2, but the processing device 3 is a device for performing predetermined processing on the liquid crystal panel 2 other than the lighting inspection device Also good.
- the plurality of liquid crystal panels 2 accommodated in the tray may be arranged in the first panel arrangement portion 4.
- the discharge unit of the liquid crystal panel 2 of the apparatus for performing predetermined processing on the liquid crystal panel 2 may be the first panel placement unit 4.
- the second panel placement unit 5 may be a panel receiving unit of a device other than the polarizing plate sticking device 7. Further, a cassette or a tray in which the liquid crystal panel 2 is accommodated may be arranged in the second panel arrangement portion 5.
- the transport system 1 may not include the panel mounting stage 17.
- the display panel conveyed by the conveyance system 1 is the liquid crystal panel 2, but the display panel conveyed by the conveyance system 1 may be a display panel other than the liquid crystal panel 2.
- the display panel transported by the transport system 1 may be an organic EL panel.
- Transport system Liquid crystal panel (display panel) 3 Inspection device (lighting inspection device, processing device) 4 1st panel arrangement part 5 2nd panel arrangement part 6 cassette 11 robot (1st robot) 12 Robot (the second robot) 13 Temporary placement stage (the first temporary placement stage) 14 Temporary placement stage (second temporary placement stage) 15 storage tray 16 tray stage 17 panel mounting stage 30 joints 32 panel holding mechanism 52 dummy panel
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Abstract
A transport system 1 transports a display panel 2 between a processing device 3 for the display panel 2 and a panel arrangement unit 4 whereon the display panel 2 is arranged before processing and also transports the display panel 2 between the processing device 3 and a panel arrangement unit 5 whereon the display panel 2 is arranged after processing. Temporary placement stages 13, 14 whereon the display panel 2 is placed are disposed between a robot 11 and a robot 12. The robot 12 transports the display panel 2 from the panel arrangement unit 4 to the temporary placement stage 13 and transports the display panel 2 from the temporary placement stage 14 to the panel arrangement unit 5; the robot 11 transports the display panel 2 from the temporary placement stage 13 to the processing device 3 and transports the display panel 2 from the processing device 3 to the temporary placement stage 14.
Description
本発明は、液晶パネル等の表示パネルを搬送する搬送システムに関する。
The present invention relates to a transport system for transporting a display panel such as a liquid crystal panel.
従来、液晶パネルを点灯検査するための検査装置が知られている(たとえば、特許文献1参照)。特許文献1に記載の検査装置は、液晶ディスプレイの製造システムの途中に組み込まれている。この検査装置は、液晶パネルの点灯検査を行うプローバと、検査前の液晶パネルをプローバに向かって搬送する搬入側コンベヤと、搬入側コンベヤで搬送された液晶パネルをプローバに搬入する搬入機構と、検査後の液晶パネルをプローバから搬出する搬出機構と、搬出機構によって搬出された液晶パネルを搬送する搬出側コンベヤとを備えている。
Conventionally, an inspection apparatus for inspecting the lighting of a liquid crystal panel is known (see, for example, Patent Document 1). The inspection apparatus described in Patent Document 1 is incorporated in the middle of a liquid crystal display manufacturing system. This inspection apparatus includes a prober for inspecting the lighting of the liquid crystal panel, a carry-in side conveyor for carrying the liquid crystal panel before the test toward the prober, and a carry-in mechanism for carrying the liquid crystal panel carried by the carry-in conveyor into the prober. It has an unloading mechanism for unloading the liquid crystal panel after inspection from the prober, and an unloading conveyor for transporting the liquid crystal panel unloaded by the unloading mechanism.
特許文献1に記載の検査装置が組み込まれる製造システムでは、製造システムのタクトタイムを短縮するために、検査装置に対する液晶パネルの搬入搬出時間は短いことが好ましい。
In the manufacturing system in which the inspection device described in Patent Document 1 is incorporated, it is preferable that the loading and unloading time of the liquid crystal panel with respect to the inspection device be short in order to shorten the tact time of the manufacturing system.
そこで、本発明の課題は、表示パネルの処理を行う処理装置と、処理装置で処理される前の表示パネルが配置される第1パネル配置部との間で表示パネルを搬送するとともに、処理装置と、処理装置で処理された後の表示パネルが配置される第2パネル配置部との間で表示パネルを搬送する搬送システムにおいて、処理装置に対する表示パネルの搬入搬出時間を短縮することが可能な搬送システムを提供することにある。
Therefore, an object of the present invention is to transport the display panel between the processing device that processes the display panel and the first panel placement unit in which the display panel before being processed by the processing device is disposed, and In the transfer system for transferring the display panel between the second panel arranging unit in which the display panel after being processed by the processing apparatus is disposed, the loading and unloading time of the display panel with respect to the processing apparatus can be shortened. It is in providing a conveyance system.
上記の課題を解決するため、本発明の搬送システムは、表示パネルの処理を行う処理装置と、処理装置で処理される前の表示パネルが配置される第1パネル配置部との間で表示パネルを搬送するとともに、処理装置と、処理装置で処理された後の表示パネルが配置される第2パネル配置部との間で表示パネルを搬送する搬送システムであって、処理装置に対する表示パネルの搬送を行う第1ロボットと、第1パネル配置部からの表示パネルの搬出と第2パネル配置部への表示パネルの搬入とを行う第2ロボットと、第1ロボットと第2ロボットとの間に配置されるとともに表示パネルが載置される第1仮置きステージおよび第2仮置きステージとを備え、第2ロボットは、第1パネル配置部から第1仮置きステージへ処理装置で処理される前の表示パネルを搬送するとともに、第2仮置きステージから第2パネル配置部へ処理装置で処理された後の表示パネルを搬送し、第1ロボットは、第1仮置きステージから処理装置へ処理装置で処理される前の表示パネルを搬送するとともに、処理装置から第2仮置きステージへ処理装置で処理された後の表示パネルを搬送することを特徴とする。
In order to solve the above-described problems, the transport system of the present invention is characterized by the display panel between the processing device for processing the display panel and the first panel placement unit in which the display panel before being processed by the processing device is disposed. A transport system for transporting the display panel between the processing apparatus and the second panel arrangement unit in which the display panel after being processed by the processing apparatus is disposed, wherein the transport of the display panel relative to the processing apparatus is performed. Between the first robot and the second robot, and the second robot for carrying out the display panel from the first panel placement unit and carrying the display panel to the second panel placement unit. And the first temporary placement stage on which the display panel is placed, and the second robot is processed by the processing device from the first panel placement unit to the first temporary placement stage And transport the display panel after being processed by the processing apparatus from the second temporary placement stage to the second panel placement unit, the first robot processing the processing apparatus from the first temporary placement stage to the processing apparatus And conveying the display panel after being processed by the processing apparatus from the processing apparatus to the second temporary placement stage.
本発明の搬送システムは、第1ロボットおよび第2ロボットと、第1ロボットと第2ロボットとの間に配置される第1仮置きステージおよび第2仮置きステージとを備えている。また、本発明では、第2ロボットは、第1パネル配置部から第1仮置きステージへ表示パネルを搬送するとともに、第2仮置きステージから第2パネル配置部へ表示パネルを搬送し、第1ロボットは、第1仮置きステージから処理装置へ表示パネルを搬送するとともに、処理装置から第2仮置きステージへ表示パネルを搬送している。そのため、本発明では、第1パネル配置部から処理装置への表示パネルの搬送と処理装置から第2パネル配置部への表示パネルの搬送とを1台のロボットで行う場合と比較して、表示パネルを搬送する際の第1ロボットおよび第2ロボットのそれぞれの動作時間を短縮することが可能になる。
The transfer system of the present invention includes a first robot and a second robot, and a first temporary placement stage and a second temporary placement stage disposed between the first robot and the second robot. Further, in the present invention, the second robot transports the display panel from the first panel placement section to the first temporary placement stage, and transports the display panel from the second temporary placement stage to the second panel placement section, and The robot transports the display panel from the first temporary placement stage to the processing device, and transports the display panel from the processing device to the second temporary placement stage. Therefore, in the present invention, the display is compared with the case where the transfer of the display panel from the first panel arrangement unit to the processing apparatus and the transfer of the display panel from the processing apparatus to the second panel arrangement unit are performed by one robot. It becomes possible to shorten the operation time of each of the first robot and the second robot when transporting the panel.
また、本発明では、第2ロボットは、第1パネル配置部から第1仮置きステージへ表示パネルを搬送するとともに、第2仮置きステージから第2パネル配置部へ表示パネルを搬送し、第1ロボットは、第1仮置きステージから処理装置へ表示パネルを搬送するとともに、処理装置から第2仮置きステージへ表示パネルを搬送するため、2台のロボットが設置されていても、動作中の第1ロボットと動作中の第2ロボットとが干渉しにくくなる。したがって、本発明では、第1ロボットと第2ロボットとを同時に動作させる時間を長くすることが可能になる。
Further, in the present invention, the second robot transports the display panel from the first panel placement section to the first temporary placement stage, and transports the display panel from the second temporary placement stage to the second panel placement section, and While the robot transports the display panel from the first temporary placement stage to the processing apparatus, and transports the display panel from the processing apparatus to the second temporary placement stage, the second robot is operating even if two robots are installed. It becomes difficult for 1 robot and the 2nd robot in operation to interfere. Therefore, in the present invention, it is possible to extend the time for simultaneously operating the first robot and the second robot.
このように本発明では、第1パネル配置部から処理装置への表示パネルの搬送と処理装置から第2パネル配置部への表示パネルの搬送とを1台のロボットで行う場合と比較して、表示パネルを搬送する際の第1ロボットおよび第2ロボットのそれぞれの動作時間を短縮することが可能になるとともに、第1ロボットと第2ロボットとを同時に動作させる時間を長くすることが可能になる。したがって、本発明では、処理装置に対する表示パネルの搬入搬出時間を短縮することが可能になる。
As described above, in the present invention, as compared with the case where the transportation of the display panel from the first panel arrangement unit to the processing apparatus and the conveyance of the display panel from the processing apparatus to the second panel arrangement unit are performed by one robot While it becomes possible to shorten each operation time of the 1st robot and the 2nd robot at the time of conveying a display panel, it becomes possible to lengthen the time which makes the 1st robot and the 2nd robot operate simultaneously. . Therefore, in the present invention, it is possible to shorten the loading and unloading time of the display panel with respect to the processing apparatus.
