TWI707130B - Carrier device, optical inspection apparatus and optical inspection method - Google Patents
Carrier device, optical inspection apparatus and optical inspection method Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract
Description
本發明有關於一種吸附移載裝置、光學檢測設備以及光學檢測方法,特別是指一種能夠吸附料片不同位置以對料片進行全面光學檢測的移載裝置、光學檢測設備及光學檢測方法。 The invention relates to a suction transfer device, an optical detection device and an optical detection method, in particular to a transfer device, an optical detection equipment and an optical detection method that can absorb different positions of a material sheet to perform a comprehensive optical detection of the material sheet.
隨著科技日新月異,電子產品廣泛應用於生活中,而為求提高電子產品及其零件的精密度,各種相關的檢測設備也因應而生。於自動化工業製程中,會使用移載設備進行物件的移載作業,以將物件移載至工作平台或檢測位置,藉以進行各種光學檢測或檢測後的分類作業。 With the rapid development of science and technology, electronic products are widely used in life, and in order to improve the precision of electronic products and their parts, various related testing equipment has also been developed. In the automated industrial process, transfer equipment is used to transfer objects to a work platform or inspection location for various optical inspections or sorting operations after inspection.
於習知技術中,作為面板、基板或其他待檢測物品的設備多設置有一放置待檢測物品的工作載台,以對其進行相關的光學檢測。目前部分方式是透過提供氣流將待檢測物品懸浮及承載。 In the prior art, equipment used as panels, substrates, or other objects to be inspected is often provided with a work platform on which the objects to be inspected are placed to perform related optical inspections. Part of the current method is to suspend and carry objects to be tested by providing airflow.
然而,使用氣流承載待檢測物品時,由於物品懸浮於載台之上,必須設置接觸於物品的定位結構,以將物品固定於檢測位置上,但是攝像機對物品進行取像時,定位結構與物品的接觸位置會讓影像出現遮蔽區域,導致影像出現無法檢測的區域(不檢區),而必須進行二次檢測。再者,使用氣流承載物品進行背面檢測時,因為承靠吸附面必須與物品檢測面相反,因此在進行背檢時容易有物品掉落風險。 However, when the airflow is used to carry the object to be inspected, since the object is suspended on the carrier, a positioning structure contacting the object must be provided to fix the object at the detection position. However, when the camera captures the object, the positioning structure and the object The contact position of will make the image appear obscured area, resulting in an undetectable area (non-inspection area) in the image, and a second inspection is necessary. Furthermore, when using airflow to carry objects for back inspection, because the supporting and adsorbing surface must be opposite to the object detection surface, there is a risk of items falling during the back inspection.
本發明的主要目的在於提供一種移載裝置,包含一吸附載台以及一承載裝置。吸附載台包括有一載台主體、以及一設置於載台主體側的一第一抬升單元以及一第二抬升單元。第一抬升單元上設置有一第一吸附單元,第二抬升單元上設置有一第二吸附單元。承載裝置承載吸附載台,承載裝置於一移動區間內移載吸附載台。其中,第一抬升單元與第二抬升單元彼此間錯位排列,使第一吸附單元與第二吸附單元分別對準至相互不重疊的一第一位置及一第二位置上。吸附載台具有一第一抬升狀態,令第二抬升單元下降且第一抬升單元上升,藉以於第一位置上接觸一待測物,以及一第二抬升狀態,令第一抬升單元下降且第二抬升單元上升,藉以於第二位置上接觸待測物。 The main purpose of the present invention is to provide a transfer device including a suction stage and a carrying device. The adsorption stage includes a stage main body, and a first lifting unit and a second lifting unit arranged on the side of the carrier main body. A first suction unit is provided on the first lifting unit, and a second suction unit is provided on the second lifting unit. The carrying device carries the suction stage, and the carrying device transfers the suction stage in a moving section. Wherein, the first lifting unit and the second lifting unit are arranged in a staggered arrangement, so that the first suction unit and the second suction unit are respectively aligned to a first position and a second position that do not overlap each other. The suction stage has a first lifting state, which causes the second lifting unit to fall and the first lifting unit to rise, so as to contact an object to be measured at the first position, and a second lifting state to cause the first lifting unit to fall and the first The second lifting unit rises so as to contact the object under test at the second position.
