JP2021119564A - ナノワイヤ上への構造的に制御されたシリコンの堆積 - Google Patents
ナノワイヤ上への構造的に制御されたシリコンの堆積 Download PDFInfo
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- JP2021119564A JP2021119564A JP2021066099A JP2021066099A JP2021119564A JP 2021119564 A JP2021119564 A JP 2021119564A JP 2021066099 A JP2021066099 A JP 2021066099A JP 2021066099 A JP2021066099 A JP 2021066099A JP 2021119564 A JP2021119564 A JP 2021119564A
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- Prior art keywords
- silicon
- layer
- silicon layer
- nanowires
- nanowire
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/134—Electrodes based on metals, Si or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
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Abstract
Description
[政府支援の陳述]
本発明は、概してナノ構造に関し、より具体的には、バッテリアノードにおいて有用な多層シリコンナノワイヤ構造に関する。
本明細書によれば、以下の各項目に記載の事項もまた開示される。
[項目1]
リチウムバッテリのためのアノードであって、
a)基板、
b)前記基板に固着されているナノワイヤテンプレート、
c)前記ナノワイヤテンプレートを実質的にコーティングする、第1の密度を有する第1のシリコン層、および
d)前記第1のシリコン層および任意の露出したナノワイヤテンプレートの上の第2のシリコン層であって、前記第1のシリコン層の密度より高い密度を有する、第2のシリコン層、を備える、
アノード。
[項目2]
前記第1の密度は、2.2g/cm3未満である、項目1に記載のアノード。
[項目3]
前記第1の密度は、2.1g/cm3未満である、項目1または2に記載のアノード。
[項目4]
前記第2のシリコン層は、2.25g/cm3より高い密度を有する、項目1から3のいずれか一項に記載のアノード。
[項目5]
前記第2のシリコン層は、前記第1のシリコン層の密度よりも少なくとも0.05g/cm3高い密度を有する、項目1から4のいずれか一項に記載のアノード。
[項目6]
前記第2のシリコン層は、前記第1のシリコン層の密度よりも少なくとも0.15g/cm3高い密度を有する、項目1から5のいずれか一項に記載のアノード。
[項目7]
前記第1のシリコン層は、前記ナノワイヤテンプレートに対して非コンフォーマルである、項目1から6のいずれか一項に記載のアノード。
[項目8]
前記第2のシリコン層は、下に存在する表面に対してコンフォーマルである、項目1から7のいずれか一項に記載のアノード。
[項目9]
前記第1のシリコン層の水素含有量は、少なくとも10%である、項目1から8のいずれか一項に記載のアノード。
[項目10]
前記第2のシリコン層の水素含有量は、5%以下である、項目1から9のいずれか一項に記載のアノード。
[項目11]
前記ナノワイヤテンプレートは、複数のシリサイドナノワイヤを有する、項目1から10のいずれか一項に記載のアノード。
[項目12]
前記第1のシリコン層は、その最大径で、約5ミクロンから20ミクロンの間の厚さである、項目1から11のいずれか一項に記載のアノード。
[項目13]
前記第2のシリコン層は、約5から500ナノメートルの間の厚さである、項目1から12のいずれか一項に記載のアノード。
[項目14]
前記第2のシリコン層は、約5から100ナノメートルの厚さである、項目1から13のいずれか一項に記載のアノード。
[項目15]
項目1に記載のアノードと、
リチウム含有カソードと、
前記アノードおよび前記カソードの両方とイオン連通している電解質と、を備える、
リチウムバッテリ。
[項目16]
リチウムバッテリのためのアノードを製造する方法であって、
基板を設ける段階と、
前記基板から複数のナノワイヤを成長させる段階と、
PECVD法を用いて前記複数のナノワイヤ上に第1のシリコン層を堆積させる段階と、
熱CVD法を用いて、前記第1のシリコン層、前記複数のナノワイヤ、および前記基板上に第2のシリコン層を堆積させる段階と、を備える、
方法。
[項目17]
前記PECVD法は、膨張熱プラズマ(ETP)法である、項目16に記載の方法。
[項目18]
前記複数のナノワイヤは、複数のシリサイドナノワイヤである、項目16または17に記載の方法。
[項目19]
前記熱CVD法の間のチャンバ圧は、約2Torr未満である、項目16から18のいずれか一項に記載の方法。
Claims (1)
- リチウムバッテリのためのアノードであって、
a)基板、
b)前記基板に固着されているナノワイヤテンプレート、
c)前記ナノワイヤテンプレートを実質的にコーティングする、第1の密度を有する第1のシリコン層、および
d)前記第1のシリコン層および任意の露出したナノワイヤテンプレートの上の第2のシリコン層であって、前記第1のシリコン層の密度より高い密度を有する、第2のシリコン層、を備える、
アノード。
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Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100285358A1 (en) | 2009-05-07 | 2010-11-11 | Amprius, Inc. | Electrode Including Nanostructures for Rechargeable Cells |
US11996550B2 (en) | 2009-05-07 | 2024-05-28 | Amprius Technologies, Inc. | Template electrode structures for depositing active materials |
US8450012B2 (en) | 2009-05-27 | 2013-05-28 | Amprius, Inc. | Interconnected hollow nanostructures containing high capacity active materials for use in rechargeable batteries |
US9780365B2 (en) | 2010-03-03 | 2017-10-03 | Amprius, Inc. | High-capacity electrodes with active material coatings on multilayered nanostructured templates |
CN102844917B (zh) | 2010-03-03 | 2015-11-25 | 安普雷斯股份有限公司 | 用于沉积活性材料的模板电极结构 |
KR101858282B1 (ko) | 2010-10-22 | 2018-05-15 | 암프리우스, 인코포레이티드 | 껍질에 제한된 고용량 활물질을 함유하는 복합 구조물 |
EP2727175A4 (en) | 2011-07-01 | 2015-07-01 | Amprius Inc | ELECTRODE TEMPLATE STRUCTURES WITH IMPROVED ADHESION PROPERTIES |
US9923201B2 (en) | 2014-05-12 | 2018-03-20 | Amprius, Inc. | Structurally controlled deposition of silicon onto nanowires |
US10707526B2 (en) | 2015-03-27 | 2020-07-07 | New Dominion Enterprises Inc. | All-inorganic solvents for electrolytes |
US10347434B2 (en) | 2016-05-02 | 2019-07-09 | The Regents Of The University Of California | Enhanced cycle lifetime with gel electrolyte for MNO2 nanowire capacitors |
US10707531B1 (en) | 2016-09-27 | 2020-07-07 | New Dominion Enterprises Inc. | All-inorganic solvents for electrolytes |
EP3506404B1 (en) * | 2017-03-17 | 2021-09-08 | Hitachi Metals, Ltd. | Foil for secondary battery negative electrode collectors and method for producing same |
KR20200083536A (ko) | 2017-10-31 | 2020-07-08 | 테크놀로지 이노베이션 모멘텀 펀드 (이스라엘) 리미티드 파트너쉽 | 나노 구조화된 복합 전극 및 이의 제조방법 |
