JP6310216B2 - 放射線検出装置及びその製造方法並びに放射線検出システム - Google Patents

放射線検出装置及びその製造方法並びに放射線検出システム Download PDF

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JP6310216B2
JP6310216B2 JP2013185703A JP2013185703A JP6310216B2 JP 6310216 B2 JP6310216 B2 JP 6310216B2 JP 2013185703 A JP2013185703 A JP 2013185703A JP 2013185703 A JP2013185703 A JP 2013185703A JP 6310216 B2 JP6310216 B2 JP 6310216B2
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Prior art keywords
sensor panel
radiation detection
electrical connection
support
detection apparatus
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Japanese (ja)
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JP2015052535A5 (enExample
JP2015052535A (ja
Inventor
知昭 市村
知昭 市村
岡田　聡
岡田　　聡
長野　和美
和美 長野
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Canon Inc
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Canon Inc
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Priority to JP2013185703A priority Critical patent/JP6310216B2/ja
Priority to PCT/JP2014/003730 priority patent/WO2015033506A1/ja
Publication of JP2015052535A publication Critical patent/JP2015052535A/ja
Priority to US15/053,045 priority patent/US10283555B2/en
Publication of JP2015052535A5 publication Critical patent/JP2015052535A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
    • A61B6/4208—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector
    • A61B6/4233—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector using matrix detectors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/46—Arrangements for interfacing with the operator or the patient
    • A61B6/461—Displaying means of special interest
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/52—Devices using data or image processing specially adapted for radiation diagnosis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/804—Containers or encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Public Health (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Optics & Photonics (AREA)
  • Veterinary Medicine (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Mathematical Physics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Human Computer Interaction (AREA)
  • Measurement Of Radiation (AREA)
JP2013185703A 2013-09-06 2013-09-06 放射線検出装置及びその製造方法並びに放射線検出システム Active JP6310216B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013185703A JP6310216B2 (ja) 2013-09-06 2013-09-06 放射線検出装置及びその製造方法並びに放射線検出システム
PCT/JP2014/003730 WO2015033506A1 (ja) 2013-09-06 2014-07-15 放射線検出装置及びその製造方法並びに放射線検出システム
US15/053,045 US10283555B2 (en) 2013-09-06 2016-02-25 Radiation detection apparatus, manufacturing method therefor, and radiation detection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013185703A JP6310216B2 (ja) 2013-09-06 2013-09-06 放射線検出装置及びその製造方法並びに放射線検出システム

Publications (3)

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JP2015052535A JP2015052535A (ja) 2015-03-19
JP2015052535A5 JP2015052535A5 (enExample) 2016-10-20
JP6310216B2 true JP6310216B2 (ja) 2018-04-11

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JP2013185703A Active JP6310216B2 (ja) 2013-09-06 2013-09-06 放射線検出装置及びその製造方法並びに放射線検出システム

Country Status (3)

Country Link
US (1) US10283555B2 (enExample)
JP (1) JP6310216B2 (enExample)
WO (1) WO2015033506A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018030140A1 (ja) * 2016-08-08 2018-02-15 ソニーセミコンダクタソリューションズ株式会社 撮像素子、製造方法、および電子機器
JP6778118B2 (ja) 2017-01-13 2020-10-28 キヤノン株式会社 放射線撮像装置及び放射線撮像システム
WO2019012846A1 (ja) 2017-07-10 2019-01-17 キヤノン株式会社 放射線撮像装置および放射線撮像システム
JP7030478B2 (ja) 2017-11-09 2022-03-07 キヤノン株式会社 撮影台および放射線撮影システム
JP7314118B2 (ja) 2018-03-19 2023-07-25 富士フイルム株式会社 放射線検出器、放射線画像撮影装置及び放射線検出器の製造方法
JP2019174365A (ja) * 2018-03-29 2019-10-10 シャープ株式会社 撮像パネル
CN110323235A (zh) * 2018-03-29 2019-10-11 夏普株式会社 摄像面板
JP6659182B2 (ja) * 2018-07-23 2020-03-04 キヤノン株式会社 放射線撮像装置、その製造方法及び放射線撮像システム
JP7185481B2 (ja) * 2018-10-18 2022-12-07 浜松ホトニクス株式会社 放射線撮像装置
JP7181049B2 (ja) * 2018-10-18 2022-11-30 浜松ホトニクス株式会社 放射線撮像装置、放射線撮像装置の製造方法、及び放射線撮像装置の修復方法
JP7181050B2 (ja) * 2018-10-18 2022-11-30 浜松ホトニクス株式会社 放射線撮像装置
JP7289768B2 (ja) * 2019-10-09 2023-06-12 キヤノン株式会社 放射線撮影装置

