CN114955515B - processing system - Google Patents

processing system Download PDF

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Publication number
CN114955515B
CN114955515B CN202210166404.2A CN202210166404A CN114955515B CN 114955515 B CN114955515 B CN 114955515B CN 202210166404 A CN202210166404 A CN 202210166404A CN 114955515 B CN114955515 B CN 114955515B
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CN
China
Prior art keywords
unit
display panel
robot arm
carry
section
Prior art date
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Active
Application number
CN202210166404.2A
Other languages
Chinese (zh)
Other versions
CN114955515A (en
Inventor
仓田茂
佐藤史朗
吉田昇悟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of CN114955515A publication Critical patent/CN114955515A/en
Application granted granted Critical
Publication of CN114955515B publication Critical patent/CN114955515B/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/041—Camera
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention provides a processing system, which can be provided with a plurality of processing units even when a slider type carrying-in mechanism is used, and can make the processing time of each processing unit constant. The processing system (1) comprises: a carry-in unit (2) provided with a movable carry-in table (25) on which the display panel (100) is mounted, and configured to reciprocate the carry-in table (25) between a first position (2A) at which the display panel (100) is received and a second position (2B) at which the display panel is transferred; a robot arm (5) which rotates around a rotation axis (L) extending in the vertical direction and receives the display panel from a carry-in table (25) reaching a second position (2B); an inspection unit (3) in which six inspection units are arranged around the rotation axis (L) of the robot arm (5), and the inspection units are put into the display panel through the robot arm (5); and a placement unit (4) for placing the inspected display panel inspected by the inspection unit (3) by means of a robot arm (5).

Description

Processing system
Technical Field
The present invention relates to a processing system for performing a predetermined process on a workpiece.
Background
Patent document 1 discloses a processing system that is assembled in a production line of a small-sized liquid crystal display and performs processing of a liquid crystal panel. The processing system of this document performs lighting inspection as processing for the liquid crystal panel. The processing system is provided with: a plurality of processing devices for processing the liquid crystal panel; a conveying mechanism for conveying the liquid crystal panel before the inspection carried into the processing device and the liquid crystal panel after the inspection; and a plurality of robots for conveying each liquid crystal panel between the plurality of processing devices and the conveying mechanism. The processing devices are arranged in three on one side or the other side of the conveying direction along the conveying direction of the conveying mechanism. The robot is disposed one for each processing device along the conveying direction of the conveying mechanism. The conveying mechanism comprises: a carry-in conveyor for carrying in the liquid crystal panel; and a carry-out conveyor for carrying out the liquid crystal panel.
In the processing system of patent document 1, a slider type carry-in mechanism is sometimes used instead of the carry-in conveyor in order to shorten the tact time of the processing system. The slide type loading mechanism is provided with a movable table for loading the liquid crystal panel, and the table is reciprocated at a high speed. The slider type carry-in mechanism can carry the liquid crystal panel mounted on the stage at high speed, and thus the tact time of the processing system can be shortened.
Prior art literature
Patent literature
Patent document 1: japanese patent laid-open publication No. 2017-198499
Disclosure of Invention
In the case of using the slide type carry-in mechanism, since the distance from the stage to the upstream processing section in the conveying direction is different from the distance from the stage to the downstream processing section in the conveying direction, the time until the liquid crystal panel is supplied to the upstream processing section is different from the time until the liquid crystal panel is supplied to the downstream processing section. Therefore, the processing time of the liquid crystal panel including the supply time is different at the upstream processing section and the downstream processing section. As a result, the number of processing units arranged in the conveyance direction increases, and the difference in processing time between the processing units increases, which makes it difficult to shorten the tact time of the processing system.
Accordingly, an object of the present invention is to provide a processing system that can include a plurality of processing units and can make the processing time in each processing unit constant even when a slider-type carry-in mechanism is used.
In order to solve the above problems, a processing system according to the present invention includes: a carry-in section including a movable carry-in table on which a workpiece is placed, the carry-in table being reciprocally movable between a first position at which the workpiece is received and a second position at which the workpiece is transferred; a robot arm that rotates about a rotation axis extending in the vertical direction and receives the workpiece from the carry-in table reaching the second position; a processing unit that is disposed around the rotation axis of the robot arm, and that inputs the workpiece by the robot arm; and a placement unit for placing the processed workpiece processed by the processing unit on the robot arm.
In the present invention, the processing unit is disposed around the rotation axis of the robot arm, and the workpiece is put into the processing unit by the robot arm. Therefore, even when the loading unit for carrying the workpiece by the movable loading table is used, the robot arm can make the time until the workpiece carried by the loading table is loaded into each processing unit substantially constant because each processing unit is disposed around the rotation axis of the robot arm. In this way, the processing time of the workpiece including the time for inputting the workpiece can be made substantially constant in each processing section, and thus the tact time of the processing system can be shortened. In addition, when the processing units are disposed around the rotation axis of the robot arm, the space between the adjacent processing units can be enlarged as compared with the case where the processing units are disposed along the conveying direction of the workpiece. Thereby, maintenance of the processing section becomes easy. In addition, since the work can be put into each processing section by one robot arm, it is unnecessary to provide a plurality of robot arms, as compared with the case where each processing section is arranged along the conveying direction of the work.
In the present invention, it is preferable that the loading unit is provided as a first loading unit and a second loading unit which are arranged in parallel to each other along a reciprocating path of the loading table, the processing unit is provided as a first processing unit which processes the workpiece loaded by the first loading unit and as a second processing unit which processes the workpiece loaded by the second loading unit, the robot arm is provided to transfer the first robot arm of the workpiece loaded by the first loading unit and the second robot arm of the workpiece loaded by the second loading unit to the first processing unit, and the first robot arm and the second robot arm each place the processed workpiece received from the first processing unit and the processed workpiece received from the second processing unit on the placing unit. With this configuration, the tact time of the processing system can be shortened.
In the present invention, it is preferable to have: a discharge unit for conveying the processed workpiece; and a moving mechanism that moves the processed workpiece placed on the placement unit from the placement unit to the discharge unit, wherein the discharge unit is disposed between the first carry-in unit and the second carry-in unit, and conveys the processed workpiece in the first direction, if a direction in which the carry-in unit reciprocates the carry-in table is a conveyance direction, a direction in which the first position is located is a first direction, and a direction in which the second position is located is a second direction. That is, the discharge portion is disposed between the first carry-in portion and the second carry-in portion, and the side of the carry-in portion that receives the workpiece and the side of the discharge portion that discharges the workpiece are the same in the conveying direction. With this configuration, the setting area of the processing system can be made compact.
In the present invention, it is preferable that the processing unit is provided with a first processing unit that processes the workpiece carried in by the carrying-in unit and a second processing unit that processes the workpiece carried in by the carrying-in unit, the robot arm is provided with a first robot arm that transfers the workpiece carried in by the carrying-in unit to the first processing unit and a second robot arm that transfers the workpiece carried in by the carrying-in unit to the second processing unit, and the first robot arm and the second robot arm place the processed workpiece received from the first processing unit and the processed workpiece received from the second processing unit on the placing unit, respectively. With this configuration, the tact time of the processing system can be shortened.
In this case, in the present invention, it is preferable to have: a discharge unit for conveying the processed workpiece; and a moving mechanism that moves the processed workpiece placed on the placement unit from the placement unit to the discharge unit, wherein the discharge unit is disposed on the second direction side of the carry-in unit and conveys the processed workpiece in the second direction, if a direction in which the carry-in unit reciprocates the carry-in table is a conveyance direction, a direction in which the first position is located is a first direction, and a direction in which the second position is located is a second direction. That is, the conveying direction of the loading unit and the conveying direction of the discharging unit are the same, and the loading unit and the discharging unit are aligned in the conveying direction. With this configuration, the carrying-in portion and the discharging portion can be maintained from the direction orthogonal to the carrying direction more easily than the case where the carrying path of the discharging portion and the carrying path of the carrying-in portion are parallel to each other.
In the present invention, it is preferable that the alignment camera is provided with an alignment camera for detecting a position of the workpiece held by the robot arm when the robot arm moves the workpiece from the carry-in stage to the processing section, and the robot arm performs alignment of the workpiece with respect to the processing section based on a result of the inspection by the alignment camera. The robot arm can accurately place the workpiece on the processing unit based on the inspection result of the alignment camera.
In the present invention, it is preferable that the robot arm further comprises a temporary placement section for temporarily placing the workpiece, and the robot arm moves the workpiece from the carry-in section to the temporary placement section when the workpiece cannot be moved from the carry-in section to the processing section. With this configuration, even when the workpiece cannot be moved from the carry-in section to the processing section, the workpiece can be moved to the temporary placement section, and therefore, the conveyance of the workpiece in the processing system can be suppressed from stopping.