US10910653B2 (en) | 2018-02-26 | 2021-02-02 | Graphenix Development, Inc. | Anodes for lithium-based energy storage devices |
US11081688B2 (en) * | 2018-03-30 | 2021-08-03 | The Bd Of Trustees Of The Leland Stanford Jr Univ | Silicon sealing for high performance battery anode materials |
WO2020172564A1 (en) * | 2019-02-22 | 2020-08-27 | Amprius, Inc. | Compositionally modified silicon coatings for use in a lithium ion battery anode |
US11024842B2 (en) | 2019-06-27 | 2021-06-01 | Graphenix Development, Inc. | Patterned anodes for lithium-based energy storage devices |
EP4014272A1 (en) | 2019-08-13 | 2022-06-22 | Graphenix Development, Inc. | Anodes for lithium-based energy storage devices, and methods for making same |
NL2023642B1 (en) | 2019-08-14 | 2021-02-24 | Leydenjar Tech B V | Silicon composition material for use as battery anode |
WO2021034916A1 (en) * | 2019-08-20 | 2021-02-25 | Graphenix Development, Inc. | Structured anodes for lithium-based energy storage devices |
US11489154B2 (en) | 2019-08-20 | 2022-11-01 | Graphenix Development, Inc. | Multilayer anodes for lithium-based energy storage devices |
US11495782B2 (en) * | 2019-08-26 | 2022-11-08 | Graphenix Development, Inc. | Asymmetric anodes for lithium-based energy storage devices |
US10964935B1 (en) | 2020-04-28 | 2021-03-30 | Nanostar, Inc. | Amorphous silicon-carbon composites and improved first coulombic efficiency |
US11970401B2 (en) | 2020-05-11 | 2024-04-30 | Advano, Inc. | Amorphization of silicon |
US11955667B2 (en) | 2021-11-15 | 2024-04-09 | Beta Air, Llc | System and method for a battery assembly |
NL2029989B1 (en) | 2021-12-01 | 2023-06-19 | Leydenjar Tech B V | Composite electrode material, method for its production and use of the material |
NL2032368B1 (en) | 2022-07-04 | 2024-01-19 | Leydenjar Tech B V | High Cycle-life Lithium-ion Cells with Nano-structured Silicon Comprising Anodes |
NL2032414B1 (en) | 2022-07-07 | 2024-01-23 | Leydenjar Tech B V | High Cycle-life Lithium-ion Cells with Nano-structured Silicon Comprising Anodes |
CN116111078B (zh) * | 2023-04-12 | 2023-11-10 | 贝特瑞新材料集团股份有限公司 | 负极材料及其制备方法、锂离子电池 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006269306A (ja) * | 2005-03-25 | 2006-10-05 | Sanyo Electric Co Ltd | リチウム二次電池用電極およびその製造方法 |
JP2009117165A (ja) * | 2007-11-06 | 2009-05-28 | Toyota Central R&D Labs Inc | リチウム2次電池用電極及びリチウム2次電池 |
US20110027655A1 (en) * | 2008-02-25 | 2011-02-03 | Ronald Anthony Rojeski | Electrodes Including Collar Stop |
JP2011108639A (ja) * | 2009-10-22 | 2011-06-02 | Ronald Anthony Rojeski | カラーストップを含む電極 |
US20110151290A1 (en) * | 2009-12-18 | 2011-06-23 | Cui li-feng | Crystalline-amorphous nanowires for battery electrodes |
US20120070741A1 (en) * | 2010-03-03 | 2012-03-22 | Amprius, Inc. | High capacity battery electrode structures |
JP2013065547A (ja) * | 2011-08-31 | 2013-04-11 | Semiconductor Energy Lab Co Ltd | 蓄電装置及びその作製方法 |
JP2013521621A (ja) * | 2010-03-03 | 2013-06-10 | アンプリウス、インコーポレイテッド | 活性材料を堆積させるためのテンプレート電極構造 |
WO2013096931A1 (en) * | 2011-12-21 | 2013-06-27 | Rojeski Ronald | Energy storage devices |
WO2014008433A1 (en) * | 2012-07-03 | 2014-01-09 | Catalyst Power Technologies, Inc. | Hybrid energy storage devices including support filaments |
US20140096819A1 (en) * | 2011-05-27 | 2014-04-10 | REC Modules Pte., Ltd. | Solar cell and method for producing same |
JP2017521812A (ja) * | 2014-05-12 | 2017-08-03 | アンプリウス、インコーポレイテッド | ナノワイヤ上への構造的に制御されたシリコンの堆積 |
Family Cites Families (205)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU532635B2 (en) | 1979-11-06 | 1983-10-06 | South African Inventions Development Corporation | Metal oxide cathode |
US4436796A (en) | 1981-07-30 | 1984-03-13 | The United States Of America As Represented By The United States Department Of Energy | All-solid electrodes with mixed conductor matrix |
JPS60224737A (ja) | 1984-04-21 | 1985-11-09 | Kobe Steel Ltd | 耐孔蝕性に優れたアルミニウム合金複合材 |
JP2546114B2 (ja) | 1992-12-22 | 1996-10-23 | 日本電気株式会社 | 異物質内包カーボンナノチューブとその製造方法 |
US5426006A (en) | 1993-04-16 | 1995-06-20 | Sandia Corporation | Structural micro-porous carbon anode for rechargeable lithium-ion batteries |
US5855860A (en) | 1994-10-27 | 1999-01-05 | Shin-Etsu Chemical Co., Ltd. | Method for porifying fine particulate silica |