本発明において、第1ロボットおよび第2ロボットの少なくともいずれか一方は、表示パネルを保持するパネル保持機構と、水平方向を回動の軸方向とするパネル保持機構の回動が可能となるようにパネル保持機構を保持する関節部とを備えることが好ましい。このように構成すると、第1パネル配置部から第1仮置きステージへ搬送される表示パネルを搬送中に上下反転させたり、第2仮置きステージから第2パネル配置部へ搬送される表示パネルを搬送中に上下反転させたり、第1仮置きステージから処理装置へ搬送される表示パネルを搬送中に上下反転させたり、処理装置から第2仮置きステージへ搬送される表示パネルを搬送中に上下反転させたりすることが可能になる。
In the present invention, at least one of the first robot and the second robot can rotate the panel holding mechanism for holding the display panel and the panel holding mechanism for setting the horizontal direction as the axial direction of rotation. It is preferable to provide the joint part holding the panel holding mechanism. According to this structure, the display panel conveyed from the first panel placement unit to the first temporary placement stage is turned upside down during conveyance, or the display panel conveyed from the second temporary placement stage to the second panel placement unit Flip up and down during transport, upside down during transport of the display panel transported from the first temporary placement stage to the processing device, up and down during transport of the display panel transported from the processing device to the second temporary placement stage It becomes possible to invert.
本発明において、処理装置は、たとえば、表示パネルを点灯検査する点灯検査装置である。
In the present invention, the processing device is, for example, a lighting inspection device which performs lighting inspection of the display panel.
本発明において、搬送システムは、点灯検査装置での点灯検査で異常と判断された表示パネルが収容される収容トレイと、収容トレイが載置されるトレイステージとを備え、第1ロボットは、点灯検査装置での点灯検査で正常と判断された表示パネルを点灯検査装置から第2仮置きステージへ搬送するとともに、点灯検査装置での点灯検査で異常と判断された表示パネルを点灯検査装置から収容トレイへ搬送することが好ましい。このように構成すると、点灯検査装置での点灯検査で正常と判断された表示パネルのみを第2パネル配置部へ搬送することが可能になる。
In the present invention, the transport system includes a storage tray in which the display panel determined to be abnormal in the lighting inspection by the lighting inspection apparatus is accommodated, and a tray stage on which the storage tray is placed, and the first robot is illuminated The display panel determined to be normal in the lighting inspection by the inspection device is transported from the lighting inspection device to the second temporary placement stage, and the display panel determined to be abnormal in the lighting inspection in the lighting inspection device is accommodated from the lighting inspection device It is preferable to transport to the tray. With this configuration, it is possible to transport only the display panel determined to be normal in the lighting inspection by the lighting inspection device to the second panel arrangement unit.
本発明において、搬送システムは、たとえば、表示パネルと同形状に形成されるダミーパネルが載置されるパネル載置ステージを備え、パネル載置ステージは、処理装置とパネル載置ステージとの間で第1ロボットによるダミーパネルの搬送が可能となる位置に配置され、第1パネル配置部には、カセットに収容された複数枚の表示パネルが配置され、点灯検査装置では、表示パネルが2枚ずつ点灯検査される。
In the present invention, the transfer system includes, for example, a panel mounting stage on which a dummy panel formed in the same shape as the display panel is mounted, and the panel mounting stage is between the processing apparatus and the panel mounting stage. A plurality of display panels housed in the cassette are arranged in the first panel arrangement portion, and the lighting inspection device has two display panels each in the first panel arrangement portion. Lights are inspected.
点灯検査装置で表示パネルが2枚ずつ点灯検査される場合、第1パネル配置部に配置されたカセットに収容される表示パネルの初期の枚数が奇数であると、カセットに収容された最後の1枚の表示パネルが第1仮置きステージを経由して点灯検査装置に搬送された後、カセットの入替が終わって、カセットに収容された最初の1枚の表示パネルが第1仮置きステージを経由して点灯検査装置に搬送されるまで点灯検査装置で点灯検査を行うことができなくなるおそれがあるが、ダミーパネルが載置されるパネル載置ステージを搬送システムが備えていれば、カセットに収容された最後の1枚の表示パネルが点灯検査装置に搬送された後、パネル載置ステージから点灯検査装置にダミーパネルを搬送することで、点灯検査装置でそのまま点灯検査を行うことが可能になる。
In the case where the display panel is subjected to lighting inspection by the lighting inspection device two by two, if the initial number of the display panels accommodated in the cassette disposed in the first panel arrangement portion is an odd number, the last one accommodated in the cassette After the display panels of one sheet are transported to the lighting inspection apparatus via the first temporary placement stage, the exchange of cassettes is finished, and the first display panel accommodated in the cassette passes the first temporary placement stage There is a risk that it will not be possible to conduct a lighting inspection with the lighting inspection device until it is transported to the lighting inspection device, but if the transport system has a panel placement stage on which the dummy panel is placed, it will be accommodated in the cassette After the last one display panel is transported to the lighting inspection device, the dummy panel is transported from the panel mounting stage to the lighting inspection device, so that the lighting inspection device is lit as it is It is possible to perform 査.
以上のように、本発明では、表示パネルの処理を行う処理装置と、処理装置で処理される前の表示パネルが配置される第1パネル配置部との間で表示パネルを搬送するとともに、処理装置と、処理装置で処理された後の表示パネルが配置される第2パネル配置部との間で表示パネルを搬送する搬送システムにおいて、処理装置に対する表示パネルの搬入搬出時間を短縮することが可能になる。
As described above, in the present invention, the display panel is transported between the processing device that processes the display panel and the first panel placement unit in which the display panel before being processed by the processing device is disposed, and the processing is performed In a transfer system for transferring a display panel between a device and a second panel arrangement unit in which the display panel after being processed by the processing device is disposed, it is possible to shorten the loading and unloading time of the display panel to and from the processing device become.
以下、図面を参照しながら、本発明の実施の形態を説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(搬送システムの構成)
図1は、本発明の実施の形態にかかる搬送システム1の側面図である。図2は、図1に示す搬送システム1の構成を説明するための平面図である。 (Configuration of transfer system)
FIG. 1 is a side view of a transfer system 1 according to an embodiment of the present invention. FIG. 2 is a plan view for explaining the configuration of the transfer system 1 shown in FIG.
図1は、本発明の実施の形態にかかる搬送システム1の側面図である。図2は、図1に示す搬送システム1の構成を説明するための平面図である。 (Configuration of transfer system)
FIG. 1 is a side view of a transfer system 1 according to an embodiment of the present invention. FIG. 2 is a plan view for explaining the configuration of the transfer system 1 shown in FIG.
本形態の搬送システム1は、携帯機器等で使用される比較的小型の液晶ディスプレイの製造ラインに組み込まれて使用される。この搬送システム1は、表示パネルである液晶パネル2を搬送する。具体的には、搬送システム1は、液晶パネル2の処理を行う処理装置3と、処理装置3で処理される前の液晶パネル2が配置される第1パネル配置部4との間で液晶パネル2を搬送するとともに、処理装置3と、処理装置3で処理された後の液晶パネル2が配置される第2パネル配置部5との間で液晶パネル2を搬送する。液晶パネル2は、長方形の平板状に形成されている。
The transport system 1 of the present embodiment is used by being incorporated into a manufacturing line of a relatively small liquid crystal display used in a portable device or the like. The transport system 1 transports a liquid crystal panel 2 which is a display panel. Specifically, the transport system 1 includes the liquid crystal panel between the processing device 3 that processes the liquid crystal panel 2 and the first panel placement unit 4 in which the liquid crystal panel 2 before being processed by the processing device 3 is disposed. 2 is conveyed, and the liquid crystal panel 2 is conveyed between the processing device 3 and the second panel arranging portion 5 in which the liquid crystal panel 2 after being processed by the processing device 3 is disposed. The liquid crystal panel 2 is formed in a rectangular flat plate shape.
以下の説明では、上下方向(鉛直方向)に直交する左右方向の一方側である図2等のX1方向側を「右」側とし、その反対側である図2等のX2方向側を「左」側とし、上下方向と左右方向とに直交する前後方向の一方側である図2等のY1方向側を「前」側とし、その反対側である図2等のY2方向側を「後ろ」側とする。
In the following description, the X1 direction side of FIG. 2 etc., which is one side in the left-right direction orthogonal to the vertical direction (vertical direction), is the “right” side, and the X2 direction side of FIG. The Y1 direction side of FIG. 2 etc., which is one side in the front-rear direction perpendicular to the vertical direction and the left and right direction, is the “front” side, and the Y2 direction side of FIG. To the side.
本形態の処理装置3は、液晶パネル2を点灯検査する点灯検査装置である。したがって、以下では、処理装置3を「検査装置3」とする。また、本形態の第2パネル配置部5は、液晶パネル2に偏光板を貼り付ける偏光板貼付装置7の一部を構成するパネル受入部である。このパネル受入部は、検査装置3で点灯検査が終わった後の液晶パネル2であって偏光板が貼り付けられる前の液晶パネル2を受け入れる。以下では、第2パネル配置部5を「パネル受入部5」とする。
The processing device 3 of the present embodiment is a lighting inspection device that performs lighting inspection of the liquid crystal panel 2. Therefore, hereinafter, the processing device 3 is referred to as the “inspection device 3”. In addition, the second panel placement portion 5 of the present embodiment is a panel receiving portion that constitutes a part of the polarizing plate sticking device 7 that sticks the polarizing plate to the liquid crystal panel 2. The panel receiving unit is the liquid crystal panel 2 after the lighting inspection by the inspection device 3 is received, and the liquid crystal panel 2 before the polarizing plate is attached is received. Hereinafter, the second panel arrangement unit 5 will be referred to as "panel receiving unit 5".
また、本形態では、カセット6に収容された複数枚の液晶パネル2が第1パネル配置部4に配置されている。カセット6の中では、液晶パネル2は、液晶パネル2の厚さ方向と上下方向とが略一致するように配置されている。また、カセット6の中では、左右方向に所定の間隔をあけた状態で複数枚の液晶パネル2が配列されるとともに、左右方向に配列される複数枚の液晶パネル2が上下方向に所定の間隔をあけた状態で上下方向で重なるように配置されている。
Further, in the present embodiment, the plurality of liquid crystal panels 2 accommodated in the cassette 6 are arranged in the first panel arrangement portion 4. In the cassette 6, the liquid crystal panel 2 is disposed so that the thickness direction of the liquid crystal panel 2 and the vertical direction substantially coincide with each other. Further, in the cassette 6, the plurality of liquid crystal panels 2 are arrayed in the state of leaving a predetermined interval in the left and right direction, and the plurality of liquid crystal panels 2 aligned in the left and right direction is the predetermined interval in the vertical direction It is arranged to overlap in the up and down direction with open.