In the present invention, it is preferable that the robot arm moves the workpiece from the processing unit to the temporary placement unit when the processed workpiece cannot be moved from the processing unit to the placement unit. With this configuration, even when the workpiece cannot be moved from the processing unit to the placement unit, the workpiece can be moved to the temporary placement unit, and therefore, the conveyance of the workpiece in the processing system can be suppressed from stopping.
(effects of the invention)
According to the present invention, even when the carry-in section for carrying the workpiece by the carry-in table is used, since each processing section is disposed around the rotation axis of the robot arm, the robot arm can make the time until the workpiece carried by the carry-in table is put into each processing section substantially constant. In this way, the processing time of the workpiece including the time for inputting the workpiece can be made substantially constant in each processing section, and thus the tact time of the processing system can be shortened.
Drawings
Fig. 1 is a top view of a treatment system according to a first embodiment of the present invention.
Fig. 2 is a diagrammatic front view of the processing system, as seen from the direction A-A of fig. 1.
Fig. 3 is a side view of the robotic arm of fig. 1.
Fig. 4 is a top view of the processing system 1 of the second embodiment.
Fig. 5 is a plan view of a robot arm and a processing unit according to another embodiment.
Detailed Description
(first embodiment)
A first embodiment of the present invention will be described below with reference to the drawings. In the following description, a case where a workpiece is the display panel 100 will be described mainly. In the following description, a description will be given mainly of a case of performing inspection corresponding to a workpiece as a process for the workpiece. Therefore, the processing section for the workpiece is an inspection section for the workpiece. Fig. 1 is a top view of a treatment system according to a first embodiment of the present invention. Fig. 2 is a diagrammatic front view of the processing system, as seen from the direction A-A of fig. 1.
(Structure of handling System 1)
In fig. 1 and 2, a processing system 1 according to the present embodiment is incorporated into a production line of a small-sized liquid crystal display used for a portable device or the like. The processing system 1 performs a predetermined inspection on the display panel 100 as a workpiece received from the previous step by the inspection unit 3, and conveys the inspected display panel 100 to the next step.
The display panel 100 is a liquid crystal panel, an organic EL panel, or the like. The display panel 100 is formed in a rectangular shape, and has flexible wiring in this embodiment. The display panel 100 has a recording unit in which data such as inspection data of the display panel 100 is recorded in a portion other than the display area of the display panel 100. Specifically, data such as inspection data is recorded as a two-dimensional code or a one-dimensional code in a portion other than the display area of the display panel 100. In the present embodiment, as shown in fig. 1, two display panels 100 each including a first display panel 100A and a second display panel 100B are simultaneously transported as the display panel 100.
As shown in fig. 1, the processing system 1 has: a carry-in section 2 for carrying the display panel 100; a robot arm 5 for receiving the display panel 100 from the carry-in section 2; the inspection unit 3 of the display panel 100 is put into the robot arm 5; and a placement unit 4 for placing the inspected display panel 100 inspected by the inspection unit 3 by the robot arm 5.
The loading unit 2 includes a movable loading table 25 on which the display panel 100 is mounted. The carry-in section 2 reciprocates the carry-in table 25 between a first position 2A as one end and a second position 2B as the other end. The loading unit 2 is provided as a first loading unit 21 and a second loading unit 22 which are parallel to each other along a reciprocating path of the loading table 25.
The inspection unit 3 is provided as a first inspection unit 31 for inspecting the display panel 100 carried in by the first carrying-in unit 21 and a second inspection unit 32 for inspecting the display panel 100 carried in by the second carrying-in unit 22.
In the following description, three directions orthogonal to each other are referred to as an X-axis direction, a Y-axis direction, and a Z-axis direction. The X-axis direction is a direction in which the carry-in unit 2 reciprocates the carry-in table 25, and is a conveying direction. One side in the X-axis direction is defined as the X1 direction, and the other side is defined as the X2 direction. The X1 direction is the side of the carry-in stage 25 at the first position 2A, and the X2 direction is the side of the carry-in stage 25 at the second position 2B. One side in the Y-axis direction is defined as the Y1 direction, and the opposite side is defined as the Y2 direction. The Y1 direction is the side where the first inspection portion 31 is located, and the Y2 direction is the side where the second inspection portion 32 is located. The upper side is set to the Z1 direction, and the lower side is set to the Z2 direction.
The robot arm 5 receives the display panel 100 from the carry-in table 25 reaching the second position 2B. The robot arm 5 is provided as a first robot arm 51 for transferring the display panel 100 carried in by the first carrying-in section 21 to the first inspection section 31, and as a second robot arm 52 for transferring the display panel 100 carried in by the second carrying-in section 22 to the second inspection section 32. The first robot arm 51 and the second robot arm 52 place the inspected display panel 100 received from the first inspection unit 31 and the inspected display panel 100 received from the second inspection unit 32 on the placement unit 4, respectively. The first inspection unit 31 is disposed around the first robot arm 51, and the second inspection unit 32 is disposed around the second robot arm 52.
The processing system 1 further includes: an upstream conveying section 6 for conveying the display panel 100 in the Y2 direction; and a midstream conveying section 7 located closer to the upstream conveying section 6 than the Y2 direction. The processing system 1 includes: a first moving mechanism 9 for moving the display panel 100 from the previous process conveying unit 8 to the upstream conveying unit 6; a second moving mechanism 10 for moving the display panel 100 conveyed by the upstream conveying section 6 from the upstream conveying section 6 to the first carry-in section 21 and the midstream conveying section 7; and a third moving mechanism 11 for moving the display panel 100 conveyed by the midstream conveying section 7 from the upstream conveying section 6 to the second loading section 22.
The processing system 1 includes: an alignment camera 12 that detects the position of the display panel 100 held by the first moving mechanism 9; and an ID reader 13 that reads data recorded in a portion outside the display area of the display panel 100.
The processing system 1 includes, between the first loading unit 21 and the second loading unit 22: a discharge unit 14 for conveying the inspected display panel 100 in the X1 direction; and a fourth moving mechanism 15 for moving the processed display panel 100 mounted on the mounting portion 4 from the mounting portion 4 to the discharging portion 14.
The processing system 1 includes: a downstream conveying section 16 for conveying the inspected display panel 100 to the next step; and a fifth moving mechanism 17 for moving the inspected display panel 100 conveyed by the discharge unit 14 from the discharge unit 14 to the downstream conveying unit 16.
(previous step transporting section)
As shown in fig. 1, the previous step conveying section 8 conveys the display panel 100 placed on the previous step conveying section 8 to the processing system 1 by a robot or the like in the previous step. The previous step conveying section 8 extends in the Y-axis direction and conveys the display panel 100 in the Y2 direction. The former step conveying section 8 is constituted by a belt conveyor.
(first movement mechanism)
As shown in fig. 1 and 2, the first moving mechanism 9 is a pick-and-place type moving mechanism. The first moving mechanism 9 includes: an adsorption part 91 holding the display panel 100; a position adjustment unit 92 that moves the suction unit 91 in the up-down direction and rotates the suction unit 91 about the Z-axis direction as a rotation axis; a first driving unit 93 for reciprocally moving the position adjusting unit 92 in the X-axis direction; and a second driving portion 94 that reciprocates the first driving portion 93 in the Y direction. The first driving unit 93 and the second driving unit 94 are each constituted by an electric cylinder or the like. The first driving unit 93 reciprocates the suction unit 91 in the X-axis direction via the position adjusting unit 92. The second driving unit 94 is located in the X1 direction of the preceding process conveying unit 8. The second driving unit 94 reciprocates the suction unit 91 in the Y-axis direction via the first driving unit 93 and the position adjusting unit 92.
(alignment camera)
As shown in fig. 2, the alignment camera 12 is located above the first moving mechanism 9. When the first moving mechanism 9 holds the display panel 100 carried by the previous step carrying section 8, the alignment camera 12 photographs the display panel 100 from above, and detects the position of the display panel 100.
(upstream conveying section)
As shown in fig. 1 and 2, the upstream conveying section 6 conveys the display panel 100 to the downstream conveying section 7. The upstream conveying section 6 includes: a stage 61 on which the display panel 100 is placed; and a driving section 62 that reciprocates the stage 61 in the Y-axis direction. The stage 61 is rectangular and long in the X direction. The stage 61 has a size capable of mounting two display panels 100 in the Y direction. The driving unit 62 is constituted by an electric cylinder or the like. The driving unit 62 is located on the X1 direction side of the preceding step conveying unit 8 and the midstream conveying unit 7. When viewed from the Z-axis direction, the driving unit 62 reciprocates the table 61 from a position adjacent to the preceding step conveying unit 8 in the Y2 direction to a position overlapping the midstream conveying unit 7.
