JP4407127B2 - Ｓｏｉウエーハの製造方法 - Google Patents

Ｓｏｉウエーハの製造方法 Download PDF

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Publication number
JP4407127B2
JP4407127B2 JP2003004833A JP2003004833A JP4407127B2 JP 4407127 B2 JP4407127 B2 JP 4407127B2 JP 2003004833 A JP2003004833 A JP 2003004833A JP 2003004833 A JP2003004833 A JP 2003004833A JP 4407127 B2 JP4407127 B2 JP 4407127B2
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JP
Japan
Prior art keywords
wafer
oxide film
thickness
soi
buried oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003004833A
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English (en)
Japanese (ja)
Other versions
JP2004221198A (ja
Inventor
浩司 阿賀
功 横川
清隆 高野
清 三谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP2003004833A priority Critical patent/JP4407127B2/ja
Priority to EP03768276A priority patent/EP1583145A4/en
Priority to PCT/JP2003/016796 priority patent/WO2004064145A1/ja
Priority to US10/507,175 priority patent/US20050118789A1/en
Priority to TW093100368A priority patent/TW200416813A/zh
Publication of JP2004221198A publication Critical patent/JP2004221198A/ja
Application granted granted Critical
Publication of JP4407127B2 publication Critical patent/JP4407127B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26533—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically inactive species in silicon to make buried insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Element Separation (AREA)
JP2003004833A 2003-01-10 2003-01-10 Ｓｏｉウエーハの製造方法 Expired - Fee Related JP4407127B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003004833A JP4407127B2 (ja) 2003-01-10 2003-01-10 Ｓｏｉウエーハの製造方法
EP03768276A EP1583145A4 (en) 2003-01-10 2003-12-25 PROCESS FOR PRODUCING SOI WAFER AND SOI WAFER
PCT/JP2003/016796 WO2004064145A1 (ja) 2003-01-10 2003-12-25 Ｓｏｉウエーハの製造方法及びｓｏｉウエーハ
US10/507,175 US20050118789A1 (en) 2003-01-10 2003-12-25 Method of producing soi wafer and soi wafer
TW093100368A TW200416813A (en) 2003-01-10 2004-01-07 Method of producing SOI wafer and SOI wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003004833A JP4407127B2 (ja) 2003-01-10 2003-01-10 Ｓｏｉウエーハの製造方法

Publications (2)

Publication Number Publication Date
JP2004221198A JP2004221198A (ja) 2004-08-05
JP4407127B2 true JP4407127B2 (ja) 2010-02-03

Family

ID=32708980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003004833A Expired - Fee Related JP4407127B2 (ja) 2003-01-10 2003-01-10 Ｓｏｉウエーハの製造方法

Country Status (5)

Country Link
US (1) US20050118789A1 (enExample)
EP (1) EP1583145A4 (enExample)
JP (1) JP4407127B2 (enExample)
TW (1) TW200416813A (enExample)
WO (1) WO2004064145A1 (enExample)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5054509B2 (ja) * 2004-02-25 2012-10-24 ソワテク 光検出装置
JP4830290B2 (ja) * 2004-11-30 2011-12-07 信越半導体株式会社 直接接合ウェーハの製造方法
JP5183874B2 (ja) * 2004-12-28 2013-04-17 信越化学工業株式会社 Ｓｏｉウエーハの製造方法
WO2007074552A1 (ja) * 2005-12-27 2007-07-05 Shin-Etsu Chemical Co., Ltd. Ｓｏｉウェーハの製造方法及びｓｏｉウェーハ
JP2007243038A (ja) * 2006-03-10 2007-09-20 Sumco Corp 貼り合わせウェーハ及びその製造方法
JP2008016534A (ja) 2006-07-04 2008-01-24 Sumco Corp 貼り合わせウェーハの製造方法
JP4820801B2 (ja) * 2006-12-26 2011-11-24 株式会社Ｓｕｍｃｏ 貼り合わせウェーハの製造方法
CN101548369B (zh) * 2006-12-26 2012-07-18 硅绝缘体技术有限公司 制造绝缘体上半导体结构的方法
FR2910702B1 (fr) * 2006-12-26 2009-04-03 Soitec Silicon On Insulator Procede de fabrication d'un substrat mixte
SG144092A1 (en) * 2006-12-26 2008-07-29 Sumco Corp Method of manufacturing bonded wafer
DE602006017906D1 (de) * 2006-12-26 2010-12-09 Soitec Silicon On Insulator Verfahren zum herstellen einer halbleiter-auf-isolator-struktur
WO2008096194A1 (en) 2007-02-08 2008-08-14 S.O.I.Tec Silicon On Insulator Technologies Method of fabrication of highly heat dissipative substrates
WO2008105101A1 (ja) * 2007-02-28 2008-09-04 Shin-Etsu Chemical Co., Ltd. 貼り合わせ基板の製造方法および貼り合わせ基板
KR101431780B1 (ko) 2007-03-19 2014-09-19 소이텍 패턴화된 얇은 ｓｏｉ
JP5135935B2 (ja) * 2007-07-27 2013-02-06 信越半導体株式会社 貼り合わせウエーハの製造方法
JP2011504655A (ja) * 2007-11-23 2011-02-10 エス． オー． アイ． テック シリコン オン インシュレーター テクノロジーズ 精密な酸化物の溶解
JP5466410B2 (ja) * 2008-02-14 2014-04-09 信越化学工業株式会社 Ｓｏｉ基板の表面処理方法
US8148242B2 (en) * 2008-02-20 2012-04-03 Soitec Oxidation after oxide dissolution
JP5263509B2 (ja) * 2008-09-19 2013-08-14 信越半導体株式会社 貼り合わせウェーハの製造方法
FR2938118B1 (fr) 2008-10-30 2011-04-22 Soitec Silicon On Insulator Procede de fabrication d'un empilement de couches minces semi-conductrices
FR2938119B1 (fr) * 2008-10-30 2011-04-22 Soitec Silicon On Insulator Procede de detachement de couches semi-conductrices a basse temperature
JP5493345B2 (ja) * 2008-12-11 2014-05-14 信越半導体株式会社 Ｓｏｉウェーハの製造方法
FR2941324B1 (fr) * 2009-01-22 2011-04-29 Soitec Silicon On Insulator Procede de dissolution de la couche d'oxyde dans la couronne d'une structure de type semi-conducteur sur isolant.
FR2964495A1 (fr) * 2010-09-02 2012-03-09 Soitec Silicon On Insulator Procede de fabrication d'une structure seoi multiple comportant une couche isolante ultrafine
FR2972564B1 (fr) 2011-03-08 2016-11-04 S O I Tec Silicon On Insulator Tech Procédé de traitement d'une structure de type semi-conducteur sur isolant
JP5802436B2 (ja) 2011-05-30 2015-10-28 信越半導体株式会社 貼り合わせウェーハの製造方法
US8653596B2 (en) * 2012-01-06 2014-02-18 International Business Machines Corporation Integrated circuit including DRAM and SRAM/logic
US8994085B2 (en) 2012-01-06 2015-03-31 International Business Machines Corporation Integrated circuit including DRAM and SRAM/logic
FR2998418B1 (fr) * 2012-11-20 2014-11-21 Soitec Silicon On Insulator Procede de fabrication d'un substrat de type semi-conducteur sur isolant
JP5780234B2 (ja) 2012-12-14 2015-09-16 信越半導体株式会社 Ｓｏｉウェーハの製造方法
FR3003684B1 (fr) * 2013-03-25 2015-03-27 Soitec Silicon On Insulator Procede de dissolution d'une couche de dioxyde de silicium.
FR3034565B1 (fr) * 2015-03-30 2017-03-31 Soitec Silicon On Insulator Procede de fabrication d'une structure presentant une couche dielectrique enterree d'epaisseur uniforme