搬送システム1は、検査装置3に対する液晶パネル2の搬送を行うロボット11と、第1パネル配置部4からの液晶パネル2の搬出(すなわち、カセット6からの液晶パネル2の搬出)とパネル受入部5への液晶パネル2の搬入とを行うロボット12と、ロボット11とロボット12との間に配置されるとともに液晶パネル2が載置される2個の仮置きステージ13、14とを備えている。本形態のロボット11は第1ロボットであり、ロボット12は第2ロボットであり、仮置きステージ13は第1仮置きステージであり、仮置きステージ14は第2仮置きステージである。
The transport system 1 includes a robot 11 for transporting the liquid crystal panel 2 to the inspection device 3, unloading of the liquid crystal panel 2 from the first panel placement unit 4 (that is, unloading of the liquid crystal panel 2 from the cassette 6) and a panel receiving unit A robot 12 for carrying in the liquid crystal panel 2 to 5 and two temporary placement stages 13 and 14 disposed between the robot 11 and the robot 12 and on which the liquid crystal panel 2 is mounted . The robot 11 of this embodiment is a first robot, the robot 12 is a second robot, the temporary placement stage 13 is a first temporary placement stage, and the temporary placement stage 14 is a second temporary placement stage.
また、搬送システム1は、検査装置3での点灯検査で異常(不良)と判断された液晶パネル2が収容される収容トレイ15と、収容トレイ15が載置されるトレイステージ16とを備えている。さらに、搬送システム1は、液晶パネル2と同形状のダミーパネル52が載置されるパネル載置ステージ17を備えている。
Further, the transport system 1 includes a storage tray 15 in which the liquid crystal panel 2 determined to be abnormal (defective) in the lighting inspection in the inspection device 3 is stored, and a tray stage 16 in which the storage tray 15 is mounted. There is. Furthermore, the transport system 1 includes a panel mounting stage 17 on which the dummy panel 52 having the same shape as the liquid crystal panel 2 is mounted.
ロボット11とロボット12とは、左右方向に間隔をあけた状態で配置されている。本形態では、ロボット11が右側に配置され、ロボット12が左側に配置されている。ロボット11とロボット12とは、前後方向において同じ位置に配置されている。仮置きステージ13と仮置きステージ14とは前後方向で隣接するように配置されている。本形態では、仮置きステージ13が前側に配置され、仮置きステージ14が後ろ側に配置されている。また、仮置きステージ13、14は、左右方向においてロボット11とロボット12との間に配置されている。前後方向において、仮置きステージ14の前端部は、ロボット11、12の中心と略同じ位置に配置されている。
The robot 11 and the robot 12 are disposed in the state of being spaced apart in the left-right direction. In the present embodiment, the robot 11 is disposed on the right side, and the robot 12 is disposed on the left side. The robot 11 and the robot 12 are disposed at the same position in the front-rear direction. The temporary placement stage 13 and the temporary placement stage 14 are disposed adjacent to each other in the front-rear direction. In this embodiment, the temporary placement stage 13 is disposed on the front side, and the temporary placement stage 14 is disposed on the rear side. The temporary placement stages 13 and 14 are disposed between the robot 11 and the robot 12 in the left-right direction. In the front-rear direction, the front end portion of the temporary placement stage 14 is disposed at substantially the same position as the centers of the robots 11 and 12.
収容トレイ15およびトレイステージ16は、ロボット11の右斜め前側に配置されている。パネル載置ステージ17は、仮置きステージ14の右側に配置されている。パネル載置ステージ17は、仮置きステージ14に隣接している。また、パネル載置ステージ17は、ロボット11よりも左側に配置されている。検査装置3は、ロボット11の後ろ側に配置されている。第1パネル配置部4およびカセット6は、ロボット12の前側に配置されており、検査装置3よりも左側に配置されている。パネル受入部5は、ロボット12の左斜め後ろ側に配置されており、検査装置3よりも左側に配置されている。すなわち、第1パネル配置部4およびパネル受入部5は、検査装置3よりも左側に配置されている。また、カセット6は、仮置きステージ13よりも前側に配置され、検査装置3およびパネル受入部5は、仮置きステージ14よりも後ろ側に配置されている。
The storage tray 15 and the tray stage 16 are disposed on the right front side of the robot 11. The panel mounting stage 17 is disposed on the right side of the temporary placement stage 14. The panel mounting stage 17 is adjacent to the temporary placement stage 14. Further, the panel mounting stage 17 is disposed on the left side of the robot 11. The inspection device 3 is disposed behind the robot 11. The first panel placement unit 4 and the cassette 6 are disposed on the front side of the robot 12 and are disposed on the left side of the inspection device 3. The panel receiving unit 5 is disposed on the left rear side of the robot 12 and on the left side of the inspection device 3. That is, the first panel placement unit 4 and the panel reception unit 5 are disposed on the left side of the inspection device 3. The cassette 6 is disposed on the front side of the temporary placement stage 13, and the inspection device 3 and the panel receiving unit 5 are disposed on the rear side of the temporary placement stage 14.
検査装置3では、液晶パネル2が2枚ずつ点灯検査される。検査装置3は、たとえば、2枚の液晶パネル2が載置されるパネル載置部20を2箇所に有するパネル保持部と、上下方向を回転の軸方向としてパネル保持部を回転させる回転機構と、液晶パネル2の点灯検査時に内部が暗室となる筐体とを備えている。筐体の内部には、液晶パネル2の点灯検査を行うためのバックライトやカメラが設置されている。回転機構は、2個のパネル載置部20のうちの一方のパネル載置部20が筐体の外部に配置されるとともに他方のパネル載置部20が筐体の内部に配置される位置と、一方のパネル載置部20が筐体の内部に配置されるとともに他方のパネル載置部20が筐体の外部に配置される位置との間でパネル保持部を回転させる。
In the inspection apparatus 3, the liquid crystal panel 2 is inspected for lighting two by two. The inspection apparatus 3 has, for example, a panel holding unit having a panel mounting unit 20 at two positions on which two liquid crystal panels 2 are mounted, a rotation mechanism for rotating the panel holding unit with the vertical direction as an axial direction of rotation. And a case whose inside is a dark room at the time of the lighting inspection of the liquid crystal panel 2. A backlight and a camera for inspecting the lighting of the liquid crystal panel 2 are installed inside the housing. The rotation mechanism has a position where one of the two panel mounting portions 20 is disposed outside the housing and the other panel mounting portion 20 is disposed inside the housing. The panel holding unit is rotated between the position where one panel placement unit 20 is disposed inside the casing and the other panel placement unit 20 is disposed outside the casing.
パネル受入部5は、たとえば、1枚の液晶パネル2が載置されるパネル載置部21を備えている。第1パネル配置部4は、カセット6を保持するカセット保持部を備えている。このカセット保持部は、左右方向を回動の軸方向としてかつカセット保持部の下端部を回動中心にして回動可能となっている。カセット保持部には、作業員が手作業でカセット6をセットする。本形態では、たとえば、上側に向かうにしたがって前側に向かうように傾斜している状態のカセット保持部に、斜め前上側からカセット6をセットした後、カセット6に収容される液晶パネル2の厚さ方向と上下方向とが略一致する位置までカセット保持部を回動させてから、カセット保持部を固定する。
The panel receiving unit 5 includes, for example, a panel placement unit 21 on which one liquid crystal panel 2 is placed. The first panel placement unit 4 includes a cassette holding unit that holds the cassette 6. The cassette holding portion is rotatable with the left and right direction as an axial direction of rotation and the lower end of the cassette holding portion as a rotation center. The operator manually sets the cassette 6 in the cassette holding unit. In this embodiment, for example, the thickness of the liquid crystal panel 2 accommodated in the cassette 6 after the cassette 6 is set from the diagonally front upper side in the cassette holding portion in a state of being inclined forward toward the upper side. After rotating the cassette holding portion to a position where the direction and the vertical direction substantially coincide with each other, the cassette holding portion is fixed.
ロボット11は、6軸の垂直多関節ロボットである。ロボット11は、ロボット11の下端部を構成する支持部材23と、支持部材23に相対回動可能に連結される関節部24と、関節部24と相対回動可能に連結される関節部25と、関節部25に基端が固定される直線状のアーム26と、アーム26の先端に固定される関節部27と、関節部27に相対回動可能に連結される関節部28と、関節部28に基端が相対回動可能に連結される直線状のアーム29と、アーム29の先端が固定される関節部30と、関節部30に相対可動可能に連結される関節部31と、関節部31に回動可能に連結されるとともに液晶パネル2を保持するパネル保持機構32とを備えている。
The robot 11 is a six-axis vertical articulated robot. The robot 11 includes a support member 23 constituting a lower end portion of the robot 11, a joint unit 24 rotatably connected to the support member 23, and a joint unit 25 rotatably connected to the joint unit 24. A straight arm 26 whose base end is fixed to the joint 25, a joint 27 fixed to the tip of the arm 26, a joint 28 relatively rotatably connected to the joint 27, and a joint 28, a straight arm 29 whose proximal end is relatively rotatably coupled, a joint 30 to which the tip of the arm 29 is fixed, a joint 31 relatively movably connected to the joint 30, and a joint A panel holding mechanism 32 rotatably connected to the portion 31 and holding the liquid crystal panel 2 is provided.
関節部24は、上下方向を回動の軸方向とする回動が可能になるように支持部材23に連結されている。関節部25は、水平方向を回動の軸方向とする回動が可能となるように関節部24に連結されている。関節部28は、水平方向を回動の軸方向とする回動が可能となるように関節部27に連結されている。関節部31は、水平方向を回動の軸方向とする回動が可能となるように関節部30に連結されている。関節部24に対する関節部25の回動の軸方向および関節部27に対する関節部28の回動の軸方向と、アーム26の長手方向とは直交している。
The joint portion 24 is connected to the support member 23 so as to be able to rotate with the vertical direction as an axial direction of rotation. The joint portion 25 is connected to the joint portion 24 so as to be able to rotate with the horizontal direction as the axial direction of rotation. The joint portion 28 is connected to the joint portion 27 so as to be able to rotate with the horizontal direction as the axial direction of rotation. The joint portion 31 is connected to the joint portion 30 so as to be able to rotate with the horizontal direction as the axial direction of rotation. The axial direction of rotation of the joint 25 relative to the joint 24 and the axial direction of rotation of the joint 28 relative to the joint 27 are orthogonal to the longitudinal direction of the arm 26.
関節部27に対する関節部28の回動の軸方向および関節部30に対する関節部31の回動の軸方向と、アーム29の長手方向とは直交している。また、関節部27に対する関節部28の回動の軸方向と、関節部28に対するアーム29の回動の軸方向とは直交している。関節部30に対する関節部31の回動の軸方向と、関節部31に対するパネル保持機構32の回動の軸方向とは直交している。上述のように、関節部31は、水平方向を回動の軸方向とする回動が可能となるように関節部30に連結されている。すなわち、関節部30は、水平方向を回動の軸方向とするパネル保持機構32の回動が可能となるように関節部31を介してパネル保持機構32を保持している。
The axial direction of rotation of the joint 28 with respect to the joint 27 and the axial direction of rotation of the joint 31 with respect to the joint 30 are orthogonal to the longitudinal direction of the arm 29. Further, the axial direction of rotation of the joint 28 with respect to the joint 27 and the axial direction of rotation of the arm 29 with respect to the joint 28 are orthogonal to each other. The axial direction of rotation of the joint 31 with respect to the joint 30 and the axial direction of rotation of the panel holding mechanism 32 with respect to the joint 31 are orthogonal to each other. As described above, the joint portion 31 is connected to the joint portion 30 so as to be able to rotate with the horizontal direction as the axial direction of rotation. That is, the joint unit 30 holds the panel holding mechanism 32 via the joint unit 31 so that the panel holding mechanism 32 can be pivoted so that the horizontal direction is the axial direction of pivoting.
