JP5529613B2 - 光電変換装置及び撮像システム - Google Patents

光電変換装置及び撮像システム Download PDF

Info

Publication number
JP5529613B2
JP5529613B2 JP2010081641A JP2010081641A JP5529613B2 JP 5529613 B2 JP5529613 B2 JP 5529613B2 JP 2010081641 A JP2010081641 A JP 2010081641A JP 2010081641 A JP2010081641 A JP 2010081641A JP 5529613 B2 JP5529613 B2 JP 5529613B2
Authority
JP
Japan
Prior art keywords
photoelectric conversion
unit
electrode
signal
conversion device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010081641A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010268440A5 (enExample
JP2010268440A (ja
Inventor
達也 領木
誠一郎 酒井
徹 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010081641A priority Critical patent/JP5529613B2/ja
Priority to US12/758,086 priority patent/US8872092B2/en
Publication of JP2010268440A publication Critical patent/JP2010268440A/ja
Priority to US13/829,678 priority patent/US8957364B2/en
Publication of JP2010268440A5 publication Critical patent/JP2010268440A5/ja
Application granted granted Critical
Publication of JP5529613B2 publication Critical patent/JP5529613B2/ja
Priority to US14/496,313 priority patent/US9253425B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/71Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/78Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182Colour image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2010081641A 2009-04-17 2010-03-31 光電変換装置及び撮像システム Active JP5529613B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010081641A JP5529613B2 (ja) 2009-04-17 2010-03-31 光電変換装置及び撮像システム
US12/758,086 US8872092B2 (en) 2009-04-17 2010-04-12 Photo-electric conversion device with current fluctuation suppression
US13/829,678 US8957364B2 (en) 2009-04-17 2013-03-14 Photo-electric conversion device with current fluctuation suppression
US14/496,313 US9253425B2 (en) 2009-04-17 2014-09-25 Photo-electric conversion device for current fluctuation suppression

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009101382 2009-04-17
JP2009101382 2009-04-17
JP2010081641A JP5529613B2 (ja) 2009-04-17 2010-03-31 光電変換装置及び撮像システム

Publications (3)

Publication Number Publication Date
JP2010268440A JP2010268440A (ja) 2010-11-25
JP2010268440A5 JP2010268440A5 (enExample) 2013-05-16
JP5529613B2 true JP5529613B2 (ja) 2014-06-25

Family

ID=42980296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010081641A Active JP5529613B2 (ja) 2009-04-17 2010-03-31 光電変換装置及び撮像システム

Country Status (2)

Country Link
US (3) US8872092B2 (enExample)
JP (1) JP5529613B2 (enExample)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5328207B2 (ja) * 2008-04-01 2013-10-30 キヤノン株式会社 固体撮像装置
JP5529613B2 (ja) * 2009-04-17 2014-06-25 キヤノン株式会社 光電変換装置及び撮像システム
JP5482137B2 (ja) * 2009-11-19 2014-04-23 ソニー株式会社 固体撮像装置、負荷電流源回路
JP5679653B2 (ja) * 2009-12-09 2015-03-04 キヤノン株式会社 光電変換装置およびそれを用いた撮像システム
JP5780711B2 (ja) 2010-04-06 2015-09-16 キヤノン株式会社 固体撮像装置
JP5814613B2 (ja) 2010-05-21 2015-11-17 キヤノン株式会社 固体撮像装置
WO2011148535A1 (ja) * 2010-05-27 2011-12-01 パナソニック株式会社 固体撮像素子および固体撮像素子の駆動方法
JP2012199731A (ja) * 2011-03-22 2012-10-18 Sony Corp 撮像素子、負荷電流源回路
JP6083611B2 (ja) * 2011-08-30 2017-02-22 パナソニックIpマネジメント株式会社 固体撮像装置及び撮像装置
JP5646420B2 (ja) * 2011-09-14 2014-12-24 株式会社東芝 固体撮像装置
JP6037178B2 (ja) * 2011-12-14 2016-12-07 パナソニックIpマネジメント株式会社 固体撮像装置及び撮像装置
US9093351B2 (en) 2012-03-21 2015-07-28 Canon Kabushiki Kaisha Solid-state imaging apparatus
WO2014156028A1 (ja) * 2013-03-29 2014-10-02 パナソニック株式会社 固体撮像装置及び撮像装置
JP6541347B2 (ja) 2014-03-27 2019-07-10 キヤノン株式会社 固体撮像装置および撮像システム
JP6548391B2 (ja) 2014-03-31 2019-07-24 キヤノン株式会社 光電変換装置および撮像システム
JP6482186B2 (ja) 2014-05-23 2019-03-13 キヤノン株式会社 撮像装置及びその駆動方法
JP6351404B2 (ja) 2014-07-02 2018-07-04 キヤノン株式会社 撮像装置及び撮像システム
JP6351423B2 (ja) 2014-07-31 2018-07-04 キヤノン株式会社 撮像装置及び撮像システム
JP6480768B2 (ja) 2015-03-17 2019-03-13 キヤノン株式会社 固体撮像装置及びその駆動方法
US9900539B2 (en) 2015-09-10 2018-02-20 Canon Kabushiki Kaisha Solid-state image pickup element, and image pickup system
EP3358832B1 (en) * 2015-09-30 2020-10-21 Nikon Corporation Image-capturing element and image-capturing device
US9712774B1 (en) * 2016-01-14 2017-07-18 Omnivision Technologies, Inc. Method and system for implementing dynamic ground sharing in an image sensor with pipeline architecture
US10396012B2 (en) * 2016-05-27 2019-08-27 International Business Machines Corporation Advanced through substrate via metallization in three dimensional semiconductor integration
JP6856983B2 (ja) 2016-06-30 2021-04-14 キヤノン株式会社 光電変換装置及びカメラ
JP6677594B2 (ja) 2016-06-30 2020-04-08 キヤノン株式会社 光電変換装置
US10319765B2 (en) 2016-07-01 2019-06-11 Canon Kabushiki Kaisha Imaging device having an effective pixel region, an optical black region and a dummy region each with pixels including a photoelectric converter
JP6740067B2 (ja) 2016-09-16 2020-08-12 キヤノン株式会社 固体撮像装置及びその駆動方法
JP6750876B2 (ja) 2016-10-07 2020-09-02 キヤノン株式会社 固体撮像装置及びその駆動方法
US10431464B2 (en) * 2016-10-17 2019-10-01 International Business Machines Corporation Liner planarization-free process flow for fabricating metallic interconnect structures
JP6806553B2 (ja) 2016-12-15 2021-01-06 キヤノン株式会社 撮像装置、撮像装置の駆動方法及び撮像システム
US10242879B2 (en) * 2017-04-20 2019-03-26 Lam Research Corporation Methods and apparatus for forming smooth and conformal cobalt film by atomic layer deposition
JP7102161B2 (ja) 2018-02-15 2022-07-19 キヤノン株式会社 撮像装置、撮像システム、及び、移動体
JP7210224B2 (ja) * 2018-10-22 2023-01-23 キヤノン株式会社 表示素子、表示装置、撮像装置
JP7240151B2 (ja) * 2018-11-22 2023-03-15 株式会社ジャパンディスプレイ 検出装置及び表示装置
CN113571538A (zh) * 2021-06-24 2021-10-29 维沃移动通信有限公司 像素结构、图像传感器、控制方法及装置、电子设备
JP7731725B2 (ja) 2021-08-04 2025-09-01 キヤノン株式会社 光電変換装置

