JP2019139236A - ミラーユニットの製造方法 - Google Patents
ミラーユニットの製造方法 Download PDFInfo
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Abstract
Description
[光モジュールの構成]
[ミラーユニットの構成]
[第1支持構造及びビームスプリッタユニットの構成]
[第2支持構造及び光入射部等の構成]
[作用及び効果]
[変形例]
Claims (4)
- 第1表面、及び前記第1表面とは反対側の第2表面を有するベース、並びに、前記第1表面と交差する第1方向に沿って移動可能となるように前記ベースにおいて支持された可動ミラーを含むミラーデバイスと、
前記ベースの前記第1表面に接合された第1部材と、
前記ベースの前記第2表面に接合された第2部材と、を備え、
前記ベース、前記第1部材及び前記第2部材によって形成された気密空間に、少なくとも前記可動ミラーが配置されたミラーユニットの製造方法であって、
それぞれが前記第1部材となる複数の部分を含む第1ウェハ、それぞれが前記第2部材となる複数の部分を含む第2ウェハ、及びそれぞれが前記ミラーデバイスとなる複数の部分を含む第3ウェハの準備、1つの前記第1部材と1つの前記ミラーデバイスとが互いに対応する前記第1ウェハと前記第3ウェハとの接合、並びに、1つの前記第2部材と1つの前記ミラーデバイスとが互いに対応する前記第2ウェハと前記第3ウェハとの接合を実施する第1工程と、
前記第1工程の後に、それぞれが前記ミラーユニットとなる複数の部分を含み且つ互いに接合された前記第1ウェハ、前記第2ウェハ及び前記第3ウェハを複数の前記ミラーユニットに切断する第2工程と、を備える、ミラーユニットの製造方法。 - 前記第1工程においては、前記第1ウェハと前記第3ウェハとをダイレクトボンディングによって互いに接合し、前記第2ウェハと前記第3ウェハとをダイレクトボンディングによって互いに接合する、請求項1に記載のミラーユニットの製造方法。
- 前記第2部材は、
前記第1方向から見た場合に少なくとも前記可動ミラーを包囲するように形成された枠体と、
前記枠体における前記ミラーデバイスとは反対側の開口を塞ぐように形成され光透過部材と、を有し、
前記第1工程においては、それぞれが前記枠体となる複数の部分を含む第4ウェハ、及びそれぞれが前記光透過部材となる複数の部分を含む第5ウェハの準備、並びに、1つの前記枠体と1つの前記光透過部材とが互いに対応する前記第4ウェハと前記第5ウェハとの接合を実施することで、前記第2ウェハを準備する、請求項1又は2に記載のミラーユニットの製造方法。 - 前記第1工程においては、前記第4ウェハと前記第5ウェハとをダイレクトボンディングによって互いに接合する、請求項3に記載のミラーユニットの製造方法。
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