WO2019065205A1 - Tray arrangement part and conveyance system - Google Patents

Tray arrangement part and conveyance system Download PDF

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Publication number
WO2019065205A1
WO2019065205A1 PCT/JP2018/033543 JP2018033543W WO2019065205A1 WO 2019065205 A1 WO2019065205 A1 WO 2019065205A1 JP 2018033543 W JP2018033543 W JP 2018033543W WO 2019065205 A1 WO2019065205 A1 WO 2019065205A1
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WO
WIPO (PCT)
Prior art keywords
tray
plate
base member
unit
trays
Prior art date
Application number
PCT/JP2018/033543
Other languages
French (fr)
Japanese (ja)
Inventor
佐藤　史朗
昌輝 久保田
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Publication of WO2019065205A1 publication Critical patent/WO2019065205A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G57/00—Stacking of articles
    • B65G57/02—Stacking of articles by adding to the top of the stack
    • B65G57/03—Stacking of articles by adding to the top of the stack from above

Definitions

  • the present invention relates to a tray arrangement portion in which trays in which display panels are accommodated are arranged in a stacked manner in a plurality of stages.
  • the present invention also relates to a transport system provided with such a tray arrangement unit.
  • an inspection apparatus for inspecting the lighting of a liquid crystal panel is known (see, for example, Patent Document 1).
  • the inspection apparatus described in Patent Document 1 is incorporated in the middle of a liquid crystal display manufacturing system.
  • This inspection apparatus includes a prober for inspecting the lighting of the liquid crystal panel, a carry-in side conveyor for carrying the liquid crystal panel before the test toward the prober, and a carry-in mechanism for carrying the liquid crystal panel carried by the carry-in conveyor into the prober. It has an unloading mechanism for unloading the liquid crystal panel after inspection from the prober, and an unloading conveyor for transporting the liquid crystal panel unloaded by the unloading mechanism.
  • a liquid crystal panel before inspection stored in a tray disposed at a predetermined place is carried into the inspection apparatus by a robot or the like, and the liquid crystal panel after inspection is inspected by the robot or the like From the tray to a tray disposed at a predetermined location.
  • the inventor of the present application is examining the installation of a tray arrangement portion in which a liquid crystal panel before inspection and a tray accommodating the liquid crystal panel after inspection are stacked in a plurality of stages.
  • the inventor of the present invention supplies trays in which liquid crystal panels before inspection are stored in a stacked state to the tray arranging portion, and trays in which trays in which liquid crystal panels after inspection are stored are stacked.
  • the tray arrangement part when the trays are supplied in a stacked state to the tray arrangement part or taken out from the tray arrangement part in a stacked state, depending on the number of stacked trays, the weight of the liquid crystal panels and trays accommodated in the trays There is a risk that a large load may be applied to the trays disposed below the stacked trays. In addition, when a large load is applied to the tray, the tray may be deformed, and the liquid crystal panel stored in the tray may be damaged.
  • the tray arrangement portion of the present invention is a tray arrangement portion in which trays in which display panels are accommodated are arranged in a stacked manner in a plurality of stages, and are arranged in a stacked manner in a plurality of stages. And a base member on which the mounting plate is removably mounted, the rigidity of the mounting plate being higher than the rigidity of the tray It is characterized by
  • the tray arranging unit is a mounting plate on which the trays arranged in the tray arranging unit are mounted in a state of being stacked in a plurality of stages (stacked state), and a base on which the mounting plates are detachably mounted. And a member. Therefore, in the present invention, by placing the stacked trays placed on the placement plate together with the placement plate on the base member, the stacked trays placed on the placement plate are placed. It becomes possible to supply the tray arrangement with the tray. Also, by lifting the stacked trays placed on the loading plate together with the loading plate from the base member, the stacked trays loaded on the loading plate can be stacked with the loading plate. It becomes possible to take out from the arrangement part.
  • the stacked trays mounted on the mounting plate are placed together with the mounting plate.
  • the tray is disposed below the stacked trays. It becomes possible to suppress the deformation of the tray. Therefore, in the present invention, even if the trays are supplied to the tray arrangement portion in a stacked state or the trays are taken out from the tray arrangement portion in a stacked state, the trays arranged at the lower side in the stacked state trays. It is possible to suppress the deformation of
  • the mounting plate is preferably made of resin. According to this structure, even if the rigidity of the mounting plate is higher than the rigidity of the tray, it is possible to reduce the weight of the mounting plate. Therefore, for example, a supply operation of supplying trays stacked in a stack state placed on the mounting plate to the tray arranging portion, and a removal operation of taking out the trays stacked in a stack state mounted on the mounting plate from the tray arrangement portion Even when the operator manually performs the work, the stacked trays placed on the placement plate can be easily lifted together with the placement plate during the supply operation and the removal operation.
  • the tray arrangement portion has a support frame to which the base member is slidably attached, a stationary side rail fixed to the support frame, and a movable side rail fixed to the base member, the base relative to the support frame It is preferable to provide the slide mechanism which slides a member. With this configuration, it is possible to place the stacked trays on the base member together with the mounting plate in a state in which the base member is slid to a predetermined position. Therefore, by sliding the base member to a position where the supply operation of stacked trays can be easily performed, the supply operation of stacked trays can be easily performed.
  • the tray in the stacked state is set as the loading plate in a state in which the mounting plate placed on the base member and the tray in the stacked state are slid together with the base member to a predetermined position. It can be lifted together from the base member. Therefore, it is possible to easily take out the stacked trays by sliding the mounting plate and the stacked trays together with the base member to a position where the stacked trays can be easily taken out. become.
  • the tray arrangement portion includes a first locking mechanism for locking the base member at one end side of the sliding direction of the base member with respect to the supporting frame, and a base member at the other end side of the sliding direction of the base member with respect to the supporting frame.
  • a second locking mechanism for locking is provided.
  • the tray arrangement unit includes an elevation mechanism that raises and lowers the base member.
  • the tray in the stacked state is placed in a state in which the mounting plate placed on the base member and the tray in the stacked state are lowered together with the base member to a predetermined position. Because it is possible to lift from the base member together, it is possible to easily take out the stacked trays by lowering the base member to a position where the stacked trays can be easily taken out. become.
  • the tray arrangement unit includes a positioning mechanism for positioning the tray in the horizontal direction with respect to the placement plate.
  • the stacked trays may be mounted even if the stacked trays deviate from the loading plate. Can be moved to the normal position with respect to the mounting plate.
  • the tray arrangement unit of the present invention can be used in a transport system that carries in the display panel to the inspection apparatus for inspecting the display panel and carries out the display panel from the inspection apparatus.
  • the supply side tray arrangement unit arranged in a state in which the trays containing the display panels before inspection are stacked in a plurality of stages and the inspection by the inspection apparatus.
  • the first discharge side tray arrangement section where the trays containing the display panels are stacked in a plurality of stages and the trays in which the display panels judged to be abnormal in the inspection by the inspection apparatus are accommodated in a plurality of stages
  • a second discharge side tray arrangement portion arranged in a stacked state, and conveying a display panel in the tray arranged at the uppermost stage of the supply side tray arrangement portion to the inspection device and inspecting the inspection device from the inspection device
  • the panel transport roller for transporting the subsequent display panel into the tray disposed in the uppermost row of the first ejection tray arrangement portion or the tray disposed in the uppermost row of the
  • the trays are supplied in a stacked state to the tray arranging portion or the trays are taken out from the tray arranging portion in a stacked state, the trays are arranged below the stacked trays. It is possible to suppress the deformation of the tray.
  • FIG. 1 It is a perspective view of a conveyance system concerning an embodiment of the invention. It is a figure for demonstrating the conveyance system shown in FIG. 1 from an upper surface. It is a front view of the panel conveyance robot shown in FIG. It is a side view of the tray conveyance robot shown in FIG. It is a perspective view of the supply side tray arrangement
  • FIG. 6 is a view for explaining the separation operation of the tray disposed at the uppermost stage in the supply side tray arranging unit shown in FIG. 5; It is a figure for demonstrating the structure of the empty tray arrangement
  • FIG. 1 is a perspective view of a transport system 1 according to an embodiment of the present invention.
  • FIG. 2 is a view for explaining the transport system 1 shown in FIG. 1 from the top.
  • the transport system 1 of the present embodiment is used by being incorporated into a manufacturing line of a relatively small liquid crystal display used in a portable device or the like.
  • the transport system 1 transports a liquid crystal panel 2 which is a display panel.
  • the transport system 1 carries in the liquid crystal panel 2 to the inspection device 3 which inspects the liquid crystal panel 2 and carries out the liquid crystal panel 2 from the inspection device 3.
  • the liquid crystal panel 2 is formed in a rectangular flat plate shape.
  • the liquid crystal panel 2 before the inspection by the inspection device 3 is accommodated in the tray 4 or the cassette 5 according to the size of the liquid crystal panel 2 to be inspected.
  • the relatively large liquid crystal panel 2 is accommodated in the tray 4, and the relatively small liquid crystal panel 2 is accommodated in the cassette 5.
  • the liquid crystal panel 2 after the inspection by the inspection device 3 is accommodated in the tray 4.
  • a plurality of liquid crystal panels 2 are accommodated in the tray 4 in a state where they do not overlap in the vertical direction.
  • a plurality of liquid crystal panels 2 are accommodated in the cassette 5 so as to overlap in the vertical direction in a state of being spaced apart in the vertical direction.
  • the tray 4 is formed in a substantially rectangular flat plate shape, and a recess in which the liquid crystal panel 2 is accommodated is formed on the upper surface of the tray 4. Further, the tray 4 is formed of a relatively low rigidity resin. Further, in FIG. 1, the illustration of the tray 4 and the cassette 5 is omitted.
  • the transport system 1 includes a tray arrangement portion 6 in which the trays 4 in which the liquid crystal panels 2 before the inspection are accommodated are stacked in a plurality of stages, and the liquid crystal panels 2 determined to be normal in the inspection by the inspection device 3.
  • a tray arrangement unit 9 in which empty trays 4 are arranged in a plurality of stages.
  • the transport system 1 further includes a robot 11 for transporting the liquid crystal panel 2, a robot 12 for transporting the tray 4, and a cassette placement unit 13 in which the cassette 5 containing the plurality of liquid crystal panels 2 is placed.
  • the tray arrangement unit 6 of this embodiment is a supply side tray arrangement unit
  • the tray arrangement unit 7 is a first discharge side tray arrangement unit
  • the tray arrangement unit 8 is a second discharge side tray arrangement unit.
  • the robot 11 in the present embodiment is a panel transfer robot.
  • the tray arranging unit 6, the tray arranging unit 7, the tray arranging unit 8 and the tray arranging unit 9 are arranged in a line.
  • the tray placement units 6 to 9 are installed on the gantry 14.
  • a main body frame (not shown) of the transport system 1 is fixed on the gantry 14.
  • the arrangement direction (X direction in FIG. 1 etc.) of the tray arrangement parts 6 to 9 is the left and right direction
  • the Y direction in FIG. 1 etc. orthogonal to the vertical direction and the left and right direction is the front and back direction.
  • the X1 direction side in FIG. 1 etc. in the left and right direction is the “right” side
  • the X2 direction side in FIG. 1 etc. in the opposite side is the “left” side, Y1 in FIG.
  • the inspection device 3 of the present embodiment is a lighting inspection device which performs lighting inspection of the liquid crystal panel 2.
  • the inspection apparatus 3 has, for example, a panel holding unit having two panel mounting units 15 on which the liquid crystal panel 2 is mounted, a rotation mechanism that rotates the panel holding unit with the vertical axis as the rotation axial direction, and the liquid crystal panel And a case where the inside becomes a dark room at the time of the lighting inspection of 2.
  • a backlight and a camera for inspecting the lighting of the liquid crystal panel 2 are installed inside the housing.
  • the rotation mechanism has a position where one panel mounting portion 15 of the two panel mounting portions 15 is disposed outside the housing and the other panel mounting portion 15 is disposed inside the housing. The panel holding portion is rotated between the position where one panel mounting portion 15 is disposed inside the housing and the other panel mounting portion 15 is disposed outside the housing.
  • the tray arrangement unit 6, the tray arrangement unit 7, the tray arrangement unit 8, and the tray arrangement unit 9 are arranged in a line in the left-right direction.
  • the tray arranging unit 9, the tray arranging unit 6, the tray arranging unit 7, and the tray arranging unit 8 are arranged in this order.
  • the tray arrangement unit 9, the tray arrangement unit 6, the tray arrangement unit 7, and the tray arrangement unit 8 are arranged in this order from the left to the right.
  • the robot 12 is disposed on the upper side of the tray placement units 6 to 9.
  • the robot 11 is disposed behind the tray placement units 6 to 9. Further, the robot 11 is disposed behind the tray arrangement unit 7.
  • the inspection device 3 is disposed behind the robot 11. In addition, the inspection device 3 is disposed on the rear side of the tray disposition units 6 to 8. The panel placement unit 15 of the inspection device 3 is disposed behind the robot 11. The cassette placement unit 13 is disposed behind the tray placement unit 6. The cassette placement unit 13 is disposed on the front side of the inspection device 3 and on the left side of the robot 11. The cassette placement unit 13 is placed at a position where the robot 11 can transport the liquid crystal panel 2 from the cassette 5 placed in the cassette placement unit 13 to the panel placement unit 15 of the inspection apparatus 3.
  • FIG. 3 is a front view of the robot 11 shown in FIG.
  • FIG. 4 is a side view of the robot 12 shown in FIG.
  • the robot 11 is a six-axis vertical articulated robot.
  • the robot 11 includes a support member 19 constituting a lower end portion of the robot 11, a joint unit 20 rotatably connected to the support member 19, and a joint unit 21 rotatably connected to the joint unit 20.
  • a straight arm 22 whose base end is fixed to the joint 21; a joint 23 fixed to the tip of the arm 22; a joint 24 connected to the joint 23 so as to be rotatable relative to the joint 23;
  • a straight arm 25 whose proximal end is relatively rotatably coupled to the joint 24, a joint 26 to which the tip of the arm 25 is fixed, a joint 27 relatively movably connected to the joint 26, and a joint
  • a panel holding mechanism 28 rotatably connected to the portion 27 and holding the liquid crystal panel 2.
  • the joints 20, 21, 23, 24, 26, 27 include a motor and a reduction gear that decelerates and transmits the power of the motor.
  • the joint portion 20 is connected to the support member 19 so as to be able to rotate with the vertical direction as the axial direction of rotation.
  • the joint portion 21 is connected to the joint portion 20 so as to be able to rotate with the horizontal direction as the axial direction of rotation.
  • the joint portion 24 is connected to the joint portion 23 so as to be able to rotate with the horizontal direction as the axial direction of rotation.
  • the joint portion 27 is connected to the joint portion 26 so as to be able to rotate with the horizontal direction as the axial direction of rotation.
  • the axial direction of rotation of the joint 21 with respect to the joint 20 and the axial direction of rotation of the joint 24 with respect to the joint 23 are orthogonal to the longitudinal direction of the arm 22.
  • the axial direction of rotation of the joint 24 with respect to the joint 23 and the axial direction of rotation of the joint 27 with respect to the joint 26 are orthogonal to the longitudinal direction of the arm 25.
  • the axial direction of rotation of the joint 24 with respect to the joint 23 and the axial direction of rotation of the arm 25 with respect to the joint 24 are orthogonal to each other.
  • the axial direction of the rotation of the joint 27 with respect to the joint 26 and the axial direction of the rotation of the panel holding mechanism 28 with respect to the joint 27 are orthogonal to each other.
  • the panel holding mechanism 28 includes a panel holding portion 28 a that sucks and holds the liquid crystal panel 2.
  • the panel holding unit 28 a holds one liquid crystal panel 2.
  • a plurality of suction holes are formed in the panel holding portion 28a.
  • An air suction mechanism such as a vacuum pump is connected to the plurality of suction holes via a predetermined pipe. In FIGS. 1 and 2, the panel holding portion 28a is not shown.
  • the robot 12 is a so-called two-axis orthogonal robot.
  • the robot 12 has a fixed frame 31 fixed to the gantry 14, a movable frame 32 held by the fixed frame 31 so as to be slidable in the lateral direction with respect to the fixed frame 31, and a movable frame 32.
  • the movable frame 33 is held by the movable frame 32 so as to be vertically slidable, and the tray holding unit 34 is attached to the movable frame 33.
  • the robot 12 has a drive mechanism for sliding the movable frame 32 in the lateral direction, a guide mechanism for guiding the movable frame 32 in the lateral direction, a drive mechanism for sliding the movable frame 33 in the vertical direction, and the movable frame 33 up and down. And a guide mechanism for guiding in a direction.
  • the fixed frame 31 is disposed on the upper side of the front end portions of the tray placement portions 6-9.
  • the movable frame 32 is attached to the upper surface side of the fixed frame 31. Further, the movable frame 32 extends rearward from the fixed frame 31.
  • the movable frame 33 is attached to the rear end of the movable frame 32.
  • the tray holding portion 34 is attached to the lower end of the movable frame 33. As shown in FIG. 4, the tray holding unit 34 includes a plurality of suction units 35 that suck and hold the tray 4.
  • An air suction mechanism such as a vacuum pump is connected to the suction unit 35 through a predetermined pipe. The suction unit 35 contacts the upper surface of the tray 4 to vacuum suction the tray 4.
  • the cassette placement unit 13 includes a cassette holding unit 36 that holds the cassette 5.
  • the cassette holding portion 36 is rotatable with the front-rear direction as an axial direction of rotation and the lower end of the cassette holding portion 36 as a rotation center.
  • a worker manually sets the cassette 5 in the cassette holding unit 36.
  • the cassette holding portion 36 is rotated to a position where the vertical direction substantially coincides with the vertical direction, the cassette holding portion 36 is fixed.
  • FIG. 5 is a perspective view of the tray placement unit 6 shown in FIG. 6 is a plan view of the tray placement unit 6 shown in FIG.
  • FIG. 7 is a diagram for describing the configuration of the tray placement unit 6 shown in FIG. 5 from the front.
  • FIG. 8 is a diagram for describing the configuration of the tray placement unit 6 shown in FIG. 5 from the side.
  • the tray arrangement portion 6 the trays 4 are arranged in a state of being stacked in a plurality of stages (stacked state).
  • the tray arranging unit 6 includes two side plates 38 constituting the left and right side surfaces of the tray arranging unit 6 and a rear side plate 39 constituting the rear surface of the tray arranging unit 6, and the upper surface and the front surface of the tray arranging unit 6 Is open.
  • the tray arranging unit 6 includes a mounting plate 40 on which the trays 4 arranged in the tray arranging unit 6 are stacked in a stacked state.
  • the tray arranging unit 6 includes a placing plate 40 on which the tray 4 disposed at the bottom of the trays 4 disposed in the tray arranging unit 6 in a stacked state is placed.
  • the tray arrangement portion 6 includes a base member 41 on which the mounting plate 40 is detachably mounted, and a support frame 42 to which the base member 41 is slidably attached.
  • the tray placement unit 6 includes a slide mechanism 43 that slides the base member 41 with respect to the support frame 42.
  • the slide mechanism 43 slides the base member 41 in the front-rear direction with respect to the support frame 42.
  • the tray placement portion 6 has a lock mechanism 44 for locking the base member 41 at one end side (specifically, the rear end side in the slide direction) of the base member 41 in the sliding direction with respect to the support frame 42;
  • a lock mechanism 45 is provided to lock the base member 41 on the other end side (specifically, the front end side in the slide direction) of the base member 41 in the sliding direction with respect to 42 (see FIG. 6).
  • the lock mechanism 44 of this embodiment is a first lock mechanism
  • the lock mechanism 45 is a second lock mechanism.
  • the tray placement unit 6 includes an elevating mechanism 46 that raises and lowers the support frame 42. That is, the tray placement unit 6 includes the base member 41, the placement plate 40, and the elevating mechanism 46 that raises and lowers the tray 4. Furthermore, the tray placement unit 6 includes a cylinder 47 for positioning the tray 4 in the horizontal direction. That is, the tray arrangement unit 6 includes a cylinder 47 for positioning the tray 4 placed on the placement plate 40 in the front-rear direction and the left-right direction. In addition, the tray placement unit 6 includes a pin cylinder 50 for separating the tray 4 disposed at the top and the tray 4 disposed second from the top. The tray arrangement unit 6 of the present embodiment is provided with four pin cylinders 50.
  • the tray placement unit 6 is provided with sensors 51 to 53 for detecting the tray 4 placed at the top.
  • the sensor 51 is a sensor for detecting the upper limit position of the uppermost tray 4.
  • the sensor 52 is a sensor for detecting the uppermost tray 4 supported by the movable pin 89 of the pin cylinder 50 as described later.
  • the sensor 53 is a sensor for stopping the uppermost tray 4 of the stacked trays 4 lifted by the lifting mechanism 46 at the upper limit position.
  • the tray placement unit 7 and the tray placement unit 8 are configured in the same manner. Further, the tray arranging units 7 and 8 are configured in the same manner as the tray arranging unit 6 except that the tray arranging units 7 and 8 do not include the pin cylinder 50 and the sensors 52 and 53. Therefore, the description of the specific configuration of the tray placement units 7 and 8 is omitted.
  • the tray arranging unit 9 includes the cylinder 47 and the sensors 52, 53 in that the tray arranging unit 9 does not include the mounting plate 40, the base member 41, the slide mechanism 43 and the locking mechanisms 44, 45.
  • the configuration is substantially the same as that of the tray placement unit 6 except that the tray placement unit 9 includes two pin cylinders 50, and the point that the tray placement unit 9 has two.
  • the specific configuration of the tray arranging unit 9 will be described focusing on differences from the tray arranging unit 6.
  • FIG. 9 is a front view of the configuration of the mounting plate 40, the base member 41, the support frame 42, the slide mechanism 43, etc. shown in FIG.
  • FIG. 10 is a view for explaining the movement of the slide mechanism 43 shown in FIG. 11 (A) and 11 (B) are front views of the peripheral portion of the pin cylinder 50 shown in FIG. 5, and FIGS. 11 (C) and 11 (D) are peripheral portions of the sensors 51 to 53 shown in FIG. It is a front view.
  • FIG. 12 is a diagram for explaining the separation operation of the tray 4 disposed in the uppermost stage in the tray arrangement unit 6 shown in FIG.
  • FIG. 13 is a diagram for describing the configuration of the tray placement unit 9 shown in FIG. 1 from the front.
  • FIG. 14 is a diagram for describing the configuration of the tray placement unit 9 shown in FIG. 1 from the side.
  • the mounting plate 40 is formed in a substantially rectangular flat plate shape.
  • the thickness direction of the mounting plate 40 matches the vertical direction, and the direction of the long side of the mounting plate 40 formed in a substantially rectangular shape matches the front-rear direction.
  • the placement plate 40 is disposed on the right side of the side plate 38 disposed on the left side, and is disposed on the left side of the side plate 38 disposed on the right side.
  • the mounting plate 40 is formed of resin.
  • the mounting plate 40 is formed of nylon.
  • the rigidity of the mounting plate 40 is higher than the rigidity of the tray 4.
  • two through holes 40a penetrating the mounting plate 40 in the vertical direction are formed in a state of being spaced in the front-rear direction.
  • the two through holes 40a are formed in a substantially rectangular shape.
  • Pins 56 for positioning the tray 4 in the horizontal direction are fixed to two corner portions on the rear end side of the placement plate 40.
  • the pins 56 project upward from the upper surface of the mounting plate 40.
  • a plurality of pins 55 for positioning the mounting plate 40 with respect to the base member 41 are fixed (see FIG. 6).
  • the pins 55 are provided at the center of the mounting plate 40, at two positions on the left and right ends of the front end of the mounting plate 40, and at two positions on the left and right ends of the rear end of the mounting plate 40. It is fixed. That is, five pins 55 are fixed to the lower surface of the mounting plate 40. The pins 55 project downward from the lower surface of the mounting plate 40.
  • the tray 4 is formed in a substantially rectangular flat plate shape as described above.
  • the tray 4 is placed on the placement plate 40 such that the direction of the long side of the tray 4 coincides with the front-rear direction.
  • the outer shape of the tray 4 and the outer shape of the mounting plate 40 are substantially equal.
  • At the lower end portion of the tray 4 is formed a flange portion 4a which spreads to the outer peripheral side of the tray 4 (see FIG. 12).
  • the collar 4 a is formed in a substantially rectangular frame shape.
  • the two corner portions on the rear end side of the tray 4 placed on the mounting plate 40 that is, the two corner portions on the rear end side of the collar portion 4a
  • It is the inclined surface 4b which inclines toward the direction (refer FIG. 6).
  • the base member 41 is disposed on the right side of the side plate 38 disposed on the left side, and is disposed on the left side of the side plate 38 disposed on the right side.
  • the base member 41 includes a base plate 57 on which the mounting plate 40 is detachably mounted, and two rail fixing plates 58 to which a third rail 69 described later constituting the slide mechanism 43 is fixed.
  • the base plate 57 is formed in a substantially rectangular flat plate shape, and is arranged such that the thickness direction of the base plate 57 coincides with the vertical direction.
  • the length of the base plate 57 in the front-rear direction is substantially equal to the length of the mounting plate 40 in the front-rear direction.
  • the width in the left-right direction of the base plate 57 is narrower than the width in the left-right direction of the mounting plate 40.
  • the base plate 57 In the base plate 57, two substantially rectangular through holes 57a penetrating the base plate 57 in the vertical direction are formed in a state of being spaced in the front-rear direction (see FIG. 6). Further, the base plate 57 has two insertion holes into which the pin 55 fixed to the center of the mounting plate 40 is inserted and the pins 55 fixed to the left and right ends of the rear end portion of the mounting plate 40. And an insertion hole into which is inserted. In the present embodiment, the operator manually slides the base member 41 relative to the support frame 42. On the front end side of the lower surface of the base plate 57, a handle 59 which an operator grips when sliding the base member 41 with respect to the support frame 42 is fixed. The pins 55 fixed at two places on the left and right ends of the front end portion of the mounting plate 40 are in contact with the left and right end surfaces of the base plate 57.
  • a lock plate 60 for locking the base member 41 with respect to the support frame 42 is fixed.
  • the lock plate 60 is formed in a flat plate shape, and is arranged such that the thickness direction of the lock plate 60 coincides with the left-right direction.
  • the lock plate 60 is fixed to the right end side of the base plate 57.
  • the front side portion of the lower surface of the lock plate 60 is an inclined surface 60a which inclines upward toward the front side
  • the rear side portion of the lower surface of the lock plate 60 is the rear side It becomes an inclined surface 60b which inclines toward the upper side as it goes to.
  • a slight plane perpendicular to the vertical direction is formed between the inclined surface 60a and the inclined surface 60b (see FIG. 8).
  • the rail fixing plate 58 is formed in a rectangular flat plate shape that is elongated in the front-rear direction.
  • the rail fixing plate 58 is arranged such that the thickness direction of the rail fixing plate 58 matches the left-right direction.
  • the rail fixing plate 58 is fixed to the lower surface of the base plate 57. Further, each of the two rail fixing plates 58 is fixed to each of both end sides of the base plate 57 in the left-right direction.
  • the length of the rail fixing plate 58 in the front-rear direction is longer than the length of the base plate 57 in the front-rear direction.
  • the front end of the rail fixing plate 58 is disposed forward of the front end of the base plate 57, and the rear end of the rail fixing plate 58 is disposed rearward of the rear end of the base plate 57.
  • the support frame 42 is disposed on the right side of the side plate 38 disposed on the left side, and is disposed on the left side of the side plate 38 disposed on the right side.
  • the support frame 42 is fixed to two rail fixing plates 61 to which a first rail 67 described later constituting the slide mechanism 43 is fixed, a support plate 62 to which the rail fixing plate 61 is fixed, and the support plate 62 A base plate 63 and two reinforcing plates 64 are provided.