関節部24、25、27、28、30、31は、モータとモータの動力を減速して伝達する減速機とを備えている。関節部24は、関節部24のモータの動力で支持部材23に対して回動する。関節部25は、関節部25のモータの動力で関節部24に対して回動する。関節部28は、関節部27のモータの動力で関節部27に対して回動する。アーム29は、関節部28のモータの動力で関節部28に対して回動する。関節部31は、関節部30のモータの動力で関節部30に対して回動する。パネル保持機構32は、関節部31のモータの動力で関節部31に対して回動する。
The joints 24, 25, 27, 28, 30, 31 each include a motor and a reduction gear that transmits the power of the motor at a reduced speed. The joint unit 24 is rotated relative to the support member 23 by the power of the motor of the joint unit 24. The joint 25 is rotated relative to the joint 24 by the power of the motor of the joint 25. The joint unit 28 is rotated relative to the joint unit 27 by the power of the motor of the joint unit 27. The arm 29 rotates with respect to the joint 28 by the power of the motor of the joint 28. The joint 31 rotates with respect to the joint 30 by the power of the motor of the joint 30. The panel holding mechanism 32 is rotated relative to the joint 31 by the power of the motor of the joint 31.
パネル保持機構32は、液晶パネル2を吸引して保持するパネル保持部32aを備えている。パネル保持部32aは、正方形の平板状に形成されており、1枚の液晶パネル2を保持する。パネル保持部32aには、複数の吸引穴が形成されている。複数の吸引穴には、所定の配管を介して真空ポンプ等の空気の吸引機構が接続されている。また、ロボット12は、ロボット11と同様に構成された6軸の垂直多関節ロボットであり、関節部24、25、27、28、30、31と、アーム26、29と、パネル保持機構32とを備えている。ただし、ロボット12のパネル保持機構32のパネル保持部32aは、細長い長方形の平板状に形成されている。
The panel holding mechanism 32 includes a panel holding portion 32 a that sucks and holds the liquid crystal panel 2. The panel holding portion 32 a is formed in a square flat plate shape, and holds one liquid crystal panel 2. A plurality of suction holes are formed in the panel holding portion 32a. An air suction mechanism such as a vacuum pump is connected to the plurality of suction holes via a predetermined pipe. The robot 12 is a six-axis vertical articulated robot configured similarly to the robot 11, and includes joints 24, 25, 27, 28, 30 and 31, arms 26 and 29, and a panel holding mechanism 32. Is equipped. However, the panel holding portion 32 a of the panel holding mechanism 32 of the robot 12 is formed in a long and thin rectangular plate shape.
仮置きステージ13、14は、略長方形の平板状に形成されている。仮置きステージ13、14の上面は、上下方向に直交する平面となっている。仮置きステージ13には、2枚の液晶パネル2が載置可能になっている。具体的には、仮置きステージ13には、2枚の液晶パネル2を前後方向に所定の間隔をあけた状態で載置することが可能になっている。同様に、仮置きステージ14には、2枚の液晶パネル2を前後方向に所定の間隔をあけた状態で載置することが可能になっている。
The temporary placement stages 13 and 14 are formed in a substantially rectangular flat plate shape. The upper surfaces of the temporary placement stages 13 and 14 are planes orthogonal to the vertical direction. Two liquid crystal panels 2 can be placed on the temporary placement stage 13. Specifically, it is possible to place two liquid crystal panels 2 on the temporary placement stage 13 with a predetermined interval in the front-rear direction. Similarly, it is possible to place two liquid crystal panels 2 on the temporary placement stage 14 with a predetermined interval in the front-rear direction.
仮置きステージ13には、ロボット12のパネル保持部32aが上下方向に通過する切欠き部13aが形成されている。切欠き部13aは、仮置きステージ13の左端から右側に向かって形成されている。また、切欠き部13aは、上下方向で仮置きステージ13を貫通している。切欠き部13aは、2箇所に形成されている。具体的には、切欠き部13aは、液晶パネル2の載置位置に対応する2箇所に形成されている。仮置きステージ14にも、ロボット12のパネル保持部32aが上下方向に通過する切欠き部14aが形成されている。切欠き部14aは、切欠き部13aと同様に形成されている。
The temporary placement stage 13 is formed with a notch 13a through which the panel holding portion 32a of the robot 12 passes in the vertical direction. The notch 13 a is formed from the left end of the temporary placement stage 13 toward the right. In addition, the notch 13a passes through the temporary placement stage 13 in the vertical direction. The notch 13a is formed in two places. Specifically, the notches 13 a are formed at two locations corresponding to the mounting position of the liquid crystal panel 2. The temporary placement stage 14 is also formed with a notch 14a through which the panel holding portion 32a of the robot 12 passes in the vertical direction. The notch 14a is formed in the same manner as the notch 13a.
収容トレイ15には、複数枚の液晶パネル2が収容可能となっている。トレイステージ16は、略長方形の平板状に形成されている。トレイステージ16の上面は、上下方向に直交する平面となっている。収容トレイ15に規定の数の液晶パネル2が収容されると、たとえば、作業員が、液晶パネル2が収容された収容トレイ15と空の収容トレイ15とを手作業で交換する。
A plurality of liquid crystal panels 2 can be accommodated in the accommodation tray 15. The tray stage 16 is formed in a substantially rectangular flat plate shape. The upper surface of the tray stage 16 is a plane orthogonal to the vertical direction. When the predetermined number of liquid crystal panels 2 are accommodated in the accommodation tray 15, for example, a worker manually exchanges the accommodation tray 15 in which the liquid crystal panels 2 are accommodated with the empty accommodation tray 15.
パネル載置ステージ17は、略長方形の平板状に形成されている。パネル載置ステージ17の上面は、上下方向に直交する平面となっている。パネル載置ステージ17には、2枚のダミーパネル52が載置されている。具体的には、パネル載置ステージ17には、2枚のダミーパネル52が前後方向に所定の間隔をあけた状態で載置されている。パネル載置ステージ17は、検査装置3とパネル載置ステージ17との間(具体的には、パネル載置部20とパネル載置ステージ17との間)でロボット11によるダミーパネル52の搬送が可能となる位置に配置されている。
The panel mounting stage 17 is formed in a substantially rectangular flat plate shape. The upper surface of the panel mounting stage 17 is a plane orthogonal to the vertical direction. Two dummy panels 52 are mounted on the panel mounting stage 17. Specifically, two dummy panels 52 are mounted on the panel mounting stage 17 with a predetermined interval in the front-rear direction. The panel mounting stage 17 conveys the dummy panel 52 by the robot 11 between the inspection device 3 and the panel mounting stage 17 (specifically, between the panel mounting unit 20 and the panel mounting stage 17). It is placed in a possible position.
パネル載置ステージ17には、切欠き部17aが形成されている。切欠き部17aは、パネル載置ステージ17の右端から左側に向かって形成されている。また、切欠き部17aは、上下方向でパネル載置ステージ17を貫通している。切欠き部17aは、ダミーパネル52の載置位置に対応する2箇所に形成されている。
The panel mounting stage 17 is formed with a notch 17 a. The notch portion 17 a is formed from the right end of the panel mounting stage 17 toward the left side. The notch 17a penetrates the panel mounting stage 17 in the vertical direction. The notches 17 a are formed at two locations corresponding to the mounting position of the dummy panel 52.
(搬送システムでの液晶パネルの搬送動作)
図3、図4は、図1に示す搬送システム1での液晶パネル2の搬送動作の一例を説明するための図である。図6は、図1に示すロボット11の動作の一例を説明するためのフローチャートである。図7は、図1に示すロボット12の動作の一例を説明するためのフローチャートである。 (Conveyance operation of the liquid crystal panel in the conveyance system)
3 and 4 are diagrams for explaining an example of the transport operation of theliquid crystal panel 2 in the transport system 1 shown in FIG. FIG. 6 is a flowchart for explaining an example of the operation of the robot 11 shown in FIG. FIG. 7 is a flowchart for explaining an example of the operation of the robot 12 shown in FIG.
図3、図4は、図1に示す搬送システム1での液晶パネル2の搬送動作の一例を説明するための図である。図6は、図1に示すロボット11の動作の一例を説明するためのフローチャートである。図7は、図1に示すロボット12の動作の一例を説明するためのフローチャートである。 (Conveyance operation of the liquid crystal panel in the conveyance system)
3 and 4 are diagrams for explaining an example of the transport operation of the
ロボット11は、仮置きステージ13から検査装置3へ検査装置3で処理される前の液晶パネル2(すなわち、点灯検査される前の液晶パネル2)を搬送する。また、ロボット11は、検査装置3から仮置きステージ14へ検査装置3で処理された後の液晶パネル2(すなわち、点灯検査された後の液晶パネル2)を搬送する。より具体的には、ロボット11は、検査装置3での点灯検査で正常と判断された液晶パネル2を検査装置3から仮置きステージ14へ搬送するとともに、検査装置3での点灯検査で異常と判断された液晶パネル2を検査装置3から収容トレイ15へ搬送する。また、ロボット12は、第1パネル配置部4から(すなわち、カセット6から)仮置きステージ13へ検査装置3で点灯検査される前の液晶パネル2を搬送するとともに、仮置きステージ14からパネル受入部5へ検査装置3で点灯検査された後の液晶パネル2を搬送する。
The robot 11 transports the liquid crystal panel 2 before being processed by the inspection apparatus 3 from the temporary placement stage 13 to the inspection apparatus 3 (that is, the liquid crystal panel 2 before being subjected to the lighting inspection). In addition, the robot 11 conveys the liquid crystal panel 2 (that is, the liquid crystal panel 2 after being subjected to the lighting inspection) after being processed by the inspection device 3 from the inspection device 3 to the temporary placement stage 14. More specifically, the robot 11 transports the liquid crystal panel 2 determined to be normal in the lighting inspection in the inspection device 3 from the inspection device 3 to the temporary placement stage 14, and causes the lighting inspection in the inspection device 3 to be abnormal. The determined liquid crystal panel 2 is transported from the inspection device 3 to the storage tray 15. Further, the robot 12 conveys the liquid crystal panel 2 before being subjected to the lighting inspection by the inspection device 3 from the first panel placement unit 4 (that is, from the cassette 6) to the temporary placement stage 13, and receives the panel from the temporary placement stage 14 The liquid crystal panel 2 after being subjected to the lighting inspection by the inspection device 3 is transported to the unit 5.