本發明另提供一種光學檢測設備,包含一如上所述的移載裝置、一影像擷取裝置以及一影像處理裝置。影像擷取裝置設置於移載裝置的一承載裝置的一側。影像擷取裝置於吸附載台處於第一抬升狀態時,拍攝待測物以獲得一第一影像。影像擷取裝置於吸附載台處於第二抬升狀態時拍攝待測物以獲得一第二影像。影像處理裝置於獲得第一影像及第二影像後,將第一影像中第一位置以外的未遮蔽區域與第二影像中第二位置以外的未遮蔽區域結合後輸出一合併影像。 The present invention also provides an optical inspection equipment, including a transfer device as described above, an image capture device, and an image processing device. The image capturing device is arranged on one side of a carrying device of the transfer device. The image capturing device photographs the object to be tested to obtain a first image when the adsorption stage is in the first elevated state. The image capturing device shoots the object to be tested to obtain a second image when the adsorption stage is in the second elevated state. After obtaining the first image and the second image, the image processing device combines the unmasked area outside the first position in the first image and the unmasked area outside the second position in the second image to output a combined image.
本發明另提供一種光學檢測設備,包含一第一面取像設備以及一第二面取像設備。第一面取像設備包括一如上所述的光學檢測設備,用以拍攝待測物的一第一面的影像、以及一設置於切移載裝置一側的頂升平台,用以抬升移載裝置。第二面取像設備包括一如上所述的光學檢測設 備。第二面取像設備倒置設置於頂升平台上側,用以吸附待測物並用以拍攝待測物的一第二面的影像。 The present invention also provides an optical detection device, which includes a first-side imaging device and a second-side imaging device. The first-side imaging device includes an optical detection device as described above, used to shoot an image of a first surface of the object to be measured, and a lifting platform arranged on one side of the cutting and transferring device for lifting and transferring Device. The second side imaging device includes an optical detection device as described above Prepared. The second-side image capturing device is arranged upside down on the upper side of the lifting platform, and is used for adsorbing the object to be measured and used for shooting an image of a second surface of the object to be measured.
本發明另提供一種光學檢測方法,包含以下步驟:提供一第一移載裝置,用以承載一待測物;驅動第一移載裝置的一第二抬升單元下降且一第一抬升單元上升,藉以於一第一位置吸附待測物;驅動第一移載裝置沿一前向路徑移動以令待測物經過一第一影像擷取裝置的一拍攝區域;藉由該第一影像擷取裝置拍攝待測物的一第一面的一第一影像;驅動第一移載裝置的第一抬升單元下降且第二抬升單元上升,藉以於一第二位置吸附待測物;驅動第一移載裝置沿一反向路徑移動以令待測物再次經過第一影像擷取裝置的拍攝區域;藉由第一影像擷取裝置拍攝待測物的第一面的一第二影像;以及經由一第一影像處理裝置接收並合併自第一影像擷取裝置所取得之待測物的第一面的第一影像與第二影像。 The present invention also provides an optical inspection method, including the following steps: providing a first transfer device for carrying an object to be tested; driving a second lifting unit of the first transfer device to descend and a first lifting unit to rise, By adsorbing the object under test at a first position; driving the first transfer device to move along a forward path so that the object under test passes through a shooting area of a first image capturing device; by the first image capturing device Take a first image of a first surface of the object to be measured; drive the first lifting unit of the first transfer device to descend and the second lifting unit to rise, so as to adsorb the object to be measured at a second position; drive the first transfer The device moves along a reverse path so that the object under test passes through the shooting area of the first image capturing device again; the first image capturing device captures a second image of the first surface of the object to be tested; and An image processing device receives and merges the first image and the second image of the first surface of the object to be measured obtained from the first image capturing device.
