IL196769A0 - An illumination block and cooling system therefor - Google Patents

An illumination block and cooling system therefor

Info

Publication number
IL196769A0
IL196769A0 IL196769A IL19676909A IL196769A0 IL 196769 A0 IL196769 A0 IL 196769A0 IL 196769 A IL196769 A IL 196769A IL 19676909 A IL19676909 A IL 19676909A IL 196769 A0 IL196769 A0 IL 196769A0
Authority
IL
Israel
Prior art keywords
cooling system
system therefor
illumination block
illumination
block
Prior art date
Application number
IL196769A
Original Assignee
Camtek Ltd
Charbis Yosi
Zeevi Danny
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Ltd, Charbis Yosi, Zeevi Danny filed Critical Camtek Ltd
Publication of IL196769A0 publication Critical patent/IL196769A0/en

Links

IL196769A 2008-01-29 2009-01-28 An illumination block and cooling system therefor IL196769A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2423508P 2008-01-29 2008-01-29

Publications (1)

Publication Number Publication Date
IL196769A0 true IL196769A0 (en) 2009-11-18

Family

ID=41419857

Family Applications (1)

Application Number Title Priority Date Filing Date
IL196769A IL196769A0 (en) 2008-01-29 2009-01-28 An illumination block and cooling system therefor

Country Status (3)

Country Link
CN (1) CN101598321A (en)
IL (1) IL196769A0 (en)
TW (1) TW200938766A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
JP7281380B2 (en) 2019-10-03 2023-05-25 浜松ホトニクス株式会社 Light irradiation device

Also Published As

Publication number Publication date
TW200938766A (en) 2009-09-16
CN101598321A (en) 2009-12-09

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