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775074A (en) * 1981-09-04 1982-05-11 Hitachi Ltd Solid image pickup element
DE3501138A1 (de) * 1984-01-18 1985-07-18 Canon K.K., Tokio/Tokyo Bildaufnahmevorrichtung
US4663669A (en) * 1984-02-01 1987-05-05 Canon Kabushiki Kaisha Image sensing apparatus
JPS59218771A (ja) * 1984-05-07 1984-12-10 Hitachi Ltd 固体撮像素子
US5933189A (en) * 1995-03-09 1999-08-03 Nikon Corporation Solid state image pickup apparatus
TW421962B (en) * 1997-09-29 2001-02-11 Canon Kk Image sensing device using mos type image sensing elements
JPH11261046A (ja) * 1998-03-12 1999-09-24 Canon Inc 固体撮像装置
JP3571909B2 (ja) * 1998-03-19 2004-09-29 キヤノン株式会社 固体撮像装置及びその製造方法
US7324144B1 (en) * 1999-10-05 2008-01-29 Canon Kabushiki Kaisha Solid image pickup device, image pickup system and method of driving solid image pickup device
JP3467013B2 (ja) * 1999-12-06 2003-11-17 キヤノン株式会社 固体撮像装置
JP3793016B2 (ja) * 2000-11-06 2006-07-05 キヤノン株式会社 固体撮像装置及び撮像システム
JP3870088B2 (ja) * 2001-12-26 2007-01-17 キヤノン株式会社 固体撮像装置及びシステム
US7429764B2 (en) * 2002-02-27 2008-09-30 Canon Kabushiki Kaisha Signal processing device and image pickup apparatus using the same
JP3728260B2 (ja) * 2002-02-27 2005-12-21 キヤノン株式会社 光電変換装置及び撮像装置
JP4323772B2 (ja) * 2002-10-31 2009-09-02 キヤノン株式会社 固体撮像装置、カメラ及びカメラ制御システム
JP4455435B2 (ja) * 2004-08-04 2010-04-21 キヤノン株式会社 固体撮像装置及び同固体撮像装置を用いたカメラ
JP5089017B2 (ja) * 2004-09-01 2012-12-05 キヤノン株式会社 固体撮像装置及び固体撮像システム
JP4971586B2 (ja) * 2004-09-01 2012-07-11 キヤノン株式会社 固体撮像装置
JP4416668B2 (ja) * 2005-01-14 2010-02-17 キヤノン株式会社 固体撮像装置、その制御方法及びカメラ
JP2006197392A (ja) * 2005-01-14 2006-07-27 Canon Inc 固体撮像装置、カメラ、及び固体撮像装置の駆動方法
JP4459064B2 (ja) * 2005-01-14 2010-04-28 キヤノン株式会社 固体撮像装置、その制御方法及びカメラ
JP4677258B2 (ja) * 2005-03-18 2011-04-27 キヤノン株式会社 固体撮像装置及びカメラ
JP4459098B2 (ja) * 2005-03-18 2010-04-28 キヤノン株式会社 固体撮像装置及びカメラ
JP4459099B2 (ja) * 2005-03-18 2010-04-28 キヤノン株式会社 固体撮像装置及びカメラ
JP4746962B2 (ja) * 2005-11-02 2011-08-10 キヤノン株式会社 固体撮像装置及び撮像システム
JP4185949B2 (ja) * 2006-08-08 2008-11-26 キヤノン株式会社 光電変換装置及び撮像装置
JP5043388B2 (ja) * 2006-09-07 2012-10-10 キヤノン株式会社 固体撮像装置および撮像システム
JP4928199B2 (ja) * 2006-09-07 2012-05-09 キヤノン株式会社 信号検出装置、信号検出装置の信号読み出し方法及び信号検出装置を用いた撮像システム
JP5173171B2 (ja) * 2006-09-07 2013-03-27 キヤノン株式会社 光電変換装置、撮像装置及び信号読出方法
JP4054839B1 (ja) * 2007-03-02 2008-03-05 キヤノン株式会社 光電変換装置およびそれを用いた撮像システム
EP2037667B1 (en) * 2007-09-14 2017-08-23 Canon Kabushiki Kaisha Image sensing apparatus and imaging system
US7569803B2 (en) * 2007-10-04 2009-08-04 Aptina Imaging Corporation Biasing apparatus, systems, and methods
JP5142696B2 (ja) * 2007-12-20 2013-02-13 キヤノン株式会社 光電変換装置、及び光電変換装置を用いた撮像システム
JP5142749B2 (ja) * 2008-02-14 2013-02-13 キヤノン株式会社 撮像装置、撮像装置の制御方法及び撮像システム
JP5268389B2 (ja) * 2008-02-28 2013-08-21 キヤノン株式会社 固体撮像装置、その駆動方法及び撮像システム
JP5173493B2 (ja) * 2008-02-29 2013-04-03 キヤノン株式会社 撮像装置及び撮像システム
JP5161676B2 (ja) * 2008-07-07 2013-03-13 キヤノン株式会社 撮像装置及び撮像システム
JP5288955B2 (ja) * 2008-09-09 2013-09-11 キヤノン株式会社 固体撮像装置、撮像システム、および固体撮像装置の駆動方法
JP5264379B2 (ja) * 2008-09-12 2013-08-14 キヤノン株式会社 撮像装置、撮像システム及び撮像装置の動作方法
JP5478905B2 (ja) 2009-01-30 2014-04-23 キヤノン株式会社 固体撮像装置
JP5558857B2 (ja) 2009-03-09 2014-07-23 キヤノン株式会社 光電変換装置およびそれを用いた撮像システム
JP5529613B2 (ja) * 2009-04-17 2014-06-25 キヤノン株式会社 光電変換装置及び撮像システム