本發明的移載裝置藉由切換第一抬升單元以及第二抬升單元的抬升狀態,讓第一抬升單元或第二抬升單元接觸於待測物的不同位置,藉以消除待測物影像的不檢區。同時透過第一抬升單元或第二抬升單元對待測物的複數個位置進行吸附,增加吸附面積並且提升高速移載時的穩固性。 The transfer device of the present invention switches the lifting state of the first lifting unit and the second lifting unit to allow the first lifting unit or the second lifting unit to contact different positions of the object to be measured, thereby eliminating the undetected image of the object to be measured Area. At the same time, the first lifting unit or the second lifting unit is used to adsorb multiple positions of the object to be measured, thereby increasing the adsorption area and improving the stability during high-speed transfer.
100‧‧‧光學檢測設備 100‧‧‧Optical Inspection Equipment
A1‧‧‧第一面取像設備 A1‧‧‧The first side imaging device
A2‧‧‧第二面取像設備 A2‧‧‧Second side image capturing equipment
1‧‧‧第一移載裝置 1‧‧‧The first transfer device
2‧‧‧第一影像擷取裝置 2‧‧‧The first image capture device
3‧‧‧第一影像處理裝置 3‧‧‧The first image processing device
4‧‧‧第二移載裝置 4‧‧‧Second transfer device
5‧‧‧第二影像擷取裝置 5‧‧‧Second image capture device
6‧‧‧第二影像處理裝置 6‧‧‧Second image processing device
11‧‧‧吸附載台 11‧‧‧Adsorption stage
12‧‧‧承載裝置 12‧‧‧Carrier device
111‧‧‧載台主體 111‧‧‧The main body of the stage
112、412‧‧‧第一抬升單元 112, 412‧‧‧The first lifting unit
113、413‧‧‧第二抬升單元 113、413‧‧‧Second Lifting Unit
121‧‧‧架體 121‧‧‧Frame
122‧‧‧軌道 122‧‧‧Orbit
123‧‧‧驅動裝置 123‧‧‧Drive device
1121‧‧‧支架 1121‧‧‧Support
1122、1132‧‧‧驅動單元 1122, 1132‧‧‧Drive unit
1131‧‧‧支架 1131‧‧‧Support
S1‧‧‧第一吸附單元 S1‧‧‧The first adsorption unit
S2‧‧‧第二吸附單元 S2‧‧‧Second adsorption unit
S11、S21‧‧‧真空吸附裝置 S11, S21‧‧‧Vacuum adsorption device
S12、S22‧‧‧氣嘴 S12、S22‧‧‧Air nozzle
S121、S221‧‧‧保護墊 S121, S221‧‧‧Protection pad
S122、S222‧‧‧通孔 S122, S222‧‧‧Through hole
P‧‧‧待測物 P‧‧‧Object to be tested
T‧‧‧頂升平台 T‧‧‧Lifting platform
R1、R3‧‧‧前向路徑 R1, R3‧‧‧forward path
R2、R4‧‧‧反向路徑 R2, R4‧‧‧Reverse path
Z1、Z2‧‧‧拍攝區域 Z1, Z2‧‧‧Shooting area
S101至S109‧‧‧步驟 Steps S101 to S109‧‧‧
L‧‧‧照明光源 L‧‧‧Lighting source
圖1,為本發明雙面式光學檢測設備的側面示意圖。 Figure 1 is a schematic side view of the double-sided optical inspection equipment of the present invention.
圖2,為本發明第一移載裝置的外觀示意圖(一)。 Figure 2 is a schematic diagram (1) of the appearance of the first transfer device of the present invention.
圖3,為本發明第一移載裝置的外觀示意圖(二)。 Fig. 3 is a schematic diagram (2) of the appearance of the first transfer device of the present invention.
圖4,為本發明第一移載裝置於第一狀態的側面示意圖。 4 is a schematic side view of the first transfer device of the present invention in a first state.
圖5,為本發明第一移載裝置於第二狀態的側面示意圖。 Fig. 5 is a schematic side view of the first transfer device of the present invention in a second state.