US6025094A (en) | 1994-11-23 | 2000-02-15 | Polyplus Battery Company, Inc. | Protective coatings for negative electrodes |
JP3581474B2 (ja) | 1995-03-17 | 2004-10-27 | キヤノン株式会社 | リチウムを利用する二次電池 |
JPH097638A (ja) | 1995-06-22 | 1997-01-10 | Seiko Instr Inc | 非水電解質二次電池 |
DE69710787T2 (de) | 1996-05-22 | 2002-11-21 | Moltech Corp | Komposit-kathoden, elektrochemische zellen mit komposit-kathoden und verfahren zur herstellung |
US6083644A (en) | 1996-11-29 | 2000-07-04 | Seiko Instruments Inc. | Non-aqueous electrolyte secondary battery |
US5997832A (en) | 1997-03-07 | 1999-12-07 | President And Fellows Of Harvard College | Preparation of carbide nanorods |
DE69814232T2 (de) | 1997-06-03 | 2004-04-08 | Matsushita Electric Industrial Co., Ltd., Kadoma | Negative Elektrodenaktivmaterialen für nicht-wässerige Elektrolyt Sekundärbatterien und entsprechenden Batterien |
JP3941235B2 (ja) | 1998-05-13 | 2007-07-04 | 宇部興産株式会社 | 非水二次電池 |
WO1999065821A1 (en) | 1998-06-19 | 1999-12-23 | The Research Foundation Of State University Of New York | Free-standing and aligned carbon nanotubes and synthesis thereof |
JP4352475B2 (ja) | 1998-08-20 | 2009-10-28 | ソニー株式会社 | 固体電解質二次電池 |
EP1028476A4 (en) | 1998-09-08 | 2007-11-28 | Sumitomo Metal Ind | NEGATIVE ELECTRODE MATERIAL FOR NONAQUEOUS ELECTRODE SECONDARY ACCUMULATOR AND PROCESS FOR PRODUCTION THEREOF |
JP3620703B2 (ja) | 1998-09-18 | 2005-02-16 | キヤノン株式会社 | 二次電池用負極電極材、電極構造体、二次電池、及びこれらの製造方法 |
US7816709B2 (en) | 1999-06-02 | 2010-10-19 | The Board Of Regents Of The University Of Oklahoma | Single-walled carbon nanotube-ceramic composites and methods of use |
DE10023456A1 (de) | 1999-07-29 | 2001-02-01 | Creavis Tech & Innovation Gmbh | Meso- und Nanoröhren |
GB9919807D0 (en) | 1999-08-21 | 1999-10-27 | Aea Technology Plc | Anode for rechargeable lithium cell |
KR100358805B1 (ko) | 2000-03-07 | 2002-10-25 | 삼성에스디아이 주식회사 | 리튬 이차 전지용 음극 활물질 및 그의 제조 방법 |
JP2001254103A (ja) | 2000-03-13 | 2001-09-18 | Sanei Kasei Kk | ナノコンポジット構造を有する金属粒子及び自己組織化によるその製造方法 |
US6334939B1 (en) | 2000-06-15 | 2002-01-01 | The University Of North Carolina At Chapel Hill | Nanostructure-based high energy capacity material |
US7056620B2 (en) | 2000-09-07 | 2006-06-06 | Front Edge Technology, Inc. | Thin film battery and method of manufacture |
JP3466576B2 (ja) | 2000-11-14 | 2003-11-10 | 三井鉱山株式会社 | リチウム二次電池負極用複合材料及びリチウム二次電池 |
US6503660B2 (en) | 2000-12-06 | 2003-01-07 | R. Terry K. Baker | Lithium ion battery containing an anode comprised of graphitic carbon nanofibers |
JP4201509B2 (ja) | 2001-03-06 | 2008-12-24 | 三洋電機株式会社 | リチウム二次電池用電極及びリチウム二次電池 |
US6656838B2 (en) * | 2001-03-16 | 2003-12-02 | Hitachi, Ltd. | Process for producing semiconductor and apparatus for production |
US7713352B2 (en) | 2001-06-29 | 2010-05-11 | University Of Louisville Research Foundation, Inc. | Synthesis of fibers of inorganic materials using low-melting metals |
JP3897709B2 (ja) | 2002-02-07 | 2007-03-28 | 日立マクセル株式会社 | 電極材料およびその製造方法、並びに非水二次電池用負極および非水二次電池 |
US20060165988A1 (en) | 2002-04-09 | 2006-07-27 | Yet-Ming Chiang | Carbon nanoparticles and composite particles and process of manufacture |
US20040126659A1 (en) | 2002-09-10 | 2004-07-01 | Graetz Jason A. | High-capacity nanostructured silicon and lithium alloys thereof |
US7432017B2 (en) | 2002-10-15 | 2008-10-07 | Polyplus Battery Company | Compositions and methods for protection of active metal anodes and polymer electrolytes |
US7645543B2 (en) | 2002-10-15 | 2010-01-12 | Polyplus Battery Company | Active metal/aqueous electrochemical cells and systems |
GB2395059B (en) | 2002-11-05 | 2005-03-16 | Imp College Innovations Ltd | Structured silicon anode |
TWI236778B (en) | 2003-01-06 | 2005-07-21 | Hon Hai Prec Ind Co Ltd | Lithium ion battery |
CN100382362C (zh) | 2003-03-26 | 2008-04-16 | 佳能株式会社 | 用于锂二次电池的电极材料和具有该电极材料的电极结构 |
WO2004093223A2 (en) * | 2003-04-14 | 2004-10-28 | Massachusetts Institute Of Technology | Integrated thin film batteries on silicon integrated circuits |
JP2005071655A (ja) | 2003-08-28 | 2005-03-17 | Mitsubishi Materials Corp | 非水電解液二次電池用負極材料及びその製造方法並びにこれを用いた非水電解液二次電池 |
US7432014B2 (en) | 2003-11-05 | 2008-10-07 | Sony Corporation | Anode and battery |
US7608178B2 (en) | 2003-11-10 | 2009-10-27 | Polyplus Battery Company | Active metal electrolyzer |
