JP2005274243A5 - - Google Patents

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Publication number
JP2005274243A5
JP2005274243A5 JP2004085650A JP2004085650A JP2005274243A5 JP 2005274243 A5 JP2005274243 A5 JP 2005274243A5 JP 2004085650 A JP2004085650 A JP 2004085650A JP 2004085650 A JP2004085650 A JP 2004085650A JP 2005274243 A5 JP2005274243 A5 JP 2005274243A5
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JP
Japan
Prior art keywords
subject
cassette
inspection
stored
arm mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004085650A
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Japanese (ja)
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JP2005274243A (en
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Publication date
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Priority to JP2004085650A priority Critical patent/JP2005274243A/en
Priority claimed from JP2004085650A external-priority patent/JP2005274243A/en
Priority to TW094108407A priority patent/TW200533907A/en
Priority to US11/086,900 priority patent/US20050232735A1/en
Priority to KR1020050023985A priority patent/KR20060044613A/en
Priority to CNA2005100594091A priority patent/CN1673719A/en
Publication of JP2005274243A publication Critical patent/JP2005274243A/en
Publication of JP2005274243A5 publication Critical patent/JP2005274243A5/ja
Pending legal-status Critical Current

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Claims (9)

複数の被検体が収納される複数のカセットと、
複数のカセットを載置する載置台と、それぞれの該カセットに収納される記被検体を搬出及び搬入又は、搬送するための備える搬送部と、
記被検体検査を行う査部と、
記搬送部における搬送制御と、査部おける検査設定項目の設定を行う制御部と、を具備し、
記載置台に前記カセットが載置された際に、に載置されたカセットに収納される最後の検査対象となる被検体が搬出されるまでに、後のカセットが載置されたならば、前記後のカセットに収納される被検体を引き続き、搬出及び検査を行うことを特徴とする被検体の検査装置。
A plurality of cassettes for storing a plurality of subjects;
A mounting table for mounting a front Symbol plurality of cassettes, unloading and transferring the pre-Symbol subject to be accommodated in each of said cassette or a transport unit comprising a machine structure for carrying,
And Ken査部to perform the inspection of the previous Symbol subject,
Comprising a transport control before Symbol conveying unit, and a control unit for setting a test setting items definitive before Symbol detection査部, a,
When placed previous SL cassette mounting table, if the analyte of last inspected housed in a cassette placed on the previously before being unloaded, after the cassette is placed In this case, the subject inspection apparatus is configured to continuously carry out and inspect the subject stored in the subsequent cassette.
前記制御部は、前記先に載置されたカセットに収納される最後の検査対象となる被検体が搬出されるまでに、前記後のカセットが載置されたかどうか判断し、前記後のカセットが載置されたときは、前記先に載置されたカセットの最後の被検体に続いて前記後のカセットから最初の被検体が取り出されるよう制御することを特徴とする請求項1に記載の被検体の検査装置。 The control unit determines whether or not the subsequent cassette is placed before the subject to be examined last stored in the previously placed cassette is unloaded, and the subsequent cassette is 2. The subject according to claim 1, wherein when placed, the subject is controlled so that the first subject is taken out from the subsequent cassette following the last subject of the cassette placed earlier. Sample inspection device. 前記搬送部は、カセット用アーム機構と検査用アーム機構とから構成され、
前記カセット用アーム機構は、前記被検体を前記カセットと受け渡し位置の間において搬出及び搬入又は搬送を行ない、前記検査用アーム機構は、前記検査部と前記受け渡し位置との間で搬送を行なうことを特徴とする請求項1または2に記載の被検体の検査装置。
The transport unit includes a cassette arm mechanism and an inspection arm mechanism.
The cassette arm mechanism carries out and carries in or transports the subject between the cassette and the delivery position, and the examination arm mechanism carries the specimen between the examination section and the delivery position. 3. The subject inspection apparatus according to claim 1, wherein the subject inspection apparatus is a test object.
前記検査用アーム機構は、複数のアーム部を備え、前記検査部と前記受け渡し位置の間で前記被検体を循環搬送することを特徴とする請求項3に記載の被検体の検査装置。 The subject inspection apparatus according to claim 3, wherein the inspection arm mechanism includes a plurality of arm portions, and circulates and conveys the subject between the inspection portion and the delivery position. 前記制御部は、前記後のカセットに収納される被検体を引き続き搬出及び検査を行うとき、前記検査用アーム機構の全てのアーム部が被検体を保持して連続して循環搬送することを特徴とする請求項4に記載の被検体の検査装置。 When the control unit continuously carries out and inspects the specimen stored in the subsequent cassette, all the arm parts of the examination arm mechanism hold the specimen and continuously circulate and convey the specimen. The test apparatus for a subject according to claim 4. 前記検査部は、少なくとも2つの検査部で構成されていることを特徴とする請求項1から5のいずれか1項に記載の被検体の検査装置。 6. The object inspection apparatus according to claim 1, wherein the inspection unit includes at least two inspection units. 前記検査部は、前記被検体に対して、マクロ的な外観検査を行うマクロ検査部と、前記マクロ検査の後に、前記被検体を受け取り、ミクロ的な外観検査を行う顕微鏡観察部と、を含むことを特徴とする請求項6に記載の被検体の検査装置。 The inspection unit includes a macro inspection unit that performs a macro appearance inspection on the subject, and a microscope observation unit that receives the subject and performs a micro appearance inspection after the macro inspection. The subject inspection apparatus according to claim 6. 前記搬送部は、マッピング検出を行なうセンサを備え、前記載置台に載置された前記カセット内に収納された複数の被検体のマッピングを行なうことを特徴とする請求項1から7のいずれか1項に記載の被検体の検査装置。 The said conveyance part is provided with the sensor which performs a mapping detection, The mapping of the some subject accommodated in the said cassette mounted in the mounting table mentioned above is performed, The any one of Claim 1 to 7 characterized by the above-mentioned. The test apparatus for a subject according to the item. 複数のカセットに収納される複数の被検体を、カセット単位で連続的に搬出し、所定の検査を行った後、元のカセットに収納する被検体の検査方法であって、
最初のカセットの第1の検査項目の設定をした後、収納される被検体が順次搬出され検査されている期間内に、次のカセットの第2の検査項目の設定を行い、前記最初のカセットの最終の被検体を搬出した後、続いて、前記次のカセットに収納されている被検体を搬出し、前記最終の被検体の検査後に前記第1の検査項目から第2の検査項目に切り替えて、続いて検査を行うことを特徴とする被検体の検査方法。
A plurality of specimens stored in a plurality of cassettes are continuously carried out in units of cassettes, and after performing a predetermined test, a test method for a test object stored in the original cassette,
After setting the first examination item of the first cassette, the second examination item of the next cassette is set during the period in which the stored specimens are sequentially carried out and examined, and the first cassette is set. After the last subject is carried out, the subject stored in the next cassette is carried out, and after the final subject is examined, the first examination item is switched to the second examination item. A method for inspecting a subject, characterized in that the inspection is subsequently performed.
JP2004085650A 2004-03-23 2004-03-23 Subject inspection apparatus and inspection method Pending JP2005274243A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004085650A JP2005274243A (en) 2004-03-23 2004-03-23 Subject inspection apparatus and inspection method
TW094108407A TW200533907A (en) 2004-03-23 2005-03-18 Apparatus and method for inspecting an inspection object
US11/086,900 US20050232735A1 (en) 2004-03-23 2005-03-21 Apparatus and method for inspecting an inspection object
KR1020050023985A KR20060044613A (en) 2004-03-23 2005-03-23 Inspecting device and method of inspection
CNA2005100594091A CN1673719A (en) 2004-03-23 2005-03-23 Apparatus and method for inspecting an inspection object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004085650A JP2005274243A (en) 2004-03-23 2004-03-23 Subject inspection apparatus and inspection method