圖6-1至圖6-4,為本發明雙面式光學檢測設備的作動示意圖(一)至(四)。 Figures 6-1 to 6-4 are schematic diagrams (1) to (4) of the operation of the double-sided optical inspection device of the present invention.
圖7-1至圖7-2,為本發明雙面式光學檢測設備的流程示意圖(一)至(二)。 Figures 7-1 to 7-2 are schematic diagrams (1) to (2) of the flow of the double-sided optical inspection equipment of the present invention.
有關本發明之詳細說明及技術內容,現就配合圖式說明如下。再者,本發明中之圖式,為說明方便,其比例未必照實際比例繪製,該等圖式及其比例並非用以限制本發明之範圍,在此先行敘明。 The detailed description and technical content of the present invention will now be described with the drawings as follows. Furthermore, for the convenience of description, the figures in the present invention are not necessarily drawn according to actual proportions. These figures and their proportions are not intended to limit the scope of the present invention, and are described here first.
請參閱「圖1」,為本發明雙面式光學檢測設備的側面示意圖,如圖所示: Please refer to "Figure 1", which is a schematic side view of the double-sided optical inspection equipment of the present invention, as shown in the figure:
本發明揭示一種光學檢測設備100,為一雙面式光學檢測設備。光學檢測設備100包括一第一面取像設備A1以及一第二面取像設備A2,用以由一待測物P的二側對其進行承載以及吸附作用,並且將待測物P承載至檢測位置進行光學檢測。光學檢測設備100係可以應用在自動化生產設備或自動光學檢查設備(Automated Optical Inspection)上,用以移載料片、工件、面板、基板、電路板(PCB)、軟性電路板(FPC)或其他類此的待測物P,於本發明中不予以限制。
The present invention discloses an
第一面取像設備A1用以拍攝待測物P的一第一面影像,包括有一第一移載裝置1、一第一影像擷取裝置2以及一第一影像處理裝置3。第一移載裝置1為一切換式吸附移載裝置,但不以此為限。第一面取像設備A1還包括一設置於第一移載裝置1一側的頂升平台T,用以抬升第一移載裝置
1。選擇性地,頂升平台T係可以為經由氣壓泵、油壓泵、螺桿或其他任何能夠帶動第一移載裝置1升降的方式或結構,本發明對此不予以限制,在此先行敘明。
The first side image capturing device A1 is used to shoot a first side image of the object P, and includes a
第二面取像設備A2包括一第二移載裝置4、一第二影像擷取裝置5以及一第二影像處理裝置6。第二移載裝置4為一切換式吸附移載裝置,但不以此為限。第二面取像設備A2倒置設置於頂升平台T上側,用以吸附待測物P並拍攝待測物P的一第二面影像。
The second surface image capturing device A2 includes a
由於本發明的第一移載裝置1與第二移載裝置4為兩結構完全相同的裝置,區別在於第二移載裝置4為倒置設置,因此,以下僅針對第一移載裝置1的具體結構進行說明,不再重複贅述第二移載裝置4的具體結構,在此先行敘明。
Since the
有關移載裝置(第一移載裝置1以及第二移載裝置2)的詳細構造,請一併參閱「圖2」至「圖5」,為本發明第一移載裝置於不同視角的外觀示意圖(一)至(二)、以及第一移載裝置於不同狀態的側面示意圖。如圖所示:第一移載裝置1包括一吸附載台11以及一承載裝置12。吸附載台11包括一載台主體111、一設置於載台主體111一側的第一抬升單元112、以及一第二抬升單元113。第一抬升單元112上設置有一第一吸附單元S1,而第二抬升單元113上設置有一第二吸附單元S2。其中,第一抬升單元112與第二抬升單元113彼此間錯位排列,使第一吸附單元S1與第二吸附單元S2分別對準至相互不重疊的一第一位置及一第二位置上。