US20110039690A1 (en) | 2004-02-02 | 2011-02-17 | Nanosys, Inc. | Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production |
CN100547830C (zh) | 2004-03-08 | 2009-10-07 | 三星Sdi株式会社 | 可充电锂电池的负极活性物质及其制法以及包含它的可充电锂电池 |
JP4623283B2 (ja) | 2004-03-26 | 2011-02-02 | 信越化学工業株式会社 | 珪素複合体粒子及びその製造方法並びに非水電解質二次電池用負極材 |
EP1738425B1 (en) | 2004-04-23 | 2013-10-16 | LG Chemical, Ltd. | Method for manufacturing an anode active material with improved electrochemical properties |
US20050238810A1 (en) | 2004-04-26 | 2005-10-27 | Mainstream Engineering Corp. | Nanotube/metal substrate composites and methods for producing such composites |
US20050279274A1 (en) | 2004-04-30 | 2005-12-22 | Chunming Niu | Systems and methods for nanowire growth and manufacturing |
CN100338796C (zh) | 2004-05-26 | 2007-09-19 | 中国科学院金属研究所 | 一种锂离子电池负极材料的改性方法 |
US7733441B2 (en) | 2004-06-03 | 2010-06-08 | Semiconductor Energy Labortory Co., Ltd. | Organic electroluminescent lighting system provided with an insulating layer containing fluorescent material |
KR100631844B1 (ko) | 2004-09-24 | 2006-10-09 | 삼성전기주식회사 | 탄소섬유웹구조를 갖는 전계방출형 에미터전극 및 그제조방법 |
US7438759B2 (en) | 2004-10-21 | 2008-10-21 | Sharp Laboratories Of America, Inc. | Ambient environment nanowire sensor |
JP5014144B2 (ja) | 2004-11-03 | 2012-08-29 | ヴェロシス インコーポレイテッド | ミニチャンネル及びマイクロチャンネルにおけるパーシャル沸騰 |
US7939218B2 (en) | 2004-12-09 | 2011-05-10 | Nanosys, Inc. | Nanowire structures comprising carbon |
US7842432B2 (en) | 2004-12-09 | 2010-11-30 | Nanosys, Inc. | Nanowire structures comprising carbon |
JP2006164137A (ja) | 2004-12-10 | 2006-06-22 | Zero:Kk | アクセス制御システム及びアクセス制御プログラム |
FR2880198B1 (fr) | 2004-12-23 | 2007-07-06 | Commissariat Energie Atomique | Electrode nanostructuree pour microbatterie |
FR2880197B1 (fr) | 2004-12-23 | 2007-02-02 | Commissariat Energie Atomique | Electrolyte structure pour microbatterie |
TWI263702B (en) | 2004-12-31 | 2006-10-11 | Ind Tech Res Inst | Anode materials of secondary lithium-ion battery |
KR100784996B1 (ko) | 2005-01-28 | 2007-12-11 | 삼성에스디아이 주식회사 | 음극 활물질, 그 제조 방법 및 이를 채용한 음극과 리튬전지 |
JP4740753B2 (ja) | 2005-01-28 | 2011-08-03 | 三星エスディアイ株式会社 | 充放電するリチウム電池、及び充放電するリチウム電池の負極に含まれる負極活物質の製造方法 |
WO2006100837A1 (ja) | 2005-03-23 | 2006-09-28 | Pionics Co., Ltd. | リチウム二次電池用負極活物質粒子と負極及びそれらの製造方法 |
US20060216603A1 (en) | 2005-03-26 | 2006-09-28 | Enable Ipc | Lithium-ion rechargeable battery based on nanostructures |
US7402445B2 (en) * | 2005-05-16 | 2008-07-22 | Wayne State University | Method of forming micro-structures and nano-structures |
FR2885913B1 (fr) | 2005-05-18 | 2007-08-10 | Centre Nat Rech Scient | Element composite comprenant un substrat conducteur et un revetement metallique nanostructure. |
CN100462136C (zh) | 2005-05-20 | 2009-02-18 | 鸿富锦精密工业(深圳)有限公司 | 合成纳米粒子的方法 |
CN100422112C (zh) | 2005-07-08 | 2008-10-01 | 中国科学院物理研究所 | 一种具有球形核壳结构的碳硅复合材料及其制法和用途 |
JP4692163B2 (ja) | 2005-08-30 | 2011-06-01 | 日産自動車株式会社 | ワーク位置決め支持装置及びワーク位置決め支持方法 |
CN100431204C (zh) | 2005-09-22 | 2008-11-05 | 松下电器产业株式会社 | 负极和使用该负极制备的锂离子二次电池 |
JP4432871B2 (ja) | 2005-10-18 | 2010-03-17 | ソニー株式会社 | 負極およびその製造方法、並びに電池 |
US8367240B2 (en) | 2005-10-21 | 2013-02-05 | Panasonic Corporation | Lithium secondary battery with wound electrodes |
JP4997739B2 (ja) | 2005-10-28 | 2012-08-08 | ソニー株式会社 | リチウムイオン二次電池用負極材料およびそれを用いたリチウムイオン二次電池、並びにリチウムイオン二次電池の製造方法 |
JP5474352B2 (ja) | 2005-11-21 | 2014-04-16 | ナノシス・インク. | 炭素を含むナノワイヤ構造 |
US8652692B2 (en) | 2005-11-23 | 2014-02-18 | Polyplus Battery Company | Li/Air non-aqueous batteries |
CN100423245C (zh) | 2005-12-07 | 2008-10-01 | 中国科学院物理研究所 | 金属硅化物纳米线及其制作方法 |
JP5162825B2 (ja) | 2005-12-13 | 2013-03-13 | パナソニック株式会社 | 非水電解質二次電池用負極とそれを用いた非水電解質二次電池 |
CN100500556C (zh) | 2005-12-16 | 2009-06-17 | 清华大学 | 碳纳米管丝及其制作方法 |
FR2895572B1 (fr) | 2005-12-23 | 2008-02-15 | Commissariat Energie Atomique | Materiau a base de nanotubes de carbone et de silicium utilisable dans des electrodes negatives pour accumulateur au lithium |
US7906238B2 (en) | 2005-12-23 | 2011-03-15 | 3M Innovative Properties Company | Silicon-containing alloys useful as electrodes for lithium-ion batteries |
GB0601318D0 (en) | 2006-01-23 | 2006-03-01 | Imp Innovations Ltd | Method of etching a silicon-based material |