なお、本形態では、仮置きステージ13、14と検査装置3との間で液晶パネル2を搬送するロボット11のパネル保持部32aは、検査装置3のすぐ手前側の待機位置P1および仮置きステージ13、14のすぐ右側の待機位置P2で一時停止することがある。また、カセット6から仮置きステージ13に液晶パネル2を搬送するとともに仮置きステージ14からパネル受入部5に液晶パネル2を搬送するロボット12のパネル保持部32aは、カセット6のすぐ後ろ側の待機位置P3および仮置きステージ13、14のすぐ左側の待機位置P4で一時停止することがある。
In the present embodiment, the panel holding portion 32a of the robot 11 that transports the liquid crystal panel 2 between the temporary placement stages 13 and 14 and the inspection device 3 has a standby position P1 immediately before the inspection device 3 and the temporary placement stage. There may be a pause at a standby position P2 immediately to the right of 13, 14. Further, the panel holding portion 32 a of the robot 12 which transports the liquid crystal panel 2 from the cassette 6 to the temporary placement stage 13 and transports the liquid crystal panel 2 from the temporary placement stage 14 to the panel receiving unit 5 is a standby state immediately behind the cassette 6. It may pause at the standby position P4 immediately to the left of the position P3 and the temporary placement stages 13 and 14.
たとえば、検査装置3の筺体の外部に配置されたパネル載置部20に載置される点灯検査後の正常な2枚の液晶パネル2(以下、この2枚の液晶パネル2を「液晶パネル2A」、「液晶パネル2B」とする)をパネル受入部5のパネル載置部21へ搬送するとともに、カセット6に収容された点灯検査前の2枚の液晶パネル2(以下、この2枚の液晶パネル2を「液晶パネル2C」、「液晶パネル2D」とする)を検査装置3の筺体の外部に配置されたパネル載置部20に搬送するときに、ロボット11、12は、以下のように動作して液晶パネル2を搬送する。
For example, two normal liquid crystal panels 2 (hereinafter, the two liquid crystal panels 2 after the lighting inspection) mounted on the panel mounting portion 20 disposed outside the housing of the inspection device 3 (hereinafter referred to as “liquid crystal panel 2A , And “the liquid crystal panel 2B” is transported to the panel mounting portion 21 of the panel receiving portion 5 and the two liquid crystal panels 2 (hereinafter, the two liquid When the panel 2 is transported to the panel placement unit 20 disposed outside the housing of the inspection apparatus 3 as “liquid crystal panel 2 C” and “liquid crystal panel 2 D”, the robots 11 and 12 are as follows: It operates to transport the liquid crystal panel 2.
すなわち、図3、図5に示すように、まず、待機位置P1に配置されるロボット11のパネル保持部32aは、矢印R1で示すように検査装置3のパネル載置部20に移動して、液晶パネル2Aを保持する(ステップS1)。ステップS1では、ロボット11のパネル保持部32aは、液晶パネル2Aの上面を吸引して保持する。その後、ロボット11のパネル保持部32aは、矢印R2で示すように待機位置P1に戻る(ステップS2)。その後、ロボット11のパネル保持部32aは、矢印R3で示すように待機位置P2へ移動する(ステップS3)。
That is, as shown in FIGS. 3 and 5, first, the panel holding unit 32a of the robot 11 disposed at the standby position P1 moves to the panel placement unit 20 of the inspection device 3 as indicated by the arrow R1. The liquid crystal panel 2A is held (step S1). In step S1, the panel holding unit 32a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2A. Thereafter, the panel holding unit 32a of the robot 11 returns to the standby position P1 as indicated by the arrow R2 (step S2). Thereafter, the panel holding unit 32a of the robot 11 moves to the standby position P2 as indicated by the arrow R3 (step S3).
その後、ロボット11のパネル保持部32aは、矢印R4で示すように仮置きステージ14に移動して、保持している液晶パネル2Aを仮置きステージ14に載置する(ステップS4)。ステップS4では、ロボット11のパネル保持部32aは、たとえば、仮置きステージ14の前側部分に液晶パネル2Aを載置する。その後、ロボット11のパネル保持部32aは、矢印R5で示すように待機位置P2へ戻る(ステップS5)。
Thereafter, the panel holding unit 32a of the robot 11 moves to the temporary placement stage 14 as indicated by the arrow R4, and places the held liquid crystal panel 2A on the temporary placement stage 14 (step S4). In step S4, the panel holding unit 32a of the robot 11 mounts the liquid crystal panel 2A on the front side portion of the temporary placement stage 14, for example. Thereafter, the panel holding unit 32a of the robot 11 returns to the standby position P2 as indicated by the arrow R5 (step S5).
また、図3、図6に示すように、待機位置P3に配置されるロボット12のパネル保持部32aは、矢印L1で示すようにカセット6に移動して、液晶パネル2Cを保持する(ステップS51)。ステップS51では、ロボット12のパネル保持部32aは、液晶パネル2Cの下面を吸引して保持する。その後、ロボット12のパネル保持部32aは、矢印L2で示すように待機位置P3に戻る(ステップS52)。その後、ロボット12のパネル保持部32aは、矢印L3で示すように待機位置P4へ移動する(ステップS53)。
Further, as shown in FIGS. 3 and 6, the panel holding portion 32a of the robot 12 disposed at the standby position P3 moves to the cassette 6 as indicated by the arrow L1 and holds the liquid crystal panel 2C (step S51). ). In step S51, the panel holding unit 32a of the robot 12 sucks and holds the lower surface of the liquid crystal panel 2C. Thereafter, the panel holding unit 32a of the robot 12 returns to the standby position P3 as indicated by the arrow L2 (step S52). Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P4 as indicated by the arrow L3 (step S53).
その後、ロボット12のパネル保持部32aは、矢印L4で示すように仮置きステージ13に移動して、保持している液晶パネル2Cを仮置きステージ13に載置する(ステップS54)。ステップS54では、ロボット12のパネル保持部32aは、たとえば、仮置きステージ13の前側部分に液晶パネル2Cを載置する。また、ステップS54で仮置きステージ13に液晶パネル2Cを載置する際には、ロボット12のパネル保持部32aは、切欠き部13aを通過する。その後、ロボット12のパネル保持部32aは、矢印L5で示すように仮置きステージ14に移動する(ステップS55)。ステップS51~S55は、ステップS1~S5と同時に行われる。
Thereafter, the panel holding unit 32a of the robot 12 moves to the temporary placement stage 13 as indicated by the arrow L4, and places the held liquid crystal panel 2C on the temporary placement stage 13 (step S54). In step S54, the panel holding unit 32a of the robot 12 places the liquid crystal panel 2C on the front side portion of the temporary placement stage 13, for example. Further, when mounting the liquid crystal panel 2C on the temporary placement stage 13 in step S54, the panel holding portion 32a of the robot 12 passes through the notch 13a. Thereafter, the panel holding unit 32a of the robot 12 moves to the temporary placement stage 14 as indicated by the arrow L5 (step S55). Steps S51 to S55 are performed simultaneously with steps S1 to S5.
また、ステップS5の後、ロボット11のパネル保持部32aは、矢印R6で示すように仮置きステージ13に移動して、液晶パネル2Cを保持する(ステップS6)。ステップS6では、ロボット11のパネル保持部32aは、液晶パネル2Cの上面を吸引して保持する。その後、ロボット11のパネル保持部32aは、矢印R7で示すように待機位置P1へ移動する(ステップS7)。その後、図4に示すように、ロボット11のパネル保持部32aは、矢印R11で示すように検査装置3のパネル載置部20に移動して、液晶パネル2Aが載置されていた箇所に、保持している液晶パネル2Cを載置する(ステップS8)。その後、ロボット11のパネル保持部32aは、矢印R12、R13で示すように、液晶パネル2Bを保持して(ステップS9)、待機位置P1へ戻る(ステップS10)。ステップS9では、ロボット11のパネル保持部32aは、液晶パネル2Bの上面を吸引して保持する。
Also, after step S5, the panel holding unit 32a of the robot 11 moves to the temporary placement stage 13 as indicated by the arrow R6, and holds the liquid crystal panel 2C (step S6). In step S6, the panel holding unit 32a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2C. Thereafter, the panel holding unit 32a of the robot 11 moves to the standby position P1 as indicated by the arrow R7 (step S7). Thereafter, as shown in FIG. 4, the panel holding portion 32a of the robot 11 is moved to the panel mounting portion 20 of the inspection device 3 as indicated by the arrow R11, where the liquid crystal panel 2A is mounted. The held liquid crystal panel 2C is placed (step S8). Thereafter, as indicated by arrows R12 and R13, the panel holding unit 32a of the robot 11 holds the liquid crystal panel 2B (step S9), and returns to the standby position P1 (step S10). In step S9, the panel holding unit 32a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2B.
その後、ロボット11のパネル保持部32aは、矢印R14で示すように待機位置P2へ移動する(ステップS11)。その後、ロボット11のパネル保持部32aは、矢印R15で示すように仮置きステージ14に移動して、保持している液晶パネル2Bを仮置きステージ14に載置する(ステップS12)。ステップS12では、ロボット11のパネル保持部32aは、たとえば、仮置きステージ14の後ろ側部分に液晶パネル2Cを載置する。その後、ロボット11のパネル保持部32aは、矢印R16で示すように待機位置P2へ戻る(ステップS13)。
Thereafter, the panel holding unit 32a of the robot 11 moves to the standby position P2 as indicated by the arrow R14 (step S11). Thereafter, the panel holding unit 32a of the robot 11 moves to the temporary placement stage 14 as indicated by the arrow R15, and places the held liquid crystal panel 2B on the temporary placement stage 14 (step S12). In step S12, the panel holding unit 32a of the robot 11, for example, places the liquid crystal panel 2C on the rear side portion of the temporary placement stage 14. Thereafter, the panel holding unit 32a of the robot 11 returns to the standby position P2 as indicated by the arrow R16 (step S13).