(ID reader)
The ID reader 13 optically reads data recorded in the recording section of the display panel 100. The ID reader 13 is, for example, an image pickup device or the like. The display panel 100 is inspected by the inspection section 3 based on the data of the display panel 100 read by the ID reader 13. As shown in fig. 1 and 2, the ID reader 13 includes a first ID reader 13A and a second ID reader 13B. The first ID reader 13A is located between the preceding process conveying section 8 and the midstream conveying section 7 and above the upstream conveying section 6. The first ID reader 13A is moved in the X-axis direction by the upper driving part 131. The first ID reader 13A reads data recorded in the recording section of the display panel 100 from above. The second ID reader 13B is located between the preceding process conveying section 8 and the midstream conveying section 7 and below the upstream conveying section 6. The second ID reader 13B is moved in the X-axis direction by the lower driving section 132. The second ID reader 13B reads data recorded in the recording section of the display panel 100 from below.
(midstream handling section)
As shown in fig. 1 and 2, the midstream transport section 7 transports the display panel 100 to the carry-in section 2. The midstream conveyance section 7 is located between the carry-in section 2 and the upstream conveyance section 6 in the X-axis direction, and extends to a position overlapping the first carry-in section 21 and the second carry-in section 22 in the Y-axis direction.
The midstream conveyance section 7 is located below the upstream conveyance section 6 by Z2.
The midstream transport section 7 includes: a stage 71 on which the display panel 100 is placed; and a driving section 72 for reciprocally moving the stage 71 in the Y-axis direction. The stage 71 is rectangular and long in the X direction. The stage 71 has a size capable of mounting two display panels 100 in the Y direction. The driving unit 72 is constituted by an electric cylinder or the like. The driving unit 72 conveys the display panel 100 placed on the stage 71 at the end in the Y1 direction in the Y2 direction. When the stage 71 is positioned at the end of Y1, the stage 71 is positioned lower by Z2 than the stage 61 of the upstream conveying section 6 positioned at the end of Y2, and overlaps with the stage 61 of the upstream conveying section 6 in the Z-axis direction. That is, the stage 71 overlaps with the stage 61 of the upstream conveying section 6 at the end of Y1.
(second movement mechanism)
The second moving mechanism 10 moves the display panel 100 conveyed by the stage 61 of the upstream conveying section 6 to the first carry-in section 21 and the midstream conveying section 7. The second moving mechanism 10 is a pick-and-place type moving mechanism. As shown in fig. 1 and 2, the second moving mechanism 10 includes: an adsorption part 101 for holding the display panel 100; a position adjustment unit 102 for moving the suction unit 101 in the up-down direction; and a driving unit 103 for reciprocally moving the position adjusting unit 102 in the X-axis direction. The adsorption part 101 can hold two display panels 100 at the same time. The driving unit 103 is constituted by an electric cylinder or the like. The driving portion 103 extends in the X-axis direction. The driving unit 103 reciprocates the suction unit 101 in the X-axis direction by the position adjusting unit 102.
(third movement mechanism)
The third moving mechanism 11 moves the display panel 100 conveyed by the stage 71 of the midstream conveying section 7 from the stage 71 of the midstream conveying section 7 to the carry-in stage 25 of the second carry-in section 22. The third moving mechanism 11 is a pick-and-place type moving mechanism. As shown in fig. 1 and 2, the third movement mechanism 11 includes: an adsorption part 111 for holding the display panel 100; a position adjusting unit 112 for moving the suction unit 111 in the up-down direction; and a driving unit 113 for reciprocally moving the position adjusting unit 112 in the X-axis direction. The adsorption part 111 can simultaneously hold two display panels 100. The driving unit 113 is constituted by an electric cylinder or the like. The driving portion 113 extends in the X-axis direction. The driving unit 113 reciprocates the suction unit 111 in the X-axis direction by the position adjusting unit 112.
(carry-in part)
As shown in fig. 1, the loading unit 2 is provided as a first loading unit 21 and a second loading unit 22 which are parallel to each other along a reciprocating path of the loading table 25, and the first loading unit 21 and the second loading unit 22 have the same structure. The first loading unit 21 is located on the Y1 direction side of the second loading unit 22. The first loading unit 21 and the second loading unit 22 include: a movable loading table 25 on which the display panel 100 is mounted; and a driving unit 26 for reciprocally moving the carry-in table 25 in the X-axis direction. The carry-in table 25 is a size in which two display panels 100 are placed in the Y direction. The driving unit 26 is constituted by an electric cylinder or the like. The driving unit 26 extends in the X-axis direction, and reciprocates the carry-in table 25 between the first position 2A and the second position 2B. At the first position 2A, the carry-in section 2 receives the display panel 100. At the second position 2B, the carry-in section 2 hands over the display panel 100. That is, the carry-in section 2 carries the display panel 100 in the X2 direction.
(robot arm)
Fig. 3 is a side view of the robot arm 5. As shown in fig. 1, the robot arm 5 is provided as a first robot arm 51 for transferring the display panel 100 carried in by the first carrying-in section 21 to the first inspection section 31 and a second robot arm 52 for transferring the display panel 100 carried in by the second carrying-in section 22 to the second inspection section 32, and the first robot arm 51 and the second robot arm 52 have the same configuration. The first robot arm 51 is disposed on the Y1 direction side of the second robot arm 52 in the Y axis direction. The first robot arm 51 is located in the Y1 direction with respect to the first carry-in section 21 at a position in the X1 direction with respect to the second position 2B of the first carry-in section 21. The second robot arm 52 is located in the Y2 direction with respect to the second carry-in section 22 at a position in the X2 direction with respect to the second position 2B of the second carry-in section 22.
The first robot arm 51 and the second robot arm 52 are SCARA robots. As shown in fig. 1 and 3, the first robot arm 51 and the second robot arm 52 include: a holding portion 53 for holding the display panel 100; and an arm main body portion 54 that moves the holding portion 53. The holding portion 53 holds two display panels 100 at the same time.
The arm main body portion 54 has a first arm portion 55, a second arm portion 56, a driving portion 57, and an alignment shaft portion 58. The first arm 55 and the second arm 56 are connected via a motor M1 built in the first arm 55. The first arm 55 is relatively rotated with respect to the second arm 56 by the motor M1. The second arm 56 is connected to a driving unit 57, and the driving unit 57 rotates about a rotation axis L of the second arm 56. That is, the first and second robot arms 51 and 52 rotate the holding portion 53 in the XY plane about the rotation axis L extending in the up-down direction via the first and second arm portions 55 and 56.
The first arm 55 is connected to the alignment shaft 58 on the Z1 direction side, and the holding portion 53 is connected to the alignment shaft 58 on the Z2 direction side. The alignment shaft portion 58 is rotated with respect to the first arm portion 55 by a motor M2 built in the first arm portion 55, and is moved in the Z direction by an actuator not shown. That is, the holding portion 53 is rotated with respect to the first arm portion 55 by the motor M2, and is moved in the Z direction by the actuator.
(inspection part)
As shown in fig. 1, the inspection unit 3 is provided as a first inspection unit 31 for inspecting the display panel 100 carried in by the first carrying-in unit 21 and a second inspection unit 32 for inspecting the display panel 100 carried in by the second carrying-in unit 22.
The first inspection unit 31 is disposed around the rotation axis L of the first robot arm 51 at six angles around the rotation axis L of the first robot arm 51 so as to be equidistant from the rotation axis L. That is, the first inspection units 31 are equally spaced from the center of the first robot arm 51, and are radially arranged around the first robot arm 51.
Similarly, the second inspection unit 32 is disposed around the rotation axis L of the second robot arm 52 at six angles around the rotation axis L of the second robot arm 52 so that the distances from the rotation axis L are equal. That is, the second inspection units 32 are equally spaced from the center of the second robot arm 52, and are radially arranged around the second robot arm 52.
Since the first inspection units 31 are disposed around the rotation axis L of the first robot arm 51 and at equal distances from the rotation axis L, the first robot arm 51 can make the time taken to input the display panel 100 from the first loading unit 21 to the first inspection units 31 and the time taken to move the display panel 100 from the first inspection units 31 to the mounting unit 4 substantially constant. Similarly, since the second inspection units 32 are disposed around the rotation axis L of the second robot arm 52 at equal distances from the rotation axis L, the second robot arm 52 can keep the time taken to input the display panel 100 from the second loading unit 22 to the second inspection units 32 and the time taken to move the display panel 100 from the second inspection units 32 to the mounting unit 4 substantially constant.
(mounting part)
As shown in fig. 1, the placement unit 4 includes: a mounting table 41 on which the display panel 100 is mounted; and a driving unit 42 for reciprocally moving the stage 41 in the Y-axis direction. The mounting table 41 is a size on which two display panels 100 are mounted in the Y direction. The driving unit 42 is constituted by an electric cylinder or the like. When viewed from the Z-axis direction, the driving unit 42 is located at a position overlapping the rotation axis L of the first robot arm 51 and the rotation axis L of the second robot arm 52 in the Y-axis direction, and extends in the Y-axis direction. The driving unit 42 reciprocates the mounting table 41 between a first position 4A at the end in the Y1 direction and a second position 4B at the end in the Y2 direction. When the mounting table 41 is positioned at the first position 4A, the first robot arm 51 moves the inspected display panel 100 inspected by the first inspection unit 31 to the mounting table 41. When the mounting table 41 is positioned at the second position 4B, the second robot arm 52 moves the inspected display panel 100 inspected by the second inspection unit 32 to the mounting table 41. When the fourth moving mechanism 15 moves the display panel 100 from the mounting portion 4 to the discharge portion 14, the driving portion 42 moves the mounting table 41 to the third position 4C at the center of the driving portion 42.