For the detailed structure of the transfer device (the
吸附載台11具有一第一抬升狀態,此時,第二抬升單元113下降且第一抬升單元112上升,藉以於第一位置上接觸待測物P(如「圖4」
所示),以及一第二抬升狀態,此時,第一抬升單元112下降且第二抬升單元113上升,藉以於第二位置上接觸待測物P(如「圖5」所示)。於上述二種狀態中,第一抬升單元112以及第二抬升單元113交替上升,藉以避免於待測物P的影像中出現背景物而影響後續檢測結果。
The
第一抬升單元112包括一支架1121以及一驅動支架1121上升或下降的驅動單元1122。第二抬升單元113包括一支架1131以及一驅動支架1131上升或下降的驅動單元1132。選擇性地,驅動第一抬升單元112與第二抬升單元113的驅動單元係可以為一共構裝置,藉以同步切換第一抬升單元112與第二抬升單元113的抬升狀態。
The
第一吸附單元S1包括一真空吸附裝置S11以及複數個設置於第一抬升單元112上的氣嘴S12。氣嘴S12分別經由管線通道連接至真空吸附裝置S11,透過複數個氣嘴S12吸附待測物P的複數個位置,能夠增加吸附面積,並且提升高速移載時的穩固性以避免掉片,同時氣嘴S12的設置利於適用於吸附邊緣不規則的料片,提升裝置的靈活度。管線通道係可以為設置於真空吸附裝置S11、用以連接至氣嘴S12的氣體輸送管(圖未示)。選擇性地,為避免氣嘴S12碰傷待測物P,氣嘴S12的表面設置有一保護墊S121,保護墊S121對應於氣嘴S12的位置上設置有至少一通孔S122。
The first suction unit S1 includes a vacuum suction device S11 and a plurality of gas nozzles S12 arranged on the
第二吸附單元S2包括一真空吸附裝置S21、以及複數個設置於第二抬升單元113上的氣嘴S22。氣嘴S22分別經由管線通道連接至真空吸附裝置S21,透過複數個氣嘴S22吸附待測物P的複數個位置,能夠增加吸附面積,並且提升高速移載時的穩固性以避免掉片,同時氣嘴S22的設置利於適用於吸附邊緣不規則的料片,提升裝置的靈活度。管線通道係可
以為設置於真空吸附裝置S21,用以連接至氣嘴S22的氣體輸送管(圖未示)。選擇性地,為避免氣嘴S22碰傷待測物P,該氣嘴S22的表面設置有一保護墊S221,保護墊S221對應於氣嘴S22的位置上設置有至少一通孔S222。
The second suction unit S2 includes a vacuum suction device S21 and a plurality of gas nozzles S22 arranged on the
承載裝置12承載吸附載台11,承載裝置12於一移動區間內移載吸附載台11,用以承載待測物P通過第一影像擷取裝置2進行取像。承載裝置12具有一第一動作狀態以及一第二動作狀態。承載裝置12於第一動作狀態時,吸附載台11處於第一抬升狀態,並將待測物P朝一前向路徑R1輸送以經由第一影像擷取裝置2拍攝待測物P的一第一影像(如「圖4」所示)。承載裝置12於第二動作狀態時,吸附載台11處於第二抬升狀態,並將待測物P朝一反向路徑R2輸送以經由第一影像擷取裝置2拍攝待測物P的一第二影像(如「圖5」所示)。於一較佳實施例中,承載裝置12係為一線性移動載台,承載裝置12包含有一架體121、二分別設置於架體121上的軌道122。吸附載台11由一驅動裝置123帶動以沿二軌道122移動。
The carrying
第一影像擷取裝置2設置於第一移載裝置1的承載裝置12的一側,第一影像擷取裝置2於吸附載台11處於第一抬升狀態時拍攝待測物P以獲得第一影像;第一影像擷取裝置2於吸附載台11處於第二抬升狀態時拍攝待測物P以獲得第二影像。於一較佳實施例中,第一影像擷取裝置2係可以為線掃描攝影機或面掃描攝影機,本發明對此不予以限制。於一較佳實施例中,第一影像擷取裝置2的一側或周側係設置有對待測物P補光的照明光源L,照明光源L係可以為同軸光源、側向光源(如「圖1」所示)或環形光源,本發明對此不予以限制。
The first
第一影像處理裝置3於獲得第一影像及第二影像後,將第一影像中第一位置以外的未遮蔽區域與第二影像中第二位置以外的未遮蔽區域結合後輸出一合併影像。合併影像係可以為運用影像融合技術將第一影像擷取裝置2所拍攝的待測物P的同一側的影像合併,藉以獲得沒有遮蔽區域的待測物P影像,以利對待測物P的所有位置進行光學檢測。於一較佳實施例中,第一影像處理裝置3係可以為電腦設備、或其他任何能夠進行影像處理、分析的裝置或設備,本發明對此不予以限制,在此先行敘明。
After obtaining the first image and the second image, the first