Also Published As

Publication number Publication date
US9253425B2 (en) 2016-02-02
US8957364B2 (en) 2015-02-17
US20130201372A1 (en) 2013-08-08
US8872092B2 (en) 2014-10-28
US20100264298A1 (en) 2010-10-21
US20150009389A1 (en) 2015-01-08
JP2010268440A (ja) 2010-11-25

Similar Documents

Publication Publication Date Title
JP5529613B2 (ja) 光電変換装置及び撮像システム
US11183524B2 (en) Imaging device and camera system
US10129444B2 (en) Solid-state imaging element and camera system
JP6808463B2 (ja) 光電変換装置および光電変換システム
JP7026335B2 (ja) 撮像装置
KR20160137953A (ko) 고체 촬상 소자 및 촬상 장치
JP6254048B2 (ja) 半導体装置
JP2023101585A (ja) 撮像装置
JP6351423B2 (ja) 撮像装置及び撮像システム
US9848145B2 (en) Imaging device including pixels
CN104243862A (zh) 固态图像传感器
JP2016019137A (ja) 固体撮像装置及びその駆動方法
US20170287956A1 (en) Solid-state imaging device
JP6355401B2 (ja) 固体撮像装置及びカメラ
JP7115067B2 (ja) 固体撮像素子及び撮像システム
JP6929337B2 (ja) 固体撮像装置および撮像システム
JP6420450B2 (ja) 半導体装置
JP2017188842A (ja) 固体撮像装置及び撮像システム
JP7672060B2 (ja) 撮像装置
JP6355402B2 (ja) 固体撮像装置及びカメラ
JP6243967B2 (ja) 固体撮像装置および撮像システム

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130401

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130401

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20131029

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20131101

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131220

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140320

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140417

R151 Written notification of patent or utility model registration

Ref document number: 5529613

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151