(fourth movement mechanism)
As shown in fig. 1, the fourth moving mechanism 15 moves the display panel 100 carried by the stage 41 of the mounting portion 4 from the stage 41 of the mounting portion 4 to the discharge portion 14. The fourth moving mechanism 15 is a pick-and-place type moving mechanism. The fourth movement mechanism 15 includes: an adsorption part 151 holding the display panel 100; a position adjusting unit 152 for moving the suction unit 101 in the up-down direction; and a driving unit 153 for reciprocally moving the position adjusting unit 152 in the X-axis direction.
The adsorption part 151 can simultaneously hold two display panels 100. The driving unit 153 is constituted by an electric cylinder or the like. The driving portion 153 extends in the X-axis direction. The driving unit 153 reciprocates the suction unit 151 in the X-axis direction by the position adjusting unit 152. When the mounting table 41 is positioned at the third position 4C, the fourth moving mechanism 15 moves the inspected display panel 100 mounted on the mounting table 41 to the discharge unit 14.
(discharge portion)
As shown in fig. 1, the discharge unit 14 is located closer to the X1 direction than the placement unit 4, and is disposed between the first carry-in unit 21 and the second carry-in unit 22, as viewed in the Z axis direction. The discharge portion 14 extends in the X-axis direction, and an end portion in the X1 direction overlaps the downstream conveying portion 16 in the Y-axis direction when viewed in the Z-axis direction. The discharge unit 14 includes: a movable stage 141 on which the inspected display panel 100 is placed; and a driving unit 142 that reciprocates the stage 141 in the X-axis direction.
The stage 141 has a size in which two display panels 100 are placed in the Y direction. The driving unit 142 is constituted by an electric cylinder or the like. When viewed from the Z-axis direction, the end of the drive unit 142 in the X2 direction is located closer to the X1 direction than the placement unit 4, and the end of the drive unit 142 in the X1 direction is located at a position overlapping the downstream conveying unit 16 in the Y-axis direction. The driving unit 142 reciprocates the stage 141 between an end in the X1 direction and an end in the X2 direction. When the stage 141 is positioned at the end in the X2 direction, the fourth moving mechanism 15 moves the inspected display panel 100 from the mounting stage 41 of the mounting unit 4 to the stage 141. When the inspected display panel 100 is placed on the stage 141, the discharge unit 14 conveys the inspected display panel 100 in the X1 direction. That is, the discharge unit 14 conveys the inspected display panel 100 in a direction opposite to the X2 direction in which the carry-in unit 2 conveys the display panel 100.
(fifth movement mechanism)
As shown in fig. 1, the fifth moving mechanism 17 moves the inspected display panel 100 conveyed by the stage 141 of the discharge unit 14 from the stage 141 of the discharge unit 14 to the downstream conveying unit 16. The fifth moving mechanism 17 is a pick-and-place type moving mechanism. The fifth moving mechanism 17 includes: an adsorption portion 171 holding the display panel 100; a position adjusting unit 172 for moving the suction unit 171 in the up-down direction; a first driving unit 173 that reciprocates the position adjusting unit 172 in the X-axis direction; and a second driving part 174 that reciprocates the first driving part 173 in the Y direction. The adsorption portion 171 can hold two display panels 100 at the same time. The first driving unit 173 and the second driving unit 174 are configured by an electric cylinder or the like. The first driving unit 173 reciprocates the suction unit 171 in the X-axis direction by the position adjusting unit 152. The second driving section 154 is located in the X2 direction of the downstream conveying section 16 and extends in the Y axis direction. The second driving unit 174 reciprocates the suction unit 171 in the Y-axis direction by the first driving unit 173 and the position adjusting unit 172. When the stage 141 is positioned at the end in the X1 direction, the fifth moving mechanism 17 moves the inspected display panel 100 from the stage 141 of the discharge unit 14 to the downstream conveying unit 16.
(downstream conveying section)
The downstream conveying section 16 conveys the inspected display panel 100 to the next step. The downstream conveying section 16 is constituted by a belt conveyor. As shown in fig. 1, the downstream conveying section 16 includes: a first conveying portion 161 extending in the Y-axis direction; and a second conveying portion 162 located on the X1 direction side of the first conveying portion 161 and extending in the Y axis direction. The first conveying unit 161 conveys the display panel 100 whose inspection result is "acceptable" in the inspection unit 3. The second conveying unit 162 conveys the display panel 100 whose inspection result is "reject" in the inspection unit 3.
(operation of the processing System)
Next, the operation of the processing system 1 will be described.
(action of first movement mechanism)
After the previous step conveying section 8 conveys the first display panel 100A and the second display panel 100B to the end in the Y2 direction of the previous step conveying section 8, the first moving mechanism 9 moves the adsorbing section 91 to the end in the Y2 direction of the previous step conveying section 8, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 91, the preceding process conveying unit 8 moves the next display panel 100 to the end of the preceding process conveying unit 8 in the Y2 direction.
After the first display panel 100A and the second display panel 100B are held by the suction unit 91, the alignment camera 12 detects the positions of the first display panel 100A and the second display panel 100B. When the first display panel 100A and the second display panel 100B are detected by the alignment camera 12, the first moving mechanism 9 recognizes the positions of the first display panel 100A and the second display panel 100B with respect to the adsorbing portion 91.
After the suction unit 91 is moved above the stage 61 of the upstream conveying unit 6, the first moving mechanism 9 performs alignment of the rotational directions of the first display panel 100A in the X-axis direction and the Z-axis direction with respect to the stage 61 of the upstream conveying unit 6 based on the position of the first display panel 100A detected by the alignment camera 12. The upstream conveying section 6 performs alignment of the stage 61 in the Y-axis direction with respect to the first display panel 100A based on the position of the first display panel 100A detected by the alignment camera 12. After the alignment of the position of the first display panel 100A is performed, the first moving mechanism 9 places only the first display panel 100A on the stage 61.
After the first display panel 100A is placed on the stage 61, the first moving mechanism 9 moves the suction portion 91 in the Z1 direction. Next, the alignment of the rotational directions of the second display panel 100B in the X-axis direction and the Z-axis direction is performed with respect to the stage 61 based on the position of the second display panel 100B detected by the alignment camera 12. The upstream conveying section 6 performs alignment of the stage 61 in the Y-axis direction with respect to the second display panel 100B based on the position of the second display panel 100B detected by the alignment camera 12. After the alignment of the position of the second display panel 100B is performed, the first moving mechanism 9 mounts the second display panel 100B on the stage 61.
The first moving mechanism 9 moves the suction unit 91 toward the previous-process conveying unit 8 after the first display panel 100A and the second display panel 100B are placed on the table 61. After the suction unit 91 moves to the previous step conveying unit 8, the upstream conveying unit 6 moves the first display panel 100A and the second display panel 100B mounted on the table 61 to the position of the ID reader 13. Either one of the first ID reader 13A and the second ID reader 13B reads the first display panel 100A and the second display panel 100B, acquires inspection data, and the like.
The first moving mechanism 9 again holds the first display panel 100A and the second display panel 100B from the previous step conveying section 8, and repeats the above operation.
(operation of the second movement mechanism and the third movement mechanism)
When the display panel 100 is placed on the stage 61 of the upstream conveying section 6 by the first moving mechanism 9, first, the upstream conveying section 6 moves the stage 61 in the X-axis direction to the first position 6A overlapping the first carrying-in section 21 when viewed from the Z-axis direction. When the stage 61 is moved to the first position 6A, the second moving mechanism 10 moves the suction unit 101 to a position above the stage 61 of the upstream conveying unit 6, and holds the first display panel 100A and the second display panel 100B. The second moving mechanism 10 moves the suction unit 91 above the loading table 25 of the first loading unit 21, and then places the display panel 100 on the loading table 25 of the first loading unit 21.
Next, after the first display panel 100A and the second display panel 100B are held by the suction unit 91, the upstream conveying unit 6 moves the stage 61 to the end in the Y1 direction. After the stage 61 is moved to the end of the upstream conveying section 6 in the Y1 direction, the next display panel 100 is placed on the stage 61 by the first moving mechanism 9. After that, the upstream conveying section 6 moves the stage 61 to the first position 6A. When the stage 61 is moved to the first position 6A, the second moving mechanism 10 moves the suction unit 101 to a position above the stage 61 of the upstream conveying unit 6, and holds the first display panel 100A and the second display panel 100B.