  • the support plate 62 is formed in a substantially rectangular flat plate shape.
  • the support plate 62 is disposed such that the thickness direction of the support plate 62 coincides with the vertical direction.
  • the length of the support plate 62 in the front-rear direction is longer than the length of the base plate 57 in the front-rear direction.
  • the width in the left-right direction of the support plate 62 is narrower than the distance between the two rail fixing plates 58 in the left-right direction.
  • the support plate 62 is formed with a notch 62 a that is cut out toward the rear side from the front end of the support plate 62. Further, in the support plate 62, one substantially rectangular through hole 62b penetrating the support plate 62 in the vertical direction is formed (see FIG. 6).
  • the through hole 62b is disposed on the rear side of the notch 62a.
  • the rail fixing plate 61 is formed in a rectangular flat plate shape elongated in the front-rear direction.
  • the rail fixing plate 61 is disposed such that the thickness direction of the rail fixing plate 61 matches the left-right direction.
  • the rail fixing plate 61 is fixed to the upper surface of the support plate 62. Further, each of the two rail fixing plates 61 is fixed to each of both end sides of the support plate 62 in the left-right direction.
  • the two rail fixing plates 61 are disposed on the inner side in the left-right direction of the two rail fixing plates 58.
  • the length of the rail fixing plate 61 in the front-rear direction is longer than the length of the support plate 62 in the front-rear direction.
  • the front end of the rail fixing plate 61 is disposed at the same position as the front end of the support plate 62 in the front-rear direction, and the rear end of the rail fixing plate 61 is disposed behind the rear end of the support plate 62.
  • the base plate 63 is formed in a rectangular flat plate shape, and is disposed such that the thickness direction of the base plate 63 matches the front-rear direction.
  • the base plate 63 is fixed to the rear end portion of the lower surface of the support plate 62.
  • the reinforcing plate 64 is a reinforcing rib for securing the fixing strength between the support plate 62 and the base plate 63.
  • the reinforcing plate 64 is formed in a substantially isosceles trapezoidal flat plate shape, and is arranged such that the thickness direction of the reinforcing plate 64 matches the left-right direction.
  • the rear end surface of the reinforcing plate 64 is fixed to the front surface of the base plate 63, and the upper end surface of the reinforcing plate 64 is fixed to the lower surface of the support plate 62.
  • the illustration of the two reinforcing plates 64 is omitted.
  • the slide mechanism 43 is a so-called double slide rail, and as shown in FIG. 9 and FIG. 10, the first rail 67 fixed to the rail fixing plate 61 and the first rail to be able to slide in the front and rear direction A second rail 68 held at 67 and a third rail 69 held by the second rail 68 and fixed to the rail fixing plate 58 so as to be slidable in the front-rear direction. Ball bearings are disposed between the first rail 67 and the second rail 68 and between the second rail 68 and the third rail 69.
  • the first rail 67 in this embodiment is a fixed side rail fixed to the support frame 42
  • the third rail 69 is a movable side rail fixed to the base member 41.
  • the slide mechanism 43 may be a single slide rail.
  • the length (length in the front-rear direction) of the second rail 68 is slightly longer than the length of the third rail 69.
  • the length of the first rail 67 is about twice that of the second rail 68.
  • the first rail 67 is fixed to the right side surface of the rail fixing plate 61 disposed on the right side, and is fixed to the left side surface of the rail fixing plate 61 disposed on the left side.
  • the third rail 69 is fixed to the left side surface of the rail fixing plate 58 disposed on the right side, and is fixed to the right side surface of the rail fixing plate 58 disposed on the left side. Further, the third rail 69 is fixed to the rear end of the rail fixing plate 58.
  • the lock mechanism 44 includes a stopper 70 for restricting the rearward movement of the base member 41, a roller 71 in contact with the lock plate 60, and a lever for rotatably holding the roller 71 at one end.
  • a member 72 and a holding member 73 for rotatably holding the other end side of the lever member 72 are provided.
  • the stopper 70 is formed in a thick disk shape, and is arranged such that the thickness direction of the stopper 70 coincides with the front-rear direction.
  • the stopper 70 is formed of, for example, rubber.
  • the stopper 70 is fixed to the fixing member 74.
  • the fixing member 74 is fixed to the left end side of the rear end of the support plate 62.
  • the stopper 70 is disposed above the support plate 62 and below the base plate 57. In addition, the stopper 70 is disposed immediately to the right of the rail fixing plate 61 disposed on the left side. A flat contact plate 75 in contact with the front end surface of the stopper 70 is fixed to the left end side of the rear end portion of the lower surface of the base plate 57 (see FIG. 9).
  • the holding member 73 is fixed to the rear end side and the right end side of the upper surface of the support plate 62.
  • the front end portion of the lever member 72 is held by the holding member 73 so as to be able to turn in the lateral direction as the axial direction of the turn.
  • the roller 71 is held at the rear end portion of the lever member 72 so as to be rotatable with the left and right direction as the axial direction of rotation.
  • the lever member 72 is biased upward by a compression coil spring 76 (see FIG. 6) disposed behind the rotation center of the lever member 72. That is, the lever member 72 is biased in the counterclockwise direction (counterclockwise direction) in FIG. 8 by the biasing force of the compression coil spring 76.
  • the lock mechanism 45 includes the stopper 70, the roller 71, the lever member 72, and the holding member 73.
  • the stopper 70 regulates the forward movement of the base member 41.
  • the stopper 70 is fixed to the fixing member 77, and the fixing member 77 is fixed to the front end side and the left end side of the upper surface of the support plate 62.
  • the front surface of the contact plate 75 contacts the rear end surface of the stopper 70.
  • the holding member 73 is fixed to the front end side and the right end side of the upper surface of the support plate 62.
  • the rear end portion of the lever member 72 is held by the holding member 73 so as to be able to turn in the lateral direction as the axial direction of rotation, and the roller 71 can rotate in the lateral direction as the axial direction of rotation. It is hold
  • the lever member 72 is biased upward by a compression coil spring 76 disposed on the front side of the pivoting center of the lever member 72. That is, the lever member 72 is biased in the clockwise direction (clockwise direction) in FIG. 8 by the biasing force of the compression coil spring 76.
  • the front end of the tray 4 mounted on the mounting plate 40, the front end of the mounting plate 40, and the front end of the base plate 57 are disposed behind the front end of the side plate 38, and the base member 41 has a locking mechanism.
  • the reverse limit position (position shown by the solid line in FIG. 5, FIG. 6, FIG. 8) locked by 44, the rear end of the tray 4 mounted on the mounting plate 40, the rear end of the mounting plate 40 and the base plate
  • the rear end of 57 is disposed forward of the front end of the side plate 38, and can slide in the longitudinal direction between the forward limit position (the position shown by the two-dot chain line in FIG. 8) where the base member 41 is locked by the lock mechanism 45 It has become.
  • the transport of the liquid crystal panel 2 by the robot 11 is performed when the base member 41 is at the retracted limit position.
  • the tray 4 in the stacked state in which the liquid crystal panel 2 before the inspection is accommodated and the tray 4 in the state mounted on the mounting plate 40 is The base plate 57 is placed.
  • the front end surface of the stopper 70 of the lock mechanism 44 and the rear surface of the contact plate 75 lightly contact or face each other through a slight gap. . Further, when the base member 41 is disposed at the retracted limit position, the inclined surface 60 a of the lock plate 60 and the roller 71 of the lock mechanism 44 are in contact with each other. Therefore, movement of the base member 41 in the front-rear direction is restricted. When the base member 41 is disposed at the forward limit position, the rear end surface of the stopper 70 of the lock mechanism 45 and the front surface of the contact plate 75 are in slight contact or face each other through a slight gap. . In addition, when the base member 41 is disposed at the forward limit position, the inclined surface 60 b of the lock plate 60 and the roller 71 of the lock mechanism 45 are in contact with each other. Therefore, movement of the base member 41 in the front-rear direction is restricted.
  • the inclined surface 60 b of the lock plate 60 contacts the roller 71 of the lock mechanism 44 when the base member 41 moves backward toward the retracted limit position. Thereafter, when the base member 41 moves further backward, the lever member 72 rotates clockwise in FIG. 8 against the biasing force of the compression coil spring 76, and the rear end portion of the lock plate 60 rides over the roller 71. When the rear end of the lock plate 60 passes over the roller 71, the lever member 72 rotates counterclockwise in FIG. 8 by the biasing force of the compression coil spring 76, and the inclined surface 60a of the lock plate 60 contacts the roller 71. .
  • the inclined surface 60 a of the lock plate 60 contacts the roller 71 of the lock mechanism 45 when the base member 41 moves forward toward the forward movement limit position. Thereafter, when the base member 41 moves further to the front side, the lever member 72 pivots counterclockwise in FIG. 8 against the biasing force of the compression coil spring 76, and the front end portion of the lock plate 60 rides over the roller 71. When the front end portion of the lock plate 60 passes over the roller 71, the lever member 72 rotates clockwise in FIG. 8 by the biasing force of the compression coil spring 76, and the inclined surface 60b of the lock plate 60 contacts the roller 71.
  • the tray placement unit 6 is provided with a sensor 79 for detecting that the base member 41 is at the reverse limit position (see FIG. 6).
  • the sensor 79 is a proximity sensor, and is fixed to the right end side of the rear end portion of the upper surface of the support plate 62 via a fixing member.
  • a bolt 80 detected by a sensor 79 is fixed to the rear end of the base plate 57 (see FIG. 6).
  • the tray placement portion 6 is the two rear side plates 81 disposed immediately behind the left and right ends of the tray 4 placed on the placement plate 40. Is equipped.
  • the rear side plate 81 is fixed to the side plate 38.
  • the tray placement portion 6 is provided with a roller 82 for supporting the base member 41 moving toward the forward limit position from the lower side.
  • the roller 82 is held by the fixing member 83 so as to be able to rotate with the left and right direction as the axial direction of rotation.
  • the fixing member 83 is fixed to the main body frame installed on the gantry 14.
  • the rollers 82 are disposed on the left and right ends, respectively. Further, the roller 82 is disposed at substantially the same position as the holding member 73 of the lock mechanism 45 in the front-rear direction.
  • the roller 82 contacts the lower surface of the rail fixing plate 58 to support the rail fixing plate 58 from the lower side.
  • the elevating mechanism 46 engages with the motor 84, a screw member connected to the output shaft of the motor 84 through the coupling 85, and the screw member and is fixed to the rear surface of the base plate 63.
  • the motor 84 is, for example, an AC induction motor, and is capable of adjusting the speed of the motor 84.
  • the motor 84 is fixed to a support plate 87 formed in a flat plate shape.
  • the support plate 87 is fixed to the gantry 14. Further, the back side plate 39 is fixed to the support plate 87.
  • the screw member is rotatably held by the support plate 87.
  • the guide mechanism 86 includes, for example, a guide rail fixed to the support plate 87, and a guide block engaged with the guide rail and fixed to the base plate 63.
  • the motor 84 may be a servomotor.
  • the pin cylinder 50 is an air cylinder.
  • the pin cylinder 50 includes a movable pin 89 moving with compressed air as a drive source, and a cylinder body movably holding the movable pin 89 (see FIGS. 11A and 11B).
  • the tray placement unit 6 includes four pin cylinders 50.
  • the cylinder bodies of two of the four pin cylinders 50 are fixed to the side plate 38 disposed on the left side through a predetermined member, and the cylinder bodies of the remaining two pin cylinders 50 are as follows: It is being fixed to the side plate 38 arrange
  • the cylinder body of one of the two pin cylinders 50 fixed to the left side plate 38 is fixed to the front end of the side plate 38, and the cylinder body of the other pin cylinder 50 is positioned behind the side plate 38. It is fixed to the end.
  • the cylinder body of one of the two pin cylinders 50 fixed to the right side plate 38 is fixed to the front end of the side plate 38, and the cylinder body of the other pin cylinder 50 is positioned behind the side plate 38. It is fixed to the end.
  • the pin cylinder 50 fixed to the front end of the left side plate 38 and the pin cylinder 50 fixed to the front end of the right side plate 38 are disposed at the same position in the front-rear direction and fixed to the rear end of the left side plate 38
  • the pin cylinder 50 and the pin cylinder 50 fixed to the rear end of the right side plate 38 are disposed at the same position in the front-rear direction.
  • the pin cylinder 50 is disposed such that the moving direction of the movable pin 89 matches the left-right direction. Further, the two pin cylinders 50 fixed to the left side plate 38 are disposed such that the movable pin 89 protrudes toward the right side, and the two pin cylinders 50 fixed to the right side plate 38 are the left side The movable pin 89 is disposed so as to project toward the end. The four movable pins 89 are disposed above the upper end surface of the side plate 38.
  • the movable pins 89 are disposed at the uppermost stage and the second tray from the top in order to separate the tray 4 disposed at the uppermost stage and the tray 4 disposed second from the upper side. And (see FIGS. 12 (B) and (C)). Specifically, the movable pin 89 is inserted between the ridge 4 a of the tray 4 disposed at the top and the ridge 4 a of the tray 4 disposed second from the top. Further, in the present embodiment, the four movable pins 89 can support the tray 4 disposed at the top from the lower side. That is, the movable pins 89 are disposed at four positions so as to support the tray 4 disposed at the uppermost stage from the lower side.
  • the sensors 51 to 53 are transmission type optical sensors, and include a light emitting unit 91 and a light receiving unit 92.
  • the sensor 52 is disposed above the sensor 53, and the sensor 51 is disposed above the sensor 52. Also, for example, the sensor 52 is disposed on the front side of the sensor 51, and the sensor 53 is disposed on the rear side of the sensor 51.
  • the light emitting units 91 of the sensors 51 to 53 are fixed to, for example, a side plate 38 disposed on the left via a predetermined member, and the light receiving units 92 of the sensors 51 to 53 are predetermined members on the side plate 38 disposed on the right It is fixed through.
  • the light emitting unit 91 and the light receiving unit 92 are disposed to face each other in the left-right direction.
  • the light emitting unit 91 and the light receiving unit 92 are disposed above the upper end surface of the side plate 38.
  • the sensors 51 to 53 may be reflection type optical sensors.
  • the sensor 51 is a sensor for detecting the upper limit position of the uppermost tray 4, and the sensor 53 is the upper limit of the uppermost tray 4 of the stacked trays 4 lifted by the lifting mechanism 46. It is a sensor for stopping at position.
  • the motor 84 decelerates and the uppermost tray 4 is detected by the sensor 51. Then, the motor 84 is stopped.
  • the movable pin 89 When the uppermost tray 4 is stopped at the upper limit position, as shown in FIG. 12A, the movable pin 89 is lower than the ridge portion 4a of the uppermost tray 4 and upper Between the ridge 4a of the uppermost tray 4 and the ridge 4a of the second tray 4 from the top.
  • the movable pin 89 can be inserted. That is, the sensor 51 of this embodiment detects the uppermost tray 4 at a position where the movable pin 89 can be inserted between the uppermost tray 4 and the second tray 4 from the top. It is also a sensor of
  • the pin cylinder 50 when the uppermost tray 4 is stopped at the upper limit position, the pin cylinder 50 operates to cause the movable pin 89 to project, and as shown in FIG. 12B, the uppermost tray 4 and the top 2
  • the movable pin 89 is inserted between the second tray 4 and the second tray 4.
  • the lifting mechanism 46 is configured to stack the stacked trays 4 (stages as shown in FIG. 12C).
  • the stacked trays 4) are lowered to support the uppermost tray 4 on the movable pin 89, and form a gap between the uppermost tray 4 and the second tray 4 from the top.
  • the uppermost tray 4 When the uppermost tray 4 is supported by the movable pin 89, the uppermost tray 4 is also slightly lowered. The uppermost tray 4 slightly lowered falls out of the detection range of the sensor 51.
  • the sensor 52 is disposed at a position where it can detect the slightly lowered top tray 4, and the top tray 4 slightly lowered when supported by the movable pin 89 is a sensor Detected by 52. That is, the sensor 52 is a sensor for detecting the uppermost tray 4 supported by the movable pin 89.
  • the cylinder 47 is an air cylinder with a guide.
  • the cylinder 47 is disposed on the front side of the front end of the tray 4 when the base member 41 is in the retracted limit position.
  • the cylinder 47 is disposed on the front side of the uppermost tray 4 disposed at the upper limit position when the base member 41 is in the retracted limit position.
  • the cylinder 47 is fixed to the main body frame of the tray placement unit 6 via a predetermined member.
  • the cylinder 47 is disposed such that the rod of the cylinder 47 protrudes rearward.
  • a pressing member 93 is fixed to the front end (rear end) of the rod of the cylinder 47 in contact with the front end surface of the uppermost tray 4 disposed at the upper limit position to push the tray 4 backward.
  • the cylinder 47 when the base member 41 is at the retracted limit position and the uppermost tray 4 is disposed at the upper limit position, the cylinder 47 operates and the pressing member 93 operates the uppermost tray 4.
  • the inclined surfaces 4b of some of the trays 4 disposed on the lower side are in contact with the pins 56 fixed to the mounting plate 40, and in the horizontal direction (front and rear direction and left and right direction)
  • the trays 4 in the stacked state are positioned with respect to the mounting plate 40.
  • the cylinder 47, the pressing member 93 and the pin 56 constitute a positioning mechanism 94 for positioning the tray 4 in the horizontal direction with respect to the mounting plate 40.
  • the tray placement unit 9 does not include the placement plate 40, the base member 41, the slide mechanism 43, and the lock mechanisms 44 and 45.
  • the support frame 42 of the tray arranging unit 9 is a mounting plate on which the tray 4 arranged at the bottom of the trays 4 arranged in the tray arranging unit 9 is mounted.
  • the mounting plate 95 is formed in the same manner as the mounting plate 40. Pins 56 for positioning the tray 4 in the horizontal direction are fixed to two corners of the rear end side of the mounting plate 95.
  • the fixing plate 96 is formed in a rectangular flat plate shape that is elongated in the front-rear direction, and is arranged such that the thickness direction of the fixing plate 96 matches the left-right direction.
  • the two fixing plates 96 are disposed in the state of being spaced apart in the left-right direction.
  • the lower surface of the mounting plate 95 is fixed to the upper end surface of the fixing plate 96.
  • the base plate 97 is formed in a rectangular flat plate shape, and is arranged such that the thickness direction of the base plate 97 coincides with the front-rear direction.
  • the rear end surface of the fixing plate 96 is fixed to the front surface of the base plate 97, and the lower surface of the rear end portion of the mounting plate 95 is fixed to the upper end surface of the base plate 97.
  • a nut member constituting a part of the elevating mechanism 46 and a guide block constituting a part of the guide mechanism 86 are fixed.
  • the reinforcing plate 98 is a reinforcing rib for securing the fixing strength between the mounting plate 95 and the base plate 97.
  • the reinforcing plate 98 is formed in a rectangular flat plate shape that is elongated in the vertical direction, and is arranged such that the thickness direction of the reinforcing plate 98 matches the left-right direction.
  • the rear end surface of the reinforcing plate 98 is fixed to the front surface of the base plate 97, and the upper end surface of the reinforcing plate 98 is fixed to the lower surface of the mounting plate 95.
  • the tray placement unit 9 includes two pin cylinders 50.
  • one pin cylinder 50 of the two pin cylinders 50 is fixed to the front end of the side plate 38 disposed on the left side through a predetermined member, and the remaining one pin cylinder
  • the reference numeral 50 is fixed to the front end of the side plate 38 disposed on the right side via a predetermined member.
  • the two pin cylinders 50 are disposed at the same position in the front-rear direction.
  • the pin cylinder 50 fixed to the left side plate 38 is disposed such that the movable pin 89 protrudes toward the right side, and the pin cylinder 50 fixed to the right side plate 38 is movable pin 89 toward the left side. Are arranged to protrude.
  • the movable pin 89 is the ridge portion 4a of the tray 4 disposed at the top to separate the tray 4 disposed at the top and the tray 2 disposed second from the top. And the ridge 4a of the tray 4 disposed second from the top.
  • the two movable pins 89 can not support the tray 4 disposed at the top from the lower side.
  • the tray placement unit 9 does not include the sensors 52 and 53, but includes the sensor 51 for detecting the upper limit position of the uppermost tray 4.
  • the motor 84 is stopped at a position where the uppermost tray 4 is detected by the sensor 51.
  • the tray placement units 7 and 8 also include the sensor 51, the sensors 52 and 53 are not included, and even in the tray placement units 7 and 8, the uppermost tray 4 is detected by the sensor 51.
  • the motor 84 stops at the detected position.
  • the movable pin 89 when the uppermost tray 4 is stopped at the upper limit position, the movable pin 89 is lower than the ridge portion 4a of the uppermost tray 4 and is second from the top
  • the movable pin 89 is disposed between the ridge 4a of the uppermost tray 4 and the ridge 4a of the tray 4 disposed second from the top, which is disposed above the ridge 4a of the tray 4 to be disposed. It is possible to insert it.
  • the uppermost tray 4 and the second tray 4 from the top are in contact with each other, and no gap is formed between the two trays 4.
  • the empty tray 4 in which the liquid crystal panel 2 is not accommodated Supplied to Specifically, for example, empty trays 4 stacked in five tiers are manually placed by the operator from the left side of tray placement unit 9 on placement plate 95 of tray placement unit 9 by a manual operation. .
  • the empty trays 4 in the stacked state are placed on the mounting plate 95 of the tray arrangement portion 9, in the tray arrangement portion 9, the trays in the stacked state are detected at the position where the uppermost tray 4 is detected by the sensor 51.
  • the elevating mechanism 46 raises and lowers the tray 4 so that 4 stops.
  • the empty trays 4 in the stacked state may be placed on the placement plate 95 of the tray placement unit 9 from the front side of the tray placement unit 9.
  • the pin cylinder 50 operates to insert the movable pin 89 between the ridge portion 4 a of the uppermost tray 4 and the ridge portion 4 a of the tray 4 disposed second from the top.
  • the robot 12 holds and lifts the uppermost tray 4 of the tray arrangement unit 9, conveys the tray 4 to the tray arrangement unit 7, and places the tray 4 on the placement plate 40 of the tray arrangement unit 7.
  • the base member 41 of the tray placement unit 7 is placed at the reverse limit position.
  • the support frame 42 of the tray placement unit 7 is elevated to a predetermined position.
  • the lifting mechanism 46 in the tray placement unit 7 stops the tray 4 at a position where the tray 4 is detected by the sensor 51.
  • the tray 4 is moved up and down.
  • the cylinder 47 operates to position the empty tray 4 in the front, rear, left, and right directions.
  • the pin cylinder 50 operates to retract the protruding movable pin 89.
  • the elevating mechanism 46 is configured to stop the stacked tray 4 at a position where the uppermost tray 4 in the stacked trays 4 remaining in the tray arrangement unit 9 is detected by the sensor 51. Move 4 up and down.
  • the pin cylinder 50 operates to insert the movable pin 89 between the ridge portion 4 a of the uppermost tray 4 and the ridge portion 4 a of the tray 4 disposed second from the top.
  • the robot 12 holds and lifts the uppermost tray 4 of the tray arrangement unit 9, conveys the tray 4 to the tray arrangement unit 8, and places the tray 4 on the placement plate 40 of the tray arrangement unit 8.
  • the base member 41 of the tray placement unit 8 is placed at the reverse limit position. Further, the support frame 42 of the tray placement unit 8 is elevated to a predetermined position.
  • the lifting mechanism 46 in the tray placement unit 8 stops the tray 4 at a position where the tray 4 is detected by the sensor 51.
  • the tray 4 is moved up and down.
  • the cylinder 47 operates to position the empty tray 4 in the front, rear, left, and right directions.
  • the pin cylinder 50 operates to retract the protruding movable pin 89.
  • the elevating mechanism 46 is configured to stop the stacked tray 4 at a position where the uppermost tray 4 in the stacked trays 4 remaining in the tray arrangement unit 9 is detected by the sensor 51. Move 4 up and down.
  • the stacked tray 4 in which the liquid crystal panel 2 before inspection is accommodated is supplied to the tray arrangement portion 6 Be done.
  • the support frame 42 is lowered to the lower limit position, and the operator manually moves the base member 41 to the advanced limit position.
  • the tray 4 in the stacked state and placed on the placement plate 40 is placed on the base plate 57 of the tray arrangement portion 6 together with the placement plate 40 by the operator.
  • the number of trays 4 supplied to the tray placement unit 6 is, for example, at most 30.
  • the tray placement unit 6 is provided with a sensor for detecting the lower limit position of the support frame 42.
  • the tray placement units 7 and 8 also include a sensor for detecting the lower limit position of the support frame 42.
  • the elevating mechanism 46 raises the tray 4 so that the stacked trays 4 stop at a position where the uppermost tray 4 is detected by the sensor 51.
  • the cylinder 47 operates to position the stacked trays 4 in the front, rear, left, and right directions.
  • the pin cylinder 50 operates to insert the movable pin 89 between the ridge 4a of the uppermost tray 4 and the ridge 4a of the tray 4 disposed second from the top.
  • the lifting mechanism 46 lowers the stacked trays 4 so that the movable pin 89 supports the uppermost tray 4, and the uppermost tray 4 and the second tray 4 from the top Form a gap between them.
  • An empty tray 4 is placed on the placement plate 40 of the tray placement units 7 and 8, and in the tray placement unit 6, a gap is formed between the uppermost tray 4 and the tray 4 disposed second from the top.
  • the robot 11 transports the liquid crystal panel 2 in the tray 4 disposed at the top of the tray placement unit 6 to the inspection apparatus 3. That is, the robot 11 is disposed at the uppermost stage of the tray arrangement portion 6 in a state where a gap is formed between the tray 4 disposed at the uppermost stage and the tray 4 disposed second from the top.
  • the liquid crystal panel 2 in the above is held and lifted, and conveyed to the inspection device 3. Specifically, the panel holding portion 28 a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2 and conveys it to the inspection device 3.
  • the robot 11 places the liquid crystal panel 2 after inspection from the inspection apparatus 3 in the tray 4 disposed at the top of the tray placement unit 7 or in the tray 4 disposed at the top of the tray placement unit 8. Transport and store. Specifically, the robot 11 transports and accommodates the liquid crystal panel 2 determined to be normal in the inspection by the inspection device 3 to the tray 4 disposed at the top of the tray arrangement unit 7 and stores the liquid crystal panel 2 in the inspection device 3. The liquid crystal panel 2 determined to be abnormal in the inspection is conveyed to and stored in the tray 4 disposed at the top of the tray placement unit 8.
  • the robot 12 conveys the empty tray 4 from the tray arranging unit 6 to the tray arranging unit 9 and arranges Do. That is, the robot 12 holds and lifts the tray 4 that has become empty, and conveys it from the tray arrangement unit 6 to the tray arrangement unit 9 to place the stacked trays 4 arranged in the tray arrangement unit 9. Pile up.
  • the stacked trays 4 stop at a position where the uppermost tray 4 arranged in the tray arranging unit 9 is detected by the sensor 51.
  • the lifting mechanism 46 raises and lowers the tray 4.
  • the pin cylinder 50 operates to retract the protruding movable pin 89.
  • the elevating mechanism 46 is configured to stop the stacked tray 4 at a position where the uppermost tray 4 in the stacked trays 4 remaining in the tray arrangement unit 6 is detected by the sensor 51. Raise 4
  • the pin cylinder 50 operates to insert the movable pin 89 between the ridge 4a of the uppermost tray 4 and the ridge 4a of the tray 4 disposed second from the top.
  • the lifting mechanism 46 lowers the stacked trays 4 so that the movable pin 89 supports the uppermost tray 4, and the uppermost tray 4 and the second tray 4 from the top Form a gap between them.
