JP6482169B2 - 振動片、振動子、発振器、電子機器及び移動体 - Google Patents

振動片、振動子、発振器、電子機器及び移動体 Download PDF

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Publication number
JP6482169B2
JP6482169B2 JP2013150213A JP2013150213A JP6482169B2 JP 6482169 B2 JP6482169 B2 JP 6482169B2 JP 2013150213 A JP2013150213 A JP 2013150213A JP 2013150213 A JP2013150213 A JP 2013150213A JP 6482169 B2 JP6482169 B2 JP 6482169B2
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JP
Japan
Prior art keywords
resonator element
electrode
vibrating
piezoelectric body
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013150213A
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English (en)
Japanese (ja)
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JP2015023434A5 (https=
JP2015023434A (ja
Inventor
山崎　隆
隆 山崎
昭彦 蝦名
昭彦 蝦名
強詩 田端
強詩 田端
秀和 柳澤
秀和 柳澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2013150213A priority Critical patent/JP6482169B2/ja
Priority to US14/330,184 priority patent/US9461615B2/en
Priority to CN201410344675.8A priority patent/CN104300935B/zh
Publication of JP2015023434A publication Critical patent/JP2015023434A/ja
Publication of JP2015023434A5 publication Critical patent/JP2015023434A5/ja
Application granted granted Critical
Publication of JP6482169B2 publication Critical patent/JP6482169B2/ja
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2013150213A 2013-07-19 2013-07-19 振動片、振動子、発振器、電子機器及び移動体 Expired - Fee Related JP6482169B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013150213A JP6482169B2 (ja) 2013-07-19 2013-07-19 振動片、振動子、発振器、電子機器及び移動体
US14/330,184 US9461615B2 (en) 2013-07-19 2014-07-14 Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
CN201410344675.8A CN104300935B (zh) 2013-07-19 2014-07-18 振动片、振子、振荡器、电子设备和移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013150213A JP6482169B2 (ja) 2013-07-19 2013-07-19 振動片、振動子、発振器、電子機器及び移動体

Publications (3)

Publication Number Publication Date
JP2015023434A JP2015023434A (ja) 2015-02-02
JP2015023434A5 JP2015023434A5 (https=) 2016-08-25
JP6482169B2 true JP6482169B2 (ja) 2019-03-13

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JP2013150213A Expired - Fee Related JP6482169B2 (ja) 2013-07-19 2013-07-19 振動片、振動子、発振器、電子機器及び移動体

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Country Link
US (1) US9461615B2 (https=)
JP (1) JP6482169B2 (https=)
CN (1) CN104300935B (https=)

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WO2017203757A1 (ja) * 2016-05-25 2017-11-30 株式会社村田製作所 共振子及び共振装置
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Also Published As

Publication number Publication date
CN104300935A (zh) 2015-01-21
US20150022275A1 (en) 2015-01-22
JP2015023434A (ja) 2015-02-02
CN104300935B (zh) 2018-12-14
US9461615B2 (en) 2016-10-04

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