After the first display panel 100A and the second display panel 100B are held by the suction portion 91, the upstream conveying portion 6 moves the stage 61 to the end in the Y1 direction. After that, when viewed from the Z-axis direction, the midstream transport section 7 moves the table 71 in the X-axis direction to the first position 7A overlapping the first carry-in section 21. When the stage 71 moves to the first position 7A, the second moving mechanism 10 places the display panel 100 on the stage 71.
When the display panel 100 is placed on the stage 71, the midstream transport section 7 moves the stage 71 in the X-axis direction to the second position 7B overlapping the second carry-in section 22 when viewed from the Z-axis direction. When the table 71 moves to the second position 7B, the third moving mechanism 11 moves the suction unit 111 to above the table 71 of the midstream transport unit 7, and holds the first display panel 100A and the second display panel 100B. The third moving mechanism 11 moves the suction unit 111 above the loading table 25 of the second loading unit 22, and then places the display panel 100 on the loading table 25 of the second loading unit 22.
After the first display panel 100A and the second display panel 100B are held by the suction portion 111, the midstream handling portion 7 moves the stage 71 to the first position 7A. The second moving mechanism 10 and the third moving mechanism 11 repeat the above operations.
(action of first robot arm 51)
The first loading unit 21 moves the first display panel 100A and the second display panel 100B mounted on the loading table 25 to the second position 2B. When the carry-in table 25 of the first carry-in section 21 moves to the second position 2B, the first robot arm 51 moves the holding section 53 above the carry-in table 25 of the first carry-in section 21, and holds the first display panel 100A and the second display panel 100B. Thereafter, the first loading unit 21 moves the loading table 25 to the first position 2A, and the second moving mechanism 10 mounts the first display panel 100A and the second display panel 100B on the loading table 25.
After holding the first display panel 100A and the second display panel 100B, the first robot arm 51 moves the first display panel 100A and the second display panel 100B to the first inspection unit 31 (for example, the first inspection unit 31A), and inputs the first display panel 100A and the second display panel 100B to the first inspection unit 31. After that, the first inspection unit 31 (for example, the first inspection unit 31A) takes a predetermined time to perform lighting inspection of the display panel 100.
When the carry-in table 25 of the first carry-in section 21 moves to the second position 2B again, the first robot arm 51 moves the holding section 53 above the carry-in table 25 of the first carry-in section 21, and holds the first display panel 100A and the second display panel 100B. After that, the first robot arm 51 moves the first display panel 100A and the second display panel 100B to the first inspection unit 31 (for example, the first inspection unit 31B) after holding the first display panel 100A and the second display panel 100B, and inputs the first display panel 100A and the second display panel 100B to the first inspection unit 31.
The first robot arm 51 repeats the above operation, and sequentially moves the display panel 100 from the first inspection unit 31A to the first inspection unit 31F.
When the first robot arm 51 sequentially moves the display panel 100 from the first inspection unit 31A to the first inspection unit 31F, the lighting inspection is sequentially ended in each of the first inspection units 31. At this time, for example, when the lighting inspection is completed in the first inspection unit 31A, the first robot arm 51 moves the inspected display panel 100 from the first inspection unit 31A to the mounting table 41 of the mounting unit 4. That is, the first robot arm 51 repeatedly performs the following operations: the display panel 100 is moved to the first inspection unit 31 capable of lighting inspection, and the inspected display panel 100 is moved from the first inspection unit 31 after the lighting inspection to the mounting table 41 of the mounting unit 4.
(action of the second robot arm 52)
The second carry-in section 22 moves the first display panel 100A and the second display panel 100B mounted on the carry-in table 25 to the second position 2B. When the carry-in table 25 of the second carry-in section 22 moves to the second position 2B, the second robot arm 52 moves the holding section 53 above the carry-in table 25 of the second carry-in section 22, and holds the first display panel 100A and the second display panel 100B. Then, the second loading unit 22 moves the loading table 25 to the first position 2A, and the third movement mechanism 11 mounts the first display panel 100A and the second display panel 100B on the loading table 25.
After holding the first display panel 100A and the second display panel 100B, the second robot arm 52 moves the first display panel 100A and the second display panel 100B to the second inspection unit 32 (for example, the second inspection unit 32A), and inputs the first display panel 100A and the second display panel 100B to the second inspection unit 32. After that, the second inspection unit 32 (for example, the second inspection unit 32A) takes a predetermined time to perform the lighting inspection of the display panel 100.
When the carry-in table 25 of the second carry-in section 22 moves to the second position 2B again, the second robot arm 52 moves the holding section 53 above the carry-in table 25 of the second carry-in section 22, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held, the second robot arm 52 moves the first display panel 100A and the second display panel 100B to the second inspection unit 32 (for example, the second inspection unit 32B), and inputs the first display panel 100A and the second display panel 100B to the second inspection unit 32.
The second robot arm 52 repeats the above operation, and sequentially moves the display panel 100 from the second inspection unit 32A to the second inspection unit 32F.
When the second robot arm 52 sequentially moves the display panel 100 from the second inspection unit 32A to the second inspection unit 32F, the lighting inspection is sequentially ended in each second inspection unit 32. At this time, for example, when the lighting inspection is completed in the second inspection unit 32A, the second robot arm 52 moves the inspected display panel 100 from the second inspection unit 32A to the mounting table 41 of the mounting unit 4. That is, the second robot arm 52 repeatedly performs the following operations: the display panel 100 is moved to the second inspection portion 32 capable of lighting inspection, and the inspected display panel 100 is moved from the second inspection portion 32 after the lighting inspection to the mounting table 41 of the mounting portion 4.
(operation of the mounting part and the fourth movement mechanism)
When the first robot arm 51 moves the inspected display panel 100 to the mounting portion 4, the mounting portion 4 moves the mounting table 41 to the first position 4A. When the inspected display panel 100 is placed on the stage 41, the placement unit 4 moves the stage 41 to the third position 4C. The fourth moving mechanism 15 moves the suction unit 151 to the upper side of the mounting table 41, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction portion 151, the mounting portion 4 moves the mounting table 41 to the second position 4B.
The fourth moving mechanism 15 moves the suction unit 151 above the stage 141 of the discharge unit 14, and then places the display panel 100 on the stage 141. When the display panel 100 is placed on the stage 141, the discharge unit 14 moves the stage 141 to the end in the X1 direction.
On the other hand, when the second robot arm 52 moves the inspected display panel 100 to the mounting portion 4, the mounting portion 4 moves the mounting table 41 to the second position 4B. When the inspected display panel 100 is placed on the stage 41, the placement unit 4 moves the stage 41 to the third position 4C. The fourth moving mechanism 15 moves the suction unit 151 to the upper side of the mounting table 41, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction portion 151, the mounting portion 4 moves the mounting table 41 to the first position 4A.
The fourth moving mechanism 15 moves the suction unit 151 above the stage 141 of the discharge unit 14, and then places the display panel 100 on the stage 141. When the display panel 100 is placed on the stage 141, the discharge unit 14 moves the stage 141 to the end in the X1 direction.
The loading unit 4 and the fourth moving mechanism 15 repeat the above operations. That is, the placement unit 4 alternately receives the inspected display panel 100 from the first robot arm 51 and the second robot arm 52, and the fourth moving mechanism 15 moves the inspected display panel 100 to the discharge unit 14.
(action of fifth movement mechanism)
When the discharge unit 14 moves the stage 141 to the end in the X1 direction, the fifth moving mechanism 17 moves the suction unit 171 to above the stage 141 of the discharge unit 14, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction portion 171, the discharge portion 14 moves the stage 141 to the end in the X2 direction. When the stage 141 moves to the end in the X2 direction, the first and second robot arms 51 and 52 move the inspected display panel 100 from the mounting stage 41 of the mounting portion 4 to the stage 141 of the discharge portion 14.
The fifth moving mechanism 17 moves the inspected display panel 100 to the first conveying unit 161 or the second conveying unit 162 according to the result of the inspection unit 3. More specifically, if the inspection result of the inspection unit 3 is "acceptable" of the display panel 100, the fifth moving mechanism 17 moves the acceptable display panel 100 to the first conveying unit 161. On the other hand, if the inspection result of the inspection unit 3 is the display panel 100 of "defective product", the fifth moving mechanism 17 moves the display panel 100 of the defective product to the second conveying unit 162. The first conveying unit 161 and the second conveying unit 162 convey the display panel 100 in the Y2 direction when the display panel 100 is mounted thereon.
