JP2005274243A5 - - Google Patents
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- Publication number
- JP2005274243A5 JP2005274243A5 JP2004085650A JP2004085650A JP2005274243A5 JP 2005274243 A5 JP2005274243 A5 JP 2005274243A5 JP 2004085650 A JP2004085650 A JP 2004085650A JP 2004085650 A JP2004085650 A JP 2004085650A JP 2005274243 A5 JP2005274243 A5 JP 2005274243A5
- Authority
- JP
- Japan
- Prior art keywords
- subject
- cassette
- inspection
- stored
- arm mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000007689 inspection Methods 0.000 claims 19
- 230000032258 transport Effects 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 2
- 238000013507 mapping Methods 0.000 claims 2
- 239000012491 analyte Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010998 test method Methods 0.000 claims 1
Claims (9)
前記複数のカセットを載置する載置台と、それぞれの該カセットに収納される前記被検体を搬出及び搬入又は、搬送するための機構を備える搬送部と、
前記被検体の検査を行う検査部と、
前記搬送部における搬送制御と、前記検査部における検査設定項目の設定を行う制御部と、を具備し、
前記載置台に前記カセットが載置された際に、先に載置されたカセットに収納される最後の検査対象となる被検体が搬出されるまでに、後のカセットが載置されたならば、前記後のカセットに収納される被検体を引き続き、搬出及び検査を行うことを特徴とする被検体の検査装置。 A plurality of cassettes for storing a plurality of subjects;
A mounting table for mounting a front Symbol plurality of cassettes, unloading and transferring the pre-Symbol subject to be accommodated in each of said cassette or a transport unit comprising a machine structure for carrying,
And Ken査部to perform the inspection of the previous Symbol subject,
Comprising a transport control before Symbol conveying unit, and a control unit for setting a test setting items definitive before Symbol detection査部, a,
When placed previous SL cassette mounting table, if the analyte of last inspected housed in a cassette placed on the previously before being unloaded, after the cassette is placed In this case, the subject inspection apparatus is configured to continuously carry out and inspect the subject stored in the subsequent cassette.
前記カセット用アーム機構は、前記被検体を前記カセットと受け渡し位置の間において搬出及び搬入又は搬送を行ない、前記検査用アーム機構は、前記検査部と前記受け渡し位置との間で搬送を行なうことを特徴とする請求項1または2に記載の被検体の検査装置。 The transport unit includes a cassette arm mechanism and an inspection arm mechanism.
The cassette arm mechanism carries out and carries in or transports the subject between the cassette and the delivery position, and the examination arm mechanism carries the specimen between the examination section and the delivery position. 3. The subject inspection apparatus according to claim 1, wherein the subject inspection apparatus is a test object.
最初のカセットの第1の検査項目の設定をした後、収納される被検体が順次搬出され検査されている期間内に、次のカセットの第2の検査項目の設定を行い、前記最初のカセットの最終の被検体を搬出した後、続いて、前記次のカセットに収納されている被検体を搬出し、前記最終の被検体の検査後に前記第1の検査項目から第2の検査項目に切り替えて、続いて検査を行うことを特徴とする被検体の検査方法。 A plurality of specimens stored in a plurality of cassettes are continuously carried out in units of cassettes, and after performing a predetermined test, a test method for a test object stored in the original cassette,
After setting the first examination item of the first cassette, the second examination item of the next cassette is set during the period in which the stored specimens are sequentially carried out and examined, and the first cassette is set. After the last subject is carried out, the subject stored in the next cassette is carried out, and after the final subject is examined, the first examination item is switched to the second examination item. A method for inspecting a subject, characterized in that the inspection is subsequently performed.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004085650A JP2005274243A (en) | 2004-03-23 | 2004-03-23 | Subject inspection apparatus and inspection method |