以下請一併參閱「圖6-1」至「圖6-4」,為本發明雙面式光學檢測設備的作動示意圖(一)至(四),如圖所示: Please refer to "Figure 6-1" to "Figure 6-4" together, which are schematic diagrams (1) to (4) of the operation of the double-sided optical inspection equipment of the present invention, as shown in the figure:
首先,如「圖6-1」所示,第一移載裝置1的第二抬升單元113下降且第一抬升單元112上升,使第一抬升單元112接觸且吸附待測物P的第一位置,第一移載裝置1沿前向路徑R1移動,以令待測物P經過第一影像擷取裝置2的一拍攝區域Z1,藉以拍攝待測物P的一第一面的第一影像。
First, as shown in "FIG. 6-1", the
接續,如「圖6-2」所示,第一移載裝置1的第一抬升單元112下降且第二抬升單元113上升,使第二抬升單元113接觸且吸附待測物P的第二位置,第一移載裝置1沿反向路徑R2移動,以令待測物P再次經過第一影像擷取裝置2的拍攝區域Z1,藉以拍攝待測物P的第一面的第二影像。選擇性地,第一移載裝置1係可以先將待測物P沿反向路徑R2移動後,再進行第一抬升單元112與第二抬升單元113的狀態切換,於完成該等抬升單元的切換後,再次沿前向路徑R1移動待測物P通過第一影像擷取裝置2以進行拍攝、抑或是先切換第二抬升單元112與第二抬升單元113的狀態後,再沿反向路徑R2移動待測物P通過第一影像擷取裝置2以進行拍攝、或於待測物P 沿反向路徑R2移動後,再沿前向路徑R1移動待測物P通過第一影像擷取裝置2以進行拍攝,本發明對此不予以限制,在此先行敘明。 Continuing, as shown in "FIG. 6-2", the first lifting unit 112 of the first transfer device 1 descends and the second lifting unit 113 rises, so that the second lifting unit 113 contacts and adsorbs the second position of the test object P , The first transfer device 1 moves along the reverse path R2, so that the test object P passes through the shooting area Z1 of the first image capturing device 2 again, so as to capture the second image of the first surface of the test object P. Optionally, the first transfer device 1 may first move the object P to be measured along the reverse path R2, and then perform the state switching of the first lifting unit 112 and the second lifting unit 113, and then the completion of the lifting units After switching, move the test object P again along the forward path R1 through the first image capturing device 2 for shooting, or switch the state of the second lifting unit 112 and the second lifting unit 113 first, and then follow the reverse path R2 moves the test object P through the first image capturing device 2 for shooting, or on the test object P After moving along the reverse path R2, the object P to be measured is moved along the forward path R1 to pass through the first image capturing device 2 for shooting. The present invention does not limit this, and is described here first.