(effects of the present embodiment)
In the processing system 1 of the present embodiment, six inspection units 3 are arranged around the rotation axis L of the robot arm 5, and the display panel 100 is put into the processing system by the robot arm 5. Therefore, even when the carry-in unit 2 for carrying the display panel 100 by the carry-in table 25 is used, the robot arm 5 can make the time taken to put the display panel 100 carried by the carry-in table 25 into each inspection unit 3 substantially constant because each inspection unit 3 is disposed around the rotation axis L of the robot arm 5. In this way, in each inspection unit 3, the processing time of the display panel 100 including the time taken for the display panel 100 can be made substantially constant, and thus the tact time of the processing system 1 can be shortened. Further, when the processing units 3 are arranged around the rotation axis L of the robot arm 5, the inspection units 3 are arranged radially around the robot arm 5, so that the space between the adjacent inspection units 3 can be enlarged, as compared with the case where the processing units 3 are arranged along the conveying direction of the display panel 100. Thereby, maintenance of the inspection unit 3 becomes easy. In addition, since the display panel 100 can be put into each inspection unit 3 by one robot arm, it is not necessary to provide a plurality of robot arms 5, as compared with the case where each inspection unit 3 is arranged along the conveying direction of the display panel 100.
In the present embodiment, the first inspection unit 31 and the second inspection unit 32 are arranged in the Y-axis direction orthogonal to the conveying direction of the carry-in unit 2, and therefore, the first inspection unit 31 and the second inspection unit 32 are easily arranged. In addition, in order to provide the display panel 100 to the first inspection unit 31, the first robot arm 51 and the first carry-in unit 21 are disposed. Similarly, the second robot arm 52 and the second carry-in section 22 are disposed so as to provide the display panel 100 to the second inspection section 32. Therefore, since the two carry-in units 2 and the robot arm 5 are provided to provide the display panel 100 to the first inspection unit 31 and the second inspection unit 32, the tact time of the processing system 1 can be shortened.
In the present embodiment, the discharge unit 14 is disposed between the first carry-in unit 21 and the second carry-in unit 22 in the Y axis direction, and the side of the carry-in unit 2 that receives the display panel 100 in the X axis direction is the same as the side of the discharge unit 14 that discharges the display panel 100. The discharge unit 14 conveys the display panel 100 in the X1 direction. With this configuration, the installation area of the processing system 1 can be made compact when viewed from the Z-axis direction.
(second embodiment)
Next, a second embodiment will be described. Fig. 4 is a top view of the processing system 1 of the second embodiment. The same components as those of the first embodiment are denoted by the same reference numerals, and description thereof may be omitted.
As shown in fig. 4, the processing system 1 includes: a carry-in section 2 for carrying the display panel 100; an inspection unit 3 for inspecting the display panel 100; a mounting part 4 for mounting the inspected display panel 100 inspected by the inspection part 3; and a robot arm 5 for moving the display panel 100 carried into the carrying-in section 2 to the inspection section 3 and for moving the inspected display panel 100 inspected by the inspection section 3 to the mounting section 4.
The loading unit 2 includes a movable loading table 25 on which the display panel 100 is mounted. The carry-in section 2 reciprocates the carry-in table 25 between a first position 2A as one end and a second position 2B as the other end. In the present embodiment, the carry-in section 2 is constituted by only one.
The inspection unit 3 is provided as a first inspection unit 31 for inspecting the display panel 100 carried in by the first carrying-in unit 21 and a second inspection unit 32 for inspecting the display panel 100 carried in by the second carrying-in unit 22.
The robot arm 5 is provided as a first robot arm 51 for transferring the display panel 100 carried in by the first carrying-in section 21 to the first inspection section 31, and as a second robot arm 52 for transferring the display panel 100 carried in by the second carrying-in section 22 to the second inspection section 32. The first robot arm 51 and the second robot arm 52 place the inspected display panel 100 received from the first inspection unit 31 and the inspected display panel 100 received from the second inspection unit 32 on the placement unit 4, respectively. The first inspection unit 31 is disposed around the first robot arm 51, and the second inspection unit 32 is disposed around the second robot arm 52.
The processing system 1 further includes: a first moving mechanism 18 for moving the display panel 100 from the previous step conveying section 8 to the carry-in section 2; an alignment camera 12 that detects a position of the display panel 100 held by the first moving mechanism 18; and an ID reader 13 that reads data recorded in a portion other than the display area of the display panel 100.
The processing system 1 includes: the discharge unit 14 for conveying the inspected display panel 100 to the next step; and a fifth moving mechanism 17 for moving the inspected display panel 100 mounted on the mounting portion 4 from the mounting portion 4 to the discharging portion 14. In the present embodiment, the discharge unit 14 is disposed on the X2 direction side of the carry-in unit 2.
(first movement mechanism)
The first movement mechanism 18 is a pick-and-place type movement mechanism. The first moving mechanism 18 includes: an adsorption part 181 holding the display panel 100; a position adjusting unit 182 that moves the suction unit 181 in the up-down direction and rotates about the Z-axis direction as a rotation axis; a first driving section 183 that reciprocates the position adjusting section 182 in the Y-axis direction; and a second driving part 184 that reciprocates the first driving part 183 in the X direction. The first driving unit 183 and the second driving unit 184 are each constituted by an electric cylinder or the like. The first driving unit 183 reciprocates the suction unit 181 in the X-axis direction by the position adjusting unit 182. The second driving unit 184 is located in the Y2 direction of the carrying unit 8. The second driving unit 184 reciprocates the suction unit 181 in the X-axis direction by the first driving unit 183 and the position adjusting unit 182.
(carry-in part)
As shown in fig. 4, the carry-in section 2 includes: a carry-in table 25 on which the display panel 100 is placed; and a driving unit 26 for reciprocally moving the carry-in table 25 in the X-axis direction. The carry-in table 25 is a size in which two display panels 100 are placed in the X direction. The driving unit 26 is constituted by an electric cylinder or the like. The driving unit 26 extends in the X-axis direction, and reciprocates the carry-in table 25 between the first position 2A and the second position 2B. At the first position 2A, the carry-in section 2 receives the display panel 100. At the second position 2B, the carry-in section 2 hands over the display panel 100. That is, the carry-in section 2 carries the display panel 100 in the X2 direction. When the carry-in table 25 is located at the first position 2A, the carry-in table 25 is located adjacent to the previous step conveying section 8 in the X2 direction. The conveying direction of the carry-in table 25 is the same as the conveying direction of the preceding step conveying section 8.
(ID reader)
As shown in fig. 4, the ID reader 13 includes a first ID reader 13A and a second ID reader 13B. When viewed from the Z-axis direction, the first ID reader 13A is located at a position overlapping the upstream conveying section 6 in the Y-axis direction and above the carry-in section 2. The first ID reader 13A is moved in the Y-axis direction by the upper driving part 131. The first ID reader 13A reads data recorded in the recording section of the display panel 100 from above. When viewed from the Z-axis direction, the second ID reader 13B is located at a position overlapping the carry-in section 2 in the Y-axis direction and below the carry-in section 2. The second ID reader 13B is moved in the Y-axis direction by the lower driving section 132. The second ID reader 13B reads data recorded in the recording section of the display panel 100 from below.
(robot arm)
As shown in fig. 4, the robot arm 5 is provided as a first robot arm 51 for transferring the display panel 100 carried in by the first carrying-in section 21 to the first inspection section 31 and a second robot arm 52 for transferring the display panel 100 carried in by the second carrying-in section 22 to the second inspection section 32, and the first robot arm 51 and the second robot arm 52 have the same configuration. The first robot arm 51 is disposed on the Y1 direction side of the second robot arm 52 in the Y axis direction. The first robot arm 51 is located in the Y1 direction of the carry-in section 2 at a position in the X1 direction of the second position 2B of the carry-in section 2. The second robot arm 52 is located in the Y2 direction of the carry-in section 2 at a position in the X2 direction of the second position 2B of the carry-in section 2.
The first robot arm 51 and the second robot arm 52 are SCARA type robots, and have the same configuration as the first embodiment. As shown in fig. 3 and 4, the first robot arm 51 and the second robot arm 52 include: a holding portion 53 for holding the display panel 100; and an arm main body portion 54 that moves the holding portion 53. The holding portion 53 holds two display panels 100 at the same time.
(inspection part)
As shown in fig. 4, the inspection unit 3 is provided as a first inspection unit 31 for inspecting the display panel 100 carried in by the first carrying-in unit 21 and a second inspection unit 32 for inspecting the display panel 100 carried in by the second carrying-in unit 22. The first inspection unit 31 is disposed on the Y1 direction side of the second inspection unit 32. Six first inspection units 31 and six second inspection units 32 are arranged. In the present embodiment, the inspection unit 3 performs lighting inspection of the display panel 100.
The first inspection unit 31 is disposed around the rotation axis L of the first robot arm 51 at six angles around the rotation axis L of the first robot arm 51 so as to be equidistant from the rotation axis L. That is, the first inspection units 31 are equally spaced from the center of the first robot arm 51, and are radially arranged around the first robot arm 51.
Similarly, the second inspection unit 32 is disposed around the rotation axis L of the second robot arm 52 at six angles around the rotation axis L of the second robot arm 52 so that the distances from the rotation axis L are equal. That is, the second inspection units 32 are equally spaced from the center of the second robot arm 52, and are radially arranged around the second robot arm 52.