  • the robot 11 transports the liquid crystal panel 2 in the tray 4 disposed at the top of the tray placement unit 6 to the inspection apparatus 3. Further, when the liquid crystal panels 2 in the trays 4 arranged in the tray arranging unit 6 are sequentially conveyed to the inspection device 3 and all the trays 4 in the tray arranging unit 6 are conveyed to the tray arranging unit 9, the inspection is performed.
  • the stacked trays 4 in which the front liquid crystal panels 2 are accommodated are supplied to the tray placement unit 6 as described above.
  • the robot 12 conveys the empty tray 4 from the tray placement unit 9 to the tray placement unit 7 and stacks it on the uppermost tray 4 of the tray placement unit 7. That is, the robot 12 holds and lifts the empty tray 4 at the uppermost stage of the tray arrangement unit 9 and conveys it from the tray arrangement unit 9 to the tray arrangement unit 7 and overlaps the tray 4 of the tray arrangement unit 7 .
  • the elevating mechanism 46 is stopped so that the stacked trays 4 stop at a position where the uppermost tray 4 which is the carried-in tray 4 is detected by the sensor 51. Raises and lowers the tray 4. Thereafter, the robot 11 conveys the liquid crystal panel 2 from the inspection device 3 into the tray 4 disposed at the top of the tray placement unit 7.
  • the robot 12 transfers the tray arranging unit 9 to the tray arranging unit 8.
  • the empty tray 4 is conveyed and stacked on the uppermost tray 4 of the tray arrangement unit 8. That is, the robot 12 holds and lifts the empty tray 4 at the uppermost stage of the tray arrangement unit 9 and conveys it from the tray arrangement unit 9 to the tray arrangement unit 8 and overlaps the tray 4 of the tray arrangement unit 8 .
  • the elevating mechanism 46 is stopped so that the stacked trays 4 stop at a position where the uppermost tray 4 which is the carried-in tray 4 is detected by the sensor 51. Raises and lowers the tray 4. Thereafter, the robot 11 conveys the liquid crystal panel 2 from the inspection device 3 into the tray 4 disposed at the top of the tray placement unit 8.
  • the tray arranging unit 7 when the trays 4 accommodating the predetermined number of liquid crystal panels 2 are stacked in a predetermined number of stages, the stacked trays 4 are taken out from the tray arranging unit 7.
  • the support frame 42 is lowered to the lower limit position, and the operator manually moves the base member 41 to the advanced limit position.
  • the stacked trays 4 placed on the placement plate 40 of the tray placement unit 7 are lifted from the base plate 57 together with the placement plate 40 by a manual operation by a worker and taken out on the front side. That is, the stacked trays 4 are taken out from the tray arrangement unit 7 on the front side.
  • the tray placement unit 7 is provided with a sensor for detecting that the trays 4 have been stacked in a predetermined number of stages.
  • the tray placement unit 7 When the stacked trays 4 are taken out from the tray placement unit 7 together with the placement plate 40, another placement plate 40 is manually placed on the base plate 57 of the tray placement unit 7. Thereafter, in the tray placement unit 7, the operator manually moves the base member 41 to the retracted limit position. Thereafter, in the tray placement unit 7, the lifting mechanism 46 lifts the support frame 42 to a predetermined position. Thereafter, the robot 12 conveys the uppermost tray 4 of the tray placement unit 9 to the tray placement unit 7 and places the tray 4 on the placement plate 40 of the tray placement unit 7. When the empty tray 4 is placed on the placement plate 40 of the tray placement unit 7, the lifting mechanism 46 in the tray placement unit 7 stops the tray 4 at a position where the tray 4 is detected by the sensor 51. The tray 4 is moved up and down.
  • tray placement unit 8 when trays 4 containing a predetermined number of liquid crystal panels 2 are stacked in a predetermined number of stages in tray disposing unit 8, trays 4 stacked from tray disposing unit 8 are taken out.
  • the support frame 42 is lowered to the lower limit position, and the operator manually moves the base member 41 to the advanced limit position.
  • the stacked trays 4 placed on the placement plate 40 of the tray placement unit 8 are taken out together with the placement plate 40 to the front side by a manual operation by a worker. That is, the stacked trays 4 are taken out from the tray arrangement unit 8 to the front side.
  • the tray placement unit 8 is provided with a sensor for detecting that the trays 4 have been stacked in a predetermined number of stages.
  • the pin cylinder 50 operates before the robot 12 carries out the tray 4 from the tray arrangement unit 9 to the tray arrangement unit 7 or the tray arrangement unit 8, and the ridge portion of the uppermost tray 4 A movable pin 89 is inserted between 4 a and the ridge 4 a of the tray 4 disposed second from the top.
  • the pin cylinder 50 operates to retract the protruding movable pin 89.
  • the elevating mechanism 46 is configured to stop the stacked tray 4 at a position where the uppermost tray 4 in the stacked trays 4 remaining in the tray arrangement unit 9 is detected by the sensor 51. Move 4 up and down.
  • the cassette 5 containing the liquid crystal panel 2 before inspection is supplied to the cassette placement unit 13.
  • the robot 11 transports the liquid crystal panel 2 in the cassette 5 to the inspection device 3, and the liquid crystal panel 2 after inspection from the inspection device 3 is placed in the tray 4 or the tray disposed at the uppermost stage of the tray arrangement portion 7.
  • the sheet is conveyed and accommodated in the tray 4 disposed at the uppermost stage of the placement unit 8.
  • the tray arranging unit 6 includes the mounting plate 40 on which the stacked trays 4 are mounted, and the base member 41 on which the mounting plate 40 is detachably mounted.
  • the mounting plate 40 on which the stacked trays 4 are mounted
  • the base member 41 on which the mounting plate 40 is detachably mounted Have. Therefore, in the present embodiment, as described above, when the stacked trays 4 placed on the placement plate 40 are placed on the base member 41 together with the placement plate 40, the placement on the placement plate 40 is performed.
  • the stacked trays 4 can be supplied to the tray arrangement portion 6 together with the mounting plate 40.
  • the tray arranging portions 7 and 8 include the mounting plate 40 and the base member 41, the stacked trays 4 mounted on the mounting plate 40 are mounted as described above. Lifting from the base member 41 together with the placing plate 40 makes it possible to take out the stacked trays 4 placed on the placing plate 40 from the tray arranging portions 7 and 8 together with the placing plate 40. .
  • the stacked trays 4 placed on the placement plate 40 are placed in a tray arrangement with the placement plate 40.
  • the tray 4 in a stacked state when supplying trays 6 or taking out the stacked trays 4 placed on the mounting plate 40 from the tray arranging portions 7 and 8 together with the mounting plate 40 It is possible to suppress the deformation of the tray 4 disposed on the lower side.
  • the trays 4 in a stacked state even if the trays 4 are supplied to the tray arranging unit 6 in a stacked state, and even if the trays 4 are taken out from the tray arranging units 7 and 8 in a stacked state, the trays 4 in a stacked state It is possible to suppress the deformation of the tray 4 disposed on the lower side in the inside of the.
  • the mounting plate 40 is formed of resin. Therefore, in the present embodiment, even if the rigidity of the mounting plate 40 is higher than the rigidity of the tray 4, the weight of the mounting plate 40 can be reduced. Therefore, in the present embodiment, the supply operation for supplying the stacked trays 4 placed on the placement plate 40 to the tray arrangement unit 6 and the stacked tray 4 placed on the placement plate 40 are trays Even when the operator manually carries out the removal work to be taken out from the placement units 7 and 8, the tray 4 in the stacked state placed on the placement plate 40 is placed at the time of the supply work and the removal work. It becomes easier to lift with the board 40.
  • the tray placement unit 6 includes a slide mechanism 43 that slides the base member 41 with respect to the support frame 42. Therefore, in the present embodiment, with the base member 41 being slid to the forward limit position where the rear end of the base plate 57 is disposed on the front side of the front end of the side plate 38, It can be placed on the base plate 57 together. Therefore, in the present embodiment, it is possible to easily perform the supply operation of the stacked trays 4. Further, in the present embodiment, since the tray arranging parts 7 and 8 are provided with the slide mechanism 43, the rear end of the tray 4 placed on the placing plate 40 and the rear end of the placing plate 40 are from the front end of the side plate 38.
  • the tray 4 in the stacked state can be lifted from the base member 41 together with the mounting plate 40 in a state in which the base member 41 is slid to the forward limit position disposed on the front side. Therefore, in the present embodiment, it is possible to easily carry out the work of taking out the stacked trays 4.
  • the tray arranging portions 6 to 8 have a locking mechanism 44 for locking the base member 41 at the rear end side of the sliding direction of the base member 41 with respect to the support frame 42 and a sliding direction of the base member 41 with respect to the support frame 42 And a lock mechanism 45 for locking the base member 41 on the front end side of Therefore, in the present embodiment, even if the base member 41 is slidable with respect to the support frame 42, the base member 41 is stabilized so that the base member 41 does not move at both ends in the sliding direction of the base member 41. Becomes possible.
  • the tray arranging units 6 to 9 include an elevating mechanism 46 for moving the tray 4 up and down, and a sensor 51 for detecting the upper limit position of the uppermost tray 4. Therefore, in the present embodiment, it is possible to keep the vertical position of the uppermost tray 4 of the tray arranging parts 6 to 9 constant. Therefore, in the present embodiment, the control of the robots 11 and 12 is performed in comparison with the case where the position of the uppermost tray 4 in the vertical direction fluctuates according to the number of stages of the trays 4 arranged in the tray arranging portions 6 to 9. It becomes possible to simplify.
  • the tray arrangement unit 6 since the tray arrangement unit 6 includes the lifting mechanism 46, the tray 4 in a stacked state is placed on the base member 41 together with the mounting plate 40 in a state in which the base member 41 is lowered to the lower limit position. Can be placed on Further, since the tray arranging parts 7 and 8 are provided with the lifting mechanism 46, the tray 4 in a stacked state is lifted from the base member 41 together with the mounting plate 40 in a state where the base member 41 is lowered to the lower limit position. be able to. Therefore, in the present embodiment, it is possible to easily perform the supply operation and the removal operation of the stacked trays 4.
  • the tray placement unit 6 includes a positioning mechanism 94 for positioning the tray 4 in the horizontal direction with respect to the placement plate 40. Therefore, in the present embodiment, for example, when the stacked trays 4 are placed on the base member 41 together with the loading plate 40, even if the stacked trays 4 are shifted with respect to the loading plate 40, It is possible to move the stacked trays 4 to the normal position with respect to the mounting plate 40. Therefore, in the present embodiment, it is possible to accurately hold the predetermined portion of the liquid crystal panel 2 accommodated in the uppermost tray 4 of the tray arrangement portion 6 by the robot 11. Further, in the present embodiment, since the tray arranging units 7 and 8 are provided with the positioning mechanism 94, the liquid crystal panel 2 is accurately carried by the robot 11 to a predetermined position of the uppermost tray 4 of the tray arranging units 7 and 8. It becomes possible.
  • the mounting plate 40 may be formed of metal.
  • the mounting plate 40 may be formed of a relatively lightweight metal such as an aluminum alloy.
  • the rigidity of the mounting plate 40 can be further enhanced, so that deformation of the tray 4 disposed below the stacked trays 4 can be effectively suppressed.
  • the supply of the tray 4 to the tray arranging units 6 and 9 may be automatically performed using a robot or the like, and the removal of the tray 4 from the tray arranging units 7 and 8 is a robot It may be performed automatically using an alarm.
  • the tray arranging units 6 to 9 of at least one of the tray arranging units 6 to 9 may not be provided with the elevating mechanism 46. Further, in the embodiment described above, the tray placement units 6 to 8 may not have the lock mechanisms 44 and 45, may not have the slide mechanism 43, and may not have the positioning mechanism 94. good. Further, in the embodiment described above, the transport system 1 may not include the cassette placement unit 13.
  • the tray arrangement unit 9, the tray arrangement unit 6, the tray arrangement unit 7, and the tray arrangement unit 8 are arranged in this order from left to right, but how is the tray arrangement units 6 to 9 You may arrange in order. Further, in the embodiment described above, the tray placement parts 6 to 9 may be randomly placed. Furthermore, in the embodiment described above, the transport system 1 may not include the tray placement unit 9. In this case, the transport system 1 may not include the robot 12.
  • the robot 11 may be a vertical articulated robot other than six axes, may be a horizontal articulated robot, or may be a three-axis orthogonal robot, or a so-called parallel link robot It may be In the embodiment described above, the robot 12 may be a three-axis orthogonal robot, a vertical articulated robot, or a horizontal articulated robot. Furthermore, in the embodiment described above, the inspection device 3 may be an inspection device other than the lighting inspection device.
  • the transport system 1 transports the liquid crystal panel 2 to the inspection device 3, but the transport system 1 is a processing device that performs predetermined processing on the liquid crystal panel 2 other than the inspection device 3
  • the liquid crystal panel 2 may be transported. That is, trays 4 in which liquid crystal panels 2 before being processed by the processing apparatus are accommodated may be arranged in a stacked state in the tray arranging section 6, or processed by the processing apparatus in the tray arranging sections 7, 8.
  • the tray 4 in which the liquid crystal panel 2 after it is stored may be arranged in a stacked state.
  • only one or two tray arranging parts 6 to 8 arbitrarily selected from the tray arranging parts 6 to 8 may be provided to the inspection apparatus 3 or the processing apparatus.
  • the display panel transported by the transport system 1 is the liquid crystal panel 2, but the display panel transported by the transport system 1 may be a display panel other than the liquid crystal panel 2.
  • the display panel transported by the transport system 1 may be an organic EL panel.
  • Transport system Liquid crystal panel (display panel) 3 inspection device 4 tray 6 tray arrangement part (supply side tray arrangement part) 7 Tray placement part (1st discharge side tray placement part) 8 Tray placement section (second discharge side tray placement section) 11 Robot (panel transfer robot) 40 mounting plate 41 base member 42 support frame 43 slide mechanism 44 lock mechanism (first lock mechanism) 45 Locking mechanism (second locking mechanism) 46 Lifting mechanism 67 1st rail (fixed side rail) 69 3rd rail (movable side rail) 94 Positioning mechanism

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract

A tray arrangement part 6 in which trays having display panels accommodated therein are arranged in a stacked state in multiple stages is provided with: a placement plate 40 on which trays arranged in the tray arrangement part 6 in a stacked state in multiple stages are placed; and a base member 41 on which the placement plate 40 is detachably placed. The rigidity of the placement plate 40 of the tray arrangement part 6 is higher than the rigidity of the trays. As a result, the tray arrangement part 6 makes it possible to minimize deformation of the trays arranged on the lower side among the trays in a stacked state.

Description

トレイ配置部および搬送システムTray placement unit and transport system
　本発明は、表示パネルが収容されるトレイが複数段に積み重なった状態で配置されるトレイ配置部に関する。また、本発明は、かかるトレイ配置部を備える搬送システムに関する。 BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a tray arrangement portion in which trays in which display panels are accommodated are arranged in a stacked manner in a plurality of stages. The present invention also relates to a transport system provided with such a tray arrangement unit.
　従来、液晶パネルを点灯検査するための検査装置が知られている（たとえば、特許文献１参照）。特許文献１に記載の検査装置は、液晶ディスプレイの製造システムの途中に組み込まれている。この検査装置は、液晶パネルの点灯検査を行うプローバと、検査前の液晶パネルをプローバに向かって搬送する搬入側コンベヤと、搬入側コンベヤで搬送された液晶パネルをプローバに搬入する搬入機構と、検査後の液晶パネルをプローバから搬出する搬出機構と、搬出機構によって搬出された液晶パネルを搬送する搬出側コンベヤとを備えている。 Conventionally, an inspection apparatus for inspecting the lighting of a liquid crystal panel is known (see, for example, Patent Document 1). The inspection apparatus described in Patent Document 1 is incorporated in the middle of a liquid crystal display manufacturing system. This inspection apparatus includes a prober for inspecting the lighting of the liquid crystal panel, a carry-in side conveyor for carrying the liquid crystal panel before the test toward the prober, and a carry-in mechanism for carrying the liquid crystal panel carried by the carry-in conveyor into the prober. It has an unloading mechanism for unloading the liquid crystal panel after inspection from the prober, and an unloading conveyor for transporting the liquid crystal panel unloaded by the unloading mechanism.
特開２００７－１０７９７３号公報JP 2007-107973 A
　特許文献１に記載の検査装置では、たとえば、所定の場所に配置されたトレイに収容される検査前の液晶パネルがロボット等によって検査装置に搬入され、検査後の液晶パネルがロボット等によって検査装置から所定の場所に配置されたトレイに搬出される。本願発明者は、検査前の液晶パネルや検査後の液晶パネルが収容されるトレイが複数段に積み重なった段積み状態で配置されるトレイ配置部の設置を検討している。また、本願発明者は、検査前の液晶パネルが収容されるトレイを段積み状態でトレイ配置部に供給すること、および、検査後の液晶パネルが収容されるトレイを段積み状態でトレイ配置部から取り出すことを検討している。 In the inspection apparatus described in Patent Document 1, for example, a liquid crystal panel before inspection stored in a tray disposed at a predetermined place is carried into the inspection apparatus by a robot or the like, and the liquid crystal panel after inspection is inspected by the robot or the like From the tray to a tray disposed at a predetermined location. The inventor of the present application is examining the installation of a tray arrangement portion in which a liquid crystal panel before inspection and a tray accommodating the liquid crystal panel after inspection are stacked in a plurality of stages. In addition, the inventor of the present invention supplies trays in which liquid crystal panels before inspection are stored in a stacked state to the tray arranging portion, and trays in which trays in which liquid crystal panels after inspection are stored are stacked. We are considering taking it out of the
　しかしながら、トレイを段積み状態でトレイ配置部に供給したり、トレイを段積み状態でトレイ配置部から取り出す場合、積み重なるトレイの段数によっては、トレイに収容される液晶パネルおよびトレイの重量の影響で、段積み状態のトレイの中の下側に配置されるトレイに大きな負荷がかかるおそれがある。また、トレイに大きな負荷がかかると、トレイが変形して、トレイに収容される液晶パネルが損傷するおそれがある。 However, when the trays are supplied in a stacked state to the tray arrangement part or taken out from the tray arrangement part in a stacked state, depending on the number of stacked trays, the weight of the liquid crystal panels and trays accommodated in the trays There is a risk that a large load may be applied to the trays disposed below the stacked trays. In addition, when a large load is applied to the tray, the tray may be deformed, and the liquid crystal panel stored in the tray may be damaged.
　そこで、本発明の課題は、表示パネルが収容されるトレイが複数段に積み重なった状態で配置されるトレイ配置部において、トレイが段積み状態でトレイ配置部に供給されたり、トレイが段積み状態でトレイ配置部から取り出されても、段積み状態のトレイの中の下側に配置されるトレイの変形を抑制することが可能なトレイ配置部を提供することにある。また、本発明の課題は、かかるトレイ配置部を備える搬送システムを提供することにある。 Therefore, it is an object of the present invention to supply trays in a stacked state to the tray arranging portion or to stack trays in a tray arranging portion in which trays accommodating display panels are arranged in a stacked state in a plurality of stages. It is an object of the present invention to provide a tray arrangement portion capable of suppressing deformation of a tray arranged at the lower side in stacked trays even when taken out from the tray arrangement portion. Another object of the present invention is to provide a transport system provided with such a tray placement unit.
　上記の課題を解決するため、本発明のトレイ配置部は、表示パネルが収容されるトレイが複数段に積み重なった状態で配置されるトレイ配置部であって、複数段に積み重なった状態でトレイ配置部に配置されるトレイが載置される載置板と、載置板が着脱可能に載置されるベース部材とを備え、載置板の剛性は、トレイの剛性よりも高くなっていることを特徴とする。 In order to solve the above-described problems, the tray arrangement portion of the present invention is a tray arrangement portion in which trays in which display panels are accommodated are arranged in a stacked manner in a plurality of stages, and are arranged in a stacked manner in a plurality of stages. And a base member on which the mounting plate is removably mounted, the rigidity of the mounting plate being higher than the rigidity of the tray It is characterized by
　本発明のトレイ配置部は、複数段に積み重なった状態（段積み状態）でトレイ配置部に配置されるトレイが載置される載置板と、載置板が着脱可能に載置されるベース部材とを備えている。そのため、本発明では、載置板に載置された段積み状態のトレイを載置板と一緒にベース部材に載置することで、載置板に載置された段積み状態のトレイを載置板と一緒にトレイ配置部に供給することが可能になる。また、載置板に載置された段積み状態のトレイを載置板と一緒にベース部材から持ち上げることで、載置板に載置された段積み状態のトレイを載置板と一緒にトレイ配置部から取り出すことが可能になる。 The tray arranging unit according to the present invention is a mounting plate on which the trays arranged in the tray arranging unit are mounted in a state of being stacked in a plurality of stages (stacked state), and a base on which the mounting plates are detachably mounted. And a member. Therefore, in the present invention, by placing the stacked trays placed on the placement plate together with the placement plate on the base member, the stacked trays placed on the placement plate are placed. It becomes possible to supply the tray arrangement with the tray. Also, by lifting the stacked trays placed on the loading plate together with the loading plate from the base member, the stacked trays loaded on the loading plate can be stacked with the loading plate. It becomes possible to take out from the arrangement part.
　また、本発明では、トレイが載置される載置板の剛性がトレイの剛性よりも高くなっているため、載置板に載置された段積み状態のトレイを載置板と一緒にトレイ配置部に供給する際や、載置板に載置された段積み状態のトレイを載置板と一緒にトレイ配置部から取り出す際に、段積み状態のトレイの中の下側に配置されるトレイの変形を抑制することが可能になる。したがって、本発明では、トレイが段積み状態でトレイ配置部に供給されたり、トレイが段積み状態でトレイ配置部から取り出されても、段積み状態のトレイの中の下側に配置されるトレイの変形を抑制することが可能になる。 Further, in the present invention, since the rigidity of the mounting plate on which the tray is mounted is higher than the rigidity of the tray, the stacked trays mounted on the mounting plate are placed together with the mounting plate. When feeding to the placement unit or when taking out the stacked trays placed on the placement plate together with the placement plate from the tray placement unit, the tray is disposed below the stacked trays. It becomes possible to suppress the deformation of the tray. Therefore, in the present invention, even if the trays are supplied to the tray arrangement portion in a stacked state or the trays are taken out from the tray arrangement portion in a stacked state, the trays arranged at the lower side in the stacked state trays. It is possible to suppress the deformation of
　本発明において、載置板は、樹脂で形成されていることが好ましい。このように構成すると、載置板の剛性がトレイの剛性より高くなっていても載置板の重量を軽減することが可能になる。したがって、たとえば、載置板に載置された段積み状態のトレイをトレイ配置部に供給する供給作業や、載置板に載置された段積み状態のトレイをトレイ配置部から取り出す取出作業を作業者が手作業で行う場合であっても、供給作業や取出作業の際に、載置板に載置された段積み状態のトレイを載置板と一緒に持ち上げやすくなる。 In the present invention, the mounting plate is preferably made of resin. According to this structure, even if the rigidity of the mounting plate is higher than the rigidity of the tray, it is possible to reduce the weight of the mounting plate. Therefore, for example, a supply operation of supplying trays stacked in a stack state placed on the mounting plate to the tray arranging portion, and a removal operation of taking out the trays stacked in a stack state mounted on the mounting plate from the tray arrangement portion Even when the operator manually performs the work, the stacked trays placed on the placement plate can be easily lifted together with the placement plate during the supply operation and the removal operation.
　本発明において、トレイ配置部は、ベース部材がスライド可能に取り付けられる支持フレームと、支持フレームに固定される固定側レールとベース部材に固定される可動側レールとを有し支持フレームに対してベース部材をスライドさせるスライド機構とを備えることが好ましい。このように構成すると、ベース部材を所定の位置までスライドさせた状態で、段積み状態のトレイを載置板と一緒にベース部材に載置することが可能になる。したがって、段積み状態のトレイの供給作業をやりやすい位置までベース部材をスライドさせることで、段積み状態のトレイの供給作業を容易に行うことが可能になる。また、このように構成すると、ベース部材に載置される載置板および段積み状態のトレイをベース部材と一緒に所定の位置までスライドさせた状態で、段積み状態のトレイを載置板と一緒にベース部材から持ち上げることが可能になる。したがって、段積み状態のトレイの取出作業をやりやすい位置まで載置板および段積み状態のトレイをベース部材と一緒にスライドさせることで、段積み状態のトレイの取出作業を容易に行うことが可能になる。 In the present invention, the tray arrangement portion has a support frame to which the base member is slidably attached, a stationary side rail fixed to the support frame, and a movable side rail fixed to the base member, the base relative to the support frame It is preferable to provide the slide mechanism which slides a member. With this configuration, it is possible to place the stacked trays on the base member together with the mounting plate in a state in which the base member is slid to a predetermined position. Therefore, by sliding the base member to a position where the supply operation of stacked trays can be easily performed, the supply operation of stacked trays can be easily performed. Further, when configured in this manner, the tray in the stacked state is set as the loading plate in a state in which the mounting plate placed on the base member and the tray in the stacked state are slid together with the base member to a predetermined position. It can be lifted together from the base member. Therefore, it is possible to easily take out the stacked trays by sliding the mounting plate and the stacked trays together with the base member to a position where the stacked trays can be easily taken out. become.
　本発明において、トレイ配置部は、支持フレームに対するベース部材のスライド方向の一端側でベース部材をロックするための第１ロック機構と、支持フレームに対するベース部材のスライド方向の他端側でベース部材をロックするための第２ロック機構とを備えることが好ましい。このように構成すると、支持フレームに対してベース部材がスライド可能となっていても、ベース部材のスライド方向の両端側で、ベース部材が動かないようにベース部材を安定させることが可能になる。したがって、支持フレームに対してベース部材がスライド可能となっていても、ベース部材のスライド方向の両端側で、ベース部材に載置される載置板および段積み状態のトレイを安定させることが可能になる。 In the present invention, the tray arrangement portion includes a first locking mechanism for locking the base member at one end side of the sliding direction of the base member with respect to the supporting frame, and a base member at the other end side of the sliding direction of the base member with respect to the supporting frame. Preferably, a second locking mechanism for locking is provided. According to this structure, even if the base member is slidable with respect to the support frame, the base member can be stabilized so that the base member does not move on both sides in the sliding direction of the base member. Therefore, even if the base member is slidable with respect to the support frame, it is possible to stabilize the loading plate placed on the base member and the tray in the stacked state at both ends in the sliding direction of the base member. become.
　本発明において、トレイ配置部は、ベース部材を昇降させる昇降機構を備えることが好ましい。このように構成すると、トレイ配置部に配置されるトレイの段数が変わっても、トレイ配置部の最上段のトレイの上下方向の位置を一定に保つことが可能になる。また、このように構成すると、たとえば、ベース部材を所定位置まで下降させた状態で、段積み状態のトレイを載置板と一緒にベース部材に載置することが可能になる。したがって、段積み状態のトレイの供給作業をやりやすい位置までベース部材を下降させることで、段積み状態のトレイの供給作業を容易に行うことが可能になる。また、このように構成すると、たとえば、ベース部材に載置される載置板および段積み状態のトレイをベース部材と一緒に所定位置まで下降させた状態で、段積み状態のトレイを載置板と一緒にベース部材から持ち上げることが可能になるため、段積み状態のトレイの取出作業がやりやすい位置までベース部材を下降させることで、段積み状態のトレイの取出作業を容易に行うことが可能になる。 In the present invention, it is preferable that the tray arrangement unit includes an elevation mechanism that raises and lowers the base member. With this configuration, even if the number of trays arranged in the tray arrangement part changes, the vertical position of the uppermost tray in the tray arrangement part can be kept constant. Also, with this configuration, for example, with the base member lowered to the predetermined position, it becomes possible to place the stacked trays on the base member together with the placement plate. Therefore, by lowering the base member to a position where the supply operation of stacked trays can be easily performed, it becomes possible to easily perform the supply operation of stacked trays. Further, when configured in this manner, for example, the tray in the stacked state is placed in a state in which the mounting plate placed on the base member and the tray in the stacked state are lowered together with the base member to a predetermined position. Because it is possible to lift from the base member together, it is possible to easily take out the stacked trays by lowering the base member to a position where the stacked trays can be easily taken out. become.