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3522482B2 (ja) * 1997-02-24 2004-04-26 三菱住友シリコン株式会社 Ｓｏｉ基板の製造方法
FR2777115B1 (fr) * 1998-04-07 2001-07-13 Commissariat Energie Atomique Procede de traitement de substrats semi-conducteurs et structures obtenues par ce procede
JPH11307472A (ja) * 1998-04-23 1999-11-05 Shin Etsu Handotai Co Ltd 水素イオン剥離法によってｓｏｉウエーハを製造する方法およびこの方法で製造されたｓｏｉウエーハ
JP3395661B2 (ja) * 1998-07-07 2003-04-14 信越半導体株式会社 Ｓｏｉウエーハの製造方法
JP4273540B2 (ja) * 1998-07-21 2009-06-03 株式会社Ｓｕｍｃｏ 貼り合わせ半導体基板及びその製造方法
JP2000124092A (ja) * 1998-10-16 2000-04-28 Shin Etsu Handotai Co Ltd 水素イオン注入剥離法によってｓｏｉウエーハを製造する方法およびこの方法で製造されたｓｏｉウエーハ
FR2797713B1 (fr) * 1999-08-20 2002-08-02 Soitec Silicon On Insulator Procede de traitement de substrats pour la microelectronique et substrats obtenus par ce procede
WO2001028000A1 (en) * 1999-10-14 2001-04-19 Shin-Etsu Handotai Co., Ltd. Method for manufacturing soi wafer, and soi wafer
US6566233B2 (en) * 1999-12-24 2003-05-20 Shin-Etsu Handotai Co., Ltd. Method for manufacturing bonded wafer
FR2816445B1 (fr) * 2000-11-06 2003-07-25 Commissariat Energie Atomique Procede de fabrication d'une structure empilee comprenant une couche mince adherant a un substrat cible
JP2003204048A (ja) * 2002-01-09 2003-07-18 Shin Etsu Handotai Co Ltd Ｓｏｉウエーハの製造方法及びｓｏｉウエーハ
KR100511656B1 (ko) * 2002-08-10 2005-09-07 주식회사 실트론 나노 에스오아이 웨이퍼의 제조방법 및 그에 따라 제조된나노 에스오아이 웨이퍼
US7129123B2 (en) * 2002-08-27 2006-10-31 Shin-Etsu Handotai Co., Ltd. SOI wafer and a method for producing an SOI wafer
JP2004193515A (ja) * 2002-12-13 2004-07-08 Shin Etsu Handotai Co Ltd Ｓｏｉウエーハの製造方法
JP2004247610A (ja) * 2003-02-14 2004-09-02 Canon Inc 基板の製造方法
US7176528B2 (en) * 2003-02-18 2007-02-13 Corning Incorporated Glass-based SOI structures
FR2855908B1 (fr) * 2003-06-06 2005-08-26 Soitec Silicon On Insulator Procede d'obtention d'une structure comprenant au moins un substrat et une couche ultramince
US7052978B2 (en) * 2003-08-28 2006-05-30 Intel Corporation Arrangements incorporating laser-induced cleaving
US7018484B1 (en) * 2005-02-09 2006-03-28 Translucent Inc. Semiconductor-on-insulator silicon wafer and method of formation

Also Published As

Publication number Publication date
TWI310962B (enExample) 2009-06-11
WO2004064145A1 (ja) 2004-07-29
US20050118789A1 (en) 2005-06-02
EP1583145A4 (en) 2008-01-02
TW200416813A (en) 2004-09-01
JP2004221198A (ja) 2004-08-05
EP1583145A1 (en) 2005-10-05

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