GB0601319D0 (en) | 2006-01-23 | 2006-03-01 | Imp Innovations Ltd | A method of fabricating pillars composed of silicon-based material |
JP4027966B2 (ja) | 2006-01-25 | 2007-12-26 | 松下電器産業株式会社 | リチウム二次電池用負極およびその製造方法、ならびにリチウム二次電池用負極を備えたリチウム二次電池 |
US7408829B2 (en) | 2006-02-13 | 2008-08-05 | International Business Machines Corporation | Methods and arrangements for enhancing power management systems in integrated circuits |
US20070190422A1 (en) | 2006-02-15 | 2007-08-16 | Fmc Corporation | Carbon nanotube lithium metal powder battery |
US20080008844A1 (en) | 2006-06-05 | 2008-01-10 | Martin Bettge | Method for growing arrays of aligned nanostructures on surfaces |
US20070298168A1 (en) | 2006-06-09 | 2007-12-27 | Rensselaer Polytechnic Institute | Multifunctional carbon nanotube based brushes |
JP5192710B2 (ja) | 2006-06-30 | 2013-05-08 | 三井金属鉱業株式会社 | 非水電解液二次電池用負極 |
JP4833758B2 (ja) | 2006-07-21 | 2011-12-07 | Okiセミコンダクタ株式会社 | 駆動回路 |
US7722991B2 (en) | 2006-08-09 | 2010-05-25 | Toyota Motor Corporation | High performance anode material for lithium-ion battery |
US7838153B2 (en) | 2006-08-29 | 2010-11-23 | Panasonic Corporation | Current collector, electrode, and non-aqueous electrolyte secondary battery |
US8044292B2 (en) | 2006-10-13 | 2011-10-25 | Toyota Motor Engineering & Manufacturing North America, Inc. | Homogeneous thermoelectric nanocomposite using core-shell nanoparticles |
KR100985648B1 (ko) | 2006-10-13 | 2010-10-05 | 파나소닉 주식회사 | 비수 전해질 2차 전지용 음극과 그 제조 방법 및 그를이용한 비수 전해질 2차 전지 |
US20080110486A1 (en) * | 2006-11-15 | 2008-05-15 | General Electric Company | Amorphous-crystalline tandem nanostructured solar cells |
WO2008067409A2 (en) | 2006-11-28 | 2008-06-05 | Polyplus Battery Company | Protected lithium electrodes for electro-transport drug delivery |
JP2008171802A (ja) | 2006-12-13 | 2008-07-24 | Matsushita Electric Ind Co Ltd | 非水電解質二次電池用負極とその製造方法およびそれを用いた非水電解質二次電池 |
JP4288621B2 (ja) | 2006-12-19 | 2009-07-01 | ソニー株式会社 | 負極及びそれを用いた電池、並びに負極の製造方法 |
US8986882B2 (en) | 2006-12-27 | 2015-03-24 | Panasonic Intellectual Property Management Co., Ltd. | Electrode, and current collector used therefor |
JP2008192594A (ja) | 2007-01-11 | 2008-08-21 | Matsushita Electric Ind Co Ltd | 非水電解質二次電池用負極とその製造方法およびそれを用いた非水電解質二次電池 |
JP5277656B2 (ja) | 2007-02-20 | 2013-08-28 | 日立化成株式会社 | リチウムイオン二次電池用負極材、負極及びリチウムイオン二次電池 |
US20080206641A1 (en) | 2007-02-27 | 2008-08-28 | 3M Innovative Properties Company | Electrode compositions and electrodes made therefrom |
US7754600B2 (en) | 2007-03-01 | 2010-07-13 | Hewlett-Packard Development Company, L.P. | Methods of forming nanostructures on metal-silicide crystallites, and resulting structures and devices |
US7794840B2 (en) | 2007-03-15 | 2010-09-14 | Yazaki Corporation | Capacitors comprising organized assemblies of carbon and non-carbon compounds |
JP2008269827A (ja) | 2007-04-17 | 2008-11-06 | Matsushita Electric Ind Co Ltd | 電気化学素子の電極材料およびその製造方法並びにそれを用いた電極極板および電気化学素子 |
US8828481B2 (en) | 2007-04-23 | 2014-09-09 | Applied Sciences, Inc. | Method of depositing silicon on carbon materials and forming an anode for use in lithium ion batteries |
US8273479B2 (en) | 2007-04-27 | 2012-09-25 | Panasonic Corporation | Negative electrode for lithium secondary cell and lithium secondary cell using the same |
KR100868290B1 (ko) | 2007-05-04 | 2008-11-12 | 한국과학기술연구원 | 나노파이버 네트워크 구조의 음극 활물질을 구비한이차전지용 음극 및 이를 이용한 이차전지와, 이차전지용음극 활물질의 제조방법 |
JP2008305781A (ja) | 2007-05-09 | 2008-12-18 | Mitsubishi Chemicals Corp | 電極及びその製造方法、並びに非水電解質二次電池 |
GB0709165D0 (en) | 2007-05-11 | 2007-06-20 | Nexeon Ltd | A silicon anode for a rechargeable battery |
JP2008300255A (ja) | 2007-06-01 | 2008-12-11 | Panasonic Corp | 電気化学素子用電極とそれを用いた電気化学素子 |
JP2009021226A (ja) | 2007-06-15 | 2009-01-29 | Toshiba Corp | 燃料電池用膜電極接合体および燃料電池 |
JP2009038023A (ja) | 2007-07-12 | 2009-02-19 | Sumitomo Chemical Co Ltd | 電気化学的蓄電デバイス用電極 |
GB0713896D0 (en) | 2007-07-17 | 2007-08-29 | Nexeon Ltd | Method |
GB0713895D0 (en) | 2007-07-17 | 2007-08-29 | Nexeon Ltd | Production |
GB0713898D0 (en) | 2007-07-17 | 2007-08-29 | Nexeon Ltd | A method of fabricating structured particles composed of silcon or a silicon-based material and their use in lithium rechargeable batteries |
KR101375328B1 (ko) | 2007-07-27 | 2014-03-19 | 삼성에스디아이 주식회사 | Si/C 복합물, 이를 포함하는 음극활물질 및 리튬전지 |