また、ステップS55の後、ロボット12のパネル保持部32aは、仮置きステージ14に載置されている液晶パネル2Aを保持する(ステップS56)。ステップS56では、ロボット12のパネル保持部32aは、液晶パネル2Aの下面を吸引して保持する。また、ステップS56で仮置きステージ14に載置されている液晶パネル2Aを保持する際には、ロボット12のパネル保持部32aは、切欠き部14aを通過する。その後、ロボット12のパネル保持部32aは、矢印L6で示すように待機位置P4へ移動する(ステップS57)。その後、ロボット12のパネル保持部32aは、矢印L7で示すようにパネル受入部5のパネル載置部21へ移動して、保持している液晶パネル2Aをパネル載置部21に載置する(ステップS58)。ステップS58では、ロボット12のパネル保持部32aは、たとえば、パネル保持部32aの移動中に液晶パネル2Aを上下反転させてパネル載置部21に載置する。その後、ロボット12のパネル保持部32aは、矢印L8で示すように待機位置P3へ移動する(ステップS59)。
Further, after step S55, the panel holding unit 32a of the robot 12 holds the liquid crystal panel 2A placed on the temporary placement stage 14 (step S56). In step S56, the panel holding unit 32a of the robot 12 sucks and holds the lower surface of the liquid crystal panel 2A. When the liquid crystal panel 2A placed on the temporary placement stage 14 is held in step S56, the panel holding portion 32a of the robot 12 passes the notch 14a. Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P4 as indicated by the arrow L6 (step S57). Thereafter, the panel holding unit 32a of the robot 12 moves to the panel placement unit 21 of the panel receiving unit 5 as indicated by the arrow L7, and places the held liquid crystal panel 2A on the panel placement unit 21 ( Step S58). In step S58, the panel holding unit 32a of the robot 12, for example, turns the liquid crystal panel 2A upside down while the panel holding unit 32a is moving, and places the liquid crystal panel 2A on the panel placement unit 21. Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P3 as indicated by the arrow L8 (step S59).
その後、図4に示すように、ロボット12のパネル保持部32aは、矢印L11で示すようにカセット6に移動して、液晶パネル2Dを保持する(ステップS60)。ステップS60では、ロボット12のパネル保持部32aは、液晶パネル2Dの下面を吸引して保持する。その後、ロボット12のパネル保持部32aは、矢印L12で示すように待機位置P3に戻る(ステップS61)。その後、ロボット12のパネル保持部32aは、矢印L13で示すように待機位置P4へ移動する(ステップS62)。
Thereafter, as shown in FIG. 4, the panel holding unit 32a of the robot 12 moves to the cassette 6 as indicated by the arrow L11, and holds the liquid crystal panel 2D (step S60). In step S60, the panel holding unit 32a of the robot 12 sucks and holds the lower surface of the liquid crystal panel 2D. Thereafter, the panel holding unit 32a of the robot 12 returns to the standby position P3 as indicated by the arrow L12 (step S61). Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P4 as indicated by the arrow L13 (step S62).
その後、ロボット12のパネル保持部32aは、矢印L14で示すように仮置きステージ13に移動して、保持している液晶パネル2Dを仮置きステージ13に載置する(ステップS63)。ステップS63では、ロボット12のパネル保持部32aは、たとえば、仮置きステージ13の後ろ側部分に液晶パネル2Dを載置する。また、ステップS63で仮置きステージ13に液晶パネル2Dを載置する際には、ロボット12のパネル保持部32aは、切欠き部13aを通過する。その後、ロボット12のパネル保持部32aは、矢印L15で示すように仮置きステージ14に移動する(ステップS64)。ステップS56~S64は、ステップS6~S13と同時に行われる。
Thereafter, the panel holding unit 32a of the robot 12 moves to the temporary placement stage 13 as indicated by the arrow L14, and places the held liquid crystal panel 2D on the temporary placement stage 13 (step S63). In step S63, the panel holding unit 32a of the robot 12 places the liquid crystal panel 2D on the rear side of the temporary placement stage 13, for example. Further, when mounting the liquid crystal panel 2D on the temporary placement stage 13 in step S63, the panel holding portion 32a of the robot 12 passes through the notch 13a. Thereafter, the panel holding unit 32a of the robot 12 moves to the temporary placement stage 14 as indicated by the arrow L15 (step S64). Steps S56 to S64 are performed simultaneously with steps S6 to S13.
ステップS13の後、ロボット11のパネル保持部32aは、矢印R17で示すように仮置きステージ13に移動して、液晶パネル2Dを保持する(ステップS14)。ステップS14では、ロボット11のパネル保持部32aは、液晶パネル2Dの上面を吸引して保持する。その後、ロボット11のパネル保持部32aは、矢印R18で示すように待機位置P1へ移動する(ステップS15)。その後、ロボット11のパネル保持部32aは、矢印R19で示すように検査装置3のパネル載置部20に移動して、液晶パネル2Bが載置されていた箇所に、保持している液晶パネル2Dを載置する(ステップS16)。その後、ロボット11のパネル保持部32aは、矢印R20で示すように、待機位置P1へ戻る(ステップS17)。
After step S13, the panel holding unit 32a of the robot 11 moves to the temporary placement stage 13 as indicated by the arrow R17, and holds the liquid crystal panel 2D (step S14). In step S14, the panel holding unit 32a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2D. Thereafter, the panel holding unit 32a of the robot 11 moves to the standby position P1 as indicated by the arrow R18 (step S15). Thereafter, the panel holding unit 32a of the robot 11 moves to the panel mounting unit 20 of the inspection device 3 as indicated by the arrow R19, and holds the liquid crystal panel 2D held at the position where the liquid crystal panel 2B was mounted. Are placed (step S16). Thereafter, the panel holding unit 32a of the robot 11 returns to the standby position P1 as indicated by the arrow R20 (step S17).
また、ステップS64の後、ロボット12のパネル保持部32aは、仮置きステージ14に載置されている液晶パネル2Bを保持する(ステップS65)。ステップS65では、ロボット12のパネル保持部32aは、液晶パネル2Bの下面を吸引して保持する。また、ステップS65で仮置きステージ14に載置されている液晶パネル2Bを保持する際には、ロボット12のパネル保持部32aは、切欠き部14aを通過する。その後、ロボット12のパネル保持部32aは、矢印L16で示すように待機位置P4へ移動する(ステップS66)。その後、ロボット12のパネル保持部32aは、矢印L17で示すようにパネル受入部5のパネル載置部21へ移動して、保持している液晶パネル2Bをパネル載置部21に載置する(ステップS67)。ステップS67では、ロボット12のパネル保持部32aは、たとえば、パネル保持部32aの移動中に液晶パネル2Bを上下反転させてパネル載置部21に載置する。その後、ロボット12のパネル保持部32aは、矢印L18で示すように待機位置P3へ移動する(ステップS68)。ステップS65~S68は、ステップS14~S17と同時に行われる。
Further, after step S64, the panel holding unit 32a of the robot 12 holds the liquid crystal panel 2B placed on the temporary placement stage 14 (step S65). In step S65, the panel holding unit 32a of the robot 12 sucks and holds the lower surface of the liquid crystal panel 2B. When the liquid crystal panel 2B placed on the temporary placement stage 14 is held in step S65, the panel holding portion 32a of the robot 12 passes through the notch 14a. Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P4 as indicated by the arrow L16 (step S66). Thereafter, the panel holding unit 32a of the robot 12 moves to the panel placement unit 21 of the panel reception unit 5 as indicated by the arrow L17, and places the held liquid crystal panel 2B on the panel placement unit 21 ( Step S67). In step S67, for example, while the panel holding unit 32a is moving, the panel holding unit 32a of the robot 12 turns the liquid crystal panel 2B upside down and places the liquid crystal panel 2B on the panel placement unit 21. Thereafter, the panel holding unit 32a of the robot 12 moves to the standby position P3 as indicated by the arrow L18 (step S68). Steps S65 to S68 are performed simultaneously with steps S14 to S17.
なお、本形態では、仮置きステージ14に移動して液晶パネル2A、2Bを仮置きステージ14に載置するロボット11のパネル保持部32aと、仮置きステージ14に移動して液晶パネル2A、2Bを保持するロボット12のパネル保持部32aとの干渉を防止するために、所定時間、ロボット12が停止することがある。
In the present embodiment, the temporary holding stage 14 moves and the liquid crystal panels 2A and 2B are placed on the temporary holding stage 14. The panel holding portion 32a of the robot 11 moves to the temporary holding stage 14 and the liquid crystal panels 2A and 2B move. The robot 12 may stop for a predetermined time in order to prevent interference with the panel holding unit 32a of the robot 12 holding the key.
また、本形態では、上述のように、検査装置3において液晶パネル2が2枚ずつ点灯検査される。カセット6に収容される液晶パネル2の初期の枚数が奇数であると、カセット6に収容された最後の1枚の液晶パネル2がパネル載置部20に載置されたときにパネル載置部20に載置される液晶パネル2の枚数は1枚になるが、パネル載置部20に載置される液晶パネル2の枚数が1枚であると、検査装置3の構造上、液晶パネル2の点灯検査を行うことができない。そこで、本形態では、カセット6に収容される液晶パネル2の初期の枚数が奇数である場合には、カセット6に収容された最後の1枚の液晶パネル2がパネル載置部20に載置された後、ロボット11は、パネル載置ステージ17に載置されたダミーパネル52をパネル載置部20まで搬送してパネル載置部20に載置する。また、検査装置3は、パネル載置部20にダミーパネル52が載置されると、点灯検査を行う。
Further, in the present embodiment, as described above, the liquid crystal panel 2 is subjected to the light inspection every two sheets in the inspection device 3. When the initial number of liquid crystal panels 2 accommodated in the cassette 6 is an odd number, when the last one liquid crystal panel 2 accommodated in the cassette 6 is placed on the panel placement unit 20, the panel placement unit Although the number of the liquid crystal panels 2 placed on the panel 20 is one, if the number of the liquid crystal panels 2 placed on the panel placement unit 20 is one, the liquid crystal panel 2 is selected because of the structure of the inspection device 3. You can not check the lighting of the Therefore, in the present embodiment, when the initial number of liquid crystal panels 2 accommodated in the cassette 6 is an odd number, the last one liquid crystal panel 2 accommodated in the cassette 6 is placed on the panel placement unit 20 Then, the robot 11 conveys the dummy panel 52 placed on the panel placement stage 17 to the panel placement unit 20 and places the dummy panel 52 on the panel placement unit 20. Further, when the dummy panel 52 is placed on the panel placement unit 20, the inspection device 3 performs a lighting examination.
