IL196769A0 - An illumination block and cooling system therefor - Google Patents
An illumination block and cooling system thereforInfo
- Publication number
- IL196769A0 IL196769A0 IL196769A IL19676909A IL196769A0 IL 196769 A0 IL196769 A0 IL 196769A0 IL 196769 A IL196769 A IL 196769A IL 19676909 A IL19676909 A IL 19676909A IL 196769 A0 IL196769 A0 IL 196769A0
- Authority
- IL
- Israel
- Prior art keywords
- cooling system
- system therefor
- illumination block
- illumination
- block
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US2423508P | 2008-01-29 | 2008-01-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
IL196769A0 true IL196769A0 (en) | 2009-11-18 |
Family
ID=41419857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL196769A IL196769A0 (en) | 2008-01-29 | 2009-01-28 | An illumination block and cooling system therefor |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN101598321A (en) |
IL (1) | IL196769A0 (en) |
TW (1) | TW200938766A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9885671B2 (en) | 2014-06-09 | 2018-02-06 | Kla-Tencor Corporation | Miniaturized imaging apparatus for wafer edge |
US9645097B2 (en) | 2014-06-20 | 2017-05-09 | Kla-Tencor Corporation | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning |
JP7281380B2 (en) | 2019-10-03 | 2023-05-25 | 浜松ホトニクス株式会社 | Light irradiation device |
-
2009
- 2009-01-28 IL IL196769A patent/IL196769A0/en unknown
- 2009-02-01 CN CNA2009101307707A patent/CN101598321A/en active Pending
- 2009-02-02 TW TW098103288A patent/TW200938766A/en unknown
Also Published As
Publication number | Publication date |
---|---|
TW200938766A (en) | 2009-09-16 |
CN101598321A (en) | 2009-12-09 |
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