接續,如「圖6-3」所示,倒置設置的第二移載裝置4接觸並吸附由頂升平台T抬升的待測物P。第二移載裝置4的第二抬升單元413下降且第一抬升單元412上升,使第一抬升單元412吸附待測物P的第一位置,第二移載裝置3沿一前向路徑R3移動,以令待測物P經過第二影像擷取裝置5的一拍攝區域Z2,藉以拍攝待測物P的一第二面的第一影像。
Continuing, as shown in "FIG. 6-3", the inverted
最後,如「圖6-4」所示,第二移載裝置4的第一抬升單元412下降且第二抬升單元413上升,使第二抬升單元413接觸且吸附待測物P的第二位置,第二移載裝置3沿一反向路徑R4移動,以令待測物P再次經過第二影像擷取裝置5的拍攝區域Z2,藉以拍攝待測物P的第二面的第二影像。選擇性地,第二移載裝置4係可以先將待測物P沿反向路徑R4移動後,再進行第一抬升單元412與第二抬升單元413的狀態切換,於完成該等抬升單元的切換後,再次沿前向路徑R3移動待測物P通過第二影像擷取裝置5以進行拍攝、抑或是先切換第一抬升單元412與第二抬升單元413的狀態後,再沿反向路徑R4移動待測物P通過第二影像擷取裝置5以進行拍攝、或於待測物P沿反向路徑R4移動後,再沿前向路徑R3移動待測物P通過第二影像擷取裝置5以進行拍攝,本發明對此不予以限制,在此先行敘明。 Finally, as shown in "FIG. 6-4", the first lifting unit 412 of the second transfer device 4 descends and the second lifting unit 413 rises, so that the second lifting unit 413 contacts and adsorbs the second position of the test object P , The second transfer device 3 moves along a reverse path R4, so that the test object P passes through the shooting area Z2 of the second image capturing device 5 again, so as to capture a second image of the second surface of the test object P. Optionally, the second transfer device 4 may first move the object P to be measured along the reverse path R4, and then perform the state switching between the first lifting unit 412 and the second lifting unit 413, and then the completion of the lifting units After switching, move the test object P again along the forward path R3 through the second image capturing device 5 for shooting, or switch the state of the first lifting unit 412 and the second lifting unit 413 first, and then follow the reverse path R4 moves the test object P through the second image capturing device 5 for shooting, or after the test object P moves along the reverse path R4, then moves the test object P along the forward path R3 through the second image capture device 5 for shooting, the present invention does not limit this, it is described here first.
以下請一併參閱「圖7-1」至「圖7-2」,為本發明光學檢測方法的流程示意圖(一)至(二),如圖所示: Please refer to "Figure 7-1" to "Figure 7-2" together below, which are schematic diagrams (1) to (2) of the optical inspection method of the present invention, as shown in the figure:
首先,如「圖7-1」所示,提供第一移載裝置1用以承載待測物P,並且驅動第一移載裝置1的第二抬升單元113下降且第一抬升單元112
上升以吸附待測物P的第一位置(步驟S101);接續,驅動第一移載裝置1沿前向路徑R1移動以令待測物P經過第一影像擷取裝置2的拍攝區域Z1,藉以通過該第一影像擷取裝置2拍攝待測物P的第一面的第一影像(步驟S102);驅動第一移載裝置1的第一抬升單元112下降且第二抬升單元113上升以吸附待測物P的第二位置(步驟S103);接續,驅動第一移載裝置1沿反向路徑R2移動以令待測物P再次經過第一影像擷取裝置2的拍攝區域Z1,藉以通過第一影像擷取裝置2拍攝待測物P的第一面的第二影像(步驟S104)。
First, as shown in "Figure 7-1", the
接續,如「圖7-2」所示,提供倒置的第二移載裝置3,由頂升平台T將待測物P頂升至第二移載裝置4的吸附平面下側,並且驅動第二移載裝置4的第二抬升單元413下降且第一抬升單元412上升以吸附待測物P的第一位置(步驟S105);接續,驅動第二移載裝置4沿前向路徑R3移動以令待測物P經過第二影像擷取裝置5的拍攝區域Z2,藉以通過第二影像擷取裝置5拍攝待測物P的第二面的第一影像(步驟S106);接續,驅動第二移載裝置4的第一抬升單元412下降且第二抬升單元413上升以吸附待測物P的第二位置(步驟S107);接續,驅動第二移載裝置4沿反向路徑R4移動以令待測物P再次經過第二影像擷取裝置4的拍攝區域Z2,藉以通過第二影像擷取裝置5拍攝待測物P的第二面F2的第二影像(步驟S108)。