　本発明において、トレイ配置部は、載置板に対して水平方向でトレイを位置決めするための位置決め機構を備えることが好ましい。このように構成すると、たとえば、段積み状態のトレイを載置板と一緒にベース部材に載置する際に、載置板に対して段積み状態のトレイがずれても、段積み状態のトレイを載置板に対して正規の位置へ移動させることが可能になる。 In the present invention, it is preferable that the tray arrangement unit includes a positioning mechanism for positioning the tray in the horizontal direction with respect to the placement plate. According to this structure, for example, when the stacked trays are placed on the base member together with the loading plate, the stacked trays may be mounted even if the stacked trays deviate from the loading plate. Can be moved to the normal position with respect to the mounting plate.
　本発明のトレイ配置部は、表示パネルを検査する検査装置への表示パネルの搬入および検査装置からの表示パネルの搬出を行う搬送システムに用いることができる。この搬送システムは、たとえば、トレイ配置部として、検査前の表示パネルが収容されるトレイが複数段に積み重なった状態で配置される供給側トレイ配置部と、検査装置での検査で正常と判断された表示パネルが収容されるトレイが複数段に積み重なった状態で配置される第１排出側トレイ配置部と、検査装置での検査で異常と判断された表示パネルが収容されるトレイが複数段に積み重なった状態で配置される第２排出側トレイ配置部とを備えるとともに、供給側トレイ配置部の最上段に配置されるトレイの中の表示パネルを検査装置に搬送し、かつ、検査装置から検査後の表示パネルを、第１排出側トレイ配置部の最上段に配置されるトレイの中または第２排出側トレイ配置部の最上段に配置されるトレイの中に搬送するパネル搬送ロボットを備えている。この搬送システムでは、トレイが段積み状態で供給側トレイ配置部に供給されたり、トレイが段積み状態で第１排出側トレイ配置部や第２排出側トレイ配置部から取り出されても、段積み状態のトレイの中の下側に配置されるトレイの変形を抑制することが可能になる。 The tray arrangement unit of the present invention can be used in a transport system that carries in the display panel to the inspection apparatus for inspecting the display panel and carries out the display panel from the inspection apparatus. In this transport system, for example, as the tray arrangement unit, the supply side tray arrangement unit arranged in a state in which the trays containing the display panels before inspection are stacked in a plurality of stages and the inspection by the inspection apparatus The first discharge side tray arrangement section where the trays containing the display panels are stacked in a plurality of stages and the trays in which the display panels judged to be abnormal in the inspection by the inspection apparatus are accommodated in a plurality of stages And a second discharge side tray arrangement portion arranged in a stacked state, and conveying a display panel in the tray arranged at the uppermost stage of the supply side tray arrangement portion to the inspection device and inspecting the inspection device from the inspection device The panel transport roller for transporting the subsequent display panel into the tray disposed in the uppermost row of the first ejection tray arrangement portion or the tray disposed in the uppermost row of the second ejection tray arrangement portion It has a Tsu door. In this transport system, even if the trays are stacked and supplied to the supply side tray placement unit, or the trays are stacked and taken out from the first discharge side tray placement unit or the second discharge side tray placement unit, stacking is also possible. It becomes possible to suppress the deformation of the tray disposed on the lower side in the tray of the state.
　以上のように、本発明では、トレイが段積み状態でトレイ配置部に供給されたり、トレイが段積み状態でトレイ配置部から取り出されても、段積み状態のトレイの中の下側に配置されるトレイの変形を抑制することが可能になる。 As described above, according to the present invention, even if the trays are supplied in a stacked state to the tray arranging portion or the trays are taken out from the tray arranging portion in a stacked state, the trays are arranged below the stacked trays. It is possible to suppress the deformation of the tray.
本発明の実施の形態にかかる搬送システムの斜視図である。It is a perspective view of a conveyance system concerning an embodiment of the invention. 図１に示す搬送システムを上面から説明するための図である。It is a figure for demonstrating the conveyance system shown in FIG. 1 from an upper surface. 図１に示すパネル搬送ロボットの正面図である。It is a front view of the panel conveyance robot shown in FIG. 図１に示すトレイ搬送ロボットの側面図である。It is a side view of the tray conveyance robot shown in FIG. 図１に示す供給側トレイ配置部の斜視図である。It is a perspective view of the supply side tray arrangement | positioning part shown in FIG. 図５に示す供給側トレイ配置部の平面図である。It is a top view of the supply side tray arrangement | positioning part shown in FIG. 図５に示す供給側トレイ配置部の構成を正面から説明するための図である。It is a figure for demonstrating the structure of the supply side tray arrangement | positioning part shown in FIG. 5 from a front. 図５に示す供給側トレイ配置の構成を側面から説明するための図である。It is a figure for demonstrating the structure of supply side tray arrangement | positioning shown in FIG. 5 from a side. 図６に示す載置板、ベース部材、支持フレームおよびスライド機構等の構成を正面から説明するための図である。It is a figure for demonstrating the structure of the mounting plate shown in FIG. 6, a base member, a support frame, a slide mechanism, etc. from a front. 図６に示すスライド機構の動きを説明するための図である。It is a figure for demonstrating the movement of the slide mechanism shown in FIG. （Ａ）、（Ｂ）は、図５に示すピンシリンダの周辺部の正面図であり、（Ｃ）、（Ｄ）は、図５に示すセンサの周辺部の正面図である。(A), (B) is a front view of the peripheral part of the pin cylinder shown in FIG. 5, (C), (D) is a front view of the peripheral part of the sensor shown in FIG. 図５に示す供給側トレイ配置部において、最上段に配置されるトレイの分離動作を説明するための図である。FIG. 6 is a view for explaining the separation operation of the tray disposed at the uppermost stage in the supply side tray arranging unit shown in FIG. 5; 図１に示す空トレイ配置部の構成を正面から説明するための図である。It is a figure for demonstrating the structure of the empty tray arrangement | positioning part shown in FIG. 1 from a front. 図１に示す空トレイ配置部の構成を側面から説明するための図である。It is a figure for demonstrating the structure of the empty tray arrangement | positioning part shown in FIG. 1 from a side.
　以下、図面を参照しながら、本発明の実施の形態を説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　（搬送システムの全体構成）
　図１は、本発明の実施の形態にかかる搬送システム１の斜視図である。図２は、図１に示す搬送システム１を上面から説明するための図である。 (Overall configuration of transfer system)
FIG. 1 is a perspective view of a transport system 1 according to an embodiment of the present invention. FIG. 2 is a view for explaining the transport system 1 shown in FIG. 1 from the top.
　本形態の搬送システム１は、携帯機器等で使用される比較的小型の液晶ディスプレイの製造ラインに組み込まれて使用される。この搬送システム１は、表示パネルである液晶パネル２を搬送する。具体的には、搬送システム１は、液晶パネル２を検査する検査装置３への液晶パネル２の搬入および検査装置３からの液晶パネル２の搬出を行う。液晶パネル２は、長方形の平板状に形成されている。 The transport system 1 of the present embodiment is used by being incorporated into a manufacturing line of a relatively small liquid crystal display used in a portable device or the like. The transport system 1 transports a liquid crystal panel 2 which is a display panel. Specifically, the transport system 1 carries in the liquid crystal panel 2 to the inspection device 3 which inspects the liquid crystal panel 2 and carries out the liquid crystal panel 2 from the inspection device 3. The liquid crystal panel 2 is formed in a rectangular flat plate shape.
　本形態では、検査装置３で検査が行われる前の液晶パネル２は、検査される液晶パネル２のサイズに応じて、トレイ４またはカセット５に収容されている。具体的には、比較的大きな液晶パネル２はトレイ４に収容され、比較的小さな液晶パネル２はカセット５に収容されている。また、検査装置３で検査が行われた後の液晶パネル２は、トレイ４に収容される。トレイ４には、複数枚の液晶パネル２が上下方向で重ならない状態で収容されている。カセット５には、複数枚の液晶パネル２が上下方向に間隔をあけた状態で上下方向で重なるように収容されている。なお、トレイ４は、略長方形の平板状に形成されており、トレイ４の上面には液晶パネル２が収容される凹部が形成されている。また、トレイ４は、比較的剛性の低い樹脂で形成されている。また、図１では、トレイ４およびカセット５の図示を省略している。 In the present embodiment, the liquid crystal panel 2 before the inspection by the inspection device 3 is accommodated in the tray 4 or the cassette 5 according to the size of the liquid crystal panel 2 to be inspected. Specifically, the relatively large liquid crystal panel 2 is accommodated in the tray 4, and the relatively small liquid crystal panel 2 is accommodated in the cassette 5. Further, the liquid crystal panel 2 after the inspection by the inspection device 3 is accommodated in the tray 4. A plurality of liquid crystal panels 2 are accommodated in the tray 4 in a state where they do not overlap in the vertical direction. A plurality of liquid crystal panels 2 are accommodated in the cassette 5 so as to overlap in the vertical direction in a state of being spaced apart in the vertical direction. The tray 4 is formed in a substantially rectangular flat plate shape, and a recess in which the liquid crystal panel 2 is accommodated is formed on the upper surface of the tray 4. Further, the tray 4 is formed of a relatively low rigidity resin. Further, in FIG. 1, the illustration of the tray 4 and the cassette 5 is omitted.
　搬送システム１は、検査前の液晶パネル２が収容されるトレイ４が複数段に積み重なった状態で配置されるトレイ配置部６と、検査装置３での検査で正常と判断された液晶パネル２が収容されるトレイ４が複数段に積み重なった状態で配置されるトレイ配置部７と、検査装置３での検査で異常と判断された液晶パネル２が収容されるトレイ４が複数段に積み重なった状態で配置されるトレイ配置部８と、空のトレイ４が複数段に積み重なった状態で配置されるトレイ配置部９とを備えている。 The transport system 1 includes a tray arrangement portion 6 in which the trays 4 in which the liquid crystal panels 2 before the inspection are accommodated are stacked in a plurality of stages, and the liquid crystal panels 2 determined to be normal in the inspection by the inspection device 3. A state in which the tray arrangement portion 7 arranged in a state in which the trays 4 to be accommodated are stacked in a plurality of stages and the tray 4 in which the liquid crystal panels 2 determined to be abnormal in the inspection by the inspection device 3 are accommodated And a tray arrangement unit 9 in which empty trays 4 are arranged in a plurality of stages.
　また、搬送システム１は、液晶パネル２を搬送するロボット１１と、トレイ４を搬送するロボット１２と、複数枚の液晶パネル２が収容されたカセット５が配置されるカセット配置部１３とを備えている。本形態のトレイ配置部６は供給側トレイ配置部であり、トレイ配置部７は第１排出側トレイ配置部であり、トレイ配置部８は第２排出側トレイ配置部である。また、本形態のロボット１１はパネル搬送ロボットである。 The transport system 1 further includes a robot 11 for transporting the liquid crystal panel 2, a robot 12 for transporting the tray 4, and a cassette placement unit 13 in which the cassette 5 containing the plurality of liquid crystal panels 2 is placed. There is. The tray arrangement unit 6 of this embodiment is a supply side tray arrangement unit, the tray arrangement unit 7 is a first discharge side tray arrangement unit, and the tray arrangement unit 8 is a second discharge side tray arrangement unit. Further, the robot 11 in the present embodiment is a panel transfer robot.
　トレイ配置部６とトレイ配置部７とトレイ配置部８とトレイ配置部９とは、一列に配列されている。トレイ配置部６～９は、架台１４の上に設置されている。また、架台１４の上には、搬送システム１の本体フレーム（図示省略）が固定されている。以下の説明では、トレイ配置部６～９の配列方向（図１等のＸ方向）を左右方向とし、上下方向と左右方向とに直交する図１等のＹ方向を前後方向とする。また、左右方向のうちの図１等のＸ１方向側を「右」側とし、その反対側である図１等のＸ２方向側を「左」側とし、前後方向のうちの図１等のＹ１方向側を「前」側とし、その反対側である図１等のＹ２方向側を「後ろ」側とする。 The tray arranging unit 6, the tray arranging unit 7, the tray arranging unit 8 and the tray arranging unit 9 are arranged in a line. The tray placement units 6 to 9 are installed on the gantry 14. In addition, a main body frame (not shown) of the transport system 1 is fixed on the gantry 14. In the following description, the arrangement direction (X direction in FIG. 1 etc.) of the tray arrangement parts 6 to 9 is the left and right direction, and the Y direction in FIG. 1 etc. orthogonal to the vertical direction and the left and right direction is the front and back direction. Also, the X1 direction side in FIG. 1 etc. in the left and right direction is the “right” side, and the X2 direction side in FIG. 1 etc. in the opposite side is the “left” side, Y1 in FIG. Let the direction side be the "front" side, and let the Y2 direction side of Fig. 1 etc. which is the opposite side be the "rear" side.
　本形態の検査装置３は、液晶パネル２を点灯検査する点灯検査装置である。検査装置３は、たとえば、液晶パネル２が載置されるパネル載置部１５を２箇所に有するパネル保持部と、上下方向を回転の軸方向としてパネル保持部を回転させる回転機構と、液晶パネル２の点灯検査時に内部が暗室となる筐体とを備えている。筐体の内部には、液晶パネル２の点灯検査を行うためのバックライトやカメラが設置されている。回転機構は、２個のパネル載置部１５のうちの一方のパネル載置部１５が筐体の外部に配置されるとともに他方のパネル載置部１５が筐体の内部に配置される位置と、一方のパネル載置部１５が筐体の内部に配置されるとともに他方のパネル載置部１５が筐体の外部に配置される位置との間でパネル保持部を回転させる。 The inspection device 3 of the present embodiment is a lighting inspection device which performs lighting inspection of the liquid crystal panel 2. The inspection apparatus 3 has, for example, a panel holding unit having two panel mounting units 15 on which the liquid crystal panel 2 is mounted, a rotation mechanism that rotates the panel holding unit with the vertical axis as the rotation axial direction, and the liquid crystal panel And a case where the inside becomes a dark room at the time of the lighting inspection of 2. A backlight and a camera for inspecting the lighting of the liquid crystal panel 2 are installed inside the housing. The rotation mechanism has a position where one panel mounting portion 15 of the two panel mounting portions 15 is disposed outside the housing and the other panel mounting portion 15 is disposed inside the housing. The panel holding portion is rotated between the position where one panel mounting portion 15 is disposed inside the housing and the other panel mounting portion 15 is disposed outside the housing.
　上述のように、トレイ配置部６とトレイ配置部７とトレイ配置部８とトレイ配置部９とは、左右方向に一列に配列されている。本形態では、トレイ配置部９とトレイ配置部６とトレイ配置部７とトレイ配置部８とがこの順番で並んでいる。具体的には、トレイ配置部９とトレイ配置部６とトレイ配置部７とトレイ配置部８とが左側から右側に向かってこの順番で並んでいる。ロボット１２は、トレイ配置部６～９の上側に配置されている。ロボット１１は、トレイ配置部６～９よりも後ろ側に配置されている。また、ロボット１１は、トレイ配置部７の後ろ側に配置されている。 As described above, the tray arrangement unit 6, the tray arrangement unit 7, the tray arrangement unit 8, and the tray arrangement unit 9 are arranged in a line in the left-right direction. In the present embodiment, the tray arranging unit 9, the tray arranging unit 6, the tray arranging unit 7, and the tray arranging unit 8 are arranged in this order. Specifically, the tray arrangement unit 9, the tray arrangement unit 6, the tray arrangement unit 7, and the tray arrangement unit 8 are arranged in this order from the left to the right. The robot 12 is disposed on the upper side of the tray placement units 6 to 9. The robot 11 is disposed behind the tray placement units 6 to 9. Further, the robot 11 is disposed behind the tray arrangement unit 7.
　検査装置３は、ロボット１１よりも後ろ側に配置されている。また、検査装置３は、トレイ配置部６～８の後ろ側に配置されている。検査装置３のパネル載置部１５は、ロボット１１の後ろ側に配置されている。カセット配置部１３は、トレイ配置部６の後ろ側に配置されている。また、カセット配置部１３は、検査装置３の前側に配置されるとともにロボット１１の左側に配置されている。カセット配置部１３は、カセット配置部１３に配置されるカセット５の中から検査装置３のパネル載置部１５へロボット１１が液晶パネル２を搬送できる位置に配置されている。 The inspection device 3 is disposed behind the robot 11. In addition, the inspection device 3 is disposed on the rear side of the tray disposition units 6 to 8. The panel placement unit 15 of the inspection device 3 is disposed behind the robot 11. The cassette placement unit 13 is disposed behind the tray placement unit 6. The cassette placement unit 13 is disposed on the front side of the inspection device 3 and on the left side of the robot 11. The cassette placement unit 13 is placed at a position where the robot 11 can transport the liquid crystal panel 2 from the cassette 5 placed in the cassette placement unit 13 to the panel placement unit 15 of the inspection apparatus 3.
　（ロボットおよびカセット配置部の構成）
　図３は、図１に示すロボット１１の正面図である。図４は、図１に示すロボット１２の側面図である。 (Configuration of robot and cassette placement unit)
FIG. 3 is a front view of the robot 11 shown in FIG. FIG. 4 is a side view of the robot 12 shown in FIG.
　ロボット１１は、６軸の垂直多関節ロボットである。ロボット１１は、ロボット１１の下端部を構成する支持部材１９と、支持部材１９に相対回動可能に連結される関節部２０と、関節部２０に相対回動可能に連結される関節部２１と、関節部２１に基端が固定される直線状のアーム２２と、アーム２２の先端に固定される関節部２３と、関節部２３に相対回動可能に連結される関節部２４と、関節部２４に基端が相対回動可能に連結される直線状のアーム２５と、アーム２５の先端が固定される関節部２６と、関節部２６に相対可動可能に連結される関節部２７と、関節部２７に回動可能に連結されるとともに液晶パネル２を保持するパネル保持機構２８とを備えている。 The robot 11 is a six-axis vertical articulated robot. The robot 11 includes a support member 19 constituting a lower end portion of the robot 11, a joint unit 20 rotatably connected to the support member 19, and a joint unit 21 rotatably connected to the joint unit 20. A straight arm 22 whose base end is fixed to the joint 21; a joint 23 fixed to the tip of the arm 22; a joint 24 connected to the joint 23 so as to be rotatable relative to the joint 23; A straight arm 25 whose proximal end is relatively rotatably coupled to the joint 24, a joint 26 to which the tip of the arm 25 is fixed, a joint 27 relatively movably connected to the joint 26, and a joint And a panel holding mechanism 28 rotatably connected to the portion 27 and holding the liquid crystal panel 2.
　関節部２０、２１、２３、２４、２６、２７は、モータとモータの動力を減速して伝達する減速機とを備えている。関節部２０は、上下方向を回動の軸方向とする回動が可能になるように支持部材１９に連結されている。関節部２１は、水平方向を回動の軸方向とする回動が可能となるように関節部２０に連結されている。関節部２４は、水平方向を回動の軸方向とする回動が可能となるように関節部２３に連結されている。関節部２７は、水平方向を回動の軸方向とする回動が可能となるように関節部２６に連結されている。 The joints 20, 21, 23, 24, 26, 27 include a motor and a reduction gear that decelerates and transmits the power of the motor. The joint portion 20 is connected to the support member 19 so as to be able to rotate with the vertical direction as the axial direction of rotation. The joint portion 21 is connected to the joint portion 20 so as to be able to rotate with the horizontal direction as the axial direction of rotation. The joint portion 24 is connected to the joint portion 23 so as to be able to rotate with the horizontal direction as the axial direction of rotation. The joint portion 27 is connected to the joint portion 26 so as to be able to rotate with the horizontal direction as the axial direction of rotation.
　関節部２０に対する関節部２１の回動の軸方向および関節部２３に対する関節部２４の回動の軸方向と、アーム２２の長手方向とは直交している。関節部２３に対する関節部２４の回動の軸方向および関節部２６に対する関節部２７の回動の軸方向と、アーム２５の長手方向とは直交している。また、関節部２３に対する関節部２４の回動の軸方向と、関節部２４に対するアーム２５の回動の軸方向とは直交している。関節部２６に対する関節部２７の回動の軸方向と、関節部２７に対するパネル保持機構２８の回動の軸方向とは直交している。 The axial direction of rotation of the joint 21 with respect to the joint 20 and the axial direction of rotation of the joint 24 with respect to the joint 23 are orthogonal to the longitudinal direction of the arm 22. The axial direction of rotation of the joint 24 with respect to the joint 23 and the axial direction of rotation of the joint 27 with respect to the joint 26 are orthogonal to the longitudinal direction of the arm 25. Further, the axial direction of rotation of the joint 24 with respect to the joint 23 and the axial direction of rotation of the arm 25 with respect to the joint 24 are orthogonal to each other. The axial direction of the rotation of the joint 27 with respect to the joint 26 and the axial direction of the rotation of the panel holding mechanism 28 with respect to the joint 27 are orthogonal to each other.
　パネル保持機構２８は、液晶パネル２を吸引して保持するパネル保持部２８ａを備えている。パネル保持部２８ａは、１枚の液晶パネル２を保持する。パネル保持部２８ａには、複数の吸引穴が形成されている。複数の吸引穴には、所定の配管を介して真空ポンプ等の空気の吸引機構が接続されている。なお、図１、図２では、パネル保持部２８ａの図示を省略している。 The panel holding mechanism 28 includes a panel holding portion 28 a that sucks and holds the liquid crystal panel 2. The panel holding unit 28 a holds one liquid crystal panel 2. A plurality of suction holes are formed in the panel holding portion 28a. An air suction mechanism such as a vacuum pump is connected to the plurality of suction holes via a predetermined pipe. In FIGS. 1 and 2, the panel holding portion 28a is not shown.
　ロボット１２は、いわゆる２軸直交ロボットである。ロボット１２は、架台１４に固定される固定フレーム３１と、固定フレーム３１に対して左右方向へのスライドが可能となるように固定フレーム３１に保持される可動フレーム３２と、可動フレーム３２に対して上下方向へのスライドが可能となるように可動フレーム３２に保持される可動フレーム３３と、可動フレーム３３に取り付けられるトレイ保持部３４とを備えている。また、ロボット１２は、可動フレーム３２を左右方向へスライドさせる駆動機構と、可動フレーム３２を左右方向へ案内するガイド機構と、可動フレーム３３を上下方向へスライドさせる駆動機構と、可動フレーム３３を上下方向に案内するガイド機構とを備えている。 The robot 12 is a so-called two-axis orthogonal robot. The robot 12 has a fixed frame 31 fixed to the gantry 14, a movable frame 32 held by the fixed frame 31 so as to be slidable in the lateral direction with respect to the fixed frame 31, and a movable frame 32. The movable frame 33 is held by the movable frame 32 so as to be vertically slidable, and the tray holding unit 34 is attached to the movable frame 33. Further, the robot 12 has a drive mechanism for sliding the movable frame 32 in the lateral direction, a guide mechanism for guiding the movable frame 32 in the lateral direction, a drive mechanism for sliding the movable frame 33 in the vertical direction, and the movable frame 33 up and down. And a guide mechanism for guiding in a direction.
　固定フレーム３１は、トレイ配置部６～９の前端部の上側に配置されている。可動フレーム３２は、固定フレーム３１の上面側に取り付けられている。また、可動フレーム３２は、固定フレーム３１から後ろ側に向かって伸びている。可動フレーム３３は、可動フレーム３２の後端に取り付けられている。トレイ保持部３４は、可動フレーム３３の下端に取り付けられている。トレイ保持部３４は、図４に示すように、トレイ４を吸引して保持する複数の吸引部３５を備えている。吸引部３５には、所定の配管を介して真空ポンプ等の空気の吸引機構が接続されている。吸引部３５は、トレイ４の上面に接触してトレイ４を真空吸引する。 The fixed frame 31 is disposed on the upper side of the front end portions of the tray placement portions 6-9. The movable frame 32 is attached to the upper surface side of the fixed frame 31. Further, the movable frame 32 extends rearward from the fixed frame 31. The movable frame 33 is attached to the rear end of the movable frame 32. The tray holding portion 34 is attached to the lower end of the movable frame 33. As shown in FIG. 4, the tray holding unit 34 includes a plurality of suction units 35 that suck and hold the tray 4. An air suction mechanism such as a vacuum pump is connected to the suction unit 35 through a predetermined pipe. The suction unit 35 contacts the upper surface of the tray 4 to vacuum suction the tray 4.
　カセット配置部１３は、カセット５を保持するカセット保持部３６を備えている。カセット保持部３６は、前後方向を回動の軸方向としてかつカセット保持部３６の下端部を回動中心にして回動可能となっている。カセット保持部３６には、作業員が手作業でカセット５をセットする。本形態では、上側に向かうにしたがって左側に向かうように傾斜している状態のカセット保持部３６に、斜め左上側からカセット５をセットした後、カセット５に収容される液晶パネル２の厚さ方向と上下方向とが略一致する位置までカセット保持部３６を回動させてから、カセット保持部３６を固定する。 The cassette placement unit 13 includes a cassette holding unit 36 that holds the cassette 5. The cassette holding portion 36 is rotatable with the front-rear direction as an axial direction of rotation and the lower end of the cassette holding portion 36 as a rotation center. A worker manually sets the cassette 5 in the cassette holding unit 36. In the present embodiment, after the cassette 5 is set from the diagonally upper left side to the cassette holding portion 36 in a state of being inclined to the left as it goes upward, the thickness direction of the liquid crystal panel 2 housed in the cassette 5 After the cassette holding portion 36 is rotated to a position where the vertical direction substantially coincides with the vertical direction, the cassette holding portion 36 is fixed.
　（トレイ配置部の概略構成）
　図５は、図１に示すトレイ配置部６の斜視図である。図６は、図５に示すトレイ配置部６の平面図である。図７は、図５に示すトレイ配置部６の構成を正面から説明するための図である。図８は、図５に示すトレイ配置部６の構成を側面から説明するための図である。 (Schematic configuration of tray arrangement unit)
FIG. 5 is a perspective view of the tray placement unit 6 shown in FIG. 6 is a plan view of the tray placement unit 6 shown in FIG. FIG. 7 is a diagram for describing the configuration of the tray placement unit 6 shown in FIG. 5 from the front. FIG. 8 is a diagram for describing the configuration of the tray placement unit 6 shown in FIG. 5 from the side.
　トレイ配置部６には、トレイ４が複数段に積み重なった状態（段積み状態）で配置されている。トレイ配置部６は、トレイ配置部６の左右の側面を構成する２枚の側板３８と、トレイ配置部６の後面を構成する後側板３９とを備えており、トレイ配置部６の上面および前面は開口している。トレイ配置部６は、段積み状態でトレイ配置部６に配置されるトレイ４が載置される載置板４０を備えている。具体的には、トレイ配置部６は、段積み状態でトレイ配置部６に配置されるトレイ４のうちの一番下に配置されるトレイ４が載置される載置板４０を備えている。また、トレイ配置部６は、載置板４０が着脱可能に載置されるベース部材４１と、ベース部材４１がスライド可能に取り付けられる支持フレーム４２とを備えている。 In the tray arrangement portion 6, the trays 4 are arranged in a state of being stacked in a plurality of stages (stacked state). The tray arranging unit 6 includes two side plates 38 constituting the left and right side surfaces of the tray arranging unit 6 and a rear side plate 39 constituting the rear surface of the tray arranging unit 6, and the upper surface and the front surface of the tray arranging unit 6 Is open. The tray arranging unit 6 includes a mounting plate 40 on which the trays 4 arranged in the tray arranging unit 6 are stacked in a stacked state. Specifically, the tray arranging unit 6 includes a placing plate 40 on which the tray 4 disposed at the bottom of the trays 4 disposed in the tray arranging unit 6 in a stacked state is placed. . Further, the tray arrangement portion 6 includes a base member 41 on which the mounting plate 40 is detachably mounted, and a support frame 42 to which the base member 41 is slidably attached.