| TW094108407A TW200533907A (en) | 2004-03-23 | 2005-03-18 | Apparatus and method for inspecting an inspection object |
| US11/086,900 US20050232735A1 (en) | 2004-03-23 | 2005-03-21 | Apparatus and method for inspecting an inspection object |
| KR1020050023985A KR20060044613A (en) | 2004-03-23 | 2005-03-23 | Inspecting device and method of inspection |
| CNA2005100594091A CN1673719A (en) | 2004-03-23 | 2005-03-23 | Apparatus and method for inspecting an inspection object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004085650A JP2005274243A (en) | 2004-03-23 | 2004-03-23 | Subject inspection apparatus and inspection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005274243A JP2005274243A (en) | 2005-10-06 |
| JP2005274243A5 true JP2005274243A5 (en) | 2007-05-17 |
Family
ID=35046394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004085650A Pending JP2005274243A (en) | 2004-03-23 | 2004-03-23 | Subject inspection apparatus and inspection method |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20050232735A1 (en) |
| JP (1) | JP2005274243A (en) |
| KR (1) | KR20060044613A (en) |
| CN (1) | CN1673719A (en) |
| TW (1) | TW200533907A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4578383B2 (en) * | 2005-10-25 | 2010-11-10 | 株式会社堀場製作所 | Panel member inspection apparatus and panel member inspection program applied thereto |
| JP2007256173A (en) * | 2006-03-24 | 2007-10-04 | Olympus Corp | Appearance inspection device |
| KR100833716B1 (en) * | 2007-03-30 | 2008-05-29 | (주) 인텍플러스 | Semiconductor device vision inspection system |
| FR2931295B1 (en) * | 2008-05-13 | 2010-08-20 | Altatech Semiconductor | DEVICE AND METHOD FOR INSPECTING SEMICONDUCTOR WAFERS |
| KR101227812B1 (en) * | 2011-04-08 | 2013-02-07 | 세크론 주식회사 | Method of inspecting light-emitting devices |
| KR101287229B1 (en) * | 2011-11-04 | 2013-07-17 | 세메스 주식회사 | Method of transferring wafers in inspecting light-emitting devices |
| JP6448456B2 (en) * | 2015-04-28 | 2019-01-09 | 株式会社ディスコ | Processing equipment |
| JP2018128339A (en) * | 2017-02-08 | 2018-08-16 | 住友化学株式会社 | Surface inspection device for semiconductor wafer and surface inspection method for semiconductor wafer |
| JP7274350B2 (en) * | 2019-05-28 | 2023-05-16 | 東京エレクトロン株式会社 | Conveyance system, inspection system and inspection method |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3468056B2 (en) * | 1997-09-23 | 2003-11-17 | 東京エレクトロン株式会社 | Substrate detection device |
| JP3270828B2 (en) * | 1998-09-21 | 2002-04-02 | 理学電機工業株式会社 | X-ray fluorescence analyzer |
| US6137303A (en) * | 1998-12-14 | 2000-10-24 | Sony Corporation | Integrated testing method and apparatus for semiconductor test operations processing |
| JP2002076077A (en) * | 2000-08-31 | 2002-03-15 | Nikon Corp | Inspection device |
| DE10103253A1 (en) * | 2001-01-25 | 2002-08-01 | Leica Microsystems | Method and arrangement for transporting and inspecting semiconductor substrates |
| JP2002280425A (en) * | 2001-03-16 | 2002-09-27 | Hitachi Ltd | Semiconductor integrated circuit device manufacturing method and test method |
| KR100545620B1 (en) * | 2001-07-31 | 2006-01-24 | 아사히 가세이 마이크로시스템 가부시끼가이샤 | Semiconductor manufacturing apparatus control system |
-
2004
- 2004-03-23 JP JP2004085650A patent/JP2005274243A/en active Pending
-
2005
- 2005-03-18 TW TW094108407A patent/TW200533907A/en unknown
- 2005-03-21 US US11/086,900 patent/US20050232735A1/en not_active Abandoned
- 2005-03-23 CN CNA2005100594091A patent/CN1673719A/en active Pending
- 2005-03-23 KR KR1020050023985A patent/KR20060044613A/en not_active Withdrawn
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