また、本形態では、検査装置3の構造上、パネル載置部20に載置される液晶パネル2の枚数が2枚でないと、検査装置3で液晶パネル2の点灯検査を行うことはできないが、たとえば、検査装置3のカメラの故障等が発生して、パネル載置部20に載置される2枚の液晶パネル2のうちの1枚の液晶パネル2しか適切な点灯検査ができないといった状況が生じる可能性がある。この場合には、2枚のダミーパネル52のそれぞれを2個のパネル載置部20のそれぞれに載置したままの状態で1枚の液晶パネル2のみを入れ替えることで、1枚の液晶パネル2の点灯検査を継続することが可能である。
Further, in the present embodiment, due to the structure of the inspection device 3, the lighting inspection of the liquid crystal panel 2 can not be performed by the inspection device 3 unless the number of the liquid crystal panels 2 mounted on the panel mounting portion 20 is two. For example, a situation in which a failure or the like of the camera of the inspection apparatus 3 occurs and only one liquid crystal panel 2 of the two liquid crystal panels 2 placed on the panel placement unit 20 can be properly lit. Can occur. In this case, only one liquid crystal panel 2 is replaced in a state where each of the two dummy panels 52 is mounted on each of the two panel mounting portions 20, so that one liquid crystal panel 2 can be obtained. It is possible to continue the lighting inspection of the
(本形態の主な効果)
以上説明したように、本形態では、搬送システム1は、2台のロボット11、12と、ロボット11とロボット12との間に配置される2個の仮置きステージ13、14とを備えている。また、本形態では、ロボット11は、仮置きステージ13から検査装置3へ点灯検査前の液晶パネル2を搬送するとともに、検査装置3から仮置きステージ14へ点灯検査後の液晶パネル2を搬送している。また、ロボット12は、カセット6から仮置きステージ13へ点灯検査前の液晶パネル2を搬送するとともに、仮置きステージ14からパネル受入部5へ点灯検査後の液晶パネル2を搬送している。 (Main effects of this form)
As described above, in the present embodiment, the transport system 1 includes the two robots 11 and 12 and the two temporary placement stages 13 and 14 disposed between the robot 11 and the robot 12. . Further, in this embodiment, the robot 11 transports the liquid crystal panel 2 before the lighting inspection from the temporary placement stage 13 to the inspection device 3 and transports the liquid crystal panel 2 after the lighting inspection from the inspection device 3 to the temporary placement stage 14 ing. The robot 12 transports the liquid crystal panel 2 before the lighting inspection from the cassette 6 to the temporary placement stage 13 and transports the liquid crystal panel 2 after the lighting inspection from the temporary placement stage 14 to the panel receiving unit 5.
以上説明したように、本形態では、搬送システム1は、2台のロボット11、12と、ロボット11とロボット12との間に配置される2個の仮置きステージ13、14とを備えている。また、本形態では、ロボット11は、仮置きステージ13から検査装置3へ点灯検査前の液晶パネル2を搬送するとともに、検査装置3から仮置きステージ14へ点灯検査後の液晶パネル2を搬送している。また、ロボット12は、カセット6から仮置きステージ13へ点灯検査前の液晶パネル2を搬送するとともに、仮置きステージ14からパネル受入部5へ点灯検査後の液晶パネル2を搬送している。 (Main effects of this form)
As described above, in the present embodiment, the transport system 1 includes the two
そのため、本形態では、カセット6から検査装置3への液晶パネル2の搬送と検査装置3からパネル受入部5への液晶パネル2の搬送とを1台のロボットで行う場合と比較して、液晶パネル2を搬送する際のロボット11およびロボット12のそれぞれの動作時間を短縮することが可能になる。また、本形態では、2台のロボット11、12が設置されていても、上述の液晶パネル2の搬送動作の一例で説明したように、動作中のロボット11と動作中のロボット12とが干渉しにくくなるため、ロボット11とロボット12とを同時に動作させる時間を長くすることが可能になる。
Therefore, in the present embodiment, compared to the case where the transportation of the liquid crystal panel 2 from the cassette 6 to the inspection device 3 and the transportation of the liquid crystal panel 2 from the inspection device 3 to the panel receiving unit 5 are performed by one robot, It becomes possible to shorten the operation time of each of the robot 11 and the robot 12 when transporting the panel 2. Further, in the present embodiment, even if two robots 11 and 12 are installed, the robot 11 in operation and the robot 12 in operation interfere with each other as described in the example of the transfer operation of the liquid crystal panel 2 described above. Since it becomes difficult to do, it becomes possible to lengthen the time which makes robot 11 and robot 12 operate simultaneously.
このように本形態では、カセット6から検査装置3への液晶パネル2の搬送と検査装置3からパネル受入部5への液晶パネル2の搬送とを1台のロボットで行う場合と比較して、液晶パネル2を搬送する際のロボット11およびロボット12のそれぞれの動作時間を短縮することが可能になるとともに、ロボット11とロボット12とを同時に動作させる時間を長くすることが可能になるため、検査装置3に対する液晶パネル2の搬入搬出時間を短縮することが可能になる。
Thus, in this embodiment, compared to the case where the transport of the liquid crystal panel 2 from the cassette 6 to the inspection device 3 and the transport of the liquid crystal panel 2 from the inspection device 3 to the panel receiving unit 5 are performed by one robot, While it becomes possible to shorten each operation time of the robot 11 and the robot 12 at the time of conveying the liquid crystal panel 2, it becomes possible to lengthen the time which makes the robot 11 and the robot 12 operate simultaneously, so It is possible to shorten the loading and unloading time of the liquid crystal panel 2 with respect to the device 3.
本形態では、パネル保持機構32は、水平方向を回動の軸方向とするパネル保持機構32の回動が可能となるように関節部31を介して関節部30に保持されている。そのため、本形態では、上述のように、たとえば、仮置きステージ14からパネル載置部21に搬送される液晶パネル2を搬送中に上下反転させることが可能になる。したがって、本形態では、偏光板貼付装置7での液晶パネル2の取り扱いを容易にすることが可能になる。
In the present embodiment, the panel holding mechanism 32 is held by the joint unit 30 via the joint unit 31 so that the panel holding mechanism 32 can be turned in the horizontal direction as the axial direction of the rotation. Therefore, in the present embodiment, as described above, for example, the liquid crystal panel 2 conveyed from the temporary placement stage 14 to the panel placement unit 21 can be turned upside down during conveyance. Therefore, in the present embodiment, it is possible to facilitate the handling of the liquid crystal panel 2 in the polarizing plate sticking device 7.
本形態では、搬送システム1は、検査装置3での点灯検査で異常と判断された液晶パネル2が収容される収容トレイ15を備えており、ロボット11は、検査装置3での点灯検査で正常と判断された液晶パネル2を検査装置3から仮置きステージ14へ搬送するとともに、検査装置3での点灯検査で異常と判断された液晶パネル2を検査装置3から収容トレイ15へ搬送する。そのため、本形態では、検査装置3での点灯検査で正常と判断された液晶パネル2のみを偏光板貼付装置7のパネル受入部5へ搬送することが可能になる。
In the present embodiment, the transport system 1 includes the storage tray 15 in which the liquid crystal panel 2 determined to be abnormal in the lighting inspection in the inspection device 3 is accommodated, and the robot 11 is normal in the lighting inspection in the inspection device 3 The liquid crystal panel 2 determined as being transported from the inspection device 3 to the temporary placement stage 14, and the liquid crystal panel 2 determined as abnormal by the lighting inspection in the inspection device 3 is transported from the inspection device 3 to the storage tray 15. Therefore, in the present embodiment, it is possible to transport only the liquid crystal panel 2 determined to be normal in the lighting inspection in the inspection device 3 to the panel receiving unit 5 of the polarizing plate sticking device 7.
本形態では、パネル載置ステージ17に2枚のダミーパネル52が載置されている。そのため、本形態では、上述のように、カセット6に収容される液晶パネル2の初期の枚数が奇数であっても、また、カセット6に収容された最後の1枚の液晶パネル2がカセット6から搬出された後、カセット6の入替が行われなくても、ダミーパネル52をパネル載置部20に載置して、検査装置3で液晶パネル2の点灯検査を行うことが可能になる。また、本形態では、上述のように、パネル載置部20に載置される2枚の液晶パネル2のうちの1枚の液晶パネル2しか適切な点灯検査ができないといった状況が生じても、2枚のダミーパネル52のそれぞれを2個のパネル載置部20のそれぞれに載置したままの状態で1枚の液晶パネル2のみを入れ替えることで、1枚の液晶パネル2の点灯検査を継続することが可能になる。
In the present embodiment, two dummy panels 52 are mounted on the panel mounting stage 17. Therefore, in the present embodiment, as described above, even if the initial number of liquid crystal panels 2 accommodated in the cassette 6 is an odd number, the last one liquid crystal panel 2 accommodated in the cassette 6 is the cassette 6 Even after the cassette 6 has not been replaced, the dummy panel 52 can be placed on the panel placement unit 20 and the inspection device 3 can perform the lighting inspection of the liquid crystal panel 2. Further, in the present embodiment, as described above, even if only one liquid crystal panel 2 of the two liquid crystal panels 2 mounted on the panel mounting portion 20 can be subjected to an appropriate lighting inspection, The lighting inspection of one liquid crystal panel 2 is continued by replacing only one liquid crystal panel 2 with each of the two dummy panels 52 being mounted on each of the two panel mounting portions 20. It will be possible to
(他の実施の形態)
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The embodiment described above is an example of the preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The embodiment described above is an example of the preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.
上述した形態において、パネル保持機構32は、2個のパネル保持部32aを備えていても良い。すなわち、パネル保持機構32は、2枚の液晶パネル2を保持しても良い。この場合には、たとえば、パネル保持機構32は、2個のパネル保持部32aのそれぞれを個別にスライドさせるスライド機構を備えている。また、この場合には、2枚の液晶パネル2をロボット11、12で同時に搬送することができるため、検査装置3に対する液晶パネル2の搬入搬出時間をより短縮することが可能になる。
In the embodiment described above, the panel holding mechanism 32 may include two panel holding portions 32a. That is, the panel holding mechanism 32 may hold the two liquid crystal panels 2. In this case, for example, the panel holding mechanism 32 includes a slide mechanism that slides each of the two panel holding portions 32 a individually. Further, in this case, since the two liquid crystal panels 2 can be simultaneously transported by the robots 11 and 12, the loading and unloading time of the liquid crystal panel 2 with respect to the inspection apparatus 3 can be further shortened.
上述した形態では、処理装置3は、液晶パネル2を点灯検査する点灯検査装置であるが、処理装置3は、点灯検査装置以外の、液晶パネル2に対して所定の処理を行う装置であっても良い。また、上述した形態において、トレイに収容された複数枚の液晶パネル2が第1パネル配置部4に配置されていても良い。また、液晶パネル2に対して所定の処理を行う装置の、液晶パネル2の排出部が第1パネル配置部4となっていても良い。さらに、上述した形態において、第2パネル配置部5は、偏光板貼付装置7以外の装置のパネル受入部であっても良い。また、第2パネル配置部5に、液晶パネル2が収容されるカセットまたはトレイが配置されていても良い。
In the embodiment described above, the processing device 3 is a lighting inspection device for inspecting the lighting of the liquid crystal panel 2, but the processing device 3 is a device for performing predetermined processing on the liquid crystal panel 2 other than the lighting inspection device Also good. Further, in the embodiment described above, the plurality of liquid crystal panels 2 accommodated in the tray may be arranged in the first panel arrangement portion 4. In addition, the discharge unit of the liquid crystal panel 2 of the apparatus for performing predetermined processing on the liquid crystal panel 2 may be the first panel placement unit 4. Furthermore, in the embodiment described above, the second panel placement unit 5 may be a panel receiving unit of a device other than the polarizing plate sticking device 7. Further, a cassette or a tray in which the liquid crystal panel 2 is accommodated may be arranged in the second panel arrangement portion 5.