　さらに、トレイ配置部６は、支持フレーム４２に対してベース部材４１をスライドさせるスライド機構４３を備えている。スライド機構４３は、支持フレーム４２に対してベース部材４１を前後方向へスライドさせる。また、トレイ配置部６は、支持フレーム４２に対するベース部材４１のスライド方向の一端側（具体的には、スライド方向の後端側）でベース部材４１をロックするためのロック機構４４と、支持フレーム４２に対するベース部材４１のスライド方向の他端側（具体的には、スライド方向の前端側）でベース部材４１をロックするためのロック機構４５とを備えている（図６参照）。本形態のロック機構４４は第１ロック機構であり、ロック機構４５は第２ロック機構である。 Furthermore, the tray placement unit 6 includes a slide mechanism 43 that slides the base member 41 with respect to the support frame 42. The slide mechanism 43 slides the base member 41 in the front-rear direction with respect to the support frame 42. Further, the tray placement portion 6 has a lock mechanism 44 for locking the base member 41 at one end side (specifically, the rear end side in the slide direction) of the base member 41 in the sliding direction with respect to the support frame 42; A lock mechanism 45 is provided to lock the base member 41 on the other end side (specifically, the front end side in the slide direction) of the base member 41 in the sliding direction with respect to 42 (see FIG. 6). The lock mechanism 44 of this embodiment is a first lock mechanism, and the lock mechanism 45 is a second lock mechanism.
　また、トレイ配置部６は、支持フレーム４２を昇降させる昇降機構４６を備えている。すなわち、トレイ配置部６は、ベース部材４１、載置板４０およびトレイ４を昇降させる昇降機構４６を備えている。さらに、トレイ配置部６は、水平方向でトレイ４を位置決めするためのシリンダ４７を備えている。すなわち、トレイ配置部６は、載置板４０に載置されるトレイ４を前後方向および左右方向で位置決めするためのシリンダ４７を備えている。また、トレイ配置部６は、最上段に配置されるトレイ４と上から２番目に配置されるトレイ４とを分離するためのピンシリンダ５０を備えている。本形態のトレイ配置部６は、４個のピンシリンダ５０を備えている。 Further, the tray placement unit 6 includes an elevating mechanism 46 that raises and lowers the support frame 42. That is, the tray placement unit 6 includes the base member 41, the placement plate 40, and the elevating mechanism 46 that raises and lowers the tray 4. Furthermore, the tray placement unit 6 includes a cylinder 47 for positioning the tray 4 in the horizontal direction. That is, the tray arrangement unit 6 includes a cylinder 47 for positioning the tray 4 placed on the placement plate 40 in the front-rear direction and the left-right direction. In addition, the tray placement unit 6 includes a pin cylinder 50 for separating the tray 4 disposed at the top and the tray 4 disposed second from the top. The tray arrangement unit 6 of the present embodiment is provided with four pin cylinders 50.
　また、トレイ配置部６は、最上段に配置されるトレイ４を検知するセンサ５１～５３を備えている。センサ５１は、最上段のトレイ４の上限位置を検知するためのセンサである。センサ５２は、後述のようにピンシリンダ５０の可動ピン８９に支持される最上段のトレイ４を検知するためのセンサである。センサ５３は、昇降機構４６によって上昇する段積み状態のトレイ４のうちの最上段のトレイ４を上限位置で停止させるためのセンサである。 Further, the tray placement unit 6 is provided with sensors 51 to 53 for detecting the tray 4 placed at the top. The sensor 51 is a sensor for detecting the upper limit position of the uppermost tray 4. The sensor 52 is a sensor for detecting the uppermost tray 4 supported by the movable pin 89 of the pin cylinder 50 as described later. The sensor 53 is a sensor for stopping the uppermost tray 4 of the stacked trays 4 lifted by the lifting mechanism 46 at the upper limit position.
　以下、トレイ配置部６の具体的な構成について説明する。なお、本形態では、トレイ配置部７とトレイ配置部８とは、全く同様に構成されている。また、トレイ配置部７、８は、トレイ配置部７、８がピンシリンダ５０およびセンサ５２、５３を備えていない点を除いて、トレイ配置部６と同様に構成されている。そのため、トレイ配置部７、８の具体的な構成の説明は省略する。 Hereinafter, the specific configuration of the tray arrangement unit 6 will be described. In the present embodiment, the tray placement unit 7 and the tray placement unit 8 are configured in the same manner. Further, the tray arranging units 7 and 8 are configured in the same manner as the tray arranging unit 6 except that the tray arranging units 7 and 8 do not include the pin cylinder 50 and the sensors 52 and 53. Therefore, the description of the specific configuration of the tray placement units 7 and 8 is omitted.
　また、トレイ配置部９は、トレイ配置部９が載置板４０、ベース部材４１、スライド機構４３およびロック機構４４、４５を備えていない点、トレイ配置部９がシリンダ４７およびセンサ５２、５３を備えていない点、および、トレイ配置部９が備えるピンシリンダ５０の数が２個である点を除いて、トレイ配置部６とほぼ同様に構成されている。以下では、トレイ配置部９の具体的な構成について、トレイ配置部６との相違点を中心にして説明する。 Further, in the tray arranging unit 9, the tray arranging unit 9 includes the cylinder 47 and the sensors 52, 53 in that the tray arranging unit 9 does not include the mounting plate 40, the base member 41, the slide mechanism 43 and the locking mechanisms 44, 45. The configuration is substantially the same as that of the tray placement unit 6 except that the tray placement unit 9 includes two pin cylinders 50, and the point that the tray placement unit 9 has two. Hereinafter, the specific configuration of the tray arranging unit 9 will be described focusing on differences from the tray arranging unit 6.
　（トレイ配置部の具体的な構成）
　図９は、図６に示す載置板４０、ベース部材４１、支持フレーム４２およびスライド機構４３等の構成を正面から説明するための図である。図１０は、図６に示すスライド機構４３の動きを説明するための図である。図１１（Ａ）、（Ｂ）は、図５に示すピンシリンダ５０の周辺部の正面図であり、図１１（Ｃ）、（Ｄ）は、図５に示すセンサ５１～５３の周辺部の正面図である。図１２は、図５に示すトレイ配置部６において、最上段に配置されるトレイ４の分離動作を説明するための図である。図１３は、図１に示すトレイ配置部９の構成を正面から説明するための図である。図１４は、図１に示すトレイ配置部９の構成を側面から説明するための図である。 (Specific configuration of tray arrangement unit)
FIG. 9 is a front view of the configuration of the mounting plate 40, the base member 41, the support frame 42, the slide mechanism 43, etc. shown in FIG. FIG. 10 is a view for explaining the movement of the slide mechanism 43 shown in FIG. 11 (A) and 11 (B) are front views of the peripheral portion of the pin cylinder 50 shown in FIG. 5, and FIGS. 11 (C) and 11 (D) are peripheral portions of the sensors 51 to 53 shown in FIG. It is a front view. FIG. 12 is a diagram for explaining the separation operation of the tray 4 disposed in the uppermost stage in the tray arrangement unit 6 shown in FIG. FIG. 13 is a diagram for describing the configuration of the tray placement unit 9 shown in FIG. 1 from the front. FIG. 14 is a diagram for describing the configuration of the tray placement unit 9 shown in FIG. 1 from the side.
　載置板４０は、略長方形の平板状に形成されている。載置板４０は、載置板４０の厚さ方向と上下方向とが一致するように、かつ、略長方形状に形成される載置板４０の長辺の方向と前後方向とが一致するようにベース部材４１に着脱可能に載置されている。また、載置板４０は、左側に配置される側板３８よりも右側に配置されるとともに、右側に配置される側板３８よりも左側に配置されている。載置板４０は、樹脂で形成されている。たとえば、載置板４０は、ナイロンで形成されている。載置板４０の剛性は、トレイ４の剛性よりも高くなっている。 The mounting plate 40 is formed in a substantially rectangular flat plate shape. In the mounting plate 40, the thickness direction of the mounting plate 40 matches the vertical direction, and the direction of the long side of the mounting plate 40 formed in a substantially rectangular shape matches the front-rear direction. Are detachably mounted on the base member 41. The placement plate 40 is disposed on the right side of the side plate 38 disposed on the left side, and is disposed on the left side of the side plate 38 disposed on the right side. The mounting plate 40 is formed of resin. For example, the mounting plate 40 is formed of nylon. The rigidity of the mounting plate 40 is higher than the rigidity of the tray 4.
　載置板４０には、上下方向で載置板４０を貫通する２個の貫通穴４０ａが前後方向に間隔をあけた状態で形成されている。２個の貫通穴４０ａは、略長方形状に形成されている。載置板４０の後端側の２箇所の角部には、水平方向（前後方向および左右方向）でトレイ４を位置決めするためのピン５６が固定されている。ピン５６は、載置板４０の上面から上側に突出している。また、載置板４０の下面には、ベース部材４１に対して載置板４０の位置決めをするための複数のピン５５が固定されている（図６参照）。本形態では、載置板４０の中心と、載置板４０の前端部の左右の両端側の２箇所と、載置板４０の後端部の左右の両端側の２箇所とにピン５５が固定されている。すなわち、載置板４０の下面には、５本のピン５５が固定されている。ピン５５は、載置板４０の下面から下側へ突出している。 In the mounting plate 40, two through holes 40a penetrating the mounting plate 40 in the vertical direction are formed in a state of being spaced in the front-rear direction. The two through holes 40a are formed in a substantially rectangular shape. Pins 56 for positioning the tray 4 in the horizontal direction (the front-rear direction and the left-right direction) are fixed to two corner portions on the rear end side of the placement plate 40. The pins 56 project upward from the upper surface of the mounting plate 40. Further, on the lower surface of the mounting plate 40, a plurality of pins 55 for positioning the mounting plate 40 with respect to the base member 41 are fixed (see FIG. 6). In this embodiment, the pins 55 are provided at the center of the mounting plate 40, at two positions on the left and right ends of the front end of the mounting plate 40, and at two positions on the left and right ends of the rear end of the mounting plate 40. It is fixed. That is, five pins 55 are fixed to the lower surface of the mounting plate 40. The pins 55 project downward from the lower surface of the mounting plate 40.
　トレイ４は、上述のように、略長方形の平板状に形成されている。トレイ４は、トレイ４の長辺の方向と前後方向とが一致するように載置板４０に載置されている。トレイ４の外形と載置板４０の外形とはほぼ等しくなっている。トレイ４の下端部には、トレイ４の外周側に広がる鍔部４ａが形成されている（図１２参照）。鍔部４ａは、略長方形の枠状に形成されている。載置板４０に載置されるトレイ４の後端側の２箇所の角部（すなわち、鍔部４ａの後端側の２箇所の角部）は、後ろ側に向かうにしたがって左右方向の内側へ向かうように傾斜する傾斜面４ｂとなっている（図６参照）。 The tray 4 is formed in a substantially rectangular flat plate shape as described above. The tray 4 is placed on the placement plate 40 such that the direction of the long side of the tray 4 coincides with the front-rear direction. The outer shape of the tray 4 and the outer shape of the mounting plate 40 are substantially equal. At the lower end portion of the tray 4 is formed a flange portion 4a which spreads to the outer peripheral side of the tray 4 (see FIG. 12). The collar 4 a is formed in a substantially rectangular frame shape. The two corner portions on the rear end side of the tray 4 placed on the mounting plate 40 (that is, the two corner portions on the rear end side of the collar portion 4a) It is the inclined surface 4b which inclines toward the direction (refer FIG. 6).
　ベース部材４１は、左側に配置される側板３８よりも右側に配置されるとともに、右側に配置される側板３８よりも左側に配置されている。ベース部材４１は、載置板４０が着脱可能に載置されるベース板５７と、スライド機構４３を構成する後述の第３レール６９が固定される２枚のレール固定板５８とを備えている。ベース板５７は、略長方形の平板状に形成されており、ベース板５７の厚さ方向と上下方向とが一致するように配置されている。ベース板５７の前後方向の長さは、載置板４０の前後方向の長さとほぼ等しくなっている。ベース板５７の左右方向の幅は、載置板４０の左右方向の幅よりも狭くなっている。 The base member 41 is disposed on the right side of the side plate 38 disposed on the left side, and is disposed on the left side of the side plate 38 disposed on the right side. The base member 41 includes a base plate 57 on which the mounting plate 40 is detachably mounted, and two rail fixing plates 58 to which a third rail 69 described later constituting the slide mechanism 43 is fixed. . The base plate 57 is formed in a substantially rectangular flat plate shape, and is arranged such that the thickness direction of the base plate 57 coincides with the vertical direction. The length of the base plate 57 in the front-rear direction is substantially equal to the length of the mounting plate 40 in the front-rear direction. The width in the left-right direction of the base plate 57 is narrower than the width in the left-right direction of the mounting plate 40.
　ベース板５７には、上下方向でベース板５７を貫通する略長方形状の２個の貫通穴５７ａが前後方向に間隔をあけた状態で形成されている（図６参照）。また、ベース板５７には、載置板４０の中心に固定されるピン５５が挿入される挿入穴と、載置板４０の後端部の左右の両端側の２箇所に固定されるピン５５が挿入される挿入穴とが形成されている。本形態では、作業者が手作業で、支持フレーム４２に対してベース部材４１をスライドさせる。ベース板５７の下面の前端側には、支持フレーム４２に対してベース部材４１をスライドさせる際に作業者が握る取手５９が固定されている。なお、載置板４０の前端部の左右の両端側の２箇所に固定されるピン５５は、ベース板５７の左右の端面に接触している。 In the base plate 57, two substantially rectangular through holes 57a penetrating the base plate 57 in the vertical direction are formed in a state of being spaced in the front-rear direction (see FIG. 6). Further, the base plate 57 has two insertion holes into which the pin 55 fixed to the center of the mounting plate 40 is inserted and the pins 55 fixed to the left and right ends of the rear end portion of the mounting plate 40. And an insertion hole into which is inserted. In the present embodiment, the operator manually slides the base member 41 relative to the support frame 42. On the front end side of the lower surface of the base plate 57, a handle 59 which an operator grips when sliding the base member 41 with respect to the support frame 42 is fixed. The pins 55 fixed at two places on the left and right ends of the front end portion of the mounting plate 40 are in contact with the left and right end surfaces of the base plate 57.
　ベース板５７の下面の後端側には、支持フレーム４２に対してベース部材４１をロックするためのロック板６０が固定されている。ロック板６０は、平板状に形成されており、ロック板６０の厚さ方向と左右方向とが一致するように配置されている。ロック板６０は、ベース板５７の右端側に固定されている。図８に示すように、ロック板６０の下面の前側部分は、前側に向かうにしたがって上側に向かうように傾斜する傾斜面６０ａとなっており、ロック板６０の下面の後ろ側部分は、後ろ側に向かうにしたがって上側に向かうように傾斜する傾斜面６０ｂとなっている。なお、傾斜面６０ａと傾斜面６０ｂの間には、上下方向に直交するわずかな平面が形成されている（図８参照）。 On the rear end side of the lower surface of the base plate 57, a lock plate 60 for locking the base member 41 with respect to the support frame 42 is fixed. The lock plate 60 is formed in a flat plate shape, and is arranged such that the thickness direction of the lock plate 60 coincides with the left-right direction. The lock plate 60 is fixed to the right end side of the base plate 57. As shown in FIG. 8, the front side portion of the lower surface of the lock plate 60 is an inclined surface 60a which inclines upward toward the front side, and the rear side portion of the lower surface of the lock plate 60 is the rear side It becomes an inclined surface 60b which inclines toward the upper side as it goes to. A slight plane perpendicular to the vertical direction is formed between the inclined surface 60a and the inclined surface 60b (see FIG. 8).
　レール固定板５８は、前後方向に細長い長方形の平板状に形成されている。レール固定板５８は、レール固定板５８の厚さ方向と左右方向とが一致するように配置されている。レール固定板５８は、ベース板５７の下面に固定されている。また、２枚のレール固定板５８のそれぞれは、左右方向におけるベース板５７の両端側のそれぞれに固定されている。レール固定板５８の前後方向の長さは、ベース板５７の前後方向の長さよりも長くなっている。レール固定板５８の前端は、ベース板５７の前端よりも前側に配置され、レール固定板５８の後端は、ベース板５７の後端よりも後ろ側に配置されている。 The rail fixing plate 58 is formed in a rectangular flat plate shape that is elongated in the front-rear direction. The rail fixing plate 58 is arranged such that the thickness direction of the rail fixing plate 58 matches the left-right direction. The rail fixing plate 58 is fixed to the lower surface of the base plate 57. Further, each of the two rail fixing plates 58 is fixed to each of both end sides of the base plate 57 in the left-right direction. The length of the rail fixing plate 58 in the front-rear direction is longer than the length of the base plate 57 in the front-rear direction. The front end of the rail fixing plate 58 is disposed forward of the front end of the base plate 57, and the rear end of the rail fixing plate 58 is disposed rearward of the rear end of the base plate 57.
　支持フレーム４２は、左側に配置される側板３８よりも右側に配置されるとともに、右側に配置される側板３８よりも左側に配置されている。支持フレーム４２は、スライド機構４３を構成する後述の第１レール６７が固定される２枚のレール固定板６１と、レール固定板６１が固定される支持板６２と、支持板６２に固定されるベース板６３と、２枚の補強板６４とを備えている。支持板６２は、略長方形の平板状に形成されている。支持板６２は、支持板６２の厚さ方向と上下方向とが一致するように配置されている。 The support frame 42 is disposed on the right side of the side plate 38 disposed on the left side, and is disposed on the left side of the side plate 38 disposed on the right side. The support frame 42 is fixed to two rail fixing plates 61 to which a first rail 67 described later constituting the slide mechanism 43 is fixed, a support plate 62 to which the rail fixing plate 61 is fixed, and the support plate 62 A base plate 63 and two reinforcing plates 64 are provided. The support plate 62 is formed in a substantially rectangular flat plate shape. The support plate 62 is disposed such that the thickness direction of the support plate 62 coincides with the vertical direction.
　支持板６２の前後方向の長さは、ベース板５７の前後方向の長さよりも長くなっている。支持板６２の左右方向の幅は、２枚のレール固定板５８の左右方向の間隔よりも狭くなっている。支持板６２には、支持板６２の前端から後ろ側に向かって切り欠かれた切欠き部６２ａが形成されている。また、支持板６２には、上下方向で支持板６２を貫通する略長方形状の１個の貫通穴６２ｂが形成されている（図６参照）。貫通穴６２ｂは、切欠き部６２ａの後ろ側に配置されている。 The length of the support plate 62 in the front-rear direction is longer than the length of the base plate 57 in the front-rear direction. The width in the left-right direction of the support plate 62 is narrower than the distance between the two rail fixing plates 58 in the left-right direction. The support plate 62 is formed with a notch 62 a that is cut out toward the rear side from the front end of the support plate 62. Further, in the support plate 62, one substantially rectangular through hole 62b penetrating the support plate 62 in the vertical direction is formed (see FIG. 6). The through hole 62b is disposed on the rear side of the notch 62a.
　レール固定板６１は、前後方向に細長い長方形の平板状に形成されている。レール固定板６１は、レール固定板６１の厚さ方向と左右方向とが一致するように配置されている。レール固定板６１は、支持板６２の上面に固定されている。また、２枚のレール固定板６１のそれぞれは、左右方向における支持板６２の両端側のそれぞれに固定されている。２枚のレール固定板６１は、２枚のレール固定板５８の左右方向の内側に配置されている。レール固定板６１の前後方向の長さは、支持板６２の前後方向の長さよりも長くなっている。レール固定板６１の前端は、前後方向において支持板６２の前端と同じ位置に配置され、レール固定板６１の後端は、支持板６２の後端よりも後ろ側に配置されている。 The rail fixing plate 61 is formed in a rectangular flat plate shape elongated in the front-rear direction. The rail fixing plate 61 is disposed such that the thickness direction of the rail fixing plate 61 matches the left-right direction. The rail fixing plate 61 is fixed to the upper surface of the support plate 62. Further, each of the two rail fixing plates 61 is fixed to each of both end sides of the support plate 62 in the left-right direction. The two rail fixing plates 61 are disposed on the inner side in the left-right direction of the two rail fixing plates 58. The length of the rail fixing plate 61 in the front-rear direction is longer than the length of the support plate 62 in the front-rear direction. The front end of the rail fixing plate 61 is disposed at the same position as the front end of the support plate 62 in the front-rear direction, and the rear end of the rail fixing plate 61 is disposed behind the rear end of the support plate 62.
　ベース板６３は、長方形の平板状に形成されており、ベース板６３の厚さ方向と前後方向とが一致するように配置されている。ベース板６３は、支持板６２の下面の後端部に固定されている。補強板６４は、支持板６２とベース板６３との固定強度を確保するための補強リブである。補強板６４は、略等脚台形の平板状に形成されており、補強板６４の厚さ方向と左右方向とが一致するように配置されている。補強板６４の後端面は、ベース板６３の前面に固定され、補強板６４の上端面は、支持板６２の下面に固定されている。なお、図８では、２枚の補強板６４の図示を省略している。 The base plate 63 is formed in a rectangular flat plate shape, and is disposed such that the thickness direction of the base plate 63 matches the front-rear direction. The base plate 63 is fixed to the rear end portion of the lower surface of the support plate 62. The reinforcing plate 64 is a reinforcing rib for securing the fixing strength between the support plate 62 and the base plate 63. The reinforcing plate 64 is formed in a substantially isosceles trapezoidal flat plate shape, and is arranged such that the thickness direction of the reinforcing plate 64 matches the left-right direction. The rear end surface of the reinforcing plate 64 is fixed to the front surface of the base plate 63, and the upper end surface of the reinforcing plate 64 is fixed to the lower surface of the support plate 62. In FIG. 8, the illustration of the two reinforcing plates 64 is omitted.
　スライド機構４３は、いわゆるダブルスライドレールであり、図９、図１０に示すように、レール固定板６１に固定される第１レール６７と、前後方向へのスライドが可能になるように第１レール６７に保持される第２レール６８と、前後方向へのスライドが可能になるように第２レール６８に保持されるとともにレール固定板５８に固定される第３レール６９とを備えている。第１レール６７と第２レール６８との間、および、第２レール６８と第３レール６９との間には、ボールベアリングが配置されている。本形態の第１レール６７は、支持フレーム４２に固定される固定側レールであり、第３レール６９は、ベース部材４１に固定される可動側レールである。なお、スライド機構４３は、シングルスライドレールであっても良い。 The slide mechanism 43 is a so-called double slide rail, and as shown in FIG. 9 and FIG. 10, the first rail 67 fixed to the rail fixing plate 61 and the first rail to be able to slide in the front and rear direction A second rail 68 held at 67 and a third rail 69 held by the second rail 68 and fixed to the rail fixing plate 58 so as to be slidable in the front-rear direction. Ball bearings are disposed between the first rail 67 and the second rail 68 and between the second rail 68 and the third rail 69. The first rail 67 in this embodiment is a fixed side rail fixed to the support frame 42, and the third rail 69 is a movable side rail fixed to the base member 41. The slide mechanism 43 may be a single slide rail.
　第２レール６８の長さ（前後方向の長さ）は、第３レール６９の長さよりも若干長くなっている。第１レール６７の長さは、第２レール６８の長さの約２倍程度となっている。第１レール６７は、右側に配置されるレール固定板６１の右側面に固定されるとともに、左側に配置されるレール固定板６１の左側面に固定されている。第３レール６９は、右側に配置されるレール固定板５８の左側面に固定されるとともに、左側に配置されるレール固定板５８の右側面に固定されている。また、第３レール６９は、レール固定板５８の後端部に固定されている。 The length (length in the front-rear direction) of the second rail 68 is slightly longer than the length of the third rail 69. The length of the first rail 67 is about twice that of the second rail 68. The first rail 67 is fixed to the right side surface of the rail fixing plate 61 disposed on the right side, and is fixed to the left side surface of the rail fixing plate 61 disposed on the left side. The third rail 69 is fixed to the left side surface of the rail fixing plate 58 disposed on the right side, and is fixed to the right side surface of the rail fixing plate 58 disposed on the left side. Further, the third rail 69 is fixed to the rear end of the rail fixing plate 58.
　ロック機構４４は、図６に示すように、ベース部材４１の後ろ側への移動を規制するストッパ７０と、ロック板６０に接触するローラ７１と、一端側でローラ７１を回転可能に保持するレバー部材７２と、レバー部材７２の他端側を回動可能に保持する保持部材７３とを備えている。ストッパ７０は、厚い円板状に形成されており、ストッパ７０の厚さ方向と前後方向とが一致するように配置されている。ストッパ７０は、たとえば、ゴムで形成されている。ストッパ７０は、固定部材７４に固定されている。固定部材７４は、支持板６２の後端の左端側に固定されている。ストッパ７０は、支持板６２の上側かつベース板５７の下側に配置されている。また、ストッパ７０は、左側に配置されるレール固定板６１のすぐ右側に配置されている。ベース板５７の下面の後端部の左端側には、ストッパ７０の前端面に接触する平板状の当接板７５が固定されている（図９参照）。 The lock mechanism 44, as shown in FIG. 6, includes a stopper 70 for restricting the rearward movement of the base member 41, a roller 71 in contact with the lock plate 60, and a lever for rotatably holding the roller 71 at one end. A member 72 and a holding member 73 for rotatably holding the other end side of the lever member 72 are provided. The stopper 70 is formed in a thick disk shape, and is arranged such that the thickness direction of the stopper 70 coincides with the front-rear direction. The stopper 70 is formed of, for example, rubber. The stopper 70 is fixed to the fixing member 74. The fixing member 74 is fixed to the left end side of the rear end of the support plate 62. The stopper 70 is disposed above the support plate 62 and below the base plate 57. In addition, the stopper 70 is disposed immediately to the right of the rail fixing plate 61 disposed on the left side. A flat contact plate 75 in contact with the front end surface of the stopper 70 is fixed to the left end side of the rear end portion of the lower surface of the base plate 57 (see FIG. 9).
　保持部材７３は、支持板６２の上面の後端側かつ右端側に固定されている。レバー部材７２の前端部は、左右方向を回動の軸方向とする回動が可能となるように保持部材７３に保持されている。ローラ７１は、左右方向を回転の軸方向とする回転が可能となるようにレバー部材７２の後端部に保持されている。レバー部材７２は、レバー部材７２の回動中心よりも後ろ側に配置される圧縮コイルバネ７６（図６参照）によって上側に付勢されている。すなわち、レバー部材７２は、圧縮コイルバネ７６の付勢力で図８の反時計回りの方向（反時計方向）に付勢されている。 The holding member 73 is fixed to the rear end side and the right end side of the upper surface of the support plate 62. The front end portion of the lever member 72 is held by the holding member 73 so as to be able to turn in the lateral direction as the axial direction of the turn. The roller 71 is held at the rear end portion of the lever member 72 so as to be rotatable with the left and right direction as the axial direction of rotation. The lever member 72 is biased upward by a compression coil spring 76 (see FIG. 6) disposed behind the rotation center of the lever member 72. That is, the lever member 72 is biased in the counterclockwise direction (counterclockwise direction) in FIG. 8 by the biasing force of the compression coil spring 76.
