JP4262734B2 - 蛍光x線分析装置および方法 - Google Patents
蛍光x線分析装置および方法 Download PDFInfo
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- JP4262734B2 JP4262734B2 JP2006217163A JP2006217163A JP4262734B2 JP 4262734 B2 JP4262734 B2 JP 4262734B2 JP 2006217163 A JP2006217163 A JP 2006217163A JP 2006217163 A JP2006217163 A JP 2006217163A JP 4262734 B2 JP4262734 B2 JP 4262734B2
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- Prior art keywords
- fluorescent
- measurement
- angle
- amount
- plating film
- Prior art date
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- 238000000034 method Methods 0.000 title claims description 8
- 238000004876 x-ray fluorescence Methods 0.000 title claims description 5
- 238000005259 measurement Methods 0.000 claims description 129
- 238000007747 plating Methods 0.000 claims description 60
- 239000000203 mixture Substances 0.000 claims description 40
- 239000011248 coating agent Substances 0.000 claims description 27
- 238000000576 coating method Methods 0.000 claims description 27
- 238000000605 extraction Methods 0.000 claims description 25
- 229910001335 Galvanized steel Inorganic materials 0.000 claims description 12
- 229910000831 Steel Inorganic materials 0.000 claims description 12
- 239000008397 galvanized steel Substances 0.000 claims description 12
- 239000010959 steel Substances 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 10
- 238000002441 X-ray diffraction Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 21
- 239000011701 zinc Substances 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 15
- 238000004458 analytical method Methods 0.000 description 6
- 229910052725 zinc Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
3 めっき被膜
4 コーティング膜
6 1次X線
7 X線源
8 蛍光X線
9 検出手段
α,β 取り出し角
φ 入射角
Claims (4)
- 組成が深さ方向に不均一なめっき被膜を有する合金化溶融亜鉛めっき鋼板を試料とし、前記めっき被膜の付着量および深さ方向についての平均的な組成を分析する蛍光X線分析装置であって、
所定の入射角で試料に1次X線を照射するX線源と、
所定の取り出し角で試料から発生する蛍光X線の強度を測定する検出手段とを備え、
前記入射角と取り出し角の組合せにおいて少なくとも一方が相異なる2つの組合せで蛍光X線の強度を測定し、
蛍光X線の強度が測定対象膜の付着量を増大させたときの上限強度値の99%となる付着量で示される測定深さについて、前記2つの組合せでの測定深さがいずれも90g/m 2 よりも大きくなるように、各組合せにおける入射角および取り出し角が設定されている蛍光X線分析装置。 - 請求項1において、
前記2つの組合せの一方での測定深さが90g/m 2 の1.5倍以上であり、他方での測定深さが前記一方での測定深さの2倍以上である蛍光X線分析装置。 - 請求項1において、
前記めっき被膜の上に単数または複数のコーティング膜を有する合金化溶融亜鉛めっき鋼板を試料とし、
前記コーティング膜に含まれる元素から発生する蛍光X線の強度を測定する検出手段を備え、
前記めっき被膜の付着量および深さ方向についての平均的な組成と同時に前記コーティング膜の付着量および/または組成を分析する蛍光X線分析装置。 - 組成が深さ方向に不均一なめっき被膜を有する合金化溶融亜鉛めっき鋼板を試料とし、前記めっき被膜の付着量および深さ方向についての平均的な組成を分析する蛍光X線分析方法であって、
所定の入射角で試料に1次X線を照射し、
所定の取り出し角で試料から発生する蛍光X線の強度を測定するにあたり、
前記入射角と取り出し角の組合せにおいて少なくとも一方が相異なる2つの組合せで蛍光X線の強度を測定し、
蛍光X線の強度が測定対象膜の付着量を増大させたときの上限強度値の99%となる付着量で示される測定深さについて、前記めっき被膜の付着量の上限値に基づいて、前記2つの組合せでの測定深さが前記上限値よりも大きくなるように、各組合せにおける入射角および取り出し角を設定する蛍光X線分析方法。
Priority Applications (1)
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---|---|---|---|
JP2006217163A JP4262734B2 (ja) | 2005-09-14 | 2006-08-09 | 蛍光x線分析装置および方法 |
Applications Claiming Priority (2)
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JP2005266471 | 2005-09-14 | ||
JP2006217163A JP4262734B2 (ja) | 2005-09-14 | 2006-08-09 | 蛍光x線分析装置および方法 |
Publications (3)
Publication Number | Publication Date |
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JP2007108165A JP2007108165A (ja) | 2007-04-26 |
JP2007108165A5 JP2007108165A5 (ja) | 2008-10-02 |
JP4262734B2 true JP4262734B2 (ja) | 2009-05-13 |
Family
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JP2006217163A Active JP4262734B2 (ja) | 2005-09-14 | 2006-08-09 | 蛍光x線分析装置および方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7356114B2 (ja) |
EP (1) | EP1764612B1 (ja) |
JP (1) | JP4262734B2 (ja) |
KR (1) | KR101046018B1 (ja) |
CN (1) | CN1932493B (ja) |
RU (1) | RU2390764C2 (ja) |
Families Citing this family (21)