上述した形態において、ロボット10およびロボット11の少なくともいずれか一方は、6軸以外の垂直多関節ロボットであっても良いし、水平多関節ロボットであっても良いし、いわゆるパラレルリンクロボットであっても良い。また、上述した形態において、搬送システム1は、パネル載置ステージ17を備えていなくても良い。また、上述した形態では、搬送システム1で搬送される表示パネルは、液晶パネル2であるが、搬送システム1で搬送される表示パネルは、液晶パネル2以外の表示パネルであっても良い。たとえば、搬送システム1で搬送される表示パネルは、有機ELパネルであっても良い。
In the embodiment described above, at least one of the robot 10 and the robot 11 may be a vertical articulated robot other than six axes, a horizontal articulated robot, or a so-called parallel link robot Also good. Further, in the embodiment described above, the transport system 1 may not include the panel mounting stage 17. Further, in the embodiment described above, the display panel conveyed by the conveyance system 1 is the liquid crystal panel 2, but the display panel conveyed by the conveyance system 1 may be a display panel other than the liquid crystal panel 2. For example, the display panel transported by the transport system 1 may be an organic EL panel.
1 搬送システム
2 液晶パネル(表示パネル)
3 検査装置(点灯検査装置、処理装置)
4 第1パネル配置部
5 第2パネル配置部
6 カセット
11 ロボット(第1ロボット)
12 ロボット(第2ロボット)
13 仮置きステージ(第1仮置きステージ)
14 仮置きステージ(第2仮置きステージ)
15 収容トレイ
16 トレイステージ
17 パネル載置ステージ
30 関節部
32 パネル保持機構
52 ダミーパネル 1Transport system 2 Liquid crystal panel (display panel)
3 Inspection device (lighting inspection device, processing device)
4 1st panel arrangement part 5 2ndpanel arrangement part 6 cassette 11 robot (1st robot)
12 Robot (the second robot)
13 Temporary placement stage (the first temporary placement stage)
14 Temporary placement stage (second temporary placement stage)
15storage tray 16 tray stage 17 panel mounting stage 30 joints 32 panel holding mechanism 52 dummy panel
2 液晶パネル(表示パネル)
3 検査装置(点灯検査装置、処理装置)
4 第1パネル配置部
5 第2パネル配置部
6 カセット
11 ロボット(第1ロボット)
12 ロボット(第2ロボット)
13 仮置きステージ(第1仮置きステージ)
14 仮置きステージ(第2仮置きステージ)
15 収容トレイ
16 トレイステージ
17 パネル載置ステージ
30 関節部
32 パネル保持機構
52 ダミーパネル 1
3 Inspection device (lighting inspection device, processing device)
4 1st panel arrangement part 5 2nd
12 Robot (the second robot)
13 Temporary placement stage (the first temporary placement stage)
14 Temporary placement stage (second temporary placement stage)
15
Claims (5)
- 表示パネルの処理を行う処理装置と、前記処理装置で処理される前の前記表示パネルが配置される第1パネル配置部との間で前記表示パネルを搬送するとともに、前記処理装置と、前記処理装置で処理された後の前記表示パネルが配置される第2パネル配置部との間で前記表示パネルを搬送する搬送システムであって、
前記処理装置に対する前記表示パネルの搬送を行う第1ロボットと、前記第1パネル配置部からの前記表示パネルの搬出と前記第2パネル配置部への前記表示パネルの搬入とを行う第2ロボットと、前記第1ロボットと前記第2ロボットとの間に配置されるとともに前記表示パネルが載置される第1仮置きステージおよび第2仮置きステージとを備え、
前記第2ロボットは、前記第1パネル配置部から前記第1仮置きステージへ前記処理装置で処理される前の前記表示パネルを搬送するとともに、前記第2仮置きステージから前記第2パネル配置部へ前記処理装置で処理された後の前記表示パネルを搬送し、
前記第1ロボットは、前記第1仮置きステージから前記処理装置へ前記処理装置で処理される前の前記表示パネルを搬送するとともに、前記処理装置から前記第2仮置きステージへ前記処理装置で処理された後の前記表示パネルを搬送することを特徴とする搬送システム。 The display panel is transported between a processing device that processes a display panel and a first panel placement unit in which the display panel before being processed by the processing device is disposed, and the processing device and the processing A transport system for transporting the display panel to and from a second panel arrangement unit on which the display panel after being processed by the apparatus is disposed,
A first robot that transports the display panel to the processing device; and a second robot that unloads the display panel from the first panel placement unit and loads the display panel into the second panel placement unit A first temporary placement stage and a second temporary placement stage disposed between the first robot and the second robot and on which the display panel is placed;
The second robot conveys the display panel before being processed by the processing apparatus from the first panel placement unit to the first temporary placement stage, and from the second temporary placement stage to the second panel placement unit Conveying the display panel after being processed by the processing device;
The first robot transports the display panel before being processed by the processing apparatus from the first temporary placement stage to the processing apparatus, and the processing apparatus performs processing by the processing apparatus from the processing apparatus to the second temporary placement stage And conveying the display panel after being processed. - 前記第1ロボットおよび前記第2ロボットの少なくともいずれか一方は、前記表示パネルを保持するパネル保持機構と、水平方向を回動の軸方向とする前記パネル保持機構の回動が可能となるように前記パネル保持機構を保持する関節部とを備えることを特徴とする請求項1記載の搬送システム。 At least one of the first robot and the second robot can rotate the panel holding mechanism that holds the display panel and the panel holding mechanism that makes the horizontal direction an axial direction of rotation. The transfer system according to claim 1, further comprising: a joint unit that holds the panel holding mechanism.
- 前記処理装置は、前記表示パネルを点灯検査する点灯検査装置であることを特徴とする請求項1または2記載の搬送システム。 The transport system according to claim 1, wherein the processing device is a lighting inspection device that performs lighting inspection of the display panel.
- 前記点灯検査装置での点灯検査で異常と判断された前記表示パネルが収容される収容トレイと、前記収容トレイが載置されるトレイステージとを備え、
前記第1ロボットは、前記点灯検査装置での点灯検査で正常と判断された前記表示パネルを前記点灯検査装置から前記第2仮置きステージへ搬送するとともに、前記点灯検査装置での点灯検査で異常と判断された前記表示パネルを前記点灯検査装置から前記収容トレイへ搬送することを特徴する請求項3記載の搬送システム。 A storage tray in which the display panel determined to be abnormal in the lighting inspection by the lighting inspection device is accommodated; and a tray stage on which the storage tray is placed;
The first robot conveys the display panel determined to be normal in the lighting inspection by the lighting inspection device from the lighting inspection device to the second temporary placement stage, and the lighting inspection in the lighting inspection device is abnormal. The transport system according to claim 3, wherein the display panel determined to be transported from the lighting inspection device to the storage tray. - 前記表示パネルと同形状に形成されるダミーパネルが載置されるパネル載置ステージを備え、
前記パネル載置ステージは、前記処理装置と前記パネル載置ステージとの間で前記第1ロボットによる前記ダミーパネルの搬送が可能となる位置に配置され、
前記第1パネル配置部には、カセットに収容された複数枚の前記表示パネルが配置され、
前記点灯検査装置では、前記表示パネルが2枚ずつ点灯検査されることを特徴とする請求項3または4記載の搬送システム。 A panel mounting stage on which a dummy panel formed in the same shape as the display panel is mounted;
The panel mounting stage is disposed between the processing apparatus and the panel mounting stage at a position where the first robot can convey the dummy panel.
A plurality of the display panels housed in a cassette are arranged in the first panel arrangement section,
5. The transport system according to claim 3, wherein in the lighting inspection device, the display panels are inspected for lighting two by two.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114275539A (en) * | 2020-10-01 | 2022-04-05 | 日本电产三协株式会社 | Conveying system |
CN114955515A (en) * | 2021-02-26 | 2022-08-30 | 日本电产三协株式会社 | Processing system |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006113288A (en) * | 2004-10-14 | 2006-04-27 | Micronics Japan Co Ltd | Visual inspection apparatus and method for liquid crystal panel |
JP2007156338A (en) * | 2005-12-08 | 2007-06-21 | Sharp Corp | Method of repairing display panel |
JP2007158170A (en) * | 2005-12-07 | 2007-06-21 | Ishikawajima Harima Heavy Ind Co Ltd | Transfer robot |
JP2008241804A (en) * | 2007-03-26 | 2008-10-09 | Seiko Epson Corp | Inspecting and repairing method for electrooptical device, manufacturing method of electrooptical device, and electronic equipment |
JP2010030744A (en) * | 2008-07-29 | 2010-02-12 | Nippon Electric Glass Co Ltd | Plate-like work transfer installation and method |
JP2013083700A (en) * | 2011-10-06 | 2013-05-09 | Dainippon Printing Co Ltd | Conveyance system of substrate |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN205946510U (en) * | 2016-06-15 | 2017-02-08 | 富景盛电子科技(苏州)有限公司 | Automatic checkout device behind wave soldering |
CN106153123A (en) * | 2016-08-31 | 2016-11-23 | 上海昭程整流子科技有限公司 | A kind of diverter automatic Synthesis testing machine |
CN106548849B (en) * | 2017-01-10 | 2017-11-17 | 江西天键电声有限公司 | Earphone magnetic circuit component automatic magnetism-charging equipment |
-
2017
- 2017-09-29 JP JP2017189847A patent/JP2019064764A/en active Pending
-
2018
- 2018-09-11 CN CN201880062244.9A patent/CN111132915B/en active Active
- 2018-09-11 WO PCT/JP2018/033542 patent/WO2019065204A1/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006113288A (en) * | 2004-10-14 | 2006-04-27 | Micronics Japan Co Ltd | Visual inspection apparatus and method for liquid crystal panel |
JP2007158170A (en) * | 2005-12-07 | 2007-06-21 | Ishikawajima Harima Heavy Ind Co Ltd | Transfer robot |
JP2007156338A (en) * | 2005-12-08 | 2007-06-21 | Sharp Corp | Method of repairing display panel |
JP2008241804A (en) * | 2007-03-26 | 2008-10-09 | Seiko Epson Corp | Inspecting and repairing method for electrooptical device, manufacturing method of electrooptical device, and electronic equipment |
JP2010030744A (en) * | 2008-07-29 | 2010-02-12 | Nippon Electric Glass Co Ltd | Plate-like work transfer installation and method |
JP2013083700A (en) * | 2011-10-06 | 2013-05-09 | Dainippon Printing Co Ltd | Conveyance system of substrate |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114275539A (en) * | 2020-10-01 | 2022-04-05 | 日本电产三协株式会社 | Conveying system |
CN114275539B (en) * | 2020-10-01 | 2023-12-19 | 日本电产三协株式会社 | Conveying system |
CN114955515A (en) * | 2021-02-26 | 2022-08-30 | 日本电产三协株式会社 | Processing system |
CN114955515B (en) * | 2021-02-26 | 2024-02-13 | 日本电产三协株式会社 | processing system |
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