(mounting part)
As shown in fig. 4, the mounting portion 4 includes two mounting tables 41 on which the display panel 100 is mounted. More specifically, the mounting portion 4 includes a first mounting table 41A on which the inspected display panel 100 inspected by the first inspection portion 31 is mounted, and a second mounting table 41B on which the inspected display panel 100 inspected by the second inspection portion 32 is mounted. Each of the mounting tables 41A and 41B is a size on which two display panels 100 are mounted in the X direction. The mounting tables 41A and 41B are arranged in the Y-axis direction.
(second movement mechanism)
As shown in fig. 4, the second moving mechanism 19 moves the inspected display panel 100 mounted on the mounting portion 4 to the discharge portion 14. The second moving mechanism 19 is a pick-and-place type moving mechanism. The second moving mechanism 19 includes: an adsorption portion 191 holding the display panel 100; a position adjustment unit 192 that moves the suction unit 191 in the up-down direction and rotates the suction unit 120 about the Z-axis direction as a rotation axis; a first driving unit 193 for reciprocating the position adjusting unit 192 in the Y-axis direction; and a second driving part 194 that reciprocates the first driving part 193 in the X direction. The adsorption part 191 can simultaneously hold two display panels 100. The first driving unit 193 and the second driving unit 194 are constituted by electric cylinders or the like. The first driving unit 193 reciprocates the suction unit 191 in the Y-axis direction by the position adjusting unit 192. More specifically, when viewed from the Z-axis direction, the first driving unit 193 moves the suction unit 191 so as to overlap the first and second tables 41A and 41B in the Y-axis direction. The second driving part 194 extends in the X-axis direction. The second driving unit 194 reciprocates the suction unit 151 in the X-axis direction by the first driving unit 193 and the position adjusting unit 192.
(discharge portion)
As shown in fig. 4, the discharge unit 14 conveys the inspected display panel 100 to the next step.
The discharge portion 14 is constituted by a belt conveyor. The discharge unit 14 conveys the inspected display panel 100 in the X2 direction. That is, the discharge unit 14 conveys the inspected display panel 100 in the same direction as the X1 direction in which the carry-in unit 2 conveys the display panel 100.
The discharge unit 14 includes: a first discharge portion 14A extending in the Y-axis direction; and a second discharge portion 14B located on the X1 direction side of the first discharge portion 14A and extending in the Y axis direction. The first discharge unit 14A conveys the display panel 100 whose inspection result is "acceptable" in the inspection unit 3. The second discharge unit 14B conveys the display panel 100 whose inspection result is "defective" in the inspection unit 3.
The first discharge portion 14A is located on the X2 direction side of the first mounting table 41A. The second discharge portion 14B is located on the X2 direction side of the second mounting table 41B.
(operation of the processing System)
Next, the operation of the processing system 1 will be described.
(action of first movement mechanism)
After the previous step conveying section 8 conveys the first display panel 100A and the second display panel 100B to the X2-direction end of the previous step conveying section 8, the first moving mechanism 18 moves the adsorbing section 181 to the X1-direction end of the previous step conveying section 8, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 181, the previous process conveying unit 8 moves the next display panel 100 to the end of the previous process conveying unit 8 in the X2 direction.
After the first display panel 100A and the second display panel 100B are held by the suction unit 181, the alignment camera 12 detects the positions of the first display panel 100A and the second display panel 100B. When the first display panel 100A and the second display panel 100B are detected by the alignment camera 12, the first moving mechanism 18 recognizes the positions of the first display panel 100A and the second display panel 100B with respect to the adsorbing portion 181.
After the suction unit 181 is moved above the carry-in table 25 of the carry-in unit 2, the first moving mechanism 18 performs alignment of the rotational directions of the first display panel 100A in the Y-axis direction and the Z-axis direction with respect to the carry-in table 25 of the carry-in unit 2 based on the position of the first display panel 100A detected by the alignment camera 12. The carry-in unit 2 performs alignment of the carry-in table 25 with respect to the first display panel 100A in the X-axis direction based on the position of the first display panel 100A detected by the alignment camera 12. After the alignment of the position of the first display panel 100A is performed, the carry-in section 2 places only the first display panel 100A on the carry-in table 25.
After the first display panel 100A is placed on the carry-in table 25, the first moving mechanism 18 moves the suction unit 181 in the Z1 direction. Next, the alignment of the second display panel 100B in the Y-axis direction and the Z-axis direction with respect to the carry-in table 25 is performed based on the position of the second display panel 100B detected by the alignment camera 12. The carry-in unit 2 performs alignment of the carry-in table 25 with respect to the second display panel 100B in the X-axis direction based on the position of the second display panel 100B detected by the alignment camera 12. After the alignment of the position of the second display panel 100B is performed, the first moving mechanism 18 places the second display panel 100B on the carry-in table 25.
The first moving mechanism 18 moves the suction unit 181 toward the previous-process conveying unit 8 after the first display panel 100A and the second display panel 100B are placed on the carry-in table 25. After the suction unit 181 moves to the previous step conveying unit 8, the carry-in unit 2 moves the first display panel 100A and the second display panel 100B mounted on the carry-in table 25 to the position of the ID reader 13. Either one of the first ID reader 13A and the second ID reader 13B reads the first display panel 100A and the second display panel 100B, acquires inspection data, and the like.
The first moving mechanism 18 again holds the first display panel 100A and the second display panel 100B from the previous step conveying section 8, and repeats the above operation.
(action of first robot arm 51 and second robot arm 52)
The first robot arm 51 and the second robot arm 52 alternately move the first display panel 100A and the second display panel 100B that are carried by the carry-in table 25 of the carry-in section 2.
The carry-in section 2 moves the first display panel 100A and the second display panel 100B mounted on the carry-in table 25 to the second position 2B. When the carry-in table 25 of the carry-in section 2 moves to the second position 2B, the first robot arm 51 moves the holding section 53 above the carry-in table 25 of the carry-in section 2, and holds the first display panel 100A and the second display panel 100B.
Thereafter, the carry-in unit 2 moves the carry-in table 25 to the first position 2A, and the first moving mechanism 18 mounts the first display panel 100A and the second display panel 100B on the carry-in table 25.
After holding the first display panel 100A and the second display panel 100B, the first robot arm 51 moves the first display panel 100A and the second display panel 100B to the first inspection unit 31 (for example, the first inspection unit 31A), and inputs the first display panel 100A and the second display panel 100B to the first inspection unit 31. After that, the first inspection unit 31 (for example, the first inspection unit 31A) takes a predetermined time to perform lighting inspection of the display panel 100.
Again, when the carry-in table 25 of the carry-in section 2 moves to the second position 2B, the second robot arm 52 moves the holding section 53 above the carry-in table 25 of the first carry-in section 21, holding the first display panel 100A and the second display panel 100B. After that, the second robot arm 52 holds the first display panel 100A and the second display panel 100B, moves the first display panel 100A and the second display panel 100B to the second inspection unit 32 (for example, the second inspection unit 32A), and inputs the first display panel 100A and the second display panel 100B to the second inspection unit 32.
The first robot arm 51 and the second robot arm 52 alternately repeat the above operations, and the first robot arm 51 sequentially moves the display panel 100 from the first inspection unit 31A to the first inspection unit 31F, and the second robot arm 52 sequentially moves the display panel 100 from the second inspection unit 32A to the second inspection unit 32F.
When the first and second robot arms 51 and 52 sequentially move the display panel 100 to the first and second inspection units 31 and 32, the lighting inspection is sequentially ended in each inspection unit 3. At this time, as in the first embodiment, when the lighting inspection is completed in the first inspection unit 31 and the second inspection unit 32, the first robot arm 51 and the second robot arm 52 move the inspected display panel 100 from the first inspection unit 31 and the second inspection unit 32 to the respective mounting tables 41 of the mounting unit 4. That is, the first robot arm 51 and the second robot arm 52 repeatedly perform the following operations: the display panel 100 is moved to the first inspection unit 31 and the second inspection unit 32 capable of lighting inspection, and the inspected display panel 100 is moved from the first inspection unit 31 and the second inspection unit 32 after the lighting inspection to the respective mounting tables 41 of the mounting unit 4.
(action of the second movement mechanism)
The second moving mechanism 19 alternately moves the display panels placed on the first and second tables 41A and 42B from the first and second tables 41A and 42B to the discharge portion 14.
When the first display panel 100A and the second display panel 100B are placed on the first placement table 41A by the first robot arm 51, the second moving mechanism 19 moves the suction unit 191 to above the first placement table 41A, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction portion 191, the second moving mechanism 19 moves the inspected display panel 100 to the first discharge portion 14A or the second discharge portion 14B according to the result of the inspection portion 3. More specifically, if the inspection result of the inspection unit 3 is the display panel 100 of "acceptable product", the second moving mechanism 19 moves the display panel 100 of acceptable product to the first discharge unit 14A. On the other hand, if the inspection result of the inspection unit 3 is the display panel 100 of "defective product", the second moving mechanism 19 moves the display panel 100 of the defective product to the second discharge unit 14B.