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CA2623002A1 (en) * | 2005-09-22 | 2007-03-29 | Jfe Steel Corporation | Method of evaluating press-formability of galvanized steel sheet |
JP4930874B2 (ja) * | 2006-06-22 | 2012-05-16 | エスアイアイ・ナノテクノロジー株式会社 | エネルギー分散型放射線検出システム及び対象元素の含有量測定方法 |
US7848483B2 (en) * | 2008-03-07 | 2010-12-07 | Rigaku Innovative Technologies | Magnesium silicide-based multilayer x-ray fluorescence analyzers |
DE102008033940B3 (de) * | 2008-07-18 | 2010-01-21 | Innovent E.V. | Verfahren zum Bestimmen einer Schichtqualität |
JP4629158B1 (ja) * | 2009-09-07 | 2011-02-09 | 株式会社リガク | 蛍光x線分析方法 |
US8537967B2 (en) * | 2009-09-10 | 2013-09-17 | University Of Washington | Short working distance spectrometer and associated devices, systems, and methods |
JP5519381B2 (ja) | 2010-04-09 | 2014-06-11 | トヨタ自動車株式会社 | スペクトル測定装置 |
JP5060580B2 (ja) * | 2010-04-09 | 2012-10-31 | トヨタ自動車株式会社 | スペクトル測定装置 |
JP5397784B2 (ja) * | 2011-01-31 | 2014-01-22 | 新日鐵住金株式会社 | 鋼材の鋼種判定方法 |
DE102011051365B4 (de) * | 2011-06-27 | 2013-08-22 | Rayonic Sensor Systems Gmbh | Detektionseinrichtung und System zum Messen der Dicke einer Zinkschicht auf Stahl und zum Messen des Eisengehaltes einer Zinkschicht |
DE102012105591A1 (de) | 2011-06-27 | 2012-12-27 | Rayonic Sensor Systems Gmbh | Dispersive Ionisationskammer |
JP5907375B2 (ja) * | 2011-12-28 | 2016-04-26 | 株式会社テクノエックス | 蛍光x線分析装置及び蛍光x線分析方法 |
US9417197B2 (en) | 2012-04-25 | 2016-08-16 | Nippon Steel & Sumitomo Metal Corporation | Method of measuring thickness of Fe—Zn alloy phase of galvannealed steel sheet and apparatus for measuring the same |
US9927378B2 (en) | 2013-10-25 | 2018-03-27 | Nippon Steel & Sumitomo Metal Corporation | On-line coating adhesion determination apparatus of galvannealed steel sheet, and galvannealed steel sheet manufacturing line |
DE102013223261A1 (de) * | 2013-11-14 | 2015-05-21 | Bayerische Motoren Werke Aktiengesellschaft | Karosseriebeschichtung, Fahrzeug, Verfahren zur Ermittlung von Karosserieschäden an einem Fahrzeug und Verwendung einer Folie mit einem Fluoreszenzmittel |
DE102016014213A1 (de) * | 2015-12-08 | 2017-07-06 | Shimadzu Corporation | Röntgenspektroskopische analysevorrichtung und elementaranalyseverfahren |
US10876978B2 (en) * | 2016-07-15 | 2020-12-29 | Rigaku Corporation | X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve |
EP3339847B1 (en) * | 2016-12-22 | 2020-03-18 | Malvern Panalytical B.V. | Analysis of layered samples with xrf |
CA3100580A1 (en) * | 2018-05-18 | 2019-11-21 | Enersoft Inc. | Geological analysis system and methods using x-ray flurescence and spectroscopy |
WO2019240011A1 (ja) * | 2018-06-15 | 2019-12-19 | 株式会社堀場製作所 | 放射線検出装置、コンピュータプログラム及び位置決め方法 |
IL279576B1 (en) * | 2018-07-04 | 2024-05-01 | Rigaku Denki Co Ltd | Luminescent x-ray analysis device |
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2006
- 2006-08-09 JP JP2006217163A patent/JP4262734B2/ja active Active
- 2006-09-08 EP EP06018857.0A patent/EP1764612B1/en active Active
- 2006-09-12 CN CN2006101275609A patent/CN1932493B/zh active Active
- 2006-09-13 KR KR1020060088317A patent/KR101046018B1/ko active IP Right Grant
- 2006-09-13 RU RU2006132986/28A patent/RU2390764C2/ru active
- 2006-09-13 US US11/531,481 patent/US7356114B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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US20070058776A1 (en) | 2007-03-15 |
JP2007108165A (ja) | 2007-04-26 |
KR20070031231A (ko) | 2007-03-19 |
CN1932493A (zh) | 2007-03-21 |
RU2390764C2 (ru) | 2010-05-27 |
EP1764612B1 (en) | 2015-04-15 |
EP1764612A3 (en) | 2007-09-26 |
RU2006132986A (ru) | 2008-03-20 |
EP1764612A2 (en) | 2007-03-21 |
KR101046018B1 (ko) | 2011-07-01 |
CN1932493B (zh) | 2012-01-04 |
US7356114B2 (en) | 2008-04-08 |
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