Next, as shown in "Figure 7-2", an inverted
最後,經由第一影像處理裝置3接收並合併自第一影像擷取裝置2所取得待測物P的第一面的第一影像與第二影像,以及經由第二影像處理裝置6接收並合併自第二影像擷取裝置5所取得待測物P的第二面的第一影像與第二影像(步驟109),藉以分別獲得沒有背景物遮蔽的待測物P第一面的合併影像與第二面的合併影像,以對待測物P的所有位置進行光學檢
測。選擇性地,該第一影像處理裝置3以及該第二影像處理裝置6可以為一共構裝置,本發明對此不予以限制,在此先行敘明。
Finally, the first image and the second image of the first surface of the object P obtained from the first
綜上所述,本發明的光學檢測設備設置上下倒置的移載裝置,透過切換移載裝置的第一抬升單元以及第二抬升單元的動作狀態,分別取得抬升單元接觸於待測物不同位置的影像,並且經由影像處理獲得沒有背景物的待測物影像,藉以消除待測物影像的不檢區。同時透過第一抬升單元或第二抬升單元對待測物的複數個位置進行吸附,增加吸附面積並且提升高速移載時的穩固性。 To sum up, the optical inspection equipment of the present invention is equipped with an upside-down transfer device, and by switching the action states of the first lifting unit and the second lifting unit of the transfer device, the lifting unit contacts the different positions of the object to be measured. Image, and obtain the object under test image without background object through image processing, so as to eliminate the undetected area of the object under test image. At the same time, the first lifting unit or the second lifting unit is used to adsorb multiple positions of the object to be measured, thereby increasing the adsorption area and improving the stability during high-speed transfer.
以上已將本發明做一詳細說明,惟以上所述者,僅為本發明之一較佳實施例而已,當不能以此限定本發明實施之範圍,即凡依本發明申請專利範圍所作之均等變化與修飾,皆應仍屬本發明之專利涵蓋範圍內。 The present invention has been described in detail above, but what is described above is only a preferred embodiment of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, everything made in accordance with the scope of the patent application of the present invention is equal Changes and modifications should still fall within the scope of the patent of the present invention.
100‧‧‧光學檢測設備 100‧‧‧Optical Inspection Equipment
A1‧‧‧第一面取像設備 A1‧‧‧The first side imaging device
A2‧‧‧第二面取像設備 A2‧‧‧Second side image capturing equipment
1‧‧‧第一移載裝置 1‧‧‧The first transfer device
2‧‧‧第一影像擷取裝置 2‧‧‧The first image capture device
3‧‧‧第一影像處理裝置 3‧‧‧The first image processing device
4‧‧‧第二移載裝置 4‧‧‧Second transfer device
5‧‧‧第二影像擷取裝置 5‧‧‧Second image capture device
6‧‧‧第二影像處理裝置 6‧‧‧Second image processing device
11‧‧‧吸附載台 11‧‧‧Adsorption stage
12‧‧‧承載裝置 12‧‧‧Carrier device
111‧‧‧載台主體 111‧‧‧The main body of the stage
112‧‧‧第一抬升單元 112‧‧‧The first lifting unit
113‧‧‧第二抬升單元 113‧‧‧Second Lifting Unit
121‧‧‧架體 121‧‧‧Frame
122‧‧‧軌道 122‧‧‧Orbit
123‧‧‧驅動裝置 123‧‧‧Drive device
T‧‧‧頂升平台 T‧‧‧Lifting platform
P‧‧‧待測物 P‧‧‧Object to be tested
L‧‧‧照明光源 L‧‧‧Lighting source
Claims (18)
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TWI764675B (en) * | 2021-04-15 | 2022-05-11 | 由田新技股份有限公司 | Flipping device、flipping method、inspection apparatus and inspection method |
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CN113125342A (en) | 2021-07-16 |
TW202127003A (en) | 2021-07-16 |
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