Next, when the first display panel 100A and the second display panel 100B are placed on the second placement table 41B by the second robot arm 52, the second moving mechanism 19 moves the suction unit 191 to above the second placement table 41B, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction portion 191, the second moving mechanism 19 moves the inspected display panel 100 to the first discharge portion 14A or the second discharge portion 14B according to the result of the inspection portion 3. More specifically, if the inspection result of the inspection unit 3 is the display panel 100 of "acceptable product", the second moving mechanism 19 moves the display panel 100 of acceptable product to the first discharge unit 14A. On the other hand, if the inspection result of the inspection unit 3 is the display panel 100 of "defective product", the second moving mechanism 19 moves the display panel 100 of the defective product to the second discharge unit 14B.
The first discharge unit 14A and the second discharge unit 14B convey the display panel 100 in the Y2 direction when the display panel 100 is mounted thereon.
(effects of the present embodiment)
In the processing system 1 of the present embodiment, six inspection units 3 are arranged around the rotation axis L of the robot arm 5, and the display panel 100 is put into the processing system by the robot arm 5. Therefore, in this embodiment, the same effects as those in embodiment 1 can be obtained. In the present embodiment, the first inspection unit 31 and the second inspection unit 32 are arranged in the Y-axis direction orthogonal to the conveying direction of the carry-in unit 2, and therefore, the first inspection unit 31 and the second inspection unit 32 are easily arranged.
The conveyance direction of the carry-in portion 2 and the conveyance direction of the discharge portion 14 are the same X-axis direction, and the carry-in portion 2 and the discharge portion 14 are aligned in the X-axis direction. With this configuration, the carry-in portion 2 and the discharge portion 14 are more easily maintained in the Y-axis direction than in the case where the carry-in portion 2 and the discharge portion 14 are aligned in the Y-axis direction.
(other examples)
Fig. 5 is a plan view of a robot arm and a processing unit according to another embodiment. In fig. 5, only the first robot arm 51 and the first inspection section 31 are illustrated. The present embodiment has the same configuration as that of the above embodiment except that the alignment camera 200 for detecting the position of the display panel 100 held by the holding portion 53 of the robot arm 5 and the temporary placement portion 300 for temporarily placing the display panel 100 are provided when the robot arm 5 moves the display panel 100 carried into the carry-in portion 2 to the inspection portion 3.
As shown in fig. 5, the alignment camera 200 is located above the first robotic arm 51. When the first robot arm 51 moves the display panel 100 carried into the first carrying-in section 21 to the first inspection section 31, the alignment camera 200 photographs the display panel 100 from above, and detects the position of the display panel 100. When the display panel 100 is detected by the alignment camera 200, the first robot arm 51 recognizes the position of the display panel 100 with respect to the holding portion 53 according to the inspection result of the alignment camera 200. Accordingly, the first robot arm 51 can perform alignment of the display panel 100 with respect to a predetermined position of the first inspection unit 31 when the display panel 100 is placed on the first inspection unit 31.
As a result, the first robot arm 51 can accurately place the display panel 100 on the first inspection unit 31.
As shown in fig. 5, the temporary placement section 300 is disposed between the first inspection section 31 and the first robot arm 51. When the first inspection unit 31 is stopped and the display panel 100 cannot be moved from the first carry-in unit 21 to the first inspection unit 31, the first robot arm 51 moves the display panel 100 from the first carry-in unit 21 to the temporary placement unit 300. When the first robot arm 51 cannot move the display panel 100 to the mounting portion 4, the first inspection portion 31 moves the display panel 100 to the temporary placement portion 300. As described above, in the present embodiment, since the temporary placement section 300 for temporarily placing the display panel 100 is provided, even when the first robot arm 51 cannot move the display panel 100, the display panel 100 can be moved to the temporary placement section 300. This can suppress the stop of the conveyance of the display panel 100 in the processing system 1.
In the above embodiment, six inspection units 3 are arranged around the rotation axis L of the robot arm 5, but the number is not limited to six, and three or more inspection units may be arranged.
Reference numerals
1 … treatment system; 2 … carry-in part; 2a … first position; 2B … second position; 3 … inspection unit (processing unit); 4 … mounting part; a 4a … first position; 4B … second position; a third position of 4C …;5 … robotic arm; 6 … upstream conveying section; 6a … first position; 7 …, a transport section; 7a … first position; 7B … second position; 8 … previous step conveying section; 9 … first moving mechanism; 10 … second moving mechanism; 11 … third moving mechanism; 12 … to the camera; 13 … ID reader; 13a … first ID reader; 13B … second ID reader; 14 … discharge; 14a … first discharge portion; 14B … second discharge portion; 15 … fourth moving mechanism; 16 … downstream conveying section; 17 … fifth moving mechanism; 18 … first moving mechanism; 19 … second moving mechanism; 21 … first carry-in portion; 22 … second carry-in portion; 25 … carry-in table; 26 … drive part; 31 … first inspecting section (first processing section); 32 … second inspecting section (second processing section); 41 … mounting table; 41a … first mounting table; 41B … second mounting table; 42 … drive part; 51 … first robotic arm; 52 … second robotic arm; 53 … holding portion; 54 … arm body portion; 55 … first arm; 56 … second arm; 57 … drive part; 58 … aligned with the shaft portion; 61 … stations; 62 … drive part; 71 …;72 … drive part; 91 … adsorbing portion; 92 … position adjusting part; 93 … first drive part; 94 … second drive portion; 100 … display panel; 101 … adsorbing portion; 102 … position adjusting part; 103 … drive part; 111 … adsorbing portion; 112 … position adjusting part; 113 … drive part; 131 … upper drive part; 132 … lower drive portion; 141 and …;142 … drive; 151 … adsorbing portion; 152 … position adjusting part; 153 … drive part; 161 … first conveying section; 162 … second conveying portion; 171 … adsorbent; 172 … position adjusting part; 173 … a first drive portion; 174 … second drive portions; 181 … adsorbing portion; 182 and … position adjusting parts; 183 … first drive portion; 184 … second drive portions; 191 … adsorption section; 192 … position adjusting part; 193 … first drive; 194 … second drive part; 200 … to the camera; 300 … temporary placement section; l … axis of rotation.

Claims (4)

1. A processing system, comprising:
a carry-in section having a movable carry-in table on which a workpiece is placed, the carry-in table being reciprocally moved between a first position at which the workpiece is received and a second position at which the workpiece is transferred;
a robot arm that rotates about a rotation axis extending in the up-down direction and receives the workpiece from the carry-in table reaching the second position;
a processing unit that is disposed around the rotation axis of the robot arm, and into which the workpiece is put by the robot arm; and
a placement unit for placing the processed workpiece processed by the processing unit by the robot arm,
the loading part is provided with a first loading part and a second loading part, the reciprocating paths of the loading tables of the first loading part and the second loading part are parallel,
the processing unit is provided with a first processing unit for processing the workpiece carried in by the first carrying-in unit and a second processing unit for processing the workpiece carried in by the second carrying-in unit,
The robot arm is provided with a first robot arm and a second robot arm, the first robot arm and the first processing part are connected with each other, the workpiece carried in by the first carrying-in part is connected with each other, the second robot arm and the second processing part are connected with each other, the workpiece carried in by the second carrying-in part is connected with each other,
the first robot arm and the second robot arm place the processed workpiece received from the first processing unit and the processed workpiece received from the second processing unit on the placement unit, respectively,
the device comprises:
a discharge unit that conveys the processed workpiece; and
a moving mechanism that moves the processed workpiece placed on the placement unit from the placement unit to the discharge unit,
when the direction in which the carry-in part reciprocates the carry-in table is set as a carrying direction, the direction in which the first position is located is set as a first direction, and the direction in which the second position is located is set as a second direction,
the discharge unit is disposed between the first carry-in unit and the second carry-in unit, and conveys the processed workpiece in the first direction.
2. The processing system of claim 1, wherein the processing system further comprises a processor configured to,
an alignment camera is provided to detect a position of the workpiece held by the robot arm when the robot arm moves the workpiece from the carry-in stage to the processing section,
and the robot arm performs alignment of the workpiece relative to the processing part according to the inspection result of the alignment camera.
3. The processing system of claim 1, wherein the processing system further comprises a processor configured to,
has a temporary placement section for temporarily placing the work,
when the workpiece cannot be moved from the carry-in section to the processing section, the robot arm moves the workpiece from the carry-in section to the temporary placement section.
4. The processing system of claim 3, wherein the processing system further comprises a processor configured to,
when the processed workpiece cannot be moved from the processing unit to the placement unit, the robot arm moves the processed workpiece from the processing unit to the temporary placement unit.
CN202210166404.2A 2021-02-26 2022-02-23 processing system Active CN114955515B (en)

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