　ロック機構４５は、ロック機構４４と同様に、ストッパ７０とローラ７１とレバー部材７２と保持部材７３とを備えている。ロック機構４５では、ストッパ７０は、ベース部材４１の前側への移動を規制する。また、ストッパ７０は、固定部材７７に固定されており、固定部材７７は、支持板６２の上面の前端側かつ左端側に固定されている。ロック機構４５では、ストッパ７０の後端面に当接板７５の前面が接触する。 Similar to the lock mechanism 44, the lock mechanism 45 includes the stopper 70, the roller 71, the lever member 72, and the holding member 73. In the lock mechanism 45, the stopper 70 regulates the forward movement of the base member 41. The stopper 70 is fixed to the fixing member 77, and the fixing member 77 is fixed to the front end side and the left end side of the upper surface of the support plate 62. In the lock mechanism 45, the front surface of the contact plate 75 contacts the rear end surface of the stopper 70.
　また、ロック機構４５では、保持部材７３は、支持板６２の上面の前端側かつ右端側に固定されている。レバー部材７２の後端部は、左右方向を回動の軸方向とする回動が可能となるように保持部材７３に保持され、ローラ７１は、左右方向を回転の軸方向とする回転が可能となるようにレバー部材７２の前端部に保持されている。レバー部材７２は、レバー部材７２の回動中心よりも前側に配置される圧縮コイルバネ７６によって上側に付勢されている。すなわち、レバー部材７２は、圧縮コイルバネ７６の付勢力で図８の時計回りの方向（時計方向）に付勢されている。 Further, in the lock mechanism 45, the holding member 73 is fixed to the front end side and the right end side of the upper surface of the support plate 62. The rear end portion of the lever member 72 is held by the holding member 73 so as to be able to turn in the lateral direction as the axial direction of rotation, and the roller 71 can rotate in the lateral direction as the axial direction of rotation. It is hold | maintained at the front end part of the lever member 72 so that it may become. The lever member 72 is biased upward by a compression coil spring 76 disposed on the front side of the pivoting center of the lever member 72. That is, the lever member 72 is biased in the clockwise direction (clockwise direction) in FIG. 8 by the biasing force of the compression coil spring 76.
　ベース部材４１は、載置板４０に載置されるトレイ４の前端、載置板４０の前端およびベース板５７の前端が側板３８の前端よりも後ろ側に配置されてベース部材４１がロック機構４４によってロックされる後退限位置（図５、図６、図８の実線で示す位置）と、載置板４０に載置されるトレイ４の後端、載置板４０の後端およびベース板５７の後端が側板３８の前端よりも前側に配置されてベース部材４１がロック機構４５によってロックされる前進限位置（図８の二点鎖線で示す位置）との間で前後方向にスライド可能となっている。ロボット１１による液晶パネル２の搬送は、ベース部材４１が後退限位置にあるときに行われる。また、ベース部材４１が前進限位置にあるときに、検査前の液晶パネル２が収容された段積み状態のトレイ４であって、かつ、載置板４０に載置された状態のトレイ４がベース板５７に載置される。 In the base member 41, the front end of the tray 4 mounted on the mounting plate 40, the front end of the mounting plate 40, and the front end of the base plate 57 are disposed behind the front end of the side plate 38, and the base member 41 has a locking mechanism. The reverse limit position (position shown by the solid line in FIG. 5, FIG. 6, FIG. 8) locked by 44, the rear end of the tray 4 mounted on the mounting plate 40, the rear end of the mounting plate 40 and the base plate The rear end of 57 is disposed forward of the front end of the side plate 38, and can slide in the longitudinal direction between the forward limit position (the position shown by the two-dot chain line in FIG. 8) where the base member 41 is locked by the lock mechanism 45 It has become. The transport of the liquid crystal panel 2 by the robot 11 is performed when the base member 41 is at the retracted limit position. In addition, when the base member 41 is at the forward limit position, the tray 4 in the stacked state in which the liquid crystal panel 2 before the inspection is accommodated and the tray 4 in the state mounted on the mounting plate 40 is The base plate 57 is placed.
　ベース部材４１が後退限位置に配置されているときには、ロック機構４４のストッパ７０の前端面と当接板７５の後面とが軽く接触しているか、あるいは、わずかな隙間を介して対向している。また、ベース部材４１が後退限位置に配置されているときには、ロック板６０の傾斜面６０ａとロック機構４４のローラ７１とが接触している。そのため、ベース部材４１の前後方向への移動が規制される。ベース部材４１が前進限位置に配置されているときには、ロック機構４５のストッパ７０の後端面と当接板７５の前面とが軽く接触しているか、あるいは、わずかな隙間を介して対向している。また、ベース部材４１が前進限位置に配置されているときには、ロック板６０の傾斜面６０ｂとロック機構４５のローラ７１とが接触している。そのため、ベース部材４１の前後方向への移動が規制される。 When the base member 41 is disposed at the retracted limit position, the front end surface of the stopper 70 of the lock mechanism 44 and the rear surface of the contact plate 75 lightly contact or face each other through a slight gap. . Further, when the base member 41 is disposed at the retracted limit position, the inclined surface 60 a of the lock plate 60 and the roller 71 of the lock mechanism 44 are in contact with each other. Therefore, movement of the base member 41 in the front-rear direction is restricted. When the base member 41 is disposed at the forward limit position, the rear end surface of the stopper 70 of the lock mechanism 45 and the front surface of the contact plate 75 are in slight contact or face each other through a slight gap. . In addition, when the base member 41 is disposed at the forward limit position, the inclined surface 60 b of the lock plate 60 and the roller 71 of the lock mechanism 45 are in contact with each other. Therefore, movement of the base member 41 in the front-rear direction is restricted.
　ベース部材４１が後退限位置に向かって後ろ側に移動するときには、ロック板６０の傾斜面６０ｂがロック機構４４のローラ７１に接触する。その後、ベース部材４１がさらに後ろ側へ移動すると、圧縮コイルバネ７６の付勢力に抗してレバー部材７２が図８の時計方向に回動してロック板６０の後端部がローラ７１を乗り越える。ロック板６０の後端部がローラ７１を乗り越えると、圧縮コイルバネ７６の付勢力でレバー部材７２が図８の反時計方向に回動してロック板６０の傾斜面６０ａとローラ７１とが接触する。 The inclined surface 60 b of the lock plate 60 contacts the roller 71 of the lock mechanism 44 when the base member 41 moves backward toward the retracted limit position. Thereafter, when the base member 41 moves further backward, the lever member 72 rotates clockwise in FIG. 8 against the biasing force of the compression coil spring 76, and the rear end portion of the lock plate 60 rides over the roller 71. When the rear end of the lock plate 60 passes over the roller 71, the lever member 72 rotates counterclockwise in FIG. 8 by the biasing force of the compression coil spring 76, and the inclined surface 60a of the lock plate 60 contacts the roller 71. .
　同様に、ベース部材４１が前進限位置に向かって前側に移動するときには、ロック板６０の傾斜面６０ａがロック機構４５のローラ７１に接触する。その後、ベース部材４１がさらに前側へ移動すると、圧縮コイルバネ７６の付勢力に抗してレバー部材７２が図８の反時計方向に回動してロック板６０の前端部がローラ７１を乗り越える。ロック板６０の前端部がローラ７１を乗り越えると、圧縮コイルバネ７６の付勢力でレバー部材７２が図８の時計方向に回動してロック板６０の傾斜面６０ｂとローラ７１とが接触する。 Similarly, the inclined surface 60 a of the lock plate 60 contacts the roller 71 of the lock mechanism 45 when the base member 41 moves forward toward the forward movement limit position. Thereafter, when the base member 41 moves further to the front side, the lever member 72 pivots counterclockwise in FIG. 8 against the biasing force of the compression coil spring 76, and the front end portion of the lock plate 60 rides over the roller 71. When the front end portion of the lock plate 60 passes over the roller 71, the lever member 72 rotates clockwise in FIG. 8 by the biasing force of the compression coil spring 76, and the inclined surface 60b of the lock plate 60 contacts the roller 71.
　なお、トレイ配置部６は、ベース部材４１が後退限位置にあることを検知するためのセンサ７９を備えている（図６参照）。センサ７９は、近接センサであり、固定部材を介して支持板６２の上面の後端部の右端側に固定されている。ベース板５７の後端部には、センサ７９に検知されるボルト８０が固定されている（図６参照）。また、トレイ配置部６は、ベース部材４１が後退限位置にあるときに、載置板４０に載置されるトレイ４の左右の両端部のすぐ後ろ側に配置される２枚の後側板８１を備えている。後側板８１は、側板３８に固定されている。 The tray placement unit 6 is provided with a sensor 79 for detecting that the base member 41 is at the reverse limit position (see FIG. 6). The sensor 79 is a proximity sensor, and is fixed to the right end side of the rear end portion of the upper surface of the support plate 62 via a fixing member. A bolt 80 detected by a sensor 79 is fixed to the rear end of the base plate 57 (see FIG. 6). Further, when the base member 41 is at the reverse limit position, the tray placement portion 6 is the two rear side plates 81 disposed immediately behind the left and right ends of the tray 4 placed on the placement plate 40. Is equipped. The rear side plate 81 is fixed to the side plate 38.
　また、トレイ配置部６は、前進限位置に向かって移動するベース部材４１を下側から支持するローラ８２を備えている。ローラ８２は、左右方向を回転の軸方向とする回転が可能となるように固定部材８３に保持されている。固定部材８３は、架台１４の上に設置される本体フレームに固定されている。ローラ８２は、左右の両端側のそれぞれに配置されている。また、ローラ８２は、前後方向においてロック機構４５の保持部材７３とほぼ同じ位置に配置されている。ローラ８２は、レール固定板５８の下面に接触して、レール固定板５８を下側から支持する。 Further, the tray placement portion 6 is provided with a roller 82 for supporting the base member 41 moving toward the forward limit position from the lower side. The roller 82 is held by the fixing member 83 so as to be able to rotate with the left and right direction as the axial direction of rotation. The fixing member 83 is fixed to the main body frame installed on the gantry 14. The rollers 82 are disposed on the left and right ends, respectively. Further, the roller 82 is disposed at substantially the same position as the holding member 73 of the lock mechanism 45 in the front-rear direction. The roller 82 contacts the lower surface of the rail fixing plate 58 to support the rail fixing plate 58 from the lower side.
　昇降機構４６は、図７に示すように、モータ８４と、モータ８４の出力軸にカップリング８５を介して接続されるネジ部材と、このネジ部材に係合するとともにベース板６３の後面に固定されるナット部材と、支持フレーム４２を上下方向に案内するガイド機構８６とを備えている。モータ８４は、たとえば、ＡＣインダクションモータであり、モータ８４の速度調整が可能となっている。モータ８４は、平板状に形成される支持板８７に固定されている。支持板８７は、架台１４に固定されている。また、支持板８７には、後側板３９が固定されている。ネジ部材は、支持板８７に回転可能に保持されている。ガイド機構８６は、たとえば、支持板８７に固定されるガイドレールと、このガイドレールに係合するとともにベース板６３に固定されるガイドブロックとを備えている。なお、モータ８４は、サーボモータであっても良い。 As shown in FIG. 7, the elevating mechanism 46 engages with the motor 84, a screw member connected to the output shaft of the motor 84 through the coupling 85, and the screw member and is fixed to the rear surface of the base plate 63. And a guide mechanism 86 for guiding the support frame 42 in the vertical direction. The motor 84 is, for example, an AC induction motor, and is capable of adjusting the speed of the motor 84. The motor 84 is fixed to a support plate 87 formed in a flat plate shape. The support plate 87 is fixed to the gantry 14. Further, the back side plate 39 is fixed to the support plate 87. The screw member is rotatably held by the support plate 87. The guide mechanism 86 includes, for example, a guide rail fixed to the support plate 87, and a guide block engaged with the guide rail and fixed to the base plate 63. The motor 84 may be a servomotor.
　ピンシリンダ５０は、エアシリンダである。ピンシリンダ５０は、圧縮空気を駆動源として移動する可動ピン８９と、可動ピン８９を移動可能に保持するシリンダ本体とを備えている（図１１（Ａ）、（Ｂ）参照）。上述のように、トレイ配置部６は、４個のピンシリンダ５０を備えている。４個のピンシリンダ５０のうちの２個のピンシリンダ５０のシリンダ本体は、左側に配置される側板３８に所定の部材を介して固定され、残りの２個のピンシリンダ５０のシリンダ本体は、右側に配置される側板３８に所定の部材を介して固定されている。 The pin cylinder 50 is an air cylinder. The pin cylinder 50 includes a movable pin 89 moving with compressed air as a drive source, and a cylinder body movably holding the movable pin 89 (see FIGS. 11A and 11B). As described above, the tray placement unit 6 includes four pin cylinders 50. The cylinder bodies of two of the four pin cylinders 50 are fixed to the side plate 38 disposed on the left side through a predetermined member, and the cylinder bodies of the remaining two pin cylinders 50 are as follows: It is being fixed to the side plate 38 arrange | positioned on the right side through the predetermined member.
　左側の側板３８に固定される２個のピンシリンダ５０のうちの一方のピンシリンダ５０のシリンダ本体は、側板３８の前端部に固定され、他方のピンシリンダ５０のシリンダ本体は、側板３８の後端部に固定されている。右側の側板３８に固定される２個のピンシリンダ５０のうちの一方のピンシリンダ５０のシリンダ本体は、側板３８の前端部に固定され、他方のピンシリンダ５０のシリンダ本体は、側板３８の後端部に固定されている。左側の側板３８の前端部に固定されるピンシリンダ５０と右側の側板３８の前端部に固定されるピンシリンダ５０とは前後方向において同じ位置に配置され、左側の側板３８の後端部に固定されるピンシリンダ５０と右側の側板３８の後端部に固定されるピンシリンダ５０とは前後方向において同じ位置に配置されている。 The cylinder body of one of the two pin cylinders 50 fixed to the left side plate 38 is fixed to the front end of the side plate 38, and the cylinder body of the other pin cylinder 50 is positioned behind the side plate 38. It is fixed to the end. The cylinder body of one of the two pin cylinders 50 fixed to the right side plate 38 is fixed to the front end of the side plate 38, and the cylinder body of the other pin cylinder 50 is positioned behind the side plate 38. It is fixed to the end. The pin cylinder 50 fixed to the front end of the left side plate 38 and the pin cylinder 50 fixed to the front end of the right side plate 38 are disposed at the same position in the front-rear direction and fixed to the rear end of the left side plate 38 The pin cylinder 50 and the pin cylinder 50 fixed to the rear end of the right side plate 38 are disposed at the same position in the front-rear direction.
　ピンシリンダ５０は、可動ピン８９の移動方向と左右方向とが一致するように配置されている。また、左側の側板３８に固定される２個のピンシリンダ５０は、右側に向かって可動ピン８９が突出するように配置され、右側の側板３８に固定される２個のピンシリンダ５０は、左側に向かって可動ピン８９が突出するように配置されている。４本の可動ピン８９は、側板３８の上端面よりも上側に配置されている。 The pin cylinder 50 is disposed such that the moving direction of the movable pin 89 matches the left-right direction. Further, the two pin cylinders 50 fixed to the left side plate 38 are disposed such that the movable pin 89 protrudes toward the right side, and the two pin cylinders 50 fixed to the right side plate 38 are the left side The movable pin 89 is disposed so as to project toward the end. The four movable pins 89 are disposed above the upper end surface of the side plate 38.
　可動ピン８９は、最上段に配置されるトレイ４と上から２番目に配置されるトレイ４とを分離するために、最上段に配置されるトレイ４と上から２番目に配置されるトレイ４との間に入り込む（図１２（Ｂ）、（Ｃ）参照）。具体的には、可動ピン８９は、最上段に配置されるトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に入り込む。また、本形態では、４本の可動ピン８９によって、最上段に配置されるトレイ４を下側から支持することが可能になっている。すなわち、可動ピン８９は、最上段に配置されるトレイ４を下側から支持できるように４箇所に配置されている。 The movable pins 89 are disposed at the uppermost stage and the second tray from the top in order to separate the tray 4 disposed at the uppermost stage and the tray 4 disposed second from the upper side. And (see FIGS. 12 (B) and (C)). Specifically, the movable pin 89 is inserted between the ridge 4 a of the tray 4 disposed at the top and the ridge 4 a of the tray 4 disposed second from the top. Further, in the present embodiment, the four movable pins 89 can support the tray 4 disposed at the top from the lower side. That is, the movable pins 89 are disposed at four positions so as to support the tray 4 disposed at the uppermost stage from the lower side.
　センサ５１～５３は、透過型の光学式センサであり、発光部９１と受光部９２とを備えている。センサ５２は、センサ５３よりも上側に配置され、センサ５１は、センサ５２よりも上側に配置されている。また、たとえば、センサ５２は、センサ５１よりも前側に配置され、センサ５３は、センサ５１よりも後ろ側に配置されている。センサ５１～５３の発光部９１は、たとえば、左側に配置される側板３８に所定の部材を介して固定され、センサ５１～５３の受光部９２は、右側に配置される側板３８に所定の部材を介して固定されている。発光部９１と受光部９２とは、左右方向で対向するように配置されている。また、発光部９１および受光部９２は、側板３８の上端面よりも上側に配置されている。なお、センサ５１～５３は、反射型の光学式センサであっても良い。 The sensors 51 to 53 are transmission type optical sensors, and include a light emitting unit 91 and a light receiving unit 92. The sensor 52 is disposed above the sensor 53, and the sensor 51 is disposed above the sensor 52. Also, for example, the sensor 52 is disposed on the front side of the sensor 51, and the sensor 53 is disposed on the rear side of the sensor 51. The light emitting units 91 of the sensors 51 to 53 are fixed to, for example, a side plate 38 disposed on the left via a predetermined member, and the light receiving units 92 of the sensors 51 to 53 are predetermined members on the side plate 38 disposed on the right It is fixed through. The light emitting unit 91 and the light receiving unit 92 are disposed to face each other in the left-right direction. The light emitting unit 91 and the light receiving unit 92 are disposed above the upper end surface of the side plate 38. The sensors 51 to 53 may be reflection type optical sensors.
　上述のように、センサ５１は、最上段のトレイ４の上限位置を検知するためのセンサであり、センサ５３は、昇降機構４６によって上昇する段積み状態のトレイ４の最上段のトレイ４を上限位置で停止させるためのセンサである。本形態では、昇降機構４６によって上昇する段積み状態のトレイ４のうちの最上段のトレイ４がセンサ５３で検知されると、モータ８４が減速し、最上段のトレイ４がセンサ５１で検知されると、モータ８４が停止する。 As described above, the sensor 51 is a sensor for detecting the upper limit position of the uppermost tray 4, and the sensor 53 is the upper limit of the uppermost tray 4 of the stacked trays 4 lifted by the lifting mechanism 46. It is a sensor for stopping at position. In this embodiment, when the uppermost tray 4 of the stacked trays 4 lifted by the elevating mechanism 46 is detected by the sensor 53, the motor 84 decelerates and the uppermost tray 4 is detected by the sensor 51. Then, the motor 84 is stopped.
　最上段のトレイ４が上限位置で停止しているときには、図１２（Ａ）に示すように、可動ピン８９は、最上段のトレイ４の鍔部４ａよりも下側であって、かつ、上から２番目に配置されるトレイ４の鍔部４ａよりも上側に配置されており、最上段のトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に可動ピン８９を入れ込むことが可能になっている。すなわち、本形態のセンサ５１は、最上段のトレイ４と上から２番目に配置されるトレイ４との間に可動ピン８９を入れ込むことが可能な位置で最上段のトレイ４を検知するためのセンサでもある。 When the uppermost tray 4 is stopped at the upper limit position, as shown in FIG. 12A, the movable pin 89 is lower than the ridge portion 4a of the uppermost tray 4 and upper Between the ridge 4a of the uppermost tray 4 and the ridge 4a of the second tray 4 from the top. The movable pin 89 can be inserted. That is, the sensor 51 of this embodiment detects the uppermost tray 4 at a position where the movable pin 89 can be inserted between the uppermost tray 4 and the second tray 4 from the top. It is also a sensor of
　また、本形態では、最上段のトレイ４が上限位置で停止すると、ピンシリンダ５０が動作して可動ピン８９が突出し、図１２（Ｂ）に示すように、最上段のトレイ４と上から２番目に配置されるトレイ４との間に可動ピン８９が入り込む。最上段のトレイ４と上から２番目に配置されるトレイ４との間に可動ピン８９が入り込むと、昇降機構４６は、図１２（Ｃ）に示すように、段積みされたトレイ４（段積み状態のトレイ４）を下降させて、可動ピン８９に最上段のトレイ４を支持させるとともに、最上段のトレイ４と上から２番目に配置されるトレイ４との間に隙間を形成する。 Further, in the present embodiment, when the uppermost tray 4 is stopped at the upper limit position, the pin cylinder 50 operates to cause the movable pin 89 to project, and as shown in FIG. 12B, the uppermost tray 4 and the top 2 The movable pin 89 is inserted between the second tray 4 and the second tray 4. When the movable pin 89 is inserted between the uppermost tray 4 and the second tray 4 from the top, the lifting mechanism 46 is configured to stack the stacked trays 4 (stages as shown in FIG. 12C). The stacked trays 4) are lowered to support the uppermost tray 4 on the movable pin 89, and form a gap between the uppermost tray 4 and the second tray 4 from the top.
　最上段のトレイ４が可動ピン８９に支持されるときには、最上段のトレイ４もわずかに下降する。わずかに下降した最上段のトレイ４は、センサ５１の検知範囲から外れる。一方、センサ５２は、わずかに下降した最上段のトレイ４を検知することが可能な位置に配置されており、可動ピン８９に支持されるときにわずかに下降した最上段のトレイ４は、センサ５２によって検知される。すなわち、センサ５２は、可動ピン８９に支持される最上段のトレイ４を検知するためのセンサである。 When the uppermost tray 4 is supported by the movable pin 89, the uppermost tray 4 is also slightly lowered. The uppermost tray 4 slightly lowered falls out of the detection range of the sensor 51. On the other hand, the sensor 52 is disposed at a position where it can detect the slightly lowered top tray 4, and the top tray 4 slightly lowered when supported by the movable pin 89 is a sensor Detected by 52. That is, the sensor 52 is a sensor for detecting the uppermost tray 4 supported by the movable pin 89.
　シリンダ４７は、ガイド付きのエアシリンダである。シリンダ４７は、ベース部材４１が後退限位置にあるときのトレイ４の前端よりも前側に配置されている。また、シリンダ４７は、ベース部材４１が後退限位置にあるときに、上限位置に配置される最上段のトレイ４の前側に配置されている。シリンダ４７は、所定の部材を介してトレイ配置部６の本体フレームに固定されている。また、シリンダ４７は、シリンダ４７のロッドが後ろ側へ突出するように配置されている。シリンダ４７のロッドの先端（後端）には、上限位置に配置される最上段のトレイ４の前端面に接触してトレイ４を後ろ側へ押す押付部材９３が固定されている。 The cylinder 47 is an air cylinder with a guide. The cylinder 47 is disposed on the front side of the front end of the tray 4 when the base member 41 is in the retracted limit position. In addition, the cylinder 47 is disposed on the front side of the uppermost tray 4 disposed at the upper limit position when the base member 41 is in the retracted limit position. The cylinder 47 is fixed to the main body frame of the tray placement unit 6 via a predetermined member. In addition, the cylinder 47 is disposed such that the rod of the cylinder 47 protrudes rearward. A pressing member 93 is fixed to the front end (rear end) of the rod of the cylinder 47 in contact with the front end surface of the uppermost tray 4 disposed at the upper limit position to push the tray 4 backward.
　本形態では、ベース部材４１が後退限位置にあるときであって、最上段のトレイ４が上限位置に配置されているときに、シリンダ４７が動作して押付部材９３によって最上段のトレイ４が後ろ側へ押されると、載置板４０に固定されたピン５６に、下側に配置される何枚かのトレイ４の傾斜面４ｂが接触して、水平方向（前後方向および左右方向）において、載置板４０に対して段積み状態のトレイ４が位置決めされる。本形態では、シリンダ４７と押付部材９３とピン５６とによって、載置板４０に対して水平方向でトレイ４を位置決めするための位置決め機構９４が構成されている。 In this embodiment, when the base member 41 is at the retracted limit position and the uppermost tray 4 is disposed at the upper limit position, the cylinder 47 operates and the pressing member 93 operates the uppermost tray 4. When pushed backward, the inclined surfaces 4b of some of the trays 4 disposed on the lower side are in contact with the pins 56 fixed to the mounting plate 40, and in the horizontal direction (front and rear direction and left and right direction) The trays 4 in the stacked state are positioned with respect to the mounting plate 40. In this embodiment, the cylinder 47, the pressing member 93 and the pin 56 constitute a positioning mechanism 94 for positioning the tray 4 in the horizontal direction with respect to the mounting plate 40.
　トレイ配置部９は、上述のように、載置板４０、ベース部材４１、スライド機構４３およびロック機構４４、４５を備えていない。図１３、図１４に示すように、トレイ配置部９の支持フレーム４２は、トレイ配置部９に配置されるトレイ４のうちの一番下に配置されるトレイ４が載置される載置板９５と、載置板９５が固定される２枚の固定板９６およびベース板９７と、２枚の補強板９８とを備えている。載置板９５は、載置板４０と同様に形成されている。載置板９５の後端側の２箇所の角部には、水平方向でトレイ４を位置決めするためのピン５６が固定されている。固定板９６は、前後方向に細長い長方形の平板状に形成されており、固定板９６の厚さ方向と左右方向とが一致するように配置されている。２枚の固定板９６は、左右方向に間隔をあけた状態で配置されている。固定板９６の上端面には、載置板９５の下面が固定されている。 As described above, the tray placement unit 9 does not include the placement plate 40, the base member 41, the slide mechanism 43, and the lock mechanisms 44 and 45. As shown in FIG. 13 and FIG. 14, the support frame 42 of the tray arranging unit 9 is a mounting plate on which the tray 4 arranged at the bottom of the trays 4 arranged in the tray arranging unit 9 is mounted. 95, two fixing plates 96 and a base plate 97 to which the mounting plate 95 is fixed, and two reinforcing plates 98. The mounting plate 95 is formed in the same manner as the mounting plate 40. Pins 56 for positioning the tray 4 in the horizontal direction are fixed to two corners of the rear end side of the mounting plate 95. The fixing plate 96 is formed in a rectangular flat plate shape that is elongated in the front-rear direction, and is arranged such that the thickness direction of the fixing plate 96 matches the left-right direction. The two fixing plates 96 are disposed in the state of being spaced apart in the left-right direction. The lower surface of the mounting plate 95 is fixed to the upper end surface of the fixing plate 96.
　ベース板９７は、長方形の平板状に形成されており、ベース板９７の厚さ方向と前後方向とが一致するように配置されている。ベース板９７の前面には、固定板９６の後端面が固定され、ベース板９７の上端面には、載置板９５の後端部の下面が固定されている。また、ベース板９７の後面には、昇降機構４６の一部を構成するナット部材と、ガイド機構８６の一部を構成するガイドブロックとが固定されている。補強板９８は、載置板９５とベース板９７との固定強度を確保するための補強リブである。補強板９８は、上下方向に細長い長方形の平板状に形成されており、補強板９８の厚さ方向と左右方向とが一致するように配置されている。補強板９８の後端面は、ベース板９７の前面に固定され、補強板９８の上端面は、載置板９５の下面に固定されている。 The base plate 97 is formed in a rectangular flat plate shape, and is arranged such that the thickness direction of the base plate 97 coincides with the front-rear direction. The rear end surface of the fixing plate 96 is fixed to the front surface of the base plate 97, and the lower surface of the rear end portion of the mounting plate 95 is fixed to the upper end surface of the base plate 97. Further, on the rear surface of the base plate 97, a nut member constituting a part of the elevating mechanism 46 and a guide block constituting a part of the guide mechanism 86 are fixed. The reinforcing plate 98 is a reinforcing rib for securing the fixing strength between the mounting plate 95 and the base plate 97. The reinforcing plate 98 is formed in a rectangular flat plate shape that is elongated in the vertical direction, and is arranged such that the thickness direction of the reinforcing plate 98 matches the left-right direction. The rear end surface of the reinforcing plate 98 is fixed to the front surface of the base plate 97, and the upper end surface of the reinforcing plate 98 is fixed to the lower surface of the mounting plate 95.