US7816031B2 (en) | 2007-08-10 | 2010-10-19 | The Board Of Trustees Of The Leland Stanford Junior University | Nanowire battery methods and arrangements |
KR100934940B1 (ko) | 2007-08-20 | 2010-01-06 | 충남대학교산학협력단 | 탄소주형체 희생체법을 이용한 리튬코발트산화물계 속빈 구나노 구조체 및 그 제조방법 |
KR100878718B1 (ko) | 2007-08-28 | 2009-01-14 | 한국과학기술연구원 | 리튬이차전지용 실리콘 박막 음극, 이의 제조방법 및 이를포함하는 리튬이차전지 |
EP2204867A4 (en) | 2007-09-06 | 2012-06-06 | Canon Kk | METHOD FOR PRODUCING LITHIUM ION STORAGE / RELEASE MATERIAL, LITHIUM ION STORAGE / RELEASE MATERIAL, ELECTRODE STRUCTURE USING THE MATERIAL, AND ELECTRICITY STORAGE DEVICE THEREOF |
JP2010538444A (ja) | 2007-09-07 | 2010-12-09 | インオーガニック スペシャリスツ インク | リチウム二次バッテリー用アノード材料としてのシリコン変性ナノファイバー紙 |
CN101388447B (zh) | 2007-09-14 | 2011-08-24 | 清华大学 | 锂离子电池负极及其制备方法 |
CN101453016A (zh) | 2007-11-29 | 2009-06-10 | 比亚迪股份有限公司 | 负极活性材料及其制备方法和负极及锂离子电池 |
CN101453013A (zh) | 2007-11-29 | 2009-06-10 | 比亚迪股份有限公司 | 锂离子电池负极及其制备方法和电池 |
WO2009123666A2 (en) | 2007-12-19 | 2009-10-08 | University Of Maryland College Park | High-powered electrochemical energy storage devices and methods for their fabrication |
US9564629B2 (en) | 2008-01-02 | 2017-02-07 | Nanotek Instruments, Inc. | Hybrid nano-filament anode compositions for lithium ion batteries |
US8435676B2 (en) | 2008-01-09 | 2013-05-07 | Nanotek Instruments, Inc. | Mixed nano-filament electrode materials for lithium ion batteries |
US20090186267A1 (en) | 2008-01-23 | 2009-07-23 | Tiegs Terry N | Porous silicon particulates for lithium batteries |
US8283556B2 (en) | 2008-01-30 | 2012-10-09 | Hewlett-Packard Development Company, L.P. | Nanowire-based device and array with coaxial electrodes |
JP4934607B2 (ja) | 2008-02-06 | 2012-05-16 | 富士重工業株式会社 | 蓄電デバイス |
US8389157B2 (en) | 2008-02-22 | 2013-03-05 | Alliance For Sustainable Energy, Llc | Oriented nanotube electrodes for lithium ion batteries and supercapacitors |
US9917300B2 (en) | 2009-02-25 | 2018-03-13 | Cf Traverse Llc | Hybrid energy storage devices including surface effect dominant sites |
CN101953014B (zh) | 2008-02-25 | 2014-11-05 | 罗纳德·安东尼·罗杰斯基 | 高容量电极 |
US9431181B2 (en) | 2009-02-25 | 2016-08-30 | Catalyst Power Technologies | Energy storage devices including silicon and graphite |
US9979017B2 (en) | 2009-02-25 | 2018-05-22 | Cf Traverse Llc | Energy storage devices |
US9412998B2 (en) | 2009-02-25 | 2016-08-09 | Ronald A. Rojeski | Energy storage devices |
JP5266839B2 (ja) | 2008-03-28 | 2013-08-21 | ソニー株式会社 | 二次電池用負極、二次電池および電子機器 |
WO2009137241A2 (en) | 2008-04-14 | 2009-11-12 | Bandgap Engineering, Inc. | Process for fabricating nanowire arrays |
CN102007625B (zh) | 2008-04-17 | 2014-03-12 | 易诺维公司 | 具有均匀的金属-半导体合金层的阳极材料 |
CN101560694B (zh) | 2008-04-18 | 2011-11-09 | 中国科学院金属研究所 | 一种硅化物纳米带/纳米片的可控制备方法 |
WO2009131700A2 (en) | 2008-04-25 | 2009-10-29 | Envia Systems, Inc. | High energy lithium ion batteries with particular negative electrode compositions |
US8968820B2 (en) | 2008-04-25 | 2015-03-03 | Nanotek Instruments, Inc. | Process for producing hybrid nano-filament electrodes for lithium batteries |
JP5333820B2 (ja) | 2008-05-23 | 2013-11-06 | ソニー株式会社 | 二次電池用負極およびそれを備えた二次電池 |
US8491718B2 (en) | 2008-05-28 | 2013-07-23 | Karin Chaudhari | Methods of growing heteroepitaxial single crystal or large grained semiconductor films and devices thereon |
US20090297774A1 (en) | 2008-05-28 | 2009-12-03 | Praveen Chaudhari | Methods of growing heterepitaxial single crystal or large grained semiconductor films and devices thereon |
US8936874B2 (en) | 2008-06-04 | 2015-01-20 | Nanotek Instruments, Inc. | Conductive nanocomposite-based electrodes for lithium batteries |
CN102124601B (zh) | 2008-06-16 | 2014-02-12 | 波利普拉斯电池有限公司 | 含水锂/空气电池组电池 |
US8216436B2 (en) | 2008-08-25 | 2012-07-10 | The Trustees Of Boston College | Hetero-nanostructures for solar energy conversions and methods of fabricating same |
TW201013947A (en) | 2008-09-23 | 2010-04-01 | Tripod Technology Corp | Electrochemical device and method of fabricating the same |
JP5612591B2 (ja) | 2008-11-14 | 2014-10-22 | バンドギャップ エンジニアリング, インコーポレイテッド | ナノ構造デバイス |
JP4816981B2 (ja) | 2008-12-22 | 2011-11-16 | ソニー株式会社 | 負極および二次電池 |
US8202568B2 (en) | 2008-12-23 | 2012-06-19 | Ipcooler Technology Inc. | Method for making a conductive film of carbon nanotubes |