Publications (2)

Publication Number Publication Date
JP2005274243A JP2005274243A (en) 2005-10-06
JP2005274243A5 true JP2005274243A5 (en) 2007-05-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004085650A Pending JP2005274243A (en) 2004-03-23 2004-03-23 Subject inspection apparatus and inspection method

Country Status (5)

Country Link
US (1) US20050232735A1 (en)
JP (1) JP2005274243A (en)
KR (1) KR20060044613A (en)
CN (1) CN1673719A (en)
TW (1) TW200533907A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4578383B2 (en) * 2005-10-25 2010-11-10 株式会社堀場製作所 Panel member inspection apparatus and panel member inspection program applied thereto
JP2007256173A (en) * 2006-03-24 2007-10-04 Olympus Corp Appearance inspection device
KR100833716B1 (en) * 2007-03-30 2008-05-29 (주) 인텍플러스 Semiconductor device vision inspection system
FR2931295B1 (en) * 2008-05-13 2010-08-20 Altatech Semiconductor DEVICE AND METHOD FOR INSPECTING SEMICONDUCTOR WAFERS
KR101227812B1 (en) * 2011-04-08 2013-02-07 세크론 주식회사 Method of inspecting light-emitting devices
KR101287229B1 (en) * 2011-11-04 2013-07-17 세메스 주식회사 Method of transferring wafers in inspecting light-emitting devices
JP6448456B2 (en) * 2015-04-28 2019-01-09 株式会社ディスコ Processing equipment
JP2018128339A (en) * 2017-02-08 2018-08-16 住友化学株式会社 Surface inspection device for semiconductor wafer and surface inspection method for semiconductor wafer
JP7274350B2 (en) * 2019-05-28 2023-05-16 東京エレクトロン株式会社 Conveyance system, inspection system and inspection method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3468056B2 (en) * 1997-09-23 2003-11-17 東京エレクトロン株式会社 Substrate detection device
JP3270828B2 (en) * 1998-09-21 2002-04-02 理学電機工業株式会社 X-ray fluorescence analyzer
US6137303A (en) * 1998-12-14 2000-10-24 Sony Corporation Integrated testing method and apparatus for semiconductor test operations processing
JP2002076077A (en) * 2000-08-31 2002-03-15 Nikon Corp Inspection device
DE10103253A1 (en) * 2001-01-25 2002-08-01 Leica Microsystems Method and arrangement for transporting and inspecting semiconductor substrates
JP2002280425A (en) * 2001-03-16 2002-09-27 Hitachi Ltd Semiconductor integrated circuit device manufacturing method and test method
KR100545620B1 (en) * 2001-07-31 2006-01-24 아사히 가세이 마이크로시스템 가부시끼가이샤 Semiconductor manufacturing apparatus control system

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