　また、上述のように、トレイ配置部９は、２個のピンシリンダ５０を備えている。トレイ配置部９では、２個のピンシリンダ５０のうちの１個のピンシリンダ５０は、左側に配置される側板３８の前端部に所定の部材を介して固定され、残りの１個のピンシリンダ５０は、右側に配置される側板３８の前端部に所定の部材を介して固定されている。２個のピンシリンダ５０は、前後方向において同じ位置に配置されている。また、左側の側板３８に固定されるピンシリンダ５０は、右側に向かって可動ピン８９が突出するように配置され、右側の側板３８に固定されるピンシリンダ５０は、左側に向かって可動ピン８９が突出するように配置されている。 Further, as described above, the tray placement unit 9 includes two pin cylinders 50. In the tray placement unit 9, one pin cylinder 50 of the two pin cylinders 50 is fixed to the front end of the side plate 38 disposed on the left side through a predetermined member, and the remaining one pin cylinder The reference numeral 50 is fixed to the front end of the side plate 38 disposed on the right side via a predetermined member. The two pin cylinders 50 are disposed at the same position in the front-rear direction. The pin cylinder 50 fixed to the left side plate 38 is disposed such that the movable pin 89 protrudes toward the right side, and the pin cylinder 50 fixed to the right side plate 38 is movable pin 89 toward the left side. Are arranged to protrude.
　トレイ配置部９においても、可動ピン８９は、最上段に配置されるトレイ４と上から２番目に配置されるトレイ４とを分離するために、最上段に配置されるトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に入り込む。ただし、トレイ配置部９では、２本の可動ピン８９によって、最上段に配置されるトレイ４を下側から支持することはできない。 Also in the tray placement portion 9, the movable pin 89 is the ridge portion 4a of the tray 4 disposed at the top to separate the tray 4 disposed at the top and the tray 2 disposed second from the top. And the ridge 4a of the tray 4 disposed second from the top. However, in the tray arrangement portion 9, the two movable pins 89 can not support the tray 4 disposed at the top from the lower side.
　また、上述のように、トレイ配置部９は、センサ５２、５３は備えていないが、最上段のトレイ４の上限位置を検知するためのセンサ５１を備えている。トレイ配置部９では、最上段のトレイ４がセンサ５１によって検知される位置でモータ８４が停止する。なお、上述のように、トレイ配置部７、８も、センサ５１は備えているが、センサ５２、５３は備えておらず、トレイ配置部７、８でも、最上段のトレイ４がセンサ５１によって検知される位置でモータ８４が停止する。 Further, as described above, the tray placement unit 9 does not include the sensors 52 and 53, but includes the sensor 51 for detecting the upper limit position of the uppermost tray 4. In the tray arrangement unit 9, the motor 84 is stopped at a position where the uppermost tray 4 is detected by the sensor 51. As described above, although the tray placement units 7 and 8 also include the sensor 51, the sensors 52 and 53 are not included, and even in the tray placement units 7 and 8, the uppermost tray 4 is detected by the sensor 51. The motor 84 stops at the detected position.
　トレイ配置部９でも、最上段のトレイ４が上限位置で停止しているときには、可動ピン８９は、最上段のトレイ４の鍔部４ａよりも下側であって、かつ、上から２番目に配置されるトレイ４の鍔部４ａよりも上側に配置されており、最上段のトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に可動ピン８９を入れ込むことが可能になっている。なお、トレイ配置部９では、最上段のトレイ４と上から２番目に配置されるトレイ４とが接触しており、この２個のトレイ４の間に隙間は形成されない。 Also in the tray placement portion 9, when the uppermost tray 4 is stopped at the upper limit position, the movable pin 89 is lower than the ridge portion 4a of the uppermost tray 4 and is second from the top The movable pin 89 is disposed between the ridge 4a of the uppermost tray 4 and the ridge 4a of the tray 4 disposed second from the top, which is disposed above the ridge 4a of the tray 4 to be disposed. It is possible to insert it. In the tray arrangement portion 9, the uppermost tray 4 and the second tray 4 from the top are in contact with each other, and no gap is formed between the two trays 4.
　（搬送システムの動作）
　搬送システム１によって、検査装置３への液晶パネル２の搬入および検査装置３からの液晶パネル２の搬出が行われるときには、まず、液晶パネル２が収容されていない空のトレイ４がトレイ配置部９に供給される。具体的には、たとえば、５段に積み重なった段積み状態の空のトレイ４がトレイ配置部９の左側からトレイ配置部９の載置板９５の上に作業員による手作業によって載置される。段積み状態の空のトレイ４がトレイ配置部９の載置板９５に載置されると、トレイ配置部９では、最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。なお、段積み状態の空のトレイ４は、トレイ配置部９の前側からトレイ配置部９の載置板９５の上に載置されても良い。 (Operation of transport system)
When carrying-in of the liquid crystal panel 2 to the inspection device 3 and unloading of the liquid crystal panel 2 from the inspection device 3 are performed by the transport system 1, first, the empty tray 4 in which the liquid crystal panel 2 is not accommodated Supplied to Specifically, for example, empty trays 4 stacked in five tiers are manually placed by the operator from the left side of tray placement unit 9 on placement plate 95 of tray placement unit 9 by a manual operation. . When the empty trays 4 in the stacked state are placed on the mounting plate 95 of the tray arrangement portion 9, in the tray arrangement portion 9, the trays in the stacked state are detected at the position where the uppermost tray 4 is detected by the sensor 51. The elevating mechanism 46 raises and lowers the tray 4 so that 4 stops. The empty trays 4 in the stacked state may be placed on the placement plate 95 of the tray placement unit 9 from the front side of the tray placement unit 9.
　その後、トレイ配置部９では、ピンシリンダ５０が動作して、最上段のトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に可動ピン８９が入り込む。その後、ロボット１２は、トレイ配置部９の最上段のトレイ４を保持して持ち上げるとともに、このトレイ４をトレイ配置部７まで搬送してトレイ配置部７の載置板４０に載置する。このときには、トレイ配置部７のベース部材４１は、後退限位置に配置されている。また、トレイ配置部７の支持フレーム４２は、所定の位置まで上昇している。なお、ロボット１２がトレイ４を搬送していないときには、可動フレーム３３およびトレイ保持部３４は、トレイ配置部９の上側で待機している。 Thereafter, in the tray arrangement portion 9, the pin cylinder 50 operates to insert the movable pin 89 between the ridge portion 4 a of the uppermost tray 4 and the ridge portion 4 a of the tray 4 disposed second from the top. Thereafter, the robot 12 holds and lifts the uppermost tray 4 of the tray arrangement unit 9, conveys the tray 4 to the tray arrangement unit 7, and places the tray 4 on the placement plate 40 of the tray arrangement unit 7. At this time, the base member 41 of the tray placement unit 7 is placed at the reverse limit position. Further, the support frame 42 of the tray placement unit 7 is elevated to a predetermined position. When the robot 12 is not transporting the tray 4, the movable frame 33 and the tray holding unit 34 stand by on the upper side of the tray arrangement unit 9.
　トレイ配置部７の載置板４０に空のトレイ４が載置されると、トレイ配置部７では、トレイ４がセンサ５１で検知される位置でトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。その後、トレイ配置部７では、シリンダ４７が動作して、前後左右方向において、空のトレイ４が位置決めされる。また、トレイ配置部９では、最上段のトレイ４がトレイ配置部７に向かって搬送されると、ピンシリンダ５０が動作して、突出していた可動ピン８９が引っ込む。その後、トレイ配置部９に残っている段積み状態のトレイ４の中の最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。 When the empty tray 4 is placed on the placement plate 40 of the tray placement unit 7, the lifting mechanism 46 in the tray placement unit 7 stops the tray 4 at a position where the tray 4 is detected by the sensor 51. The tray 4 is moved up and down. Thereafter, in the tray arrangement unit 7, the cylinder 47 operates to position the empty tray 4 in the front, rear, left, and right directions. Further, in the tray placement unit 9, when the uppermost tray 4 is conveyed toward the tray placement unit 7, the pin cylinder 50 operates to retract the protruding movable pin 89. Thereafter, the elevating mechanism 46 is configured to stop the stacked tray 4 at a position where the uppermost tray 4 in the stacked trays 4 remaining in the tray arrangement unit 9 is detected by the sensor 51. Move 4 up and down.
　その後、トレイ配置部９では、ピンシリンダ５０が動作して、最上段のトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に可動ピン８９が入り込む。その後、ロボット１２は、トレイ配置部９の最上段のトレイ４を保持して持ち上げるとともに、このトレイ４をトレイ配置部８まで搬送してトレイ配置部８の載置板４０に載置する。このときには、トレイ配置部８のベース部材４１は、後退限位置に配置されている。また、トレイ配置部８の支持フレーム４２は、所定の位置まで上昇している。トレイ配置部８の載置板４０に空のトレイ４が載置されると、トレイ配置部８では、トレイ４がセンサ５１で検知される位置でトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。その後、トレイ配置部８では、シリンダ４７が動作して、前後左右方向において、空のトレイ４が位置決めされる。 Thereafter, in the tray arrangement portion 9, the pin cylinder 50 operates to insert the movable pin 89 between the ridge portion 4 a of the uppermost tray 4 and the ridge portion 4 a of the tray 4 disposed second from the top. Thereafter, the robot 12 holds and lifts the uppermost tray 4 of the tray arrangement unit 9, conveys the tray 4 to the tray arrangement unit 8, and places the tray 4 on the placement plate 40 of the tray arrangement unit 8. At this time, the base member 41 of the tray placement unit 8 is placed at the reverse limit position. Further, the support frame 42 of the tray placement unit 8 is elevated to a predetermined position. When the empty tray 4 is placed on the placement plate 40 of the tray placement unit 8, the lifting mechanism 46 in the tray placement unit 8 stops the tray 4 at a position where the tray 4 is detected by the sensor 51. The tray 4 is moved up and down. Thereafter, in the tray arrangement unit 8, the cylinder 47 operates to position the empty tray 4 in the front, rear, left, and right directions.
　また、トレイ配置部９では、最上段のトレイ４がトレイ配置部８に向かって搬送されると、ピンシリンダ５０が動作して、突出していた可動ピン８９が引っ込む。その後、トレイ配置部９に残っている段積み状態のトレイ４の中の最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。 Further, in the tray arranging unit 9, when the uppermost tray 4 is conveyed toward the tray arranging unit 8, the pin cylinder 50 operates to retract the protruding movable pin 89. Thereafter, the elevating mechanism 46 is configured to stop the stacked tray 4 at a position where the uppermost tray 4 in the stacked trays 4 remaining in the tray arrangement unit 9 is detected by the sensor 51. Move 4 up and down.
　また、トレイ４に収容されている検査前の液晶パネル２が検査装置３に供給される場合には、検査前の液晶パネル２が収容された段積み状態のトレイ４がトレイ配置部６に供給される。段積み状態のトレイ４がトレイ配置部６に供給されるときには、支持フレーム４２を下限位置まで下降させるととともに、作業員が手作業によってベース部材４１を前進限位置まで移動させる。この状態で、段積み状態のトレイ４であって載置板４０に載置された状態のトレイ４が載置板４０と一緒にトレイ配置部６のベース板５７の上に作業員による手作業によって前側から載置される。すなわち、トレイ配置部６には、段積みされたトレイ４が前側から供給される。なお、トレイ配置部６に供給されるトレイ４の段数は、たとえば、最大でも３０段となっている。また、トレイ配置部６は、支持フレーム４２の下限位置を検知するためのセンサを備えている。トレイ配置部７、８も同様に支持フレーム４２の下限位置を検知するためのセンサを備えている。 Further, when the liquid crystal panel 2 before inspection contained in the tray 4 is supplied to the inspection device 3, the stacked tray 4 in which the liquid crystal panel 2 before inspection is accommodated is supplied to the tray arrangement portion 6 Be done. When the stacked trays 4 are supplied to the tray placement unit 6, the support frame 42 is lowered to the lower limit position, and the operator manually moves the base member 41 to the advanced limit position. In this state, the tray 4 in the stacked state and placed on the placement plate 40 is placed on the base plate 57 of the tray arrangement portion 6 together with the placement plate 40 by the operator. By the front side. That is, the stacked trays 4 are supplied to the tray arrangement unit 6 from the front side. The number of trays 4 supplied to the tray placement unit 6 is, for example, at most 30. Further, the tray placement unit 6 is provided with a sensor for detecting the lower limit position of the support frame 42. Similarly, the tray placement units 7 and 8 also include a sensor for detecting the lower limit position of the support frame 42.
　段積み状態のトレイ４が載置板４０と一緒にトレイ配置部６のベース板５７に載置されると、トレイ配置部６では、作業員が手作業によってベース部材４１を後退限位置まで移動させる。その後、トレイ配置部６では、最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を上昇させる。その後、シリンダ４７が動作して、前後左右方向において、段積み状態のトレイ４が位置決めされる。その後、ピンシリンダ５０が動作して、最上段のトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に可動ピン８９が入り込む。その後、昇降機構４６は、段積み状態のトレイ４を下降させて、可動ピン８９に最上段のトレイ４を支持させるとともに、最上段のトレイ４と上から２番目に配置されるトレイ４との間に隙間を形成する。 When the stacked trays 4 are placed on the base plate 57 of the tray placement unit 6 together with the placement plate 40, the operator manually moves the base member 41 to the retracted limit position in the tray placement unit 6 Let Thereafter, in the tray arrangement unit 6, the elevating mechanism 46 raises the tray 4 so that the stacked trays 4 stop at a position where the uppermost tray 4 is detected by the sensor 51. Thereafter, the cylinder 47 operates to position the stacked trays 4 in the front, rear, left, and right directions. Thereafter, the pin cylinder 50 operates to insert the movable pin 89 between the ridge 4a of the uppermost tray 4 and the ridge 4a of the tray 4 disposed second from the top. Thereafter, the lifting mechanism 46 lowers the stacked trays 4 so that the movable pin 89 supports the uppermost tray 4, and the uppermost tray 4 and the second tray 4 from the top Form a gap between them.
　トレイ配置部７、８の載置板４０に空のトレイ４が載置されるとともに、トレイ配置部６において、最上段のトレイ４と上から２番目に配置されるトレイ４との間に隙間が形成されると、ロボット１１は、トレイ配置部６の最上段に配置されるトレイ４の中の液晶パネル２を検査装置３に搬送する。すなわち、ロボット１１は、最上段に配置されるトレイ４と上から２番目に配置されるトレイ４との間に隙間が形成された状態で、トレイ配置部６の最上段に配置されるトレイ４の中の液晶パネル２を保持して持ち上げ、検査装置３に搬送する。具体的には、ロボット１１のパネル保持部２８ａが液晶パネル２の上面を吸引保持して、検査装置３に搬送する。 An empty tray 4 is placed on the placement plate 40 of the tray placement units 7 and 8, and in the tray placement unit 6, a gap is formed between the uppermost tray 4 and the tray 4 disposed second from the top. Is formed, the robot 11 transports the liquid crystal panel 2 in the tray 4 disposed at the top of the tray placement unit 6 to the inspection apparatus 3. That is, the robot 11 is disposed at the uppermost stage of the tray arrangement portion 6 in a state where a gap is formed between the tray 4 disposed at the uppermost stage and the tray 4 disposed second from the top. The liquid crystal panel 2 in the above is held and lifted, and conveyed to the inspection device 3. Specifically, the panel holding portion 28 a of the robot 11 sucks and holds the upper surface of the liquid crystal panel 2 and conveys it to the inspection device 3.
　また、ロボット１１は、検査装置３から検査後の液晶パネル２を、トレイ配置部７の最上段に配置されるトレイ４の中またはトレイ配置部８の最上段に配置されるトレイ４の中に搬送して収容する。具体的には、ロボット１１は、検査装置３での検査で正常と判断された液晶パネル２をトレイ配置部７の最上段に配置されるトレイ４に搬送して収容し、検査装置３での検査で異常と判断された液晶パネル２をトレイ配置部８の最上段に配置されるトレイ４に搬送して収容する。 In addition, the robot 11 places the liquid crystal panel 2 after inspection from the inspection apparatus 3 in the tray 4 disposed at the top of the tray placement unit 7 or in the tray 4 disposed at the top of the tray placement unit 8. Transport and store. Specifically, the robot 11 transports and accommodates the liquid crystal panel 2 determined to be normal in the inspection by the inspection device 3 to the tray 4 disposed at the top of the tray arrangement unit 7 and stores the liquid crystal panel 2 in the inspection device 3. The liquid crystal panel 2 determined to be abnormal in the inspection is conveyed to and stored in the tray 4 disposed at the top of the tray placement unit 8.
　ロボット１１によって液晶パネル２が搬出されるトレイ配置部６の最上段のトレイ４が空になると、ロボット１２は、空になったトレイ４をトレイ配置部６からトレイ配置部９に搬送して配置する。すなわち、ロボット１２は、空になったトレイ４を保持して持ち上げるとともに、トレイ配置部６からトレイ配置部９に搬送して、トレイ配置部９に配置される段積み状態のトレイ４の上に重ねる。トレイ４がトレイ配置部９に配置されると、トレイ配置部９では、トレイ配置部９に配置された最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。 When the uppermost tray 4 of the tray arranging unit 6 to which the liquid crystal panel 2 is carried out by the robot 11 becomes empty, the robot 12 conveys the empty tray 4 from the tray arranging unit 6 to the tray arranging unit 9 and arranges Do. That is, the robot 12 holds and lifts the tray 4 that has become empty, and conveys it from the tray arrangement unit 6 to the tray arrangement unit 9 to place the stacked trays 4 arranged in the tray arrangement unit 9. Pile up. When the trays 4 are arranged in the tray arranging unit 9, in the tray arranging unit 9, the stacked trays 4 stop at a position where the uppermost tray 4 arranged in the tray arranging unit 9 is detected by the sensor 51. Thus, the lifting mechanism 46 raises and lowers the tray 4.
　また、空のトレイ４が搬出されたトレイ配置部６では、ピンシリンダ５０が動作して、突出していた可動ピン８９が引っ込む。その後、トレイ配置部６に残っている段積み状態のトレイ４の中の最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を上昇させる。その後、ピンシリンダ５０が動作して、最上段のトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に可動ピン８９が入り込む。その後、昇降機構４６は、段積み状態のトレイ４を下降させて、可動ピン８９に最上段のトレイ４を支持させるとともに、最上段のトレイ４と上から２番目に配置されるトレイ４との間に隙間を形成する。 Further, in the tray arrangement portion 6 from which the empty tray 4 is carried out, the pin cylinder 50 operates to retract the protruding movable pin 89. Thereafter, the elevating mechanism 46 is configured to stop the stacked tray 4 at a position where the uppermost tray 4 in the stacked trays 4 remaining in the tray arrangement unit 6 is detected by the sensor 51. Raise 4 Thereafter, the pin cylinder 50 operates to insert the movable pin 89 between the ridge 4a of the uppermost tray 4 and the ridge 4a of the tray 4 disposed second from the top. Thereafter, the lifting mechanism 46 lowers the stacked trays 4 so that the movable pin 89 supports the uppermost tray 4, and the uppermost tray 4 and the second tray 4 from the top Form a gap between them.
　その後、ロボット１１は、トレイ配置部６の最上段に配置されるトレイ４の中の液晶パネル２を検査装置３に搬送する。また、トレイ配置部６に配置されたトレイ４の中の液晶パネル２が検査装置３に順次、搬送されて、トレイ配置部６の全てのトレイ４がトレイ配置部９に搬送されると、検査前の液晶パネル２が収容された段積み状態のトレイ４が、上述のようにトレイ配置部６に供給される。 Thereafter, the robot 11 transports the liquid crystal panel 2 in the tray 4 disposed at the top of the tray placement unit 6 to the inspection apparatus 3. Further, when the liquid crystal panels 2 in the trays 4 arranged in the tray arranging unit 6 are sequentially conveyed to the inspection device 3 and all the trays 4 in the tray arranging unit 6 are conveyed to the tray arranging unit 9, the inspection is performed. The stacked trays 4 in which the front liquid crystal panels 2 are accommodated are supplied to the tray placement unit 6 as described above.
　また、ロボット１１によって液晶パネル２が搬入されるトレイ配置部７の最上段のトレイ４に所定枚数の液晶パネル２が収容されると（たとえば、トレイ４に収容可能な枚数の液晶パネル２が収容されると）、ロボット１２は、トレイ配置部９からトレイ配置部７に空のトレイ４を搬送してトレイ配置部７の最上段のトレイ４の上に重ねる。すなわち、ロボット１２は、トレイ配置部９の最上段の空のトレイ４を保持して持ち上げるとともに、トレイ配置部９からトレイ配置部７に搬送して、トレイ配置部７のトレイ４の上に重ねる。空のトレイ４が搬入されたトレイ配置部７では、搬入されたトレイ４である最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。その後、ロボット１１は、トレイ配置部７の最上段に配置されるトレイ４の中に検査装置３から液晶パネル２を搬送する。 Further, when a predetermined number of liquid crystal panels 2 are accommodated in the uppermost tray 4 of the tray arrangement unit 7 into which the liquid crystal panels 2 are carried in by the robot 11 (for example, the liquid crystal panels 2 can be accommodated in the tray 4). Then, the robot 12 conveys the empty tray 4 from the tray placement unit 9 to the tray placement unit 7 and stacks it on the uppermost tray 4 of the tray placement unit 7. That is, the robot 12 holds and lifts the empty tray 4 at the uppermost stage of the tray arrangement unit 9 and conveys it from the tray arrangement unit 9 to the tray arrangement unit 7 and overlaps the tray 4 of the tray arrangement unit 7 . In the tray arranging unit 7 into which the empty trays 4 are carried in, the elevating mechanism 46 is stopped so that the stacked trays 4 stop at a position where the uppermost tray 4 which is the carried-in tray 4 is detected by the sensor 51. Raises and lowers the tray 4. Thereafter, the robot 11 conveys the liquid crystal panel 2 from the inspection device 3 into the tray 4 disposed at the top of the tray placement unit 7.
　同様に、ロボット１１によって液晶パネル２が搬入されるトレイ配置部８の最上段のトレイ４に所定枚数の液晶パネル２が収容されると、ロボット１２は、トレイ配置部９からトレイ配置部８に空のトレイ４を搬送してトレイ配置部８の最上段のトレイ４の上に重ねる。すなわち、ロボット１２は、トレイ配置部９の最上段の空のトレイ４を保持して持ち上げるとともに、トレイ配置部９からトレイ配置部８に搬送して、トレイ配置部８のトレイ４の上に重ねる。空のトレイ４が搬入されたトレイ配置部８では、搬入されたトレイ４である最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。その後、ロボット１１は、トレイ配置部８の最上段に配置されるトレイ４の中に検査装置３から液晶パネル２を搬送する。 Similarly, when a predetermined number of liquid crystal panels 2 are accommodated in the uppermost tray 4 of the tray arranging unit 8 into which the liquid crystal panels 2 are carried in by the robot 11, the robot 12 transfers the tray arranging unit 9 to the tray arranging unit 8. The empty tray 4 is conveyed and stacked on the uppermost tray 4 of the tray arrangement unit 8. That is, the robot 12 holds and lifts the empty tray 4 at the uppermost stage of the tray arrangement unit 9 and conveys it from the tray arrangement unit 9 to the tray arrangement unit 8 and overlaps the tray 4 of the tray arrangement unit 8 . In the tray arranging unit 8 into which the empty trays 4 are carried in, the elevating mechanism 46 is stopped so that the stacked trays 4 stop at a position where the uppermost tray 4 which is the carried-in tray 4 is detected by the sensor 51. Raises and lowers the tray 4. Thereafter, the robot 11 conveys the liquid crystal panel 2 from the inspection device 3 into the tray 4 disposed at the top of the tray placement unit 8.
　また、トレイ配置部７において、所定枚数の液晶パネル２が収容されたトレイ４が所定の段数、段積みされると、トレイ配置部７から段積みされたトレイ４が取り出される。段積み状態のトレイ４がトレイ配置部７から取り出されるときには、支持フレーム４２を下限位置まで下降させるとともに、作業員が手作業によってベース部材４１を前進限位置まで移動させる。この状態で、トレイ配置部７の載置板４０に載置された段積み状態のトレイ４を作業員による手作業によって載置板４０と一緒にベース板５７から持ち上げて前側に取り出す。すなわち、段積みされたトレイ４がトレイ配置部７から前側に取り出される。なお、トレイ配置部７は、トレイ４が所定の段数、段積みされたことを検知するためのセンサを備えている。 Further, in the tray arranging unit 7, when the trays 4 accommodating the predetermined number of liquid crystal panels 2 are stacked in a predetermined number of stages, the stacked trays 4 are taken out from the tray arranging unit 7. When the stacked trays 4 are taken out of the tray placement unit 7, the support frame 42 is lowered to the lower limit position, and the operator manually moves the base member 41 to the advanced limit position. In this state, the stacked trays 4 placed on the placement plate 40 of the tray placement unit 7 are lifted from the base plate 57 together with the placement plate 40 by a manual operation by a worker and taken out on the front side. That is, the stacked trays 4 are taken out from the tray arrangement unit 7 on the front side. The tray placement unit 7 is provided with a sensor for detecting that the trays 4 have been stacked in a predetermined number of stages.
　トレイ配置部７から段積み状態のトレイ４が載置板４０と一緒に取り出されると、トレイ配置部７のベース板５７に別の載置板４０が手作業で載置される。その後、トレイ配置部７では、作業員が手作業によってベース部材４１を後退限位置まで移動させる。その後、トレイ配置部７では、昇降機構４６が所定位置まで支持フレーム４２を上昇させる。その後、ロボット１２は、トレイ配置部９の最上段のトレイ４をトレイ配置部７まで搬送してトレイ配置部７の載置板４０に載置する。トレイ配置部７の載置板４０に空のトレイ４が載置されると、トレイ配置部７では、トレイ４がセンサ５１で検知される位置でトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。 When the stacked trays 4 are taken out from the tray placement unit 7 together with the placement plate 40, another placement plate 40 is manually placed on the base plate 57 of the tray placement unit 7. Thereafter, in the tray placement unit 7, the operator manually moves the base member 41 to the retracted limit position. Thereafter, in the tray placement unit 7, the lifting mechanism 46 lifts the support frame 42 to a predetermined position. Thereafter, the robot 12 conveys the uppermost tray 4 of the tray placement unit 9 to the tray placement unit 7 and places the tray 4 on the placement plate 40 of the tray placement unit 7. When the empty tray 4 is placed on the placement plate 40 of the tray placement unit 7, the lifting mechanism 46 in the tray placement unit 7 stops the tray 4 at a position where the tray 4 is detected by the sensor 51. The tray 4 is moved up and down.
　同様に、トレイ配置部８において、所定枚数の液晶パネル２が収容されたトレイ４が所定の段数、段積みされると、トレイ配置部８から段積みされたトレイ４が取り出される。段積み状態のトレイ４がトレイ配置部８から取り出されるときには、支持フレーム４２を下限位置まで下降させるとともに、作業員が手作業によってベース部材４１を前進限位置まで移動させる。この状態で、トレイ配置部８の載置板４０に載置された段積み状態のトレイ４を載置板４０と一緒に作業員による手作業によって前側に取り出す。すなわち、段積みされたトレイ４がトレイ配置部８から前側に取り出される。なお、トレイ配置部８は、トレイ４が所定の段数、段積みされたことを検知するためのセンサを備えている。 Similarly, when trays 4 containing a predetermined number of liquid crystal panels 2 are stacked in a predetermined number of stages in tray disposing unit 8, trays 4 stacked from tray disposing unit 8 are taken out. When the stacked trays 4 are taken out of the tray placement unit 8, the support frame 42 is lowered to the lower limit position, and the operator manually moves the base member 41 to the advanced limit position. In this state, the stacked trays 4 placed on the placement plate 40 of the tray placement unit 8 are taken out together with the placement plate 40 to the front side by a manual operation by a worker. That is, the stacked trays 4 are taken out from the tray arrangement unit 8 to the front side. The tray placement unit 8 is provided with a sensor for detecting that the trays 4 have been stacked in a predetermined number of stages.