US9093693B2 (en) | 2009-01-13 | 2015-07-28 | Samsung Electronics Co., Ltd. | Process for producing nano graphene reinforced composite particles for lithium battery electrodes |
KR101135621B1 (ko) | 2009-01-13 | 2012-04-17 | 한양대학교 산학협력단 | 결정성 이산화티탄 분말의 제조 방법, 음극 활물질의 제조 방법, 음극 활물질 및 리튬 이차 전지 |
US8206569B2 (en) | 2009-02-04 | 2012-06-26 | Applied Materials, Inc. | Porous three dimensional copper, tin, copper-tin, copper-tin-cobalt, and copper-tin-cobalt-titanium electrodes for batteries and ultra capacitors |
US8940438B2 (en) | 2009-02-16 | 2015-01-27 | Samsung Electronics Co., Ltd. | Negative electrode including group 14 metal/metalloid nanotubes, lithium battery including the negative electrode, and method of manufacturing the negative electrode |
WO2010100599A1 (en) | 2009-03-04 | 2010-09-10 | Koninklijke Philips Electronics, N.V. | Large capacity thin film battery and method for making same |
KR101080956B1 (ko) | 2009-04-13 | 2011-11-08 | 국립대학법인 울산과학기술대학교 산학협력단 | 리튬 이차 전지용 음극 활물질, 이의 제조 방법 및 이를 포함하는 리튬 이차 전지 |
CN101527357B (zh) | 2009-04-24 | 2012-05-16 | 清华大学 | 纳米硅无定型碳复合锂离子电池负极材料及其制备方法 |
JP2010262752A (ja) | 2009-04-30 | 2010-11-18 | Furukawa Electric Co Ltd:The | リチウムイオン二次電池用の負極、それを用いたリチウムイオン二次電池、リチウムイオン二次電池用の負極の製造方法 |
GB2470056B (en) | 2009-05-07 | 2013-09-11 | Nexeon Ltd | A method of making silicon anode material for rechargeable cells |
US20140370380A9 (en) | 2009-05-07 | 2014-12-18 | Yi Cui | Core-shell high capacity nanowires for battery electrodes |
US11996550B2 (en) | 2009-05-07 | 2024-05-28 | Amprius Technologies, Inc. | Template electrode structures for depositing active materials |
US20100285358A1 (en) | 2009-05-07 | 2010-11-11 | Amprius, Inc. | Electrode Including Nanostructures for Rechargeable Cells |
ES2867474T3 (es) | 2009-05-19 | 2021-10-20 | Oned Mat Inc | Materiales nanoestructurados para aplicaciones de batería |
US8450012B2 (en) | 2009-05-27 | 2013-05-28 | Amprius, Inc. | Interconnected hollow nanostructures containing high capacity active materials for use in rechargeable batteries |
US10366802B2 (en) | 2009-06-05 | 2019-07-30 | University of Pittsburgh—of the Commonwealth System of Higher Education | Compositions including nano-particles and a nano-structured support matrix and methods of preparation as reversible high capacity anodes in energy storage systems |
US20110008233A1 (en) | 2009-07-10 | 2011-01-13 | Semiconductor Energy Laboratory Co., Ltd. | Positive electrode active material |
DE102009035745A1 (de) | 2009-08-01 | 2011-02-17 | Christian-Albrechts-Universität Zu Kiel | Elektrode für Lithium-Ionen Akkumulatoren |
CN101989655B (zh) | 2009-08-03 | 2019-09-10 | 张洪涛 | 纳米碳化硅作锂离子电池负极材料 |
WO2011053553A1 (en) | 2009-10-26 | 2011-05-05 | The Trustees Of Boston College | Hetero-nanostructure materials for use in energy-storage devices and methods of fabricating same |
EP2494634A1 (en) | 2009-10-29 | 2012-09-05 | Uchicago Argonne, LLC, Operator Of Argonne National Laboratory | Autogenic pressure reactions for battery materials manufacture |
KR20120093895A (ko) | 2009-10-30 | 2012-08-23 | 락히드 마틴 코오포레이션 | 구조화된 실리콘 배터리 애노드들 |
KR20120128125A (ko) | 2009-11-03 | 2012-11-26 | 엔비아 시스템즈 인코포레이티드 | 리튬 이온 전지용 고용량 아노드 물질 |
JP2013511130A (ja) | 2009-11-11 | 2013-03-28 | アンプリウス、インコーポレイテッド | 電極製造用の中間層 |
WO2011060023A2 (en) | 2009-11-11 | 2011-05-19 | Amprius Inc. | Preloading lithium ion cell components with lithium |
DE102009056530A1 (de) | 2009-12-04 | 2011-06-09 | Christian-Albrechts-Universität Zu Kiel | Nanodrahtstruktur mit freiliegenden, regelmäßig angeordneten Nanodrahtenden und Verfahren zur Herstellung einer solchen Struktur |
US8753740B2 (en) | 2009-12-07 | 2014-06-17 | Nanotek Instruments, Inc. | Submicron-scale graphitic fibrils, methods for producing same and compositions containing same |
US20110143019A1 (en) | 2009-12-14 | 2011-06-16 | Amprius, Inc. | Apparatus for Deposition on Two Sides of the Web |
US9878905B2 (en) | 2009-12-31 | 2018-01-30 | Samsung Electronics Co., Ltd. | Negative electrode including metal/metalloid nanotubes, lithium battery including the negative electrode, and method of manufacturing the negative electrode |
US20110189510A1 (en) | 2010-01-29 | 2011-08-04 | Illuminex Corporation | Nano-Composite Anode for High Capacity Batteries and Methods of Forming Same |