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5952714A (en) * 1995-08-02 1999-09-14 Matsushita Electronics Corporation Solid-state image sensing apparatus and manufacturing method thereof
JP2005197729A (ja) * 1999-06-14 2005-07-21 Sharp Corp 外部回路実装方法および熱圧着装置
AU2001234152A1 (en) * 2000-02-25 2001-09-03 Hamamatsu Photonics K.K. X-ray imaging device and method of manufacture thereof
JP2002305261A (ja) * 2001-01-10 2002-10-18 Canon Inc 電子部品及びその製造方法
JP3519720B2 (ja) * 2001-06-11 2004-04-19 松下電器産業株式会社 電子デバイス
JP2005072978A (ja) * 2003-08-25 2005-03-17 Renesas Technology Corp 固体撮像装置およびその製造方法
JP4289913B2 (ja) * 2003-03-12 2009-07-01 キヤノン株式会社 放射線検出装置及びその製造方法
JP2004296656A (ja) * 2003-03-26 2004-10-21 Canon Inc 放射線撮像装置
US7355184B2 (en) * 2003-04-07 2008-04-08 Canon Kabushiki Kaisha Radiation detecting apparatus and method for manufacturing the same
JP4208790B2 (ja) 2004-08-10 2009-01-14 キヤノン株式会社 放射線検出装置の製造方法
US7514686B2 (en) * 2004-08-10 2009-04-07 Canon Kabushiki Kaisha Radiation detecting apparatus, scintillator panel, their manufacturing method and radiation detecting system
JP4266898B2 (ja) 2004-08-10 2009-05-20 キヤノン株式会社 放射線検出装置とその製造方法および放射線撮像システム
JP4819344B2 (ja) * 2004-11-24 2011-11-24 キヤノン株式会社 半導体装置、放射線撮像装置、及びその製造方法
JP4464260B2 (ja) 2004-11-24 2010-05-19 キヤノン株式会社 半導体装置、放射線撮像装置、及びその製造方法
JP2007155662A (ja) * 2005-12-08 2007-06-21 Canon Inc 放射線検出装置及びそれを用いた放射線撮像システム
JP2008026013A (ja) * 2006-07-18 2008-02-07 Toshiba Corp シンチレータパネルおよび放射線検出器
JP4670855B2 (ja) * 2007-11-08 2011-04-13 セイコーエプソン株式会社 表示装置および時計
JP5607426B2 (ja) 2010-05-28 2014-10-15 キヤノン株式会社 放射線検出装置及び放射線撮像システム
JP5562134B2 (ja) 2010-06-17 2014-07-30 キヤノン株式会社 放射線検出装置、その製造方法及び放射線撮像システム
JP2012168128A (ja) 2011-02-16 2012-09-06 Canon Inc 放射線検出装置及び放射線撮像システム
JP5789134B2 (ja) * 2011-06-16 2015-10-07 株式会社ジャパンディスプレイ 照明装置、表示装置及び液晶表示装置
JP5911274B2 (ja) 2011-11-28 2016-04-27 キヤノン株式会社 放射線検出装置及び放射線撮像システム
JP6081697B2 (ja) * 2011-12-07 2017-02-15 浜松ホトニクス株式会社 センサユニット及び固体撮像装置
JP2013140036A (ja) 2011-12-28 2013-07-18 Canon Inc 放射線検出装置
JP6200171B2 (ja) 2012-06-04 2017-09-20 キヤノン株式会社 放射線検出装置及び撮像システム
JP6000680B2 (ja) 2012-06-20 2016-10-05 キヤノン株式会社 放射線検出装置、その製造方法及び撮像システム
JP6071283B2 (ja) 2012-07-04 2017-02-01 キヤノン株式会社 放射線検出装置及びその製造方法
JP6092568B2 (ja) 2012-10-11 2017-03-08 キヤノン株式会社 放射線検出装置及び放射線検出システム

Also Published As

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WO2015033506A1 (ja) 2015-03-12
US20160181308A1 (en) 2016-06-23
JP2015052535A (ja) 2015-03-19
US10283555B2 (en) 2019-05-07

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