　トレイ配置部８から段積み状態のトレイ４が載置板４０と一緒に取り出されると、トレイ配置部８のベース板５７に別の載置板４０が手作業で載置される。その後、トレイ配置部８では、作業員が手作業によってベース部材４１を後退限位置まで移動させる。その後、トレイ配置部８では、昇降機構４６が所定位置まで支持フレーム４２を上昇させる。その後、ロボット１２は、トレイ配置部９の最上段のトレイ４をトレイ配置部８まで搬送してトレイ配置部８の載置板４０に載置する。トレイ配置部８の載置板４０に空のトレイ４が載置されると、トレイ配置部８では、トレイ４がセンサ５１で検知される位置でトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。 When the stacked trays 4 are taken out from the tray placement unit 8 together with the placement plate 40, another placement plate 40 is manually placed on the base plate 57 of the tray placement unit 8. Thereafter, in the tray placement unit 8, the worker manually moves the base member 41 to the retracted limit position. Thereafter, in the tray arrangement unit 8, the lifting mechanism 46 lifts the support frame 42 to a predetermined position. Thereafter, the robot 12 conveys the uppermost tray 4 of the tray arrangement unit 9 to the tray arrangement unit 8 and places the tray 4 on the placement plate 40 of the tray arrangement unit 8. When the empty tray 4 is placed on the placement plate 40 of the tray placement unit 8, the lifting mechanism 46 in the tray placement unit 8 stops the tray 4 at a position where the tray 4 is detected by the sensor 51. The tray 4 is moved up and down.
　なお、トレイ配置部９では、トレイ配置部９からトレイ配置部７またはトレイ配置部８にロボット１２がトレイ４を搬出する前に、ピンシリンダ５０が動作して、最上段のトレイ４の鍔部４ａと上から２番目に配置されるトレイ４の鍔部４ａとの間に可動ピン８９が入り込む。また、最上段のトレイ４がトレイ配置部７、８に向かって搬送されると、ピンシリンダ５０が動作して、突出していた可動ピン８９が引っ込む。その後、トレイ配置部９に残っている段積み状態のトレイ４の中の最上段のトレイ４がセンサ５１で検知される位置で段積み状態のトレイ４が停止するように、昇降機構４６がトレイ４を昇降させる。 In the tray arrangement unit 9, the pin cylinder 50 operates before the robot 12 carries out the tray 4 from the tray arrangement unit 9 to the tray arrangement unit 7 or the tray arrangement unit 8, and the ridge portion of the uppermost tray 4 A movable pin 89 is inserted between 4 a and the ridge 4 a of the tray 4 disposed second from the top. In addition, when the uppermost tray 4 is conveyed toward the tray arranging portions 7 and 8, the pin cylinder 50 operates to retract the protruding movable pin 89. Thereafter, the elevating mechanism 46 is configured to stop the stacked tray 4 at a position where the uppermost tray 4 in the stacked trays 4 remaining in the tray arrangement unit 9 is detected by the sensor 51. Move 4 up and down.
　一方、カセット５に収容されている検査前の液晶パネル２が検査装置３に供給される場合には、検査前の液晶パネル２が収容されたカセット５がカセット配置部１３に供給される。ロボット１１は、カセット５の中の液晶パネル２を検査装置３に搬送するとともに、検査装置３から検査後の液晶パネル２を、トレイ配置部７の最上段に配置されるトレイ４の中またはトレイ配置部８の最上段に配置されるトレイ４の中に搬送して収容する。 On the other hand, when the liquid crystal panel 2 before inspection contained in the cassette 5 is supplied to the inspection apparatus 3, the cassette 5 containing the liquid crystal panel 2 before inspection is supplied to the cassette placement unit 13. The robot 11 transports the liquid crystal panel 2 in the cassette 5 to the inspection device 3, and the liquid crystal panel 2 after inspection from the inspection device 3 is placed in the tray 4 or the tray disposed at the uppermost stage of the tray arrangement portion 7. The sheet is conveyed and accommodated in the tray 4 disposed at the uppermost stage of the placement unit 8.
　（本形態の主な効果）
　以上説明したように、本形態では、トレイ配置部６は、段積み状態のトレイ４が載置される載置板４０と、載置板４０が着脱可能に載置されるベース部材４１とを備えている。そのため、本形態では、上述のように、載置板４０に載置された段積み状態のトレイ４を載置板４０と一緒にベース部材４１に載置すれば、載置板４０に載置された段積み状態のトレイ４を載置板４０と一緒にトレイ配置部６に供給することができる。また、本形態では、トレイ配置部７、８が載置板４０とベース部材４１とを備えているため、上述のように、載置板４０に載置された段積み状態のトレイ４を載置板４０と一緒にベース部材４１から持ち上げれば、載置板４０に載置された段積み状態のトレイ４を載置板４０と一緒にトレイ配置部７、８から取り出すことが可能になる。 (Main effects of this form)
As described above, in the present embodiment, the tray arranging unit 6 includes the mounting plate 40 on which the stacked trays 4 are mounted, and the base member 41 on which the mounting plate 40 is detachably mounted. Have. Therefore, in the present embodiment, as described above, when the stacked trays 4 placed on the placement plate 40 are placed on the base member 41 together with the placement plate 40, the placement on the placement plate 40 is performed. The stacked trays 4 can be supplied to the tray arrangement portion 6 together with the mounting plate 40. Further, in the present embodiment, since the tray arranging portions 7 and 8 include the mounting plate 40 and the base member 41, the stacked trays 4 mounted on the mounting plate 40 are mounted as described above. Lifting from the base member 41 together with the placing plate 40 makes it possible to take out the stacked trays 4 placed on the placing plate 40 from the tray arranging portions 7 and 8 together with the placing plate 40. .
　また、本形態では、載置板４０の剛性がトレイ４の剛性よりも高くなっているため、載置板４０に載置された段積み状態のトレイ４を載置板４０と一緒にトレイ配置部６に供給する際や、載置板４０に載置された段積み状態のトレイ４を載置板４０と一緒にトレイ配置部７、８から取り出す際に、段積み状態のトレイ４の中の下側に配置されるトレイ４の変形を抑制することが可能になる。したがって、本形態では、トレイ４が段積み状態でトレイ配置部６に供給されても、また、トレイ４が段積み状態でトレイ配置部７、８から取り出されても、段積み状態のトレイ４の中の下側に配置されるトレイ４の変形を抑制することが可能になる。 Further, in the present embodiment, since the rigidity of the placement plate 40 is higher than the stiffness of the tray 4, the stacked trays 4 placed on the placement plate 40 are placed in a tray arrangement with the placement plate 40. In the tray 4 in a stacked state, when supplying trays 6 or taking out the stacked trays 4 placed on the mounting plate 40 from the tray arranging portions 7 and 8 together with the mounting plate 40 It is possible to suppress the deformation of the tray 4 disposed on the lower side. Therefore, in the present embodiment, even if the trays 4 are supplied to the tray arranging unit 6 in a stacked state, and even if the trays 4 are taken out from the tray arranging units 7 and 8 in a stacked state, the trays 4 in a stacked state It is possible to suppress the deformation of the tray 4 disposed on the lower side in the inside of the.
　本形態では、載置板４０は、樹脂で形成されている。そのため、本形態では、載置板４０の剛性がトレイ４の剛性より高くなっていても載置板４０の重量を軽減することが可能になる。したがって、本形態では、載置板４０に載置された段積み状態のトレイ４をトレイ配置部６に供給する供給作業や、載置板４０に載置された段積み状態のトレイ４をトレイ配置部７、８から取り出す取出作業を作業者が手作業で行う場合であっても、供給作業や取出作業の際に、載置板４０に載置された段積み状態のトレイ４を載置板４０と一緒に持ち上げやすくなる。 In the present embodiment, the mounting plate 40 is formed of resin. Therefore, in the present embodiment, even if the rigidity of the mounting plate 40 is higher than the rigidity of the tray 4, the weight of the mounting plate 40 can be reduced. Therefore, in the present embodiment, the supply operation for supplying the stacked trays 4 placed on the placement plate 40 to the tray arrangement unit 6 and the stacked tray 4 placed on the placement plate 40 are trays Even when the operator manually carries out the removal work to be taken out from the placement units 7 and 8, the tray 4 in the stacked state placed on the placement plate 40 is placed at the time of the supply work and the removal work. It becomes easier to lift with the board 40.
　本形態では、トレイ配置部６は、支持フレーム４２に対してベース部材４１をスライドさせるスライド機構４３を備えている。そのため、本形態では、ベース板５７の後端が側板３８の前端よりも前側に配置される前進限位置までベース部材４１をスライドさせた状態で、段積み状態のトレイ４を載置板４０と一緒にベース板５７に載置することができる。したがって、本形態では、段積み状態のトレイ４の供給作業を容易に行うことが可能になる。また、本形態では、トレイ配置部７、８がスライド機構４３を備えているため、載置板４０に載置されるトレイ４の後端および載置板４０の後端が側板３８の前端よりも前側に配置される前進限位置までベース部材４１をスライドさせた状態で、段積み状態のトレイ４を載置板４０と一緒にベース部材４１から持ち上げることができる。したがって、本形態では、段積み状態のトレイ４の取出作業を容易に行うことが可能になる。 In the present embodiment, the tray placement unit 6 includes a slide mechanism 43 that slides the base member 41 with respect to the support frame 42. Therefore, in the present embodiment, with the base member 41 being slid to the forward limit position where the rear end of the base plate 57 is disposed on the front side of the front end of the side plate 38, It can be placed on the base plate 57 together. Therefore, in the present embodiment, it is possible to easily perform the supply operation of the stacked trays 4. Further, in the present embodiment, since the tray arranging parts 7 and 8 are provided with the slide mechanism 43, the rear end of the tray 4 placed on the placing plate 40 and the rear end of the placing plate 40 are from the front end of the side plate 38. The tray 4 in the stacked state can be lifted from the base member 41 together with the mounting plate 40 in a state in which the base member 41 is slid to the forward limit position disposed on the front side. Therefore, in the present embodiment, it is possible to easily carry out the work of taking out the stacked trays 4.
　本形態では、トレイ配置部６～８は、支持フレーム４２に対するベース部材４１のスライド方向の後端側でベース部材４１をロックするためのロック機構４４と、支持フレーム４２に対するベース部材４１のスライド方向の前端側でベース部材４１をロックするためのロック機構４５とを備えている。そのため、本形態では、支持フレーム４２に対してベース部材４１がスライド可能となっていても、ベース部材４１のスライド方向の両端側で、ベース部材４１が動かないようにベース部材４１を安定させることが可能になる。したがって、本形態では、支持フレーム４２に対してベース部材４１がスライド可能となっていても、ベース部材４１のスライド方向の両端側で、ベース部材４１に載置される載置板４０および段積み状態のトレイ４を安定させることが可能になる。 In the present embodiment, the tray arranging portions 6 to 8 have a locking mechanism 44 for locking the base member 41 at the rear end side of the sliding direction of the base member 41 with respect to the support frame 42 and a sliding direction of the base member 41 with respect to the support frame 42 And a lock mechanism 45 for locking the base member 41 on the front end side of Therefore, in the present embodiment, even if the base member 41 is slidable with respect to the support frame 42, the base member 41 is stabilized so that the base member 41 does not move at both ends in the sliding direction of the base member 41. Becomes possible. Therefore, in the present embodiment, even if the base member 41 is slidable with respect to the support frame 42, the mounting plate 40 and the stacks mounted on the base member 41 at both ends in the sliding direction of the base member 41. It becomes possible to stabilize the tray 4 in the state.
　本形態では、トレイ配置部６～９は、トレイ４を昇降させる昇降機構４６と、最上段のトレイ４の上限位置を検知するためのセンサ５１とを備えている。そのため、本形態では、トレイ配置部６～９の最上段のトレイ４の上下方向の位置を一定に保つことが可能になる。したがって、本形態では、トレイ配置部６～９において、配置されるトレイ４の段数に応じて最上段のトレイ４の上下方向の位置が変動する場合と比較して、ロボット１１、１２の制御を簡素化することが可能になる。 In the present embodiment, the tray arranging units 6 to 9 include an elevating mechanism 46 for moving the tray 4 up and down, and a sensor 51 for detecting the upper limit position of the uppermost tray 4. Therefore, in the present embodiment, it is possible to keep the vertical position of the uppermost tray 4 of the tray arranging parts 6 to 9 constant. Therefore, in the present embodiment, the control of the robots 11 and 12 is performed in comparison with the case where the position of the uppermost tray 4 in the vertical direction fluctuates according to the number of stages of the trays 4 arranged in the tray arranging portions 6 to 9. It becomes possible to simplify.
　また、本形態では、トレイ配置部６が昇降機構４６を備えているため、ベース部材４１を下限位置まで下降させた状態で、段積み状態のトレイ４を載置板４０と一緒にベース部材４１に載置することができる。また、トレイ配置部７、８が昇降機構４６を備えているため、ベース部材４１を下限位置まで下降させた状態で、段積み状態のトレイ４を載置板４０と一緒にベース部材４１から持ち上げることができる。したがって、本形態では、段積み状態のトレイ４の供給作業や取出作業を容易に行うことが可能になる。 Further, in the present embodiment, since the tray arrangement unit 6 includes the lifting mechanism 46, the tray 4 in a stacked state is placed on the base member 41 together with the mounting plate 40 in a state in which the base member 41 is lowered to the lower limit position. Can be placed on Further, since the tray arranging parts 7 and 8 are provided with the lifting mechanism 46, the tray 4 in a stacked state is lifted from the base member 41 together with the mounting plate 40 in a state where the base member 41 is lowered to the lower limit position. be able to. Therefore, in the present embodiment, it is possible to easily perform the supply operation and the removal operation of the stacked trays 4.
　本形態では、トレイ配置部６は、載置板４０に対して水平方向でトレイ４を位置決めするための位置決め機構９４を備えている。そのため、本形態では、たとえば、段積み状態のトレイ４を載置板４０と一緒にベース部材４１に載置する際に、載置板４０に対して段積み状態のトレイ４がずれても、段積み状態のトレイ４を載置板４０に対して正規の位置へ移動させることが可能になる。したがって、本形態では、トレイ配置部６の最上段のトレイ４に収容される液晶パネル２の所定の箇所をロボット１１で精度良く保持することが可能になる。また、本形態では、トレイ配置部７、８が位置決め機構９４を備えているため、トレイ配置部７、８の最上段のトレイ４の所定の位置にロボット１１によって精度良く液晶パネル２を搬入することが可能になる。 In the present embodiment, the tray placement unit 6 includes a positioning mechanism 94 for positioning the tray 4 in the horizontal direction with respect to the placement plate 40. Therefore, in the present embodiment, for example, when the stacked trays 4 are placed on the base member 41 together with the loading plate 40, even if the stacked trays 4 are shifted with respect to the loading plate 40, It is possible to move the stacked trays 4 to the normal position with respect to the mounting plate 40. Therefore, in the present embodiment, it is possible to accurately hold the predetermined portion of the liquid crystal panel 2 accommodated in the uppermost tray 4 of the tray arrangement portion 6 by the robot 11. Further, in the present embodiment, since the tray arranging units 7 and 8 are provided with the positioning mechanism 94, the liquid crystal panel 2 is accurately carried by the robot 11 to a predetermined position of the uppermost tray 4 of the tray arranging units 7 and 8. It becomes possible.
　（他の実施の形態）
　上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The embodiment described above is an example of the preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.
　上述した形態において、載置板４０は、金属で形成されていても良い。たとえば、載置板４０は、アルミニウム合金等の比較的軽量の金属で形成されていても良い。この場合には、載置板４０の剛性をより高めることが可能になるため、段積み状態のトレイ４の中の下側に配置されるトレイ４の変形を効果的に抑制することが可能になる。また、上述した形態において、トレイ配置部６、９へのトレイ４の供給は、ロボット等を用いて自動で行われても良いし、トレイ配置部７、８からのトレイ４の取出しは、ロボット等を用いて自動で行われても良い。 In the embodiment described above, the mounting plate 40 may be formed of metal. For example, the mounting plate 40 may be formed of a relatively lightweight metal such as an aluminum alloy. In this case, the rigidity of the mounting plate 40 can be further enhanced, so that deformation of the tray 4 disposed below the stacked trays 4 can be effectively suppressed. Become. Further, in the embodiment described above, the supply of the tray 4 to the tray arranging units 6 and 9 may be automatically performed using a robot or the like, and the removal of the tray 4 from the tray arranging units 7 and 8 is a robot It may be performed automatically using an alarm.
　上述した形態において、トレイ配置部６～９の少なくともいずれか１個のトレイ配置部６～９が昇降機構４６を備えていなくても良い。また、上述した形態において、トレイ配置部６～８は、ロック機構４４、４５を備えていなくても良いし、スライド機構４３を備えていなくても良いし、位置決め機構９４を備えていなくても良い。また、上述した形態において、搬送システム１は、カセット配置部１３を備えていなくても良い。 In the embodiment described above, the tray arranging units 6 to 9 of at least one of the tray arranging units 6 to 9 may not be provided with the elevating mechanism 46. Further, in the embodiment described above, the tray placement units 6 to 8 may not have the lock mechanisms 44 and 45, may not have the slide mechanism 43, and may not have the positioning mechanism 94. good. Further, in the embodiment described above, the transport system 1 may not include the cassette placement unit 13.
　上述した形態では、トレイ配置部９とトレイ配置部６とトレイ配置部７とトレイ配置部８とが左側から右側に向かってこの順番で並んでいるが、トレイ配置部６～９は、どのような順番で並んでいても良い。また、上述した形態において、トレイ配置部６～９がランダムに配置されていても良い。さらに、上述した形態において、搬送システム１は、トレイ配置部９を備えていなくても良い。この場合には、搬送システム１は、ロボット１２を備えていなくても良い。 In the embodiment described above, the tray arrangement unit 9, the tray arrangement unit 6, the tray arrangement unit 7, and the tray arrangement unit 8 are arranged in this order from left to right, but how is the tray arrangement units 6 to 9 You may arrange in order. Further, in the embodiment described above, the tray placement parts 6 to 9 may be randomly placed. Furthermore, in the embodiment described above, the transport system 1 may not include the tray placement unit 9. In this case, the transport system 1 may not include the robot 12.
　上述した形態において、ロボット１１は、６軸以外の垂直多関節ロボットであっても良いし、水平多関節ロボットであっても良いし、３軸直交ロボットであっても良いし、いわゆるパラレルリンクロボットであっても良い。また、上述した形態において、ロボット１２は、３軸直交ロボットであっても良いし、垂直多関節ロボットであっても良いし、水平多関節ロボットであっても良い。さらに、上述した形態において、検査装置３は、点灯検査装置以外の検査装置であっても良い。 In the embodiment described above, the robot 11 may be a vertical articulated robot other than six axes, may be a horizontal articulated robot, or may be a three-axis orthogonal robot, or a so-called parallel link robot It may be In the embodiment described above, the robot 12 may be a three-axis orthogonal robot, a vertical articulated robot, or a horizontal articulated robot. Furthermore, in the embodiment described above, the inspection device 3 may be an inspection device other than the lighting inspection device.
　上述した形態では、搬送システム１は、検査装置３に対して液晶パネル２を搬送しているが、搬送システム１は、検査装置３以外の、液晶パネル２に対して所定の処理を行う処理装置に対して液晶パネル２を搬送しても良い。すなわち、トレイ配置部６に、処理装置で処理される前の液晶パネル２が収容されるトレイ４が段積み状態で配置されても良いし、トレイ配置部７、８に、処理装置で処理された後の液晶パネル２が収容されるトレイ４が段積み状態で配置されても良い。また、検査装置３や処理装置に対して、トレイ配置部６～８の中から任意に選択される１個または２個のトレイ配置部６～８のみが設けられていても良い。 In the embodiment described above, the transport system 1 transports the liquid crystal panel 2 to the inspection device 3, but the transport system 1 is a processing device that performs predetermined processing on the liquid crystal panel 2 other than the inspection device 3 Alternatively, the liquid crystal panel 2 may be transported. That is, trays 4 in which liquid crystal panels 2 before being processed by the processing apparatus are accommodated may be arranged in a stacked state in the tray arranging section 6, or processed by the processing apparatus in the tray arranging sections 7, 8. The tray 4 in which the liquid crystal panel 2 after it is stored may be arranged in a stacked state. In addition, only one or two tray arranging parts 6 to 8 arbitrarily selected from the tray arranging parts 6 to 8 may be provided to the inspection apparatus 3 or the processing apparatus.
　上述した形態では、搬送システム１で搬送される表示パネルは、液晶パネル２であるが、搬送システム１で搬送される表示パネルは、液晶パネル２以外の表示パネルであっても良い。たとえば、搬送システム１で搬送される表示パネルは、有機ＥＬパネルであっても良い。 In the embodiment described above, the display panel transported by the transport system 1 is the liquid crystal panel 2, but the display panel transported by the transport system 1 may be a display panel other than the liquid crystal panel 2. For example, the display panel transported by the transport system 1 may be an organic EL panel.
　１　搬送システム
　２　液晶パネル（表示パネル）
　３　検査装置
　４　トレイ
　６　トレイ配置部（供給側トレイ配置部）
　７　トレイ配置部（第１排出側トレイ配置部）
　８　トレイ配置部（第２排出側トレイ配置部）
　１１　ロボット（パネル搬送ロボット）
　４０　載置板
　４１　ベース部材
　４２　支持フレーム
　４３　スライド機構
　４４　ロック機構（第１ロック機構）
　４５　ロック機構（第２ロック機構）
　４６　昇降機構
　６７　第１レール（固定側レール）
　６９　第３レール（可動側レール）
　９４　位置決め機構 1 Transport system 2 Liquid crystal panel (display panel)
3 inspection device 4 tray 6 tray arrangement part (supply side tray arrangement part)
7 Tray placement part (1st discharge side tray placement part)
8 Tray placement section (second discharge side tray placement section)
11 Robot (panel transfer robot)
40 mounting plate 41 base member 42 support frame 43 slide mechanism 44 lock mechanism (first lock mechanism)
45 Locking mechanism (second locking mechanism)
46 Lifting mechanism 67 1st rail (fixed side rail)
69 3rd rail (movable side rail)
94 Positioning mechanism

Claims (7)

  1. 　表示パネルが収容されるトレイが複数段に積み重なった状態で配置されるトレイ配置部であって、
    　複数段に積み重なった状態で前記トレイ配置部に配置される前記トレイが載置される載置板と、前記載置板が着脱可能に載置されるベース部材とを備え、
    　前記載置板の剛性は、前記トレイの剛性よりも高くなっていることを特徴とするトレイ配置部。     A tray arrangement unit in which trays in which display panels are accommodated are arranged in a stacked manner in a plurality of stages,
    A mounting plate on which the trays arranged in the tray arrangement part are placed in a state of being stacked in a plurality of stages, and a base member on which the mounting plate is detachably mounted.
    A tray arrangement portion characterized in that the rigidity of the placing plate is higher than the rigidity of the tray.
  2. 　前記載置板は、樹脂で形成されていることを特徴とする請求項１記載のトレイ配置部。 The tray arrangement portion according to claim 1, wherein the placing plate is made of a resin.
  3. 　前記ベース部材がスライド可能に取り付けられる支持フレームと、前記支持フレームに固定される固定側レールと前記ベース部材に固定される可動側レールとを有し前記支持フレームに対して前記ベース部材をスライドさせるスライド機構とを備えることを特徴とする請求項１または２記載のトレイ配置部。 A support frame to which the base member is slidably attached, a fixed side rail fixed to the support frame, and a movable side rail fixed to the base member slide the base member relative to the support frame The tray arrangement portion according to claim 1 or 2, further comprising: a slide mechanism.
  4. 　前記支持フレームに対する前記ベース部材のスライド方向の一端側で前記ベース部材をロックするための第１ロック機構と、前記支持フレームに対する前記ベース部材のスライド方向の他端側で前記ベース部材をロックするための第２ロック機構とを備えることを特徴とする請求項３記載のトレイ配置部。 A first locking mechanism for locking the base member at one end side of the base member in the sliding direction with respect to the support frame, and for locking the base member at the other end side of the base member in the sliding direction with respect to the support frame 4. The tray arrangement portion according to claim 3, further comprising: a second locking mechanism.
  5. 　前記ベース部材を昇降させる昇降機構を備えることを特徴とする請求項１から４のいずれかに記載のトレイ配置部。 The tray arrangement part according to any one of claims 1 to 4, further comprising: an elevating mechanism for raising and lowering the base member.
  6. 　前記載置板に対して水平方向で前記トレイを位置決めするための位置決め機構を備えることを特徴とする請求項１から５のいずれかに記載のトレイ配置部。 The tray arrangement portion according to any one of claims 1 to 5, further comprising: a positioning mechanism for positioning the tray in a horizontal direction with respect to the placement plate.
  7. 　請求項１から６のいずれかに記載のトレイ配置部を備え、前記表示パネルを検査する検査装置への前記表示パネルの搬入および前記検査装置からの前記表示パネルの搬出を行う搬送システムであって、
    　前記トレイ配置部として、検査前の前記表示パネルが収容される前記トレイが複数段に積み重なった状態で配置される供給側トレイ配置部と、前記検査装置での検査で正常と判断された前記表示パネルが収容される前記トレイが複数段に積み重なった状態で配置される第１排出側トレイ配置部と、前記検査装置での検査で異常と判断された前記表示パネルが収容される前記トレイが複数段に積み重なった状態で配置される第２排出側トレイ配置部とを備えるとともに、
    　前記供給側トレイ配置部の最上段に配置される前記トレイの中の前記表示パネルを前記検査装置に搬送し、かつ、前記検査装置から検査後の前記表示パネルを、前記第１排出側トレイ配置部の最上段に配置される前記トレイの中または前記第２排出側トレイ配置部の最上段に配置される前記トレイの中に搬送するパネル搬送ロボットを備えることを特徴とする搬送システム。     A transport system comprising the tray arrangement unit according to any one of claims 1 to 6, carrying in the display panel to an inspection apparatus for inspecting the display panel, and carrying out the display panel from the inspection apparatus. ,
    As the tray arranging unit, there is provided a supply side tray arranging unit in which the trays in which the display panels before inspection are accommodated are stacked in a plurality of stages, and the display determined to be normal in the inspection by the inspection device A plurality of first discharge side tray arranging parts arranged in a state where the trays accommodating the panels are stacked in a plurality of stages, and a plurality of the trays accommodating the display panels determined to be abnormal in the inspection by the inspection device And a second discharge side tray arrangement portion arranged in a state of being stacked in stages.
    The display panel in the tray disposed at the uppermost stage of the supply side tray arrangement portion is transported to the inspection apparatus, and the display panel after inspection from the inspection apparatus is disposed in the first discharge side tray arrangement A transport system comprising a panel transport robot configured to transport the inside of the tray disposed at the uppermost level of the unit or the tray disposed at the uppermost level of the second discharge side tray arrangement portion.
PCT/JP2018/033543 2017-09-29 2018-09-11 Tray arrangement part and conveyance system WO2019065205A1 (en)

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JP7219172B2 (en) * 2019-06-14 2023-02-07 日本電産サンキョー株式会社 inspection system
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