US20110205688A1 (en) | 2010-02-19 | 2011-08-25 | Nthdegree Technologies Worldwide Inc. | Multilayer Carbon Nanotube Capacitor |
JP5351264B2 (ja) | 2010-02-24 | 2013-11-27 | パナソニック株式会社 | カーボンナノチューブ形成用基板、カーボンナノチューブ複合体、エネルギーデバイス、その製造方法及びそれを搭載した装置 |
US9172088B2 (en) | 2010-05-24 | 2015-10-27 | Amprius, Inc. | Multidimensional electrochemically active structures for battery electrodes |
US20220149379A1 (en) | 2010-03-03 | 2022-05-12 | Amprius, Inc. | High capacity battery electrode structures |
WO2011109815A1 (en) | 2010-03-05 | 2011-09-09 | A123 Systems, Inc. | Design and fabrication of electrodes with gradients |
JP2013522859A (ja) | 2010-03-22 | 2013-06-13 | アンプリウス、インコーポレイテッド | 電気化学的活物質のナノ構造の相互接続 |
US20110143263A1 (en) | 2010-04-29 | 2011-06-16 | Ford Global Technologies, Llc | Catalyst Layer Having Thin Film Nanowire Catalyst and Electrode Assembly Employing the Same |
US20110309306A1 (en) * | 2010-04-30 | 2011-12-22 | University Of Southern California | Fabrication of Silicon Nanowires |
WO2011149958A2 (en) * | 2010-05-24 | 2011-12-01 | Amprius, Inc. | Multidimensional electrochemically active structures for battery electrodes |
CN101986447A (zh) | 2010-05-25 | 2011-03-16 | 耿世达 | 一种锂离子电池高能复合负极材料及其制备方法 |
GB201009519D0 (en) | 2010-06-07 | 2010-07-21 | Nexeon Ltd | An additive for lithium ion rechargeable battery cells |
JP5128695B2 (ja) | 2010-06-28 | 2013-01-23 | 古河電気工業株式会社 | 電解銅箔、リチウムイオン二次電池用電解銅箔、該電解銅箔を用いたリチウムイオン二次電池用電極、該電極を使用したリチウムイオン二次電池 |
JP2012013913A (ja) | 2010-06-30 | 2012-01-19 | Suncall Corp | 光コネクタ |
US9325014B2 (en) | 2010-08-27 | 2016-04-26 | The Research Foundation Of State University Of New York | Branched nanostructures for battery electrodes |
US20120094192A1 (en) | 2010-10-14 | 2012-04-19 | Ut-Battelle, Llc | Composite nanowire compositions and methods of synthesis |
WO2012054767A2 (en) | 2010-10-22 | 2012-04-26 | Amprius Inc. | Battery electrode structures for high mass loadings of high capacity active materials |
KR101858282B1 (ko) | 2010-10-22 | 2018-05-15 | 암프리우스, 인코포레이티드 | 껍질에 제한된 고용량 활물질을 함유하는 복합 구조물 |
US20130004657A1 (en) | 2011-01-13 | 2013-01-03 | CNano Technology Limited | Enhanced Electrode Composition For Li ion Battery |
JP5606390B2 (ja) * | 2011-05-16 | 2014-10-15 | 株式会社東芝 | 不揮発性抵抗変化素子 |
EP2727175A4 (en) * | 2011-07-01 | 2015-07-01 | Amprius Inc | ELECTRODE TEMPLATE STRUCTURES WITH IMPROVED ADHESION PROPERTIES |
KR101890742B1 (ko) | 2011-07-19 | 2018-08-23 | 삼성전자주식회사 | 다층금속나노튜브를 포함하는 음극활물질, 이를 포함하는 음극과 리튬전지 및 음극활물질 제조방법 |
KR20130059472A (ko) | 2011-11-28 | 2013-06-07 | 삼성에스디아이 주식회사 | 음극 활물질 및 이를 채용한 리튬 전지 |
JP2015020921A (ja) | 2013-07-17 | 2015-02-02 | 古河電気工業株式会社 | シリコンナノワイヤ、シリコンナノワイヤ構造体及びその製造方法並びに非水電解質二次電池 |
KR102553839B1 (ko) | 2015-12-24 | 2023-07-10 | 삼성전자주식회사 | 리튬이차전지 |
WO2020172564A1 (en) | 2019-02-22 | 2020-08-27 | Amprius, Inc. | Compositionally modified silicon coatings for use in a lithium ion battery anode |
-
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Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006269306A (ja) * | 2005-03-25 | 2006-10-05 | Sanyo Electric Co Ltd | リチウム二次電池用電極およびその製造方法 |
JP2009117165A (ja) * | 2007-11-06 | 2009-05-28 | Toyota Central R&D Labs Inc | リチウム2次電池用電極及びリチウム2次電池 |
US20110027655A1 (en) * | 2008-02-25 | 2011-02-03 | Ronald Anthony Rojeski | Electrodes Including Collar Stop |
JP2011108639A (ja) * | 2009-10-22 | 2011-06-02 | Ronald Anthony Rojeski | カラーストップを含む電極 |
US20110151290A1 (en) * | 2009-12-18 | 2011-06-23 | Cui li-feng | Crystalline-amorphous nanowires for battery electrodes |
US20120070741A1 (en) * | 2010-03-03 | 2012-03-22 | Amprius, Inc. | High capacity battery electrode structures |
JP2013521621A (ja) * | 2010-03-03 | 2013-06-10 | アンプリウス、インコーポレイテッド | 活性材料を堆積させるためのテンプレート電極構造 |
US20140096819A1 (en) * | 2011-05-27 | 2014-04-10 | REC Modules Pte., Ltd. | Solar cell and method for producing same |
JP2013065547A (ja) * | 2011-08-31 | 2013-04-11 | Semiconductor Energy Lab Co Ltd | 蓄電装置及びその作製方法 |
WO2013096931A1 (en) * | 2011-12-21 | 2013-06-27 | Rojeski Ronald | Energy storage devices |
WO2014008433A1 (en) * | 2012-07-03 | 2014-01-09 | Catalyst Power Technologies, Inc. | Hybrid energy storage devices including support filaments |
JP2017521812A (ja) * | 2014-05-12 | 2017-08-03 | アンプリウス、インコーポレイテッド | ナノワイヤ上への構造的に制御されたシリコンの堆積 |
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